CN117784774A - OHT path generation and transportation control system and method - Google Patents
OHT path generation and transportation control system and method Download PDFInfo
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- CN117784774A CN117784774A CN202311626376.9A CN202311626376A CN117784774A CN 117784774 A CN117784774 A CN 117784774A CN 202311626376 A CN202311626376 A CN 202311626376A CN 117784774 A CN117784774 A CN 117784774A
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- 230000000903 blocking effect Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The invention discloses an OHT path generation and transportation control system and method, and relates to the technical field of transportation control systems; the system comprises a line weight calculation module, a conveying path generation module, an idle crown block roaming module and a crown block fault avoidance module; the line weight calculation module calculates the line weight of the OHT track in real time, divides the OHT track into different lines according to nodes, and calculates the weight of each line according to the length and the travelling overhead travelling crane factors; according to the invention, the path weight is updated according to the real-time information of the crown block, the subsequent transport crown block can avoid the line with the hidden danger of blockage in advance, transport control is carried out during traveling of the crown block, whether the subsequent line is blocked abnormally or not is observed in real time, dynamic path planning is carried out, the probability of crown block blockage is effectively reduced, the idle crown block enters a roaming state, compared with the conventional in-situ waiting, the crown block is set to travel in the area nearby the equipment to respond to the transport task more quickly, the trolley treatment is eliminated, the blockage probability is reduced, and the transport efficiency is improved.
Description
Technical Field
The invention relates to the technical field of transportation control systems, in particular to an OHT path generation and transportation control system and method.
Background
In semiconductor manufacturing, wafers need to be transported between different process equipment for process treatment, however, the manpower transport efficiency is low, resulting in the actual productivity being far lower than the ideal productivity; to improve transfer efficiency, optimize throughput, automated material handling systems are widely used in the semiconductor manufacturing industry;
an OHT (overhead transport system; overhead Hoist Transporter; overhead travelling crane) is a transport device that slides on overhead rails for transporting foups (wafer cassettes; front Open Unified Pod) between devices, and has a wide travel space because the OHT travels in the air through the overhead rails, so that the OHT can cope with various complicated space operations;
however, in the prior art, when a wafer needs to be transported to the next device, the OHT control system allocates an idle crown block closest to the pick-up point, pick-up and delivery are carried according to the closest regular planning path, the crown block keeps an idle state to wait for the next allocation after the transportation is completed, the crown block in transportation can be decelerated and stopped when the crown block in transportation runs to the idle crown block, the OHT control system can control the idle crown block to move forwards, the overhead crown block is planned to a place which does not influence the running of the current crown block to wait for the allocation, and the transport crown block resumes operation after the idle crown block leaves. Therefore, the mode cannot handle unexpected events, when the current car fails and the driving route of the rear car does not have a bifurcation, the following transportation overhead car is blocked on the current track, and the frequent carts seriously affect the production efficiency;
in view of the above, the inventors propose an OHT path generation and transportation control system and method for solving the above problems.
Disclosure of Invention
The problem that the blocking probability of an OHT transport crown block is high and the transport efficiency is low is solved; the invention aims to provide an OHT path generation and transportation control system and method.
In order to solve the technical problems, the invention adopts the following technical scheme: an OHT path generation and transportation control system comprises a line weight calculation module, a conveying path generation module, an idle crown block roaming module and a crown block fault avoidance module;
the line weight calculation module calculates the line weight of the OHT track in real time, divides the OHT track into different lines according to nodes, and calculates the weight of each line according to the length and the travelling overhead travelling crane factors;
the conveying path generation module generates a weight map according to the route calculated by the route weight calculation module, and the path with the lowest total weight in all conveying paths from the starting point to the end point is the optimal path;
the idle crown block roaming module sets a plurality of roaming areas, and circulates the idle crown block in the roaming areas, so that crown block blockage is reduced, and OHT response speed is accelerated;
and the overhead travelling crane fault avoidance module is used for controlling an overhead travelling crane in the overhead travelling crane transportation according to the real-time data, judging whether a fault overhead travelling crane exists in the current OHT travelling path in real time, and if the fault exists, planning the travelling path again in advance at a bifurcation intersection of the path where the overhead travelling crane exists when the fault is entered, so as to avoid the fault overhead travelling crane.
A method of OHT path generation and transport control system, comprising the steps of:
s1, dividing an OHT track into different routes according to nodes through a route weight calculation module, setting basic weights according to the length of the routes and the running speed of a vehicle, and generating an OHT track map;
s2, selecting an idle crown block closest to a transportation starting point for transportation, and planning the minimum total weight, namely an optimal path, by a transportation path generation module according to the map;
s3, reporting the movement position of the overhead travelling crane in real time, updating the route weight of the movement position by the OHT control system, marking the abnormality of the current route when the overhead travelling crane fails, and removing the current route from the map;
s4, the crown block reaches the bifurcation intersection, whether a subsequent path is provided with a marked abnormal line or not and a plurality of crown block blocked lines is inquired through the crown block fault avoidance module, and if the subsequent path is blocked, the path is re-planned at the bifurcation intersection, and the abnormal line is bypassed;
s5, the crown block completes transportation, enters an idle state and waits for distribution, and if no task is distributed, the idle crown block roaming module controls the idle crown block to enter a roaming state.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the path weight is updated according to the real-time information of the crown block, the subsequent crown block can avoid the line with the hidden danger of blocking in advance, the crown block is transported and controlled in running, whether the subsequent line is blocked abnormally or not is observed in real time, and the dynamic path planning is carried out, so that the probability of crown block blocking is effectively reduced;
2. according to the invention, the idle crown block enters a roaming state, and compared with the traditional in-situ waiting, the travelling of the crown block in the area nearby the equipment is set to respond to the transportation task more quickly, so that the trolley treatment is removed, the blocking probability is reduced, and the transportation efficiency is improved.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of the system of the present invention.
FIG. 2 is a flow chart of the steps of the present invention.
Fig. 3 is a schematic view of an OHT track line node of the present invention.
FIG. 4 is a control flow chart of the present invention.
In the figure: 100. a line weight calculation module; 200. a conveyance path generation module; 300. an idle crown block roaming module; 400. and the crown block fault avoidance module.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Examples: as shown in fig. 1 to 4, the present invention provides an OHT path generation and transportation control system, which includes a line weight calculation module 100, a transport path generation module 200, an idle crown block roaming module 300, and a crown block fault avoidance module 400;
the route weight calculation module 100 calculates the route weight of the OHT track in real time, divides the OHT track into different routes according to nodes, and calculates the weight of each route according to the length and the travelling overhead travelling crane factors;
the conveying path generating module 200 generates a weight map according to the route calculated by the route weight calculating module 100, and the total weight of all conveying paths from the starting point to the end point is the lowest optimal path;
the idle crown block roaming module 300 sets a plurality of roaming areas, and circulates the idle crown block in the roaming areas, so that crown block blockage is reduced, and OHT response speed is accelerated;
the overhead travelling crane fault avoidance module 400 controls an overhead travelling crane in overhead travelling crane transportation according to real-time data, judges whether a fault overhead travelling crane exists in the current OHT travelling path in real time, and if the fault exists, re-plans the travelling path in advance at a bifurcation intersection of a route where the overhead travelling crane exists when entering the fault, and avoids the fault overhead travelling crane.
The invention also provides a method for the OHT path generation and transportation control system, which comprises the following steps:
s1, dividing an OHT track into different routes according to nodes by a route weight calculation module 100, setting basic weights according to the length of the routes and the running speed of a vehicle, and generating an OHT track map;
s2, selecting an idle crown block closest to a transportation starting point for transportation, wherein the transportation path generation module 200 plans the optimal path according to the map, and the total weight is the minimum;
s3, reporting the movement position of the overhead travelling crane in real time, updating the route weight of the movement position by the OHT control system, marking the abnormality of the current route when the overhead travelling crane fails, and removing the current route from the map;
s4, the crown block reaches the bifurcation intersection, whether a subsequent path has an abnormal marked line or a plurality of crown block blocked lines is inquired through the crown block fault avoidance module 400, and if the subsequent path is blocked, the path is re-planned at the bifurcation intersection, and the abnormal line is bypassed;
s5, the crown block completes transportation, enters an idle state and waits for distribution, and if no task is distributed, the idle crown block roaming module 300 controls the idle crown block to enter a roaming state.
By adopting the above technical scheme, as shown in fig. 1, key positions of a bifurcation intersection, a confluence intersection, steering, speed change and the like in an OHT track are set as nodes, each node has a unique node ID, a track path of OHT running between the nodes is the above-mentioned route, the route is a section of track information set, and the information comprises the following information:
a start node and an end node of a route for representing an OHT track represented by the route information;
the route state represents the enabling or disabling of the track, the planned route is automatically filtered when a map is generated when the route is disabled, and when the OHT track part fails, the fault track route is manually disabled, so that the crown block is prevented from running to the fault track;
the route basic weight is determined by the length of the route, the value is fixed, for example, the route weight with the length of 5 meters is 5, the route weight with the length of 10 meters is 10, and the lower the weight is, the higher the efficiency of the crown block driving on the section of route is;
the route additional weight is determined by the traveling state of the crown block, the numerical value is increased or decreased along with the change of the traveling state of the crown block, and the corresponding additional value is set, for example, the additional weight of the crown block is increased by 5 for the corresponding track when the crown block travels on the track, and the additional weight is 10 when the crown block takes and puts goods on the track;
the basic weight and the additional weight are the actual weight of the line, and the real-time change of the additional weight can lead the line which is possibly jammed to be avoided in advance during path planning;
when the crown block alarm marks crown block faults and reports an alarm, marking the route of the crown block as 'yes', representing that the current route cannot pass, automatically avoiding when a path is planned, and automatically recovering after the crown block alarm is released;
as shown in fig. 2, at the beginning of a shipment, a map is generated from the currently available route, with the route disabled or alert marked as 'yes', representing that the route is unavailable for passage;
the map data is the route weight from the starting node to the reachable node of the route, and one starting node corresponds to a plurality of ending nodes so as to form a weight map of the current available route;
planning paths from all idle crown blocks to a goods taking point, wherein an ending node of a current route of the crown block is a starting point of the planned path, and the goods taking point is an ending point of the planned path;
when the path is planned, a set S is set as the initial point of the node with the minimum weight calculated, a set D is set as the weight value from the initial point to other nodes, and the planning method is as follows:
1) Selecting a node A with the minimum weight from the set S to the starting point;
2) Traversing all the nodes reachable by the node A, adding the weights from the starting point to the node A and the weights from the node A to the traversing node as the weights from the starting point to the traversing node, updating the weights from the starting point to the nodes into a set D, wherein the existence of the set D is addition, and the set D stores smaller values when the existence exists;
3) Repeating the above process, and when the node with the minimum weight from the set S is selected as the end point, the corresponding path is the path with the minimum weight;
then, an idle crown block closest to the goods taking is distributed to execute a transportation task, the crown block reaches a goods taking position, a path from a goods taking point to a goods placing point is planned after the goods taking is completed, transportation is planned and executed in a segmented mode, an abnormal path in the process of executing a front path is avoided, and the blocking probability of the crown block is reduced;
the OHT control system adopts real-time control on the transportation of the crown block, acquires crown block information in real time, stops the crown block when the crown block fails, sets the abnormal line where the crown block is currently located to be unavailable, and the map generated during the transportation of the following crown block does not contain the abnormal line, so that the jam can be avoided in advance;
the real-time position of the crown block is updated, when the crown block walks to a new route, the set crown block additional weight is added to the current route, and the weight of the current crown block added to the old route is removed;
when a plurality of crown blocks exist in the same route, the multiple crown block weights of the route are added, a route with a longer walking path but fewer running vehicles is selected when the following crown block plans the route, so that the crown block runs more smoothly, and the transportation efficiency is improved;
when the crown block approaches the bifurcation intersection in running, checking whether a follow-up route in the running route is marked as an abnormally unavailable route, and re-planning a route before the bifurcation intersection when the non-running route exists, trying to avoid the abnormal route, and when the bifurcation route cannot continue running, stopping running and giving a warning;
at the bifurcation intersection, the OHT control system detects that a plurality of crown blocks travel on a subsequent path route, namely the route is added with multiple crown block weights, then new path planning is carried out, and when the new path is better than the current travel path, the crown blocks are controlled to travel according to the new path, so that blockage is prevented in advance;
setting a plurality of roaming areas, corresponding to equipment working areas, namely the areas where the crown block performs goods taking and placing work, enabling the crown block to be idle after being transported, automatically entering a roaming state, circularly wandering in the nearest roaming area, avoiding blocking subsequent vehicles caused by the fact that the crown block is idle in situ, avoiding the need of pushing by the subsequent crown block, and improving the transportation efficiency.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (2)
1. An OHT path generation and transportation control system is characterized by comprising a line weight calculation module (100), a transportation path generation module (200), an idle crown block roaming module (300) and a crown block fault avoidance module (400);
the line weight calculation module (100) calculates the line weight of the OHT track in real time, divides the OHT track into different lines according to nodes, and calculates the weight of each line according to the length and the travelling overhead travelling crane factors;
the conveying path generating module (200) generates a weight map according to the route calculated by the route weight calculating module (100), and the path with the lowest total weight in all conveying paths from the starting point to the end point is the optimal path;
the idle crown block roaming module (300) sets a plurality of roaming areas, and circulates the idle crown block in the roaming areas, so that crown block blockage is reduced, and OHT response speed is accelerated;
the overhead travelling crane fault avoidance module (400) controls an overhead travelling crane in the transportation of the overhead travelling crane according to real-time data, judges whether a fault overhead travelling crane exists in the current OHT travelling path in real time, and re-plans the travelling path in advance at a bifurcation intersection of a route where the overhead travelling crane is located when the fault exists and avoids the fault overhead travelling crane.
2. A method for application to the OHT path generating and transporting control system of claim 1, comprising the steps of:
s1, dividing the OHT track into different routes according to nodes by a route weight calculation module (100), setting basic weights according to the length of the routes and the running speed of the vehicle, and generating an OHT track map;
s2, selecting an idle crown block closest to a transportation starting point for transportation, and planning a minimum total weight, namely an optimal path, by a transportation path generation module (200) according to the map;
s3, reporting the movement position of the overhead travelling crane in real time, updating the route weight of the movement position by the OHT control system, marking the abnormality of the current route when the overhead travelling crane fails, and removing the current route from the map;
s4, the crown block reaches the bifurcation intersection, whether a subsequent path is provided with a marked abnormal line and a plurality of crown block blocked lines or not is inquired through the crown block fault avoidance module (400), and if the subsequent path is blocked, the path is re-planned at the bifurcation intersection, and the abnormal line is bypassed;
s5, the crown block completes transportation, enters an idle state and waits for distribution, and if no task is distributed, the idle crown block roaming module (300) controls the idle crown block to enter a roaming state.
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| CN202311626376.9A CN117784774A (en) | 2023-11-30 | 2023-11-30 | OHT path generation and transportation control system and method |
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| CN202311626376.9A CN117784774A (en) | 2023-11-30 | 2023-11-30 | OHT path generation and transportation control system and method |
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| CN117784774A true CN117784774A (en) | 2024-03-29 |
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| CN202311626376.9A Pending CN117784774A (en) | 2023-11-30 | 2023-11-30 | OHT path generation and transportation control system and method |
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