CN117685726A

CN117685726A - Temperature control system

Info

Publication number: CN117685726A
Application number: CN202410008796.9A
Authority: CN
Inventors: 张伟明; 曹位尚
Original assignee: Shanghai Shengjian Semiconductor Technology Co ltd
Current assignee: Shanghai Shengjian Semiconductor Technology Co ltd
Priority date: 2024-01-02
Filing date: 2024-01-02
Publication date: 2024-03-12

Abstract

The invention provides a temperature control system, and relates to the field of semiconductor temperature control. The temperature control system comprises a high temperature box for storing high temperature refrigerating fluid, a low temperature box for storing low temperature refrigerating fluid and at least two temperature regulating boxes. Wherein, at least two temperature regulating boxes are communicated in turn, and the liquid outlet of the upstream temperature regulating box of any two adjacent temperature regulating boxes is communicated with the liquid inlet of the downstream temperature regulating box, the liquid outlet of the high temperature box is communicated with the liquid inlet of the most upstream temperature regulating box, and the liquid outlet of the low temperature box is communicated with the liquid inlets of all the temperature regulating boxes. Based on this, the temperature control system that this application provided on the one hand realizes the maximize utilization with the high temperature refrigerating fluid in the high temperature case as the heat source, on the other hand through the upstream and downstream regulation between the temperature regulating box, progressively reduces in order to realize quick cooling. In addition, the temperature control system also ensures that the temperature regulating box can meet the load use by ensuring the fluctuation range of the temperature on the basis of ensuring rapid temperature reduction.

Description

Temperature control system

Technical Field

The invention relates to the field of semiconductor temperature control, in particular to a temperature control system.

Background

Currently, in semiconductor manufacturing processes, a temperature control device is generally used to provide a temperature-stabilized coolant to a first load end. Typically, different processes are performed requiring different temperatures of the chilled liquid. When temperature switching is performed by a temperature control system in the market, the temperature in the water tank is often raised or lowered to a target temperature as a whole.

However, since a large amount of coolant is stored in the water tank, when the coolant in the water tank is heated or cooled as a whole, the processing time is too long, which seriously affects the processing cycle of the semiconductor and reduces the processing efficiency of the semiconductor.

Disclosure of Invention

The invention aims to provide a temperature control system, which can ensure that a temperature regulating box can meet load use on the basis of ensuring rapid temperature reduction.

Embodiments of the invention may be implemented as follows:

in a first aspect, the present invention provides a temperature control system comprising a high temperature tank for storing a high temperature chilled liquid, a low temperature tank for storing a low temperature chilled liquid, and at least two temperature regulating tanks;

at least two temperature regulating boxes are sequentially communicated, the liquid outlet of the upstream temperature regulating box of any two adjacent temperature regulating boxes is communicated with the liquid inlet of the downstream temperature regulating box, the liquid outlet of the high-temperature box is communicated with the liquid inlet of the most upstream temperature regulating box, and the liquid outlet of the low-temperature box is communicated with the liquid inlets of all the temperature regulating boxes.

Based on the setting, the temperature control system provided by the application realizes the maximum utilization of the high-temperature refrigerating fluid in the high-temperature box as a heat source on one hand, and on the other hand, the temperature control system gradually decreases to realize rapid cooling through upstream and downstream regulation among the temperature regulating boxes.

In an alternative embodiment, the temperature control system further comprises a return channel, and the return channel is communicated with the liquid outlet of the upstream temperature regulating box and the liquid inlet of the downstream temperature regulating box of any two adjacent temperature regulating boxes.

Based on the above arrangement, the reflux channel is communicated with the upstream temperature regulating box and the downstream temperature regulating box so as to realize the connection between the temperature regulating boxes and ensure that the temperature of the mixed solution in the temperature regulating boxes changes in a step shape.

In an alternative embodiment, the temperature control system further comprises a first load, the backflow channel comprises a first channel and a second channel, the first channel is communicated with the liquid outlet of the upstream temperature regulating box and the first load, and the second channel is communicated with the first load and the liquid inlet of the downstream temperature regulating box.

Based on the above arrangement, the first load is arranged between the upstream temperature regulating tank and the downstream temperature regulating tank, so that the refrigerating fluid flows through the first load and then enters downstream temperature regulation. Therefore, the solution in the temperature regulating box can not only rapidly meet the load use, but also rapidly participate in the temperature regulation of the solution in the downstream temperature regulating box.

In an alternative embodiment, the temperature control system further comprises a three-way regulating valve and a first circulating channel, the three-way regulating valve comprises an inlet, a first outlet and a second outlet, the three-way regulating valve is arranged on the second channel, the inlet is communicated with the first load, the first outlet is communicated with a liquid inlet of a downstream temperature regulating box, the second outlet is communicated with the first circulating channel, and the other end of the first circulating channel is communicated with a liquid inlet of the high-temperature box.

Based on the setting, the setting of the three-way regulating valve realizes the supplement of the refrigerating fluid in the high-temperature box while guaranteeing the supply of the high-temperature refrigerating fluid for the next-stage temperature regulating box.

In an alternative embodiment, the temperature control system further comprises a first pump arranged on the first channel and located between the upstream temperature regulating tank and the first load.

Based on the above arrangement, the first pump can pump the mixed solution of the first channel into the second channel by pressurizing, thereby flowing to the load.

In an alternative embodiment, the temperature control system further comprises a first heater and a first temperature sensor, wherein the first heater and the first temperature sensor are both arranged on the first channel, and the first heater and the first temperature sensor are sequentially arranged between the upstream temperature regulating box and the first load.

Based on the above arrangement, when the refrigerating fluid flows through the first heater, the first heater performs temperature adjustment treatment on the refrigerating fluid, so that when the refrigerating fluid flows through the first temperature sensor after that, the temperature value of the refrigerating fluid detected by the first temperature sensor is consistent with a preset value.

In an alternative embodiment, the temperature control system further comprises a first adjusting pipeline and a first proportional adjusting valve, the first adjusting pipeline is communicated with the liquid outlet of the high-temperature box and the liquid inlet of the temperature adjusting box at the most upstream, and the first proportional adjusting valve is arranged on the first adjusting pipeline.

Based on the above setting, the first proportional control valve is used for controlling the on-off of the first adjusting pipeline, ensuring that the high-temperature box is suitable for the high-temperature refrigerating fluid supplied by the temperature adjusting box, and being convenient for adjusting to the required temperature when being mixed with the low-temperature refrigerating fluid.

In an alternative embodiment, the temperature control system further comprises a second adjusting pipeline and a second proportional adjusting valve, the second adjusting pipeline is communicated with the liquid outlets of the low-temperature boxes and the liquid inlets of all the temperature adjusting boxes, and the second proportional adjusting valve is arranged on the second adjusting pipeline.

Based on the above-mentioned setting, on the one hand, in order to make things convenient for the connection setting between temperature control system structure, on the other hand, also be convenient for set up the second proportional control valve in order to regulate and control the cryogenic refrigerating fluid that gets into the temperature regulating box.

In an alternative embodiment, the temperature control system further comprises a second circulation channel, wherein the second circulation channel is communicated with the liquid outlet of the temperature regulating box at the most downstream position and the liquid inlet of the low-temperature box.

Based on the above arrangement, the temperature-adjusting tank with the lowest temperature of the mixed solution is returned to the low-temperature tank, and the low-temperature tank is supplemented with the refrigerating fluid.

In an alternative embodiment, the temperature control system further comprises a first plate heat exchanger and a second plate heat exchanger, the first plate heat exchanger comprising a first flow path and a second flow path, and the first flow path is in convection with the second flow path, the second plate heat exchanger comprising a third flow path and a fourth flow path, and the third flow path is in convection with the fourth flow path;

the first flow path is communicated with the second circulation channel and the low-temperature box, the second flow path stores refrigerant, the second flow path is communicated with the third flow path, and the fourth flow path is used for being communicated with the process cooling water system.

Based on the arrangement, the first plate heat exchanger exchanges heat, the first flow path exchanges heat between the refrigerating fluid returning from the second circulation channel and the refrigerant in the second flow path, and the refrigerating fluid enters the low-temperature box for storage and use after being cooled, so that the fluctuation of the low-temperature refrigerating fluid in the low-temperature box in a normal range is ensured.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a temperature control system according to an embodiment of the present invention.

Icon: 10-a temperature control system; 100-a high temperature box; 200-a low temperature box; 300-a temperature regulating box; 400-return channel; 410-a first channel; 411-first pump; 412-a first heater; 413-a first temperature sensor; 420-a second channel; 421-three-way regulating valve; 510-a first circulation channel; 520-a second circulation path; 521-a second water pump; 522-a second heater; 523-a second temperature sensor; 530-a first conditioning duct; 531-first proportional control valve; 540-a second conditioning duct; 541-a second proportional control valve; 610-a first plate heat exchanger; 611-a first flow path; 613-a second flow path; 630-second plate heat exchanger; 631-a third flow path; 633 to fourth flow paths; 710—a first connection channel; 711-compressor; 730-a second connection channel; 731-an expansion valve; 911-a first load; 913-second load.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present invention, it should be noted that, if the terms "upper", "lower", "inner", "outer", and the like indicate an azimuth or a positional relationship based on the azimuth or the positional relationship shown in the drawings, or the azimuth or the positional relationship in which the inventive product is conventionally put in use, it is merely for convenience of describing the present invention and simplifying the description, and it is not indicated or implied that the apparatus or element referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus it should not be construed as limiting the present invention.

Furthermore, the terms "first," "second," and the like, if any, are used merely for distinguishing between descriptions and not for indicating or implying a relative importance.

It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.

Fig. 1 is a schematic structural diagram of a temperature control system 10 according to an embodiment of the present invention, please refer to fig. 1. The present application provides a temperature control system 10 comprising a hot box 100 for storing a hot freezing fluid, a cold box 200 for storing a cold freezing fluid, and at least two temperature regulating boxes 300.

Wherein, at least two temperature adjusting boxes 300 are sequentially communicated, and the liquid outlet of the upstream temperature adjusting box 300 in any two adjacent temperature adjusting boxes 300 is communicated with the liquid inlet of the downstream temperature adjusting box 300, the liquid outlet of the high temperature box 100 is communicated with the liquid inlet of the most upstream temperature adjusting box 300, and the liquid outlet of the low temperature box 200 is communicated with the liquid inlets of all the temperature adjusting boxes 300.

It will be appreciated that the high temperature chilled liquid provided by the high temperature tank 100 and the low temperature chilled liquid provided by the low temperature tank 200 are mixed between the most upstream tempering tanks 300 such that the solution temperature in the tempering tanks 300 is the highest temperature in all tempering tanks 300. Thereafter, the refrigerating fluid in the most upstream tempering tank 300 is mixed with the low temperature refrigerating fluid in the low temperature tank 200 in the tempering tank 300 downstream thereof, so that the solution temperature in the downstream tempering tank 300 is the second highest temperature in all tempering tanks 300. The temperature-adjusting box 300 in the subsequent steps is so far that the mixed solution in the upstream temperature-adjusting box 300 is mixed with the low-temperature freezing solution in the low-temperature box 200, so that the newly mixed solution in the downstream temperature-adjusting box 300 is next to the upstream temperature.

Based on the above arrangement, not only is there a temperature difference between the mixed solutions in any two adjacent temperature regulating boxes 300, but also the temperature of the mixed solutions in all the temperature regulating boxes 300 is decreased stepwise. And, the high temperature tank 100 is only communicated with the most upstream temperature tank 300 to form the temperature tank 300 with the highest mixed solution temperature, and in the subsequent temperature regulation process, the upstream temperature tank 300 is used as a new high temperature tank 100 to be mixed with the low temperature tank 200 to regulate the temperature of the downstream temperature tank 300.

Therefore, the temperature control system 10 provided in the present application uses the high-temperature freezing liquid in the high-temperature box 100 as the heat source to realize the maximum utilization, and gradually decreases to realize the rapid cooling through the upstream and downstream adjustment between the temperature adjusting boxes 300. In addition, the temperature control system 10 also enables the temperature control box 300 to ensure the fluctuation range of the temperature to meet the load use on the basis of ensuring rapid temperature reduction. In addition, since the temperature control system 10 provided in the present application has a plurality of temperature adjusting boxes 300 with different temperatures, it can realize that one load is used alone or a plurality of loads are used simultaneously, and the present embodiment is not limited thereto.

As an alternative embodiment, to facilitate controlling the high temperature freezing solution, the temperature control system 10 further includes a first adjusting pipe 530 and a first proportional adjusting valve 531, where the first adjusting pipe 530 communicates with the liquid outlet of the high temperature tank 100 and the liquid inlet of the most upstream temperature adjusting tank 300, and the first proportional adjusting valve 531 is disposed on the first adjusting pipe 530.

It should be noted that, by providing the first adjusting pipe 530, the distance between the high temperature box 100 and the temperature adjusting box 300 is set reasonably, so as to facilitate the structural arrangement of the temperature control system 10; by setting the first proportional control valve 531 to control the on-off of the first control pipeline 530, it is ensured that the high-temperature box 100 is suitable for the high-temperature freezing liquid supplied by the temperature-adjusting box 300, and the high-temperature freezing liquid can be conveniently adjusted to the required temperature when being mixed with the low-temperature freezing liquid.

Further, in order to facilitate the regulation of the cryogenic liquid, the temperature control system 10 further includes a second regulating pipe 540 and a second proportional regulating valve 541, where the second regulating pipe 540 communicates with the liquid outlet of the cryogenic tank 200 and the liquid inlets of all the temperature regulating tanks 300, and the second proportional regulating valve 541 is disposed on the second regulating pipe 540.

It will be appreciated that second conditioning duct 540 functions similarly to first conditioning duct 530, in that, on the one hand, it facilitates the connection between the structures of temperature control system 10 and, on the other hand, it also facilitates the provision of second proportional control valve 541 to regulate the flow of cryogenic liquid into incubator 300. Further, it should be emphasized that a second adjusting pipe 540 is provided between the low temperature tank 200 and any one of the temperature adjusting tanks 300, and a second proportional adjusting valve 541 is provided on any one of the second adjusting pipes 540.

Based on the above arrangement, when the mixed solution in the most upstream temperature adjustment tank 300 is adjusted, double adjustment of the input of the high-temperature freezing liquid and the low-temperature freezing liquid is achieved to ensure that the acquisition temperature is the highest freezing liquid temperature required for the load. On the basis, the mixed refrigerating fluid with gradually reduced temperature can be conveniently adjusted.

In order to facilitate connection between the temperature control boxes 300, the temperature control system 10 further includes a return flow channel 400, and the return flow channel 400 communicates a liquid outlet of an upstream temperature control box 300 and a liquid inlet of a downstream temperature control box 300 in any two adjacent temperature control boxes 300. It should be noted that, the backflow channel 400 communicates the upstream temperature-adjusting tank 300 with the downstream temperature-adjusting tank 300 to ensure that the temperature of the mixed solution in the temperature-adjusting tank 300 changes stepwise. Furthermore, it is emphasized that when the temperature of the mixed solution in the tempering tank 300 is at the lowest temperature, it only has a return channel 400 communicating with the upstream tempering tank 300, and there is no return channel 400 communicating with the downstream tempering tank 300.

Further, the temperature control system 10 further includes a first load 911, and the return channel 400 includes a first channel 410 and a second channel 420, where the first channel 410 communicates with the liquid outlet of the upstream temperature adjusting tank 300 and the first load 911, and the second channel 420 communicates with the first load 911 and the liquid inlet of the downstream temperature adjusting tank 300.

With the above arrangement, the first load 911 is disposed between the upstream tempering tank 300 and the downstream tempering tank 300, so that the refrigerating fluid flows through the first load 911 and then enters the downstream tempering. Based on this, it is ensured that the solution in the temperature regulating tank 300 can not only rapidly meet the load usage, but also rapidly participate in the temperature regulation of the solution in the downstream temperature regulating tank 300. It will be appreciated that the desired temperature of the first load 911 is the temperature of the chilled liquid provided by the upstream tempering tank 300.

To facilitate the flow of the mixed solution in the temperature control tank 300 to the load, the implementation temperature control system 10 further includes a first pump 411, the first pump 411 being disposed on the first channel 410 and located between the upstream temperature control tank 300 and the first load 911. The first pump 411 is capable of pumping the mixed solution of the first channel 410 into the second channel 420 by pressurizing, thereby flowing to the load.

Further, in order to determine that the temperature of the mixed solution flowing to the load is the temperature required by the load, the temperature control system 10 further includes a first heater 412 and a first temperature sensor 413, wherein the first heater 412 and the first temperature sensor 413 are disposed on the first channel 410, and the first heater 412 and the first temperature sensor 413 are sequentially disposed between the upstream temperature adjusting tank 300 and the first load 911.

Based on the above-described arrangement, when the freezing liquid flows through the first heater 412, the first heater 412 performs the temperature adjustment process on the freezing liquid so that the freezing liquid temperature value detected by the first temperature sensor 413 coincides with the preset value when the freezing liquid flows through the first temperature sensor 413 after that. The preset value is a desired temperature value of the first load 911 flowing therethrough.

Considering that when the refrigerating fluid is circulated, the temperature control system 10 further includes a three-way regulating valve 421 and a first circulation channel 510, the three-way regulating valve 421 includes an inlet, a first outlet and a second outlet, the three-way regulating valve 421 is disposed on the second channel 420, the inlet is communicated with the first load 911, the first outlet is communicated with the liquid inlet of the downstream temperature regulating tank 300, the second outlet is communicated with the first circulation channel 510, and the other end of the first circulation channel 510 is communicated with the liquid inlet of the high temperature tank 100. Referring to fig. 1 again, the inlet of the three-way regulating valve 421 is the c-port, the first outlet is the b-port, and the second outlet is the a-port.

After the frozen liquid flowing out from the first load 911 enters the inlet of the three-way regulating valve 421, a part of the frozen liquid is returned to the liquid inlet of the next-stage temperature regulating box 300 through the first outlet, and participates in the temperature regulation of the next-stage temperature regulating box 300; part of the refrigerating fluid is returned to the first circulation channel 510 through the second outlet, and returned to the liquid inlet of the high-temperature box 100 through the first circulation channel 510. In addition, the three-way regulating valve 421 can adaptively regulate the ratio of the refrigerant fluid in the two-way return water paths. Preferably, the three-way regulating valve 421 is an electric regulating valve, so as to realize automatic regulation and control. Based on this, the provision of the three-way regulating valve 421 realizes replenishment of the refrigerating fluid in the high-temperature tank 100 while ensuring supply of the high-temperature refrigerating fluid to the next-stage tempering tank 300.

In addition, a heating element is disposed in the high temperature tank 100, and the heating element can perform heating treatment on the refrigerant liquid in the high temperature tank 100 to maintain the temperature of the refrigerant liquid in the high temperature tank 100, so as to prevent the refrigerant liquid flowing back to the high temperature tank 100 from the first circulation channel 510 from excessively large temperature difference with the refrigerant liquid stored in the high temperature tank 100, and after mixing, the temperature of the refrigerant liquid in the high temperature tank 100 is affected, and the temperature adjustment in the subsequent links is affected.

In order to further realize the recycling of the refrigerating fluid in the temperature control system 10 provided in the present application, the temperature control system 10 further includes a second circulation channel 520, where the second circulation channel 520 communicates the liquid outlet of the temperature-adjusting box 300 with the lowest temperature of the mixed solution with the liquid inlet of the downstream-most low temperature box 200. Based on this, the temperature-adjusting tank 300, in which the mixed solution is at the lowest temperature, returns water to the low-temperature tank 200, and the low-temperature tank 200 is replenished with the refrigerant liquid.

It should be noted that, the temperature control system 10 further includes a second load 913, a second water pump 521, a second temperature sensor 523, and a second heater 522 disposed on the second circulation path 520. The second water pump 521, the second heater 522, the second temperature sensor 523, and the second load 913 are disposed in this order between the temperature control tank 300 and the low temperature tank 200, in which the mixed solution is the most downstream, so that the refrigerant liquid flows through the second load 913 having the lowest temperature and then flows back to the low temperature tank 200 for recycling.

As an alternative embodiment, temperature control system 10 further comprises a first plate heat exchanger 610 and a second plate heat exchanger 630, first plate heat exchanger 610 comprising a first flow path 611 and a second flow path 613, and first flow path 611 being convective to second flow path 613, second plate heat exchanger 630 comprising a third flow path 631 and a fourth flow path 633, and third flow path 631 being convective to fourth flow path 633; the first flow path 611 communicates the second circulation channel 520 with the low temperature tank 200, the second flow path 613 stores a refrigerant, the second flow path 613 communicates with the third flow path 631, and the fourth flow path 633 is used to communicate with the process cooling water system.

The principle of operation of the plate heat exchanger is achieved by a heat transfer mechanism in which heat is always transferred spontaneously from a high temperature object to a low temperature object. In detail, the plate heat exchanger makes two fluids with different temperatures flow in the space separated by the wall surface, and heat conduction and convection of the fluids are formed on the wall surface through the wall surface, so that heat exchange between the two fluids is promoted.

In this regard, the above arrangement is an explanation of the fact that the refrigerant in the first flow path 611 exchanges heat with the refrigerant in the second flow path 613, and the refrigerant can flow into the third flow path 631 because the second flow path 613 communicates with the third flow path 631. Therefore, the refrigerant in the third flow path 631 exchanges heat with the medium in the industrial cooling water system in which the fourth flow path 633 communicates. In detail, the first plate heat exchanger 610 exchanges heat, the first flow path 611 exchanges heat between the refrigerating fluid returned from the second circulation channel 520 and the refrigerant in the second flow path 613, and the refrigerating fluid is cooled and then enters the low-temperature tank 200 for storage and use, so as to ensure that the low-temperature refrigerating fluid in the low-temperature tank 200 is changed in a fluctuation manner within a normal range.

Preferably, temperature control system 10 further includes a first connecting passage 710, a second connecting passage 730, an expansion valve 731, and a compressor 711. The first connection passage 710 communicates one end of the second flow path 613 with one end of the third flow path 631, and the compressor 711 is provided to the first connection passage 710; the second connection passage 730 communicates the other end of the second flow path 613 with the other end of the third flow path 631, and the expansion valve 731 is provided in the second connection passage 730.

Based on the above-described configuration, when the temperature control system 10 is operated, the compressor 711 provided to the first connection passage 710 compresses the low-temperature and low-pressure refrigerant gas flowing out of the second flow passage 613, the high-temperature and high-pressure superheated refrigerant gas formed after the compression flows to the third flow passage 631, and exchanges heat with the fourth flow passage 633 communicating with the process cooling water system in the second plate heat exchanger 630, in which process the refrigerant gas is condensed into a medium-temperature and high-pressure refrigerant liquid.

The medium-temperature high-pressure refrigerant liquid is converted into low-temperature low-pressure refrigerant liquid after the throttling and depressurization effects of the expansion valve 731 arranged on the second connection channel 730, and then enters the first plate heat exchanger 610 to cool the refrigerant liquid returned from the second load 913, that is, the first flow channel 611 exchanges heat with the second flow channel 613. Based on this, the refrigerant in the second flow path 613 is converted from the low-temperature low-pressure liquid into the low-temperature low-pressure gas, and the temperature of the refrigerant liquid in the first flow path 611 is further lowered and enters the low-temperature tank 200 for storage and use. Thereafter, the refrigerant flows again to the compressor 711, and circulates.

In addition, it is preferable that the upper limit of the temperature of the refrigerant in the high temperature tank 100 is higher than the highest temperature required for the first load 911 by 5 deg.c, and the temperature in the temperature adjusting tank 300 is set stepwise according to the temperature required for the first load 911 or the second load 913, so as to avoid that the heating element is always in a high load state. The lower temperature limit of the refrigerant liquid in the low temperature tank 200 is lower than the minimum temperature required by the second load 913 by another 5 deg.c, and the temperature in the temperature adjusting tank 300 is set stepwise according to the temperature required by the first load 911 or the second load 913, so as to avoid that the compressor 711 is always operated in a high load state.

In summary, the present invention provides a temperature control system 10 comprising a hot box 100 for storing hot coolant, a cold box 200 for storing cold coolant, and at least two temperature regulating boxes 300. Wherein, at least two temperature adjusting boxes 300 are sequentially communicated, and the liquid outlet of the upstream temperature adjusting box 300 in any two adjacent temperature adjusting boxes 300 is communicated with the liquid inlet of the downstream temperature adjusting box 300, the liquid outlet of the high temperature box 100 is communicated with the liquid inlet of the most upstream temperature adjusting box 300, and the liquid outlet of the low temperature box 200 is communicated with the liquid inlets of all the temperature adjusting boxes 300. Based on this, the temperature control system 10 provided in the present application uses the high-temperature freezing liquid in the high-temperature box 100 as a heat source to realize maximum utilization, and uses the upstream and downstream adjustment between the temperature adjusting boxes 300 to realize rapid temperature reduction in a stepwise decreasing manner. In addition, the temperature control system 10 also enables the temperature control box 300 to ensure the fluctuation range of the temperature to meet the load use on the basis of ensuring rapid temperature reduction.

The present invention is not limited to the above embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present invention are intended to be included in the scope of the present invention. Therefore, the protection scope of the invention is subject to the protection scope of the claims.

Claims

1. A temperature control system, characterized by comprising a high temperature tank (100) for storing a high temperature freezing liquid, a low temperature tank (200) for storing a low temperature freezing liquid, and at least two temperature regulating tanks (300);

at least two temperature regulating boxes (300) are sequentially communicated, a liquid outlet of each temperature regulating box (300) at the upstream of any two adjacent temperature regulating boxes (300) is communicated with a liquid inlet of each temperature regulating box (300) at the downstream, a liquid outlet of each high-temperature box (100) is communicated with a liquid inlet of the temperature regulating box (300) at the most upstream, and a liquid outlet of each low-temperature box (200) is communicated with liquid inlets of all the temperature regulating boxes (300).

2. The temperature control system according to claim 1, wherein the temperature control system (10) further comprises a return flow channel (400), and the return flow channel (400) communicates a liquid outlet of the upstream temperature control box (300) with a liquid inlet of the downstream temperature control box (300) of any two adjacent temperature control boxes (300).

3. The temperature control system according to claim 2, wherein the temperature control system (10) further comprises a first load (911), the return channel (400) comprises a first channel (410) and a second channel (420), the first channel (410) communicates an upstream outlet of the temperature regulating tank (300) with the first load (911), and the second channel (420) communicates the first load (911) with a downstream inlet of the temperature regulating tank (300).

4. A temperature control system according to claim 3, characterized in that the temperature control system (10) further comprises a three-way regulating valve (421) and a first circulation channel (510), the three-way regulating valve (421) comprises an inlet, a first outlet and a second outlet, the three-way regulating valve (421) is arranged on the second channel (420), the inlet is communicated with the first load (911), the first outlet is communicated with the downstream liquid inlet of the temperature regulating tank (300), the second outlet is communicated with the first circulation channel (510), and the other end of the first circulation channel (510) is communicated with the liquid inlet of the high temperature tank (100).

5. A temperature control system according to claim 3, characterized in that the temperature control system (10) further comprises a first pump (411), the first pump (411) being arranged on the first channel (410) and being located upstream between the temperature regulating tank (300) and the first load (911).

6. A temperature control system according to claim 3, characterized in that the temperature control system (10) further comprises a first heater (412) and a first temperature sensor (413), the first heater (412) and the first temperature sensor (413) are both arranged on the first channel (410), and the first heater (412) and the first temperature sensor (413) are arranged in sequence between the upstream tempering tank (300) and the first load (911).

7. The temperature control system according to claim 1, wherein the temperature control system (10) further comprises a first adjusting pipe (530) and a first proportional adjusting valve (531), the first adjusting pipe (530) is communicated with a liquid outlet of the high temperature tank (100) and a liquid inlet of the temperature adjusting tank (300) at the most upstream, and the first proportional adjusting valve (531) is arranged on the first adjusting pipe (530).

8. The temperature control system according to claim 1, wherein the temperature control system (10) further comprises a second adjusting pipe (540) and a second proportional adjusting valve (541), the second adjusting pipe (540) is communicated with the liquid outlet of the low-temperature tank (200) and the liquid inlets of all the temperature adjusting tanks (300), and the second proportional adjusting valve (541) is disposed on the second adjusting pipe (540).

9. The temperature control system according to any one of claims 1-8, wherein the temperature control system (10) further comprises a second circulation channel (520), the second circulation channel (520) communicating a liquid outlet of the temperature regulating tank (300) furthest downstream with a liquid inlet of the low temperature tank (200).

10. The temperature control system according to claim 9, wherein the temperature control system (10) further comprises a first plate heat exchanger (610) and a second plate heat exchanger (630), the first plate heat exchanger (610) comprising a first flow path (611) and a second flow path (613), and the first flow path (611) being convective with the second flow path (613), the second plate heat exchanger (630) comprising a third flow path (631) and a fourth flow path (633), and the third flow path (631) being convective with the fourth flow path (633);

the first flow path (611) communicates the second circulation channel (520) with the low-temperature tank (200), and the second flow path (613) stores a refrigerant, the second flow path (613) communicates with the third flow path (631), and the fourth flow path (633) is used for communicating with a process cooling water system.