CN117778674A - Annealing process of iron-nickel soft magnetic alloy - Google Patents
Annealing process of iron-nickel soft magnetic alloy Download PDFInfo
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- CN117778674A CN117778674A CN202311820584.2A CN202311820584A CN117778674A CN 117778674 A CN117778674 A CN 117778674A CN 202311820584 A CN202311820584 A CN 202311820584A CN 117778674 A CN117778674 A CN 117778674A
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- 238000000137 annealing Methods 0.000 title claims abstract description 66
- 229910001004 magnetic alloy Inorganic materials 0.000 title claims abstract description 63
- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 title claims abstract description 47
- 238000000034 method Methods 0.000 title claims abstract description 43
- 230000008569 process Effects 0.000 title claims abstract description 25
- 238000001816 cooling Methods 0.000 claims abstract description 31
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 21
- 239000001257 hydrogen Substances 0.000 claims abstract description 21
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims abstract description 19
- 238000009826 distribution Methods 0.000 claims abstract description 8
- 238000003801 milling Methods 0.000 claims abstract description 7
- 238000010438 heat treatment Methods 0.000 claims description 23
- 238000007599 discharging Methods 0.000 claims description 9
- 238000005406 washing Methods 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 abstract description 16
- 239000013078 crystal Substances 0.000 abstract description 5
- 229910045601 alloy Inorganic materials 0.000 abstract description 3
- 238000004321 preservation Methods 0.000 abstract description 2
- 238000000746 purification Methods 0.000 abstract 1
- 238000001953 recrystallisation Methods 0.000 abstract 1
- 230000000052 comparative effect Effects 0.000 description 30
- 230000006698 induction Effects 0.000 description 16
- 239000000843 powder Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 239000000696 magnetic material Substances 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 230000035699 permeability Effects 0.000 description 6
- 229920006395 saturated elastomer Polymers 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000498 ball milling Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005242 forging Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005358 geomagnetic field Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
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- Soft Magnetic Materials (AREA)
Abstract
The invention discloses an annealing process of an iron-nickel soft magnetic alloy, which comprises the following steps: and (3) carrying out two-stage continuous annealing on the iron-nickel soft magnetic alloy subjected to milling processing and surface oxide layer removal in a hydrogen atmosphere, wherein the iron-nickel soft magnetic alloy is cooled to room temperature at a certain cooling speed after the primary annealing, and the iron-nickel soft magnetic alloy with small grain size and uniform grain distribution is obtained. The invention anneals the Fe-Ni soft magnetic alloy at 850 ℃, and the Fe-Ni soft magnetic alloy is recrystallized and the normal growth of crystal grains is large, and uniform and fine crystal grains are obtained along with the extension of time. When the temperature is raised to 1100 ℃ for two-stage annealing, secondary recrystallization occurs in the alloy structure, the grain size is far larger than that of the annealed grains at 850 ℃, the grains are fully grown along with the extension of the heat preservation time, and the uniformity of the grains is better. The grain size is large, so that the purification is thorough, the direct current magnetic property of the alloy is good, and the high direct current magnetic conductivity and low coercive force can be obtained.
Description
Technical Field
The invention belongs to the technical field of magnetic materials, and particularly relates to an annealing process of an iron-nickel soft magnetic alloy.
Background
A soft magnetic material is a magnetic material having a high saturation magnetization (Ms), a low coercivity (Hc), and a high permeability. Soft magnetic materials are easy to magnetize and demagnetize, and are widely applied to electrical equipment and electronic equipment. With the rapid development of the information age, in order to meet the increasingly developed demands of the traditional industry, more importantly, in order to meet the development of electronic information and science technology and the demands of various electronic products, people put higher and higher demands on magnetic materials. The common soft magnetic material Fe-based alloy has been widely paid attention to the application of the excellent soft magnetic performance in the aspects of transformers, sensors, switching power supplies, magnetic shields and the like.
The magnetic shielding cover is a cavity electromagnetic component with good magnetic shielding effect, which is manufactured by using a material with good soft magnetic property. Because the magnetic permeability of the magnetic shielding material is tens times or even thousands times greater than that of air, most magnetic lines of force are concentrated in the shielding body to pass through, and environmental magnetic fields such as geomagnetic fields and interference magnetic fields generated by equipment can be shielded, and an approximate zero magnetic space with small residual magnetic induction intensity is formed in the magnetic shielding cover, so that the magnetic shielding effect is achieved. In electromagnetic shielding devices, a magnetic shield is one of the important means for preventing electromagnetic radiation pollution and electromagnetic interference caused by electromagnetic leakage, and the shielding cover has a shielding effect on an external magnetic field, so that a soft magnetic alloy used for the shielding cover has good magnetic performance for achieving a certain magnetic shielding effect. The magnetic properties of the soft magnetic alloy material are closely related to microstructure (grain size and uniformity), crystal defects and impurity content, and the magnetic properties are reduced due to residual stress and impurity existence, grain refinement, grain boundary increase, non-uniformity of grain size and the like. When the soft magnetic alloy sample is subjected to powerful spinning, the original microstructure of the material is damaged, crystal grains are radially extruded and axially elongated, residual stress is fully distributed in the material, grain boundaries are increased, and the magnetic performance is seriously reduced. Therefore, a process method for carrying out annealing heat treatment on the spun workpiece is explored, residual stress is eliminated, lattice defects are reduced, the microstructure of the workpiece is improved, and the magnetic performance is improved, so that the method is an essential key step before the soft magnetic material is used for manufacturing a magnetic shielding cover.
Disclosure of Invention
It is an object of the present invention to address at least the above problems and/or disadvantages and to provide at least the advantages described below.
To achieve these objects and other advantages and in accordance with the purpose of the invention, there is provided an annealing process of an iron-nickel soft magnetic alloy, comprising: and (3) carrying out two-stage continuous annealing on the iron-nickel soft magnetic alloy subjected to milling processing and surface oxide layer removal in a hydrogen atmosphere, wherein the iron-nickel soft magnetic alloy is cooled to room temperature at a certain cooling speed after the primary annealing, and the iron-nickel soft magnetic alloy with small grain size and uniform grain distribution is obtained.
Preferably, the method comprises the following steps:
firstly, milling the iron-nickel soft magnetic alloy after post-treatment to remove a surface oxide layer;
step two, placing the iron-nickel alloy soft magnetic gold with the surface oxide layer removed into a high-temperature vacuum furnace, and vacuumizing;
introducing hydrogen into the high-temperature vacuum furnace, vacuumizing again, and performing hydrogen furnace washing;
step four, introducing hydrogen into the high-temperature vacuum furnace again to a certain vacuum degree, and setting a certain hydrogen flow rate;
step five, carrying out a first two-stage continuous annealing according to an annealing program, namely raising the temperature to a first temperature at a certain heating rate, and preserving heat for a first time; heating to a second temperature, preserving heat for a second time, cooling the iron-nickel soft magnetic alloy to a third temperature at a certain cooling speed, and cooling the iron-nickel soft magnetic alloy at a certain cooling speed and discharging the iron-nickel soft magnetic alloy;
and step six, carrying out secondary continuous annealing according to an annealing program, namely raising the temperature to a fourth temperature at a certain heating rate, keeping the temperature for a certain time, raising the temperature to a fifth temperature, keeping the temperature for a certain time, and finally taking out the iron-nickel soft magnetic alloy through furnace cooling.
Preferably, in the second step, the vacuum is pumped to 1×10 -3 pa or less.
Preferably, in the third step, hydrogen is introduced into the high-temperature vacuum furnace until the vacuum degree is 80-120 pa, and the vacuum is again pumped to 1×10 -3 pa or less.
Preferably, in the fourth step, hydrogen is again introduced into the high-temperature vacuum furnace until the air space is 0.5X10 -1 ～2×10 -1 Pa, the flow rate of hydrogen is set to be 0.1-0.5 m3/h.
Preferably, the annealing procedure of the first two-stage continuous annealing in the fifth step is as follows: raising the temperature to 850 ℃ at the heating rate of 10 ℃/min, preserving heat for 4 hours, raising the temperature to 1150 ℃ and preserving heat for 4 hours, finally cooling to 600 ℃ at the speed of 200 ℃/h, and then cooling to below 200 ℃ at the speed of 400 ℃/h and discharging.
Preferably, in the sixth step, the annealing procedure of the second two-stage continuous annealing is as follows: raising the temperature to 850 ℃ at a heating rate of 10 ℃/min, preserving heat for 4 hours, raising the temperature to 1150 ℃ and preserving heat for 4 hours, finally taking out the mixture through furnace cooling,
the invention at least comprises the following beneficial effects: compared with the product on the market, the obtained iron-nickel soft magnetic alloy product has small grain size, uniform grain distribution, 5-30 mu m size, saturated magnetic induction reaching 1.61T, residual magnetic induction reaching 0.34T, coercive force reaching 2.5A/m and maximum magnetic permeability reaching 120mH/m.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Drawings
FIG. 1 is an XRD pattern of the iron-nickel alloy prepared in example 1;
FIG. 2 is a hysteresis loop diagram of the iron-nickel alloy prepared in example 1;
FIG. 3 is a grain distribution diagram of the iron-nickel alloy prepared in example 1;
FIG. 4 is a graph showing a ratio of grain sizes of the iron-nickel alloy prepared in example 1;
FIG. 5 is a hysteresis loop diagram of the Fe-Ni soft magnetic alloy material annealed in comparative example 1;
FIG. 6 is a hysteresis loop diagram of the Fe-Ni soft magnetic alloy material annealed in comparative example 2;
FIG. 7 is a hysteresis loop diagram of the Fe-Ni soft magnetic alloy material annealed in comparative example 3;
fig. 8 is a hysteresis loop diagram of the iron-nickel soft magnetic alloy material annealed in comparative example 4.
Detailed Description
The present invention is described in further detail below with reference to the drawings to enable those skilled in the art to practice the invention by referring to the description.
It will be understood that terms, such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
Example 1
The embodiment provides an annealing process of an iron-nickel soft magnetic alloy, which comprises the following steps:
firstly, milling the iron-nickel soft magnetic alloy subjected to post-treatment to remove a surface oxide layer;
step two, placing the iron-nickel soft magnetic alloy with the surface oxide layer removed into a high-temperature vacuum furnace, and vacuumizing to 1 multiplied by 10 - 3 pa or less;
step three, introducing hydrogen into the high-temperature vacuum furnace until the vacuum degree is 100pa, and vacuumizing again to 1 multiplied by 10 -3 Hydrogen washing furnace below pa;
step four, hydrogen is again introduced into the high-temperature vacuum furnace until the vacuum degree is 1 multiplied by 10 -1 pa, ensuring the hydrogen flow rate of 0.2m 3 /h。
Step five, performing first-stage continuous annealing; the annealing procedure is as follows: raising the temperature to 850 ℃ at the heating rate of 10 ℃/min, preserving heat for 4 hours, raising the temperature to 1150 ℃ and preserving heat for 4 hours, finally cooling to 600 ℃ at the speed of 200 ℃/h, and then cooling to below 200 ℃ at the speed of 400 ℃/h and discharging;
step six, performing second-stage continuous annealing; the annealing procedure is as follows: raising the temperature to 850 ℃ at the heating rate of 10 ℃/min, preserving heat for 4 hours, raising the temperature to 1150 ℃ and preserving heat for 4 hours, and finally taking out the iron-nickel soft magnetic alloy furnace.
The XRD pattern, hysteresis loop pattern, grain distribution pattern and grain size ratio of the iron-nickel soft magnetic alloy material annealed in this example are shown in fig. 1, 2, 3 and 4, respectively, and it can be seen from fig. 1 that the sample annealed in this example is Cubic crystal system (Cubic) and the space group is Fm3m. The sample phase basically coincides with the standard PDF card and is not changed; as can be seen from FIG. 2, the coercivity of the sample is low, and the saturation induction intensity is more than 1.5T; it can be seen from fig. 3 that the annealed iron-nickel soft magnetic alloy has uniform grain distribution; it can be seen from FIG. 4 that the size distribution of the Fe-Ni soft magnetic alloy grains is 5-30 μm, and the grain size is most concentrated in the range of 5-10 μm.
Comparative example 1
This comparative example provides an annealing process for an iron-nickel soft magnetic alloy, which differs from example 1 in that this comparative example uses a one-stage annealing at a time, the annealing procedure being: raising the temperature to 1100 ℃ at a heating rate of 10 ℃/min, preserving heat for 4 hours, cooling to below 200 ℃ at a speed of 400 ℃/h, and discharging, wherein the rest processes are the same as those of the example 1.
Fig. 5 is a hysteresis loop diagram of the iron-nickel soft magnetic alloy material obtained by annealing in this comparative example, and it can be seen from the figure that the sample has high coercive force, high remanence and low saturation induction.
Comparative example 2
This comparative example provides an annealing process for iron-nickel soft magnetic alloys, which differs from example 1 in that this comparative example uses a two-stage annealing at a time, the annealing procedure being: raising the temperature to 850 ℃ at the heating rate of 10 ℃/min, preserving heat for 4 hours, raising the temperature to 1100 ℃ and preserving heat for 4 hours, finally cooling to 600 ℃ at the speed of 200 ℃/h, and then cooling to below 200 ℃ at the speed of 400 ℃/h, and discharging, wherein the rest processes are the same as those of the embodiment 1.
FIG. 6 is a hysteresis loop diagram of the Fe-Ni soft magnetic alloy material obtained by annealing of the comparative example, and it can be seen from the graph that the sample has almost no change in saturation induction intensity compared with the sample of comparative example 1, and the coercivity is reduced, and specific values are shown in Table 1, which shows that the coercivity performance of the sample can be improved by two-stage annealing compared with the sample of one-stage annealing
Comparative example 3
This comparative example provides an annealing process for an iron-nickel soft magnetic alloy, which also employs the two-stage annealing of example 1, except that the first two-stage annealing procedure is: raising the temperature to 950 ℃ at a heating rate of 10 ℃/min, preserving heat for 4 hours, raising the temperature to 1200 ℃ and preserving heat for 4 hours, cooling to 600 ℃ at a speed of 200 ℃/h, cooling to below 200 ℃ at a speed of 400 ℃/h, and discharging; the second two-stage annealing procedure is: carrying out secondary continuous annealing; the annealing procedure is as follows: raising the temperature to 950 ℃ at the heating rate of 10 ℃/min, preserving heat for 4 hours, raising the temperature to 1200 ℃ and preserving heat for 4 hours, finally taking out the iron-nickel soft magnetic alloy furnace, and the rest of the process is the same as that of the example 1.
FIG. 7 is a hysteresis loop diagram of the Fe-Ni soft magnetic alloy material obtained by annealing of the comparative example, and it can be seen from the graph that the saturated magnetic induction intensity of the sample is improved compared with that of comparative example 1 and comparative example 2, the coercivity change is smaller, and specific values are shown in Table 1, which illustrates that the annealing temperature and the two annealing processes have larger influence on the saturated magnetic induction intensity performance of the sample
Comparative example 4
This comparative example provides an annealing process for an iron-nickel soft magnetic alloy, which also employs the two-stage annealing of example 1, except that the first two-stage annealing procedure is: raising the temperature to 850 ℃ at the heating rate of 10 ℃/min, preserving heat for 4 hours, raising the temperature to 1100 ℃, preserving heat for 4 hours, cooling to 600 ℃ at the speed of 200 ℃/h, cooling to below 200 ℃ at the speed of 400 ℃/h, and discharging; the second two-stage annealing procedure is: carrying out secondary continuous annealing; the annealing procedure is as follows: raising the temperature to 850 ℃ at the heating rate of 10 ℃/min, preserving heat for 4 hours, raising the temperature to 1100 ℃ and preserving heat for 4 hours, and finally taking out the iron-nickel soft magnetic alloy furnace. The rest of the process is the same as in example 1.
FIG. 8 is a hysteresis loop diagram of the Fe-Ni soft magnetic alloy material obtained by annealing of the comparative example, and it can be seen from the graph that the saturated magnetic induction intensity of the sample is improved compared with that of comparative examples 1, 2 and 3, the coercivity change is small, and specific values are shown in Table 1, which shows that the cooling rate has a large influence on the saturated magnetic induction intensity performance of the sample
The saturation induction Bm, the residual induction Br, the coercive force Hc and the magnetic permeability μ of the iron-nickel soft magnetic alloy materials annealed in example 1 and comparative examples 1 to 4 were measured, respectively, to give table 1:
TABLE 1 saturation induction Bm, residual magnetic induction Br, coercive force Hc and magnetic permeability μ of Fe-Ni soft magnetic alloy materials obtained by annealing example 1, comparative examples 1 to 4
| Br(T) | Bm(T) | Hc(A/m) | μ(mH/m) | |
| Example 1 | 0.34 | 1.61 | 2.5 | 120 |
| Comparative example 1 | 0.494 | 1.29 | 12.7 | 110 |
| Comparative example 2 | 0.388 | 1.32 | 5.81 | 105 |
| Comparative example 3 | 0.383 | 1.42 | 9.32 | 115 |
| Comparative example 4 | 0.341 | 1.44 | 6.69 | 112 |
As can be seen from the above table, the iron-nickel soft magnetic alloy material obtained by annealing in example 1 has a saturation induction of 1.61T, a residual induction of as low as 0.34T, a coercive force of as low as 2.5A/m, and a maximum magnetic permeability of 120mH/m, which are all superior to those of comparative examples 1 to 4.
Wherein the post-treatment process of the iron-nickel soft magnetic alloy of the example 1 and the comparative examples 1-4 before annealing comprises the following steps:
s1, weighing metal powder, loading the metal powder into a nylon ball milling tank, and grinding the metal powder by adopting an alcohol wet method, wherein the mass ratio of the alcohol to the metal powder is 2:1, the ball milling rotating speed is 300rpm, and the ball milling time is 2 hours; drying the ball-milled metal powder by using a vacuum oven, wherein the vacuum degree is 10 -1 Pa, and drying at 50 ℃; pre-pressing the dried metal powder by using a tablet press, wherein the pressure is 25MPa; the metal powder comprises Fe, ni, mn, si, cr, ti, wherein the mass ratio of Fe powder is 51%, the mass ratio of Ni powder is 47%, the mass ratio of Mn powder is 0.6%, the mass ratio of Si powder is 0.4%, the mass ratio of Cr powder is 0.6%, the mass ratio of Ti powder is 0.4%, the pre-pressed block body is smelted twice, and the smelting temperature is 1300 ℃;
s2, forging the smelted material for 3 times, wherein the forging temperature is 1000 ℃, and the deformation is 40%;
s3, naturally cooling the forged material to 300 ℃ for warm rolling treatment, wherein the deformation is 50%, and the rolling speed is 0.5m/S;
s4, milling the warm rolled material, removing surface cracks and oxide layers, and then performing cryogenic treatment, wherein the cryogenic treatment temperature is-80 ℃, and the heat preservation time is 24 hours;
s5, carrying out heat treatment on the material subjected to the deep cooling treatment, wherein the heat treatment is carried out under vacuum, and the vacuum degree is 1 multiplied by 10 -3 And heating to 1100 ℃ at a heating rate of 10 ℃/min below Pa, and preserving heat for 4 hours to finish the post-treatment process of the iron-nickel soft magnetic alloy.
The number of equipment and the scale of processing described herein are intended to simplify the description of the present invention. Applications, modifications and variations of the present invention will be readily apparent to those skilled in the art.
Although embodiments of the present invention have been disclosed above, it is not limited to the details and embodiments shown and described, it is well suited to various fields of use for which the invention would be readily apparent to those skilled in the art, and accordingly, the invention is not limited to the specific details and illustrations shown and described herein, without departing from the general concepts defined in the claims and their equivalents.
Claims (7)
1. An annealing process of an iron-nickel soft magnetic alloy is characterized by comprising the following steps: and (3) carrying out two-stage continuous annealing on the iron-nickel soft magnetic alloy subjected to milling processing and surface oxide layer removal in a hydrogen atmosphere, wherein the iron-nickel soft magnetic alloy is cooled to room temperature at a certain cooling speed after the primary annealing, and the iron-nickel soft magnetic alloy with small grain size and uniform grain distribution is obtained.
2. The annealing process of the iron-nickel soft magnetic alloy according to claim 1, comprising the steps of:
firstly, milling the iron-nickel soft magnetic alloy after post-treatment to remove a surface oxide layer;
step two, placing the iron-nickel alloy soft magnetic gold with the surface oxide layer removed into a high-temperature vacuum furnace, and vacuumizing;
introducing hydrogen into the high-temperature vacuum furnace, vacuumizing again, and performing hydrogen furnace washing;
step four, introducing hydrogen into the high-temperature vacuum furnace again to a certain vacuum degree, and setting a certain hydrogen flow rate;
step five, carrying out a first two-stage continuous annealing according to an annealing program, namely raising the temperature to a first temperature at a certain heating rate, and preserving heat for a first time; heating to a second temperature, preserving heat for a second time, cooling the iron-nickel soft magnetic alloy to a third temperature at a certain cooling speed, and cooling the iron-nickel soft magnetic alloy at a certain cooling speed and discharging the iron-nickel soft magnetic alloy;
and step six, carrying out secondary continuous annealing according to an annealing program, namely raising the temperature to a fourth temperature at a certain heating rate, keeping the temperature for a certain time, raising the temperature to a fifth temperature, keeping the temperature for a certain time, and finally taking out the iron-nickel soft magnetic alloy through furnace cooling.
3. The annealing process of Fe-Ni soft magnetic alloy according to claim 2, wherein in the second step, the vacuum is applied to 1X 10 -3 pa or less.
4. The annealing process of Fe-Ni soft magnetic alloy according to claim 2, wherein in the third step, hydrogen is introduced into a high temperature vacuum furnace until the vacuum degree is 80-120 Pa, and the furnace is again vacuumized to 1X 10 -3 pa or less.
5. The annealing process of Fe-Ni soft magnetic alloy according to claim 2, wherein in the fourth step, hydrogen is again introduced into the high temperature vacuum furnace until the air is 0.5X10 -1 ～2×10 -1 Pa, the set hydrogen flow rate is 0.1-0.5 m 3 /h。
6. The annealing process of the iron-nickel soft magnetic alloy according to claim 2, wherein the annealing procedure of the first two-stage continuous annealing in the fifth step is as follows: raising the temperature to 850 ℃ at the heating rate of 10 ℃/min, preserving heat for 4 hours, raising the temperature to 1150 ℃ and preserving heat for 4 hours, finally cooling to 600 ℃ at the speed of 200 ℃/h, and then cooling to below 200 ℃ at the speed of 400 ℃/h and discharging.
7. The annealing process of the iron-nickel soft magnetic alloy according to claim 2, wherein in the sixth step, the annealing procedure of the second two-stage continuous annealing is as follows: raising the temperature to 850 ℃ at the heating rate of 10 ℃/min, preserving heat for 4 hours, raising the temperature to 1150 ℃ and preserving heat for 4 hours, and finally taking out the furnace cooling.
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