CN117823411A - Pressure balancing device for dry screw vacuum pump and operation method thereof - Google Patents
Pressure balancing device for dry screw vacuum pump and operation method thereof Download PDFInfo
- Publication number
- CN117823411A CN117823411A CN202410007899.3A CN202410007899A CN117823411A CN 117823411 A CN117823411 A CN 117823411A CN 202410007899 A CN202410007899 A CN 202410007899A CN 117823411 A CN117823411 A CN 117823411A
- Authority
- CN
- China
- Prior art keywords
- filter
- joint
- air
- cavity
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 9
- 238000001914 filtration Methods 0.000 claims abstract description 35
- 229920000742 Cotton Polymers 0.000 claims abstract description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000000741 silica gel Substances 0.000 claims abstract description 11
- 229910002027 silica gel Inorganic materials 0.000 claims abstract description 11
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 11
- 239000010935 stainless steel Substances 0.000 claims abstract description 11
- 239000003595 mist Substances 0.000 claims description 17
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000005299 abrasion Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 3
- 230000029058 respiratory gaseous exchange Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressor (AREA)
Abstract
The invention relates to a pressure balancing device for a dry screw vacuum pump and a method for operating the same. The invention comprises an air outlet pipe and is characterized in that: the filter comprises a filter base, a filter joint, filter cotton, a silica gel gasket, a stainless steel gasket, a filter element, a pipe joint and an air inlet pipe, wherein the filter base and the filter joint are fixed and form a filter cavity; one end of the air outlet pipe is connected to the oil tank cavity of the rear cover plate through a pipe joint, and the other end of the air outlet pipe is connected to the filtering joint through a pipe joint and is communicated with the filtering cavity; one end of the air inlet pipe is connected to the air suction cavity of the shell through a pipe joint, and the other end of the air inlet pipe is connected to the filtering base through a pipe joint and is communicated with the filtering cavity. The invention has reasonable structural design, ensures that the pressure in the shell and the back cover plate is in a balanced state, and slows down the abrasion of the oil seal.
Description
Technical Field
The invention relates to the technical field of pressure balance, in particular to a pressure balance device for a dry screw vacuum pump and an operation method thereof, which are mainly used for balancing the pressure between a shell and a rear cover plate of the dry oilless vacuum pump.
Background
The vacuum pump is a device or equipment for extracting and compressing a medium from a container to obtain vacuum, and currently, the rotary vacuum pump is classified into an oil seal type vacuum pump, a liquid ring vacuum pump, a dry type vacuum pump, and a Roots vacuum pump. The dry vacuum pump is mainly suitable for process occasions needing oil-free clean vacuum environment in the semiconductor industry, the chemical industry, the pharmaceutical industry, the food industry and the like.
The dry screw vacuum pump has the following problems: 1. the pressure of the dry screw vacuum pump shell and the pressure of the rear cover plate are unbalanced, and pressure difference exists, so that abrasion of an oil seal is accelerated; 2. the dry screw vacuum pump housing and the back cover plate are perforated so that the pressure in the two chambers is balanced, but the oil of the back cover plate may be atomized to enter the housing through the holes.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides a pressure balancing device for a dry screw vacuum pump and an operation method thereof, wherein the pressure balancing device has reasonable structural design, ensures that the pressure in a shell and a rear cover plate is in a balanced state, and slows down the abrasion of an oil seal.
The invention solves the problems by adopting the following technical scheme: the pressure balancing device for the dry screw vacuum pump comprises an air outlet pipe and is characterized in that: the filter comprises a filter base, a filter joint, filter cotton, a silica gel gasket, a stainless steel gasket, a filter element, a pipe joint and an air inlet pipe, wherein the filter base and the filter joint are fixed, a filter cavity is formed between the filter base and the filter joint, the filter cotton, the silica gel gasket, the stainless steel gasket and the filter element are all arranged in the filter cavity, and the filter cotton, the silica gel gasket, the stainless steel gasket and the filter element are sequentially arranged along the direction from the filter joint to the filter base; one end of the air outlet pipe is connected to the oil tank cavity of the rear cover plate of the dry screw vacuum pump through a pipe joint, and the other end of the air outlet pipe is connected to the filtering joint through a pipe joint and is communicated with the filtering cavity; one end of the air inlet pipe is connected to the air suction cavity of the shell of the dry screw vacuum pump through a pipe joint, and the other end of the air inlet pipe is connected to the filtering base through a pipe joint and is communicated with the filtering cavity.
Preferably, the invention further comprises a spring mounted within the filter chamber, the spring being located between the filter cartridge and the filter base.
Preferably, the filter joint comprises an O-shaped ring.
Preferably, the filter base and the filter joint are fixed through threads.
Preferably, the number of the filter cotton layers is 2-6.
Preferably, the pipe joint at one end of the air outlet pipe is connected to the oil tank cavity of the rear cover plate through threads, and the pipe joint at the other end of the air outlet pipe is connected to the filtering joint through threads; the pipe joint at one end of the air inlet pipe is connected to the air suction cavity of the shell through threads, and the pipe joint at the other end of the air inlet pipe is connected to the filtering base through threads.
The operation method of the pressure balancing device for the dry screw vacuum pump is characterized in that: when the dry screw vacuum pump operates, the pressure balancing device is communicated with the air suction cavity of the shell and the oil tank cavity of the rear cover plate, the air pressure in the oil tank cavity is higher than the air pressure in the air suction cavity, air in the oil tank cavity enters the air outlet pipe of the pressure balancing device, the air firstly passes through the filter cotton, the filter cotton can adsorb most of oil mist in the air, the filtered air passes through the filter element, the filter element has good filtering performance, the rest oil mist is separated from the air, the oil mist is isolated in the filter element, the air passing through the air inlet pipe enters the air suction cavity of the shell, and therefore the pressure between the oil tank cavity of the rear cover plate and the air suction cavity of the shell reaches an equilibrium state.
Compared with the prior art, the invention has the following advantages and effects: 1. adopt filter pulp and filter core, the oil mist in the secondary filtration gas avoids the oil mist to get into the chamber of breathing in of casing, guarantees the clear vacuum environment of oilless, guarantees that the pressure in casing and the back shroud is in balanced state, has slowed down the wearing and tearing of oil blanket, has improved the life of oil blanket. 2. The pipe is connected by screw threads, so that the sealing performance is good, the structure is simple, and the installation is convenient. 3. The structure of the parts is compact, and the occupied space is reduced. 4. Through pressure balance, the problem of pressure difference between the oil tank cavity and the air suction port of the vacuum pump is solved, leakage caused by pressure release from a shaft sealing part is avoided, and the problem that sealing damage is easily caused due to large pressure difference on two sides of a contact seal is avoided.
Drawings
In order to more clearly illustrate the embodiments of the invention and/or the technical solutions of the prior art, the drawings that are required in the description of the embodiments and/or the prior art will be briefly described below, it being obvious that the drawings in the description below are only some embodiments of the invention and that other drawings may be obtained from these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic view showing a structure in which a pressure balancing apparatus according to an embodiment of the present invention is mounted on a dry screw vacuum pump.
Fig. 2 is an enlarged schematic view of the main body of the pressure balancing apparatus according to the embodiment of the present invention.
In the figure: 1-a filtering base; 2-a filter joint; 3-filtering cotton; 4-a silica gel gasket; 5-stainless steel gaskets; 6, a filter element; 7-a spring; 8-pipe joints; 9, an air inlet pipe; 10-an oil tank cavity; 11-an air suction cavity; 12-an air outlet pipe; 13-a back cover plate; 14-a housing; 15-filter chamber.
Detailed Description
The present invention will be described in further detail by way of examples with reference to the accompanying drawings, which are illustrative of the present invention and not limited to the following examples.
Examples.
Referring to fig. 1 to 2, the pressure balancing device for a dry screw vacuum pump in the present embodiment includes a filter base 1, a filter joint 2, filter cotton 3, a silica gel pad 4, a stainless steel pad 5, a filter element 6, a spring 7, a pipe joint 8, an air inlet pipe 9 and an air outlet pipe 12, wherein the number of the filter cotton 3 is usually 2 to 6 layers, preferably 4 layers.
The filter joint 2 of this embodiment includes an O-ring, the filter base 1 and the filter joint 2 are fixed, and a filter cavity 15 is formed between the filter base 1 and the filter joint 2, and the filter base 1 and the filter joint 2 are usually fixed by threads, so that the disassembly and assembly are convenient. The filter cotton 3, the silica gel pad 4, the stainless steel pad 5, the filter element 6 and the spring 7 in this embodiment are all installed in the filter cavity 15, and the filter cotton 3, the silica gel pad 4, the stainless steel pad 5, the filter element 6 and the spring 7 are sequentially arranged along the direction from the filter joint 2 to the filter base 1. The spring 7 is used for supporting the filter element 6, meets the force value requirement of accurate and controllable, and has simple structure and convenient use.
One end of an air outlet pipe 12 in the embodiment is connected to an oil tank cavity 10 of a rear cover plate 13 of the dry screw vacuum pump through a pipe joint 8, and the other end of the air outlet pipe 12 is connected to the filter joint 2 through the pipe joint 8 and is communicated with a filter cavity 15. One end of the air inlet pipe 9 in the embodiment is connected to the air suction cavity 11 of the shell 14 of the dry screw vacuum pump through the pipe joint 8, and the other end of the air inlet pipe 9 is connected to the filter base 1 through the pipe joint 8 and is communicated with the filter cavity 15.
Normally, the pipe joint 8 at one end of the air outlet pipe 12 is connected to the oil tank cavity 10 of the back cover plate 13 through threads, and the pipe joint 8 at the other end of the air outlet pipe 12 is connected to the filter joint 2 through threads; the pipe joint 8 at one end of the air inlet pipe 9 is connected to the air suction cavity 11 of the shell 14 through threads, and the pipe joint 8 at the other end of the air inlet pipe 9 is connected to the filtering base 1 through threads.
The operation method of the pressure balancing device for the dry screw vacuum pump in this embodiment is as follows: when the dry screw vacuum pump operates, the pressure balancing device is communicated with the air suction cavity 11 of the shell 14 and the oil tank cavity 10 of the rear cover plate 13, the air pressure in the oil tank cavity 10 is higher than the air pressure in the air suction cavity 11, the air in the oil tank cavity 10 enters the air outlet pipe 12 of the pressure balancing device, the air firstly passes through the filter cotton 3, the filter cotton 3 can adsorb most of oil mist in the air, the filtered air passes through the filter element 6 again, the filter element 6 has good filtering performance, the rest oil mist is separated from the air, the oil mist is isolated in the filter element 6, the air after secondary filtration enters the air suction cavity 11 of the shell 14 through the air inlet pipe 9, and therefore the pressure between the oil tank cavity 10 of the rear cover plate 13 and the air suction cavity 11 of the shell 14 reaches an equilibrium state.
The filter base 1 and the filter joint 2 in the embodiment are convenient to detach, and the gas of the rear cover plate 13 passes through the filter joint 2, and then passes through the filter cotton 4 and the filter element 6, and is finally communicated with the air suction cavity 11 of the shell 14 through layer-by-layer filtration, so that the structure is compact, and the occupied space is reduced. Through outlet duct 12, intake pipe 9 and coupling 8, intercommunication oil tank cavity 10, chamber of breathing in 11 and filtration pipeline, make reaching pressure balance between two cavitys to avoid the oil mist in the oil tank cavity 10 to get into the chamber of breathing in 11 through the filtration pipeline. The filtering base 1 and the filtering joint 2 are connected through pipe threads, so that the connection strength is improved, the reliability is good, the processing difficulty is low, and the installation and the disassembly are convenient. The filter joint 2 comprises an O-shaped ring, so that the tightness is high, and the vacuum degree is not easily influenced by leakage.
The filter cotton 3 in this embodiment can be fine permeate air, has fine ventilative function, has fine intensity and durability, can use for a long time, can absorb moisture and also can isolate the oil mist, effectively keeps apart in the back shroud the oil mist get into the vacuum pump shell, seals the vacuum pump shell, guarantees the interior dry of rotor cavity of vacuum pump shell, ensures the interior vacuum environment of rotor cavity of vacuum pump shell. The filter element 6 has good filtering performance, excellent separation effect, large effective filtering area and strong dirt holding capacity, and can exert uniform surface filtering performance on the filtering granularity of 2-200 mu m. High strength, and high mechanical strength and compression strength. The surface filtering structure has excellent countercurrent cleaning effect, so that the cleaning is simple and the surface filtering structure can be repeatedly used.
In this embodiment, the cavities of the shell 14 and the back cover plate 13 are communicated through the pressure balancing device, the gas of the back cover plate 13 passes through the four layers of filter cotton 3 to adsorb oil mist in the gas, then passes through the filter element 6 to secondarily filter the oil mist in the gas, isolates the oil mist in the filter element 6, and finally passes through the suction cavity 11 of the shell 14, so that the internal pressures of the two cavities reach an equilibrium state.
In addition, it should be noted that the specific embodiments described in the present specification may vary from part to part, from name to name, etc., and the above description in the present specification is merely illustrative of the structure of the present invention. All equivalent or simple changes of the structure, characteristics and principle according to the inventive concept are included in the protection scope of the present patent. Those skilled in the art may make various modifications or additions to the described embodiments or substitutions in a similar manner without departing from the scope of the invention as defined in the accompanying claims.
Claims (7)
1. A pressure balancing device for a dry screw vacuum pump, comprising an outlet duct (12), characterized in that: still including filtering base (1), filter joint (2), filter cotton (3), silica gel gasket (4), stainless steel gasket (5), filter core (6), coupling (8) and intake pipe (9), it is fixed to filter base (1) and filter joint (2), and forms filter chamber (15) between filter base (1) and filter joint (2), filter cotton (3), silica gel gasket (4), stainless steel gasket (5) and filter core (6) are all installed in filter chamber (15), and this filter cotton (3), silica gel gasket (4), stainless steel gasket (5) and filter core (6) are arranged in proper order along the direction from filter joint (2) to filter base (1); one end of the air outlet pipe (12) is connected to an oil tank cavity (10) of a rear cover plate (13) of the dry screw vacuum pump through a pipe joint (8), and the other end of the air outlet pipe (12) is connected to the filter joint (2) through the pipe joint (8) and is communicated with the filter cavity (15); one end of the air inlet pipe (9) is connected to an air suction cavity (11) of a shell (14) of the dry screw vacuum pump through a pipe joint (8), and the other end of the air inlet pipe (9) is connected to the filtering base (1) through the pipe joint (8) and is communicated with the filtering cavity (15).
2. The pressure balancing device for a dry screw vacuum pump according to claim 1, wherein: the filter further comprises a spring (7), wherein the spring (7) is arranged in the filter cavity (15), and the spring (7) is positioned between the filter element (6) and the filter base (1).
3. The pressure balancing device for a dry screw vacuum pump according to claim 1, wherein: the filter joint (2) comprises an O-shaped ring.
4. The pressure balancing device for a dry screw vacuum pump according to claim 1, wherein: the filtering base (1) and the filtering joint (2) are fixed through threads.
5. The pressure balancing device for a dry screw vacuum pump according to claim 1, wherein: the number of the filter cotton (3) is 2-6 layers.
6. The pressure balancing device for a dry screw vacuum pump according to claim 1, wherein: the pipe joint (8) positioned at one end of the air outlet pipe (12) is connected to the oil tank cavity (10) of the rear cover plate (13) through threads, and the pipe joint (8) positioned at the other end of the air outlet pipe (12) is connected to the filter joint (2) through threads; the pipe joint (8) positioned at one end of the air inlet pipe (9) is connected to the air suction cavity (11) of the shell (14) through threads, and the pipe joint (8) positioned at the other end of the air inlet pipe (9) is connected to the filtering base (1) through threads.
7. A method of operating a pressure balancing device for a dry screw vacuum pump as claimed in any one of claims 1 to 6, characterized in that: when the dry screw vacuum pump operates, the pressure balancing device is communicated with the air suction cavity (11) of the shell (14) and the oil tank cavity (10) of the rear cover plate (13), the air pressure in the oil tank cavity (10) is higher than the air pressure in the air suction cavity (11), air in the oil tank cavity (10) enters the air outlet pipe (12) of the pressure balancing device, the air firstly passes through the filter cotton (3), the filter cotton (3) can adsorb most of oil mist in the air, the filtered air passes through the filter element (6), the filter element (6) has good filtering performance, the rest oil mist is separated from the air, the oil mist is isolated in the filter element (6), the secondarily filtered air enters the air suction cavity (11) of the shell (14) through the air inlet pipe (9), and therefore the pressure between the oil tank cavity (10) of the rear cover plate (13) and the air suction cavity (11) of the shell (14) reaches a balanced state.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322654072 | 2023-09-28 | ||
| CN2023226540725 | 2023-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117823411A true CN117823411A (en) | 2024-04-05 |
Family
ID=90509576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410007899.3A Pending CN117823411A (en) | 2023-09-28 | 2024-01-03 | Pressure balancing device for dry screw vacuum pump and operation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117823411A (en) |
-
2024
- 2024-01-03 CN CN202410007899.3A patent/CN117823411A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPWO2020084568A5 (en) | ||
| CN117823411A (en) | Pressure balancing device for dry screw vacuum pump and operation method thereof | |
| CN202597110U (en) | Oil mist filter for vacuum pump | |
| CN209704841U (en) | A kind of big pressure difference roots vacuum pump of modified | |
| WO2013018142A1 (en) | Airtight diagnostic device | |
| WO2020248623A1 (en) | Water-lubricated screw air compressor | |
| CN220677137U (en) | Inlet air filtering structure of oil-free vacuum compressor | |
| CN102410180A (en) | Air Compressor Having Improved Air Cooling Function | |
| CN212712969U (en) | Waste water and waste gas filtering device of environmental equipment liquid-liquid extraction instrument | |
| CN201560945U (en) | Integrated oil-gas separation device of air compressor | |
| CN209012066U (en) | A kind of Roots vacuum system | |
| CN208578653U (en) | A kind of self-fractionating pump with pressure sensor and discharge of steam pressure monitoring system | |
| CN108757461A (en) | A kind of self-lubricating type vacuum pump | |
| CN202105551U (en) | Gas-liquid separator | |
| CN109026852B (en) | Compressor with multi-stage filtering device | |
| CN214680872U (en) | Gas-oil separating device for rotary blower | |
| CN217029221U (en) | Oil-free air compressor's leak protection gas sealing device | |
| EP2553272B1 (en) | Scroll compressor with an integrated inlet filter | |
| CN214464801U (en) | Filter for compressor | |
| CN209083572U (en) | A kind of screw air compressing machine oil respirator | |
| CN208534728U (en) | A kind of Miniature electric air pump of band filtering | |
| JPH0716069Y2 (en) | Compressor | |
| CN220134148U (en) | Detachable filter for vacuum pump | |
| CN210317688U (en) | Air compressor filter equipment | |
| CN216241205U (en) | Dual-purpose inflating pump with double filters |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |