CN117704926A - Displacement calibration device and method for motion axis of multi-axis motion mechanism - Google Patents

Abstract

The invention discloses a displacement calibration device and a method for a motion axis of a multi-axis motion mechanism. According to the technical scheme, when the measuring shaft and the moving shaft to be calibrated are adjusted to a state to be measured, the moving shaft to be calibrated is rotated to drive the measuring end of the measuring shaft to move along a first direction, so that the first dial indicator measures the displacement of the moving shaft to be calibrated, whether the displacement of the moving shaft to be calibrated accords with an error requirement is determined according to the displacement value of the moving shaft to be calibrated, measured by the first dial indicator, and then displacement calibration is carried out on the moving shaft to be calibrated. The displacement calibration device for the motion axis of the multi-axis motion mechanism has simple structure, low cost and reduced volume, and is applicable to the displacement calibration of the motion axis of the small multi-axis motion mechanism.

Description

Displacement calibration device and method for motion axis of multi-axis motion mechanism

Technical Field

The invention relates to the technical field of multi-axis motion mechanism calibration, in particular to a displacement calibration device and method for a motion axis of a multi-axis motion mechanism.

Background

At present, the multi-axis motion mechanism is widely applied to production camping activities, and in order to ensure the displacement precision of the multi-axis motion mechanism in the motion process, the displacement precision of the motion axis of the multi-axis motion mechanism needs to be calibrated.

At present, when the displacement calibration is carried out on the motion axis of the multi-axis motion mechanism, a laser interferometer is often adopted, the precision of the laser interferometer is as high as nanometer or even picometer, wherein the laser interferometer is often composed of a laser emitting device, an interference device, a photoelectric detector, a laser reflecting device, a beam splitter and other components, when the displacement calibration is carried out on the motion axis of the multi-axis motion mechanism, the laser emitting device is fixedly installed, the laser reflecting device moves along with the motion axis, and then the displacement calibration of the motion axis is completed. However, although the laser interferometer can calibrate the displacement of the motion axis, its structure is complicated, resulting in high cost and large volume, and is not suitable for the calibration of the displacement of the motion axis of the small-sized multi-axis motion mechanism.

Accordingly, the prior art is still in need of improvement and development.

Disclosure of Invention

In view of the above-mentioned shortcomings of the prior art, the present invention aims to provide a device and a method for calibrating the displacement of the motion axis of a multi-axis motion mechanism, so as to solve the problems of the prior art that the laser interferometer has a complex structure, resulting in higher cost and large size, which is not suitable for the displacement calibration of the motion axis of a small multi-axis motion mechanism.

The invention provides a displacement calibration device of a motion axis of a multi-axis motion mechanism, which comprises: the device comprises a first dial indicator, a base, a first supporting piece for supporting the first dial indicator and a first positioning mechanism for supporting and positioning the first supporting piece;

The first dial indicator comprises a measuring shaft, and a measuring end for measuring the displacement of a movement shaft required to be calibrated of the multi-axis movement mechanism is arranged at the end part of the measuring shaft;

the first supporting piece is provided with a through hole penetrating through the first supporting piece, a measuring shaft of the first dial indicator is arranged in the through hole in a penetrating mode, and the measuring shaft and the through hole are coaxially arranged;

the first positioning mechanism is arranged on the base, and the first supporting piece is arranged on the first positioning mechanism;

when the measuring shaft and the moving shaft to be calibrated are adjusted to a state to be measured, the moving shaft to be calibrated is rotated to drive the measuring end on the measuring shaft to move along a first direction, so that a first dial indicator measures the displacement of the moving shaft to be calibrated;

the measuring device comprises a first dial indicator, a measuring end, a second dial indicator, a first direction and a second direction, wherein the measuring axis of the first dial indicator is parallel to a movement axis to be calibrated, the measuring end and the movement axis to be calibrated can synchronously move, and the first direction is parallel to the axial direction of the movement axis to be calibrated.

The invention further provides that the side face of the base is provided with a first reference surface which is used as a datum surface when the measuring axis of the first dial indicator is adjusted to be parallel to the movement axis to be calibrated.

The invention is further provided that the first reference surface is parallel to the measuring axis of the first dial indicator;

the first dial indicator is a telescopic dial indicator.

The present invention is further provided, wherein the first positioning mechanism includes: a second support and a fixing member for fixing the first support to the second support;

the second support is arranged on the base, and the first support is arranged on the second support.

The invention is further provided that the second support comprises: an L-shaped supporting table provided with a first installation position for installing the first supporting piece;

the fixing piece comprises an L-shaped positioning table, and the L-shaped positioning table is installed on the L-shaped supporting table and positions the first supporting piece to the first installation position.

The invention further provides that the first support is a circular sleeve;

the L-shaped supporting table is provided with a first side parallel to the first reference surface and a second side perpendicularly intersecting the first side;

the circular sleeve is tangential to the first side and the second side, respectively.

The invention further provides that flexible filler for positioning the circular sleeve is filled between the L-shaped positioning table and the circular sleeve.

The invention further provides that the flexible filler is rubber.

The invention further provides that the displacement calibration device of the motion axis of the multi-axis motion mechanism further comprises: the first positioning piece and the second positioning mechanism are used for supporting and positioning the first positioning piece;

the first positioning piece is arranged on the first dial indicator;

the second positioning mechanism is arranged on the base.

The invention also provides a method for applying the displacement calibration device of the motion axis of the multi-axis motion mechanism, which comprises the following steps:

adjusting a measuring shaft of the first dial indicator and a movement shaft to be calibrated to a state to be measured;

recording a first reading of the first dial indicator;

rotating a motion shaft to be calibrated to drive a measuring end of the measuring shaft to move along a first direction, recording a second reading of the first dial indicator after rotation is stopped, and determining a first difference value based on the first reading and the second reading, wherein the first difference value is a difference value between the second reading and the first reading;

acquiring the number of pulses sent by a control system of the multi-axis motion mechanism, and determining a first pulse equivalent based on a first difference value and the number of pulses;

acquiring a second pulse equivalent, and determining a pulse equivalent error based on the second pulse equivalent and the first pulse equivalent, wherein the pulse equivalent error is a difference value between the second pulse equivalent and the first pulse equivalent, and the second pulse equivalent is a pulse equivalent set in the control system of the multi-axis motion mechanism;

And determining whether the pulse equivalent error is within an allowable error range, and if not, setting the first pulse equivalent as the pulse equivalent of the multi-axis motion mechanism.

The invention further provides that a first point and a second point are arranged on the first reference surface, and the first point and the second point are two points which are respectively arranged on the horizontal direction of the first reference surface and are positioned at two ends of the first reference surface;

the step of adjusting the measuring axis of the first dial indicator and the movement axis to be calibrated to the state to be measured comprises the following steps:

obtaining the maximum distance variation measured from the first point to the second point, wherein the maximum distance variation is the maximum jump value in jump values measured from the first point to the second point in the vertical direction of the first reference plane;

based on the maximum distance variation, adjusting the measuring axis of the first dial indicator to be parallel to a movement axis to be calibrated;

and adjusting the movement axis to be calibrated to a state capable of driving the measuring end to synchronously move along the first direction when rotating.

The present invention further provides that the step of determining whether the pulse equivalent error is within an allowable error range, and if not, setting the first pulse equivalent to be the pulse equivalent of the multi-axis motion mechanism further includes:

Rotating a motion shaft to be calibrated to drive a measuring end of the measuring shaft to move along a second direction, and recording a third reading of the first dial indicator after rotation is stopped, wherein the second direction is opposite to the first direction;

acquiring a fourth reading, wherein the fourth reading is a displacement distance of a movement axis to be calibrated, which is displayed by the multi-axis movement mechanism;

and determining a displacement difference between the third reading and the second reading in the second direction, and determining a displacement error of a motion axis to be calibrated in the second direction based on the displacement difference in the second direction and the fourth reading, wherein the displacement error in the second direction is a difference between the fourth reading and the displacement difference.

The invention has the beneficial effects that:

the invention discloses a displacement calibration device and a method for a motion axis of a multi-axis motion mechanism, wherein the displacement calibration device for the motion axis of the multi-axis motion mechanism comprises the following components: the device comprises a first dial indicator, a base, a first supporting piece and a first positioning mechanism; the first dial indicator comprises a measuring shaft, and the end part of the measuring shaft is provided with a measuring end used for carrying out displacement measurement on the moving shaft by contacting with the moving shaft to be calibrated of the multi-shaft moving mechanism; the first supporting piece is provided with a hollow through hole, a measuring shaft of the first dial indicator is arranged in the through hole in a penetrating way, and the measuring shaft and the through hole are coaxially arranged; the first positioning mechanism is arranged on the base, the first supporting piece is arranged on the first positioning mechanism, and the first supporting piece is supported and positioned through the first positioning mechanism. According to the technical scheme, when the measuring shaft and the moving shaft to be calibrated are adjusted to a state to be measured, the moving shaft to be calibrated is rotated to drive the measuring end of the measuring shaft to move along a first direction, so that the first dial indicator measures the displacement of the moving shaft to be calibrated, whether the displacement of the moving shaft to be calibrated accords with an error requirement is determined according to the displacement value of the moving shaft to be calibrated, measured by the first dial indicator, and displacement calibration is performed on the moving shaft to be calibrated. The displacement calibration device for the motion axis of the multi-axis motion mechanism has simple structure, low cost and reduced volume, and is applicable to the displacement calibration of the motion axis of the small multi-axis motion mechanism.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained from the structures shown in these drawings without inventive effort for a person skilled in the art.

Fig. 1 is an exploded view of a displacement calibration device for a motion axis of a multi-axis motion mechanism according to the present invention.

Fig. 2 is an assembly view of a displacement calibration device for a motion axis of a multi-axis motion mechanism in the present invention.

FIG. 3 is a schematic view of the installation of the base and the second support member in an embodiment of the present invention.

Fig. 4 is a block diagram of a fastener in one embodiment of the invention.

Fig. 5 is a block diagram of a second positioning mechanism in one embodiment of the invention.

Fig. 6 is a flow chart of a method of calibrating displacement of a motion axis of a multi-axis motion mechanism according to the present invention.

FIG. 7 is a flow chart of adjusting the measuring axis of the first dial indicator to a state to be measured in accordance with one embodiment of the present invention.

Fig. 8 is an application diagram of the displacement calibration device for the motion axes of the multi-axis motion mechanism of the present invention to calibrate the three-axis motion mechanism.

Fig. 9 is a partial enlarged view of the first dial indicator when the measuring axis is adjusted to the state to be measured when the displacement calibration device of the movement axis of the multi-axis movement mechanism of the present invention calibrates the X axis.

Fig. 10 is a partial enlarged view of a measurement axis of a first dial indicator when a displacement calibration device for a motion axis of a multi-axis motion mechanism of the present invention calibrates a Y axis.

Fig. 11 is a partial enlarged view of a measurement axis of a first dial indicator when a displacement calibration device for a motion axis of a multi-axis motion mechanism of the present invention calibrates a Z axis.

The marks in the drawings are as follows: 1. a first dial gauge; 11. a measuring shaft; 111. a measuring end; 12. a housing; 2. a base; 21. a seventh threaded hole; 22. an eighth threaded hole; 23. a first reference surface; 24. an upper surface; 3. a first positioning mechanism; 31. a fixing member; 311. a first horizontal arm; 3111. a first threaded hole; 3112. the position of the inner angle; 312. a first vertical arm; 3121. a second threaded hole; 32. a second support; 321. a second vertical arm; 3211. a third threaded hole; 3212. a first mounting location; 3213. a first side; 322. a second horizontal arm; 3221. a fourth threaded hole; 3222. a second side; 33. a flexible filler; 4. a first support; 5. a first positioning member; 6. a second positioning mechanism; 61. a second mounting location; 62. a first extension arm; 621. a fifth threaded hole; 63. a second extension arm; 631. a sixth threaded hole; 7. a Y axis; 8. an X axis; 9. a Z axis; 91. lever dial gauge; 92. a slide block; 10. a platform.

Detailed Description

For a clearer understanding of technical features, objects and effects of the present invention, a detailed description of embodiments of the present invention will be made with reference to the accompanying drawings. In the following description, it should be understood that the directions or positional relationships indicated by "front", "rear", "upper", "lower", "left", "right", "longitudinal", "transverse", "vertical", "horizontal", "top", "bottom", "inner", "outer", "head", "tail", etc. are configured and operated in specific directions based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention, and do not indicate that the apparatus or element to be referred to must have specific directions, and thus should not be construed as limiting the present invention.

As shown in fig. 1 and fig. 2, the displacement calibration device for a motion axis of a multi-axis motion mechanism provided by the invention can comprise a first dial indicator 1, a base 2, a first supporting piece 4 and a first positioning mechanism 3; the first dial indicator 1 may include a measuring shaft 11, where a measuring end 111 is disposed at an end of the measuring shaft 11, and the measuring end 111 is used for measuring displacement of a movement axis rotation of the multi-axis movement mechanism to be calibrated; the first supporting piece 4 is provided with a through hole penetrating through the first supporting piece 4, the measuring shaft 11 of the first dial indicator 1 is arranged in the through hole in a penetrating way, and the measuring shaft 11 and the through hole are coaxially arranged; the first positioning mechanism 3 is provided on the base 2, and the first support 4 is mounted on the first positioning mechanism 3.

Here, when the hollow through hole of the first supporting member 4 is provided, it is necessary to determine the diameter according to the outer diameter of the measuring shaft 11 of the first dial indicator 1, that is, the aperture of the hollow through hole of the first supporting member 4 is slightly larger than the outer diameter of the measuring shaft 11 of the first dial indicator 1, so that the measuring shaft 11 of the first dial indicator 1 does not shake in the hollow through hole of the first supporting member 4 to affect the calibration accuracy.

In this embodiment, when the measuring shaft 11 and the moving shaft to be calibrated are adjusted to a state to be measured, the measuring end 111 on the measuring shaft 11 is driven to move along the first direction by rotating the moving shaft to be calibrated, so that the first dial indicator 1 measures the displacement of the moving shaft to be calibrated, and then, according to the displacement value of the moving shaft to be calibrated measured by the first dial indicator 1, it is determined whether the displacement of the moving shaft to be calibrated meets the error requirement, and further, displacement calibration is performed on the moving shaft to be calibrated. The displacement calibration device for the motion axis of the multi-axis motion mechanism has simple structure, low cost and reduced volume, and is applicable to the displacement calibration of the motion axis of the small multi-axis motion mechanism.

The to-be-measured state refers to that the measuring axis 11 of the first dial indicator 1 is parallel to the movement axis to be calibrated of the multi-axis movement mechanism, and the movement axis to be calibrated rotates to drive the measuring end 111 to move synchronously, namely: when the movement axis to be calibrated rotates, the measurement end 111 of the first dial indicator 1 moves synchronously with the rotation of the movement axis to be calibrated, for example, when the movement axis to be calibrated is the X axis, the measurement axis 11 of the first dial indicator 1 needs to be adjusted to be parallel to the X axis, and the X axis moves synchronously with the measurement end 111 of the first dial indicator 1; the first direction is a direction parallel to the axial direction of the movement axis to be calibrated, and for example, the first direction may be a direction in which rotation of the movement axis to be calibrated compresses the measurement end 111 of the first dial indicator 1 along the axial direction of the movement axis.

In some embodiments, the side of the base 2 is provided with a first reference surface 23, wherein the first reference surface 23 is used as a base surface when the measuring axis 11 of the first dial indicator 1 is adjusted to be parallel to the movement axis to be calibrated.

Specifically, the first reference surface 23 may be disposed at any position on the side of the base 2, and when the first reference surface 23 is disposed, the angular relationship between the first reference surface 23 and the measuring axis 11 may be determined by measurement, and after the angular relationship between the first reference surface 23 and the measuring axis 11 is determined, the measuring axis 11 of the first dial indicator 1 may be adjusted to be parallel to the movement axis to be calibrated by using the first reference surface 23 as a reference surface.

In this embodiment, the first reference surface 23 is used as a reference surface, and by adjusting the first reference surface 23, it is determined whether the measuring axis 11 of the first dial indicator 1 is parallel to the movement axis to be calibrated, and the setting of the first reference surface 23 provides a reference in the process of adjusting the parallelism of the measuring axis 11 of the first dial indicator 1 and the movement axis to be calibrated, so that the adjustment is convenient, and the working efficiency is improved.

In a specific embodiment, the first reference surface 23 may be parallel to the measuring axis 11 of the first dial indicator 1, and when the first reference surface 23 is parallel to the measuring axis 11 of the first dial indicator 1, the first reference surface 23 may be adjusted to be parallel to the movement axis of the multi-axis movement mechanism to be calibrated, and then the measuring axis 11 of the first dial indicator 1 is parallel to the movement axis to be calibrated. Of course, the first reference surface 23 may also be perpendicular to the measuring axis 11 of the first dial indicator 1, and when the first reference surface 23 is perpendicular to the measuring axis 11 of the first dial indicator 1, the first reference surface 23 may be adjusted to be perpendicular to the movement axis of the multi-axis movement mechanism to be calibrated, and then the measuring axis 11 of the first dial indicator 1 is parallel to the movement axis to be calibrated.

Further, the surface of the base 2 connected to the platform of the multi-axis motion mechanism to be calibrated may be perpendicular to the first reference surface 23, that is, when the displacement calibration device of the motion axis of the multi-axis motion mechanism is placed on the platform of the multi-axis motion mechanism, the surface connected to the platform of the multi-axis motion mechanism to be calibrated is perpendicular to the first reference surface 23, so that the displacement calibration device of the motion axis of the multi-axis motion mechanism is placed on the platform of the multi-axis motion mechanism to be calibrated, and the first reference surface 23 is in a perpendicular relationship with the platform of the multi-axis motion mechanism.

In some embodiments, as shown in fig. 2 and 3, the base 2 may be cubic, and the first dial indicator 1 is mounted on the upper surface 24 of the base 2. Wherein either side of the base 2 may be used as the first reference surface 23, for example, a side surface of the base 2 parallel to the measuring axis 11 of the first dial indicator 1 is used as the first reference surface 23; for another example, a side surface of the base 2 perpendicular to the measurement axis 11 of the first dial indicator 1 is used as the first reference surface 23. In one embodiment, a side of the base 2 parallel to the measuring axis 11 of the first dial indicator 1 is the first reference surface 23.

In this embodiment, since the base 2 is cubic, any surface adjacent to the first reference surface 23 on the base 2 is perpendicular to the first reference surface 23, so that when the displacement calibration device for the motion axis of the multi-axis motion mechanism is placed on the platform of the multi-axis motion mechanism to be calibrated, the first reference surface 23 is in a perpendicular relationship with the platform of the multi-axis motion mechanism.

Of course, the base 2 may have other structures, for example, the base 2 may have a polygonal structure, where when the base 2 has a polygonal structure, a surface parallel or perpendicular to the measuring axis 11 of the first dial indicator 1 on a side of the polygonal structure may be used as the first reference surface 23.

Further, the base 2 may be made of metal, for example, aluminum; for another example, stainless steel. In one embodiment, the base 2 is made of aluminum.

Under the same structure, the weight of the aluminum material is lighter than that of other metal materials such as stainless steel, so that when the base 2 is made of the aluminum material, the dead weight of the displacement calibration device of the motion shaft of the multi-shaft motion mechanism can be reduced, and the device is convenient to carry.

Obviously, to ensure a stable calibration operation, the base 2 should be effectively fixed at any position on the platform of the multi-axis motion mechanism, for example, when the base 2 is connected to the platform of the multi-axis motion mechanism, the displacement calibration device of the motion axis of the multi-axis motion mechanism may be fixed to any position on the platform of the multi-axis motion mechanism by the surface connected to the platform of the multi-axis motion mechanism, that is, the displacement calibration device of the motion axis of the multi-axis motion mechanism may be fixed to the platform of the multi-axis motion mechanism by the surface of the base 2 perpendicular to the first reference surface 23 and connected to the platform of the multi-axis motion mechanism. In this embodiment, when the base 2 is made of aluminum, fixing lugs made of iron may be disposed on the outer periphery of the base 2, and the base 2 may be fixed by magnetic attraction, or other fixing methods may be adopted.

In some embodiments, as shown in fig. 2, the first positioning mechanism 3 may include a second support 32 and a fixing member 31; the second support 32 is disposed on the base 2, the first support 4 is mounted on the second support 32, and the second support 32 is used for supporting the first support 4; the fixing member 31 is mounted on the second support member 32, and the fixing member 31 is used to fix the first support member 4 to the second support member 32.

Specifically, as shown in fig. 3, the second support 32 may include an L-shaped support table mounted on the base 2, the L-shaped support table being provided with a first mounting position 3212 for mounting the first support 4; the L-shaped support can be integrally formed with the base 2 when being arranged, and of course, the L-shaped support and the base 2 can also be in a split structure; when the L-shaped support table and the base 2 are in a split structure, the L-shaped support table can be fixedly arranged on the base 2 by means of gluing, welding and the like. Correspondingly, as shown in fig. 4, the fixing member 31 may include an L-shaped positioning table, which may be mounted on the L-shaped support table and position the first support member 4 to the first mounting position 3212.

In this embodiment, as shown in fig. 2 to 4, an L-shaped support stand and an L-shaped positioning stand are installed on the base 1 so as to be open, wherein the L-shaped support stand and the L-shaped positioning stand are detachably connected. Specifically, the L-shaped support platform is provided with a third threaded hole 3211 and a fourth threaded hole 3221, wherein the fourth threaded hole 3221 is provided on the second horizontal arm 322 of the L-shaped support platform, and the third threaded hole 3211 is provided on the second vertical arm 321 of the L-shaped support platform. Correspondingly, the L-shaped positioning table is provided with a first threaded hole 3111 correspondingly connected with the third threaded hole 3211 and a second threaded hole 3121 correspondingly connected with the fourth threaded hole 3221, wherein the first threaded hole 3111 is arranged on the first horizontal arm 311 of the L-shaped positioning table, and the first threaded hole 3111 penetrates through the first horizontal arm 311 of the L-shaped positioning table; the second threaded hole 3121 is disposed on the first vertical arm 312 of the L-shaped positioning table, and the second threaded hole 3121 penetrates through the first vertical arm 312 of the L-shaped positioning table, and when the connection is performed, a screw penetrates through the first threaded hole 3111 and then is connected with the third threaded hole 3211, and a screw penetrates through the second threaded hole 3121 and then is connected with the fourth threaded hole 3221, so that the L-shaped support table and the L-shaped positioning table can be detachably connected.

In this embodiment, the first supporting piece 4 is fixed on the first installation position 3212 of the L-shaped supporting table by the L-shaped positioning table, so as to fix and position the first dial indicator 1; in addition, the L-shaped supporting table is detachably connected with the L-shaped positioning table, so that the first dial indicator 1 is convenient to install.

In some embodiments, the first support 4 may be a circular sleeve; the L-shaped supporting table is provided with a first side 3213 parallel to the first reference surface 23 and a second side 3222 perpendicularly intersecting the first side 3213; the circular sleeve is tangential to the first side 3213 and the second side 3222, respectively. Wherein, when the circular sleeve is installed, the circular sleeve is tangent to the first side 3213 and the second side 3222 on the L-shaped supporting platform respectively.

In this embodiment, since the first side 3213 is parallel to the first reference surface 23, the installed circular sleeve is parallel to the first reference surface 23, and the through hole of the circular sleeve is coaxially disposed with the measuring shaft 11 of the first dial indicator 1, so that when the circular sleeve is tangential to the first side 3213, the measuring shaft 11 of the first dial indicator 1 is parallel to the first reference surface 23, and the first side 3213 is disposed to enable the first dial indicator 1 to be quickly adjusted to be parallel to the first reference surface 23 during the installation process.

Further, as shown in fig. 2 and 4, a flexible filler 33 is filled between the L-shaped positioning table and the circular sleeve, and the flexible filler 33 is used for positioning the circular sleeve. Specifically, the flexible filler 33 may be filled in the inner corner position 3112 of the L-shaped positioning table, and fine adjustment is performed on the position of the measuring shaft 11 of the first dial indicator 1 by adjusting the threads on the first threaded hole 3111 and/or the threads on the second threaded hole 3121, thereby squeezing the flexible filler 33.

In a specific embodiment, the flexible filler 33 may be, but is not limited to, rubber, for example, the flexible filler 33 may also be soft silica gel.

In some embodiments, the displacement calibration device of the motion axis of the multi-axis motion mechanism further comprises a first positioning member 5 and a second positioning mechanism 6; the first positioning piece 5 is arranged on the first dial indicator 1 and is used for positioning the first dial indicator 1; the second positioning mechanism 6 is arranged on the base 2 and is used for supporting and positioning the first positioning piece 5.

In particular, the first positioning member 5 may be disposed at an end of the first dial indicator 1 remote from the measuring shaft 11, wherein the first positioning member 5 may be, but is not limited to, a cylindrical shape.

In this embodiment, as shown in fig. 5, the second positioning mechanism 6 may be, but is not limited to, a square positioning block, where a second mounting position 61 for mounting the first positioning member 5 is provided at a middle position on the square positioning block, where the second mounting position 61 is in a groove shape. When the square positioning block is mounted, the square positioning block is detachably mounted on the upper surface 24 of the base 2, for example, the square positioning block can be detachably mounted on the upper surface 24 of the base 2 by means of screw connection, specifically, the groove on the square positioning block extends upwards to form a first extension arm 62 and a second extension arm 63, the first extension arm 62 is provided with a fifth threaded hole 621 penetrating through the square positioning block, and the second extension arm 63 is provided with a sixth threaded hole 631 penetrating through the square positioning block. Correspondingly, as shown in fig. 3, the base 2 is provided with a seventh threaded hole 21 correspondingly connected with the fifth threaded hole 621, and is also provided with an eighth threaded hole 22 correspondingly connected with the sixth threaded hole 631; the square positioning block is detachably connected with the base 2 through a screw passing through the fifth threaded hole 621 and then connected with the seventh threaded hole 21, and then through a screw passing through the sixth threaded hole 631 and then connected with the eighth threaded hole 22.

In the embodiment, the first positioning piece 5 and the second positioning mechanism 6 are matched for use, so that the quick positioning in the mounting process of the first dial indicator 1 can be realized, and the assembly time of the displacement calibration device of the motion axis of the multi-axis motion mechanism is reduced; in addition, through the cooperation of first setting element 5 and second positioning mechanism 6, still can further support the location to first amesdial 1 in the one end that keeps away from measuring shaft 11, stability improves.

Here, when the first positioning member 5 is installed, the thickness of the housing 12 of the first dial indicator 1 needs to be considered, that is, after the first positioning member 5 is used in cooperation with the second positioning mechanism 6 to support and position the first dial indicator 1, the housing 12 of the first dial indicator 1 is installed above the base 2 in a suspended state.

In this embodiment, the first dial indicator 1 is a telescopic dial indicator, which may be a digital display type telescopic dial indicator or a mechanical pointer type telescopic dial indicator; in addition, in the processing process of the base 2, the processing precision of the base 2 is less than or equal to 5 micrometers, so that the displacement calibration device of the motion axis of the multi-axis motion mechanism can be calibrated with high precision.

In some embodiments, as shown in fig. 6, the present invention further provides a method for calibrating displacement of a motion axis of a multi-axis motion mechanism, which includes the steps of:

s100, adjusting a measuring shaft of a first dial indicator and a movement shaft to be calibrated to a state to be measured;

s200, recording a first reading of a first dial indicator;

s300, rotating a motion shaft to be calibrated to drive a measuring end of the measuring shaft to move along a first direction, recording a second reading of a first dial indicator after rotation is stopped, and determining a first difference value based on the first reading and the second reading, wherein the first difference value is a difference value between the second reading and the first reading;

s400, acquiring the number of pulses sent by a control system of the multi-axis motion mechanism, and determining a first pulse equivalent based on a first difference value and the number of pulses;

s500, acquiring a second pulse equivalent, and determining a pulse equivalent error based on the second pulse equivalent and the first pulse equivalent, wherein the pulse equivalent error is a difference value between the second pulse equivalent and the first pulse equivalent, and the second pulse equivalent is a pulse equivalent set in a control system of the multi-axis motion mechanism;

s600, determining whether the pulse equivalent error is within an allowable error range, and if not, setting the first pulse equivalent as the pulse equivalent of the multi-axis motion mechanism.

In this embodiment, in order to ensure the calibration accuracy, it is possible to confirm that the motion axes of the multi-axis motion mechanism are perpendicular to each other before the motion axes are calibrated. After confirming that every two motion axes are mutually perpendicular, the displacement calibration device of the motion axes of the multi-axis motion mechanism is fixedly arranged on a platform of the multi-axis motion mechanism, and then the measuring axis of the first dial indicator and the motion axes to be calibrated are adjusted to be in a parallel state. After the measuring axis of the first dial indicator is parallel to the moving axis to be calibrated, the moving axis to be calibrated is required to be adjusted, and when the moving axis to be calibrated is adjusted to a state that the measuring end can be driven to synchronously move along the first direction during rotation, at the moment, the reading (first reading) on the first dial indicator is recorded, and the reading can be regarded as an initial reading; after the first reading is read, the measuring end of the measuring shaft is driven to move along the first direction by the movement shaft to be calibrated, after the rotation is stopped, a new reading (second reading) is generated by the first dial indicator, at the moment, the second reading is recorded, and a difference value (first difference value) between the second reading and the first reading is obtained. After the first difference is determined, the number of pulses sent by the control system (the number of pulses sent by the control system from starting to stopping rotating the multi-axis motion mechanism when the multi-axis motion mechanism is in the process of calibrating the displacement of the multi-axis motion mechanism in the first direction from the first reading to the second reading) can be obtained through the control system of the multi-axis motion mechanism, and then the first pulse equivalent (the first pulse equivalent is the first difference divided by the number of pulses) can be determined according to the number of pulses and the first difference. After the first pulse equivalent is determined, a pulse equivalent (second pulse equivalent) set in the control system of the multi-axis motion mechanism may be determined in the control system of the multi-axis motion mechanism, wherein the second pulse equivalent is the pulse equivalent set in the multi-axis motion mechanism. After the second pulse equivalent is determined, determining a difference value (pulse equivalent error) between the first pulse equivalent and the second pulse equivalent, and determining whether the pulse equivalent error is within an allowable error range, if not, indicating that the pulse equivalent (second pulse equivalent) set in a control system of the multi-axis motion mechanism is not satisfactory, that is, when the multi-axis motion mechanism moves in the first direction, the displacement accuracy is not satisfactory, and resetting the pulse equivalent to make the displacement accuracy of the multi-axis motion mechanism in the first direction satisfactory, that is, resetting the first pulse equivalent to be the pulse equivalent in the control system of the multi-axis motion mechanism; if the pulse equivalent error is within the allowable error range, it is indicated that the pulse equivalent (second pulse equivalent) set in the control system of the multi-axis motion mechanism meets the requirement, that is, the displacement accuracy meets the requirement when the multi-axis motion mechanism moves in the first direction, and the pulse equivalent does not need to be reset.

Therefore, when the measuring shaft and the moving shaft to be calibrated are adjusted to a state to be measured, the measuring end on the measuring shaft is driven to move along the first direction by rotating the moving shaft to be calibrated, so that the first dial indicator measures the displacement of the moving shaft to be calibrated, and then whether the displacement of the moving shaft to be calibrated accords with an error requirement or not is determined according to the displacement value of the moving shaft to be calibrated, measured by the first dial indicator, and displacement calibration is carried out on the moving shaft to be calibrated. The displacement calibration device for the motion axis of the multi-axis motion mechanism has simple structure, low cost and reduced volume, and is applicable to the displacement calibration of the motion axis of the small multi-axis motion mechanism.

In some embodiments, the first reference surface is provided with a first point and a second point, wherein the first point and the second point are two points which are respectively arranged in the horizontal direction of the first reference surface and are positioned at two ends of the first reference surface; as shown in fig. 7, the step of adjusting the measuring axis of the first dial indicator and the movement axis to be calibrated to the state to be measured includes the steps of:

s101, acquiring a maximum distance change amount from a first point to a second point, wherein the maximum distance change amount is the maximum jump value in jump values measured in the vertical direction of a first reference plane from the first point to the second point;

S102, based on the maximum distance variation, adjusting the measuring axis of the first dial indicator to be parallel to a movement axis to be calibrated;

s103, adjusting the movement axis to be calibrated to a state capable of driving the measuring end to synchronously move along the first direction when rotating.

In this embodiment, when the measuring axis of the first dial indicator and the movement axis to be calibrated are adjusted to the state to be measured, the adjustment can be performed by using the first reference plane as the reference plane. When the first point and the second point are defined, any two points can be taken as the first point and the second point at two ends of the first reference plane in the horizontal direction. After the definition of the first point and the second point, a sliding block is arranged on the movement axis, a second dial gauge is arranged on the sliding block, wherein the second dial gauge is a lever dial gauge, a contact of the lever dial gauge is contacted with the first point, after the contact, the reading (fifth reading) of the lever dial gauge is recorded, then the movement axis is moved to drive the lever dial gauge to move, and finally the lever dial gauge is moved to the second point, during the period, the jump value of the reading of the lever dial gauge on the basis of the fifth reading is continuously read, the maximum jump value in the read jump value is set as a sixth reading, namely the maximum distance change quantity, whether the measurement axis of the first dial gauge is parallel to the movement axis to be calibrated is determined through the maximum distance change quantity, when the maximum distance change quantity does not meet the requirement, the first reference plane is not parallel to the movement axis to be calibrated, the position of the measuring shaft is also required to be adjusted, during adjustment, the base of the displacement calibration device of the moving shaft of the multi-shaft movement mechanism can be horizontally rotated (namely, the displacement calibration device of the moving shaft of the multi-shaft movement mechanism is integrally horizontally rotated on a platform of the multi-shaft movement mechanism), so that the maximum distance variation is adjusted until the maximum distance variation meets the requirement (the sixth reading is in micrometer level or 0), at this time, the measuring shaft of the first dial indicator is parallel to the moving shaft required to be calibrated, after the measuring shaft of the first dial indicator is parallel to the moving shaft required to be calibrated, the displacement calibration device of the moving shaft of the multi-shaft movement mechanism can be immediately fixed on the platform of the multi-shaft movement mechanism required to be calibrated, and a specific fixing mode can be determined by a person skilled in the art according to actual conditions and is not repeated here. Furthermore, the movement axis to be calibrated is required to be adjusted, and when the movement axis to be calibrated is adjusted to a state of driving the measuring end to synchronously move along the first direction during rotation, the measuring axis of the first dial indicator and the movement axis to be calibrated are adjusted to a state to be measured.

As shown in fig. 9, the displacement calibration device for the motion axis of the multi-axis motion mechanism is a partial enlarged view when the measurement axis of the first dial indicator is adjusted to the state to be measured during the calibration of the X axis. The specific adjustment process is that firstly, the displacement calibration device of the motion axis of the multi-axis motion mechanism is placed on a platform, after the displacement calibration device is placed, a sliding table is installed on a Z axis, a lever dial indicator is installed on the sliding table, the position of the lever dial indicator is adjusted, a contact of the lever dial indicator is enabled to be in contact with a first reference surface of the displacement calibration device of the motion axis of the multi-axis motion mechanism, one point of contact can be regarded as a first point, and at the moment, reading on the lever dial indicator is recorded. After reading is completed, the X axis is moved, and the contact of the lever dial indicator is moved to another position on the first reference surface, wherein when the lever dial indicator is moved, the moving direction of the contact of the lever dial indicator is required to be parallel to the X axis, the position can be regarded as a second point, reading jump values on the lever dial indicator are continuously read during the period, the maximum jump value in the read jump values is the maximum distance change quantity, and whether the measuring shaft is in a state to be measured is judged through the maximum distance change quantity. When the measuring shaft is not in the state to be measured, the position state of the measuring shaft can be adjusted by rotating the base of the displacement calibration device of the moving shaft of the multi-axis movement mechanism (i.e., the displacement calibration device of the moving shaft of the multi-axis movement mechanism is integrally rotated horizontally on the platform of the multi-axis movement mechanism), when the base of the displacement calibration device of the moving shaft of the multi-axis movement mechanism is rotated, the rotation direction of the base of the displacement calibration device of the moving shaft of the multi-axis movement mechanism is related to the maximum distance variation, whether the base of the displacement calibration device of the moving shaft of the multi-axis movement mechanism needs to be rotated clockwise or counterclockwise is determined according to the maximum distance variation, and the maximum distance variation is combined when the base of the displacement calibration device of the moving shaft of the multi-axis movement mechanism is rotated by a person skilled in the art. After the whole displacement calibration device of the motion shaft of the multi-shaft motion mechanism horizontally rotates to a certain position by an angle, the maximum distance variation should be measured again until the measurement shaft is in a state to be measured, after the measurement shaft is adjusted to the state to be measured, the displacement calibration device of the motion shaft of the multi-shaft motion mechanism can be immediately fixed on a platform of the multi-shaft motion mechanism to be calibrated, after the displacement calibration device is fixed, the X shaft is further rotated, the X shaft is adjusted to be in the state to be measured, namely, when the X shaft is rotated, the X shaft can drive a measurement end of the measurement shaft to synchronously move.

In the process of adjusting the position state of the measuring shaft, after the contact of the lever dial gauge contacts the first reference surface, the angle between the measuring rod of the lever dial gauge and the first reference surface should be adjusted to about 10 degrees, and in addition, the first point and the second point are selected as any two points at two ends of the first reference surface.

As shown in fig. 10, the displacement calibration device for the motion axis of the multi-axis motion mechanism is a partial enlarged view when the measurement axis of the first dial indicator is adjusted to the state to be measured during the calibration of the Y axis, and similarly, before the calibration of the Y axis, the measurement axis still needs to be adjusted to the state to be measured, and the specific process is the same as the process of adjusting the measurement axis to the state to be measured during the calibration of the X axis.

As shown in fig. 11, the displacement calibration device for the motion axis of the multi-axis motion mechanism is a partial enlarged view when the measurement axis of the first dial indicator is adjusted to the state to be measured during the calibration of the Z axis, and similarly, before the calibration of the Z axis, the measurement axis still needs to be adjusted to the state to be measured, and the specific process is the same as the process of adjusting the measurement axis to the state to be measured during the calibration of the X axis.

In some embodiments, as shown in fig. 6, the step of determining whether the pulse error equivalent is within the allowable error range, and if not, setting the first pulse equivalent to the pulse equivalent of the multi-axis motion mechanism further includes the steps of:

s700, rotating a motion shaft to be calibrated to drive a measuring end of the measuring shaft to move along a second direction, and recording a third reading of the first dial indicator after rotation is stopped, wherein the second direction is opposite to the first direction;

s800, acquiring a fourth reading, wherein the fourth reading is a displacement distance of a movement axis to be calibrated, which is displayed by the multi-axis movement mechanism;

s900, determining a displacement difference value of the third reading and the second reading in the second direction, and determining a displacement error of the motion axis to be calibrated in the second direction based on the displacement difference value in the second direction and the fourth reading, wherein the displacement error in the second direction is a difference value between the fourth reading and the displacement difference value.

In this embodiment, after the displacement calibration of the movement axis is completed in the first direction, the movement axis to be calibrated may be rotated again to drive the measurement end of the measurement axis to move in the second direction, at this time, the second reading is taken as an initial reading, after the rotation is stopped, the reading (the third reading) of the first dial indicator is recorded, where the second direction is opposite to the direction of the first direction, for example, when the first direction is the direction in which the movement axis to be calibrated is rotated to drive the measurement end of the first dial indicator to axially compress, the second direction is the direction in which the movement axis to be calibrated is rotated to drive the measurement end of the first dial indicator to axially rebound, and in a specific embodiment, the first direction is the direction in which the movement axis to be calibrated is rotated to drive the measurement end of the first dial indicator to axially compress; and the second direction is that after the movement shaft to be calibrated is rotated, the movement shaft to be calibrated is rotated to drive the measuring end of the first dial indicator to rebound axially.

And after the third reading is recorded, acquiring a fourth reading, wherein the fourth reading is a displacement distance of a movement axis to be calibrated, which is displayed by the multi-axis movement mechanism (in the process of the displacement calibration of the multi-axis movement mechanism in the second direction, the number of pulses sent by a control system of the multi-axis movement mechanism from starting to stopping rotating the movement axis to be calibrated is multiplied by the pulse equivalent set in the control system of the multi-axis movement mechanism in the process of measuring the axis from the second reading to the third reading). In case the second reading and the third reading are known, a displacement difference between the third reading and the second reading (a difference between the third reading and the second reading) may be determined, and from the fourth reading and the displacement difference, a displacement error of the movement axis to be calibrated in the second direction, i.e. a return error (also referred to as backlash) of the movement axis to be calibrated in the second direction may be determined, wherein the displacement error (return error; also referred to as backlash) is a difference between the fourth reading and the displacement difference.

Here, after the return error of the motion axis to be calibrated in the second direction is known, the return error generated by the motion axis to be calibrated can be eliminated by adopting an error compensation mode, so that the displacement precision of the motion axis to be calibrated is further improved, and the multi-axis motion mechanism can obtain micron-scale precise motion control.

As shown in FIG. 8, the device and the method for calibrating the displacement of the motion axis of the multi-axis motion mechanism are particularly applied to a three-axis motion mechanism. Specifically, the three axes are adjusted to be in a state of being perpendicular to each other, and after the three axes are in a state of being perpendicular to each other, the X axis can be calibrated. Before calibrating the X-axis, the measuring axis of the displacement calibration device of the motion axis of the multi-axis motion mechanism needs to be adjusted to a state to be measured, and the specific adjustment process refers to the specific process of adjusting the measuring axis of the first dial indicator to the state to be measured when the displacement calibration device of the motion axis of the multi-axis motion mechanism calibrates the X-axis, which is not repeated herein. After the measuring shaft is in a state to be measured, the lever dial indicator is removed, the X-axis is rotated to enable the sliding table to be in contact with the measuring end of the measuring shaft, at the moment, the measuring shaft of the displacement calibration device of the moving shaft of the multi-axis movement mechanism and the X-axis of the three-axis movement mechanism are both in the state to be measured, and calibration of the X-axis can be started.

The specific process is that firstly, the reading (first reading) is recorded, after the first reading is recorded, the X-axis is rotated to drive the measuring end of the measuring axis to move along the first direction, and after the rotation is stopped, the reading (second reading) is recorded, at this time, the first difference (the difference between the second reading and the first reading) can be determined. After the first difference value is determined, the number of pulses sent by a control system of the triaxial movement mechanism is obtained, and according to the first difference value and the number of pulses, the first pulse equivalent can be determined. After the first pulse equivalent is determined, a pulse equivalent (second pulse equivalent) set in a control system of the triaxial movement mechanism is determined, and the first pulse equivalent and the second pulse equivalent are subtracted to determine a pulse equivalent error. After the pulse equivalent error is determined, determining whether the pulse equivalent error is within an allowable error range, if so, indicating that the pulse equivalent (second pulse equivalent) set in a control system of the triaxial movement mechanism meets the requirement, namely, when the X axis of the triaxial movement mechanism moves in the first direction, the displacement precision meets the requirement, and resetting the pulse equivalent is not needed; if not, it is indicated that the pulse equivalent (second pulse equivalent) set in the control system of the three-axis motion mechanism is not satisfactory, that is, the displacement accuracy is not satisfactory when the X-axis of the three-axis motion mechanism moves in the first direction, and the pulse equivalent needs to be reset so that the displacement accuracy of the three-axis motion mechanism in the first direction is satisfactory, that is, the first pulse equivalent is reset to the pulse equivalent in the control system of the three-axis motion mechanism.

After the displacement error in the first direction is calibrated, when the return error (also called back clearance) of the X axis of the triaxial movement mechanism is also required to be calibrated, the X axis is rotated again to drive the measuring end of the measuring axis to move along the second direction, and after the rotation is stopped, a reading (third reading number) is read, and at the moment, the second reading is the initial reading. After the third reading, a fourth reading is taken. Under the condition that the second reading and the third reading are known, the displacement distance of the movement axis to be calibrated, which is measured by the displacement calibration device of the movement axis of the multi-axis movement mechanism, moving in the second direction is determined according to the second reading and the third reading, and the displacement error of the X axis in the second direction (the difference between the fourth reading and the displacement distance) can be determined according to the fourth reading and the displacement distance, namely, the return error (also called back clearance) of the movement axis to be calibrated in the second direction.

After calibrating the X axis, if the Y axis is required to be calibrated, the position of the displacement calibration device of the motion axis of the multi-axis motion mechanism needs to be readjusted first, and the measurement axis and the Y axis of the first dial indicator of the displacement calibration device of the motion axis of the multi-axis motion mechanism are adjusted to be in a state to be measured. The calibration procedure for the Y-axis is the same as the calibration procedure for the X-axis described above, except that the motion axes of the actions in the calibration procedure are different, and will not be described again.

Likewise, if the Z axis is to be calibrated, the process is the same as the process when calibrating the Y axis, except that the motion axes of the motion in the calibration process are different, and will not be described again.

The above is merely an example of application of the device and method for calibrating the movement axis of the multi-axis movement mechanism to a tri-axis movement mechanism.

Furthermore, the position calibration device and method of the motion axis of the multi-axis motion mechanism can calibrate the multi-axis motion mechanism of other ball screw transmission structure, the linear module (single-axis motion mechanism) with synchronous transmission of the belt, the two-axis or three-axis (XYZ) motion mechanism formed by the single-axis motion mechanism, the CoreXY type and Delta type parallel motion mechanism, the line driving motion mechanism, the rope driving motion mechanism, the multi-degree-of-freedom mechanical arm, the SCARA mechanical arm and other motion mechanisms, and the calibration is possibly different in that when the measurement axis of the first dial gauge of the position calibration device of the motion axis of the multi-axis motion mechanism is adjusted to the state to be measured, the adjustment mode may be different, a person skilled in the art can determine the specific process of adjusting the measurement axis to the state to be measured according to the specific calibrated motion mechanism, after the measurement axis of the first dial gauge of the displacement calibration device of the motion axis of the multi-axis motion mechanism is adjusted to the state to be measured, the calibration process of the motion axis to be calibrated can refer to the calibration of the motion axis (X axis, Y axis and Z axis) of the three-axis motion mechanism, and the calibration process is not repeated here.

Here, it is to be noted that the above description of the embodiment of the displacement calibration method of the movement axis of the multi-axis movement mechanism is similar to the description of the embodiment of the displacement calibration device of the movement axis of the multi-axis movement mechanism, with similar advantageous effects as the displacement calibration device of the movement axis of the multi-axis movement mechanism described above. For technical details not disclosed in the displacement calibration method of the motion axes of the multi-axis motion mechanism in the embodiments, please refer to the description of the embodiment of the displacement calibration device of the motion axes of the multi-axis motion mechanism in the invention.

In summary, the invention provides a displacement calibration device and method for a motion axis of a multi-axis motion mechanism, which has the following beneficial effects:

when the measuring shaft and the moving shaft to be calibrated are adjusted to a state to be measured, the moving shaft to be calibrated is rotated to drive the measuring end of the measuring shaft to move along a first direction, so that the first dial indicator measures the displacement of the moving shaft to be calibrated, and then whether the displacement of the moving shaft to be calibrated accords with an error requirement is determined according to the displacement value of the moving shaft to be calibrated, measured by the first dial indicator, and displacement calibration is carried out on the moving shaft to be calibrated. The displacement calibration device for the motion axis of the multi-axis motion mechanism has simple structure, low cost and reduced volume, and is applicable to the displacement calibration of the motion axis of the small multi-axis motion mechanism.

It is to be understood that the above examples only represent preferred embodiments of the present invention, which are described in more detail and are not to be construed as limiting the scope of the invention; it should be noted that, for a person skilled in the art, the above technical features can be freely combined, and several variations and modifications can be made without departing from the scope of the invention; therefore, all changes and modifications that come within the meaning and range of equivalency of the claims are to be embraced within their scope.

Claims (12)

1. A displacement calibration device for a motion axis of a multi-axis motion mechanism, comprising: the device comprises a first dial indicator, a base, a first supporting piece for supporting the first dial indicator and a first positioning mechanism for supporting and positioning the first supporting piece;

the first dial indicator comprises a measuring shaft, and a measuring end used for measuring the displacement of the rotation of a movement shaft required to be calibrated of the multi-shaft movement mechanism is arranged at the end part of the measuring shaft;

the first supporting piece is provided with a through hole penetrating through the first supporting piece, a measuring shaft of the first dial indicator is arranged in the through hole in a penetrating mode, and the measuring shaft and the through hole are coaxially arranged;

The first positioning mechanism is arranged on the base, and the first supporting piece is arranged on the first positioning mechanism;

when the measuring shaft and the moving shaft to be calibrated are adjusted to a state to be measured, the moving shaft to be calibrated is rotated to drive the measuring end on the measuring shaft to move along a first direction, so that a first dial indicator measures the displacement of the moving shaft to be calibrated;

the measuring end is driven to synchronously move by rotating the measuring shaft of the first dial indicator in the state to be measured, wherein the measuring shaft is parallel to the moving shaft to be calibrated, and the measuring end is driven to synchronously move by rotating the moving shaft to be calibrated, and the first direction is parallel to the axial direction of the moving shaft to be calibrated.

2. The displacement calibration device for a motion axis of a multi-axis motion mechanism according to claim 1, wherein a side surface of the base is provided with a first reference surface for use as a reference surface when adjusting the measurement axis of the first dial gauge to be parallel to the motion axis to be calibrated.

3. The displacement calibration device of the motion axis of the multi-axis motion mechanism according to claim 2, wherein the first reference surface is parallel to the measurement axis of the first dial gauge;

The first dial indicator is a telescopic dial indicator.

4. A displacement calibration device for a motion axis of a multi-axis motion mechanism according to claim 2 or 3, wherein the first positioning mechanism comprises: a second support and a fixing member for fixing the first support to the second support;

the second support is arranged on the base, and the first support is arranged on the second support.

5. The displacement calibration device for a motion axis of a multi-axis motion mechanism as recited in claim 4, wherein the second support comprises: an L-shaped supporting table which is arranged on the base and is provided with a first installation position for installing the first supporting piece;

the fixing piece comprises an L-shaped positioning table, and the L-shaped positioning table is installed on the L-shaped supporting table and positions the first supporting piece to the first installation position.

6. The displacement calibration device of a motion axis of a multi-axis motion mechanism of claim 5, wherein the first support is a circular sleeve;

the L-shaped supporting table is provided with a first side parallel to the first reference surface and a second side perpendicularly intersecting the first side;

The circular sleeve is tangential to the first side and the second side, respectively.

7. The displacement calibration device of a motion axis of a multi-axis motion mechanism according to claim 6, wherein a flexible filler for positioning the circular sleeve is filled between the L-shaped positioning table and the circular sleeve.

8. The displacement calibration device for a motion axis of a multi-axis motion mechanism as recited in claim 7, wherein the flexible filler is rubber.

9. The displacement calibration device for a motion axis of a multi-axis motion mechanism according to claim 1, further comprising: the first positioning piece and the second positioning mechanism are used for supporting and positioning the first positioning piece;

the first positioning piece is arranged on the first dial indicator;

the second positioning mechanism is arranged on the base.

10. A method of using the displacement calibration device of the motion axis of the multi-axis motion mechanism according to any one of claims 1 to 9, comprising:

adjusting a measuring shaft of the first dial indicator and a movement shaft to be calibrated to a state to be measured;

recording a first reading of the first dial indicator;

Rotating a motion shaft to be calibrated to drive a measuring end of the measuring shaft to move along a first direction, recording a second reading of the first dial indicator after rotation is stopped, and determining a first difference value based on the first reading and the second reading, wherein the first difference value is a difference value between the second reading and the first reading;

acquiring the number of pulses sent by a control system of the multi-axis motion mechanism, and determining a first pulse equivalent based on a first difference value and the number of pulses;

acquiring a second pulse equivalent, and determining a pulse equivalent error based on the second pulse equivalent and the first pulse equivalent, wherein the pulse equivalent error is a difference value between the second pulse equivalent and the first pulse equivalent, and the second pulse equivalent is a pulse equivalent set in the control system of the multi-axis motion mechanism;

and determining whether the pulse equivalent error is within an allowable error range, and if not, setting the first pulse equivalent as the pulse equivalent of the multi-axis motion mechanism.

11. The method for calibrating displacement of a motion axis of a multi-axis motion mechanism according to claim 10, wherein a first point and a second point are arranged on a first reference surface, and the first point and the second point are two points which are respectively arranged on the horizontal direction of the first reference surface and are positioned at two ends of the first reference surface;

The step of adjusting the measuring axis of the first dial indicator and the movement axis to be calibrated to the state to be measured comprises the following steps:

obtaining the maximum distance variation measured from the first point to the second point, wherein the maximum distance variation is the maximum jump value in jump values measured from the first point to the second point in the vertical direction of the first reference plane;

based on the maximum distance variation, adjusting the measuring axis of the first dial indicator to be parallel to a movement axis to be calibrated;

and adjusting the movement axis to be calibrated to a state capable of driving the measuring end to synchronously move along the first direction when rotating.

12. The method of calibrating displacement of a motion axis of a multi-axis motion mechanism according to claim 10, wherein the step of determining whether the pulse equivalent error is within an allowable error range, and if not, setting the first pulse equivalent to the pulse equivalent of the multi-axis motion mechanism further comprises:

rotating a motion shaft to be calibrated to drive a measuring end of the measuring shaft to move along a second direction, and recording a third reading of the first dial indicator after rotation is stopped, wherein the second direction is opposite to the first direction;

Acquiring a fourth reading, wherein the fourth reading is a displacement distance of a movement axis to be calibrated, which is displayed by the multi-axis movement mechanism;

and determining a displacement difference between the third reading and the second reading in the second direction, and determining a displacement error of a motion axis to be calibrated in the second direction based on the displacement difference in the second direction and the fourth reading, wherein the displacement error in the second direction is a difference between the fourth reading and the displacement difference.