CN117772604A

CN117772604A - Device and method for recycling silicon carbide grown crystal remainder

Info

Publication number: CN117772604A
Application number: CN202311807801.4A
Authority: CN
Inventors: 吴安楠; 黄延旺; 赵新田; 浩瀚; 杨弥珺; 章宣; 刘新禹; 张博文; 王旭扬; 陈晶莹; 廖青春
Original assignee: Ningbo Hesheng New Material Co ltd
Current assignee: Ningbo Hesheng New Material Co ltd
Priority date: 2023-12-26
Filing date: 2023-12-26
Publication date: 2024-03-29

Abstract

The application discloses a silicon carbide growth crystal excess material recovery device and method, including blowing the dividing device, including bulk container and blowing assembly, bulk container slope sets up, and bulk container's lower end is provided with first discharge gate, and bulk container's higher end is provided with the second discharge gate, and the blowing assembly sets up in bulk container, and the blowing assembly is located between first discharge gate and the second discharge gate, is provided with at least one air cock on the blowing assembly, and the air cock is suitable for blowing the excess material to make at least part excess material to the second discharge gate direction activity; the blanking device is suitable for conveying the residual materials into the bulk material container, and the residual materials are suitable for sliding along the bulk material container and pass through the blowing-off assembly; the collecting device is suitable for sucking the excess material moving to the second discharging hole, and the collecting device has the characteristics of simplicity in operation, simplicity in flow and low production cost.

Description

Device and method for recycling silicon carbide grown crystal remainder

Technical Field

The application relates to the technical field of silicon carbide growth, in particular to a device and a method for recycling crystal remainder of silicon carbide growth.

Background

Silicon carbide (SiC) is a semiconductor material with a wide forbidden band, high breakdown field strength, high electron saturation drift rate, and high thermal conductivity. Silicon carbide has a lot of excellent physical and chemical properties, so that the silicon carbide has very wide application prospects in the fields of aerospace, electronics, energy sources, military industry and the like. At the same time, these excellent properties make it very suitable for the fabrication of high temperature, high frequency, radiation resistant, high power and high density integrated electronic devices.

Currently, single crystal silicon carbide materials for device fabrication are generally grown by PVT (physical vapor transport) methods. Compared with the high-temperature chemical deposition method, the PVT method has the advantages of complex control, high cost, metal pollution, rough surface and other serious defects, mature technology, the most widely applied silicon carbide single crystal growth method at present, simple growth condition by using the PVT method, and convenient industrialization. However, the amount of waste generated by the method is excessive, and the silicon carbide waste reaches 70% -80% in a furnace, which is certainly the environmental pressure of cost and waste accumulation for industrialization. Furthermore, the amount of silicon carbide scrap generated during post-processing of silicon carbide is not negligible. In further post-processing, rounding of the ingot, head and tail removal of the ingot, cutting and polishing of the wafer all produce significant amounts of scrap containing usable silicon carbide. Recycling the waste materials is a problem to be solved in the low-cost sustainable development of the silicon carbide industry, and the efficient recycling of the silicon carbide waste materials is the most critical link in the impurity removal and purification of the waste materials.

The impurities in the silicon carbide waste material are mainly as follows: 1. the carbon impurities and the silicon impurities with high content are derived from trace impurities with low content, such as carbon powder, trace elements Na, mg, al, fe, zn, cu generated by self-contained silicon powder raw materials and radiation of a single crystal growth furnace, and the like, because carbon enrichment and silicon enrichment are caused by different volatilization rates of carbon and silicon when silicon carbide powder is sublimated and crystallized in a process of growing the silicon carbide single crystal by a PVT method.

However, the existing recovery process of the silicon carbide grown crystal residue has the following defects: the recovery process is complex and lengthy, and high-temperature roasting, strong acid and alkali of dangerous chemical agents and the like are possibly needed, so that the recovery and utilization cost is high, and the industrial production is not facilitated.

Disclosure of Invention

An object of the application is to provide a silicon carbide grown crystal residue recovery device and method which are simple to operate, simple in flow and low in production cost.

In order to achieve the above purpose, the technical scheme adopted in the application is as follows: a silicon carbide grown crystal residue recovery device, comprising:

the blowing and separating device comprises a bulk container and a blowing and separating assembly, wherein the bulk container is obliquely arranged, a first discharge hole is formed in the lower end of the bulk container, a second discharge hole is formed in the upper end of the bulk container, the blowing and separating assembly is arranged in the bulk container, the blowing and separating assembly is positioned between the first discharge hole and the second discharge hole, at least one air tap is arranged on the blowing and separating assembly, and the air tap is suitable for blowing and separating residual materials and enables at least part of the residual materials to move towards the second discharge hole;

the blanking device is suitable for conveying the residual materials into the bulk material container, and the residual materials are suitable for sliding along the bulk material container and pass through the blowing-off assembly;

and the collecting device is suitable for sucking the residual materials moving to the second discharging hole.

In some embodiments, the blow-down device further comprises an adjustment assembly coupled to at least one end of the bulk container, the adjustment assembly adapted to vary a height drop between a lower end and a higher end of the bulk container.

In some embodiments, the adjustment assembly includes a recliner pulley coupled to the lower end of the bulk container and a rotatable shaft rotatably coupled to the upper end of the bulk container, the recliner pulley adapted to rotate the lower end of the bulk container relative to the upper end of the bulk container.

In some embodiments, the blowing assembly further comprises an air inlet pipe and a diverter, the air tap is arranged on the diverter, the diverter is rotatably arranged in the bulk container, and the air inlet pipe penetrates through the bulk container to be connected with the diverter; the bulk cargo container is internally provided with bulk cargo cavities in a strip structure, the number of the air nozzles is multiple, the air nozzles are uniformly distributed in the direction perpendicular to the length direction of the bulk cargo cavities, and the rotating direction of the flow divider is perpendicular to the distribution direction of the air nozzles; the distance between the air tap and the bulk container is configured to be greater than the maximum movable height of the residual material in the bulk container.

In some embodiments, the blanking device comprises a blanking funnel and a flow regulator, wherein the flow regulator is arranged on the blanking funnel and is suitable for controlling the blanking speed of the blanking funnel; the upper end of the bulk container is provided with a feed inlet, the bottom of the blanking funnel is provided with a blanking channel, and at least part of the blanking channel is suitable for extending into the bulk container through the feed inlet; the friction coefficient of the inner wall of the blanking channel is 0.2-0.5.

In some embodiments, the collecting device comprises a collecting channel, a fan and a storage box, wherein the first end of the collecting channel faces the second discharging hole, the second end of the collecting channel is connected with the storage box, and the fan is suitable for enabling the first end of the collecting channel to suck the residual materials at the second discharging hole and convey the residual materials into the storage box through the second end of the collecting channel; the device comprises a machine frame, a blowing device, a discharging device, a collecting channel and a blowing device, wherein the blowing device is movably arranged in the machine frame, and the discharging device and the first end of the collecting channel extend into the machine frame.

A method for recycling the residual materials of silicon carbide grown crystals comprises the following steps:

s100, treating the residual materials, taking out the discharged residual materials, pouring the discharged residual materials into a vibrating screen container, horizontally placing the vibrating screen container in a vibrating screen machine, placing a fixed block in the vibrating screen container, and vibrating the vibrating screen machine to obtain dispersed residual materials;

s200, sorting for one time, adjusting the inclination angle of the bulk container and the wind pressure of the air inlet pipe, completely starting the blanking device, starting the collecting device, pouring the dispersed residual materials into the blanking device, carrying the first product falling at the second discharge port, and collecting the second product blown away to the first discharge port;

s300, secondary sorting is carried out, the inclination angle of the bulk container and the wind pressure of the air inlet pipe are regulated again, the discharging device is partially opened, the collecting device is in an opened state or a closed state, the second product is poured into the discharging device, the third product falling from the second discharging port is received, and the fourth product blown away to the first discharging port is collected;

s400, cleaning, namely respectively containing a first product and a third product by using a cleaning vessel, wrapping a fourth product by using a filter screen, then placing the fourth product in a cleaning tank, starting an ultrasonic cleaner, and repeatedly changing water for cleaning;

s500, drying, namely, putting the first product and the third product after the cleaning into a constant temperature drying oven separately, taking out the products after the drying, and blowing off surface floating ash by using a blower.

In some embodiments, in the step S100, the amplitude direction of the sieving machine includes an up-down amplitude and a left-right amplitude, and the solid block includes at least one of a silicon carbide sphere, a silicon carbide crystal, and a silicon carbide crystal sphere.

In some embodiments, the method further comprises the step of:

s600, performing sampling inspection once, measuring the content ratio of broken silicon carbide crystals in the first product, and repeating the step S200 when the content ratio of broken silicon carbide crystals is lower than a qualified value;

s700, performing sampling inspection for the second time, measuring the content ratio of the silicon carbide remainder in the third product, and repeating the step S300 when the content ratio of the silicon carbide remainder is lower than the qualified value.

In some embodiments, the step S400 includes the steps of:

s410, measuring the turbidity of the liquid in the cleaning tank when each cleaning is finished, and finishing the cleaning when the turbidity is lower than a set value.

Compared with the prior art, the beneficial effect of this application lies in:

1. the utility model provides a silicon carbide growth crystal clout recovery unit can separate the carbon simple substance, the silicon simple substance and the carbon dust of different masses in the silicon carbide clout through the mode of physics blowing off, and device's manufacturing cost is lower, easy operation, and regulating power and suitability are stronger, and the safety in utilization is higher.

2. According to the recovery method for the silicon carbide grown crystal residual material, carbon simple substances, silicon simple substances and carbon powder with different qualities in the silicon carbide residual material can be separated step by step and reused as raw materials, high-temperature roasting, dangerous chemical reagent strong acid and strong alkali and the like are not needed, the process is simplified, the energy consumption of production and processing is reduced, the recovery and utilization cost is reduced, and therefore the difficulty of industrial production is reduced.

Drawings

Fig. 1 is an overall structural view according to a preferred embodiment of the present application.

Fig. 2 is an overall structural view of a rack according to a preferred embodiment of the present application.

Fig. 3 is a schematic view of a state at the time of one sorting according to a preferred embodiment of the present application.

Fig. 4 is a schematic diagram of a state at the time of secondary sorting according to a preferred embodiment of the present application.

Fig. 5 is a schematic structural view of a blowing assembly according to a preferred embodiment of the present application.

Fig. 6 is a schematic structural view of a blanking apparatus according to a preferred embodiment of the present application.

In the figure: 1. a blowing separation device; 11. a bulk container; 111. a first discharge port; 112. a second discharge port; 113. a bulk cavity; 114. a feed inlet; 12. a blow-off assembly; 121. an air tap; 122. an air inlet pipe; 123. a shunt; 13. an adjustment assembly; 131. an angle adjusting pulley; 1311. rotating the handle; 132. a rotating shaft; 133. a hook rope; 2. a blanking device; 21. a blanking funnel; 211. a blanking channel; 22. a flow regulator; 3. a collecting device; 31. a collection channel; 32. a storage box; 4. a frame.

Detailed Description

The present application will be further described with reference to the specific embodiments, and it should be noted that, on the premise of no conflict, new embodiments may be formed by any combination of the embodiments or technical features described below.

In the description of the present application, it should be noted that, for the azimuth terms such as terms "center", "lateral", "longitudinal", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., the azimuth and positional relationships are based on the azimuth or positional relationships shown in the drawings, it is merely for convenience of describing the present application and simplifying the description, and it is not to be construed as limiting the specific protection scope of the present application that the device or element referred to must have a specific azimuth configuration and operation, as indicated or implied.

It should be noted that the terms "first," "second," and the like in the description and in the claims of the present application are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order.

The terms "comprises" and "comprising," along with any variations thereof, in the description and claims of the present application are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements that are expressly listed or inherent to such process, method, article, or apparatus.

The application is further described below with reference to the accompanying drawings:

as shown in fig. 1 to 6, the present application provides a silicon carbide grown crystal residue recovery device, which comprises a blow separation device 1, a blanking device 2 and a collecting device 3.

The blow-off device 1 comprises a bulk container 11 and a blow-off assembly 12, wherein the bulk container 11 is obliquely arranged, a first discharge hole 111 is formed in the lower end of the bulk container 11, a second discharge hole 112 is formed in the upper end of the bulk container 11, the blow-off assembly 12 is arranged in the bulk container 11, the blow-off assembly 12 is located between the first discharge hole 111 and the second discharge hole 112, at least one air tap 121 is arranged on the blow-off assembly 12, and the air tap 121 is suitable for blowing off residual materials and enables at least part of the residual materials to move towards the second discharge hole 112.

The residual materials entering the bulk container 11 can respectively fall from the first discharge hole 111 or be blown to the second discharge hole 112 under the combined action of self gravity, friction force between the bulk container 11 and air pressure of air flow sprayed by the air tap 121, so that the separation and selection of the residual materials are realized, the process only needs to perform parameter calculation in advance, the inclination angle of the bulk container 11 and the air pressure of air flow sprayed by the air tap 121 are set according to the calculated parameters, manual assistance can be basically eliminated, the semi-automatic and even automatic sorting of mass and industrialization is realized, and compared with the prior art, the method has lower recycling cost and is favorable for realizing industrial production through high-temperature roasting, using dangerous chemical agents such as strong acid and strong alkali and the like.

The blanking device 2 is suitable for feeding the excess material into the bulk material container 11, and the excess material is suitable for sliding down along the bulk material container 11 and passing through the blowing assembly 12, so that each part of the falling excess material can be influenced by the air flow blown out by the air nozzle 121 of the blowing assembly 12.

The collecting device 3 is suitable for sucking the excess material moving to the second discharge port 112, and the excess material which can be blown away by the air current blown out by the air tap 121 and moves to the second discharge port 112 is usually thinner in particle size and lighter in weight, and is generally impurities such as carbon powder and silicon carbide powder, and can be easily sucked and collected by the collecting device 3.

The recovery device can recycle the crystal growth residual materials, reduce the cost, and the residual materials obtained by separation have more concentrated granularity, so that the crystal growth process is convenient for carrying out layered filling on the raw materials.

In the embodiment shown in fig. 2, the recycling device further includes a frame 4, the blowing device 1 is movably disposed in the frame 4, the first ends of the discharging device 2 and the collecting channel 31 extend into the frame 4, the frame 4 is used for supporting and fixing the blowing device 1, the discharging device 2 and the collecting device 3, and the blowing device 1, the discharging device 2 and the collecting device 3 can be protected.

In some embodiments, the frame 4 is a closed structure, so that dust scattering in the sorting process can be reduced and controlled, the influence on the surrounding production environment is reduced, the working safety of operators is improved, and the collecting effect of the collecting device 3 can be improved.

In some embodiments, the blow-separating device 1 further includes an adjusting component 13, where the adjusting component 13 is connected to at least one end of the bulk container 11, and the adjusting component 13 is adapted to change a height difference between a lower end and a higher end of the bulk container 11, and the height difference is adjusted and changed in relation to an inclination angle of the bulk container 11, where the change in the inclination angle of the bulk container 11 can change a combined action of gravity of the residual material itself, friction between the bulk container 11 and air pressure of the air current sprayed by the air tap 121, so as to enable the residual materials with different qualities to be discharged from the first discharge port 111 or discharged from the second discharge port 112.

It will be appreciated that the adjustment assembly 13 may be connected to only the lower end or the upper end of the bulk container 11 and the height of the end may be changed, or the lower end and the upper end of the bulk container 11 may be connected at the same time, and the relative height difference between the two ends may be changed by controlling at least one of the lower end and the upper end to be movable, and the connection manner may be selected according to the specific structure, the arrangement manner and the actual adjustment requirement of the adjustment assembly 13.

In the embodiment shown in fig. 1, the adjustment assembly 13 comprises an angle adjustment pulley 131 and a rotation shaft 132, the angle adjustment pulley 131 being connected to the lower end of the bulk material container 11, the rotation shaft 132 being rotatably connected to the upper end of the bulk material container 11, the angle adjustment pulley 131 being adapted to rotate the lower end of the bulk material container 11 relative to the upper end of the bulk material container 11, in which embodiment the adjustment assembly 13 only controls the lower end of the bulk material container 11 to be movable, so that the relative position between the upper end of the bulk material container 11 and the collecting device 3 is not changed too much, thereby maintaining the mated suction collection of the upper end of the bulk material container 11 by the collecting device 3.

In some embodiments, the angle adjusting pulley 131 is connected with the bulk container 11 through a hook rope 133, and the angle adjusting pulley 131 can retract or pay out the hook rope 133 through rotation, so that activity control of the lower end of the bulk container 11 is achieved.

In some embodiments, the angle adjusting pulley 131 is provided with a rotating handle 1311, and the rotating handle 1311 passes through the frame 4 to extend to the outside, so that an operator can conveniently control the angle adjusting pulley 131, and the operation difficulty of the angle adjusting pulley 131 is reduced.

In some embodiments, the angle adjusting pulley 131 is provided with a locking device, and after the rotation control of the angle adjusting pulley 131 is completed through rotating the handle 1311, the angle adjusting pulley 131 can be limited to rotate through the locking device, so that the inclination angle of the bulk container 11 can be fixed.

In the embodiment shown in fig. 1 and 5, the blowing-off assembly 12 further includes an air inlet pipe 122 and a diverter 123, the air tap 121 is disposed on the diverter 123, the diverter 123 is rotatably disposed in the bulk container 11, the air inlet pipe 122 passes through the bulk container 11 and is connected with the diverter 123, the air inlet pipe 122 can be externally connected with an air pump or the like to supply air to the diverter 123, and then the air is uniformly circulated to the air tap 121 through the diverter 123.

In some embodiments, an adjusting valve may be disposed in the diverter 123 to control the air flow rate of the air entering the air tap 121, so as to realize the numerical adjustment of the air pressure during the process of blowing off the residual material.

In some embodiments, an adjusting air valve may be disposed on each air tap 121, so as to precisely control the air flow speed of each air tap 121, so that each air tap 121 can obtain the best blowing effect through adjustment.

In the embodiment shown in fig. 3 and fig. 4, a bulk material cavity 113 with a strip structure is provided in the bulk material container 11, the bulk material cavity 113 has a strip structure, so that the residual material has a long enough sliding distance, the air nozzles 121 can effectively blow off the residual material, the number of the air nozzles 121 is multiple, the blowing efficiency can be improved, the air nozzles 121 are uniformly distributed in the length direction of the bulk material cavity 113 perpendicular to the blowing efficiency, the rotation direction of the flow divider 123 is perpendicular to the distribution direction of the air nozzles 121, the relative position of the air nozzles 121 in the bulk material cavity 113 is not affected when the flow divider 123 rotates, and only the included angle between the front ends of the air nozzles 121 and the bulk material cavity 113 is changed.

In some embodiments, when the residue slides down stably in the bulk container 11, the upper surface of the residue can be regarded as a plane approximately, the distribution direction of the air nozzles 121 is parallel to the plane, so that the plane can be uniformly blown off, the residue with finer particle size and lighter weight can be blown off as far as possible, the sorting efficiency is improved, and in addition, the blowing angle of the air nozzles 121 to the plane can be changed by rotating the flow divider 123, so that the optimal blowing effect can be obtained.

In some embodiments, the main body of the cross section of the bulk material cavity 113 may be rectangular, and the distribution direction of the air nozzles 121 is parallel to the bottom surface of the bulk material cavity 113, so that the residual material can pass through each air nozzle 121 as uniformly as possible in thickness, and the same blowing effect is achieved.

It will be appreciated that the bulk material chamber 113 may have a cross-sectional body shape that is circular, trapezoidal, etc., and that rectangular is merely one preferred embodiment.

It should be noted that, the distance between the air tap 121 below and the bulk container 11 is configured to be greater than the maximum moving height of the residual material in the bulk container 11, so as to reduce the probability of burying and blocking the air tap 121 when the residual material slides in the bulk container 11, so that the air tap 121 can maintain a stable blowing effect, and the stability of the sorting process is improved.

It should be noted that the distance between the air tap 121 and the second discharge port 112 cannot be too large, and the distance needs to be enough that the excess material with smaller particle size and lighter weight can move to the second discharge port 112 under the blowing of the air tap 121 to ensure the sorting effect.

In some embodiments, the blanking apparatus 2 includes a blanking funnel 21 and a flow regulator 22, the flow regulator 22 being disposed on the blanking funnel 21, the flow regulator 22 being adapted to control the blanking speed of the blanking funnel 21 and to control the amount of drop per unit time of the blanking funnel 21.

In some embodiments, the blanking funnel 21 is designed to facilitate feeding, and can be manually fed or mechanically and automatically fed, so that the sorting efficiency is greatly improved, and the flow period is reduced.

In the embodiment shown in fig. 6, the flow regulator 22 preferably uses a pin, which has a simple structure, is convenient to operate, and has low cost, and the blanking speed of the blanking funnel 21 can be adjusted by changing the insertion depth of the pin.

In some embodiments, the flow regulator 22 may also be a regulator valve, etc., with finer flow regulation.

In the embodiment shown in fig. 1, 3 and 4, the upper end of the bulk material container 11 is provided with a feed inlet 114, the bottom of the blanking funnel 21 is provided with a blanking channel 211, at least part of the blanking channel 211 is suitable for extending into the bulk material container 11 through the feed inlet 114, in this embodiment, the adjusting component 13 only controls the lower end of the bulk material container 11 to move, so that the relative position between the upper end of the bulk material container 11 and the blanking funnel 21 is not changed excessively, and the fit that the blanking channel 211 extends into the feed inlet 114 is kept, thereby ensuring the feeding effect.

In some embodiments, the feeding hole 114 is formed along the length direction of the bulk container 11, when the inclination angle of the bulk container 11 is changed, the discharging channel 211 can move along the feeding hole 114 relative to the bulk container 11, in addition, the length of the discharging channel 211 needs to meet the requirement that the discharging channel 211 can extend into the feeding hole 114 under the maximum inclination angle and the minimum inclination angle of the bulk container 11 for sorting, so that the residual materials falling from the discharging channel 211 can fully enter the bulk container 11, the probability of scattering the residual materials outside the bulk container 11 is reduced, and the waste is reduced.

In some embodiments, the friction coefficient of the inner wall of the discharging channel 211 is 0.2-0.5, so as to ensure that the excess material can fall smoothly.

In some embodiments, the material of the blanking channel 211 is preferably acrylic, which has low cost, is convenient to produce, has a friction coefficient meeting the requirement, and can be made transparent, so that the falling situation of the residual materials can be observed conveniently.

The collecting device 3 comprises a collecting channel 31, a fan and a storage box 32, wherein the first end of the collecting channel 31 faces the second discharging hole 112, the second end of the collecting channel 31 is connected with the storage box 32, and the fan is suitable for enabling the first end of the collecting channel 31 to absorb the residual materials at the second discharging hole 112 and convey the residual materials into the storage box 32 through the second end of the collecting channel 31.

In some embodiments, the structure and material of the storage box 32 need to meet the explosion-proof requirement, so as to avoid the life hazard caused by explosion after the powder enters the storage box 32, and improve the production safety.

In some embodiments, the collecting channel 31 is preferably a corrugated tube, so that the angle can be adjusted at will, and the installation difficulty is low.

In some embodiments, the first end of the collecting channel 31 is spaced from the second outlet 112, so that the first end of the collecting channel 31 reduces the suction effect on the residue sliding from the second outlet 112 into the bulk container 11.

The application also provides a method for recycling the residual materials of the silicon carbide grown crystal, which comprises the steps of,

s100, processing the residual materials, taking out the discharged residual materials, pouring the discharged residual materials into a vibrating screen container, horizontally placing the vibrating screen container in a vibrating screen machine, placing a fixed block in the vibrating screen container, and vibrating the vibrating screen machine to obtain dispersed residual materials.

In step S100, the amplitude direction of the vibrating screen machine comprises an upper amplitude, a lower amplitude and a left amplitude, the vibration screen process of the traditional silicon carbide residual material only carries out the left amplitude and the right amplitude, and the scattering effect of the silicon carbide residual material can be effectively improved by increasing the upper amplitude and the lower amplitude.

In some embodiments, the diameter of the shaker container may be 200mm, with the remainder being poured into two-thirds of the shaker container.

In some embodiments, the operating parameters of the sieving machine are 6mm in vertical amplitude, 12.5mm in radius of gyration, 221 times/min of shaking, 147 times/min of jarring, 370W of motor power, 2800r/min of motor rotating speed and 3-10 min of operating time.

In some embodiments, the solid pieces include at least one of silicon carbide spheres, silicon carbide crystals, and silicon carbide crystal spheres, and the solid pieces of silicon carbide material can be utilized directly as a feedstock without being screened out, reducing the operational flow.

In some embodiments, the diameter of the solid mass is preferably 8-12 mm.

S200, sorting for one time, adjusting the inclination angle of the bulk container 11 and the wind pressure of the air inlet pipe 122, completely starting the blanking device 2, starting the collecting device 3, pouring the dispersed residual materials into the blanking device 2, carrying the first product falling from the second discharge port 112, and collecting the second product blown off to the first discharge port 111.

In some embodiments, the tilt angle of the bulk container 11 is adjusted to be 47-63 °, and the wind pressure of the air inlet pipe 122 is adjusted to be 0.45-0.55 Mpa.

It is noted that the angle of inclination in the context refers to the angle between the bulk container 11 and the horizontal.

In some embodiments, the first product is crushed silicon carbide and the second product is a mixture of silicon carbide residue and carbon powder.

S300, sorting for the second time, regulating the inclination angle of the bulk container 11 and the wind pressure of the air inlet pipe 122 again, partially opening the blanking device 2, pouring the second product into the blanking device 2 in an opening state or a closing state by the collecting device 3, receiving the third product falling from the second discharging hole 112, and collecting the fourth product blown away from the first discharging hole 111.

In some embodiments, the tilt angle of the bulk container 11 is adjusted again to 25-37 °, the wind pressure of the air inlet pipe 122 is adjusted again to 0.25-0.35 Mpa, and the bolt slides to half of the opening of the discharging channel 211.

In some embodiments, the third product is a silicon carbide residue and the fourth product is carbon powder.

S400, cleaning, namely respectively containing the first product and the third product by using a cleaning vessel, wrapping the fourth product by using a filter screen, then placing the wrapped product in a cleaning tank, starting an ultrasonic cleaner, and repeatedly changing water for cleaning.

In some embodiments, the carbon powder is wrapped with a 0.5mm pore size filter.

In some embodiments, during cleaning, a total air inlet valve of the ultrasonic cleaner is opened, the total air inlet pressure is set to be 0.45-0.55 Mpa, the nitrogen partial pressure is set to be 0.01-0.02 Mpa, the motor of the ultrasonic cleaner is rotated to be 800-1000 rad/h, the water flow of a single tank is controlled to be 15.6-28.9L/min, the frequency of the ultrasonic generator is set to be 25-40 KHz, the power is 1200W, the cleaning mode of the ultrasonic cleaner is set to be an overflow water supplementing mode, the forward rotation time of the motor during cleaning is 150-3000 s, and the reverse rotation time is 200-3500 s.

In some embodiments, the conditions for ending the step S400 cleaning may be:

s410, measuring the turbidity of the liquid in the cleaning tank when each cleaning is finished, and finishing the cleaning when the turbidity is lower than a set value, wherein the set value of the turbidity is 25ntu.

In some embodiments, the oven is set to rapidly warm to 300 ℃, cool after 120 minutes, and remove the first and third products.

It is noted that to ensure the quality of the sorted product, the following steps may be performed:

s600, performing sampling inspection once, measuring the content ratio of the broken silicon carbide crystals in the first product, and repeating the step S200 when the content ratio of the broken silicon carbide crystals is lower than a qualified value.

In some embodiments, the first product is acceptable when the silicon carbide cullet content in the first product exceeds 99.99%.

In some embodiments, the third product is acceptable with a silicon carbide residue content of greater than 95%.

Under the same technological conditions, respectively using the normal silicon carbide raw material, the processed silicon carbide broken crystal and the processed silicon carbide residual material as sources to carry out crystal growth to obtain the following comparison results:

(1) The normal silicon carbide raw material is taken as a source to grow crystals, more micropipes are arranged in the center, and more micropipes accompanied by 'silicon drops' are observed by sampling.

(2) The processed broken silicon carbide crystal is used as a crystal grown by a source, the thickness grown in the same time is relatively thinner, and compared with the crystal obtained by taking normal silicon carbide raw materials as the source, the crystal has certain performance disadvantages.

(3) The treated silicon carbide residual material is used as a crystal grown from a source, has lower micropipe density, obviously reduces the micropipe quantity accompanied by 'silicon drop', reduces the growth rate, and has poor crystal edge state, compared with crystals obtained from normal silicon carbide raw materials as a source, the crystals obtained from the normal silicon carbide raw materials have advantages and disadvantages.

The foregoing has outlined the basic principles, main features and advantages of the present application. It will be appreciated by persons skilled in the art that the present application is not limited to the embodiments described above, and that the embodiments and descriptions described herein are merely illustrative of the principles of the present application, and that various changes and modifications may be made therein without departing from the spirit and scope of the application, which is defined by the appended claims. The scope of protection of the present application is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a silicon carbide growth crystal clout recovery unit which characterized in that includes:

2. A silicon carbide grown crystal residue recovery device as defined in claim 1, wherein: the blow-off device further comprises an adjusting assembly connected to at least one end of the bulk container, the adjusting assembly being adapted to vary the height difference between the lower end and the upper end of the bulk container.

3. A silicon carbide grown crystal residue recovery device as defined in claim 2, wherein: the adjusting assembly comprises an angle adjusting pulley and a rotating shaft, wherein the angle adjusting pulley is connected with the lower end of the bulk cargo container, the rotating shaft is rotatably connected with the upper end of the bulk cargo container, and the angle adjusting pulley is suitable for enabling the lower end of the bulk cargo container to rotate relative to the upper end of the bulk cargo container.

4. A silicon carbide grown crystal residue recovery device as defined in claim 1, wherein: the blowing-off assembly further comprises an air inlet pipe and a diverter, the air tap is arranged on the diverter, the diverter is rotatably arranged in the bulk cargo container, and the air inlet pipe penetrates through the bulk cargo container to be connected with the diverter; the bulk cargo container is internally provided with bulk cargo cavities in a strip structure, the number of the air nozzles is multiple, the air nozzles are uniformly distributed in the direction perpendicular to the length direction of the bulk cargo cavities, and the rotating direction of the flow divider is perpendicular to the distribution direction of the air nozzles; the distance between the air tap and the bulk container is configured to be greater than the maximum movable height of the residual material in the bulk container.

5. A silicon carbide grown crystal residue recovery device as defined in claim 1, wherein: the blanking device comprises a blanking funnel and a flow regulator, wherein the flow regulator is arranged on the blanking funnel and is suitable for controlling the blanking speed of the blanking funnel; the upper end of the bulk container is provided with a feed inlet, the bottom of the blanking funnel is provided with a blanking channel, and at least part of the blanking channel is suitable for extending into the bulk container through the feed inlet; the friction coefficient of the inner wall of the blanking channel is 0.2-0.5.

6. A silicon carbide grown crystal residue recovery device as defined in claim 1, wherein: the collecting device comprises a collecting channel, a fan and a storage box, wherein the first end of the collecting channel faces the second discharge hole, the second end of the collecting channel is connected with the storage box, and the fan is suitable for enabling the first end of the collecting channel to absorb the residual materials at the second discharge hole and convey the residual materials into the storage box through the second end of the collecting channel; the device comprises a machine frame, a blowing device, a discharging device, a collecting channel and a blowing device, wherein the blowing device is movably arranged in the machine frame, and the discharging device and the first end of the collecting channel extend into the machine frame.

7. The recovery method of the silicon carbide grown crystal remainder is characterized by comprising the following steps:

8. The method for recovering the crystal residue of silicon carbide growth according to claim 7, wherein the method comprises the steps of: in the step S100, the vibration amplitude direction of the sieving machine includes an up-down vibration amplitude and a left-right vibration amplitude, and the solid block includes at least one of a silicon carbide sphere, a silicon carbide crystal, and a silicon carbide crystal ball.

9. The method for recovering a remaining material of silicon carbide grown crystal as claimed in claim 7, further comprising the steps of:

10. The method for recovering remaining material of silicon carbide grown crystal in accordance with claim 7, wherein said step S400 comprises the steps of: