CN117811531A

CN117811531A - Matching state feedback circuit and radio frequency power supply equipment

Info

Publication number: CN117811531A
Application number: CN202410219146.9A
Authority: CN
Inventors: 王树晓; 林炯康; 陈亚梯
Original assignee: SHENZHEN HANQIANG TECHNOLOGY CO LTD
Current assignee: SHENZHEN HANQIANG TECHNOLOGY CO LTD
Priority date: 2024-02-28
Filing date: 2024-02-28
Publication date: 2024-04-02
Anticipated expiration: 2044-02-28

Abstract

The application provides a matching state feedback circuit and radio frequency power supply equipment, wherein the matching state feedback circuit comprises a voltage acquisition unit, a current acquisition unit and a connection unit, the voltage acquisition unit is used for converting acquired output voltage into a voltage comparison signal, the current acquisition unit is used for converting acquired output current into a current comparison signal, and the connection unit is used for being in a corresponding path disconnection state or a path connection state according to the magnitude of the voltage comparison signal and the current comparison signal so that the voltage acquisition unit and the current acquisition unit are in corresponding disconnection state or connection state; the feedback end of the current acquisition unit is used for generating a feedback signal according to the disconnection state or the connection state of the voltage acquisition unit and the current acquisition unit, when the feedback signal is zero, the phase difference between the output voltage and the output current of the radio frequency power supply is zero, and the impedance of the radio frequency power supply and the load is matched. The matching state of the radio frequency power supply and the load can be fed back.

Description

Matching state feedback circuit and radio frequency power supply equipment

Technical Field

The application relates to the technical field of radio frequency, in particular to a matching state feedback circuit and radio frequency power supply equipment with the same.

Background

Currently, with the popularization of Radio Frequency (RF) technology, RF power devices are increasingly applied in various fields. When the radio frequency power supply of the radio frequency power supply device is utilized to output a load, the impedance matching of the radio frequency power supply and the load is indispensable, and when the radio frequency power supply is matched with the load impedance, the occurrence of reflected power can be effectively reduced, and a better output effect is obtained.

However, in impedance matching an rf power source to a load, it is often considered that impedance matching is determined to be completed when the phase angle of a voltage is the same as the phase angle of a current, but it is currently difficult to detect the phase angle of a voltage and a current, to determine whether the phase angles of a current and a voltage are the same, and to determine when impedance matching is completed. Therefore, how to feed back the matching state of the rf power supply and the load to determine whether the rf power supply and the load are impedance-matched becomes a problem to be considered.

Disclosure of Invention

The application provides a matching state feedback circuit and radio frequency power supply equipment, which can feed back the matching state of a radio frequency power supply and a load.

In a first aspect, a matching state feedback circuit is provided, where the matching state feedback circuit is configured to feedback a matching state of a radio frequency power supply and a load, and the matching state feedback circuit includes a voltage acquisition unit, a current acquisition unit, and a connection unit. The voltage acquisition unit is connected with the output end of the radio frequency power supply and is used for acquiring the output voltage of the radio frequency power supply and converting the acquired output voltage into a voltage comparison signal; the current acquisition unit is connected with the output end of the radio frequency power supply and is used for acquiring the output current of the radio frequency power supply and converting the acquired output current into a current comparison signal; the connecting unit is respectively connected with the voltage acquisition unit and the current acquisition unit, and is used for receiving the voltage comparison signal and the current comparison signal and is in a corresponding path disconnection state or a path connection state according to the magnitude of the voltage comparison signal and the current comparison signal so that the voltage acquisition unit and the current acquisition unit are in a corresponding disconnection state or connection state through the connecting unit; the current acquisition unit is provided with a feedback end, and the feedback end is used for generating a corresponding feedback signal according to the disconnection state or the connection state of the voltage acquisition unit and the current acquisition unit, wherein the feedback signal is zero, the phase difference between the output voltage and the output current of the radio frequency power supply is zero, the radio frequency power supply is matched with the impedance of the load at the moment, the feedback signal is not zero, the phase difference between the output voltage and the output current of the radio frequency power supply is not zero, and the impedance of the radio frequency power supply and the impedance of the load is mismatched at the moment.

In a possible implementation manner, when the voltage comparison signal is equal to the current comparison signal, the connection unit is in a path disconnection state, so that the voltage acquisition unit and the current acquisition unit are correspondingly in a disconnection state, and the feedback end generates zero feedback signals according to the disconnected voltage acquisition unit and the current acquisition unit; when the voltage comparison signal is larger or smaller than the current comparison signal, the connection unit is in a path connection state, so that the voltage acquisition unit and the current acquisition unit are correspondingly in a connection state, and the feedback signal generated by the feedback end according to the connected voltage acquisition unit and current acquisition unit is not zero.

In a possible embodiment, the voltage comparison signal includes a first voltage signal and a second voltage signal that are equal, the current comparison signal includes a first current signal and a second current signal that are equal, the voltage acquisition unit includes a first voltage output terminal and a second voltage output terminal for outputting the first voltage signal and the second voltage signal, respectively, and the current acquisition unit includes a first current output terminal and a second current output terminal for outputting the first current signal and the second current signal, respectively; the connecting unit comprises a first diode, a second diode, a third diode and a fourth diode, wherein the cathode of the first diode is connected with the anode of the second diode, the cathode of the second diode is connected with the anode of the third diode, the cathode of the third diode is connected with the anode of the fourth diode, the cathode of the fourth diode is connected with the anode of the first diode, the first voltage output end of the voltage acquisition unit is connected with the connecting point of the first diode and the second diode, the second voltage output end of the voltage acquisition unit is connected with the connecting point of the third diode and the fourth diode, the first current output end of the current acquisition unit is connected with the connecting point of the first diode and the fourth diode, and the second current output end of the current acquisition unit is connected with the connecting point of the second diode and the third diode; when the connection unit receives the first voltage signal, the second voltage signal, the first current signal and the second current signal, all of the first diode, the second diode, the third diode and the fourth diode are in a non-conductive state, so that the connection unit is in a path disconnection state, or some of the first diode, the second diode, the third diode and the fourth diode are in a conductive state, so that the connection unit is in a path connection state.

In one possible implementation manner, the voltage acquisition unit includes a voltage transformer, a first voltage amplitude acquisition module, a second voltage amplitude acquisition module, a first voltage divider and a second voltage divider, one end of the voltage transformer is connected with the first voltage amplitude acquisition module and the first voltage divider respectively, the first voltage amplitude acquisition module is connected with the first voltage divider, the other end of the voltage transformer is connected with the second voltage amplitude acquisition module and the second voltage divider respectively, the second voltage amplitude acquisition module is connected with the second voltage divider, the output end of the first voltage divider and the output end of the second voltage divider are a first voltage output end and a second voltage output end of the voltage acquisition unit, the voltage transformer is used for acquiring the output voltage of the radio frequency power supply, the first voltage amplitude acquisition module and the second voltage amplitude acquisition module are used for correspondingly acquiring the amplitude of the acquired output voltage, the first voltage divider and the second voltage divider are correspondingly connected with the second voltage divider and are correspondingly used for acquiring the voltage of the output signal and the output of the voltage and the output of the second voltage divider are calculated; the current acquisition unit comprises a current transformer, a first current amplitude acquisition module, a second current amplitude acquisition module, a first current divider and a second current divider, one end of the current transformer is connected with the first current amplitude acquisition module and the first current divider respectively, the first current amplitude acquisition module is connected with the first current divider, the other end of the current transformer is connected with the second current amplitude acquisition module and the second current divider respectively, the second current amplitude acquisition module is connected with the second current divider, the output end of the first current divider and the output end of the second current divider are a first current output end and a second current output end of the current acquisition unit, the current transformer is used for acquiring output current of the radio frequency power supply, the first current amplitude acquisition module and the second current amplitude acquisition module are used for correspondingly acquiring the amplitude of the acquired output current, the first current and the second current are used for correspondingly receiving the output current and outputting the output current and the second current divider and carrying out operation on the acquired current and the output signal of the acquired current and the second current divider and the acquired by the amplitude divider.

In one possible implementation manner, the voltage transformer comprises a primary voltage winding, a first secondary voltage winding and a second secondary voltage winding, wherein the primary voltage winding is connected between the output end of the radio frequency power supply and the ground, one end of the first secondary voltage winding is respectively connected with the first voltage amplitude acquisition module and the first voltage divider and is connected with a connection point of the first diode and the second diode through the first voltage divider, one end of the second secondary voltage winding is respectively connected with the second voltage amplitude acquisition module and the second voltage divider and is connected with a connection point of the third diode and the fourth diode through the second voltage divider, and the other end of the first secondary voltage winding is respectively connected with the other end of the second secondary voltage winding and is respectively connected with the ground; the output voltage acquired by the primary voltage winding is induced to one end of the first secondary voltage winding and one end of the second secondary voltage winding, and the induced voltage is divided by the first voltage divider and the second voltage divider respectively to correspondingly obtain the first voltage signal and the second voltage signal, wherein the first secondary voltage winding and the second secondary voltage winding are oppositely wound, and the number of turns is equal, so that the first voltage signal and the second voltage signal are equal in size.

In one possible implementation manner, the current transformer comprises a primary current winding, a first secondary current winding and a second secondary current winding, wherein the primary current winding is connected between an output end of the radio frequency power supply and the load, one end of the first secondary current winding is respectively connected with the first current amplitude acquisition module and the first current divider and is connected with a connection point of the first diode and the fourth diode through the first current divider, one end of the second secondary current winding is respectively connected with the second current amplitude acquisition module and the second current divider and is connected with a connection point of the second diode and the third diode through the second current divider, and the other end of the first secondary current winding is connected with the other end of the second secondary current winding to form a feedback end; the output current collected by the primary current winding is induced to one end of the first secondary current winding and one end of the second secondary current winding, and the induced current is divided by the first current divider and the second current divider respectively to obtain the first current signal and the second current signal correspondingly, wherein the first secondary current winding and the second secondary current winding are oppositely wound, and the number of turns is equal, so that the first current signal and the second current signal are equal in size.

In a possible implementation manner, when the first voltage signal and the second voltage signal are equal to the first current signal and the second current signal, the connection unit is in a path-off state, and the first diode, the second diode, the third diode and the fourth diode are all turned off, so that the first secondary current winding and the second secondary current winding are disconnected from the first secondary voltage winding and the second secondary voltage winding, the feedback end generates the feedback signal according to two induced currents of equal magnitude and opposite direction of the first secondary current winding and the second secondary current winding, and the feedback signal is zero; when the first voltage signal and the second voltage signal are greater than the first current signal and the second current signal, the connection unit is in a path connection state, the second diode and the fourth diode are conducted, the first diode and the third diode are disconnected, so that the first secondary voltage winding is connected with the second secondary current winding through the conducted second diode, the second secondary voltage winding is connected with the first secondary current winding through the conducted fourth diode, the feedback end generates the feedback signal according to the sum of the difference value of the first voltage signal and the first current signal and the difference value of the second voltage signal and the second current signal, and the feedback signal is not equal to zero; when the first voltage signal and the second voltage signal are smaller than the first current signal and the second current signal, the connection unit is in a path connection state, the first diode and the third diode are conducted, the second diode and the fourth diode are disconnected, so that the first secondary current winding is connected with the first secondary voltage winding through the conducted first diode, the second secondary current winding is connected with the second secondary voltage winding through the conducted third diode, the feedback end generates the feedback signal according to the sum of the difference value of the first current signal and the first voltage signal and the difference value of the second current signal and the second voltage signal, and the feedback signal is not equal to zero.

In one possible implementation manner, the matching state feedback circuit further includes a control unit, where the control unit is connected to the feedback end, and is at least configured to receive the feedback signal generated by the feedback end, determine, according to the feedback signal, a phase difference between an output voltage and an output current of the radio frequency power supply, and further determine whether impedance matching is completed between the radio frequency power supply and the load.

In a second aspect, there is further provided a radio frequency power supply device, where the radio frequency power supply device includes a radio frequency power supply and a matching state feedback circuit, where an output end of the radio frequency power supply is used to connect to a load, and the matching state feedback circuit is used to feed back a matching state of the radio frequency power supply and the load. The matching state feedback circuit comprises a voltage acquisition unit, a current acquisition unit and a connection unit. The voltage acquisition unit is connected with the output end of the radio frequency power supply and is used for acquiring the output voltage of the radio frequency power supply and converting the acquired output voltage into a voltage comparison signal; the current acquisition unit is connected with the output end of the radio frequency power supply and is used for acquiring the output current of the radio frequency power supply and converting the acquired output current into a current comparison signal; the connecting unit is respectively connected with the voltage acquisition unit and the current acquisition unit, and is used for receiving the voltage comparison signal and the current comparison signal and is in a corresponding path disconnection state or a path connection state according to the magnitude of the voltage comparison signal and the current comparison signal so that the voltage acquisition unit and the current acquisition unit are in a corresponding disconnection state or connection state through the connecting unit; the current acquisition unit is provided with a feedback end, and the feedback end is used for generating a corresponding feedback signal according to the disconnection state or the connection state of the voltage acquisition unit and the current acquisition unit, wherein the feedback signal is zero, the phase difference between the output voltage and the output current of the radio frequency power supply is zero, the radio frequency power supply is matched with the impedance of the load at the moment, the feedback signal is not zero, the phase difference between the output voltage and the output current of the radio frequency power supply is not zero, and the impedance of the radio frequency power supply and the impedance of the load is mismatched at the moment.

In one possible implementation manner, the radio frequency power supply device further comprises an impedance matching circuit, wherein the impedance matching circuit is connected between the matching state feedback circuit and the load, and the impedance matching circuit is used for performing impedance matching on the radio frequency power supply and the load according to a feedback result of the matching state feedback circuit.

According to the matching state feedback circuit and the radio frequency power supply equipment, the voltage acquisition unit is arranged to acquire the output voltage of the radio frequency power supply, the acquired output voltage is converted into the voltage comparison signal, the current acquisition unit is arranged to acquire the output current of the radio frequency power supply, the acquired output current is converted into the current comparison signal, the connecting unit is arranged to receive the voltage comparison signal and the current comparison signal, and the matching state feedback circuit is in a corresponding path disconnection state or a path connection state according to the magnitude of the voltage comparison signal and the current comparison signal, so that the voltage acquisition unit and the current acquisition unit are in a corresponding disconnection state or a corresponding connection state through the connecting unit, the phase angle between the output voltage of the radio frequency power supply and the output current is not required to be detected, whether the phase difference between the output voltage of the radio frequency power supply and the phase difference between the output current is zero or not is determined through the feedback signal generated by the feedback end of the current acquisition unit, and the matching state feedback circuit can conveniently feed back the matching state between the radio frequency power supply and a load.

Drawings

In order to more clearly describe the technical solutions in the embodiments or the background of the present application, the following description will describe the drawings that are required to be used in the embodiments or the background of the present application.

Fig. 1 is a circuit schematic diagram of a matching state feedback circuit in an embodiment of the present application.

Fig. 2 is a schematic circuit diagram of a voltage acquisition unit according to an embodiment of the present application.

Fig. 3 is a schematic circuit diagram of a current collecting unit according to an embodiment of the present application.

Fig. 4 is a circuit schematic diagram of a matching state feedback circuit in another embodiment of the present application.

Fig. 5 is a block diagram of a radio frequency power supply device according to an embodiment of the present application.

Fig. 6 is a schematic circuit diagram of a radio frequency power supply device according to an embodiment of the present application.

Reference numerals illustrate: 1. the radio frequency power supply device, 10, the matching state feedback circuit, 100, the voltage acquisition unit, U0, the voltage comparison signal, U1, the first voltage signal, U2, the second voltage signal, PT, the voltage transformer, W11, the primary voltage winding, W12, the first secondary voltage winding, W13, the second secondary voltage winding, 110, the first voltage amplitude acquisition module, 120, the second voltage amplitude acquisition module, 130, the first voltage divider, 131, the first voltage output end, 140, the second voltage divider, 141, the second voltage output end, 200, the current acquisition unit, I0, the current comparison signal, I1, the first current signal, I2, the second current signal, CT, the current transformer, W21, primary current winding, W22, first secondary current winding, W23, second secondary current winding, BF, feedback end, R1, first resistor, 210, first current amplitude acquisition module, 220, second current amplitude acquisition module, 230, first current divider, 231, first current output end, 240, second current divider, 241, second current output end, 300, connection unit, D1, first diode, D2, second diode, D3, third diode, D4, fourth diode, 400, control unit, 500, regulation unit, 20, radio frequency power supply, 21, output end, 30, load, 40, impedance matching circuit, C1, first capacitor, L1, first inductor, GND, ground.

Detailed Description

The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without undue burden, are within the scope of the present application.

In the description of the embodiments of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "connected," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art in a specific context.

In the following, the terms "first", "second", "third", "fourth" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", "a third" and a fourth "may explicitly or implicitly include one or more such feature. In the description of the embodiments of the present application, unless otherwise indicated, the meaning of "a plurality" is two or more.

Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or server that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed or inherent to such process, method, article, or apparatus, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

Referring to fig. 1, fig. 1 is a schematic circuit diagram of a matching state feedback circuit in an embodiment of the present application. As shown in fig. 1, the present application provides a matching state feedback circuit 10, where the matching state feedback circuit 10 is configured to feedback a matching state of a radio frequency power supply 20 and a load 30, and includes a voltage acquisition unit 100, a current acquisition unit 200, and a connection unit 300. The voltage acquisition unit 100 is connected with the output end 21 of the radio frequency power supply 20, and is used for acquiring the output voltage of the radio frequency power supply 20 and converting the acquired output voltage into a voltage comparison signal U0; the current acquisition unit 200 is connected with the output end 21 of the radio frequency power supply 20, and is used for acquiring the output current of the radio frequency power supply 20 and converting the acquired output current into a current comparison signal I0; the connection unit 300 is connected with the voltage acquisition unit 100 and the current acquisition unit 200, and is configured to receive the voltage comparison signal U0 and the current comparison signal I0, and to be in a corresponding path disconnection state or a path connection state according to the magnitudes of the voltage comparison signal U0 and the current comparison signal I0, so that the voltage acquisition unit 100 and the current acquisition unit 200 are in a corresponding disconnection state or connection state through the connection unit 300; the current collection unit 200 has a feedback end BF, which is configured to generate a corresponding feedback signal according to an off state or a connection state of the voltage collection unit 100 and the current collection unit 200, where the feedback signal is zero, and represents that a phase difference between an output voltage and an output current of the rf power supply 20 is zero, and at the moment, the impedance of the rf power supply 20 and the load 30 is matched, and the feedback signal is not zero, and represents that a phase difference between an output voltage and an output current of the rf power supply 20 is not zero, and at the moment, the impedance of the rf power supply 20 and the load 30 is mismatched.

Therefore, in the matching state feedback circuit 10 in the present application, the voltage collection unit 100 is configured to collect the output voltage of the rf power supply 20, and convert the collected output voltage into the voltage comparison signal U0, the current collection unit 200 is configured to collect the output current of the rf power supply 20, and convert the collected output current into the current comparison signal I0, and the connection unit 300 is configured to receive the voltage comparison signal U0 and the current comparison signal I0, and to be in a corresponding path disconnection state or a path connection state according to the magnitudes of the voltage comparison signal U0 and the current comparison signal I0, so that the voltage collection unit 100 and the current collection unit 200 are in a corresponding disconnection state or a connection state through the connection unit 300, so that the phase angle between the output voltage of the rf power supply 20 and the output current is not detected, and whether the phase difference between the output voltage of the rf power supply 20 and the output current is zero or not can be represented only by the feedback signal generated by the feedback end BF of the current collection unit 200, and further, the matching state feedback circuit 10 can conveniently feed back the matching state between the rf power supply 20 and the load 30.

In one or more embodiments, the voltage acquisition unit 100 may be a voltmeter, or may be other voltage acquisition devices such as a voltage sensor, or may be a voltage acquisition circuit composed of elements such as a resistor, a capacitor, and a diode, which is not limited in this application, so long as the output voltage of the rf power supply 20 can be acquired, and the acquired output voltage is converted into the voltage comparison signal U0.

In one or more embodiments, the current collection unit 200 may be an ammeter, or may be other current collection devices such as a current sensor, or may be a current collection circuit composed of elements such as a resistor, a capacitor, and a diode, which is not limited in this application, so long as the current collection unit can collect the output current of the rf power supply 20 and convert the collected output current into the current comparison signal I0.

In one or more embodiments, when the voltage comparison signal U0 is equal to the current comparison signal I0, the connection unit 300 is in a path-off state, so that the voltage acquisition unit 100 and the current acquisition unit 200 are correspondingly in a off state, and the feedback signal generated by the feedback terminal BF according to the disconnected voltage acquisition unit 100 and current acquisition unit 200 is zero; when the voltage comparison signal U0 is greater than or less than the current comparison signal I0, the connection unit 300 is in a path connection state, so that the voltage acquisition unit 100 and the current acquisition unit 200 are correspondingly in a connection state, and the feedback signal generated by the feedback end BF according to the connected voltage acquisition unit 100 and current acquisition unit 200 is not zero.

Thus, when the voltage comparison signal U0 is equal to the current comparison signal I0, the connection unit 300 receiving the voltage comparison signal U0 and the current comparison signal I0 is in a path-off state, so that the voltage acquisition units 100 and the current acquisition units 200, both connected to the connection unit 300, are correspondingly in a disconnection state, the feedback terminal BF is independently generated by the current acquisition units 200 according to the feedback signals generated by the disconnected voltage acquisition units 100 and current acquisition units 200, and the feedback signal is zero; when the voltage comparison signal U0 is greater than or less than the current comparison signal I0, the connection unit 300 receiving the voltage comparison signal U0 and the current comparison signal I0 is in a path connection state, so that the voltage acquisition units 100 and the current acquisition units 200, which are both connected to the connection unit 300, are correspondingly in a connection state, the feedback terminal BF generates a feedback signal according to the connected voltage acquisition units 100 and the current acquisition units 200, the feedback signal is generated by the voltage acquisition units 100 and the current acquisition units 200 together, and the feedback signal is not zero.

In one or more embodiments, when the voltage comparison signal U0 is greater than or less than the current comparison signal I0, the connection unit 300 may be in a path connection state, so that the voltage acquisition unit 100 and the current acquisition unit 200 are respectively in different connection states, and the feedback signal generated by the feedback terminal BF according to the connected voltage acquisition unit 100 and current acquisition unit 200 is not zero. For example, when the voltage comparison signal U0 is greater than the current comparison signal I0, the connection unit 300 is in the first path connection state, so that the voltage acquisition unit 100 and the current acquisition unit 200 are correspondingly in the first connection state; when the voltage comparison signal U0 is smaller than the current comparison signal I0, the connection unit 300 is in the second path connection state, so that the voltage acquisition unit 100 and the current acquisition unit 200 are correspondingly in the second connection state.

As shown in fig. 1, the voltage comparison signal U0 includes a first voltage signal U1 and a second voltage signal U2 which are equal, the current comparison signal I0 includes a first current signal I1 and a second current signal I2 which are equal, the voltage acquisition unit 100 includes a first voltage output terminal 131 and a second voltage output terminal 141 for respectively outputting the first voltage signal U1 and the second voltage signal U2, and the current acquisition unit 200 includes a first current output terminal 231 and a second current output terminal 241 for respectively outputting the first current signal I1 and the second current signal I2; the connection unit 300 includes a first diode D1, a second diode D2, a third diode D3, and a fourth diode D4, the cathode of the first diode D1 is connected to the anode of the second diode D2, the cathode of the second diode D2 is connected to the anode of the third diode D3, the cathode of the third diode D3 is connected to the anode of the fourth diode D4, the cathode of the fourth diode D4 is connected to the anode of the first diode D1, the first voltage output 131 of the voltage acquisition unit 100 is connected to the connection point of the first diode D1 and the second diode D2, the second voltage output 141 of the voltage acquisition unit 100 is connected to the connection point of the third diode D3 and the fourth diode D4, the first current output 231 of the current acquisition unit 200 is connected to the connection point of the first diode D1 and the fourth diode D4, and the second current output 241 of the current acquisition unit 200 is connected to the connection point of the second diode D2 and the third diode D3; when the connection unit 300 receives the first voltage signal U1, the second voltage signal U2, the first current signal I1, and the second current signal I2, the first diode D1, the second diode D2, the third diode D3, and the fourth diode D4 are all in a non-conductive state, so that the connection unit 300 is in a path-off state, or some of the first diode D1, the second diode D2, the third diode D3, and the fourth diode D4 are in a conductive state, so that the connection unit 300 is in a path-on state.

Thus, by providing the first diode D1, the second diode D2, the third diode D3 and the fourth diode D4 to be connected in the same direction to form the connection unit 300, and the first voltage output terminal 131 of the voltage acquisition unit 100, the second current output terminal 241 of the current acquisition unit 200, the second voltage output terminal 141 of the voltage acquisition unit 100 and the first current output terminal 231 of the current acquisition unit 200 are respectively connected with the connection points of two adjacent diodes D1, D2, D3 and D4, the first diode D1, the second diode D2, D3 and the fourth diode D4 can be made to be in a non-conductive state when the connection unit 300 receives the first voltage signal U1, the second voltage signal U2, the first current signal I1 and the second current signal I2, so that the connection unit 300 is in a path disconnection state, or the connection unit 300 is made to be in a conductive state when the connection unit 300 receives the first voltage signal U1, the second voltage signal U2, the first current signal I1 and the second current signal I2.

Specifically, when the first voltage signal U1 and the second voltage signal U2 are equal to the first current signal I1 and the second current signal I2, the first diode D1, the second diode D2, the third diode D3 and the fourth diode D4 are all turned off, and the connection unit 300 is in a path-off state, so that the voltage acquisition unit 100 and the current acquisition unit 200 are correspondingly in a off state. When the first voltage signal U1 and the second voltage signal U2 are greater than the first current signal I1 and the second current signal I2, the second diode D2 and the fourth diode D4 are turned on, the first diode D1 and the third diode D3 are turned off, and the connection unit 300 is in the first path connection state, so that the voltage collecting unit 100 is connected to the current collecting unit 200 through the turned-on second diode D2 and the turned-on fourth diode D4, and is correspondingly in the first connection state, that is, when seen in the current flow direction, the voltage collecting unit 100 reaches the feedback end BF of the current collecting unit 200 through the turned-on second diode D2, and reaches the feedback end BF of the current collecting unit 200 through the turned-on fourth diode D4. When the first voltage signal U1 and the second voltage signal U2 are smaller than the first current signal I1 and the second current signal I2, the first diode D1 and the third diode D3 are turned on, the second diode D2 and the fourth diode D4 are turned off, and the connection unit 300 is in the second path connection state, so that the voltage collecting unit 100 and the current collecting unit 200 are connected through the turned-on first diode D1 and the turned-on third diode D3, and are correspondingly in the second connection state, that is, when seen from the current flow direction, the feedback end BF of the current collecting unit 200 reaches the voltage collecting unit 100 through the turned-on first diode D1, and the feedback end BF of the current collecting unit 200 reaches the voltage collecting unit 100 through the turned-on third diode D3.

In one or more embodiments, the first Diode D1, the second Diode D2, the third Diode D3, and the fourth Diode D4 may be various types of common diodes, various types of Zener Diodes (ZD), schottky diodes (Schottky Barrier Diode, SBD), fast recovery diodes (Fast Recovery Diode, FRD), unidirectional transient voltage suppressors (Transient Voltage Suppressors, TVS), or other semiconductor devices having unidirectional conduction characteristics, and the like.

Referring to fig. 2 and 3, fig. 2 is a schematic circuit diagram of the voltage acquisition unit 100 according to an embodiment of the present application, and fig. 3 is a schematic circuit diagram of the current acquisition unit 200 according to an embodiment of the present application. As shown in fig. 1, 2 and 3, the voltage acquisition unit 100 includes a voltage transformer PT, a first voltage amplitude acquisition module 110, a second voltage amplitude acquisition module 120, a first voltage divider 130 and a second voltage divider 140, where one end of the voltage transformer PT is connected with the first voltage amplitude acquisition module 110 and the first voltage divider 130, the first voltage amplitude acquisition module 110 is connected with the first voltage divider 130, the other end of the voltage transformer PT is connected with the second voltage amplitude acquisition module 120 and the second voltage divider 140, the second voltage amplitude acquisition module 120 is connected with the second voltage divider 140, the output end of the first voltage divider 130 and the output end of the second voltage divider 140 are the first voltage output end 131 and the second voltage output end 141 of the voltage acquisition unit 100, the voltage transformer PT is used for acquiring the output voltage of the radio frequency power supply 20, the first voltage amplitude acquisition module 110 and the second voltage amplitude acquisition module 120 are used for correspondingly acquiring the amplitude of the acquired output voltage, the first voltage 130 and the second voltage 140 are used for correspondingly receiving the output voltage acquired and the output voltage acquired by the second voltage divider and performing a division on the output signal U1 and the output by the second voltage divider and the output signal U2; the current collection unit 200 includes a current transformer CT, a first current amplitude obtaining module 210, a second current amplitude obtaining module 220, a first current divider 230 and a second current divider 240, one end of the current transformer CT is connected with the first current amplitude obtaining module 210 and the first current divider 230, the first current amplitude obtaining module 210 is connected with the first current divider 230, the other end of the current transformer CT is connected with the second current amplitude obtaining module 220 and the second current divider 240, the second current amplitude obtaining module 220 is connected with the second current divider 240, the output end of the first current divider 230 and the output end of the second current divider 240 are the first current output end 231 and the second current output end 241 of the current collection unit 200, the current transformer CT is used for collecting the output current of the radio frequency power supply 20, the first current amplitude obtaining module 210 and the second current amplitude obtaining module 220 are used for correspondingly obtaining the amplitude of the collected output current, the first current divider 230 and the second current divider 240 are used for correspondingly receiving the collected output current and correspondingly obtaining the amplitude of the output current and correspondingly dividing the output current and the output current to the first current divider 1 and the second current divider 2 are calculated.

Thus, the voltage transformer PT collects the output voltage of the rf power supply 20, the current transformer CT collects the output current of the rf power supply 20, and the first voltage amplitude obtaining module 110, the second voltage amplitude obtaining module 120, the first voltage divider 130 and the second voltage divider 140 convert the collected output voltage into the voltage comparison signal U0, and the first current amplitude obtaining module 210, the second current amplitude obtaining module 220, the first current divider 230 and the second current divider 240 convert the collected output current into the current comparison signal I0, so that the output voltage and the output current of the rf power supply 20 can be collected conveniently and in real time, and the collected output voltage and the collected output current are processed to obtain the voltage comparison signal U0 and the current comparison signal I0.

It should be noted that, the current transformer CT is used to collect the output current of the rf power source 20, and the output current collected by the current transformer CT is actually a corresponding voltage, and the output current collected by the current transformer CT is represented in the form of a voltage.

In one or more embodiments, the first voltage amplitude acquisition module 110 and the second voltage amplitude acquisition module 120 may be composed of diodes, capacitors, resistors, and the like, to correspondingly acquire the amplitude of the acquired output voltage.

In one or more embodiments, the first current magnitude acquisition module 210 and the second current magnitude acquisition module 220 may be composed of diodes, capacitors, resistors, etc. to correspondingly acquire the magnitude of the acquired output current.

As shown in fig. 1 and 2, the voltage transformer PT includes a primary voltage winding W11, a first secondary voltage winding W12, and a second secondary voltage winding W13, where the primary voltage winding W11 is connected between the output end 21 of the radio frequency power supply 20 and the ground GND, one end of the first secondary voltage winding W12 is connected to the first voltage amplitude acquisition module 110 and the first voltage divider 130, and is connected to a connection point of the first diode D1 and the second diode D2 through the first voltage divider 130, one end of the second secondary voltage winding W13 is connected to the second voltage amplitude acquisition module 120 and the second voltage divider 140, and is connected to a connection point of the third diode D3 and the fourth diode D4 through the second voltage divider 140, and the other end of the first secondary voltage winding W12 is connected to the other end of the second secondary voltage winding W13, and is connected to the ground, respectively; the output voltage collected by the primary voltage winding W11 is induced to one end of the first secondary voltage winding W12 and one end of the second secondary voltage winding W13, and after the induced voltages are divided by the first voltage divider 130 and the second voltage divider 140 respectively, a first voltage signal U1 and a second voltage signal U2 are correspondingly obtained, wherein the first secondary voltage winding W12 and the second secondary voltage winding W13 are wound in opposite directions, and the number of turns is equal, so that the sizes of the first voltage signal U1 and the second voltage signal U2 are equal.

Therefore, the voltage transformer PT includes the primary voltage winding W11, the first secondary voltage winding W12 and the second secondary voltage winding W13, so that the output voltage collected by the primary voltage winding W11 is induced to one end of the first secondary voltage winding W12 and one end of the second secondary voltage winding W13, and after the induced voltages are divided by the first voltage divider 130 and the second voltage divider 140 respectively, the first voltage signal U1 and the second voltage signal U2 are correspondingly obtained, the first secondary voltage winding W12 and the second secondary voltage winding W13 are wound oppositely, and the turns are equal, so that the sizes of the first voltage signal U1 and the second voltage signal U2 are equal.

It is understood that one end of the first secondary voltage winding W12 and one end of the second secondary voltage winding W13 are the same name end, and are winding start ends of the first secondary voltage winding W12 and the second secondary voltage winding W13. The other end of the first secondary voltage winding W12 and the other end of the second secondary voltage winding W13 are the same name terminals, and are winding termination terminals of the first secondary voltage winding W12 and the second secondary voltage winding W13.

In one or more embodiments, the number of turns of the primary voltage winding W11 may be substantially greater than the number of turns of the first secondary voltage winding W12 and the number of turns of the second secondary voltage winding W13. For example, the number of turns of the first secondary voltage winding W12 and the number of turns of the second secondary voltage winding W13 are both 1 turn, and the number of turns of the primary voltage winding W11 may be set according to specific needs, such as 100 turns, 1000 turns, 10000 turns, etc.

Thus, even if the primary voltage winding W11 of the voltage transformer PT is connected between the output terminal 21 of the radio frequency power supply 20 and the ground GND when the output terminal 21 of the radio frequency power supply 20 is output to the load 30, since the number of turns of the primary voltage winding W11 can be much larger than the number of turns of the first secondary voltage winding W12 and the number of turns of the second secondary voltage winding W13, the output of the radio frequency power supply 20 is hardly affected.

As shown in fig. 1 and 3, the current transformer CT includes a primary current winding W21, a first secondary current winding W22, and a second secondary current winding W23, where the primary current winding W21 is connected between the output end 21 of the radio frequency power supply 20 and the load 30, one end of the first secondary current winding W22 is connected to the first current amplitude acquisition module 210 and the first current divider 230, respectively, and is connected to a connection point of the first diode D1 and the fourth diode D4 through the first current divider 230, one end of the second secondary current winding W23 is connected to the second current amplitude acquisition module 220 and the second current divider 240, respectively, and is connected to a connection point of the second diode D2 and the third diode D3 through the second current divider 240, and the other end of the first secondary current winding W22 is connected to the other end of the second secondary current winding W23, so as to form a feedback end BF; the output current collected by the primary current winding W21 is induced to one end of the first secondary current winding W22 and one end of the second secondary current winding W23, and after the induced currents are divided by the first current divider 230 and the second current divider 240 respectively, a first current signal I1 and a second current signal I2 are correspondingly obtained, wherein the first secondary current winding W22 and the second secondary current winding W23 are wound in opposite directions, and the number of turns is equal, so that the sizes of the first current signal I1 and the second current signal I2 are equal.

Therefore, the current transformer CT includes the primary current winding W21, the first secondary current winding W22 and the second secondary current winding W23, so that the output current collected by the primary current winding W21 is induced to one end of the first secondary current winding W22 and one end of the second secondary current winding W23, and after the induced currents are divided by the first current divider 230 and the second current divider 240 respectively, the first current signal I1 and the second current signal I2 are correspondingly obtained, and the first secondary current winding W22 and the second secondary current winding W23 are wound oppositely, and the number of turns is equal, so that the magnitudes of the first current signal I1 and the second current signal I2 are equal.

It is understood that one end of the first secondary current winding W22 and one end of the second secondary current winding W23 are the same name end, and are winding start ends of the first secondary current winding W22 and the second secondary current winding W23. The other end of the first secondary current winding W22 and the other end of the second secondary current winding W23 are the same name ends, and are winding termination ends of the first secondary current winding W22 and the second secondary current winding W23.

In one or more embodiments, the number of turns of the primary current winding W21 may be much smaller than the number of turns of the first secondary current winding W22 and the number of turns of the second secondary current winding W23. For example, the number of turns of the primary current winding W21 may be 1 turn, and the number of turns of the first secondary current winding W22 and the number of turns of the second secondary current winding W23 may be set according to specific needs, such as 100 turns, 1000 turns, 10000 turns, etc.

Thus, when the output terminal 21 of the rf power supply 20 is output to the load 30, even if the primary current winding W21 is connected between the output terminal 21 of the rf power supply 20 and the load 30, the output of the rf power supply 20 is hardly affected because the number of turns of the primary current winding W21 is much smaller than the number of turns of the first secondary current winding W22 and the number of turns of the second secondary current winding W23.

In one or more embodiments, when the first voltage signal U1 and the second voltage signal U2 are equal to the first current signal I1 and the second current signal I2, the connection unit 300 is in a path-off state, the first diode D1, the second diode D2, the third diode D3 and the fourth diode D4 are all turned off, so that the first secondary current winding W22 and the second secondary current winding W23 are turned off from the first secondary voltage winding W12 and the second secondary voltage winding W13, the feedback terminal BF generates a feedback signal according to the induced currents of the first secondary current winding W22 and the second secondary current winding W23, which are equal in magnitude and opposite in direction, and the feedback signal is zero; when the first voltage signal U1 and the second voltage signal U2 are greater than the first current signal I1 and the second current signal I2, the connection unit 300 is in a path connection state, the second diode D2 and the fourth diode D4 are turned on, the first diode D1 and the third diode D3 are turned off, so that the first secondary voltage winding W12 is connected with the second secondary current winding W23 through the turned-on second diode D2, the second secondary voltage winding W13 is connected with the first secondary current winding W22 through the turned-on fourth diode D4, the feedback end BF generates a feedback signal according to the sum of the difference value between the first voltage signal U1 and the first current signal I1 and the difference value between the second voltage signal U2 and the second current signal I2, and the feedback signal is not equal to zero; when the first voltage signal U1 and the second voltage signal U2 are smaller than the first current signal I1 and the second current signal I2, the connection unit 300 is in a path connection state, the first diode D1 and the third diode D3 are turned on, and the second diode D2 and the fourth diode D4 are turned off, so that the first secondary current winding W22 is connected to the first secondary voltage winding W12 through the turned-on first diode D1, and the second secondary current winding W23 is connected to the second secondary voltage winding W13 through the turned-on third diode D3, and the feedback terminal BF generates a feedback signal according to the sum of the difference between the first current signal I1 and the first voltage signal U1 and the difference between the second current signal I2 and the second voltage signal U2, and the feedback signal is not equal to zero.

Thus, by comparing the first voltage signal U1 with the first current signal I1, comparing the second voltage signal U2 with the second current signal I2, the first diode D1, the second diode D2, the third diode D3 and the fourth diode D4 are all in a non-conductive state, or some of the first diode D1, the second diode D2, the third diode D3 and the fourth diode D4 are in a conductive state, the first secondary current winding W22 and the second secondary current winding W23 are disconnected from the first secondary voltage winding W12 and the second secondary voltage winding W13, or different loops of the first secondary current winding W22 and the second secondary current winding W23 and the first secondary voltage winding W12 and the second secondary voltage winding W13 are formed, so that the feedback terminal BF can generate the feedback signal.

Specifically, it may be expressed in the form of cosine to illustrate the result of comparing the first voltage signal U1 with the first current signal I1, the second voltage signal U2 with the second current signal I2, and since the turns ratio of the voltage transformer PT or the current transformer CT is constant, the result of the comparison is not affected, and in the following description, the turns ratio of the primary voltage winding W11 of the voltage transformer PT to the first secondary voltage winding W12 or the second secondary voltage winding W13 and the turns ratio of the primary current winding W21 of the current transformer CT to the first secondary current winding W22 or the second secondary current winding W23 are ignored. The output voltage of the rf power supply 20 collected by the voltage collecting unit 100 is a voltage of Uin1×cos (ωt) induced to one end of the first secondary voltage winding W12 and one end of the second secondary voltage winding W13, the output current of the rf power supply 20 collected by the current collecting unit 200 is a current of Uin2×cos (ωt+Φ) at one end of the first secondary current winding W22 and one end of the second secondary current winding W23, where Uin1 is the amplitude of the output voltage of the rf power supply 20, uin2 is the output current of the rf power supply 20 expressed in the form of voltage, and Φ is the phase difference between the output voltage and the output current of the rf power supply 20.

Further, the voltages induced to the one end of the first secondary voltage winding W12 and the one end of the second secondary voltage winding W13 are 1/2 of the Uin1×cos (ωt), and after the voltages induced to the one end of the first secondary voltage winding W12 and the one end of the second secondary voltage winding W13 are respectively obtained by the first voltage amplitude obtaining module 110 and the second voltage amplitude obtaining module 120, the obtained amplitudes are 1/2 of Uin1, and then the division operation is performed on 1/2 of Uin1×cos (ωt) and 1/2 of Uin1 obtained by the first voltage amplitude obtaining module 110 and the second voltage amplitude obtaining module 120 respectively by the first voltage divider 130 and the second voltage divider 140, so as to correspondingly obtain the first voltage signal U1 and the second voltage signal U2, wherein the first voltage signal U1 and the second voltage signal U2 are cos (ωt). The currents induced to one end of the first secondary current winding W22 and one end of the second secondary current winding W23 are 1/2 of Uin2×cos (ωt+Φ), and after the currents induced to one end of the first secondary current winding W22 and one end of the second secondary current winding W23 are obtained by the first current amplitude obtaining module 210 and the second current amplitude obtaining module 220, the obtained amplitudes are 1/2 of Uin2, and then the first current divider 230 and the second current divider 240 divide the 1/2 of Uin2×cos (ωt+Φ) and the amplitude Uin2 obtained by the first voltage amplitude obtaining module 110 and the second voltage amplitude obtaining module 120, respectively, so as to obtain the first current signal I1 and the second current signal I2 correspondingly, wherein the first current signal I1 and the second current signal I2 are cos (t+Φ).

Thus, when the first voltage signal U1 and the second voltage signal U2 are equal to the first current signal I1 and the second current signal I2, the phase difference Φ between the output voltage and the output current of the rf power supply 20 is zero, and then the first diode D1, the second diode D2, the third diode D3 and the fourth diode D4 are all turned off, so that the first secondary current winding W22 and the second secondary current winding W23 are turned off from the first secondary voltage winding W12 and the second secondary voltage winding W13, and the feedback terminal BF generates a feedback signal of zero according to that the two induced currents of the first secondary current winding W22 and the second secondary current winding W23 are equal and opposite in direction are Uin2×cos (ωt+Φ)/2, and the induced currents cancel each other. When the first voltage signal U1 and the second voltage signal U2 are greater than the first current signal I1 and the second current signal I2, the phase difference Φ between the output voltage and the output current of the radio frequency power supply 20 is not zero, the second diode D2 and the fourth diode D4 are turned on, the first diode D1 and the third diode D3 are turned off, so that the first secondary voltage winding W12 is connected to the second secondary current winding W23 through the turned-on second diode D2, and the second secondary voltage winding W13 is connected to the first secondary current winding W22 through the turned-on fourth diode D4, and according to the formed loop, the sum of the difference between the first voltage signal U1 and the first current signal I1 and the difference between the second voltage signal U2 and the second current signal I2 is cos (ωt) -cos (ωt+Φ), and the feedback signal generated by the feedback terminal BF is not equal to zero and is greater than zero. When the first voltage signal U1 and the second voltage signal U2 are smaller than the first current signal I1 and the second current signal I2, the phase difference Φ between the output voltage and the output current of the radio frequency power supply 20 is not zero, the first diode D1 and the third diode D3 are turned on, the second diode D2 and the fourth diode D4 are turned off, so that the first secondary current winding W22 is connected to the first secondary voltage winding W12 through the turned-on first diode D1, and the second secondary current winding W23 is connected to the second secondary voltage winding W13 through the turned-on third diode D3, and according to the loop, the sum of the difference between the first current signal I1 and the first voltage signal U1 and the difference between the second current signal I2 and the second voltage signal U2 is cos (ωt+Φ) -cos (ωt), and the feedback signal generated by the feedback terminal BF is not equal to zero and is greater than zero.

In particular, when the first voltage signal U1 and the second voltage signal U2 are greater than the first current signal I1 and the second current signal I2, the connection unit 300 is in the first path connection state, the second diode D2 and the fourth diode D4 are turned on, the first diode D1 and the third diode D3 are turned off, so that the first secondary voltage winding W12 is connected to the second secondary current winding W23 through the turned-on second diode D2, and the second secondary voltage winding W13 is connected to the first secondary current winding W22 through the turned-on fourth diode D4, and the voltage acquisition unit 100 and the current acquisition unit 200 are correspondingly in the first connection state. When the first voltage signal U1 and the second voltage signal U2 are smaller than the first current signal I1 and the second current signal I2, the connection unit 300 is in the second path connection state, the first diode D1 and the third diode D3 are turned on, and the second diode D2 and the fourth diode D4 are turned off, so that the first secondary current winding W22 is connected to the first secondary voltage winding W12 through the turned-on first diode D1, and the second secondary current winding W23 is connected to the second secondary voltage winding W13 through the turned-on third diode D3, and the voltage acquisition unit 100 and the current acquisition unit 200 are correspondingly in the second connection state.

It should be noted that, when the first voltage signal U1 and the second voltage signal U2 are greater than the first current signal I1 and the second current signal I2, the phases of the first voltage signal U1 and the second voltage signal U2 lead the phases of the first current signal I1 and the second current signal I2, the rf power source 20 and the load 30 are inductive, the phase difference Φ between the output voltage and the output current of the rf power source 20 is greater than zero, and the feedback signal BF is generated by the feedback terminal BF to be greater than zero. When the first voltage signal U1 and the second voltage signal U2 are smaller than the first current signal I1 and the second current signal I2, the phases of the first voltage signal U1 and the second voltage signal U2 lag behind the phases of the first current signal I1 and the second current signal I2, the rf power supply 20 and the load 30 are capacitive, the phase difference Φ between the output voltage and the output current of the rf power supply 20 is smaller than zero, and the feedback signal generated by the feedback terminal BF is also larger than zero.

Referring to fig. 4, fig. 4 is a circuit schematic diagram of a matching status feedback circuit 10 according to another embodiment of the present application. As shown in fig. 4, the matching status feedback circuit 10 further includes a control unit 400, where the control unit 400 is connected to the feedback terminal BF, and is at least configured to receive a feedback signal generated by the feedback terminal BF, determine a phase difference between the output voltage and the output current of the rf power supply 20 according to the feedback signal, and further determine whether the rf power supply 20 and the load 30 are impedance-matched.

Thus, by setting the control unit 400 to be connected to the feedback terminal BF, a phase difference between the output voltage and the output current of the rf power supply 20 can be determined according to the feedback signal, and thus, whether the rf power supply 20 and the load 30 are impedance-matched can be determined.

In one or more embodiments, the control unit 400 is configured to determine that the phase difference between the output voltage and the output current of the rf power supply 20 is zero when the feedback signal is zero, and thus determine that the rf power supply 20 and the load 30 complete impedance matching, and determine that the phase difference between the output voltage and the output current of the rf power supply 20 is non-zero when the feedback signal is non-zero, and thus determine that the rf power supply 20 and the load 30 do not complete impedance matching.

In one or more embodiments, the control unit 400 may be a general-purpose processor such as a central processing unit (Central Processing Unit, CPU), a digital signal processor (Digital Signal Processor, DSP), an application specific integrated circuit (Application Specific Integrated Circuit, ASIC), a Field programmable gate array (Field-Programmable Gate Array, FPGA) or other programmable logic device, a discrete gate logic device, a logic control device such as a transistor logic device, or a microprocessor such as a micro control unit (Micro Control Unit, MCU).

As shown in fig. 4, the matching state feedback circuit 10 further includes an adjusting unit 500, where the adjusting unit 500 is configured to adjust the impedance matching circuit 40 so as to match the impedance of the rf power source 20 and the load 30.

Thus, by setting the adjusting unit 500 to adjust the impedance matching circuit 40, the impedance matching of the radio frequency power supply 20 and the load 30 can be quickly achieved according to the feedback signal.

In one or more embodiments, the control unit 400 is connected to the adjustment unit 500, and the control unit 400 is further configured to control the adjustment unit 500 to adjust the impedance matching circuit 40 to match the impedance of the rf power source 20 to the load 30 when the feedback signal is not zero.

In one or more embodiments, the impedance matching circuit 40 may include a first inductor L1 and a first capacitor C1, where the first inductor L1 is connected between the output end 21 of the rf power source 20 and the load 30, one end of the first capacitor C1 is connected to the first inductor L1, and the other end of the first capacitor C1 is grounded GND; the first capacitor C1 is a variable capacitor.

Thus, since the first inductor L1 and the first capacitor C1 form τ -type inductor-capacitor resonance, the capacitance value of the first capacitor C1 is mainly used to adjust the capacitance value of the first capacitor C1 through the adjusting unit 500, so as to quickly adjust the phase difference between the output voltage and the output current of the rf power supply 20.

In particular, the impedance matching circuit 40 may also have other forms, such as, but not limited to, L-type, T-type, pi-type, multi-L connection type, and other types of lc resonators, and include other elements such as inductors, capacitors, resistors, and the like.

In one or more embodiments, the adjusting unit 500 may be a stepper motor, an output shaft of the adjusting unit 500 is correspondingly connected to one of the plates of the first capacitor C1, the adjusting unit 500 is configured to receive a pulse signal, and the output shaft of the adjusting unit 500 rotates according to the received pulse signal, so as to correspondingly change a position of the plate in the connected first capacitor C1, change a distance between two plates of the first capacitor C1, and further adjust a capacitance value of the first capacitor C1; the control unit 400 is further configured to output a corresponding pulse signal when the feedback signal is not zero, so as to control the output shaft of the adjusting unit 500 to rotate according to the received pulse signal.

As shown in fig. 4, the current collecting unit 200 may further include a first resistor R1, one end of the first resistor R1 is connected to the feedback end BF, the other end of the first resistor R1 is grounded GND, and a feedback signal generated by the feedback end BF is a voltage value of two ends of the first resistor R1.

Therefore, by setting the first resistor R1 as a detection resistor, the voltage value at two ends of the first resistor R1, or the voltage difference between the feedback terminal BF and the ground GND is detected, that is, the feedback signal generated by the feedback terminal BF.

In one or more embodiments, the output 21 of the rf power source 20 is used to connect to the load 30, and the end of the rf power source 20 not connected to the load 30 may be grounded GND, and the end of the load 30 not connected to the rf power source 20 may also be grounded GND.

According to the matching state feedback circuit 10, through the structure, whether the phase difference between the output voltage and the output current of the radio frequency power supply 20 is zero or not can be represented only by the feedback signal generated by the feedback end BF of the current acquisition unit 200, and then the impedance matching or impedance mismatch between the radio frequency power supply 20 and the load 30 is determined, the matching state of the radio frequency power supply 20 and the load 30 can be fed back conveniently by the matching state feedback circuit 10, and when the impedance of the radio frequency power supply 20 and the load 30 is mismatched, the phase difference between the output voltage and the output current of the radio frequency power supply 20 can be adjusted rapidly according to the matching state of the radio frequency power supply 20 and the load 30, so that the impedance matching of the radio frequency power supply 20 and the load 30 is completed.

Referring to fig. 5, fig. 5 is a block diagram of a radio frequency power supply device according to an embodiment of the present application. As shown in fig. 5, the present application further provides a radio frequency power supply device 1, where the radio frequency power supply device 1 includes a radio frequency power supply 20 and a matching state feedback circuit 10 in any of the foregoing embodiments, an output end 21 of the radio frequency power supply 20 is used for connecting a load 30, and the matching state feedback circuit 10 is used for feeding back a matching state of the radio frequency power supply 20 and the load 30.

As shown in fig. 1, the matching state feedback circuit 10 includes a voltage acquisition unit 100, a current acquisition unit 200, and a connection unit 300. The voltage acquisition unit 100 is connected with the output end 21 of the radio frequency power supply 20, and is used for acquiring the output voltage of the radio frequency power supply 20 and converting the acquired output voltage into a voltage comparison signal U0; the current acquisition unit 200 is connected with the output end 21 of the radio frequency power supply 20, and is used for acquiring the output current of the radio frequency power supply 20 and converting the acquired output current into a current comparison signal I0; the connection unit 300 is connected with the voltage acquisition unit 100 and the current acquisition unit 200, and is configured to receive the voltage comparison signal U0 and the current comparison signal I0, and to be in a corresponding path disconnection state or a path connection state according to the magnitudes of the voltage comparison signal U0 and the current comparison signal I0, so that the voltage acquisition unit 100 and the current acquisition unit 200 are in a corresponding disconnection state or connection state through the connection unit 300; the current collection unit 200 has a feedback end BF, which is configured to generate a corresponding feedback signal according to an off state or a connection state of the voltage collection unit 100 and the current collection unit 200, where the feedback signal is zero, and represents that a phase difference between an output voltage and an output current of the rf power supply 20 is zero, and at the moment, the impedance of the rf power supply 20 and the load 30 is matched, and the feedback signal is not zero, and represents that a phase difference between an output voltage and an output current of the rf power supply 20 is not zero, and at the moment, the impedance of the rf power supply 20 and the load 30 is mismatched.

The more specific structure of the matching status feedback circuit 10 can be seen from the related content of the matching status feedback circuit 10 in any of the foregoing embodiments, and will not be described herein.

Referring to fig. 6, fig. 6 is a schematic circuit diagram of a radio frequency power supply device according to an embodiment of the present application. As shown in fig. 6, the radio frequency power supply device 1 further includes an impedance matching circuit 40, the impedance matching circuit 40 is connected between the matching state feedback circuit 10 and the load 30, and the impedance matching circuit 40 is configured to perform impedance matching on the radio frequency power supply 20 and the load 30 according to a feedback result of the matching state feedback circuit 10.

Therefore, since the first inductor L1 and the first capacitor C1 form τ -type inductor-capacitor resonance, the capacitance value of the first capacitor C1 is mainly used to adjust the capacitance value of the first capacitor C1 through the adjusting unit 500, so as to adjust the phase difference between the output voltage and the output current of the rf power supply 20 relatively quickly.

According to the matching state feedback circuit 10 and the radio frequency power supply device 1, through the structure, whether the phase difference between the output voltage and the output current of the radio frequency power supply 20 is zero or not can be represented only by the feedback signal generated by the feedback end BF of the current acquisition unit 200, and then impedance matching or impedance mismatch between the radio frequency power supply 20 and the load 30 is determined, the matching state feedback circuit 10 can conveniently feed back the matching state of the radio frequency power supply 20 and the load 30, and when the impedance mismatch between the radio frequency power supply 20 and the load 30 occurs, the phase difference between the output voltage and the output current of the radio frequency power supply 20 can be quickly adjusted according to the matching state of the radio frequency power supply 20 and the load 30, so that impedance matching between the radio frequency power supply 20 and the load 30 is completed, and the output effect of the radio frequency power supply device 1 is improved.

The foregoing description is merely specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily think about changes or substitutions within the technical scope of the present application, and should be covered in the scope of the present application; embodiments of the present application and features of embodiments may be combined with each other without conflict. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A matching state feedback circuit for feeding back a matching state of a radio frequency power supply and a load, comprising:

the voltage acquisition unit is connected with the output end of the radio frequency power supply and is used for acquiring the output voltage of the radio frequency power supply and converting the acquired output voltage into a voltage comparison signal;

the current acquisition unit is connected with the output end of the radio frequency power supply and is used for acquiring the output current of the radio frequency power supply and converting the acquired output current into a current comparison signal;

the connecting unit is respectively connected with the voltage acquisition unit and the current acquisition unit, and is used for receiving the voltage comparison signal and the current comparison signal and is in a corresponding path disconnection state or a path connection state according to the magnitude of the voltage comparison signal and the current comparison signal so that the voltage acquisition unit and the current acquisition unit are in a corresponding disconnection state or connection state through the connecting unit;

the current acquisition unit is provided with a feedback end, and the feedback end is used for generating a corresponding feedback signal according to the disconnection state or the connection state of the voltage acquisition unit and the current acquisition unit, wherein the feedback signal is zero, the phase difference between the output voltage and the output current of the radio frequency power supply is zero, the radio frequency power supply is matched with the impedance of the load at the moment, the feedback signal is not zero, the phase difference between the output voltage and the output current of the radio frequency power supply is not zero, and the impedance of the radio frequency power supply and the impedance of the load is mismatched at the moment.

2. The matching state feedback circuit of claim 1, wherein when the voltage comparison signal is equal to the current comparison signal, the connection unit is in a path-off state, so that the voltage acquisition unit and the current acquisition unit are in a corresponding off state, and the feedback end generates zero feedback signal according to the disconnected voltage acquisition unit and current acquisition unit; when the voltage comparison signal is larger or smaller than the current comparison signal, the connection unit is in a path connection state, so that the voltage acquisition unit and the current acquisition unit are correspondingly in a connection state, and the feedback signal generated by the feedback end according to the connected voltage acquisition unit and current acquisition unit is not zero.

3. The matching state feedback circuit of claim 2, wherein the voltage comparison signal comprises equal first and second voltage signals, the current comparison signal comprises equal first and second current signals, the voltage acquisition unit comprises first and second voltage output terminals for outputting the first and second voltage signals, respectively, and the current acquisition unit comprises first and second current output terminals for outputting the first and second current signals, respectively;

The connecting unit comprises a first diode, a second diode, a third diode and a fourth diode, wherein the cathode of the first diode is connected with the anode of the second diode, the cathode of the second diode is connected with the anode of the third diode, the cathode of the third diode is connected with the anode of the fourth diode, the cathode of the fourth diode is connected with the anode of the first diode, the first voltage output end of the voltage acquisition unit is connected with the connecting point of the first diode and the second diode, the second voltage output end of the voltage acquisition unit is connected with the connecting point of the third diode and the fourth diode, the first current output end of the current acquisition unit is connected with the connecting point of the first diode and the fourth diode, and the second current output end of the current acquisition unit is connected with the connecting point of the second diode and the third diode;

when the connection unit receives the first voltage signal, the second voltage signal, the first current signal and the second current signal, all of the first diode, the second diode, the third diode and the fourth diode are in a non-conductive state, so that the connection unit is in a path disconnection state, or some of the first diode, the second diode, the third diode and the fourth diode are in a conductive state, so that the connection unit is in a path connection state.

4. The matching state feedback circuit according to claim 3, wherein the voltage acquisition unit comprises a voltage transformer, a first voltage amplitude acquisition module, a second voltage amplitude acquisition module, a first voltage divider and a second voltage divider, one end of the voltage transformer is connected with the first voltage amplitude acquisition module and the first voltage divider respectively, the first voltage amplitude acquisition module is connected with the first voltage divider, the other end of the voltage transformer is connected with the second voltage amplitude acquisition module and the second voltage divider respectively, the second voltage amplitude acquisition module is connected with the second voltage divider respectively, the output end of the first voltage divider and the output end of the second voltage divider are a first voltage output end and a second voltage output end of the voltage acquisition unit, the voltage transformer is used for acquiring the output voltage of the radio frequency power supply, the first voltage amplitude acquisition module and the second voltage acquisition module are used for correspondingly acquiring the acquired output voltage, the first voltage and the second voltage divider are correspondingly used for acquiring the output voltage amplitude and the second voltage divider and correspondingly acquiring the output voltage amplitude and the output signal of the first voltage divider and the second voltage divider are used for carrying out division operation on the output voltage and the output signal;

The current acquisition unit comprises a current transformer, a first current amplitude acquisition module, a second current amplitude acquisition module, a first current divider and a second current divider, one end of the current transformer is connected with the first current amplitude acquisition module and the first current divider respectively, the first current amplitude acquisition module is connected with the first current divider, the other end of the current transformer is connected with the second current amplitude acquisition module and the second current divider respectively, the second current amplitude acquisition module is connected with the second current divider, the output end of the first current divider and the output end of the second current divider are a first current output end and a second current output end of the current acquisition unit, the current transformer is used for acquiring output current of the radio frequency power supply, the first current amplitude acquisition module and the second current amplitude acquisition module are used for correspondingly acquiring the amplitude of the acquired output current, the first current and the second current are used for correspondingly receiving the output current and outputting the output current and the second current divider and carrying out operation on the acquired current and the output signal of the acquired current and the second current divider and the acquired by the amplitude divider.

5. The matching state feedback circuit of claim 4, wherein the voltage transformer comprises a primary voltage winding, a first secondary voltage winding and a second secondary voltage winding, the primary voltage winding is connected between the output end of the radio frequency power supply and the ground, one end of the first secondary voltage winding is connected with the first voltage amplitude acquisition module and the first voltage divider respectively, and is connected with a connection point of the first diode and the second diode through the first voltage divider, one end of the second secondary voltage winding is connected with a connection point of the second voltage amplitude acquisition module and the second voltage divider respectively, and is connected with a connection point of the third diode and the fourth diode through the second voltage divider, and the other end of the first secondary voltage winding is connected with the other end of the second secondary voltage winding respectively;

the output voltage acquired by the primary voltage winding is induced to one end of the first secondary voltage winding and one end of the second secondary voltage winding, and the induced voltage is divided by the first voltage divider and the second voltage divider respectively to correspondingly obtain the first voltage signal and the second voltage signal, wherein the first secondary voltage winding and the second secondary voltage winding are oppositely wound, and the number of turns is equal, so that the first voltage signal and the second voltage signal are equal in size.

6. The matching state feedback circuit of claim 5, wherein the current transformer comprises a primary current winding, a first secondary current winding and a second secondary current winding, the primary current winding is connected between the output end of the radio frequency power supply and the load, one end of the first secondary current winding is connected with the first current amplitude acquisition module and the first current divider respectively, and is connected with a connection point of the first diode and the fourth diode through the first current divider, one end of the second secondary current winding is connected with a connection point of the second current amplitude acquisition module and the second current divider respectively, and is connected with a connection point of the second diode and the third diode through the second current divider, and the other end of the first secondary current winding is connected with the other end of the second secondary current winding to form a feedback end;

the output current collected by the primary current winding is induced to one end of the first secondary current winding and one end of the second secondary current winding, and the induced current is divided by the first current divider and the second current divider respectively to obtain the first current signal and the second current signal correspondingly, wherein the first secondary current winding and the second secondary current winding are oppositely wound, and the number of turns is equal, so that the first current signal and the second current signal are equal in size.

7. The matching state feedback circuit of claim 6, wherein when the first and second voltage signals are equal to the first and second current signals, the connection unit is in a path-off state, the first, second, third, and fourth diodes are all off, such that the first and second secondary current windings are off from the first and second secondary voltage windings, the feedback terminal generates the feedback signal from two equal and opposite sense currents of the first and second secondary current windings, and the feedback signal is zero;

when the first voltage signal and the second voltage signal are greater than the first current signal and the second current signal, the connection unit is in a path connection state, the second diode and the fourth diode are conducted, the first diode and the third diode are disconnected, so that the first secondary voltage winding is connected with the second secondary current winding through the conducted second diode, the second secondary voltage winding is connected with the first secondary current winding through the conducted fourth diode, the feedback end generates the feedback signal according to the sum of the difference value of the first voltage signal and the first current signal and the difference value of the second voltage signal and the second current signal, and the feedback signal is not equal to zero;

When the first voltage signal and the second voltage signal are smaller than the first current signal and the second current signal, the connection unit is in a path connection state, the first diode and the third diode are conducted, the second diode and the fourth diode are disconnected, so that the first secondary current winding is connected with the first secondary voltage winding through the conducted first diode, the second secondary current winding is connected with the second secondary voltage winding through the conducted third diode, the feedback end generates the feedback signal according to the sum of the difference value of the first current signal and the first voltage signal and the difference value of the second current signal and the second voltage signal, and the feedback signal is not equal to zero.

8. The matching status feedback circuit of claim 2 further comprising a control unit coupled to the feedback terminal for receiving at least the feedback signal generated by the feedback terminal and determining a phase difference between the output voltage and the output current of the rf power source based on the feedback signal, thereby determining whether the rf power source and the load are impedance matched.

9. A radio frequency power supply device, characterized by comprising a radio frequency power supply and a matching state feedback circuit according to any of claims 1-8, wherein an output end of the radio frequency power supply is used for connecting a load, and the matching state feedback circuit is used for feeding back a matching state of the radio frequency power supply and the load.

10. The radio frequency power supply device according to claim 9, further comprising an impedance matching circuit connected between the matching state feedback circuit and the load, the impedance matching circuit being configured to impedance match the radio frequency power supply to the load according to a feedback result of the matching state feedback circuit.