CN117813362A

CN117813362A - Surface treating agent

Info

Publication number: CN117813362A
Application number: CN202280056063.1A
Authority: CN
Inventors: 山下恒雄; 前平健; 片冈真奈美; 内藤真人; 三桥尚志; 山口史彦
Original assignee: Daikin Industries Ltd
Current assignee: Daikin Industries Ltd
Priority date: 2021-08-26
Filing date: 2022-08-12
Publication date: 2024-04-02
Also published as: WO2023026876A1; KR20240035557A; JP7295481B2; JP2023033164A; TW202328278A

Abstract

The invention provides a surface treating agent containing a fluorinated polyether silane compound and a lower fluoroalkyl alcohol, wherein the content of the lower fluoroalkyl alcohol is below 30 parts by mass relative to 100 parts by mass of the fluorinated polyether silane compound.

Description

Surface treating agent

Technical Field

The present invention relates to a surface treatment agent.

Background

It is known that certain types of fluorinated polyether silane compounds provide excellent water repellency, oil repellency, stain resistance, and the like when used for the surface treatment of a substrate. A layer obtained from a surface treatment agent containing a fluorinated polyether silane compound (hereinafter also referred to as "surface treatment layer") is applied as a so-called functional film to various substrates such as glass, plastics, fibers, sanitary products, and building materials (patent document 1).

Prior art literature

Patent literature

Patent document 1: japanese patent application laid-open No. 2015-224293

Patent document 2: japanese patent laid-open publication 2016-132719

Disclosure of Invention

Technical problem to be solved by the invention

The fluorinated polyether silane compounds described in patent documents 1 and 2 can provide a surface-treated layer having an excellent function, but a surface-treated layer having higher wear durability is still demanded.

The purpose of the present invention is to provide a surface treatment agent which can form a surface treatment layer having higher wear durability.

Technical scheme for solving technical problems

The present invention includes the following means.

[1] A surface treatment agent comprising a fluorinated polyether silane compound and a lower fluoroalkyl alcohol, wherein the content of the lower fluoroalkyl alcohol is 30 parts by mass or less per 100 parts by mass of the fluorinated polyether silane compound.

[2] The surface treating agent according to the above [1], wherein the fluorinated polyether silane compound is at least 1 fluorinated polyether silane compound represented by the following formula (1) or (2).

R ^F1 _α -X ^A -R ^Si _β (1)

R ^Si _γ -X ^A -R ^F2 -X ^A -R ^Si γ (2)

[ in the above-mentioned, a method for producing a semiconductor device,

R ^F1 each occurrence is independently Rf ¹ －R ^F －O _q －；

R ^F2 is-Rf ² _p －R ^F －O _q －；

Rf ¹ Each occurrence is independently C which may be substituted with 1 or more fluorine atoms _1－16 An alkyl group;

Rf ² is C which may be substituted by 1 or more fluorine atoms _1－6 An alkylene group;

R ^F each independently at each occurrence a 2-valent fluoropolyether group;

p is 0 or 1;

q is independently 0 or 1 for each occurrence;

R ^Si each occurrence of which is independently a 1-valent group comprising a Si atom to which a hydroxyl group, a hydrolyzable group, a hydrogen atom, or a 1-valent organic group is bonded;

At least 1R ^Si A 1-valent group comprising a Si atom to which a hydroxyl group or a hydrolyzable group is bonded;

X ^A each independently is a single bond or a 2-10 valent organic group;

alpha is an integer of 1 to 9;

beta is an integer of 1 to 9;

gamma is an integer of 1 to 9. ]

[3]As described above [2]The surface treating agent, wherein Rf ¹ Each occurrence is independently C _1－16 Perfluoroalkyl group, rf ² Each occurrence is independently C _1－6 A perfluoroalkylene group.

[4]As described above [2]Or [3 ]]The surface treating agent, wherein R ^F Each occurrence is independently of the formula: - (OC) ₆ F ₁₂ ) _a －(OC ₅ F ₁₀ ) _b －(OC ₄ F ₈ ) _c －(OC ₃ R ^Fa ₆ ) _d －(OC ₂ F ₄ ) _e －(OCF ₂ ) _f -the group shown.

[ formula, R ^Fa Each independently at each occurrence is a hydrogen atom, a fluorine atom or a chlorine atom,

a. b, c, d, e and f are each independently an integer of 0 to 200, the sum of a, b, c, d, e and f being 1 or more, the order in which the repeating units a, b, c, d, e or f are present in the formula, bracketed by brackets, is arbitrary, but in all R ^Fa In the case of a hydrogen atom or a chlorine atom, at least 1 of a, b, c, e and f is 1 or more.]

[5]As described above [4 ]]The surface treating agent, wherein R ^Fa Is a fluorine atom.

[6]As described above [2]Or [3 ]]The surface treating agent, wherein R ^F Each occurrence is independently a group represented by the following formula (f 1), (f 2), (f 3), (f 4), (f 5), or (f 6).

－(OC ₃ F ₆ ) _d －(OC ₂ F ₄ ) _e － (f1)

[ wherein d is an integer of 1 to 200, and e is 0 or 1.]

－(OC ₄ F ₈ ) _c －(OC ₃ F ₆ ) _d －(OC ₂ F ₄ ) _e －(OCF ₂ ) _f － (f2)

[ wherein c and d are each independently an integer of 0 to 30;

e and f are each independently integers from 1 to 200;

c. d, e and f are integers from 10 to 200;

the order of the presence of the repeating units in the formula, denoted by the subscripts c, d, e, or f and bracketed, is arbitrary. ]

－(R ⁶ －R ⁷ ) _g － (f3)

[ formula, R ⁶ Is OCF ₂ Or OC (alpha) ₂ F ₄ ；

R ⁷ Is selected from OC ₂ F ₄ 、OC ₃ F ₆ 、OC ₄ F ₈ 、OC ₅ F ₁₀ And OC ₆ F ₁₂ Or a combination of 2 or 3 groups selected from these groups;

g is an integer of 2 to 100. ]

－(R ⁶ －R ⁷ ) _g －R ^r －(R ^7′ －R ^6′ ) _g′ － (f4)

[ formula, R ⁶ Is OCF ₂ Or OC (alpha) ₂ F ₄ ，

R ⁷ Is selected from OC ₂ F ₄ 、OC ₃ F ₆ 、OC ₄ F ₈ 、OC ₅ F ₁₀ And OC ₆ F ₁₂ Or a combination of 2 or 3 groups independently selected from these groups,

R ^6′ is OCF ₂ Or OC (alpha) ₂ F ₄ ，

R ^7′ Is selected from OC ₂ F ₄ 、OC ₃ F ₆ 、OC ₄ F ₈ 、OC ₅ F ₁₀ And OC ₆ F ₁₂ Or a combination of 2 or 3 groups independently selected from these groups,

g is an integer of 2 to 100,

g' is an integer of 2 to 100,

R ^r is that

(wherein, represents a bonding position.)

－(OC ₆ F ₁₂ ) _a －(OC ₅ F ₁₀ ) _b －(OC ₄ F ₈ ) _c －(OC ₃ F ₆ ) _d －(OC ₂ F ₄ ) _e －(OCF ₂ ) _f － (f5)

[ wherein e is an integer of 1 to 200, a, b, c, d and f are each independently an integer of 0 to 200, and the order in which the repeating units represented by a, b, c, d, e or f and bracketed by brackets are present in the formula is arbitrary. ]

－(OC ₆ F ₁₂ ) _a －(OC ₅ F ₁₀ ) _b －(OC ₄ F ₈ ) _c －(OC ₃ F ₆ ) _d －(OC ₂ F ₄ ) _e －(OCF ₂ ) _f － (f6)

[ wherein f is an integer of 1 to 200, a, b, c, d and e are each independently an integer of 0 to 200, and the order in which the repeating units represented by a, b, c, d, e or f and bracketed by brackets are present in the formula is arbitrary. ]

[7]As described above [2]～[6]The surface treatment agent according to any one of claims, wherein R ^Si Is a group represented by the following formula (S1), (S2), (S3), (S4) or (S5).

-SiR ¹¹ _n1 R ¹² _3-n1 (S2)

-SiR ^a1 _k1 R ^b1 ₁₁ R ^c1 _m1 (S3)

-CR ^d1 _k2 R ^e1 ₁₂ R ^f1 _m2 (S4)

-NR ^g1 R ^h1 (S5)

[ in the above-mentioned, a method for producing a semiconductor device,

R ¹¹ each of which is independently a hydroxyl group or a hydrolyzable group at each occurrence;

R ¹² each occurrence of which is independently a hydrogen atom or a 1-valent organic group;

n1 is defined in each (SiR ¹¹ _n1 R ¹² _3-n1 ) Each of the units is independently an integer of 0 to 3;

X ¹¹ each independently at each occurrence is a single bond or a 2-valent organic group;

R ¹³ each occurrence of which is independently a hydrogen atom or a 1-valent organic group;

t is independently an integer of 2 or more for each occurrence;

R ¹⁴ each occurrence of which is independently a hydrogen atom, a halogen atom or-X ¹¹ -SiR ¹¹ _n1 R ¹² _3-n1 ；

R ¹⁵ Each occurrence of which is independently a single bond, an oxygen atom, an alkylene group having 1 to 6 carbon atoms or an alkyleneoxy group having 1 to 6 carbon atoms;

R ^a1 each occurrence is independently-Z ¹ -SiR ²¹ _p1 R ²² _q1 R ²³ r ₁ ；

Z ¹ Each occurrence of which is independently an oxygen atom or a 2-valent organic group;

R ²¹ each occurrence is independently-Z ^1′ -SiR ^21′ _p1′ R ^22′ _q1′ R ^23′ _r1′ ；

R ²² Each of which is independently a hydroxyl group or a hydrolyzable group at each occurrence;

R ²³ each occurrence of which is independently a hydrogen atom or a valence of 1An organic group;

p1 is independently at each occurrence an integer from 0 to 3;

q1 is independently at each occurrence an integer from 0 to 3;

r1 is independently at each occurrence an integer from 0 to 3;

the sum of p1, q1 and r1 is SiR ²¹ _p1 R ²² _q1 R ²³ _r1 3 in the unit;

Z ^1′ each occurrence of which is independently an oxygen atom or a 2-valent organic group;

R ^21′ each occurrence is independently-Z ^1″ －SiR ^22″ _q1″ R ^23″ _r1″ ；

R ^22′ Each of which is independently a hydroxyl group or a hydrolyzable group at each occurrence;

R ^23′ each occurrence of which is independently a hydrogen atom or a 1-valent organic group;

p1' is independently at each occurrence an integer from 0 to 3;

q1' is independently at each occurrence an integer from 0 to 3;

r1' is independently at each occurrence an integer from 0 to 3;

the sum of p1', q1' and r1' is SiR ^21′ _p1′ R ^22′ _q1′ R ^23′ _r1′ 3 in the unit;

Z ^1″ each occurrence of which is independently an oxygen atom or a 2-valent organic group;

R ^22″ each of which is independently a hydroxyl group or a hydrolyzable group at each occurrence;

R ^23″ each occurrence of which is independently a hydrogen atom or a 1-valent organic group;

q1 "is independently at each occurrence an integer from 0 to 3;

r1' is independently at each occurrence an integer from 0 to 3;

the combination of q1 'and r1'Measured at SiR ^22″ _q1″ R ^23″ _r1″ 3 in the unit;

R ^b1 each of which is independently a hydroxyl group or a hydrolyzable group at each occurrence;

R ^c1 Each occurrence of which is independently a hydrogen atom or a 1-valent organic group;

k1 is independently at each occurrence an integer from 0 to 3;

l1 is independently at each occurrence an integer from 0 to 3;

m1 is independently at each occurrence an integer from 0 to 3;

the sum of k1, l1 and m1 is SiR ^a1 _k1 R ^b1 _l1 R ^c1 _m1 3 in the unit;

R ^d1 each occurrence is independently-Z ² －CR ³¹ _p2 R ³² _q2 R ³³ _r2 ；

Z ² Each occurrence of which is independently a single bond, an oxygen atom, or a 2-valent organic group;

R ³¹ each occurrence is independently-Z ^2′ －CR ^32′ _q2′ R ^33′ _r2′ ；

R ³² Each occurrence is independently-Z ³ －SiR ³⁴ _n2 R ³⁵ _3－n2 ；

R ³³ Each occurrence of which is independently a hydrogen atom, a hydroxyl group, or a 1-valent organic group;

p2 is independently at each occurrence an integer from 0 to 3;

q2 is independently at each occurrence an integer from 0 to 3;

r2 is independently at each occurrence an integer from 0 to 3;

the sum of p2, q2 and r2 is SiR ³¹ _p2 R ³² _q2 R ³³ _r2 3 in the unit;

Z ^2′ at each occurrence is independentlyThe standing is a single bond, an oxygen atom or a 2-valent organic group;

R ^32′ each occurrence is independently-Z ³ －SiR ³⁴ _n2 R ³⁵ _3－n2 ；

R ^33′ Each occurrence of which is independently a hydrogen atom, a hydroxyl group, or a 1-valent organic group;

q2' is independently at each occurrence an integer from 0 to 3;

r2' is independently at each occurrence an integer from 0 to 3;

q2 'and r2' add up to SiR ^32′ _q2′ R ^33′ _r2′ 3 in the unit;

Z ³ each occurrence of which is independently a single bond, an oxygen atom, or a 2-valent organic group;

R ³⁴ each of which is independently a hydroxyl group or a hydrolyzable group at each occurrence;

R ³⁵ each occurrence of which is independently a hydrogen atom or a 1-valent organic group;

n2 is independently at each occurrence an integer from 0 to 3;

R ^e1 each occurrence is independently-Z ³ －SiR ³⁴ _n2 R ³⁵ _3－n2 ；

R ^f1 Each occurrence of which is independently a hydrogen atom, a hydroxyl group, or a 1-valent organic group;

k2 is independently at each occurrence an integer from 0 to 3;

l2 is independently at each occurrence an integer from 0 to 3;

m2 is independently at each occurrence an integer from 0 to 3;

the sum of k2, l2 and m2 is CR ^d1 _k2 R ^e1 _l2 R ^f1 _m2 3 in the unit;

R ^g1 and R is ^h1 Each occurrence is independently-Z ⁴ －SiR ¹¹ _n1 R ¹² _3－n1 、－Z ⁴ －SiR ^a1 _k1 R ^b1 _l1 R ^c1 _m1 、－Z ⁴ －CR ^d1 _k2 R ^e1 _l2 R ^f1 _m2 ；

Z ⁴ Each occurrence of which is independently a single bond, an oxygen atom, or a 2-valent organic group;

wherein in the formulas (S1), (S2), (S3), (S4) and (S5), at least 1 Si atom to which a hydroxyl group or a hydrolyzable group is bonded is present. ]

[8] The surface treating agent according to any one of the above [2] to [7], wherein α, β and γ are 1.

[9]As described above [7 ]]Or [8 ]]The surface treating agent, wherein R ^Si Is of the formula (S3), (S4) or (S5).

[10]As described above [7 ]]～[9]The surface treatment agent according to any one of claims, wherein R ^Si Is of formula (S3).

[11]As described above [7 ]]The surface treating agent contains R ^Si A fluorinated polyether silane compound of the formula (S1), and R ^Si A fluoropolyether-based silane compound of the formula (S3), (S4) or (S5).

[12]As described above [7 ]]The surface treating agent contains R ^Si A fluorinated polyether silane compound of the formula (S1), and R ^Si Is a fluorinated polyether silane compound of formula (S3).

[13]As described above [7 ]]The surface treating agent contains R ^Si A fluorinated polyether silane compound of the formula (S1), and R ^Si Is a fluorinated polyether silane compound of formula (S4).

[14] The surface treatment agent according to any one of the above [1] to [13], wherein the content of the lower fluoroalkyl alcohol is 0.1 to 20 parts by mass per 100 parts by mass of the fluorinated polyether silane compound.

[15] The surface treatment agent according to any one of the above [1] to [14], wherein the content of the lower fluoroalkyl alcohol is 3.0 to 20 parts by mass per 100 parts by mass of the fluorinated polyether silane compound.

[16] The surface treatment agent according to any one of the above [1] to [15], wherein the lower fluoroalkyl alcohol is a fluoroalkyl alcohol having a pKa of 15.0 or less.

[17] The surface treatment agent according to any one of the above [1] to [16], wherein the lower fluoroalkyl alcohol is a fluoroalkyl alcohol having a pKa of 5.0 to 15.0.

[18]As described above [1]]～[17]The surface treating agent according to any one of the above, wherein the lower fluoroalkyl alcohol is represented by the following formula: CRf ⁴ _n4 H _3－n4 -fluoroalkyl alcohol represented by OH.

[ wherein Rf ⁴ Is a perfluoroalkyl group having 1 to 3 carbon atoms, and n4 is an integer of 1 to 3.]

[19] The surface treatment agent according to any one of the above [1] to [18], wherein the lower fluoroalkyl alcohol is a fluoroalkyl alcohol having 1 to 6 carbon atoms.

[20] The surface treating agent according to any one of the above [1] to [19], wherein the lower fluoroalkyl alcohol is hexafluoropropanol or hexafluoroisopropanol.

[21] The surface treatment agent according to any one of the above [1] to [20], further comprising 1 or more other components selected from the group consisting of fluorine-containing oil, silicone oil and catalyst.

[22] The surface treatment agent according to any one of the above [1] to [21], wherein the surface treatment agent further comprises a solvent.

[23] The surface treatment agent according to any one of the above [1] to [22], which is used as an antifouling coating agent or a water-repellent coating agent.

[24] A pellet comprising the surface treatment agent described in any one of [1] to [23] above.

[25] An article comprising a substrate and a layer formed of the surface treatment agent according to any one of the above [1] to [23] on the substrate.

[26] The article according to item [25], wherein the substrate is a glass substrate.

[27] The article according to item [26] above, which is an optical component.

Effects of the invention

According to the present invention, there is provided a surface treatment agent capable of forming a surface treatment layer having higher wear durability.

Detailed Description

As used herein, "1-valent organic group" refers to a carbon-containing 1-valent group. The 1-valent organic group is not particularly limited, and may be a hydrocarbon group or a derivative thereof. The derivative of the hydrocarbon group means a group having 1 or more than 1 of N, O, S, si, amide group, sulfonyl group, siloxane group, carbonyl group, carbonyloxy group, etc. at the end of the hydrocarbon group or in the molecular chain. In the case of being merely referred to as an "organic group", 1-valent organic group is meant. The term "2 to 10 valent organic group" means a carbon-containing 2 to 10 valent group. The 2-to 10-valent organic group is not particularly limited, and examples thereof include 2-to 10-valent groups having 1 to 9 hydrogen atoms further separated from the organic group. For example, the 2-valent organic group is not particularly limited, and a 2-valent group having 1 hydrogen atom further separated from the organic group may be exemplified.

As used herein, "hydrocarbyl" is a group containing carbon and hydrogen, and refers to a group that has been separated from the hydrocarbon by 1 hydrogen atom. The hydrocarbon group is not particularly limited, and examples thereof include C which may be substituted with 1 or more substituents _1－20 Examples of the hydrocarbon group include an aliphatic hydrocarbon group and an aromatic hydrocarbon group. The "aliphatic hydrocarbon group" may be any of linear, branched, and cyclic, or may be any of saturated or unsaturated. The hydrocarbon group may have 1 or more ring structures.

As the substituent for the "hydrocarbon group" used in the present specification, there are no particular restrictions, and examples thereof include C selected from halogen atoms, which may be substituted with 1 or more halogen atoms _1－6 Alkyl, C _2－6 Alkenyl, C _2－6 Alkynyl, C _3－10 Cycloalkyl, C _3－10 Unsaturated cycloalkyl, 5-10 membered heterocyclic group, 5-10 membered unsaturated heterocyclic group, C _6－10 Aryl and 1 or more than 1 group in 5-10 membered heteroaryl.

As used herein, "hydrolyzable group" means that it can be bonded toThe group subjected to hydrolysis reaction means a group capable of being detached from the main skeleton of the compound by hydrolysis reaction. Examples of the hydrolyzable group include-OR ^j 、－OCOR ^j 、－O－N＝CR ^j ₂ 、－NR ^j ₂ 、－NHR ^j -NCO, halogen (in these formulae, R ^j Represents substituted or unsubstituted C _1－4 Alkyl), and the like.

The surface treating agent of the present invention is a surface treating agent comprising a fluorinated polyether silane compound and a lower fluoroalkyl alcohol.

The surface treatment agent of the present invention can provide a surface treatment layer having improved abrasion resistance by containing a lower fluoroalkyl alcohol in addition to a fluorinated polyether silane compound.

(fluorine-containing polyether silane Compound)

The fluorinated polyether silane compound is a compound that contains fluorine and can form a surface-treated layer having antifouling properties.

In one embodiment, the fluorinated polyether silane compound is at least 1 fluorinated polyether silane compound represented by the following formula (1) or (2).

R ^F1 _α -X ^A -R ^Si _β (1)

R ^Si _γ -X ^A -R ^F2 -X ^A -R ^Si _γ (2)

[ in the above-mentioned, a method for producing a semiconductor device,

R ^F1 each occurrence is independently Rf ¹ －R ^F －O _q －；

R ^F2 is-Rf ² _p －R ^F －O _q －；

R ^F at each occurrenceEach independently is a 2-valent fluoropolyether group;

p is 0 or 1;

q is independently 0 or 1 for each occurrence;

X ^A each independently is a single bond or a 2-10 valent organic group;

alpha is an integer of 1 to 9;

beta is an integer of 1 to 9;

gamma is an integer of 1 to 9. ]

In the above formula (1), R ^F1 Each occurrence is independently Rf ¹ －R ^F －O _q －。

In the above formula (2), R ^F2 is-Rf ² _p －R ^F －O _q －。

In the above formula, rf ¹ Each occurrence is independently C which may be substituted with 1 or more fluorine atoms _1－16 An alkyl group.

The above C may be substituted with 1 or more fluorine atoms _1－16 "C" in alkyl _1－16 The alkyl group "may be straight or branched, and is preferably straight or branched C _1－6 Alkyl, especially C _1－3 Alkyl, more preferably C, which is linear _1－6 Alkyl, especially C _1－3 An alkyl group.

The Rf described above ¹ Preferably C substituted by 1 or more fluorine atoms _1－16 Alkyl, more preferably CF ₂ H－C _1－15 Perfluoroalkylene groups, more preferably C _1－16 Perfluoroalkyl groups.

The above C _1－16 Perfluoroalkyl groups may be straight-chain or branched, preferably straight-chain or branched, C _1－6 Perfluoroalkyl group, especially C _1－3 Perfluoroalkyl groups, more preferably C, which is linear _1－6 Perfluoroalkyl group, especially C _1－3 Perfluoroalkyl groups, which may be specifically-CF ₃ 、－CF ₂ CF ₃ or-CF ₂ CF ₂ CF ₃ 。

In the above formula, rf ² Is C which may be substituted by 1 or more fluorine atoms _1－6 An alkylene group.

The above C may be substituted with 1 or more fluorine atoms _1－6 "C" in alkylene _1－6 The alkylene group "may be straight or branched, and is preferably straight or branched C _1－3 Alkylene, more preferably C, which is linear _1－3 An alkylene group.

The Rf described above ² Preferably C substituted by 1 or more fluorine atoms _1－6 Alkylene, more preferably C _1－6 Perfluoroalkylene groups, more preferably C _1－3 A perfluoroalkylene group.

The above C _1－6 The perfluoroalkylene group may be linear or branched, and is preferably linear or branched C _1－3 Perfluoroalkylene groups, more preferably straight chain C _1－3 Perfluoroalkyl groups, which may be specifically-CF ₂ －、－CF ₂ CF ₂ -or-CF ₂ CF ₂ CF ₂ －。

In the above formula, p is 0 or 1. In one embodiment, p is 0. In another embodiment, p is 1.

In the above formula, q is independently 0 or 1 at each occurrence. In one embodiment, q is 0. In another embodiment, q is 1.

In the above formulae (1) and (2), R ^F Each occurrence is independently a 2-valent fluoropolyether group.

R ^F Preferably comprising the formula: - (OC) _h1 R ^Fa _2h1 ) _h3 －(OC _h2 R ^Fa _2h2－2 ) _h4 -the group shown.

[ in the above-mentioned, a method for producing a semiconductor device,

R ^Fa each occurrence of which is independently a hydrogen atom, a fluorine atom or a chlorine atom，

h1 is an integer of 1 to 6,

h2 is an integer of 4 to 8,

h3 is an integer of 0 or more,

h4 is an integer of 0 or more,

wherein the total of h3 and h4 is 1 or more, preferably 2 or more, more preferably 5 or more, and the order of the presence of the repeating units denoted by h3 and h4 and bracketed in the formula is arbitrary. ]

In one embodiment, R ^F Can be straight-chain or branched. R is R ^F Preferably of formula (la): - (OC) ₆ F ₁₂ ) _a －(OC ₅ F ₁₀ ) _b －(OC ₄ F ₈ ) _c －(OC ₃ R ^Fa ₆ ) _d －(OC ₂ F ₄ ) _e －(OCF ₂ ) _f -the group shown.

[ in the above-mentioned, a method for producing a semiconductor device,

R ^Fa each independently at each occurrence is a hydrogen atom, a fluorine atom or a chlorine atom,

a. b, c, d, e and f are each independently integers of 0 to 200, and the sum of a, b, c, d, e and f is 1 or more. The order in which the repeating units are represented by a, b, c, d, e or f and bracketed is arbitrary. But at all R ^Fa In the case of a hydrogen atom or a chlorine atom, at least 1 of a, b, c, e and f is 1 or more.]

R ^Fa Preferably a hydrogen atom or a fluorine atom, more preferably a fluorine atom. But at all R ^Fa In the case of a hydrogen atom or a chlorine atom, at least 1 of a, b, c, e and f is 1 or more.

Preferably a, b, c, d, e and f can each independently be an integer from 0 to 100.

a. The sum of b, c, d, e and f is preferably 5 or more, more preferably 10 or more, and may be 15 or more or 20 or more, for example. a. The sum of b, c, d, e and f is preferably 200 or less, more preferably 100 or less, still more preferably 60 or less, and may be 50 or 30 or less, for example.

These repeating units may beThe linear or branched chain may be used. For example, - (OC) ₆ F ₁₂ ) Can be- (OCF) ₂ CF ₂ CF ₂ CF ₂ CF ₂ CF ₂ )－、－(OCF(CF ₃ )CF ₂ CF ₂ CF ₂ CF ₂ )－、－(OCF ₂ CF(CF ₃ )CF ₂ CF ₂ CF ₂ )－、－(OCF ₂ CF ₂ CF(CF ₃ )CF ₂ CF ₂ )－、－(OCF ₂ CF ₂ CF ₂ CF(CF ₃ )CF ₂ )－、－(OCF ₂ CF ₂ CF ₂ CF ₂ CF(CF ₃ ) -and the like. - (OC) ₅ F ₁₀ ) Can be- (OCF) ₂ CF ₂ CF ₂ CF ₂ CF ₂ )－、－(OCF(CF ₃ )CF ₂ CF ₂ CF ₂ )－、－(OCF ₂ CF(CF ₃ )CF ₂ CF ₂ )－、－(OCF ₂ CF ₂ CF(CF ₃ )CF ₂ )－、－(OCF ₂ CF ₂ CF ₂ CF(CF ₃ ) -and the like. - (OC) ₄ F ₈ ) Can be- (OCF) ₂ CF ₂ CF ₂ CF ₂ )－、－(OCF(CF ₃ )CF ₂ CF ₂ )－、－(OCF ₂ CF(CF ₃ )CF ₂ )－、－(OCF ₂ CF ₂ CF(CF ₃ ))－、－(OC(CF ₃ ) ₂ CF ₂ )－、－(OCF ₂ C(CF ₃ ) ₂ )－、－(OCF(CF ₃ )CF(CF ₃ ))－、－(OCF(C ₂ F ₅ )CF ₂ ) -and- (OCF) ₂ CF(C ₂ F ₅ ) Any of the above). - (OC) ₃ F ₆ ) - (i.e. R in the above formula ^Fa Is a fluorine atom) may be- (OCF) ₂ CF ₂ CF ₂ )－、－(OCF(CF ₃ )CF ₂ ) -and- (OCF) ₂ CF(CF ₃ ) Any of the above). - (OC) ₂ F ₄ ) Can be- (OCF) ₂ CF ₂ ) -sum (OCF (CF) ₃ ) Any of the above).

In one embodiment, the repeating unit is linear. By making the repeating unit linear, the surface slidability, wear durability, and the like of the surface treatment layer can be improved.

In one embodiment, the repeating unit is branched. By forming the repeating unit into a branched chain, the coefficient of dynamic friction of the surface treatment layer can be increased.

In one embodiment, R ^F May comprise a ring structure.

The above-mentioned ring structure may be a three-membered ring, a four-membered ring, a five-membered ring or a six-membered ring as follows.

[ wherein, the formula (I) represents a bonding position. ]

The above-mentioned ring structure is preferably a four-membered ring, a five-membered ring or a six-membered ring, more preferably a four-membered ring or a six-membered ring.

The repeating unit having a ring structure is preferably the following unit.

[ wherein, the formula (I) represents a bonding position. ]

In one embodiment, R ^F Each occurrence of which is independently a group represented by any one of the following formulas (f 1) to (f 6).

－(OC ₃ F ₆ ) _d －(OC ₂ F ₄ ) _e － (f1)

[ wherein d is an integer of 1 to 200, and e is 0 or 1.]

[ wherein c and d are each independently an integer of 0 to 30, e and f are each independently an integer of 1 to 200,

c. the sum of d, e and f is more than 2,

－(R ⁶ －R ⁷ ) _g － (f3)

[ formula, R ⁶ Is OCF ₂ Or OC (alpha) ₂ F ₄ ，

g is an integer of 2 to 100. ]

－(R ⁶ －R ⁷ ) _g －R ^r －(R ^7′ －R ^6′ ) _g′ － (f4)

[ formula, R ⁶ Is OCF ₂ Or OC (alpha) ₂ F ₄ ，

R ^6′ is OCF ₂ Or OC (alpha) ₂ F ₄ ，

g is an integer of 2 to 100,

g' is an integer of 2 to 100,

R ^r is that

(wherein, represents a bonding position.)

In the above formula (f 1), d is preferably an integer of 5 to 200, more preferably 10 to 100, still more preferably 15 to 50, for example 25 to 35. In one embodiment, e is 1. In another mode, e is 0. In the above formula (f 1) - (OC) ₃ F ₆ ) _d Preferably- (OCF) ₂ CF ₂ CF ₂ ) _d -or- (OCF (CF) ₃ )CF ₂ ) _d The radicals indicated are more preferably- (OCF) ₂ CF ₂ CF ₂ ) _d -the group shown.

In the above formula (f 2), e and f are each independently an integer of preferably 5 to 200, more preferably 10 to 200. The sum of c, d, e and f is preferably 5 or more, more preferably 10 or more, and may be 15 or more or 20 or more, for example. In one embodiment, the above formula (f 2) is preferably- (OCF) ₂ CF ₂ CF ₂ CF ₂ ) _c －(OCF ₂ CF ₂ CF ₂ ) _d －(OCF ₂ CF ₂ ) _e －(OCF ₂ ) _f -the group shown. In another embodiment, formula (f 2) may be- (OC) ₂ F ₄ ) _e －(OCF ₂ ) _f -the group shown.

In the above formula (f 3), R ⁶ Preferably OC ₂ F ₄ . In the above (f 3), R ⁷ Preferably selected from OC ₂ F ₄ 、OC ₃ F ₆ And OC ₄ F ₈ Or a combination of 2 or 3 groups independently selected from these groups, more preferably selected from OC ₃ F ₆ And OC ₄ F ₈ Is a group of (2). As a slave OC ₂ F ₄ 、OC ₃ F ₆ And OC ₄ F ₈ The combination of 2 or 3 groups independently selected from (A) is not particularly limited, and examples thereof include-OC ₂ F ₄ OC ₃ F ₆ －、－OC ₂ F ₄ OC ₄ F ₈ －、－OC ₃ F ₆ OC ₂ F ₄ －、－OC ₃ F ₆ OC ₃ F ₆ －、－OC ₃ F ₆ OC ₄ F ₈ －、－OC ₄ F ₈ OC ₄ F ₈ －、－OC ₄ F ₈ OC ₃ F ₆ －、－OC ₄ F ₈ OC ₂ F ₄ －、－OC ₂ F ₄ OC ₂ F ₄ OC ₃ F ₆ －、－OC ₂ F ₄ OC ₂ F ₄ OC ₄ F ₈ －、－OC ₂ F ₄ OC ₃ F ₆ OC ₂ F ₄ －、－OC ₂ F ₄ OC ₃ F ₆ OC ₃ F ₆ －、－OC ₂ F ₄ OC ₄ F ₈ OC ₂ F ₄ －、－OC ₃ F ₆ OC ₂ F ₄ OC ₂ F ₄ －、－OC ₃ F ₆ OC ₂ F ₄ OC ₃ F ₆ －、－OC ₃ F ₆ OC ₃ F ₆ OC ₂ F ₄ -and-OC ₄ F ₈ OC ₂ F ₄ OC ₂ F ₄ -and the like. In the above formula (f 3), g is preferably an integer of 3 or more, more preferably 5 or more. The above g is preferably an integer of 50 or less. In the above formula (f 3), OC ₂ F ₄ 、OC ₃ F ₆ 、OC ₄ F ₈ 、OC ₅ F ₁₀ And OC ₆ F ₁₂ It may be straight-chain or branched, and is preferably straight-chain. In this embodiment, the above formula (f 3) is preferably- (OC) ₂ F ₄ －OC ₃ F ₆ ) _g -or- (OC) ₂ F ₄ －OC ₄ F ₈ ) _g －。

In the above formula (f 4), R ⁶ 、R ⁷ The meaning of g is the same as that described in the above formula (f 3). R is R ^6′ 、R ^7′ And g' have meanings respectively equal to R in the above formula (f 3) ⁶ 、R ⁷ The same applies to g, in the same way. R is R ^r Preferably is

[ wherein, the formula (I) represents a bonding position. ]

More preferably

[ wherein, the formula (I) represents a bonding position. ]

In the above formula (f 5), e is preferably an integer of 1 to 100, more preferably 5 to 100. a. The sum of b, c, d, e and f is preferably 5 or more, more preferably 10 or more, for example, 10 or more and 100 or less.

In the above formula (f 6), f is preferably an integer of 1 to 100, more preferably 5 to 100. a. The sum of b, c, d, e and f is preferably 5 or more, more preferably 10 or more, for example, 10 or more and 100 or less.

In one ofIn one embodiment, R is as described above ^F Is a group represented by the above formula (f 1).

In one embodiment, R is ^F Is a group represented by the above formula (f 2).

In one embodiment, R is ^F Is a group represented by the above formula (f 3) or (f 4).

In one embodiment, R is ^F Is a group represented by the above formula (f 3).

In one embodiment, R is ^F Is a group represented by the above formula (f 4).

In one embodiment, R is ^F Is a group represented by the above formula (f 5).

In one embodiment, R is ^F Is a group represented by the above formula (f 6).

Above R ^F The ratio of e to f (hereinafter referred to as "e/f ratio") is 0.1 to 10, preferably 0.2 to 5, more preferably 0.2 to 2, still more preferably 0.2 to 1.5, and still more preferably 0.2 to 0.85. By setting the e/f ratio to 10 or less, slidability, abrasion durability and chemical resistance (for example, durability against artificial sweat) of the surface-treated layer obtained from the compound are further improved. The smaller the e/f ratio, the higher the slidability and wear durability of the surface-treated layer. On the other hand, by setting the e/f ratio to 0.1 or more, the stability of the compound can be further improved. The greater the e/f ratio, the greater the stability of the compound.

In the above-mentioned fluorinated polyether silane compound, R ^F1 And R is ^F2 The number average molecular weight of the fraction is not particularly limited, and is, for example, 500 to 30,000, preferably 1,500 to 30,000, more preferably 2,000 to 10,000. In the present specification, R ^F1 And R is ^F2 The number average molecular weight of (2) is determined by ¹⁹ F-NMR measured values.

In another mode, R ^F1 And R is ^F2 The number average molecular weight of the fraction is 500 to 30,000, preferably 1,000 to 20,000, more preferably 2,000 to 15,000, still more preferably 2,000 to 10,000, and may be 3,000 to 6,000, for example.

In another mode, R ^F1 And R is ^F2 The number average molecular weight of the fraction is4,000 to 30,000, preferably 5,000 to 10,000, more preferably 6,000 to 10,000.

In the above formulae (1) and (2), R ^Si Each occurrence is independently a 1-valent group comprising a Si atom bonded with a hydroxyl group, a hydrolyzable group, a hydrogen atom or a 1-valent organic group, at least 1R ^Si Is a 1-valent group comprising a Si atom to which a hydroxyl group or a hydrolyzable group is bonded.

The "hydrolyzable group" herein means a group capable of undergoing a hydrolysis reaction, that is, a group capable of being detached from the main skeleton of the compound by the hydrolysis reaction. Examples of the hydrolyzable group include-OR ^j 、－OCOR ^j 、－O－N＝CR ^j ₂ 、－NR ^j ₂ 、－NHR ^j -NCO, halogen (in these formulae, R ^j Represents substituted or unsubstituted C _1－4 Alkyl), and the like.

In a preferred mode, R ^Si Is a 1-valent group comprising a Si atom to which a hydroxyl group or a hydrolyzable group is bonded.

In a preferred mode, R ^Si Is a group represented by the following formula (S1), (S2), (S3) or (S4).

-SiR ¹¹ _n1 R ¹² _3-n1 (S2)

-SiR ^a1 _k1 R ^b1 ₁₁ R ^c1 _m1 (S3)

-C ^Rd1 _k2 R ^e1 ₁₂ R ^f1 _m2 (S4)

-NR ^g1 R ^h1 (S5)

In the above formula, R ¹¹ Each occurrence is independently a hydroxyl group or a hydrolyzable group.

R ¹¹ Preferably independently at each occurrence a hydrolyzable group.

R ¹¹ Preferably independently at each occurrence-OR ^j 、－OCOR ^j 、－O－N＝CR ^j ₂ 、－NR ^j ₂ 、－NHR ^j -NCO or halogen (in these formulae, R ^j Represents substituted or unsubstituted C _1－4 Alkyl), more preferably-OR ^j (i.e., alkoxy). As R ^j Examples of the method include: unsubstituted alkyl groups such as methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, etc.; chloromethyl and the like. Of these, alkyl groups, particularly unsubstituted alkyl groups, are preferable, and methyl or ethyl groups are more preferable. In one embodiment, rj is methyl, and in another embodiment, rj is ethyl.

In the above formula, R ¹² Each occurrence of which is independently a hydrogen atom or a 1-valent organic group. The 1-valent organic group is a 1-valent organic group other than the above-mentioned hydrolyzable group.

At R ¹² In which the 1-valent organic group is preferably C _1－20 Alkyl, more preferably C _1－6 Alkyl groups are more preferably methyl groups.

In the above formula, n1 is defined in each (SiR ¹¹ _n1 R ¹² _3－n1 ) Each unit is independently an integer of 0 to 3. Wherein at R ^Si In the case of the group represented by the formula (S1) or (S2), R at the terminal of the formula (1) and the formula (2) ^Si Part (hereinafter also referred to as "terminal part" of the formulae (1) and (2) in some cases) has at least 1 (SiR) in which n1 is 1 to 3 ¹¹ _n1 R ¹² _3－n1 ) A unit. That is, at this end portion, all n1 are not 0 at the same time. In other words, at least 1 Si atom to which a hydroxyl group or a hydrolyzable group is bonded is present in the terminal portion of the formula (1) and the formula (2).

n1 is defined in each (SiR ¹¹ _n1 R ¹² _3－n1 ) Each unit is independently an integer of preferably 1 to 3, more preferably 2 to 3, and even more preferably 3.

In the above formula, X ¹¹ Each occurrence is independently a single bond or a 2-valent organic group. The 2-valent organic group is preferably-R ²⁸ －O _x －R ²⁹ - (wherein R is ²⁸ And R is ²⁹ Each occurrence is independently a single bond or C _1－20 Alkylene, x is 0 or 1). The C is _1－20 The alkylene group may be linear or branched, and is preferably linear. The C is _1－20 Alkylene is preferably C _1－10 Alkylene, more preferably C _1－6 Alkylene, further preferably C _1－3 An alkylene group.

In one embodiment, X ¹¹ Each occurrence is independently-C _1－6 alkylene-O-C _1－6 alkylene-or-O-C _1－6 Alkylene-.

In a preferred mode, X ¹¹ C independently at each occurrence is a single bond or a straight chain _1－6 Alkylene, preferably C, singly or in linear form _1－3 Alkylene, more preferably C, singly or in straight chain _1－2 Alkylene, further preferably straight chain C _1－2 An alkylene group.

In the above formula, R ¹³ Each occurrence of which is independently a hydrogen atom or a 1-valent organic group. The 1-valent organic group is preferably C _1－20 An alkyl group. The C is _1－20 The alkyl group may be linear or branched, and is preferably linear.

In a preferred mode, R ¹³ Each occurrence of which is independently a hydrogen atom or a straight chain C _1－6 Alkyl radicals, preferably hydrogen atoms or straight-chain C _1－3 Alkyl groups are preferably hydrogen atoms or methyl groups.

In the above formula, t is an integer of 2 or more independently for each occurrence.

In a preferred embodiment, t is independently an integer from 2 to 10, preferably an integer from 2 to 6, for each occurrence.

In the above formula, R ¹⁴ Each occurrence of which is independently a hydrogen atom, a halogen atom or-X ¹¹ －SiR ¹¹ _n1 R ¹² _3－n1 . The halogen atom is preferably an iodine atom, a chlorine atom or a fluorine atom, more preferably a fluorine atom. In a preferred mode, R ¹⁴ Is a hydrogen atom.

In the above formula, R ¹⁵ Each occurrence of the reaction is independently a single bond, an oxygen atom, an alkylene group having 1 to 6 carbon atoms or an alkyleneoxy group having 1 to 6 carbon atoms.

In one embodiment, R ¹⁵ Each occurrence of which is independently an oxygen atom, an alkylene group having 1 to 6 carbon atoms or an alkyleneoxy group having 1 to 6 carbon atoms.

In a preferred mode, R ¹⁵ Is a single bond.

In one embodiment, the formula (S1) is the following formula (S1-a).

[ in the above-mentioned, a method for producing a semiconductor device,

R ¹¹ 、R ¹² 、R ¹³ 、X ¹¹ and n1 has the same meaning as described in the above formula (S1);

t1 and t2 are each independently an integer of 1 or more, preferably an integer of 1 to 10, more preferably an integer of 2 to 10, for example an integer of 1 to 5 or an integer of 2 to 5, at each occurrence;

the order of presence of the repeating units denoted by t1 and t2 and bracketed in the formula is arbitrary. ]

In a preferred embodiment, the formula (S1) is the following formula (S1-b).

[ formula, R ¹¹ 、R ¹² 、R ¹³ 、X ¹¹ The meanings of n1 and t are the same as those described in the above formula (S1).]

In the above formula, R ^a1 Each occurrence is independently-Z ¹ －SiR ²¹ _p1 R ²² _q1 R ²³ _r1 。

The above Z ¹ Each occurrence of which is independently an oxygen atom or a 2-valent organic group. Wherein, hereinafter, Z is referred to as ¹ Right side of the structure of (1) and (SiR) ²¹ _p1 R ²² _q1 R ²³ _r1 ) And (5) bonding.

In a preferred mode, Z ¹ Is a 2-valent organic group.

In a preferred mode, Z ¹ Not including with Z ¹ The bonded Si atoms form siloxane bonds. Preferably in the formula (S3) (Si-Z ¹ -Si) contains no siloxane bonds.

The above Z ¹ Preferably C _1－6 Alkylene, - (CH) ₂ ) _z1 －O－(CH ₂ ) _z2 - (wherein z1 is an integer of 0 to 6, for example an integer of 1 to 6, and z2 is an integer of 0 to 6, for example an integer of 1 to 6) or- (CH) ₂ ) _z3 -phenylene- (CH) ₂ ) _z4 - (wherein z3 is an integer of 0 to 6, for example, an integer of 1 to 6), and z4 is an integer of 0 to 6, for example, an integer of 1 to 6). The C is _1－6 The alkylene group may be linear or branched, and is preferably linear. These groups may be selected, for example, from fluorine atoms, C _1－6 Alkyl, C _2－6 Alkenyl and C _2－6 1 or more substituents in the alkynyl group are substituted, but preferably unsubstituted.

In a preferred mode, Z ¹ Is C _1－6 Alkylene or- (CH) ₂ ) _z3 -phenylene- (CH) ₂ ) _z4 -, preferably-phenylene- (CH) ₂ ) _z4 -. At Z ¹ In the case of these groups, the light resistance, particularly the ultraviolet resistance, is further improved.

In another preferred embodiment, Z is as defined above ¹ Is C _1－3 An alkylene group. In one embodiment, Z ¹ Can be-CH ₂ CH ₂ CH ₂ -. In another mode, Z ¹ Can be-CH ₂ CH ₂ －。

R is as described above ²¹ Each occurrence is independently-Z ^1′ －SiR ^21′ _p1′ R ^22′ _q1′ R ^23′ _r1′ 。

The above Z ^1′ Each occurrence of which is independently an oxygen atom or a 2-valent organic group. Wherein, hereinafter, Z is referred to as ^1′ Right side of the structure of (1) and (SiR) ^21′ _p1′ R ^22′ _q1′ R ^23′ _r1′ ) And (5) bonding.

In a preferred mode, Z ^1′ Is a 2-valent organic group.

In a preferred mode, Z ^1′ Not including with Z ^1′ The bonded Si atoms form siloxane bonds. Preferably in the formula (S3) (Si-Z ^1′ -Si) contains no siloxane bonds.

The above Z ^1′ Preferably C _1－6 Alkylene, - (CH) ₂ ) _z1′ －O－(CH ₂ ) _z2′ - (wherein z1 'is an integer of 0 to 6, for example an integer of 1 to 6, and z2' is an integer of 0 to 6, for example an integer of 1 to 6) or- (CH) ₂ ) _z3′ -phenylene- (CH) ₂ ) _z4′ - (wherein z3 'is an integer of 0 to 6, for example, an integer of 1 to 6), and z4' is an integer of 0 to 6, for example, an integer of 1 to 6). The C is _1－6 The alkylene group may be linear or branched, and is preferably linear. These groups may be selected, for example, from fluorine atoms, C _1－6 Alkyl, C _2－6 Alkenyl and C _2－6 1 or more substituents in the alkynyl group are substituted, but preferably unsubstituted.

In a preferred mode, Z ^1′ Is C _1－6 Alkylene or- (CH) ₂ ) _z3′ -phenylene- (CH) ₂ ) _z4′ -, preferably-phenylene- (CH) ₂ ) _z4′ -. At Z ^1′ In the case of these groups, the light resistance, particularly the ultraviolet resistance, is further improved.

In another preferred embodiment, Z is as defined above ^1′ Is C _1－3 An alkylene group. In one embodiment, Z ^1′ Can be-CH ₂ CH ₂ CH ₂ -. In another mode, Z ^1′ Can be-CH ₂ CH ₂ －。

R is as described above ^21′ At each occurrenceAre each independently-Z ^1″ －SiR ^22″ _q1″ R ^23″ _r1″ 。

The above Z ^1″ Each occurrence of which is independently an oxygen atom or a 2-valent organic group. Wherein, hereinafter, Z is referred to as ^1″ Right side of the structure of (1) and (SiR) ^22″ _q1″ R ^23″ _r1″ ) And (5) bonding.

In a preferred mode, Z ^1″ Is a 2-valent organic group.

In a preferred mode, Z ^1″ Not including with Z ^1″ The bonded Si atoms form siloxane bonds. Preferably in the formula (S3) (Si-Z ^1″ -Si) contains no siloxane bonds.

The above Z ^1″ Preferably C _1－6 Alkylene, - (CH) ₂ ) _z1″ －O－(CH ₂ ) _z2″ - (wherein z1 'is an integer of 0 to 6, for example an integer of 1 to 6, and z 2' is an integer of 0 to 6, for example an integer of 1 to 6) or- (CH) ₂ ) _z3″ -phenylene- (CH) ₂ ) _z4″ - (wherein z3 "is an integer of 0 to 6, for example, an integer of 1 to 6), and z 4" is an integer of 0 to 6, for example, an integer of 1 to 6). The C is _1－6 The alkylene group may be linear or branched, and is preferably linear. These groups may be selected, for example, from fluorine atoms, C _1－6 Alkyl, C _2－6 Alkenyl and C _2－6 1 or more substituents in the alkynyl group are substituted, but preferably unsubstituted.

In a preferred mode, Z ^1″ Is C _1－6 Alkylene or- (CH) ₂ ) _z3″ -phenylene- (CH) ₂ ) _z4″ -, preferably-phenylene- (CH) ₂ ) _z4″ -. At Z ^1″ In the case of these groups, the light resistance, particularly the ultraviolet resistance, is further improved.

In another preferred embodiment, Z is as defined above ^1″ Is C _1－3 An alkylene group. In one embodiment, Z ^1″ Can be-CH ₂ CH ₂ CH ₂ -. In another mode, Z ^1″ Can be-CH ₂ CH ₂ －。

R is as described above ^22″ Each occurrence is independently a hydroxyl group or a hydrolyzable group.

R is as described above ^22″ Preferably independently at each occurrence a hydrolyzable group.

R is as described above ^22″ Preferably independently at each occurrence-OR ^j 、－OCOR ^j 、－O－N＝CR ^j ₂ 、－NR ^j ₂ 、－NHR ^j -NCO or halogen (in these formulae, R ^j Represents substituted or unsubstituted C _1－4 Alkyl), more preferably-OR ^j (i.e., alkoxy). As R ^j Examples of the method include: unsubstituted alkyl groups such as methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, etc.; chloromethyl and the like. Of these, alkyl groups are preferable, and unsubstituted alkyl groups are more preferable. In one embodiment, R ^j Methyl, in another mode, R ^j Is ethyl.

R is as described above ^23″ Each occurrence of which is independently a hydrogen atom or a 1-valent organic group. The 1-valent organic group is a 1-valent organic group other than the above-described hydrolyzable group.

The above R ^23″ In which the 1-valent organic group is preferably C _1－20 Alkyl, more preferably C _1－6 Alkyl groups are more preferably methyl groups.

Each occurrence of q1 "is independently an integer of 0 to 3, and each occurrence of r 1" is independently an integer of 0 to 3. Wherein the sum of q1 'and r 1' is within (SiR ^22″ _q1″ R ^23″ _r1″ ) The number of the units is 3.

The above q1' is represented by the formula (SiR) ^22″ _q1″ R ^23″ _r1″ ) Each unit is independently an integer of preferably 1 to 3, more preferably 2 to 3, and even more preferably 3.

R is as described above ^22′ Each occurrence is independently a hydroxyl group or a hydrolyzable group.

R ^22′ Preferably independently at each occurrence a hydrolyzable group.

R ^22′ Preferably independently at each occurrence-OR ^j 、－OCOR ^j 、－O－N＝CR ^j ₂ 、－NR ^j ₂ 、－NHR ^j -NCO or halogen (in these formulae, R ^j Represents substituted or unsubstituted C _1－4 Alkyl), more preferably-OR ^j (i.e., alkoxy). As R ^j Examples of the method include: unsubstituted alkyl groups such as methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, etc.; chloromethyl and the like. Of these, alkyl groups are preferable, and unsubstituted alkyl groups are more preferable. In one embodiment, R ^j Methyl, in another mode, R ^j Is ethyl.

R is as described above ^23′ Each occurrence of which is independently a hydrogen atom or a 1-valent organic group. The 1-valent organic group is a 1-valent organic group other than the above-described hydrolyzable group.

At R ^23′ In which the 1-valent organic group is preferably C _1－20 Alkyl, more preferably C _1－6 Alkyl groups are more preferably methyl groups.

The above-mentioned p1' is independently an integer of 0 to 3 at each occurrence, q1' is independently an integer of 0 to 3 at each occurrence, and r1' is independently an integer of 0 to 3 at each occurrence. Wherein the sum of p ', q1' and r1' is within (SiR ^21′ _p1′ R ^22′ _q1′ R ^23′ _r1′ ) The number of the units is 3.

In one embodiment, p1' is 0.

In one embodiment, p1' is defined at each (SiR ^21′ _p1′ R ^22′ _q1′ R ^23′ _r1′ ) The units may be each independently an integer of 1 to 3, an integer of 2 to 3, or 3. In a preferred embodiment, p1' is 3.

In one embodiment, q1' is defined in each (SiR ^21′ _p1′ R ^22′ _q1′ R ^23′ _r1′ ) Each unit is independently an integer of 1 to 3, preferably an integer of 2 to 3, and more preferably 3.

In one embodiment, p1 'is 0 and q1' is present at each (SiR ^21′ _p1′ R ^22′ _q1′ R ^23′ _r1′ ) Each unit is independently an integer of 1 to 3, preferably an integer of 2 to 3, and more preferably 3.

R is as described above ²² Each occurrence is independently a hydroxyl group or a hydrolyzable group.

R ²² Preferably independently at each occurrence a hydrolyzable group.

R ²² Preferably independently at each occurrence-OR ^j 、－OCOR ^j 、－O－N＝CR ^j ₂ 、－NR ^j ₂ 、－NHR ^j -NCO or halogen (in these formulae, R ^j Represents substituted or unsubstituted C _1－4 Alkyl), more preferably-OR ^j (i.e., alkoxy). As R ^j Examples of the method include: unsubstituted alkyl groups such as methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, etc.; chloromethyl and the like. Of these, alkyl groups are preferable, and unsubstituted alkyl groups are more preferable. In one embodiment, R ^j Methyl, in another mode, R ^j Is ethyl.

R is as described above ²³ Each occurrence of which is independently a hydrogen atom or a 1-valent organic group. The 1-valent organic group is a 1-valent organic group other than the above-described hydrolyzable group.

At R ²³ In which the 1-valent organic group is preferably C _1－20 Alkyl, more preferably C _1－6 Alkyl groups are more preferably methyl groups.

P1 is an integer of 0 to 3 independently at each occurrence, q1 is an integer of 0 to 3 independently at each occurrence, and r1 is an integer of 0 to 3 independently at each occurrence. Wherein the sum of p1, q1 and r1 is within (SiR ²¹ _p1 R ²² _q1 R ²³ _r1 ) The number of the units is 3.

In one embodiment, p1 is 0.

In one embodiment, p1 is found in each (SiR ²¹ _p1 R ²² _q1 R ²³ _r1 ) The units may be each independently an integer of 1 to 3, an integer of 2 to 3, or 3. In a preferred embodiment, p1 is 3.

In one embodiment, q1 is defined in each (SiR ²¹ _p1 R ²² _q1 R ²³ _r1 ) Each unit is independently an integer of 1 to 3, preferably an integer of 2 to 3, and more preferably 3.

In one embodiment, p1 is 0 and q1 is found in each (SiR ²¹ _p1 R ²² _q1 R ²³ _r1 ) Each unit is independently an integer of 1 to 3, preferably an integer of 2 to 3, and more preferably 3.

In the above formula, R ^b1 Each occurrence is independently a hydroxyl group or a hydrolyzable group.

R is as described above ^b1 Preferably independently at each occurrence a hydrolyzable group.

R is as described above ^b1 Preferably independently at each occurrence-OR ^j 、－OCOR ^j 、－O－N＝CR ^j ₂ 、－NR ^j ₂ 、－NHR ^j -NCO or halogen (in these formulae, R ^j Represents substituted or unsubstituted C _1－4 Alkyl), more preferably-OR ^j (i.e., alkoxy). As R ^j Examples of the method include: unsubstituted alkyl groups such as methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, etc.; chloromethyl and the like. Of these, alkyl groups are preferable, and unsubstituted alkyl groups are more preferable. In one embodiment, R ^j Methyl, in another mode, R ^j Is ethyl.

In the above formula, R ^c1 Each occurrence of which is independently a hydrogen atom or a 1-valent organic group. The 1-valent organic group is a 1-valent organic group other than the above-described hydrolyzable group.

The above R ^c1 In which the 1-valent organic group is preferably C _1－20 Alkyl, morePreferably C _1－6 Alkyl groups are more preferably methyl groups.

Each occurrence of k1 is an integer of 0 to 3, each occurrence of l1 is an integer of 0 to 3, each occurrence of m1 is an integer of 0 to 3. Wherein the sum of k1, l1 and m1 is within (SiR ^a1 _k1 R ^b1 _l1 R ^c1 _m1 ) The number of the units is 3.

In one embodiment, k1 is defined in each (SiR ^a1 _k1 R ^b1 _l1 R ^c1 _m1 ) Each unit is independently an integer of 1 to 3, preferably 2 or 3, more preferably 3. In a preferred embodiment, k1 is 3.

In the above formulae (1) and (2), R is ^Si In the case of the group represented by the formula (S3), it is preferable that at least 2 Si atoms to which a hydroxyl group or a hydrolyzable group is bonded are present in the terminal portions of the formula (1) and the formula (2).

In a preferred embodiment, the group of formula (S3) has the formula-Z ¹ －SiR ²² _q1 R ²³ _r1 (wherein q1 is an integer of 1 to 3, preferably 2 or 3, more preferably 3, and r1 is an integer of 0 to 2), -Z ^1′ －SiR ^22′ _q1′ R ^23′ _r1′ (wherein q1 'is an integer of 1 to 3, preferably 2 or 3, more preferably 3, and r1' is an integer of 0 to 2) or-Z ^1″ －SiR ^22″ _q1″ R ^23″ _r1″ (wherein q1 'is an integer of 1 to 3, preferably 2 or 3, more preferably 3, and r1' is an integer of 0 to 2). Z is Z ¹ 、Z ^1′ 、Z ^1″ 、R ²² 、R ²³ 、R ^22′ 、R ^23′ 、R ^22″ And R is ^23″ Is as defined above.

In a preferred embodiment, R is present in formula (S3) ^21′ In the case of at least 1, preferably all R ^21′ Wherein q1' is an integer of 1 to 3, preferably 2 or 3, more preferably 3.

In a preferred embodiment, R is present in formula (S3) ²¹ In the case of at least 1, preferably all R ²¹ Wherein p1 'is 0 and q1' is an integer of 1 to 3, preferably 2 or 3, more preferably 3.

In a preferred embodiment, R is present in formula (S3) ^a1 In the case of at least 1, preferably all R ^a1 Wherein p1 is 0, q1 is an integer of 1 to 3, preferably 2 or 3, more preferably 3.

In a preferred embodiment, in formula (S3), k1 is 2 or 3, preferably 3, p1 is 0, and q1 is 2 or 3, preferably 3.

R ^d1 Each occurrence is independently-Z ² －CR ³¹ _p2 R ³² _q2 R ³³ _r2 。

Z ² Each occurrence of which is independently a single bond, an oxygen atom, or a 2-valent organic group. Wherein, hereinafter, Z is referred to as ² Right side of the structure of (C) and (CR) ³¹ _p2 R ³² _q2 R ³³ _r2 ) And (5) bonding.

In a preferred mode, Z ² Is a 2-valent organic group.

The above Z ² Preferably C _1－6 Alkylene, - (CH) ₂ ) _z5 －O－(CH ₂ ) _z6 - (wherein z5 is an integer of 0 to 6, for example an integer of 1 to 6, and z6 is an integer of 0 to 6, for example an integer of 1 to 6) or- (CH) ₂ ) _z7 -phenylene- (CH) ₂ ) _z8 - (wherein z7 is an integer of 0 to 6, for example, an integer of 1 to 6), and z8 is an integer of 0 to 6, for example, an integer of 1 to 6). The C is _1－6 The alkylene group may be linear or branched, and is preferably linear. These groups may be selected, for example, from fluorine atoms, C _1－6 Alkyl, C _2－6 Alkenyl and C _2－6 1 or more substituents in the alkynyl group are substituted, but preferably unsubstituted.

In a preferred mode, Z ² Is C _1－6 Alkylene or- (CH) ₂ ) _z7 -phenylene- (CH) ₂ ) _z8 -, preferably-phenylene- (CH) ₂ ) _z8 -. At Z ² In the case of these groups, the light resistance, in particular the UV resistance, is further improvedHigh.

In another preferred embodiment, Z is as defined above ² Is C _1－3 An alkylene group. In one embodiment, Z ² Can be-CH ₂ CH ₂ CH ₂ -. In another mode, Z ² Can be-CH ₂ CH ₂ －。

R ³¹ Each occurrence is independently-Z ^2′ －CR ^32′ _q2′ R ^33′ _r2′ 。

Z ^2′ Each occurrence of which is independently a single bond, an oxygen atom, or a 2-valent organic group. Wherein, hereinafter, Z is referred to as ^2′ Right side of the structure of (C) and (CR) ^32′ _q2′ R ^33′ _r2′ ) And (5) bonding.

The above Z ^2′ Preferably C _1－6 Alkylene, - (CH) ₂ ) _z5′ －O－(CH ₂ ) _z6′ - (wherein z5 'is an integer of 0 to 6, for example an integer of 1 to 6, and z6' is an integer of 0 to 6, for example an integer of 1 to 6) or- (CH) ₂ ) _z7′ -phenylene- (CH) ₂ ) _z8′ - (wherein z7 'is an integer of 0 to 6, for example, an integer of 1 to 6), and z8' is an integer of 0 to 6, for example, an integer of 1 to 6). The C is _1－6 The alkylene group may be linear or branched, and is preferably linear. These groups may be selected, for example, from fluorine atoms, C _1－6 Alkyl, C _2－6 Alkenyl and C _2－6 1 or more substituents in the alkynyl group are substituted, but preferably unsubstituted.

In a preferred mode, Z ^2′ Is C _1－6 Alkylene or- (CH) ₂ ) _z7′ -phenylene- (CH) ₂ ) _z8′ -, preferably-phenylene- (CH) ₂ ) _z8′ -. At Z ^2′ In the case of these groups, the light resistance, particularly the ultraviolet resistance, is further improved.

In another preferred embodiment, Z is as defined above ^2′ Is C _1－3 An alkylene group. In one embodiment, Z ^2′ Can be-CH ₂ CH ₂ CH ₂ -. In another mode, Z ^2′ Can be-CH ₂ CH ₂ －。

R is as described above ^32′ Each occurrence is independently-Z ³ －SiR ³⁴ _n2 R ³⁵ _3－n2 。

The above Z ³ Each occurrence of which is independently a single bond, an oxygen atom, or a 2-valent organic group. Wherein, hereinafter, Z is referred to as ³ Right side of the structure of (1) and (SiR) ³⁴ _n2 R ³⁵ _3－n2 ) And (5) bonding.

In one embodiment, Z ³ Is an oxygen atom.

In one embodiment, Z ³ Is a 2-valent organic group.

The above Z ³ Preferably C _1－6 Alkylene, - (CH) ₂ ) _z5″ －O－(CH ₂ ) _z6″ - (wherein z5 'is an integer of 0 to 6, for example an integer of 1 to 6, and z 6' is an integer of 0 to 6, for example an integer of 1 to 6) or- (CH) ₂ ) _z7″ -phenylene- (CH) ₂ ) _z8″ - (wherein z7 "is an integer of 0 to 6, for example, an integer of 1 to 6), and z 8" is an integer of 0 to 6, for example, an integer of 1 to 6). The C is _1－6 The alkylene group may be linear or branched, and is preferably linear. These groups may be selected, for example, from fluorine atoms, C _1－6 Alkyl, C _2－6 Alkenyl and C _2－6 1 or more substituents in the alkynyl group are substituted, but preferably unsubstituted.

In a preferred mode, Z ³ Is C _1－6 Alkylene or- (CH) ₂ ) _z7″ -phenylene- (CH) ₂ ) _z8″ -, preferably-phenylene- (CH) ₂ ) _z8″ -. At Z ³ In the case of these groups, the light resistance, particularly the ultraviolet resistance, is further improved.

In another preferred embodiment, Z is as defined above ³ Is C _1－3 An alkylene group. In one embodiment, Z ³ Can be-CH ₂ CH ₂ CH ₂ -. In another mode, Z ³ Can be-CH ₂ CH ₂ －。

R is as described above ³⁴ Each occurrence is independently a hydroxyl group or a hydrolyzable group.

R ³⁴ Preferably independently at each occurrence a hydrolyzable group.

R ³⁴ Preferably independently at each occurrence-OR ^j 、－OCOR ^j 、－O－N＝CR ^j ₂ 、－NR ^j ₂ 、－NHR ^j -NCO or halogen (in these formulae, R ^j Represents substituted or unsubstituted C _1－4 Alkyl), more preferably-OR ^j (i.e., alkoxy). As R ^j Examples of the method include: unsubstituted alkyl groups such as methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, etc.; chloromethyl and the like. Of these, alkyl groups are preferable, and unsubstituted alkyl groups are more preferable. In one embodiment, R ^j Methyl, in another mode, R ^j Is ethyl.

R is as described above ³⁵ Each occurrence of which is independently a hydrogen atom or a 1-valent organic group. The 1-valent organic group is a 1-valent organic group other than the above-described hydrolyzable group.

The above R ³⁵ In which the 1-valent organic group is preferably C _1－20 Alkyl, more preferably C _1－6 Alkyl groups are more preferably methyl groups.

In the above formula, n2 is represented by the formula (SiR ³⁴ _n2 R ³⁵ _3－n2 ) Each unit is independently an integer of 0 to 3. Wherein at R ^Si In the case of the group represented by the formula (S4), at least 1 (SiR) in which n2 is 1 to 3 is present in the terminal portion of the formulae (1) and (2) ³⁴ _n2 R ³⁵ _3－n2 ) A unit. That is, at this end portion, all n2 are not 0 at the same time. In other words, at least 1 Si atom to which a hydroxyl group or a hydrolyzable group is bonded is present in the terminal portion of the formula (1) and the formula (2).

n2 is found in each (SiR ³⁴ _n2 R ³⁵ _3－n2 ) Each independently in the unit is preferably an integer of 1 to 3, more preferably2 to 3, more preferably 3.

R is as described above ^33′ Each occurrence of which is independently a hydrogen atom, a hydroxyl group, or a 1-valent organic group. The 1-valent organic group is a 1-valent organic group other than the above-described hydrolyzable group.

The above R ^33′ In which the 1-valent organic group is preferably C _1－20 Alkyl or- (C) _s H _2s ) _t1 －(O－C _s H _2s ) _t2 (wherein s is an integer of 1 to 6, preferably an integer of 2 to 4, t1 is 1 or 0, preferably 0, t2 is an integer of 1 to 20, preferably an integer of 2 to 10, more preferably an integer of 2 to 6), more preferably C _1－20 Alkyl, more preferably C _1－6 Alkyl is particularly preferably methyl.

In one embodiment, R ^33′ Is hydroxyl.

In another mode, R ^33′ Is a 1-valent organic group, preferably C _1－20 Alkyl, more preferably C _1－6 An alkyl group.

Each occurrence of q2 'is independently an integer of 0 to 3, and each occurrence of r2' is independently an integer of 0 to 3. Wherein the sum of q2 'and r2' is within (CR ^32′ _q2′ R ^33′ _r2′ ) The number of the units is 3.

q2' is shown at each (CR ^32′ _q2′ R ^33′ _r2′ ) Each unit is independently an integer of preferably 1 to 3, more preferably 2 to 3, and even more preferably 3.

R ³² Each occurrence is independently-Z ³ －SiR ³⁴ _n2 R ³⁵ _3－n2 . The Z is ³ －SiR ³⁴ _n2 R ³⁵ _3－n2 The meaning of R is as defined above for R ^32′ The description is the same.

R is as described above ³³ Each occurrence of which is independently a hydrogen atom, a hydroxyl group, or a 1-valent organic group. The 1-valent organic group is a 1-valent organic group other than the above-described hydrolyzable group.

The above R ³³ In (3) 1-valent organic compoundThe radical is preferably C _1－20 Alkyl or- (C) _s H _2s ) _t1 －(O－C _s H _2s ) _t2 (wherein s is an integer of 1 to 6, preferably an integer of 2 to 4, t1 is 1 or 0, preferably 0, t2 is an integer of 1 to 20, preferably an integer of 2 to 10, more preferably an integer of 2 to 6), more preferably C _1－20 Alkyl, more preferably C _1－6 Alkyl is particularly preferably methyl.

In one embodiment, R ³³ Is hydroxyl.

In another mode, R ³³ Is a 1-valent organic group, preferably C _1－20 Alkyl, more preferably C _1－6 An alkyl group.

P2 is an integer of 0 to 3 independently for each occurrence, q2 is an integer of 0 to 3 independently for each occurrence, and r2 is an integer of 0 to 3 independently for each occurrence. Wherein the sum of p2, q2 and r2 is in (CR ³¹ _p2 R ³² _q2 R ³³ _r2 ) The number of the units is 3.

In one embodiment, p2 is 0.

In one embodiment, p2 is present at each (CR ³¹ _p2 R ³² _q2 R ³³ _r2 ) The units may be each independently an integer of 1 to 3, an integer of 2 to 3, or 3. In a preferred embodiment, p2 is 3.

In one embodiment, q2 is found in each (CR ³¹ _p2 R ³² _q2 R ³³ _r2 ) Each unit is independently an integer of 1 to 3, preferably an integer of 2 to 3, and more preferably 3.

In one embodiment, p2 is 0 and q2 is present in each (CR ³¹ _p2 R ³² _q2 R ³³ _r2 ) Each unit is independently an integer of 1 to 3, preferably an integer of 2 to 3, and more preferably 3.

R is as described above ^e1 Each occurrence is independently-Z ³ －SiR ³⁴ _n2 R ³⁵ _3－n2 . The Z is ³ －SiR ³⁴ _n2 R ³⁵ _3－n2 The meaning of R is as defined above for R ^32′ The description is the same.

R is as described above ^f1 Each occurrence of which is independently a hydrogen atom, a hydroxyl group, or a 1-valent organic group. The 1-valent organic group is a 1-valent organic group other than the above-described hydrolyzable group.

The above R ^f1 In which the 1-valent organic group is preferably C _1－20 Alkyl or- (C) _s H _2s ) _t1 －(O－C _s H _2s ) _t2 (wherein s is an integer of 1 to 6, preferably an integer of 2 to 4, t1 is 1 or 0, preferably 0, t2 is an integer of 1 to 20, preferably an integer of 2 to 10, more preferably an integer of 2 to 6), more preferably C _1－20 Alkyl, more preferably C _1－6 Alkyl is particularly preferably methyl.

In one embodiment, R ^f1 Is hydroxyl.

In another mode, R ^f1 Is a 1-valent organic group, preferably C _1－20 Alkyl, more preferably C _1－6 An alkyl group.

Each occurrence of k2 is an integer of 0 to 3, each occurrence of l2 is an integer of 0 to 3, each occurrence of m2 is an integer of 0 to 3. Wherein the sum of k2, l2 and m2 is in (CR ^d1 _k2 R ^e1 _l2 R ^f1 _m2 ) The number of the units is 3.

In the above formulae (1) and (2), R is ^Si In the case of the group represented by the formula (S4), it is preferable that at least 2 Si atoms to which a hydroxyl group or a hydrolyzable group is bonded are present in the terminal portions of the formula (1) and the formula (2).

In one embodiment, at R ^Si In the case of the group represented by the formula (S4), n2 is 1 to 3, preferably 2 or 3, more preferably 3 (SiR ³⁴ _n2 R ³⁵ _3－n2 ) The units are present in more than 2, for example 2 to 27, preferably 2 to 9, more preferably 2 to 6, still more preferably 2 to 3, particularly preferably 3, terminal portions of the formulae (1) and (2).

In a preferred embodiment, R is present in formula (S4) ^32′ In the case of at least 1Preferably all R ^32′ N2 is an integer of 1 to 3, preferably 2 or 3, more preferably 3.

In a preferred embodiment, R is present in formula (S4) ³² In the case of at least 1, preferably all R ³² N2 is an integer of 1 to 3, preferably 2 or 3, more preferably 3.

In a preferred embodiment, R is present in formula (S4) ^e1 In the case of at least 1, preferably all R ^a1 N2 is an integer of 1 to 3, preferably 2 or 3, more preferably 3.

In a preferred embodiment, in formula (S4), k2 is 0, l2 is 2 or 3, preferably 3, and n2 is 2 or 3, preferably 3.

R is as described above ^g1 And R is ^h1 Each occurrence is independently-Z ⁴ －SiR ¹¹ _n1 R ¹² _3－n1 、－Z ⁴ －SiR ^a1 _k1 R ^b1 _l1 R ^c1 _m1 、－Z ⁴ －CR ^d1 _k2 R ^e1 _l2 R ^f1 _m2 . Wherein R is ¹¹ 、R ¹² 、R ^a1 、R ^b2 、R ^c1 、R ^d1 、R ^e1 、R ^f1 N1, k1, l1, m1, k2, l2 and m2 are as defined above.

In a preferred mode, R ^g1 And R is ^h1 Each independently is-Z ⁴ －SiR ¹¹ _n1 R ¹² _3－n1 。

The above Z ⁴ Each occurrence of which is independently a single bond, an oxygen atom, or a 2-valent organic group. Wherein, hereinafter, Z is referred to as ⁴ Right side of the structure of (1) and (SiR) ¹¹ _n1 R ¹² _3－n1 ) And (5) bonding.

In one embodiment, Z ⁴ Is an oxygen atom.

In one embodiment, Z ⁴ Is a 2-valent organic group.

The above Z ⁴ Preferably C _1－6 Alkylene, - (CH) ₂ ) _z5″ －O－(CH ₂ ) _z6″ - (wherein z 5' is 0 to the maximum)An integer of 6, for example an integer of 1 to 6, z 6' is an integer of 0 to 6, for example an integer of 1 to 6) or- (CH) ₂ ) _z7″ -phenylene- (CH) ₂ ) _z8″ - (wherein z7 "is an integer of 0 to 6, for example, an integer of 1 to 6), and z 8" is an integer of 0 to 6, for example, an integer of 1 to 6). The C is _1－6 The alkylene group may be linear or branched, and is preferably linear. These groups may be selected, for example, from fluorine atoms, C _1－6 Alkyl, C _2－6 Alkenyl and C _2－6 1 or more substituents in the alkynyl group are substituted, but preferably unsubstituted.

In a preferred mode, Z ⁴ Is C _1－6 Alkylene or- (CH) ₂ ) _z7″ -phenylene- (CH) ₂ ) _z8″ -, preferably-phenylene- (CH) ₂ ) _z8″ -. At Z ³ In the case of these groups, the light resistance, particularly the ultraviolet resistance, is further improved.

In another preferred embodiment, Z is as defined above ⁴ Is C _1－3 An alkylene group. In one embodiment, Z ⁴ Can be-CH ₂ CH ₂ CH ₂ -. In another mode, Z ⁴ Can be-CH ₂ CH ₂ －。

In one embodiment, R ^Si Is a group represented by the formula (S2), (S3), (S4) or (S5). These compounds are capable of forming a surface-treated layer having high surface slidability.

In one embodiment, R ^Si Is a group represented by the formula (S3), (S4) or (S5). These compounds have a plurality of hydrolyzable groups at one end, and therefore can strongly adhere to a substrate to form a surface-treated layer having high wear durability.

In one embodiment, R ^Si Is a group represented by the formula (S3) or (S4). These compounds have a plurality of hydrolyzable groups branching from one Si atom or C atom at one end, and thus can form a surface-treated layer having higher wear durability.

In one embodiment, R ^Si Is a group represented by the formula (S1).

In one embodiment, R ^Si Is a group represented by the formula (S2).

In one embodiment, R ^Si Is a group represented by the formula (S3).

In one embodiment, R ^Si Is a group represented by the formula (S4).

In one embodiment, R ^Si Is a group represented by the formula (S5).

In the above formulas (1) and (2), X ^A Can be understood as meaning that the fluoropolyether portion (R) ^F1 R is R ^F2 ) And a site (R) providing binding energy to the substrate ^Si ) And a connecting part for connecting. Thus, as long as the compounds represented by the formulas (1) and (2) can exist stably, the X ^A The compound may be a single bond or an arbitrary group.

In the above formula (1), α is an integer of 1 to 9, and β is an integer of 1 to 9. These alpha and beta can be determined according to X ^A And the valence of (c) varies. The sum of alpha and beta is equal to X ^A Valence of (2). For example at X ^A In the case of a 10-valent organic group, the sum of α and β is 10, and for example, α may be 9 and β may be 1, α may be 5 and β may be 5, or α may be 1 and β may be 9. In addition, at X ^A In the case of a 2-valent organic group, α and β are 1.

In the above formula (2), γ is an integer of 1 to 9. Gamma may be according to X ^A And the valence of (c) varies. That is, gamma is X ^A A value obtained by subtracting 1 from the valence of (2).

X ^A Each independently is a single bond or a 2 to 10 valent organic group.

Above X ^A The 2-10 valent organic group in (2) is preferably a 2-8 valent organic group. In one embodiment, the 2-10 valent organic group is preferably a 2-4 valent organic group, more preferably a 2 valent organic group. In another embodiment, the 2-10 valent organic group is preferably a 3-8 valent organic group, and more preferably a 3-6 valent organic group.

In one embodiment, X ^A Is a single bond or a 2-valent organic group, alpha is 1, and beta is 1.

In one embodiment, X ^A Is a single bond or a 2-valent organic group, and gamma is 1.

In one embodiment, X ^A 3-6 valence organic groups, alpha is 1, and beta is 2-5.

In one embodiment, X ^A 3-6 valence organic groups, and gamma is 2-5.

In one embodiment, X ^A Is a 3-valent organic group, alpha is 1, and beta is 2.

In one embodiment, X ^A Is a 3-valent organic group, and gamma is 2.

At X ^A In the case of a single bond or a 2-valent organic group, the formulas (1) and (2) are represented by the following formulas (1 ') and (2').

R ^F1 -X ^A R ^Si (1’)

R ^Si -X ^A -R ^F2 -X ^A -R ^Si (2’)

In one embodiment, X ^A Is a single bond.

In another mode, X ^A Is a 2-valent organic group.

In one embodiment, X is ^A For example, a single bond or the following formula may be cited: - (R) ⁵¹ ) _p5 －(X ⁵¹ ) _q5 -the shown 2-valent organic group.

[ in the above-mentioned, a method for producing a semiconductor device,

R ⁵¹ represents a single bond, - (CH) ₂ ) _s5 -or ortho-, meta-or para-phenylene, preferably- (CH) ₂ ) _s5 －，

s5 is an integer of 1 to 20, preferably an integer of 1 to 6, more preferably an integer of 1 to 3, still more preferably 1 or 2,

X ⁵¹ representation- (X) ⁵² ) _l5 －，

X ⁵² Independently for each occurrence a member selected from the group consisting of-O-, -S-, O-phenylene, m-phenylene or p-phenylene, -C (O) O-, -Si (R) ⁵³ ) ₂ －、－(Si(R ⁵³ ) ₂ O) _m5 －Si(R ⁵³ ) ₂ －、－CONR ⁵⁴ －、－O－CONR ⁵⁴ －、－NR ⁵⁴ -and (CH) ₂ ) _n5 The group in (c) is a group,

R ⁵³ each occurrence independently represents phenyl, C _1－6 Alkyl or C _1－6 Alkoxy, preferably phenyl or C _1－6 An alkyl group, more preferably a methyl group,

R ⁵⁴ each independently at each occurrence represents a hydrogen atom, a phenyl group or a C _1－6 Alkyl groups (preferably methyl groups),

m5 is independently an integer from 1 to 100, preferably an integer from 1 to 20,

n5 is independently an integer of 1 to 20, preferably an integer of 1 to 6, more preferably an integer of 1 to 3,

l5 is an integer of 1 to 10, preferably an integer of 1 to 5, more preferably an integer of 1 to 3,

p5 is either 0 or 1 and,

q5 is either 0 or 1 and,

at least one of p5 and q5 is 1, and the order in which the repeating units p5 or q5 are present and bracketed is arbitrary. ]

Here, X is ^A (typically X) ^A Hydrogen atom of (C) may be selected from fluorine atoms, C _1－3 Alkyl and C _1－3 1 or more substituents in the fluoroalkyl group. In a preferred mode, X ^A Are not substituted with these groups.

In a preferred embodiment, X is as defined above ^A Each independently is- (R) ⁵¹ ) _p5 －(X ⁵¹ ) _q5 －R ⁵² －。R ⁵² Represents a single bond, - (CH) ₂ ) _t5 -or ortho-, meta-or para-phenylene, preferably- (CH) ₂ ) _t5 -. t5 is an integer of 1 to 20, preferably an integer of 2 to 6, more preferably an integer of 2 to 3. Here, R is ⁵² (typically R) ⁵² Hydrogen atom of (C) may be selected from fluorine atoms, C _1－3 Alkyl and C _1－3 1 or more substituents in the fluoroalkyl group. In a preferred mode, R ⁵⁶ Are not substituted with these groups.

Preferably X is as defined above ^A Each independently is:

a single bond,

C _1－20 Alkylene group,

－R ⁵¹ －X ⁵³ －R ⁵² -, or

－X ⁵⁴ －R ⁵ －。

[ formula, R ⁵¹ And R is ⁵² Is as defined above,

X ⁵³ the representation is:

－O－、

－S－、

－C(O)O－、

－CONR ⁵⁴ －、

－O－CONR ⁵⁴ －、

－Si(R ⁵³ ) ₂ －、

－(Si(R ⁵³ ) ₂ O) _m5 －Si(R ⁵³ ) ₂ －、

－O－(CH ₂ ) _u5 －(Si(R ⁵³ ) ₂ O) _m5 －Si(R ⁵³ ) ₂ －、

－O－(CH ₂ ) _u5 －Si(R ⁵³ ) ₂ －O－Si(R ⁵³ ) ₂ －CH ₂ CH ₂ －Si(R ⁵³ ) ₂ －O－Si(R ⁵³ ) ₂ －、

－O－(CH ₂ ) _u5 －Si(OCH ₃ ) ₂ OSi(OCH ₃ ) ₂ －、

－CONR ⁵⁴ －(CH ₂ ) _u5 －(Si(R ⁵³ ) ₂ O) _m5 －Si(R ⁵³ ) ₂ －、

－CONR ⁵⁴ －(CH ₂ ) _u5 －N(R ⁵⁴ ) -, or

－CONR ⁵⁴ - (ortho-phenylene, meta-phenylene or para-phenylene) -Si (R) ⁵³ ) ₂ - (wherein R is ⁵³ 、R ⁵⁴ And m5 is as defined above, u5 is an integer from 1 to 20, preferably an integer from 2 to 6, more preferably from 2 to 3An integer),

X ⁵⁴ the representation is:

－S－、

－C(O)O－、

－CONR ⁵⁴ －、

－O－CONR ⁵⁴ －、

－CONR ⁵⁴ －(CH ₂ ) _u5 －(Si(R ⁵⁴ ) ₂ O) _m5 －Si(R ⁵⁴ ) ₂ －、

－CONR ⁵⁴ －(CH ₂ ) _u5 －N(R ⁵⁴ ) -, or

－CONR ⁵⁴ - (ortho-phenylene, meta-phenylene or para-phenylene) -Si (R) ⁵⁴ ) ₂ - (in the formulae, each symbol has the meaning as above).]

More preferably X as described above ^A Each independently is:

a single bond,

C _1－20 Alkylene group,

－(CH ₂ ) _s5 －X ⁵³ －、

－(CH ₂ ) _s5 －X ⁵³ －(CH ₂ ) _t5 －

－X ⁵⁴ -, or

－X ⁵⁴ －(CH ₂ ) _t5 －。

[ wherein X is ⁵³ 、X ⁵⁴ S5 and t5 are as defined above.]

More preferably X as described above ^A Each independently is:

a single bond,

C _1－20 Alkylene group,

－(CH ₂ ) _s5 －X ⁵³ －(CH ₂ ) _t5 -, or

－X ⁵⁴ －(CH ₂ ) _t5 －。

In the formula, each symbol is as defined above. ]

In a preferred embodiment, X is as defined above ^A Each independently is:

a single bond,

C _1－20 Alkylene group,

－(CH ₂ ) _s5 －X ⁵³ -, or

－(CH ₂ ) _s5 －X ⁵³ －(CH ₂ ) _t5 －。

[ in the above-mentioned, a method for producing a semiconductor device,

X ⁵³ is-O-, -CONR ⁵⁴ -or-O-CONR ⁵⁴ －，

R ⁵⁴ Each independently at each occurrence represents a hydrogen atom, a phenyl group or a C _1－6 An alkyl group, a hydroxyl group,

s5 is an integer of 1 to 20,

t5 is an integer of 1 to 20. ]

In a preferred embodiment, X is as defined above ^A Can be respectively and independently:

－(CH ₂ ) _s5 －O－(CH ₂ ) _t5 －

－CONR ⁵⁴ －(CH ₂ ) _t5 －。

[ in the above-mentioned, a method for producing a semiconductor device,

s5 is an integer of 1 to 20,

t5 is an integer of 1 to 20. ]

In one embodiment, the X ^A Each independently is:

a single bond,

C _1－20 Alkylene group,

－(CH ₂ ) _s5 －O－(CH ₂ ) _t5 －、

－(CH ₂ ) _s5 －(Si(R ⁵³ ) ₂ O) _m5 －Si(R ⁵³ ) ₂ －(CH ₂ ) _t5 －、

－(CH ₂ ) _s5 －O－(CH ₂ ) _u5 －(Si(R ⁵³ ) ₂ O) _m5 －Si(R ⁵³ ) ₂ －(CH ₂ ) _t5 -, or

－(CH ₂ ) _s5 －O－(CH ₂ ) _t5 －Si(R ⁵³ ) ₂ －(CH ₂ ) _u5 －Si(R ⁵³ ) ₂ －(C _v H _2v )－。

[ formula, R ⁵³ M5, s5, t5 and u5 have the same meaning as above, v5 is an integer of 1 to 20, preferably an integer of 2 to 6, more preferably an integer of 2 to 3.]

In the above, - (C) _v H _2v ) Either straight or branched, for example, -CH ₂ CH ₂ －、－CH ₂ CH ₂ CH ₂ －、－CH(CH ₃ )－、－CH(CH ₃ )CH ₂ －。

Above X ^A Can be independently selected from fluorine atoms, C _1－3 Alkyl and C _1－3 Fluoroalkyl (preferably C) _1－3 Perfluoroalkyl) is substituted with 1 or more substituents. In one embodiment, X ^A Is unsubstituted.

Wherein X is as described above ^A Left side and R of the formulae ^F1 Or R is ^F2 Bonding, right side and R ^Si And (5) bonding.

In one embodiment, X ^A Can be independently-O-C _1－6 Groups other than alkylene.

In another mode, as X ^A For example, the following groups can be mentioned:

[ formula, R ⁴¹ Independently of each other, a hydrogen atom, a phenyl group, an alkyl group having 1 to 6 carbon atoms, or a C _1－6 Alkoxy, preferably methyl;

d is a group selected from the group consisting of:

－CH ₂ O(CH ₂ ) ₂ －、

－CH ₂ O(CH ₂ ) ₃ －、

－CF ₂ O(CH ₂ ) ₃ －、

－(CH ₂ ) ₂ －、

－(CH ₂ ) ₃ －、

－(CH ₂ ) ₄ －、

－CONH－(CH ₂ ) ₃ －、

－CON(CH ₃ )－(CH ₂ ) ₃ －、

－CON(Ph)－(CH ₂ ) ₃ - (wherein Ph represents phenyl), and

(wherein R is ⁴² Each independently represents a hydrogen atom, C _1－6 Alkyl or C of (2) _1－6 Preferably represents methyl or methoxy, more preferably represents methyl. )

E is- (CH) ₂ ) _n - (n is an integer of 2 to 6),

d and R of molecular main chain ^F1 Or R is ^F2 Bonding E and R ^Si And (5) bonding.]

As the above X ^A Specific examples of (a) include:

a single bond,

－CH ₂ OCH ₂ －、

－CH ₂ O(CH ₂ ) ₂ －、

－CH ₂ O(CH ₂ ) ₃ －、

－CH ₂ O(CH ₂ ) ₄ －、

－CH ₂ O(CH ₂ ) ₅ －、

－CH ₂ O(CH ₂ ) ₆ －、

－CH ₂ O(CH ₂ ) ₃ Si(CH ₃ ) ₂ OSi(CH ₃ ) ₂ (CH ₂ ) ₂ －、

－CH ₂ O(CH ₂ ) ₃ Si(CH ₃ ) ₂ OSi(CH ₃ ) ₂ OSi(CH ₃ ) ₂ (CH ₂ ) ₂ －、

－CH ₂ O(CH ₂ ) ₃ Si(CH ₃ ) ₂ O(Si(CH ₃ ) ₂ O) ₂ Si(CH ₃ ) ₂ (CH ₂ ) ₂ -、

－CH ₂ O(CH ₂ ) ₃ Si(CH ₃ ) ₂ O(Si(CH ₃ ) ₂ O) ₃ Si(CH ₃ ) ₂ (CH ₂ ) ₂ -、

－CH ₂ O(CH ₂ ) ₃ Si(CH ₃ ) ₂ O(Si(CH ₃ ) ₂ O) ₁₀ Si(CH ₃ ) ₂ (CH ₂ ) ₂ -、

－CH ₂ O(CH ₂ ) ₃ Si(CH ₃ ) ₂ O(Si(CH ₃ ) ₂ O) ₂₀ Si(CH ₃ ) ₂ (CH ₂ ) ₂ -、

－CH ₂ OCF ₂ CHFOCF ₂ －、

－CH ₂ OCF ₂ CHFOCF ₂ CF ₂ －、

－CH ₂ OCF ₂ CHFOCF ₂ CF ₂ CF ₂ －、

－CH ₂ OCH ₂ CF ₂ CF ₂ OCF ₂ －、

－CH ₂ OCH ₂ CF ₂ CF ₂ OCF ₂ CF ₂ －、

－CH ₂ OCH ₂ CF ₂ CF ₂ OCF ₂ CF ₂ CF ₂ －、

－CH ₂ OCH ₂ CF ₂ CF ₂ OCF(CF ₃ )CF ₂ OCF ₂ －、

－CH ₂ OCH ₂ CF ₂ CF ₂ OCF(CF ₃ )CF ₂ OCF ₂ CF ₂ －、

－CH ₂ OCH ₂ CF ₂ CF ₂ OCF(CF ₃ )CF ₂ OCF ₂ CF ₂ CF ₂ －、

－CH ₂ OCH ₂ CHFCF ₂ OCF ₂ －、

－CH ₂ OCH ₂ CHFCF ₂ OCF ₂ CF ₂ －、

－CH ₂ OCH ₂ CHFCF ₂ OCF ₂ CF ₂ CF ₂ －、

－CH ₂ OCH ₂ CHFCF ₂ OCF(CF ₃ )CF ₂ OCF ₂ －、

－CH ₂ OCH ₂ CHFCF ₂ OCF(CF ₃ )CF ₂ OCF ₂ CF ₂ －、

－CH ₂ OCH ₂ CHFCF ₂ OCF(CF ₃ )CF ₂ OCF ₂ CF ₂ CF ₂ －、

－CH ₂ OCF ₂ CHFOCF ₂ CF ₂ CF ₂ －C(O)NH－CH ₂ －、

－CH ₂ OCH ₂ (CH ₂ ) ₇ CH ₂ Si(OCH ₃ ) ₂ OSi(OCH ₃ ) ₂ (CH ₂ ) ₂ Si(OCH ₃ ) ₂ OSi(OCH ₃ ) ₂ (CH ₂ ) ₂ －、

－CH ₂ OCH ₂ CH ₂ CH ₂ Si(OCH ₃ ) ₂ OSi(OCH ₃ ) ₂ (CH ₂ ) ₃ －、

－CH ₂ OCH ₂ CH ₂ CH ₂ Si(OCH ₂ CH ₃ ) ₂ OSi(OCH ₂ CH ₃ ) ₂ (CH ₂ ) ₃ －、

－CH ₂ OCH ₂ CH ₂ CH ₂ Si(OCH ₃ ) ₂ OSi(OCH ₃ ) ₂ (CH ₂ ) ₂ －、

－CH ₂ OCH ₂ CH ₂ CH ₂ Si(OCH ₂ CH ₃ ) ₂ OSi(OCH ₂ CH ₃ ) ₂ (CH ₂ ) ₂ －、

－(CH ₂ ) ₂ －Si(CH ₃ ) ₂ －(CH ₂ ) ₂ －、

－CH ₂ －、

－(CH ₂ ) ₂ －、

－(CH ₂ ) ₃ －、

－(CH ₂ ) ₄ －、

－(CH ₂ ) ₅ －、

－(CH ₂ ) ₆ －、

－CO－、

－CONH－、

－CONH－CH ₂ －、

－CONH－(CH ₂ ) ₂ －、

－CONH－(CH ₂ ) ₃ －、

－CONH－(CH ₂ ) ₄ －、

－CONH－(CH ₂ ) ₅ －、

－CONH－(CH ₂ ) ₆ －、

－CON(CH ₃ )－CH ₂ －、

－CON(CH ₃ )－(CH ₂ ) ₂ －、

－CON(CH ₃ )－(CH ₂ ) ₃ －、

－CON(CH ₃ )－(CH ₂ ) ₄ －、

－CON(CH ₃ )－(CH ₂ ) ₅ －、

－CON(CH ₃ )－(CH ₂ ) ₆ －、

－CON(Ph)－CH ₂ - (wherein Ph represents phenyl),

－CON(Ph)－(CH ₂ ) ₂ - (wherein Ph represents phenyl),

－CON(Ph)－(CH ₂ ) ₃ - (wherein Ph represents phenyl),

－CON(Ph)－(CH ₂ ) ₄ - (wherein Ph represents phenyl),

－CON(Ph)－(CH ₂ ) ₅ - (wherein Ph represents phenyl),

－CON(Ph)－(CH ₂ ) ₆ - (wherein Ph represents phenyl),

－CONH－(CH ₂ ) ₂ NH(CH ₂ ) ₃ －、

－CONH－(CH ₂ ) ₆ NH(CH ₂ ) ₃ －、

－CH ₂ O－CONH－(CH ₂ ) ₃ －、

－CH ₂ O－CONH－(CH ₂ ) ₆ －、

－S－(CH ₂ ) ₃ －、

－(CH ₂ ) ₂ S(CH ₂ ) ₃ －、

－CONH－(CH ₂ ) ₃ Si(CH ₃ ) ₂ OSi(CH ₃ ) ₂ (CH ₂ ) ₂ －、

－CONH－(CH ₂ ) ₃ Si(CH ₃ ) ₂ OSi(CH ₃ ) ₂ OSi(CH ₃ ) ₂ (CH ₂ ) ₂ －、

－CONH－(CH ₂ ) ₃ Si(CH ₃ ) ₂ O(Si(CH ₃ ) ₂ O) ₂ Si(CH ₃ ) ₂ (CH ₂ ) ₂ －、

－CONH－(CH ₂ ) ₃ Si(CH ₃ ) ₂ O(Si(CH ₃ ) ₂ O) ₃ Si(CH ₃ ) ₂ (CH ₂ ) ₂ －、

－CONH－(CH ₂ ) ₃ Si(CH ₃ ) ₂ O(Si(CH ₃ ) ₂ O) ₁₀ Si(CH ₃ ) ₂ (CH ₂ ) ₂ －、

－CONH－(CH ₂ ) ₃ Si(CH ₃ ) ₂ O(Si(CH ₃ ) ₂ O) ₂₀ Si(CH ₃ ) ₂ (CH ₂ ) ₂ －、

－C(O)O－(CH ₂ ) ₃ －、

－C(O)O－(CH ₂ ) ₆ －、

－CH ₂ －O－(CH ₂ ) ₃ －Si(CH ₃ ) ₂ －(CH ₂ ) ₂ －Si(CH ₃ ) ₂ －(CH ₂ ) ₂ －、

－CH ₂ －O－(CH ₂ ) ₃ －Si(CH ₃ ) ₂ －(CH ₂ ) ₂ －Si(CH ₃ ) ₂ －CH(CH ₃ )－、

－CH ₂ －O－(CH ₂ ) ₃ －Si(CH ₃ ) ₂ －(CH ₂ ) ₂ －Si(CH ₃ ) ₂ －(CH ₂ )－3、

－CH ₂ －O－(CH ₂ ) ₃ －Si(CH ₃ ) ₂ －(CH ₂ ) ₂ －Si(CH ₃ ) ₂ －CH(CH ₃ )－CH ₂ －、

－OCH ₂ －、

－O(CH ₂ ) ₃ －、

－OCFHCF ₂ －、

Etc.

In yet another embodiment, X ^A Each independently is of the formula: - (R) ¹⁶ ) _x1 －(CFR ¹⁷ ) _y1 －(CH ₂ ) _z1 -the group shown. Wherein x1, y1 and z1 are each independently integers of 0 to 10, the sum of x1, y1 and z1 is 1 or more, and the order of the presence of the repeating units in the formula enclosed by brackets is arbitrary.

In the above formula, R ¹⁶ Each occurrence of which is independently an oxygen atom, phenylene, carbazolylene, -NR ¹⁸ - (wherein R) ¹⁸ Represents a hydrogen atom or an organic group) or a 2-valent organic group. Preferably R ¹⁸ Is an oxygen atom or a 2-valent polar group.

The "2-valent polar group" is not particularly limited, and includes-C (O) -, -C (=NR) ¹⁹ ) -and-C (O) NR ¹⁹ - (in these formulae, R) ¹⁹ Represents a hydrogen atom or a lower alkyl group). The "lower alkyl" is, for example, an alkyl group having 1 to 6 carbon atoms, such as methyl, ethyl, or n-propyl, which may be substituted with 1 or more fluorine atoms.

In the above formula, R ¹⁷ Each occurrence is independently a hydrogen atom, a fluorine atom or a lower fluoroalkyl group, preferably a fluorine atom. The "lower fluoroalkyl group" is, for example, a fluoroalkyl group having 1 to 6 carbon atoms, preferably 1 to 3 carbon atoms, preferably a perfluoroalkyl group having 1 to 3 carbon atoms, more preferably a trifluoromethyl group or a pentafluoroethyl group, and even more preferably a trifluoromethyl group.

In yet another embodiment, X is ^A The following groups may be mentioned as examples:

Each X is ^A In the radicals, any of TSeveral are R to the main chain of the molecule ^F1 Or R is ^F2 The following groups are bonded:

－CH ₂ O(CH ₂ ) ₂ －、

－CH ₂ O(CH ₂ ) ₃ －、

－CF ₂ O(CH ₂ ) ₃ －、

－(CH ₂ ) ₂ －、

－(CH ₂ ) ₃ －、

－(CH ₂ ) ₄ －、

－CONH－(CH ₂ ) ₃ －、

－CON(CH ₃ )－(CH ₂ ) ₃ －、

－CON(Ph)－(CH ₂ ) ₃ - (wherein Ph represents phenyl), or

[ formula, R ⁴² Each independently represents a hydrogen atom, C _1－6 Alkyl or C of (2) _1－6 Preferably represents methyl or methoxy, more preferably represents methyl.]

Several of the additional T's are associated with R of the molecular backbone ^Si Bonding, where present, the remaining T are each independently methyl, phenyl, C _1－6 Alkoxy or a radical scavenger or an ultraviolet absorber.

The radical-capturing group is not particularly limited as long as it can capture radicals generated by light irradiation, and examples thereof include residues of benzophenone, benzotriazole, benzoate, salicylate, crotonate, malonate, organic acrylate, hindered amine, hindered phenol, or triazine.

The ultraviolet absorbing group is not particularly limited as long as it is a group capable of absorbing ultraviolet rays, and examples thereof include benzotriazole, hydroxybenzophenone, esters of substituted and unsubstituted benzoic acid or salicylic acid compounds, acrylic acid esters or alkoxycinnamic acid esters, oxamides, oxamide, benzoxazinone, and benzoxazole residues.

In a preferred embodiment, preferable radical-capturing groups or ultraviolet absorbing groups include:

in this mode, X ^A Can be 3-10 valence organic groups respectively and independently.

[ formula, R ²⁵ 、R ²⁶ And R is ²⁷ Each independently is a 2-6 valent organic group,

R ²⁵ and at least 1R ^F1 Bonding, R ²⁶ And R is ²⁷ Respectively with at least 1R ^Si And (5) bonding.]

In one embodiment, R is ²⁵ Is a single bond, C _1－20 Alkylene, C _3－20 Cycloalkylene, C _5－20 Arylene, -R ⁵⁷ －X ⁵⁸ －R ⁵⁹ －、－X ⁵⁸ －R ⁵⁹ -or-R ⁵⁷ －X ⁵⁸ -. R is as described above ⁵⁷ And R is ⁵⁹ Are each independently a single bond, C _1－20 Alkylene, C _3－20 Cycloalkylene or C _5－20 Arylene groups. Above X ⁵⁸ is-O-, -S-, -CO-, -O-CO-or-COO-.

In one embodiment, R is ²⁶ And R is ²⁷ Each independently a hydrocarbon, or a group having at least 1 atom selected from N, O and S in the hydrocarbon terminal or main chain, preferably C is exemplified _1－6 Alkyl, -R ³⁶ －R ³⁷ －R ³⁶ －、－R ³⁶ －CHR ³⁸ ₂ -and the like. Here, R is ³⁶ Each independently represents a single bond or an alkyl group having 1 to 6 carbon atoms, preferably an alkyl group having 1 to 6 carbon atoms. R is R ³⁷ N, O or S, preferably N or O. R is R ³⁸ is-R ⁴⁵ －R ⁴⁶ －R ⁴⁵ －、－R ⁴⁶ －R ⁴⁵ -or-R ⁴⁵ －R ⁴⁶ -. Here, R is ⁴⁵ Each independently represents an alkyl group having 1 to 6 carbon atoms. R is R ⁴⁶ N, O or S, preferably O.

In yet another embodiment, X is ^A Examples of (a) include groups represented by the following formula:

[ wherein X is ^a Is a single bond or a 2-valent organic group.]

Above X ^a Is a single bond or a divalent linking group directly bonded to the isocyanurate ring. As X ^a Preferably a single bond, an alkylene group, or a divalent group containing at least one bond selected from the group consisting of an ether bond, an ester bond, an amide bond, and a thioether bond, more preferably a single bond, an alkylene group having 1 to 10 carbon atoms, or a divalent hydrocarbon group having 1 to 10 carbon atoms containing at least one bond selected from the group consisting of an ether bond, an ester bond, an amide bond, and a thioether bond.

As X ^a More preferred is a group represented by the following formula:

－(CX ¹²¹ X ¹²² ) _x1 －(X ^a1 ) _y1 －(CX ¹²³ X ¹²⁴ ) _z1 －。

(wherein X is ¹²¹ ～X ¹²⁴ H, F, OH OR-OSi (OR) ¹²¹ ) ₃ (wherein 3R' s ¹²¹ Each independently represents an alkyl group having 1 to 4 carbon atoms. )

Above X ^a1 is-C (=O) NH-, -NHC (=O) -, -O-, -C #=o) O-, -OC (=o) O-, or-NHC (=o) NH- (left side of each bond and CX ¹²¹ X ¹²² Bonding),

x1 is an integer of 0 to 10, y1 is 0 or 1, and z1 is an integer of 1 to 10. )

As the above X ^a1 preferably-O-or-C (=O) O-.

As the above X ^a Particularly preferred are:

the following formula: - (CF) ₂ ) _m11 －(CH ₂ ) _m12 －O－(CH ₂ ) _m13 - (wherein m11 is an integer of 1 to 3, m12 is an integer of 1 to 3, and m13 is an integer of 1 to 3), a group represented by the formula,

－(CF ₂ ) _m14 －(CH ₂ ) _m15 －O－CH ₂ CH(OH)－(CH ₂ ) _m16 - (wherein m14 is an integer of 1 to 3, m15 is an integer of 1 to 3, and m16 is an integer of 1 to 3), a group represented by the formula,

－(CF ₂ ) _m17 －(CH ₂ ) _m18 - (in which m17 is an integer of 1 to 3, and m18 is an integer of 1 to 3), a group represented by the formula,

－(CF ₂ ) _m19 －(CH ₂ ) _m20 －O－CH ₂ CH(OSi(OCH ₃ ) ₃ )－(CH ₂ ) _m21 - (wherein m19 is an integer of 1 to 3, m20 is an integer of 1 to 3, and m21 is an integer of 1 to 3), or

－(CH ₂ ) _m22 - (in which m22 is an integer of 1 to 3).

As the above X ^a The method is not particularly limited, and specifically includes-CH ₂ －、－C ₂ H ₄ －、－C ₃ H ₆ －、－C ₄ H ₈ －、－C ₄ H ₈ －O－CH ₂ －、－CO－O－CH ₂ －CH(OH)－CH ₂ －、－(CF ₂ ) _n5 - (n 5 is an integer of 0 to 4), -CF ₂ ) _n5 －(CH ₂ ) _m5 - (n 5 and m5 are each independently an integer of 0 to 4), -CF ₂ CF ₂ CH ₂ OCH ₂ CH(OH)CH ₂ －、－CF ₂ CF ₂ CH ₂ OCH ₂ CH(OSi(OCH ₃ ) ₃ )CH ₂ -and the like.

In this mode, X ^A Each independently a 2-valent or 3-valent organic group.

The fluorinated polyether silane compound represented by the above formula (1) or formula (2) may have a concentration of 5X 10 ² ～1×10 ⁵ The average molecular weight of (2) is not particularly limited. Within this range, an average molecular weight of 2,000 to 32,000, more preferably 2,500 to 12,000 is preferable from the viewpoint of wear durability. Wherein the "average molecular weight" is the number average molecular weight, and the "average molecular weight" is determined by ¹⁹ F-NMR measured values.

In one embodiment, the surface treating agent of the present invention is a compound represented by the formula (1).

In another embodiment, in the surface treatment agent of the present invention, the fluorinated polyether silane compound is a compound represented by formula (2).

In another embodiment, the surface treatment agent of the present invention comprises a compound represented by the formula (1) and a compound represented by the formula (2).

In the surface treatment agent of the present invention, the compound represented by the formula (2) is preferably 0.1 mol% or more and 35 mol% or less relative to the total of the compound represented by the formula (1) and the compound represented by the formula (2). The lower limit of the content of the compound represented by the formula (2) is preferably 0.1 mol%, more preferably 0.2 mol%, further preferably 0.5 mol%, further more preferably 1 mol%, particularly preferably 2 mol%, and particularly preferably 5 mol%, based on the total of the compound represented by the formula (1) and the compound represented by the formula (2). The upper limit of the content of the compound represented by the formula (2) is preferably 35 mol%, more preferably 30 mol%, still more preferably 20 mol%, still more preferably 15 mol% or 10 mol% relative to the total of the compound represented by the formula (1) and the compound represented by the formula (2). The compound represented by the formula (2) is preferably 0.1 to 30 mol%, more preferably 0.1 to 20 mol%, still more preferably 0.2 to 10 mol%, still more preferably 0.5 to 10 mol%, particularly preferably 1 to 10 mol%, for example 2 to 10 mol%, or 5 to 10 mol%, based on the total of the compound represented by the formula (1) and the compound represented by the formula (2). By making the compound represented by the formula (2) within the above range, wear durability can be further improved.

In one embodiment, the surface treatment agent of the present invention contains 2 or more fluorinated polyether silane compounds represented by formula (1) or (2). By containing a plurality of fluorinated polyether silane compounds, the friction durability is further improved.

In one embodiment, the surface treatment agent of the present invention contains R ^Si 2 or more fluorinated polyether silane compounds represented by the formula (1) or (2) which are groups selected from the formulas (S1), (S2), (S3), (S4) and (S5) and are groups different from each other. By containing compounds having different R' s ^Si The fluorinated polyether silane compound of (2) further improves the friction durability.

In one embodiment, the surface treatment agent of the present invention contains R ^Si A fluorinated polyether silane compound represented by the formula (1) or (2) which is a group represented by the formula (S1), and R ^Si A fluorinated polyether silane compound represented by formula (1) or (2) which is a group selected from the group consisting of formulas (S3), (S4) and (S5). By combining R ^Si A fluorinated polyether silane compound represented by the formula (1) or (2) which is a group represented by the formula (S1), and R ^Si The fluorinated polyether silane compound represented by the formula (1) or (2) which is a group selected from the formulas (S3), (S4) and (S5) is further improved in friction durability.

In one embodiment, the surface treatment agent of the present invention contains R ^Si A fluorinated polyether silane compound represented by the formula (1) or (2) which is a group represented by the formula (S1), and R ^Si A fluorinated polyether silane compound represented by formula (1) or (2) which is a group selected from the group consisting of formulas (S3) and (S4). By combining R ^Si A fluorinated polyether silane compound represented by the formula (1) or (2) which is a group represented by the formula (S1), and R ^Si The fluorinated polyether silane compound represented by the formula (1) or (2) which is a group selected from the formulas (S3) and (S4) is further improved in friction durability.

In one embodiment, the surface treatment agent of the present invention contains R ^Si A fluorinated polyether silane compound represented by the formula (1) or (2) which is a group represented by the formula (S1), and R ^Si A fluorinated polyether silane compound represented by the formula (1) or (2) which is a group represented by the formula (S3). By combining R ^Si A fluorinated polyether silane compound represented by the formula (1) or (2) which is a group represented by the formula (S1), and R ^Si The fluorinated polyether silane compound represented by the formula (1) or (2) which is a group represented by the formula (S3) is further improved in friction durability.

In one embodiment, the surface treatment agent of the present invention contains R ^Si A fluorinated polyether silane compound represented by the formula (1) or (2) which is a group represented by the formula (S1), and R ^Si A fluorinated polyether silane compound represented by the formula (1) or (2) which is a group represented by the formula (S4). By combining R ^Si A fluorinated polyether silane compound represented by the formula (1) or (2) which is a group represented by the formula (S1), and R ^Si The fluorinated polyether silane compound represented by the formula (1) or (2) which is a group represented by the formula (S4) is further improved in friction durability.

The compound represented by the above formula (1) or (2) can be obtained by a method known per se, for example, a method described in International publication No. 97/07155, japanese patent application laid-open No. 2008-534696, japanese patent application laid-open No. 2014-218639, japanese patent application laid-open No. 2017-82194, or the like.

The content of the compound represented by the above formula (1) or (2) may be preferably 0.01 to 50.0% by mass, more preferably 0.1 to 30.0% by mass, still more preferably 1.0 to 25.0% by mass, and particularly preferably 5.0 to 20.0% by mass, relative to the entire surface treatment agent. By setting the content of the fluorinated polyether silane compound within the above range, higher water and oil repellency can be obtained.

(lower fluoroalkyl alcohol)

The lower fluoroalkyl alcohol is a compound capable of improving the wear durability of the surface treatment layer formed by the surface treatment agent of the present invention.

The lower fluoroalkyl alcohol has a pKa of preferably 15.0 or less, more preferably 13.0 or less, and still more preferably 12.5 or less. By having such pKa, a surface-treated layer having more excellent friction durability can be formed.

The lower fluoroalkyl alcohol has a pKa of preferably 5.0 or more, more preferably 7.0 or more, still more preferably 8.0 or more, still more preferably 9.0 or more. By having such pKa, the storage stability of the surface treatment agent is improved.

The lower fluoroalkyl alcohol has a pKa of preferably 5.0 to 15.0, more preferably 7.0 to 13.0, and still more preferably 9.0 to 13.0. With such pKa, a surface-treated layer having more excellent friction durability can be formed, and the storage stability of the surface-treating agent is improved.

The lower fluoroalkyl alcohol is preferably a monohydric alcohol.

The lower fluoroalkyl alcohol is preferably a fluoroalkyl alcohol represented by the following formula:

CRf ⁴ _n4 H _3－n4 －OH。

[ in the above-mentioned, a method for producing a semiconductor device,

Rf ⁴ is a perfluoroalkyl group having 1 to 3 carbon atoms,

n4 is an integer of 1 to 3. ]

In a preferred embodiment, the lower fluoroalkyl alcohol is a fluoroalkyl alcohol having 1 to 6 carbon atoms, preferably 2 to 6 carbon atoms, more preferably 2 to 4 carbon atoms, and particularly preferably 3 carbon atoms.

In a preferred embodiment, the lower fluoroalkyl alcohol is a fluoroalkyl alcohol represented by the following formula:

CRf ⁴ _n4 H _3－n4 －OH。

[ in the above-mentioned, a method for producing a semiconductor device,

Rf ⁴ is a perfluoroalkyl group having 1 to 3 carbon atoms,

n4 is an integer of 1 to 3,

the total number of carbon atoms is 2 to 6, preferably 2 to 4, more preferably 3.]

In a particularly preferred embodiment, the lower fluoroalkyl alcohol is hexafluoro-n-propanol or hexafluoroisopropanol.

The content of the lower fluoroalkyl alcohol is 30 parts by mass or less, preferably 25 parts by mass or less, more preferably 20 parts by mass or less, for example, 15 parts by mass or less or 10 parts by mass or less, based on 100 parts by mass of the fluorinated polyether silane compound. The content of the lower fluoroalkyl alcohol is preferably 0.01 part by mass or more, more preferably 0.1 part by mass or more, still more preferably 1.0 part by mass or more, still more preferably 3.0 parts by mass or more, and particularly preferably 10 parts by mass or more, based on 100 parts by mass of the fluorinated polyether silane compound. The surface treatment agent of the present invention can form a surface treatment layer having higher friction durability by containing the lower fluoroalkyl alcohol in such an amount.

In a preferred embodiment, the content of the lower fluoroalkyl alcohol may be 0.01 to 30 parts by mass, more preferably 0.1 to 20 parts by mass, still more preferably 3.0 to 20 parts by mass, and still more preferably 10 to 20 parts by mass, relative to 100 parts by mass of the fluorinated polyether silane compound.

The content of the lower fluoroalkyl alcohol is 0.5 to 10.0 mass% relative to the entire surface treatment agent. The surface treatment agent of the present invention can form a surface treatment layer having high wear durability by containing the amide compound in the above amount.

The surface treatment agent of the present invention can impart water repellency and oil repellency to the surface treatment layer by containing the fluorinated polyether silane compound, and can impart high wear durability to the surface treatment layer by containing the lower fluoroalkyl alcohol.

The surface treatment agent of the present invention may contain a solvent, a (non-reactive) fluoropolyether compound which can be understood as a fluorine-containing oil, preferably a perfluoro (poly) ether compound (hereinafter collectively referred to as "fluorine-containing oil"), a (non-reactive) organosilicon compound which can be understood as a silicone oil (hereinafter referred to as "silicone oil"), an alcohol, a compatibilizer, a catalyst, a surfactant, a polymerization inhibitor, a sensitizer, and the like.

Examples of the solvent include: aliphatic hydrocarbons such as hexane, cyclohexane, heptane, octane, nonane, decane, undecane, dodecane, mineral spirits; aromatic hydrocarbons such as benzene, toluene, xylene, naphthalene, and solvent naphtha; esters such as methyl acetate, ethyl acetate, propyl acetate, n-butyl acetate, isopropyl acetate, isobutyl acetate, cellosolve acetate, propylene glycol methyl ether acetate, carbitol acetate, diethyl oxalate, ethyl pyruvate, ethyl 2-hydroxybutyrate, ethyl acetoacetate, amyl acetate, methyl lactate, ethyl lactate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 2-hydroxyisobutyrate, and ethyl 2-hydroxyisobutyrate; ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, 2-hexanone, cyclohexanone, methylaminoketone, and 2-heptanone; glycol ethers such as ethyl cellosolve, methyl cellosolve acetate, ethyl cellosolve acetate, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monobutyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monobutyl ether acetate, dipropylene glycol dimethyl ether, and ethylene glycol monoalkyl ether; alcohols such as methanol, ethanol, isopropanol, n-butanol, isobutanol, t-butanol, sec-butanol, 3-pentanol, octanol, 3-methyl-3-methoxybutanol, t-pentanol, and the like; glycols such as ethylene glycol and propylene glycol; cyclic ethers such as tetrahydrofuran, tetrahydropyran, and dioxane; amides such as N, N-dimethylformamide and N, N-dimethylacetamide; ether alcohols such as methyl cellosolve, isopropyl cellosolve, butyl cellosolve, diethylene glycol monomethyl ether, and the like; diethylene glycol monoethyl ether acetate; 1, 2-trichloro-1, 2-trifluoroethane, 1, 2-dichloro-1, 2-tetrafluoroethane, dimethyl sulfoxide fluorine-containing solvents such as 1, 1-dichloro-1, 2, 3-pentafluoropropane (HCFC 225), ZEORORAH, HFE7100, HFE7200 and HFE 7300. Or a mixed solvent of 2 or more of them.

The fluorine-containing oil is not particularly limited, and examples thereof include compounds (perfluoro (poly) ether compounds) represented by the following general formula (3).

Rf ⁵ －(OC ₄ F ₈ ) _a′ －(OC ₃ F ₆ ) _b′ －(OC ₂ F ₄ ) _c′ －(OCF ₂ ) _d′ －Rf ⁶ ···(3)

Wherein Rf ⁵ Represents an alkyl group having 1 to 16 carbon atoms (preferably C) _1－16 Perfluoroalkyl), rf ⁶ Represents an alkyl group having 1 to 16 carbon atoms (preferably C) _1－16 Perfluoroalkyl), fluorine atom or hydrogen atom, rf ⁵ And Rf ⁶ More preferably each independently is C _1－3 Perfluoroalkyl groups.

a ', b', c 'and d' each represent the number of 4 kinds of repeating units of perfluoro (poly) ether constituting the main skeleton of the polymer, and are each an integer of 0 to 300, independently of each other, and the sum of a ', b', c 'and d' is at least 1, preferably 1 to 300, more preferably 20 to 300. The order of the presence of the repeating units in the formula, denoted by the subscripts a ', b', c 'or d' and bracketed, is arbitrary. Among these repeating units, - (OC) ₄ F ₈ ) Can be- (OCF) ₂ CF ₂ CF ₂ CF ₂ )－、－(OCF(CF ₃ )CF ₂ CF ₂ )－、－(OCF ₂ CF(CF ₃ )CF ₂ )－、－(OCF ₂ CF ₂ CF(CF ₃ ))－、－(OC(CF ₃ ) ₂ CF ₂ )－、－(OCF ₂ C(CF ₃ ) ₂ )－、－(OCF(CF ₃ )CF(CF ₃ ))－、－(OCF(C ₂ F ₅ )CF ₂ ) -sum (OCF) ₂ CF(C ₂ F ₅ ) Any of the species, -, preferably- (OCF) ₂ CF ₂ CF ₂ CF ₂ )－。－(OC ₃ F ₆ ) Can be- (OCF) ₂ CF ₂ CF ₂ )－、－(OCF(CF ₃ )CF ₂ ) -sum (OCF) ₂ CF(CF ₃ ) Any of the species, -, preferably- (OCF) ₂ CF ₂ CF ₂ )－。－(OC ₂ F ₄ ) Can be- (OCF) ₂ CF ₂ ) -sum (OCF (CF) ₃ ) Any of the species, -, preferably- (OCF) ₂ CF ₂ )－。

Examples of the perfluoro (poly) ether compound represented by the above general formula (3) include compounds represented by any one of the following general formulae (3 a) and (3 b) (which may be a mixture of 1 or 2 or more).

Rf ⁵ －(OCF ₂ CF ₂ CF ₂ ) _b″ －Rf ⁶ ···(3a)

Rf ⁵ －(OCF ₂ CF ₂ CF ₂ CF ₂ ) _a″ －(OCF ₂ CF ₂ CF ₂ ) _b″ －(OCF ₂ CF ₂ ) _c″ －(OCF ₂ ) _d″ －Rf ⁶ ···(3b)

In these formulae, rf ⁵ And Rf ⁶ As above; in formula (3 a), b' is an integer of 1 to 100 inclusive; in formula (3 b), a 'and b' are each independently an integer of 0 to 30, and c 'and d' are each independently an integer of 1 to 300. The order of the presence of the repeat units in the formula, denoted by the subscripts a ", b", c ", d", and bracketed, is arbitrary.

Furthermore, from another point of view, the fluorine-containing oil may be of the formula Rf ³ F (formula wherein Rf ³ Is C _5－16 Perfluoroalkyl), and may also be chlorotrifluoroethylene oligomer.

The fluorine-containing oil may have an average molecular weight of 500 to 10000. The molecular weight of the fluorine-containing oil can be measured using GPC.

The fluorine-containing oil may be contained in an amount of, for example, 0.01 to 50% by mass, preferably 0.1 to 30% by mass, and for example, 1 to 15% by mass, relative to the surface treating agent of the present invention.

In one embodiment, the surface treatment agent of the present invention is substantially free of fluorine-containing oil. Substantially free of fluorine-containing oil means that the fluorine-containing oil is completely free or may contain an extremely small amount of fluorine-containing oil.

In one embodiment, the average molecular weight of the fluorine-containing oil may be greater than the average molecular weight of the fluorine-containing polyether-based silane compound. By setting the average molecular weight as described above, particularly in the case of forming the surface-treated layer by the vacuum deposition method, more excellent wear durability and surface slidability can be obtained.

In one embodiment, the average molecular weight of the fluorine-containing oil may be smaller than the average molecular weight of the fluorine-containing polyether-based silane compound. By setting the average molecular weight as described above, it is possible to form a cured product having high wear durability and high surface slidability while suppressing a decrease in the transparency of a surface-treated layer obtained from the compound.

The fluorine-containing oil contributes to improvement of the surface slidability of the layer formed by the surface treatment agent of the present invention.

As the silicone oil, for example, a linear or cyclic silicone oil having a siloxane bond of 2,000 or less can be used. The linear silicone oil may be a so-called normal silicone oil or a modified silicone oil. Examples of the general silicone oils include simethicone, methyl phenyl silicone oil, and methyl hydrogen silicone oil. Examples of the modified silicone oil include silicone oils obtained by modifying a general silicone oil with an alkyl group, an aralkyl group, a polyether, a higher fatty acid ester, a fluoroalkyl group, an amino group, an epoxy group, a carboxyl group, an alcohol, or the like. Examples of the cyclic silicone oil include cyclic dimethylsiloxane oil and the like.

In the surface treatment agent of the present invention, the silicone oil contains, for example, 0 to 300 parts by mass, preferably 50 to 200 parts by mass, relative to 100 parts by mass (the sum of 2 or more kinds is the same as described below) of the fluorinated polyether silane compound of the present invention.

The silicone oil contributes to the improvement of the surface slidability of the surface-treated layer.

Examples of the alcohols include non-fluorinated alcohols having 1 to 6 carbon atoms, such as methanol, ethanol, isopropanol, and t-butanol. By adding these alcohols to the surface treatment agent, the stability of the surface treatment agent can be improved, and the compatibility of the perfluoropolyether-group-containing silane compound with the solvent can be improved.

Examples of the compatibilizer include: 2, 2-trifluoroethanol 2, 3-pentafluoro-1-propanol or 2,3, 4,5 fluorine substituted alcohols such as octafluoro-1-pentanol, preferred terminal is CF ₂ Fluorine substituted alcohols of H; fluorine-substituted aryl compounds such as 1, 3-bis (trifluoromethyl) benzene are preferable, and fluorine-substituted benzene is preferable.

Examples of the catalyst include acids (e.g., acetic acid, trifluoroacetic acid, etc.), bases (e.g., ammonia, triethylamine, diethylamine, etc.), transition metals (e.g., ti, ni, sn, etc.), and the like.

The catalyst promotes hydrolysis and dehydration condensation of the fluorinated polyether silane compound of the present invention, and promotes formation of a layer formed from the surface treatment agent of the present invention.

Examples of the other component include tetraethoxysilane, methyltrimethoxysilane, 3-aminopropyl trimethoxysilane, 3-glycidoxypropyl trimethoxysilane, and methyltriacetoxysilane, in addition to the above components.

The surface treatment agent of the present invention can be impregnated into a porous material, for example, a porous ceramic material, a metal fiber, or a product obtained by fixing steel wool in a cotton-like state, and then formed into a pellet. The pellets can be used for vacuum evaporation, for example.

The surface treatment agent of the present invention may contain, in addition to the above-mentioned components, a trace amount of, for example, pt, rh, ru, 1, 3-divinylbenzene, triphenylphosphine, naCl, KCl, condensate of silane, and the like as impurities.

The article of the invention is described below.

The article of the present invention comprises a substrate and a layer (surface-treated layer) formed on the surface of the substrate by the surface-treating agent of the present invention.

The substrate that can be used in the present invention may be composed of, for example, glass, resin (natural or synthetic resin, for example, general plastic materials), metal, ceramic, semiconductor (silicon, germanium, etc.), fiber (fabric, nonwoven fabric, etc.), fur, leather, wood, ceramic, stone, etc., building elements, etc., sanitary articles, any appropriate material.

For example, in the case where the object to be manufactured is an optical component, the material constituting the surface of the base material may be a material for the optical component, such as glass or transparent plastic. In addition, in the case where the article to be manufactured is an optical member, some layers (or films) such as a hard coat layer, an antireflection layer, or the like may be formed on the surface (outermost layer) of the substrate. Anti-reflection layer Either of a single-layer antireflection layer and a multilayer antireflection layer may be used. Examples of the inorganic substance that can be used for the antireflection layer include SiO ₂ 、SiO、ZrO ₂ 、TiO ₂ 、TiO、Ti ₂ O ₃ 、Ti ₂ O ₅ 、Al ₂ O ₃ 、Ta ₂ O ₅ 、Ta ₃ O ₅ 、Nb ₂ O ₅ 、HfO ₂ 、Si ₃ N ₄ 、CeO ₂ 、MgO、Y ₂ O ₃ 、SnO ₂ 、MgF ₂ 、WO ₃ Etc. These inorganic substances may be used alone or in combination of 2 or more of these (for example, in the form of a mixture). In the case of using a multilayer antireflection layer, it is preferable that SiO is used as the outermost layer thereof ₂ And/or SiO. When the object to be manufactured is an optical glass member for a touch panel, a part of the surface of the substrate (glass) may have a transparent electrode, and for example, a thin film of Indium Tin Oxide (ITO) or indium zinc oxide or the like is used. The substrate may have an insulating layer, an adhesive layer, a protective layer, a decorative frame layer (I-CON), an atomized film layer, a hard coat film layer, a polarizing film, a retardation film, a liquid crystal display module, and the like according to a specific pattern thereof.

The shape of the substrate is not particularly limited, and may be, for example, a plate, a film, or other forms. The surface area of the substrate on which the surface treatment layer is to be formed may be at least a part of the surface of the substrate, and may be appropriately determined according to the intended use of the article to be manufactured, the specific model, and the like.

In one embodiment, the substrate may be composed of a material having hydroxyl groups at least in a surface portion thereof. Examples of such a material include glass, and metals (particularly, base metals), ceramics, semiconductors, and the like, each of which has a natural oxide film or a thermal oxide film formed on the surface thereof. Alternatively, in the case where hydroxyl groups are not sufficiently present, or in the case where hydroxyl groups are not originally present, as in the case of resins or the like, hydroxyl groups may be introduced or added to the surface of the substrate by subjecting the substrate to some pretreatment. Examples of the pretreatment include plasma treatment (for example, corona discharge) and ion beam irradiation. The plasma treatment is also suitable for introducing hydroxyl groups into the surface of a substrate, increasing hydroxyl groups, and cleaning the surface of the substrate (removing foreign matter, etc.). Further, as another example of the pretreatment, there may be mentioned: an interfacial adsorbent having a carbon-carbon unsaturated bond is formed on the surface of a substrate in the form of a monolayer by LB method (Langmuir-Blodgett method) or chemisorption method, and then the unsaturated bond is broken in an atmosphere containing oxygen, nitrogen, or the like.

In another embodiment, at least a surface portion of the substrate may be composed of a material containing an organosilicon compound having 1 or more other reactive groups, for example, si—h groups, or an alkoxysilane.

In a preferred embodiment, the substrate is glass. The glass is preferably a sapphire glass, a soda lime glass, an alkali aluminosilicate glass, a borosilicate glass, an alkali-free glass, a crystal glass, or a quartz glass, and particularly preferably a chemically strengthened soda lime glass, a chemically strengthened alkali aluminosilicate glass, or a chemically bonded borosilicate glass.

The article of the present invention can be produced by forming the layer of the surface treatment agent of the present invention on the surface of the base material, and if necessary, post-treating the layer.

The layer formation of the surface treatment agent of the present invention can be performed by applying the surface treatment agent to the surface of the substrate so as to cover the surface. The coating method is not particularly limited, and for example, a wet coating method and a dry coating method can be used.

Examples of the wet coating method include dip coating, spin coating, flow coating, spray coating, roll coating, gravure coating, and the like.

Examples of the dry coating method include vapor deposition (usually vacuum vapor deposition), sputtering, CVD, and the like. Specific examples of the vapor deposition method (typically, vacuum vapor deposition method) include resistance heating, electron beam, high-frequency heating using microwaves or the like, ion beam, and the like. Specific examples of the CVD method include plasma CVD, optical CVD, thermal CVD, and the like.

In addition, the coating may be performed by an atmospheric pressure plasma method.

When the wet coverage method is used, the surface treatment agent of the present invention can be applied to the surface of a substrate after dilution with a solvent. From the viewpoints of the stability of the composition of the present invention and the volatility of the solvent, the following solvents are preferably used: perfluoroaliphatic hydrocarbons having 5 to 12 carbon atoms (e.g., perfluorohexane, perfluoromethylcyclohexane, and perfluoro-1, 3-dimethylcyclohexane); polyfluoroaromatic hydrocarbons (e.g., bis (trifluoromethyl) benzene); polyfluoroaliphatic hydrocarbons (e.g. C ₆ F ₁₃ CH ₂ CH ₃ (for example, ASAHIKLIN (registered trademark) AC-6000 manufactured by asahi corporation), 1,2, 3, 4-heptafluorocyclopentane (for example, ZEORORA (registered trademark) H manufactured by japanese ray Weng Zhushi); hydrofluoroethers (HFEs) (e.g. perfluoropropyl methyl ether (C) ₃ F ₇ OCH ₃ ) (for example, novec (trademark) 7000 manufactured by Sumitomo 3M Co., ltd.), perfluorobutyl methyl ether (C) ₄ F ₉ OCH ₃ ) (for example, novec (trademark) 7100 manufactured by Sumitomo 3M Co., ltd.), perfluorobutyl ethyl ether (C) ₄ F ₉ OC ₂ H ₅ ) (for example, novec (trademark) 7200 manufactured by Sumitomo 3M Co., ltd.), perfluorohexyl methyl ether (C) ₂ F ₅ CF(OCH ₃ )C ₃ F ₇ ) Alkyl perfluoroalkyl ethers (perfluoroalkyl and alkyl groups may be straight or branched), such as Novec (trademark) 7300 manufactured by Sumitomo 3M Co., ltd., or CF ₃ CH ₂ OCF ₂ CHF ₂ (for example, ASAHIKLIN (registered trademark) AE-3000 manufactured by Asahi Kabushiki Kaisha)), and the like. These solvents may be used alone or in the form of a mixture of 2 or more. Among them, preferred is a hydrofluoroether, and particularly preferred is a perfluorobutyl methyl ether (C ₄ F ₉ OCH ₃ ) And/or perfluorobutyl ethyl ether (C) ₄ F ₉ OC ₂ H ₅ )。

When the dry coating method is used, the surface treatment agent of the present invention may be used directly in the dry coating method or may be diluted with the above solvent and then used in the dry coating method.

The layer formation of the surface treatment agent is preferably carried out in such a manner that the surface treatment agent of the present invention and a catalyst for hydrolysis and dehydration condensation coexist in the layer. For simplicity, in the case of using the wet coating method, the catalyst may be added to the diluted solution of the surface treatment agent of the present invention after the surface treatment agent of the present invention is diluted with a solvent, that is, before the surface treatment agent is applied to the surface of a substrate. When the dry coating method is used, the surface treatment agent of the present invention to which a catalyst is added may be directly subjected to vapor deposition (usually vacuum vapor deposition), or may be subjected to vapor deposition (usually vacuum vapor deposition) using a particulate material in which a metal porous body such as iron or copper is impregnated with the surface treatment agent of the present invention to which a catalyst is added.

The catalyst can use any suitable acid or base. As the acid catalyst, for example, acetic acid, formic acid, trifluoroacetic acid, and the like can be used. As the base catalyst, ammonia, organic amines, and the like can be used, for example.

The surface treatment layer included in the article of the present invention has both high wear durability. The surface treatment layer has, in addition to high abrasion durability, water repellency, oil repellency, stain resistance (for example, to prevent adhesion of dirt such as fingerprints), water repellency (to prevent water from penetrating into electronic parts, etc.), surface slidability (or lubricity, wiping-off property of dirt such as fingerprints, and excellent touch feeling to fingers), chemical resistance, etc., depending on the composition of the surface treatment agent used, and is suitable for use as a functional film.

The invention therefore also relates to an optical material having an outermost layer with the surface treatment layer described above.

As the optical material, various optical materials are preferably exemplified in addition to the optical materials related to a display or the like which will be exemplified later, for example: a display such as a cathode ray tube (CRT, for example, a computer display), a liquid crystal display, a plasma display, an organic EL display, an inorganic thin film EL dot matrix display, a rear projection display, a fluorescent display tube (VFD), a field emission display (FED, field Emission Display), or a protective plate for these displays, or a material having an antireflection film treatment applied to the surface thereof.

The article of the present invention may be an optical member, but is not particularly limited. Examples of the optical member may be listed as follows: lenses such as glasses; front protection plates, antireflection plates, polarizing plates, antiglare plates for displays such as PDP, LCD, etc.; touch panel pieces of devices such as mobile phones and portable information terminals; disc surfaces of optical discs such as Blu-ray discs, DVD discs, and CD-R, MO; an optical fiber; a display surface of a timepiece, and the like.

In addition, the article of the present invention may also be a medical device or a medical material.

The thickness of the above layer is not particularly limited. In the case of the optical member, the thickness of the layer is preferably in the range of 1 to 50nm, 1 to 30nm, preferably 1 to 15nm, from the viewpoints of optical performance, abrasion durability and stain resistance.

The article of the present invention is described in detail above, but the article of the present invention, the method of manufacturing the article, and the like are not limited to the above examples.

Examples

The following examples illustrate the articles of the present invention, but the present invention is not limited to the following examples. In this example, the order of presence of the repeating units constituting the fluoropolyether is arbitrary, and the chemical formula shown below represents the average composition.

As the fluorinated polyether silane compound, the following compounds were prepared.

Compound (a):

(m≈21、n≈35)

(wherein, as an average composition, 0.27 (CF ₂ CF ₂ CF ₂ CF ₂ O) repeating units and 0.42 (CF) ₂ CF ₂ CF ₂ O) repeating units, but omitted because they are in trace amounts. And, 3.2% of the total amount of the monomers having-C (CH) ₂ CH ₂ CH ₂ Si(OCH ₃ ) ₃ ) Is a compound of formula (I),but omitted because of the trace. )

A compound (B);

(m≈26、n≈24)

(wherein, as an average composition, 1.32 (CF ₂ CF ₂ CF ₂ CF ₂ O) repeating units and 0.70 (CF) ₂ CF ₂ CF ₂ O) repeating units, but omitted because they are in trace amounts. And, 8.0% of the N-containing units have-N (CH) ₂ CH ₂ CH ₂ Si(OCH ₃ ) ₃ ) ₂ But omitted because of the trace amount. )

Compound (C):

(n.apprxeq.20, t=1 to 6, average about 3)

Compound (D):

CF ₃ (OCF ₂ CF ₂ ) _m (OCF ₂ ) _n OCF ₃

(m≈22、n≈21)

(preparation of dilution)

As the diluent (X) for the fluoropolyether-containing silane compound, the above-mentioned compound (A), compound (B), compound (C) and compound (D) were dissolved in hydrofluoroether (Novec HFE-7200 manufactured by 3M company) at a concentration of 20% by mass, respectively, to prepare diluents (X1), (X2), (X3) and (X4).

As the alcohol diluents (Y), pentafluoropropanol, hexafluoroisopropanol, ethanol and isopropanol were dissolved in hydrofluoroether (Novec HFE-7200 manufactured by 3M company) at concentrations of 20% by mass, respectively, to prepare diluents (Y1), (Y2), (Y3) and (Y4).

As the diluent (X) for the fluoropolyether-containing silane compound, the above-mentioned compound (A), compound (B), compound (C) and compound (D) were dissolved in hydrofluoroether (Novec HFE-7200 manufactured by 3M company) at a concentration of 0.1% by mass, respectively, to prepare diluents (X5), (X6), (X7) and (X8).

As the alcohol diluents (Y), pentafluoropropanol, hexafluoroisopropanol, ethanol and isopropanol were dissolved in hydrofluoroether (Novec HFE-7200 manufactured by 3M Co.) at concentrations of 0.1 mass%, respectively, to prepare diluents (Y5), (Y6), (Y7) and (Y8).

(preparation of surface treatment agent 1)

The diluted solutions (X) and (Y) were mixed in the proportions shown in table 1 below to prepare surface treatment agents 1 to 9. Surface treatments 1 to 5 were examples, and surface treatments 6 to 9 were comparative examples.

TABLE 1

(formation of surface treatment layer)

The surface treatments 1 to 9 obtained above were each vacuum-deposited on chemically strengthened glass (Gorilla glass, manufactured by Kanning Co., ltd., thickness: 0.7 mm). The vacuum evaporation method is carried out by a resistance heating evaporator (manufactured by SHINCRON), and the size of the chamberVacuum degree 5.0E-05, current value 240A, voltage 10V, substrate temperature 40 ℃. Then, the chemically strengthened glass after vapor deposition was allowed to stand in an atmosphere at 150℃for 30 minutes, and then cooled to room temperature, whereby a surface-treated layer was formed on the glass substrate.

(evaluation of characteristics of surface-treated layer)

The properties of the obtained surface-treated layer were evaluated as follows. The results are shown in table 2 below.

< static contact Angle >)

(initial evaluation)

As an initial evaluation, the static contact angle of water was measured in a state where the surface thereof was not contacted with any substance after the formation of the surface treatment layer.

(SW abrasion resistance test)

SW: (BON STAR steel wool, # 0000);

ground area: 10mm;

distance of movement (single pass): 60mm;

speed of movement: 60 cycles/min;

load is as follows: 1kgf.

TABLE 2

(preparation of surface treatment agent 2)

The diluted solutions (X) and (Y) were mixed in the proportions shown in table 3 below to prepare surface treatment agents 10 to 16. The surface treatments 10 to 12 are examples, and the surface treatments 13 to 16 are comparative examples.

TABLE 3

(formation of surface treatment layer 2)

Plasma cleaning the substrate glass until the water contact angle reaches below 10 DEG, then using a 2-fluid nozzle at 48g/m ² The coating amount of (2) is to coat the dilution liquid on the glass. After the coating, aging treatment was performed at 150℃for 30 minutes to form a surface-treated layer.

(evaluation of characteristics of surface-treated layer)

The properties of the obtained surface-treated layer were evaluated in the same manner as described above. The results are shown in table 4 below.

TABLE 4

Industrial applicability

The article of the present invention is suitable for various applications, for example, optical components such as touch panels.

Claims

1. A surface treating agent characterized by:

containing a fluorinated polyether silane compound and a lower fluoroalkyl alcohol,

the content of the lower fluoroalkyl alcohol is 30 parts by mass or less per 100 parts by mass of the fluorinated polyether silane compound.

2. The surface treatment agent according to claim 1, wherein:

the fluorinated polyether silane compound is at least 1 fluorinated polyether silane compound represented by the following formula (1) or (2),

R ^F1 _α -X ^A -R ^Si _β (1)

R ^Si _γ -X ^A -R ^F2 -X ^A -R ^Si _γ (2)

in the method, in the process of the invention,

R ^F1 each occurrence is independently Rf ¹ -R ^F -O _q -；

R ^F2 is-Rf ² _p -R ^F -O _q -；

Rf ¹ Each occurrence is independently C which may be substituted with 1 or more fluorine atoms _1-16 An alkyl group;

Rf ² is C which may be substituted by 1 or more fluorine atoms _1-6 An alkylene group;

R ^F each independently at each occurrence a 2-valent fluoropolyether group;

p is 0 or 1;

q is independently 0 or 1 for each occurrence;

X ^A Each independently is a single bond or a 2-10 valent organic group;

alpha is an integer of 1 to 9;

beta is an integer of 1 to 9;

gamma is an integer of 1 to 9.

3. The surface treatment agent according to claim 2, wherein:

Rf ¹ each occurrence is independently C _1-16 A perfluoroalkyl group, a perfluoro alkyl group,

Rf ² each occurrence is independently C _1-6 A perfluoroalkylene group.

4. A surface treatment agent according to claim 2 or 3, characterized in that:

R ^F each occurrence is independently of the formula: - (OC) ₆ F ₁₂ ) _a -(OC ₅ F ₁₀ ) _b -(OC ₄ F ₈ ) _c -(OC ₃ R ^Fa ₆ ) _d -(OC ₂ F ₄ ) _e -(OCF ₂ ) _f The group indicated is chosen from the group indicated,

wherein R is ^Fa Each independently at each occurrence is a hydrogen atom, a fluorine atom or a chlorine atom,

a. b, c, d, e and f are each independently an integer of 0 to 200, the sum of a, b, c, d, e and f being 1 or more, the order in which the repeating units a, b, c, d, e or f are present in the formula, bracketed by brackets, is arbitrary, but in all R ^Fa In the case of a hydrogen atom or a chlorine atom, at least 1 of a, b, c, e and f is 1 or more.

5. The surface treatment agent according to claim 4, wherein:

R ^Fa is a fluorine atom.

6. A surface treatment agent according to claim 2 or 3, characterized in that:

R ^F at each timeEach independently in each occurrence is a group represented by the following formula (f 1), (f 2), (f 3), (f 4), (f 5) or (f 6),

-(OC ₃ F ₆ ) _d -(OC ₂ F ₄ ) _e - (f1)

In the formula (f 1), d is an integer of 1 to 200, and e is 0 or 1;

-(OC ₄ F ₈ ) _c -(OC ₃ F ₆ ) _d -(OC ₂ F ₄ ) _e -(OCF ₂ ) _f - (f2)

in the formula (f 2), c and d are each independently an integer of 0 to 30;

e and f are each independently integers from 1 to 200;

c. d, e and f are integers from 10 to 200;

the order of the presence of the repeating units in the formula, denoted by the subscripts c, d, e, or f and bracketed, is arbitrary;

-(R ⁶ -R ⁷ ) _g - (f3)

in the formula (f 3), R ⁶ Is OCF ₂ Or OC (alpha) ₂ F ₄ ；

g is an integer of 2 to 100;

-(R ⁶ -R ⁷ ) _g -R ^r -(R ^7′ -R ^6′ ) _g′ - (f4)

in the formula (f 4), R ⁶ Is OCF ₂ Or OC (alpha) ₂ F ₄ ，

R ^6′ is OCF ₂ Or OC (alpha) ₂ F ₄ ，

g is an integer of 2 to 100,

g' is an integer of 2 to 100,

R ^r is that

Wherein, represents a bonding position;

-(OC ₆ F ₁₂ ) _a -(OC ₅ F ₁₀ ) _b -(OC ₄ F ₈ ) _c -(OC ₃ F ₆ ) _d -(OC ₂ F ₄ ) _e -(OCF ₂ ) _f - (f5)

in the formula (f 5), e is an integer of 1 to 200, a, b, c, d and f are each independently an integer of 0 to 200, and the order in which the repeating units represented by a, b, c, d, e or f and bracketed by brackets are present in the formula is arbitrary;

wherein f is an integer of 1 to 200, a, b, c, d and e are each independently an integer of 0 to 200, and the order in which the repeating units represented by a, b, c, d, e or f and bracketed by brackets are present in the formula is arbitrary.

7. The surface treatment agent according to any one of claims 2 to 6, wherein:

R ^Si is a group represented by the following formula (S1), (S2), (S3), (S4) or (S5),

-SiR ¹¹ _n1 R ¹² _3-n1 (S2)

-SiR ^a1 _k1 R ^b1 ₁₁ R ^c1 _m1 (S3)

-CR ^d1 _k2 R ^e1 ₁₂ R ^f1 _m2 (S4)

-NR ^g1 R ^h1 (S5)

in the method, in the process of the invention,

t is independently an integer of 2 or more for each occurrence;

R ^a1 each occurrence is independently-Z ¹ -SiR ²¹ _p1 R ²² _q1 R ²³ _r1 ；

Z ¹ At each timeEach independently at the occurrence is an oxygen atom or a 2-valent organic group;

R ²³ each occurrence of which is independently a hydrogen atom or a 1-valent organic group;

p1 is independently at each occurrence an integer from 0 to 3;

q1 is independently at each occurrence an integer from 0 to 3;

r1 is independently at each occurrence an integer from 0 to 3;

the sum of p1, q1 and r1 is SiR ²¹ _p1 R ²² _q1 R ²³ _r1 3 in the unit;

R ^21′ each occurrence is independently-Z ^1″ -SiR ^22″ _q1″ R ^23″ _r1″ ；

p1' is independently at each occurrence an integer from 0 to 3;

q1' is independently at each occurrence an integer from 0 to 3;

r1' is independently at each occurrence an integer from 0 to 3;

q1 "is independently at each occurrence an integer from 0 to 3;

r1' is independently at each occurrence an integer from 0 to 3;

the sum of q1 'and r1' is SiR ^22″ _q1″ R ^23″ _r1″ 3 in the unit;

k1 is independently at each occurrence an integer from 0 to 3;

11 is independently an integer from 0 to 3 for each occurrence;

m1 is independently at each occurrence an integer from 0 to 3;

the sum of k1, 11 and m1 is SiR ^a1 _k1 R ^b1 ₁₁ R ^c1 _m1 3 in the unit;

R ^d1 each occurrence is independently-Z ² -CR ³¹ _p2 R ³² _q2 R ³³ _r2 ；

R ³¹ each occurrence is independently-Z ^2′ -CR ^32′ _q2′ R ^33′ _r2′ ；

R ³² Each occurrence is independently-Z ³ -SiR ³⁴ _n2 R ³⁵ _3-n2 ；

p2 is independently at each occurrence an integer from 0 to 3;

q2 is independently at each occurrence an integer from 0 to 3;

r2 is independently at each occurrence an integer from 0 to 3;

the sum of p2, q2 and r2 is SiR ³¹ _p2 R ³² _q2 R ³³ _r2 3 in the unit;

Z ^2′ each occurrence of which is independently a single bond, an oxygen atom, or a 2-valent organic group;

R ^32′ each occurrence is independently-Z ³ -SiR ³⁴ _n2 R ³⁵ _3-n2 ；

q2' is independently at each occurrence an integer from 0 to 3;

r2' is independently at each occurrence an integer from 0 to 3;

q2 'and r2' add up to SiR ^32′ _q2′ R ^33′ _r2′ 3 in the unit;

n2 is independently at each occurrence an integer from 0 to 3;

R ^e1 each occurrence is independently-Z ³ -SiR ³⁴ _n2 R ³⁵ _3-n2 ；

k2 is independently at each occurrence an integer from 0 to 3;

12 is independently an integer from 0 to 3 for each occurrence;

m2 is independently at each occurrence an integer from 0 to 3;

the sum of k2, 12 and m2 is CR ^d1 _k2 R ^e1 ₁₂ R ^f1 _m2 3 in the unit;

R ^g1 and R is ^h1 Each occurrence is independently-Z ⁴ -SiR ¹¹ _n1 R ¹² _3-n1 、-Z ⁴ -SiR ^a1 _k1 R ^b1 ₁₁ R ^c1 _m1 、-Z ⁴ -CR ^d1 _k2 R ^e1 ₁₂ R ^f1 _m2 ；

wherein in the formulas (S1), (S2), (S3), (S4) and (S5), at least 1 Si atom to which a hydroxyl group or a hydrolyzable group is bonded is present.

8. The surface treatment agent according to any one of claims 2 to 7, wherein:

alpha, beta and gamma are 1.

9. The surface treatment agent according to claim 7 or 8, characterized in that:

R ^Si Is of the formula (S3), (S4) or (S5).

10. The surface treatment agent according to any one of claims 7 to 9, characterized in that:

R ^Si is of formula (S3).

11. The surface treatment agent according to claim 7, wherein:

containing R ^Si A fluorinated polyether silane compound of the formula (S1), and R ^Si A fluoropolyether-based silane compound of the formula (S3), (S4) or (S5).

12. The surface treatment agent according to claim 7, wherein:

containing R ^Si Is of the formula (S1)Fluoro polyether silane compound, and R ^Si Is a fluorinated polyether silane compound of formula (S3).

13. The surface treatment agent according to claim 7, wherein:

containing R ^Si A fluorinated polyether silane compound of the formula (S1), and R ^Si Is a fluorinated polyether silane compound of formula (S4).

14. The surface treatment agent according to any one of claims 1 to 13, characterized in that:

the content of the lower fluoroalkyl alcohol is 0.1 to 20 parts by mass per 100 parts by mass of the fluorinated polyether silane compound.

15. The surface treatment agent according to any one of claims 1 to 14, characterized in that:

the content of the lower fluoroalkyl alcohol is 3.0 to 20 parts by mass per 100 parts by mass of the fluorinated polyether silane compound.

16. The surface treatment agent according to any one of claims 1 to 15, characterized in that:

the lower fluoroalkyl alcohol is a fluoroalkyl alcohol having a pKa of 15.0 or less.

17. The surface treatment agent according to any one of claims 1 to 16, characterized in that:

the lower fluoroalkyl alcohol is a fluoroalkyl alcohol having a pKa of 5.0 to 15.0.

18. The surface treatment agent according to any one of claims 1 to 17, characterized in that:

the lower fluoroalkyl alcohol is of the formula: CRf ⁴ _n4 H _3-n4 A fluoroalkyl alcohol represented by the formula-OH,

wherein Rf ⁴ Is a perfluoroalkyl group having 1 to 3 carbon atoms, and n4 is an integer of 1 to 3.

19. The surface treatment agent according to any one of claims 1 to 18, characterized in that:

the lower fluoroalkyl alcohol is a fluoroalkyl alcohol having 1 to 6 carbon atoms.

20. The surface treatment agent according to any one of claims 1 to 19, characterized in that:

the lower fluoroalkyl alcohol is hexafluoropropanol or hexafluoroisopropanol.

21. The surface treatment agent according to any one of claims 1 to 20, characterized in that:

and further comprises 1 or more other components selected from fluorine-containing oil, silicone oil and catalyst.

22. The surface treatment agent according to any one of claims 1 to 21, characterized in that:

And further comprises a solvent.

23. The surface treatment agent according to any one of claims 1 to 22, characterized in that:

as an antifouling coating agent or a water-repellent coating agent.

24. A pellet, characterized in that:

a surface treatment agent according to any one of claims 1 to 23.

25. An article comprising a substrate and a layer formed on the substrate from the surface treatment agent of any one of claims 1-23.

26. The article as defined in claim 24, wherein:

the substrate is a glass substrate.

27. The article of claim 25, wherein:

the article is an optical component.