CN117665662A - Antifuse detection method, fusing method and chip - Google Patents
Antifuse detection method, fusing method and chip Download PDFInfo
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- CN117665662A CN117665662A CN202211033924.2A CN202211033924A CN117665662A CN 117665662 A CN117665662 A CN 117665662A CN 202211033924 A CN202211033924 A CN 202211033924A CN 117665662 A CN117665662 A CN 117665662A
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Abstract
The disclosure relates to the technical field of semiconductors, and provides an anti-fuse detection method, a fusing method and a chip. The antifuse detection method comprises the following steps: obtaining measured resistances of an antifuse to be tested at a plurality of different temperatures; judging the correlation between the measured resistance and the temperature of the antifuse to be tested; judging whether the antifuse to be tested is completely blown or not according to the correlation between the measured resistance and the temperature of the antifuse to be tested; and when the measured resistance and the temperature of the antifuse to be measured are positively correlated, judging that the antifuse to be measured is completely blown. The anti-fuse detection method can accurately judge whether the anti-fuse to be detected is completely blown.
Description
Technical Field
The disclosure relates to the technical field of semiconductors, and in particular relates to an antifuse detection method, a fusing method and a chip.
Background
In the related art, an inspection method of an antifuse generally includes: and detecting the measured resistance of the antifuse, and judging whether the antifuse is completely blown or not by judging the magnitude relation between the measured resistance and the threshold resistance, wherein the antifuse is completely blown when the measured resistance is smaller than the threshold resistance.
However, the antifuse may be in an edge blown state, where the measured resistance of the antifuse is less than a threshold resistance, and the antifuse may resume from the edge blown state to the non-blown state under certain environmental conditions. Therefore, the inspection method in the related art cannot detect the antifuse in an edge blown state.
It should be noted that the information disclosed in the above background section is only for enhancing understanding of the background of the present disclosure and thus may include information that does not constitute prior art known to those of ordinary skill in the art.
Disclosure of Invention
According to one aspect of the present disclosure, there is provided an antifuse detection method including:
obtaining measured resistances of an antifuse to be tested at a plurality of different temperatures;
judging the correlation between the measured resistance and the temperature of the antifuse to be tested;
judging whether the antifuse to be tested is completely blown or not according to the correlation between the measured resistance and the temperature of the antifuse to be tested;
and when the measured resistance and the temperature of the antifuse to be tested are positively correlated, judging that the antifuse to be tested is completely blown.
In an exemplary embodiment of the present disclosure, determining whether the antifuse to be tested is completely blown according to a correlation between a measured resistance and a temperature of the antifuse to be tested, further includes:
and when the measured resistance and the temperature of the antifuse to be tested are in negative correlation, judging that the antifuse to be tested is not completely blown.
In an exemplary embodiment of the present disclosure, determining whether the antifuse to be tested is completely blown according to a correlation between a measured resistance and a temperature of the antifuse to be tested, further includes:
and when the measured resistance and the temperature of the antifuse to be measured are neither positively nor negatively correlated, the measured resistances of the antifuse to be measured at a plurality of different temperatures are obtained again, and the correlation between the measured resistances and the temperatures of the antifuse to be measured is judged again.
In an exemplary embodiment of the disclosure, the obtaining measured resistances of the antifuse to be tested at a plurality of different temperatures includes:
acquiring an actually measured resistance of an antifuse to be tested at a first temperature as a first resistance;
acquiring an actually measured resistance of the antifuse to be tested at a second temperature as a second resistance, wherein the first temperature is greater than the second temperature;
judging the correlation between the measured resistance and the temperature of the antifuse to be tested, comprising:
comparing the magnitudes of the first resistor and the second resistor;
and when the first resistance is larger than the second resistance, judging that the measured resistance and the temperature of the antifuse to be measured are positively correlated.
In an exemplary embodiment of the present disclosure, the first temperature is 80 degrees celsius or higher and the second temperature is 40 degrees celsius or lower.
In an exemplary embodiment of the present disclosure, the detection method further includes:
comparing the measured resistance of the antifuse to be tested with the preset resistance at different temperatures;
when the measured resistance of the antifuse to be tested is larger than the preset resistance, judging that the antifuse to be tested is not completely blown;
when the measured resistance of the antifuse to be tested is smaller than the preset resistance, judging whether the antifuse to be tested is completely blown or not according to the correlation between the measured resistance of the antifuse to be tested and the temperature.
In an exemplary embodiment of the present disclosure, the detection method further includes:
acquiring a mapping relation between the resistance and the temperature of the completely blown antifuse;
acquiring a theoretical resistance corresponding to the measured resistance of the antifuse to be measured according to the mapping relation, wherein the corresponding measured resistance and theoretical resistance correspond to the same temperature;
acquiring a first parameter according to a plurality of measured resistances and a plurality of theoretical resistances, wherein the first parameter characterizes the difference degree of the theoretical resistances and the measured resistances, and the larger the first parameter is, the larger the difference degree of the theoretical resistances and the measured resistances is;
when the first parameter is larger than a first threshold value, judging that the antifuse to be tested is not completely blown;
and when the first parameter is smaller than a first threshold value, judging whether the antifuse to be tested is completely blown or not according to the correlation between the measured resistance and the temperature of the antifuse to be tested.
In one exemplary embodiment of the present disclosure, obtaining a mapping of resistance and temperature of a fully blown antifuse includes:
providing a fully blown antifuse;
obtaining actual measurement resistances of the fully blown antifuse at different temperatures;
establishing a functional model of the measured resistance and temperature of the fully blown antifuse, the functional model including at least one pending constant;
the pending constant is obtained from the measured resistance and temperature of at least one set of the fully blown antifuses.
In an exemplary embodiment of the present disclosure, the function model is:
y=ax+b, wherein the temperature is an independent variable, the measured resistance is a dependent variable, and a and b are the predetermined constants.
In one exemplary embodiment of the present disclosure, a plurality of the measured resistances form a first vector, and a plurality of the theoretical resistances form a second vector;
the first parameter is any one of a minpoint distance, a Euclidean distance, a Manhattan distance and a Canbela distance between the first vector and the second vector.
In an exemplary embodiment of the present disclosure, the minimum temperature difference between the different temperatures is 10 degrees celsius or more.
In an exemplary embodiment of the present disclosure, the detection method further includes: heating the antifuse to be tested to different temperatures;
heating the antifuse to be tested to different temperatures, including:
and placing the antifuse to be tested in an environment with a preset temperature so as to heat the antifuse to be tested to the preset temperature.
In an exemplary embodiment of the present disclosure, the detection method further includes: heating the antifuse to be tested to different temperatures;
heating the antifuse to be tested to different temperatures, including:
and setting the antifuse to be tested in a current path, and heating the antifuse to be tested to different temperatures through current.
In an exemplary embodiment of the present disclosure, obtaining measured resistances of the antifuse to be tested at a plurality of different temperatures includes:
connecting the antifuse to be tested and a known resistor in series between a first power supply end and a second power supply end, wherein the voltage of the first power supply end is greater than that of the second power supply end;
and obtaining the measured resistance of the antifuse to be tested according to the voltage of the node between the antifuse to be tested and the known resistor.
According to one aspect of the present disclosure, there is provided an antifuse blowing method including:
fusing the antifuse to be tested;
performing detection actions on the antifuse to be detected, wherein the detection actions comprise the antifuse detection method;
and when the detection action cannot determine that the antifuse to be detected is completely blown, re-blowing and detecting the antifuse to be detected.
According to one aspect of the present disclosure, there is provided a chip including an antifuse, the antifuse in the chip being blown by the above-described antifuse blowing method.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the disclosure and together with the description, serve to explain the principles of the disclosure. It will be apparent to those of ordinary skill in the art that the drawings in the following description are merely examples of the disclosure and that other drawings may be derived from them without undue effort.
FIG. 1 is a graph of voltage versus current for an antifuse in different states;
FIG. 2 is a flow chart of an exemplary embodiment of an antifuse detection method of the present disclosure;
FIG. 3 is a graph of resistance versus temperature for an antifuse in a fully blown state;
FIG. 4 is a graph of resistance versus temperature for an antifuse in an incompletely blown state;
FIG. 5 is a schematic diagram of an exemplary embodiment of an antifuse test method according to the present disclosure for obtaining measured resistance of an antifuse to be tested;
FIG. 6 is a schematic diagram of an exemplary embodiment of an antifuse detection method according to the present disclosure, wherein measured resistance of the antifuse is obtained;
FIG. 7 is a logic diagram in an exemplary embodiment of an antifuse blowing method of the present disclosure;
fig. 8 is a logic diagram in another exemplary embodiment of an antifuse blowing method of the present disclosure.
Detailed Description
Example embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments may be embodied in many different forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus detailed descriptions thereof will be omitted.
The terms "a," "an," "the" are used to indicate the presence of one or more elements/components/divisions/etc.; the terms "comprising" and "having" are intended to be inclusive and mean that there may be additional elements/compositional differences/etc., in addition to the listed elements/compositional differences/etc.
In the related art, an antifuse is a conventional one-time programmable device, and is widely used in the design of various chips. Antifuse generally include two electrode terminals with a dielectric layer disposed between the two electrode terminals. When a breakdown voltage is applied across the two electrode terminals of the antifuse, the dielectric layer between the two electrode terminals of the antifuse breaks down, and the antifuse blows, so that the resistance between the two electrode terminals of the antifuse drastically decreases. With this feature of the antifuse, a particular logic signal may be stored by blowing the antifuse.
In the related art, whether an antifuse is blown or not is generally determined by the magnitude of the actually measured resistance of the antifuse. For example, an antifuse may be judged to be fully blown when the measured resistance of the antifuse is less than a threshold resistance, and not blown otherwise.
However, the antifuse may not be completely blown after the blowing operation, and the antifuse may be in an edge blown state in which the measured resistance of the antifuse is also less than the threshold resistance. However, the antifuse in an edge blown state may resume from the edge blown state to an unblown state after a period of operation or after an infrared reflow process or the like. Therefore, the inspection method in the related art cannot detect the antifuse in an edge blown state. For example, as shown in FIG. 1, an antifuse is shown as a voltage versus current curve for different states. Wherein the abscissa represents the voltage applied to both electrode terminals of the antifuse and the ordinate represents the current of the antifuse. In fig. 1, curve 11 shows the voltage and current relationship between two electrodes of an antifuse in an edge blown state, curve 12 shows the voltage and current relationship between two electrodes of an antifuse after baking at 98 degrees celsius for 1 hour, and curve 13 shows the voltage and current relationship between two electrodes of an antifuse after baking at 98 degrees celsius for 12 hours. As can be seen from fig. 1, the antifuse became resistive after 1 hour at high temperature, i.e., the antifuse was restored to its non-blown state from the edge blown state at high temperature.
Based on this, the present exemplary embodiment provides an antifuse detection method, as shown in fig. 2, which is a flowchart of an exemplary embodiment of the antifuse detection method of the present disclosure. The detection method may include:
step S1: obtaining measured resistances of an antifuse to be tested at a plurality of different temperatures;
step S2: judging the correlation between the measured resistance and the temperature of the antifuse to be tested;
step S3: judging whether the antifuse to be tested is completely blown or not according to the correlation between the measured resistance and the temperature of the antifuse to be tested;
and when the measured resistance and the temperature of the antifuse to be tested are positively correlated, judging that the antifuse to be tested is completely blown.
In the present exemplary embodiment, as shown in fig. 3 and 4, fig. 3 is a graph of resistance versus temperature in the fully blown state of the antifuse, and fig. 4 is a graph of resistance versus temperature in the incompletely blown state of the antifuse. Wherein, fig. 3 shows the relationship between the resistance and the temperature of 5 samples in the completely fused state, and fig. 4 shows the relationship between the resistance and the temperature of 5 samples in the incompletely fused state. As can be seen from fig. 3, in the fully blown state, the antifuse exhibits a temperature characteristic of the conductor material, and the resistance of the antifuse and the temperature are positively correlated, i.e., the antifuse resistance increases with increasing temperature. As can be seen from fig. 4: in an incompletely blown state, the antifuse exhibits temperature characteristics of an insulator or semiconductor material, and the resistance of the antifuse is inversely related to temperature, i.e., the antifuse resistance decreases with increasing temperature. Note that in the present exemplary embodiment, the incomplete fusing state may include an edge fusing state and an unblown state.
In this exemplary embodiment, the antifuse detection method determines whether the antifuse to be tested is completely blown according to a correlation between a measured resistance of the antifuse to be tested and a temperature, where when the measured resistance of the antifuse to be tested and the temperature are positively correlated, it is determined that the antifuse to be tested is completely blown. The detection method can accurately detect the completely blown anti-fuse and can exclude the anti-fuse in the edge blowing state.
In this exemplary embodiment, determining whether the antifuse to be tested is completely blown according to the correlation between the measured resistance and the temperature of the antifuse to be tested may further include:
and when the measured resistance and the temperature of the antifuse to be tested are in negative correlation, judging that the antifuse to be tested is not completely blown. I.e., the antifuse under test may be in an edge blown or non-blown state.
The detection method can accurately judge that the antifuse to be detected is in an incomplete fusing state.
In this exemplary embodiment, errors or errors may occur when the measured resistance and the temperature of the antifuse to be measured are detected, so that the measured resistance and the temperature of the antifuse to be measured are neither positively nor negatively correlated.
In this exemplary embodiment, determining whether the antifuse to be tested is completely blown according to the correlation between the measured resistance and the temperature of the antifuse to be tested may further include:
and when the measured resistance and the temperature of the antifuse to be measured are neither positively nor negatively correlated, the measured resistances of the antifuse to be measured at a plurality of different temperatures are obtained again, and the correlation between the measured resistances and the temperatures of the antifuse to be measured is judged again.
The detection method can eliminate the abnormal correlation caused by the resistance or temperature error of the antifuse to be detected by a re-detection mode.
It should be appreciated that, in other exemplary embodiments, to simplify the detection step, when the measured resistance and the temperature of the antifuse to be detected are neither positively nor negatively correlated, the detection method may also directly determine whether the antifuse is completely blown by the ratio of the number of abnormal measured resistances to the total number of measured resistances. For example, the detection method can detect actual measurement resistances of the antifuse to be detected at M different temperatures, K abnormal actual measurement resistances and M-K normal actual measurement resistances exist in the M actual measurement resistances, the M-K normal actual measurement resistances are positively or negatively correlated with the temperature, and a plurality of actual measurement resistances formed by the M-K normal actual measurement resistances and any abnormal actual measurement resistance are neither positively correlated nor negatively correlated with the temperature. When the number of abnormal actual measurement resistors is smaller than the total number of actual measurement resistors, the abnormal actual measurement resistors can be considered to be abnormal due to measurement errors or errors, so that whether the antifuse to be tested is completely blown or not can be judged according to the correlation between the normal actual measurement resistors and the temperature. For example, when K/M is less than or equal to 20%, whether the antifuse to be tested is completely blown or not can be judged according to the correlation between the normal measured resistance and the temperature. When the normal actually measured resistance and the temperature are positively correlated, the anti-fuse to be detected can be judged to be completely blown; when the normal measured resistance is inversely related to the temperature, the incomplete fusing of the antifuse to be tested can be judged. K/M may be equal to 20%, 15%, 10%, 5%, 1%, etc. K. M is a positive integer.
It should be appreciated that in other exemplary embodiments, determining whether the antifuse to be tested is completely blown according to the correlation between the measured resistance and the temperature of the antifuse to be tested may also include:
and when the measured resistance and the temperature of the antifuse to be tested are not positively correlated, directly judging that the antifuse to be tested is not completely blown. Wherein the measured resistance and temperature do not have a positive correlation may include any other situation than a positive correlation of measured resistance and temperature, for example, a negative correlation of measured resistance and temperature, and for example, a positive correlation of measured resistance and temperature. The detection method can also simplify the detection steps.
In this exemplary embodiment, the minimum temperature difference between different temperatures may be 10 degrees celsius or more when detecting the antifuse actually measured resistance. For example, the minimum temperature difference between the different temperatures may be equal to 10 degrees celsius, 20 degrees celsius, 30 degrees celsius, 40 degrees celsius, 50 degrees celsius, 60 degrees celsius, or the like. In this exemplary embodiment, a sufficiently large temperature difference is spanned between different temperatures, so that the theoretical resistances of the antifuse to be tested at different temperatures have a sufficiently large resistance difference, and even if a small error exists in the actual measurement of the resistor, the measurement error does not cause a change in the correlation between the actual measurement resistor and the temperature.
In this exemplary embodiment, obtaining the measured resistances of the antifuse to be tested at a plurality of different temperatures may include:
placing the antifuse to be tested in an environment with a preset temperature so as to heat the antifuse to be tested to the preset temperature;
and detecting that the resistance of the antifuse to be detected at the preset temperature is the actual measurement resistance corresponding to the preset temperature.
The present exemplary embodiment may place an antifuse to be tested in a heating cavity of a heating apparatus, and adjust the temperature of the heating cavity by the heating apparatus to heat the antifuse to be tested. The method can well control the temperature of the antifuse to be tested.
However, antifuses are typically integrated in a chip, and other devices in the chip may be damaged by high temperature effects.
In other exemplary embodiments, the detection method may also heat the antifuse to be tested in other ways. For example, obtaining measured resistances of the antifuse to be tested at a plurality of different temperatures may include:
and setting the antifuse to be tested in a current path so as to heat the antifuse to be tested. The heating mode can avoid the whole chip where the antifuse is located in a high-temperature environment, so that the risk of the chip being damaged by high temperature can be reduced.
In this exemplary embodiment, as shown in fig. 5, a schematic structural diagram of obtaining an actual measured resistance of an antifuse to be tested in an exemplary embodiment of the antifuse detection method according to the present disclosure is shown. Obtaining measured resistances of the antifuse to be tested at a plurality of different temperatures may include:
connecting the to-be-tested antifuse ATF and a known resistor R in series between a first power supply end VDD and a second power supply end VSS, wherein the voltage of the first power supply end VDD is greater than that of the second power supply end VSS; and obtaining the measured resistance of the to-be-tested antifuse ATF according to the voltage of the node N between the to-be-tested antifuse ATF and the known resistor R. The measured resistance of the to-be-measured antifuse ATF is equal to R (V1-VSS)/(VDD-V1), wherein R is the resistance of a known resistor, V1 is the voltage of a node N, VSS is the voltage of a second power supply terminal, and VDD is the voltage of a first power supply terminal.
It should be appreciated that in other exemplary embodiments, the detection method may also determine the detection method of the antifuse resistance according to the connection of the antifuse to be tested in the chip. For example, as shown in fig. 6, a schematic diagram of an exemplary embodiment of an antifuse detection method according to the present disclosure is shown. In the present exemplary embodiment, an antifuse may be applied to a dynamic random access memory, and the antifuse may be used to repair bad memory cells in the dynamic random access memory. The row address signal Xadd may gate the first switching unit T1 and the column address signal Yadd may gate the second switching unit T2, so that the antifuse ATF to be tested and the third switching unit T3 at a specific position may be connected in series between the high-level power supply terminal Vdd and the low-level power supply terminal Vss. In the present exemplary embodiment, the on-resistances of the first switching unit T1 and the second switching unit T2 may be ignored, the third switching unit T3 has a known on-resistance, and the detection method may also obtain the resistance of the antifuse ATF to be tested by detecting the voltage of the node N.
In this exemplary embodiment, before determining whether the antifuse to be tested is completely blown according to the correlation between the measured resistance and the temperature of the antifuse to be tested, the detection method may further include:
comparing the measured resistance of the antifuse to be tested with the preset resistance at different temperatures;
when the measured resistance of the antifuse to be tested is larger than the preset resistance, judging that the antifuse to be tested is not completely blown;
when the measured resistance of the antifuse to be tested is smaller than the preset resistance, judging whether the antifuse to be tested is completely blown or not according to the correlation between the measured resistance of the antifuse to be tested and the temperature.
In this exemplary embodiment, the detection method may first exclude the antifuse in the non-blown state by comparing the measured resistance and the preset resistance of the antifuse to be detected at different temperatures, so as to improve the accuracy of antifuse detection.
In this exemplary embodiment, before determining whether the antifuse to be tested is completely blown according to the correlation between the measured resistance and the temperature of the antifuse to be tested, the detection method may further include:
acquiring a mapping relation between the resistance and the temperature of the completely blown antifuse;
acquiring a theoretical resistance corresponding to the measured resistance of the antifuse to be measured according to the mapping relation, wherein the corresponding measured resistance and theoretical resistance correspond to the same temperature;
acquiring a first parameter according to a plurality of measured resistances and a plurality of theoretical resistances, wherein the first parameter characterizes the difference degree of the theoretical resistances and the measured resistances, and the larger the first parameter is, the larger the difference degree of the theoretical resistances and the measured resistances is;
when the first parameter is larger than a first threshold value, judging that the antifuse to be tested is not completely blown;
and when the first parameter is smaller than a first threshold value, judging whether the antifuse to be tested is completely blown or not according to the correlation between the measured resistance and the temperature of the antifuse to be tested.
In this exemplary embodiment, the detection method obtains the theoretical resistance of the antifuse to be detected through the mapping relation between the resistance of the completely blown antifuse and the temperature, and preliminarily judges whether the antifuse is completely blown or not through the difference between the theoretical resistance of the antifuse to be detected and the actually measured resistance. When the difference between the theoretical resistance and the actually measured resistance of the antifuse to be detected is large, incomplete blowing of the antifuse can be judged; when the difference between the theoretical resistance and the actually measured resistance of the antifuse to be detected is smaller, whether the antifuse to be detected is completely blown or not can be judged according to the correlation between the actually measured resistance and the temperature of the antifuse to be detected. The detection method can also further improve the detection accuracy.
It should be noted that, the method of comparing the first parameter with the first threshold value and the method of comparing the measured resistance with the preset resistance may be applied to the same embodiment or may be applied to different embodiments.
In the present exemplary embodiment, the map of the resistance and the temperature of the fully blown antifuse is obtained as y=f (x), x is the temperature of the fully blown antifuse, and y is the resistance of the fully blown antifuse. Obtaining the theoretical resistance corresponding to the measured resistance of the antifuse to be tested according to the mapping relation may include: and bringing the temperature corresponding to the measured resistance into an independent variable in a mapping relation of y=f (x), and obtaining a value of the dependent variable as a theoretical resistance corresponding to the measured resistance.
In this exemplary embodiment, a plurality of the measured resistances may form a first vector, and a plurality of the theoretical resistances may form a second vector; the corresponding theoretical and measured resistances may be located at the same position in the two vectors, respectively. The first parameter may be any one of a mintype distance, a euclidean distance, a manhattan distance, and a canbela distance between the first vector and the second vector.
In the present exemplary embodiment, the first threshold value may be set to a different value according to a different value of the first parameter algorithm.
In this exemplary embodiment, obtaining the mapping relationship between the resistance and the temperature of the fully blown antifuse may include:
providing a fully blown antifuse;
obtaining actual measurement resistances of the fully blown antifuse at different temperatures;
establishing a functional model of the measured resistance and temperature of the fully blown antifuse, the functional model including at least one pending constant;
the pending constant is obtained from the measured resistance and temperature of at least one set of the fully blown antifuses.
In this exemplary embodiment, the function model is:
y=ax+b, wherein temperature is an independent variable, measured resistance is a dependent variable, and a and b are the undetermined constants.
In this exemplary embodiment, the measured resistances of the fully blown antifuse at two different temperatures may be obtained, the temperatures are brought into the independent variables of the function model, the measured resistances are brought into the dependent variables of the function model, two sets of temperatures and measured resistances may obtain two equation sets with a and b as unknowns, and solving the equation sets may obtain the undetermined constants a and b, that is, the mapping relationship between the resistances and the temperatures of the fully blown antifuse is obtained: y=ax+b.
In this exemplary embodiment, the detection method may also obtain multiple sets of different pending constants a, b by detecting actually measured resistances of the fully blown antifuse at different temperature combinations, and select an optimal pending constant from the multiple sets of pending constants. For example, the detection method can obtain the actual measured resistances of the fully blown antifuse at N different temperatures, N being a positive integer greater than 3; selecting a plurality of groups of different temperature combinations and corresponding measured resistors from the N groups of temperatures and the measured resistors, wherein each group of temperature combinations comprises two different temperatures; acquiring different proxy constants according to different temperature combinations and corresponding measured resistances thereof; for each temperature combination, obtaining theoretical resistances corresponding to the remaining N-2 different temperatures according to the function model, namely bringing the remaining N-2 different temperatures into independent variables of the function model, and obtaining the dependent variable of the function model as the theoretical resistance; acquiring a second parameter according to the N-2 theoretical resistors and the N-2 actually measured resistors corresponding to the theoretical resistors, wherein the second parameter represents the difference degree of the theoretical resistors and the actually measured resistors in the fully blown anti-fuse, and the larger the second parameter is, the larger the difference degree of the theoretical resistors and the actually measured resistors in the fully blown anti-fuse is; and obtaining the undetermined constant corresponding to the minimum value in the second parameters as the optimal undetermined constant, and taking the function model corresponding to the optimal undetermined constant as the mapping relation between the resistance and the temperature of the fully blown antifuse.
In this exemplary embodiment, a plurality of the measured resistances in the fully blown antifuse may form a third vector, and a plurality of the theoretical resistances in the fully blown antifuse may form a fourth vector; the corresponding theoretical and measured resistances may be located at the same position in the two vectors, respectively. The second parameter may be any one of a mintype distance, a euclidean distance, a manhattan distance, and a canbela distance between the third vector and the fourth vector.
It should be appreciated that in other exemplary embodiments, the function model may also be other architectures, for example, the function model may also be an exponential function, a logarithmic function, a multiple function, etc. The number of the constants to be determined may be other, and the number of equations of the equation set required for obtaining the constants to be determined needs to be the same as the number of the constants to be determined.
In this exemplary embodiment, obtaining the measured resistances of the antifuse to be tested at a plurality of different temperatures may include:
acquiring an actually measured resistance of the antifuse to be tested at a first temperature as a first resistance;
acquiring an actually measured resistance of the antifuse to be tested at a second temperature as a second resistance, wherein the first temperature is greater than the second temperature;
the determining the correlation between the measured resistance and the temperature of the antifuse to be measured may include:
comparing the magnitudes of the first resistor and the second resistor;
and when the first resistance is larger than the second resistance, judging that the measured resistance and the temperature of the antifuse to be measured are positively correlated.
The present exemplary embodiment selects only the resistances of the antifuse at two different temperatures for comparison, so that the detection step of the antifuse can be greatly simplified.
In this exemplary embodiment, the first temperature may be 80 degrees celsius or higher, and the second temperature may be 40 degrees celsius or lower. For example, the first temperature may be equal to 80 degrees celsius, 90 degrees celsius, 98 degrees celsius, 110 degrees celsius, or the like. The second temperature may be equal to 40 degrees celsius, 30 degrees celsius, 25 degrees celsius, 15 degrees celsius, or the like.
The failure rate of the detection method provided by the present exemplary embodiment after actual measurement was only 0.03%, whereas the failure rate of the detection method in the related art was 5%.
According to one aspect of the present disclosure, there is provided an antifuse blowing method including:
fusing the antifuse to be tested;
performing detection actions on the antifuse to be detected, wherein the detection actions comprise the antifuse detection method;
and when the detection action cannot determine that the antifuse to be detected is completely blown, re-blowing and detecting the antifuse to be detected.
As shown in fig. 7, a logic diagram in an exemplary embodiment of an antifuse blowing method of the present disclosure is shown. The fusing method may include: fusing the antifuse to be tested; detecting a first resistor R1 of an antifuse to be tested at a first temperature and a second resistor R2 at a second temperature, wherein the first temperature is larger than the second temperature; when the first resistor R1 is larger than the second resistor R2, the antifuse to be tested is judged to be completely blown, otherwise, the antifuse to be tested is blown again.
As shown in fig. 8, a logic diagram in another exemplary embodiment of an antifuse blowing method of the present disclosure is shown. The fusing method may include: fusing the antifuse to be tested; detecting a first resistor R1 of an antifuse to be tested at a first temperature and a second resistor R2 at a second temperature, wherein the first temperature is larger than the second temperature; when the first resistor R1 and the second resistor R2 are smaller than the threshold resistor Rx, comparing the magnitudes of the first resistor R1 and the second resistor R2, otherwise, blowing the antifuse to be tested again; and when the first resistor is larger than the second resistor, judging that the antifuse to be tested is completely blown, otherwise, carrying out the blowing action on the antifuse to be tested again.
According to one aspect of the present disclosure, there is provided a chip including an antifuse, the antifuse in the chip being blown by the above-described antifuse blowing method. The chip may be a dynamic random access memory.
Other embodiments of the disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure herein. This application is intended to cover any adaptations, uses, or adaptations of the disclosure following, in general, the principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.
The drawings in the present disclosure relate only to the structures to which the present disclosure relates, and other structures may be referred to in general. The embodiments of the present disclosure and features in the embodiments may be combined with each other to arrive at a new embodiment without conflict. It will be understood by those skilled in the art that various modifications and equivalent substitutions may be made to the disclosed embodiments without departing from the spirit and scope of the disclosed embodiments, which are intended to be encompassed within the scope of the appended claims.
It is to be understood that the present disclosure is not limited to the precise arrangements and instrumentalities shown in the drawings, and that various modifications and changes may be effected without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.
Claims (16)
1. An antifuse detection method, the detection method comprising:
obtaining measured resistances of an antifuse to be tested at a plurality of different temperatures;
judging the correlation between the measured resistance and the temperature of the antifuse to be tested;
judging whether the antifuse to be tested is completely blown or not according to the correlation between the measured resistance and the temperature of the antifuse to be tested;
and when the measured resistance and the temperature of the antifuse to be tested are positively correlated, judging that the antifuse to be tested is completely blown.
2. The antifuse detection method according to claim 1, wherein judging whether the antifuse to be tested is completely blown or not based on a correlation between measured resistance and temperature of the antifuse to be tested, further comprises:
and when the measured resistance and the temperature of the antifuse to be tested are in negative correlation, judging that the antifuse to be tested is not completely blown.
3. The antifuse detection method according to claim 1, wherein judging whether the antifuse to be tested is completely blown or not based on a correlation between measured resistance and temperature of the antifuse to be tested, further comprises:
and when the measured resistance and the temperature of the antifuse to be measured are neither positively nor negatively correlated, the measured resistances of the antifuse to be measured at a plurality of different temperatures are obtained again, and the correlation between the measured resistances and the temperatures of the antifuse to be measured is judged again.
4. The method of claim 1, wherein obtaining measured resistances of the antifuse to be tested at a plurality of different temperatures comprises:
acquiring an actually measured resistance of an antifuse to be tested at a first temperature as a first resistance;
acquiring an actually measured resistance of the antifuse to be tested at a second temperature as a second resistance, wherein the first temperature is greater than the second temperature;
judging the correlation between the measured resistance and the temperature of the antifuse to be tested, comprising:
comparing the magnitudes of the first resistor and the second resistor;
and when the first resistance is larger than the second resistance, judging that the measured resistance and the temperature of the antifuse to be measured are positively correlated.
5. The antifuse detection method according to claim 4, wherein the first temperature is 80 degrees celsius or higher and the second temperature is 40 degrees celsius or lower.
6. The antifuse detection method according to claim 1, characterized in that the detection method further comprises:
comparing the measured resistance of the antifuse to be tested with the preset resistance at different temperatures;
when the measured resistance of the antifuse to be tested is larger than the preset resistance, judging that the antifuse to be tested is not completely blown;
when the measured resistance of the antifuse to be tested is smaller than the preset resistance, judging whether the antifuse to be tested is completely blown or not according to the correlation between the measured resistance of the antifuse to be tested and the temperature.
7. The antifuse detection method according to claim 1, characterized in that the detection method further comprises:
acquiring a mapping relation between the resistance and the temperature of the completely blown antifuse;
acquiring a theoretical resistance corresponding to the measured resistance of the antifuse to be measured according to the mapping relation, wherein the corresponding measured resistance and theoretical resistance correspond to the same temperature;
acquiring a first parameter according to a plurality of measured resistances and a plurality of theoretical resistances, wherein the first parameter characterizes the difference degree of the theoretical resistances and the measured resistances, and the larger the first parameter is, the larger the difference degree of the theoretical resistances and the measured resistances is;
when the first parameter is larger than a first threshold value, judging that the antifuse to be tested is not completely blown;
and when the first parameter is smaller than a first threshold value, judging whether the antifuse to be tested is completely blown or not according to the correlation between the measured resistance and the temperature of the antifuse to be tested.
8. The antifuse detection method according to claim 7, wherein acquiring a map of resistance and temperature of a fully blown antifuse includes:
providing a fully blown antifuse;
obtaining actual measurement resistances of the fully blown antifuse at different temperatures;
establishing a functional model of the measured resistance and temperature of the fully blown antifuse, the functional model including at least one pending constant;
the pending constant is obtained from the measured resistance and temperature of at least one set of the fully blown antifuses.
9. The antifuse detection method of claim 8, wherein the function model is:
y=ax+b, wherein the temperature is an independent variable, the measured resistance is a dependent variable, and a and b are the predetermined constants.
10. The antifuse detection method of claim 7, wherein a plurality of the actual resistances form a first vector and a plurality of the theoretical resistances form a second vector;
the first parameter is any one of a minpoint distance, a Euclidean distance, a Manhattan distance and a Canbela distance between the first vector and the second vector.
11. The antifuse detection method according to any one of claims 1 to 10, characterized in that a minimum temperature difference between the different temperatures is 10 degrees celsius or more.
12. The antifuse detection method according to any one of claims 1 to 10, characterized in that the detection method further comprises: heating the antifuse to be tested to different temperatures;
heating the antifuse to be tested to different temperatures, including:
and placing the antifuse to be tested in an environment with a preset temperature so as to heat the antifuse to be tested to the preset temperature.
13. The antifuse detection method according to any one of claims 1 to 10, characterized in that the detection method further comprises: heating the antifuse to be tested to different temperatures;
heating the antifuse to be tested to different temperatures, including:
and setting the antifuse to be tested in a current path, and heating the antifuse to be tested to different temperatures through current.
14. The antifuse detection method according to any of claims 1-10, characterized in that obtaining measured resistances of the antifuse to be tested at a plurality of different temperatures comprises:
connecting the antifuse to be tested and a known resistor in series between a first power supply end and a second power supply end, wherein the voltage of the first power supply end is greater than that of the second power supply end;
and obtaining the measured resistance of the antifuse to be tested according to the voltage of the node between the antifuse to be tested and the known resistor.
15. An antifuse blowing method, comprising:
fusing the antifuse to be tested;
performing a sensing action on the antifuse to be tested, the sensing action comprising the antifuse sensing method of any one of claims 1-14;
and when the detection action cannot determine that the antifuse to be detected is completely blown, re-blowing and detecting the antifuse to be detected.
16. A chip comprising an antifuse, the antifuse in the chip being blown by the antifuse blowing method of claim 15.
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| CN202211033924.2A CN117665662A (en) | 2022-08-26 | 2022-08-26 | Antifuse detection method, fusing method and chip |
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| CN202211033924.2A CN117665662A (en) | 2022-08-26 | 2022-08-26 | Antifuse detection method, fusing method and chip |
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