CN117700215A - Alumina ceramic substrate and preparation method and application thereof - Google Patents

Alumina ceramic substrate and preparation method and application thereof Download PDF

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Publication number
CN117700215A
CN117700215A CN202311729216.7A CN202311729216A CN117700215A CN 117700215 A CN117700215 A CN 117700215A CN 202311729216 A CN202311729216 A CN 202311729216A CN 117700215 A CN117700215 A CN 117700215A
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ceramic substrate
alumina
alumina ceramic
mass
ball milling
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王权龙
王云
许建洋
陈文英
朱明敏
罗贤科
童培云
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Leading Film Materials Jiangsu Co ltd
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Vital Thin Film Materials Guangdong Co Ltd
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Abstract

The disclosure provides an alumina ceramic substrate, a preparation method and application thereof, and belongs to the technical field of ceramic circuit substrates. The preparation method of the alumina ceramic substrate comprises the following steps: mixing the grinding material and the grinding solvent, performing first ball milling, mixing the obtained first mixed solution with the binder, performing second ball milling, adding the obtained second mixed solution with the defoaming agent, and performing defoaming treatment and ageing treatment to obtain slurry; wherein the grinding material is alumina powder and a dispersing agent, and the dispersing agent is polyvinyl acetate and sodium silicate; casting the obtained slurry on a casting machine to form an alumina green body, and then preparing an alumina ceramic green body; and sintering the obtained alumina ceramic green sheet to obtain the alumina ceramic substrate. The preparation method of the alumina ceramic substrate can obviously improve the toughness and strength of alumina blanks.

Description

Alumina ceramic substrate and preparation method and application thereof
Technical Field
The disclosure relates to the technical field of ceramic circuit substrates, in particular to an alumina ceramic substrate, a preparation method and application thereof.
Background
The alumina electronic ceramic substrate has high mechanical strength, is suitable for high pressure, high temperature, wear resistance, strong corrosion and other performances, and is widely applied to the requirements of various occasions such as mechanical, chemical, medical and industrial electronic products. The preparation method of the alumina electronic ceramic substrate mainly comprises the methods of dry press molding, extrusion molding, gel casting molding, slip casting, isostatic compaction and the like.
At present, the alumina green bodies with the thickness of 200-500 mu m prepared by the industrial method have certain defects that the strength and the toughness are difficult to control and the adjustment is inconvenient; the prepared embryo has lower intensity and poor compactness and uniformity.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides an alumina ceramic substrate, and a preparation method and application thereof.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows: the preparation method of the alumina ceramic substrate comprises the following steps:
preparing slurry: mixing the grinding material and the grinding solvent, performing first ball milling, mixing the obtained first mixed solution with the binder, performing second ball milling, adding the obtained second mixed solution with the defoaming agent, and performing defoaming treatment and ageing treatment to obtain slurry; wherein the grinding material is alumina powder and a dispersing agent, and the dispersing agent is polyvinyl acetate and sodium silicate;
casting the obtained slurry on a casting machine to form an alumina green body, and then preparing an alumina ceramic green body;
and sintering the obtained alumina ceramic green sheet to obtain the alumina ceramic substrate.
In the process of preparing the slurry, firstly, alumina powder, a dispersing agent and a grinding solvent are subjected to first ball milling, and the specific dispersing agent can effectively and uniformly disperse particles or powder in liquid so as to form stable suspension or emulsion, can increase the surface activity of the particles or powder, and can effectively prevent the particles or powder from precipitating or aggregating in the liquid, so that the alumina powder is uniformly in the slurry, the fluidity of the slurry is improved, the powder and colloid can be better combined in the forming process, and the strength and toughness of alumina blanks are improved; in addition, the dispersing agent can promote the film formation of the surface of the blank body and improve the smoothness of the surface of the blank body, so that the strength and toughness of the alumina ceramic blank body are further improved. On one hand, the defoaming agent is easy to spread on the surface of the solution, automatically spreads on the surface of the foam, and takes away a layer of solution adjacent to the surface, so that the liquid film is locally thinned, the critical thickness is achieved, the liquid film is broken, the foam is destroyed, the generation of bubbles in the slurry can be inhibited, and the bubbles in the slurry are greatly reduced in the forming process, so that the density of the green embryo is improved; on the other hand, the defoaming agent can also improve the viscosity of the slurry in the preparation process, and the two aspects act together to improve the strength and toughness of the alumina ceramic green body under the condition that no sintering aid is required to be added.
In one embodiment, the dispersant is 0.1 to 0.9% by mass of the alumina powder; for example, the resin may be 0.1%, 0.2%, 0.3%, 0.4%, 0.5%, 0.6%, 0.7%, 0.8%, 0.9%, but is not limited to the values listed, and other resins within the range are also applicable; preferably 0.4 to 0.8%.
In the present disclosure, the addition amount of the dispersant affects the dispersibility of the alumina powder and the compatibility of the alumina powder with other components, and if the addition amount of the dispersant is too small, the alumina powder cannot be uniformly dispersed in the slurry, resulting in a decrease in toughness and strength of the alumina green body; if the addition amount of the dispersing agent is too high, the defoaming agent in the defoaming process cannot be effectively defoamed, so that the porosity of the alumina green body is increased, and the toughness and strength of the alumina green body are reduced; when the mass of the dispersing agent is 0.4-0.8% of the mass of the alumina powder, the strength and toughness of the obtained alumina ceramic green body are high.
In one embodiment, the polyvinyl acetate has a viscosity of 5000 mPas to 7000 mPas; for example, 5000 mPas, 5500 mPas, 6000 mPas, 6500 mPas, 7000 mPas may be mentioned, but the present invention is not limited to the values listed, and other resins within the above range are also applicable;
the viscosity of the sodium silicate is 6000 to 8000 mPas, for example, 5000 mPas, 5500 mPas, 6000 mPas, 6500 mPas, 7000 mPas, 7500 mPas, 8000 mPas, but not limited to the values listed, and other resins within the above range are also applicable.
In one embodiment, the polyvinyl acetate has a pH of 4 to 5 and the sodium silicate has a pH of 11 to 13;
specifically, the viscosity and the pH value of the first mixed solution are adjusted by polyvinyl acetate and sodium silicate, and when the viscosity and the pH value of the polyvinyl acetate and the sodium silicate are in the above ranges, the alumina green body with better strength and toughness can be obtained.
In one embodiment, the mass ratio of polyvinyl acetate to sodium silicate is (1-3) to 1; for example, the ratio may be 1:1, 1.5:1, 2:1, 2.5:1, or 3:1, but the ratio is not limited to the values listed, and other resins within this range are also suitable. In the present disclosure, when the mass ratio of polyvinyl acetate to sodium silicate is (1-3) to 1, alumina green bodies having higher strength and toughness can be obtained.
In one embodiment, the mass of the binder is 20-35% of the mass of the alumina powder; and/or, the mass of the defoaming agent is 0.01-0.1% of the mass of the alumina powder.
In one embodiment, the binder is at least one of polyacrylate and polyurethane; the defoamer is polyether modified polysiloxane.
In one embodiment, the first ball milling conditions are as follows:
the mass ratio of the abrasive to the grinding balls is as follows: 1 to 1-2;
and/or the diameter of the grinding ball is 5-20mm; further, the grinding balls consist of grinding balls with the diameters of 10mm, 15mm and 20mm, the mass ratio of the grinding balls with the diameters of 10mm, 15mm and 20mm is 1:1:1, and the grinding balls with different diameters are selected for ball milling, so that the dispersibility of the alumina powder can be further improved; reducing the generation of agglomerated particles in the slurry and improving the fluidity of the slurry.
And/or the mass of the grinding solvent is 40-50% of the grinding material;
and/or the grinding balls are zirconia balls;
and/or the rotation speed of the ball milling is 150-300rpm;
and/or ball milling for 9-12h;
and/or the volumes of the grinding solvent, the grinding material and the grinding balls are 50-70% of the volume of the ball milling tank.
In one embodiment, the milling solvent is at least one of ethanol, propanol, isopropanol, ethylene glycol, n-butanol, isobutanol, t-butanol, and toluene.
In one embodiment, the conditions for the second ball milling are as follows: the ball milling time is 14-16h; the rotation speed of the ball mill is 200-400rpm.
In one embodiment, the conditions of the defoaming treatment are as follows: the defoaming time is 30min-2h, and the defoaming pressure is less than-0.09 Mpa.
In one embodiment, the conditions of the aging treatment are as follows: the ageing time is 2-6h, and the ageing time is 2-6h.
In one embodiment, the casting conditions are as follows: the temperature of the casting molding is 40-80 ℃, the speed of the casting molding is 0.2-0.5M/min, the height of the scraper is 550-750 mu M, and the precision of the filter is 0.5-5 mu M.
In one embodiment, the green body has a thickness of 200 μm to 500 μm; further preferably, the thickness of the green body is 300 μm to 400. Mu.m.
In the sintering of the preparation method of the alumina ceramic substrate, the temperature rising rate is 0.2-1 ℃/min. When the temperature rising rate is less than 0.2 ℃/min, the temperature rising rate is too slow, and a mixed phase is easy to generate; when the temperature rising rate is more than 1 ℃/min, the temperature rising rate is too high, crystal grains are not burned, the size difference of the crystal grains is large, and the uniformity is poor. Further preferably, in the sintering of the alumina ceramic substrate preparation method, the temperature rising rate is 0.4-0.7 ℃/min.
Specifically, in the sintering of the preparation method of the alumina ceramic substrate, the sintering temperature is 1400-1600 ℃. When the sintering temperature is less than 1400 ℃, the sintering temperature is too low, more broken crystals in the ceramic are generated, the strength is low, and the compactness is poor; when the sintering temperature is higher than 1600 ℃, the sintering temperature is too high, local overburning exists, and abnormal large grains are easy to generate, so that the compactness and the strength are poor.
Specifically, in the sintering of the preparation method of the alumina ceramic substrate, the heat preservation time at the sintering temperature is 4-7h. The heat preservation time is too short, which can lead to insufficient sintering; the heat preservation time is too long, and the burning is easy. Therefore, a holding time of 4 to 7 hours is a suitable range.
Preferably, in the sintering of the preparation method of the alumina ceramic substrate, the cooling rate is 0.2-1.5 ℃/min. When the cooling rate is more than 1.5 ℃/min, the cooling rate is too fast, and ceramic breakage is caused by uneven sintering; when the cooling rate is less than 0.2 ℃/min, the cooling rate is too slow, the energy consumption is high, and the cost is high. Further preferably, in the sintering of the preparation method of the alumina ceramic substrate, the cooling rate is 0.4-0.5 ℃/min.
In another aspect, an alumina ceramic substrate is provided, which is prepared by the preparation method of the alumina ceramic substrate.
In one aspect, the use of the alumina ceramic substrate in thin film integrated circuits is provided.
Specifically, the ceramic substrate is applied to preparing MOSFET, IGBT, transistor, chip, electronic heater or high-frequency switch power supply.
Compared with the prior art, the invention has the beneficial effects that:
1. the alumina ceramic provided by the disclosure is basic, has higher strength and toughness, simple preparation process, easy operation and control and very wide application prospect.
2. The method selects specific dispersing agent and defoaming agent, controls the addition amount of the dispersing agent and the defoaming agent, and improves the compactness, uniformity, strength and toughness of the alumina green body through a tape casting method.
Drawings
FIG. 1 is a scanning electron microscope image of the plane of the alumina green body obtained in example 1;
FIG. 2 is a scanning electron microscope image of a cross section of an alumina green body;
FIG. 3 is a scanning electron microscope image of the alumina green ceramic substrate obtained in example 1;
FIG. 4 is a scanning electron microscope image of a cross section of an alumina ceramic substrate.
Detailed Description
The present invention will be further described with reference to specific examples and comparative examples for better illustrating the objects, technical solutions and advantages of the present invention, and the object of the present invention is to be understood in detail, not to limit the present invention. All other embodiments, which can be made by those skilled in the art without the inventive effort, are intended to be within the scope of the present invention. The experimental reagents and instruments involved in the practice of the present invention are common reagents and instruments unless otherwise specified.
Example 1
The embodiment provides a preparation method of an alumina ceramic substrate, which comprises the following steps:
(1) Ball milling: sequentially adding 1.75kg of toluene, 1.4kg of absolute ethyl alcohol, 0.004kg of polyvinyl acetate, 0.004kg of sodium silicate and 7kg of alumina powder into a 15L ball milling tank, and adding 6kg of zirconia balls, wherein the zirconia balls consist of zirconia balls with diameters of 10mm, 15mm and 20mm according to the mass ratio of 1:1:1, ball milling is carried out for 12 hours at the rotating speed of 250rpm, 2.45kg of acrylic polyester is added into the obtained first mixed solution, and ball milling is carried out for 16 hours at the rotating speed of 400rpm, so as to obtain a second mixed solution;
(2) Defoaming and ageing: adding a second mixed solution and 0.0008kg of polyether modified polysiloxane into a 20L defoaming reaction kettle, defoaming for 1h under the conditions that the rotating speed of a stirring paddle is 20Hz and the pressure of vacuum degree is-0.09 Mpa, turning off a vacuum pump, and ageing for 4h under the conditions that the rotating speed of the stirring paddle is 5Hz and the temperature is 22 ℃ to obtain slurry;
(3) Casting: after the ageing treatment is finished, discharging negative pressure, adding positive pressure to 0.08Mpa in the defoaming reaction kettle, adding the slurry into a casting machine hopper for discharging, and filtering impurities by adopting a filter with the precision of 0.5 mu m and 1 mu m; then, a three-section drying mode with the temperature of 40 ℃, 50 ℃ and 60 ℃ is adopted in a drying channel of the casting machine, the casting film belt is started to adjust the speed to 0.3M/Min for casting, and the height of a scraper is adjusted to 600 to flow out alumina blanks with the uniform thickness of 230 mu M;
(4) And (3) forming: cutting the green embryo to obtain a flaky green embryo with the width of 160mm, and drying the flaky green embryo in a flat mode at 120 ℃ for 5 hours; then cooling, putting the obtained product into a die, and punching a blank sheet with the size of 140 mm;
(5) Sintering: stacking the blank sheets on a ceramic refractory burning plate in 8 layers, then placing the blank sheets into a firing-discharging integrated furnace, heating to 1500 ℃ at a heating rate of 0.62 ℃/min, preserving heat for 5 hours, cooling to 600 ℃ at a cooling rate of 0.4 ℃/min after the heat preservation is finished, and naturally cooling to room temperature to obtain the alumina ceramic substrate.
Example 2
The embodiment provides a preparation method of an alumina ceramic substrate, which comprises the following steps:
(1) Ball milling: sequentially adding 1.75kg of toluene, 1.4kg of absolute ethyl alcohol, 0.004kg of polyvinyl acetate, 0.004kg of sodium silicate and 7kg of alumina powder into a 15L ball milling tank, and adding 6kg of zirconia balls, wherein the zirconia balls consist of zirconia balls with diameters of 10mm, 15mm and 20mm according to the mass ratio of 1:1:1, ball milling is carried out for 9 hours at the rotating speed of 300rpm, 1.4kg of acrylic polyester is added into the obtained first mixed solution, and ball milling is carried out for 14 hours at the rotating speed of 200rpm, so as to obtain a second mixed solution;
(2) Defoaming and ageing: adding a second mixed solution and 0.007kg of polyether modified polysiloxane into a 20L defoaming reaction kettle, defoaming for 2 hours under the conditions that the rotation speed of a stirring paddle is 20Hz and the pressure of vacuum degree is-0.09 Mpa, turning off a vacuum pump, and ageing for 2 hours under the conditions that the rotation speed of the stirring paddle is 5Hz and the temperature is 26 ℃ to obtain slurry;
(3) Casting: after the ageing treatment is finished, discharging negative pressure, adding positive pressure to 0.08Mpa in the defoaming reaction kettle, adding the slurry into a casting machine hopper for discharging, and filtering impurities by adopting a filter with the precision of 0.5 mu m and 1 mu m; then, a three-section drying mode with the temperature of 40 ℃, 50 ℃ and 60 ℃ is adopted in a drying channel of the casting machine, the casting film belt is started to adjust the speed to 0.5M/Min for casting, and the height of a scraper is adjusted to 600 to flow out alumina blanks with the uniform thickness of 500 mu M;
(4) And (3) forming: cutting the green embryo to obtain a flaky green embryo with the width of 160mm, and drying the flaky green embryo in a flat mode at 120 ℃ for 5 hours; then cooling, putting the obtained product into a die, and punching a blank sheet with the size of 140 mm;
(5) Sintering: stacking the green sheets on a ceramic refractory firing plate in 4 layers, then placing the green sheets into a firing-discharging integrated furnace, heating to 1600 ℃ at a heating rate of 0.62 ℃/min, preserving heat for 4 hours, cooling to 600 ℃ at a cooling rate of 0.4 ℃/min after the heat preservation is finished, and naturally cooling to room temperature to obtain the alumina ceramic substrate.
Example 3
The present embodiment provides a method for manufacturing an alumina ceramic substrate, which differs from the alumina ceramic substrate in embodiment 1 only in that: in the step (1), the mass of polyvinyl acetate was 0.007kg, the mass of sodium silicate was 0.007kg, and the other components were the same as in the step of example 1.
Example 4
The present embodiment provides a method for manufacturing an alumina ceramic substrate, which differs from the alumina ceramic substrate in embodiment 1 only in that: the mass of polyvinyl acetate in step (1) was 0.014kg, the mass of sodium silicate was 0.014kg, and the other components were the same as in example 1.
Example 5
The present embodiment provides a method for manufacturing an alumina ceramic substrate, which differs from the alumina ceramic substrate in embodiment 1 only in that: in the step (1), the mass of polyvinyl acetate was 0.00035kg, the mass of sodium silicate was 0.00035kg, and the other components were the same as in the step of example 1.
Example 6
The present embodiment provides a method for manufacturing an alumina ceramic substrate, which differs from the alumina ceramic substrate in embodiment 1 only in that: in the step (1), the mass of polyvinyl acetate was 0.006kg, the mass of sodium silicate was 0.002kg, and the other components were the same as in the step of example 1.
Example 7
The present embodiment provides a method for manufacturing an alumina ceramic substrate, which differs from the alumina ceramic substrate in embodiment 1 only in that: the mass of polyvinyl acetate in the step (1) was 0.0064kg, the mass of sodium silicate was 0.0016kg, and the other components were the same as in the step 1.
Comparative example 1
This comparative example provides a method for producing an alumina ceramic substrate, which differs from the alumina ceramic substrate of example 1 only in that: step (1) in this comparative example, unlike step (1), is as follows: 1.75kg of toluene, 1.4kg of absolute ethyl alcohol, 0.008kg of polyvinyl acetate and 7kg of alumina powder are sequentially added into a 15L ball milling tank, 6kg of zirconia balls are added, the zirconia balls consist of zirconia balls with diameters of 10mm, 15mm and 20mm according to the mass ratio of 1:1:1, ball milling is carried out for 9 hours at the rotating speed of 300rpm, 1.4kg of acrylic polyester is added into the obtained first mixed solution, ball milling is carried out for 14 hours at the rotating speed of 200rpm, and a second mixed solution is obtained, and other steps are the same as in example 1.
Comparative example 2
This comparative example provides a method for producing an alumina ceramic substrate, which differs from the alumina ceramic substrate of example 1 only in that: step (1) in this comparative example, unlike step (1), is as follows: 1.75kg of toluene, 1.4kg of absolute ethyl alcohol, 0.008kg of sodium silicate and 7kg of alumina powder are sequentially added into a 15L ball milling tank, 6kg of zirconia balls are added, the zirconia balls consist of zirconia balls with the diameters of 10mm, 15mm and 20mm according to the mass ratio of 1:1:1, ball milling is carried out for 9 hours at the rotating speed of 300rpm, 1.4kg of acrylic polyester is added into the obtained first mixed solution, ball milling is carried out for 14 hours at the rotating speed of 200rpm, and a second mixed solution is obtained, and other steps are the same as in example 1.
Comparative example 3
This comparative example provides a method for producing an alumina ceramic substrate, which differs from the alumina ceramic substrate of example 1 only in that: step (1) in this comparative example, unlike step (1), is as follows: 1.75kg of toluene, 1.4kg of absolute ethyl alcohol and 7kg of alumina powder are sequentially added into a 15L ball milling tank, 6kg of zirconia balls are added, the zirconia balls consist of zirconia balls with diameters of 10mm, 15mm and 20mm according to the mass ratio of 1:1:1, ball milling is carried out for 9 hours at the rotating speed of 300rpm, 1.4kg of acrylic polyester is added into the obtained first mixed solution, ball milling is carried out for 14 hours at the rotating speed of 200rpm, and a second mixed solution is obtained, and other steps are the same as in example 1.
Comparative example 4
This comparative example provides a method for producing an alumina ceramic substrate, which differs from the alumina ceramic substrate of example 1 only in that: step (2) was different from step (2) in this comparative example, and the polyether-modified polysiloxane was not added, and the other steps were the same as in example 1.
Performance testing
The slurries obtained in examples 1 to 7 and comparative examples 1 to 4 were tested for viscosity, density, flatness, flexural strength, compressive strength and microstructure of the green and alumina ceramic substrates.
The test method is as follows:
viscosity: a rotational viscometer method;
density: a drainage method;
flatness: dry-scale measurement;
flexural strength: GB/T6569-2006 four-point bending method;
compressive strength: GB/T4740-1999 ceramic material compressive strength test method;
microstructure: scanning electron microscope.
The test results are shown in tables 1-2 and FIGS. 1-4.
TABLE 1 viscosity of the slurries and results of performance testing of the green bodies
TABLE 2 Performance test results of alumina ceramic substrates
Density g/cm 3 Flexural Strength/MPa Compressive Strength/MPa
Example 1 3.94 550 2900
Example 2 3.82 440 2300
Example 3 3.90 470 2550
Example 4 3.88 460 2400
Example 5 3.81 430 2250
Example 6 3.92 500 2700
Example 7 3.90 480 2500
Comparative example 1 3.78 390 2100
Comparative example 2 3.76 400 2010
Comparative example 3 3.72 300 1500
Comparative example 4 3.73 315 1400
As can be seen from the data of tables 1 and 2, the alumina green bodies and alumina ceramic substrates prepared by the present disclosure have high density, high strength and high toughness.
As can be seen from comparative examples 1 and examples 2 to 5, when the mass of the dispersant is 0.01 to 0.4% of the mass of the alumina powder, the obtained alumina green body and alumina ceramic substrate have better comprehensive properties, and when the mass of the dispersant is 0.1 to 0.2% of the mass of the alumina powder, the obtained alumina green body and alumina ceramic substrate have better comprehensive properties.
As can be seen from comparative example 1 and examples 6 to 7, when the mass ratio of polyvinyl acetate to sodium silicate is (1 to 3): 1, the obtained alumina green body and the alumina ceramic substrate have better comprehensive performance.
Comparative example 1 and comparative examples 1-3 demonstrate that the combination of the properties of the alumina green and alumina ceramic substrates can be significantly improved by the interaction of polyvinyl acetate and sodium silicate in the present disclosure.
As is clear from comparative examples 1 and 4, when the defoaming agent was not used in the defoaming process, the overall properties of the resulting alumina green body and alumina ceramic substrate were significantly lowered.
FIG. 1 is a scanning electron microscope image of the plane of the alumina green body obtained in example 1, and FIG. 2 is a scanning electron microscope image of a cross section of the alumina green body; FIG. 3 is a scanning electron microscope image of the alumina green ceramic substrate obtained in example 1, and FIG. 4 is a scanning electron microscope image of a cross section of the alumina ceramic substrate; as can be seen from fig. 1 and 3, the planes of the alumina green body and the alumina ceramic substrate are smooth and flat; as can be seen from fig. 2, the bonding density between alumina powders in the alumina green body is high; as can be seen from fig. 4, the alumina ceramic substrate has no pores and high density.
Finally, it should be noted that the above-mentioned embodiments illustrate rather than limit the scope of the invention, and that those skilled in the art will understand that the technical scheme of the invention may be modified or equally substituted without departing from the spirit and scope of the technical scheme of the invention.

Claims (10)

1. The preparation method of the alumina ceramic substrate is characterized by comprising the following steps of:
mixing the grinding material and the grinding solvent, performing first ball milling, mixing the obtained first mixed solution with the binder, performing second ball milling, adding the obtained second mixed solution with the defoaming agent, and performing defoaming treatment and ageing treatment to obtain slurry; wherein the grinding material is alumina powder and a dispersing agent, and the dispersing agent is polyvinyl acetate and sodium silicate;
casting the obtained slurry on a casting machine to form a green body, and then preparing an alumina ceramic green sheet;
and sintering the obtained alumina ceramic green sheet to obtain the alumina ceramic substrate.
2. The preparation method according to claim 1, wherein the dispersant has a mass of 0.01 to 0.4% of the mass of the alumina powder; preferably, the mass of the dispersing agent is 0.1-0.2% of the mass of the alumina powder.
3. The alumina ceramic substrate of claim 1, wherein the polyvinyl acetate has a viscosity of 5000 mPa-s to 7000 mPa-s; and/or the viscosity of the sodium silicate is 6000-8000 mPa.s.
4. The alumina ceramic substrate of claim 1, wherein the mass ratio of polyvinyl acetate to sodium silicate is (1-3) to 1.
5. The alumina ceramic substrate of claim 1, wherein the mass of the binder is 20-35% of the mass of the alumina powder; and/or, the mass of the defoaming agent is 0.01-0.1% of the mass of the alumina powder.
6. The preparation method according to claim 1, wherein the binder is at least one of polyacrylate and polyurethane; the defoamer is polyether modified polysiloxane.
7. The method of claim 1, wherein the first ball milling is performed under the following conditions:
the mass ratio of the abrasive to the grinding balls is as follows: 1:1-1:2;
and/or the diameter of the grinding ball is 5-20mm;
and/or the mass of the grinding solvent is 40-50% of the grinding material;
and/or the grinding balls are zirconia balls;
and/or the rotation speed of the ball milling is 150-300rpm;
and/or ball milling for 9-12h.
8. The method of claim 1, wherein the second ball milling is performed under the following conditions: the ball milling time is 14-16h; the rotation speed of ball milling is 200-400rpm;
and/or, the conditions of the defoaming treatment are as follows: the defoaming time is 30min-2h, and the defoaming pressure is less than-0.09 Mpa;
and j or, the conditions of the aging treatment are as follows: the ageing time is 2-6h, and the ageing time is 2-6h;
and/or the casting molding conditions are as follows: the temperature of the casting molding is 40-80 ℃, the speed of the casting molding is 0.2-0.5M/min, the height of the scraper is 550-750 mu M, and the precision of the filter is 0.5-5 mu M;
and/or the sintering conditions are as follows: the sintering temperature is 1400-1600 ℃ and the sintering time is 4-7h.
9. An alumina ceramic substrate produced by the method for producing an alumina ceramic substrate according to any one of claims 1 to 8.
10. Use of the alumina ceramic substrate according to claim 9 in a thin film integrated circuit.
CN202311729216.7A 2023-12-15 2023-12-15 Alumina ceramic substrate and preparation method and application thereof Pending CN117700215A (en)

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