CN117664892A - Miniature infrared spectrometer and electronic equipment - Google Patents

Miniature infrared spectrometer and electronic equipment Download PDF

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Publication number
CN117664892A
CN117664892A CN202211021975.3A CN202211021975A CN117664892A CN 117664892 A CN117664892 A CN 117664892A CN 202211021975 A CN202211021975 A CN 202211021975A CN 117664892 A CN117664892 A CN 117664892A
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China
Prior art keywords
spectrum
light source
mixed
background
light beam
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CN202211021975.3A
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Chinese (zh)
Inventor
何志平
郑元辽
李飞飞
李津宁
汪洋
李乔峰
郭宏伟
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Huawei Technologies Co Ltd
Shanghai Institute of Technical Physics of CAS
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Huawei Technologies Co Ltd
Shanghai Institute of Technical Physics of CAS
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Priority to CN202211021975.3A priority Critical patent/CN117664892A/en
Publication of CN117664892A publication Critical patent/CN117664892A/en
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Abstract

The embodiment of the application provides a miniature infrared spectrometer and electronic equipment, which are used for environmental monitoring, biomedical treatment, food safety and the like. The spectrometer is additionally provided with a narrow-band light source for emitting a second light beam, the second light beam is split by controlling a plane grating through a micro stepping motor, and a linear array detector generates a first background spectrum and a second background spectrum; in addition, a first light beam is emitted to the surface of an object to be detected by using a broad spectrum light source and subjected to diffuse reflection, a plane grating is controlled by a micro stepping motor to split a mixed light beam of the first light beam and the second light beam, and a linear array detector generates a first mixed spectrum and a second mixed spectrum. And finally, determining the spectrum of the object to be detected by the linear array detector by utilizing the spectrum of the narrow-band light source, the first mixed spectrum and the second mixed spectrum, and the first background spectrum and the second background spectrum. According to the technical scheme, the volume of the spectrometer can be further compressed, the cost is reduced, and meanwhile, the detection of a wide spectrum range can be realized.

Description

Miniature infrared spectrometer and electronic equipment
Technical Field
The present application relates to the field of spectroscopic measurement technology, and more particularly, to a miniature infrared spectrometer and electronic device.
Background
The spectrum can reflect the molecular structure information of the substances, and plays an important role in the fields of biology, chemistry, medical materials, food industry, geological exploration and the like. With the improvement of living standard, more and more people pay more attention to living quality, such as food safety, health monitoring and the like, so that the demand for spectrum detection in daily life is rapidly increased.
The spectroscopic instrument can perform qualitative and quantitative analysis on the structure and the components of the substances without damage by applying the optical principle, and is one of the most widely used analysis tools in the scientific research and industry at present. Although the traditional spectrum instrument can provide ultra-fine spectrum resolution and spectrum range of wide spectrum, the traditional spectrum instrument has many limiting factors such as large volume, high power consumption, high cost, poor environmental adaptability, inconvenience for secondary development and the like, and is difficult to meet the application requirements of people in different scenes, light, small, portable, low power consumption, low cost, rapid detection, real-time online and the like in daily life.
Therefore, how to combine the size of the spectroscopic instrument and the detection accuracy of the broad spectrum is a problem to be solved.
Disclosure of Invention
The embodiment of the application provides a miniature infrared spectrometer and electronic equipment, which can realize wide-spectrum range detection while compressing the volume of the spectrometer and reducing the cost.
In a first aspect, there is provided a miniature infrared spectrometer comprising: the device comprises a wide-spectrum light source, at least one narrow-band light source, a scanning grating and a linear array detector, wherein the scanning grating comprises a planar grating and a miniature stepping motor, and the at least one narrow-band light source comprises a first narrow-band light source, wherein:
the wide-spectrum light source is used for emitting a first light beam to the surface of the object to be detected, and the first infusion is incident to the plane grating through diffuse reflection of the surface of the object to be detected;
the first narrow-band light source is used for emitting a second light beam to the plane grating, and the light emitting surface of the first narrow-band light source faces the interior of the miniature infrared spectrometer;
the scanning grating is used for controlling the plane grating to split the mixed light beam of the first light beam and the second light beam at a first angle and a second angle through the micro stepping motor so as to obtain a first diffraction light beam and a second diffraction light beam;
the linear array detector is used for respectively detecting the first diffraction light beam and the second diffraction light beam to obtain a first mixed spectrum and a second mixed spectrum, wherein the first mixed spectrum and the second mixed spectrum comprise a first spectrum superposition area, and the first spectrum superposition area corresponds to the spectrum of the first narrowband light source.
The scanning grating is also used for controlling the plane grating to split the second light beam at the first angle and the second angle through the micro stepping motor so as to obtain a third diffraction light beam and a fourth diffraction light beam;
The linear array detector is also used for detecting the third diffraction light beam and the fourth diffraction light beam respectively to obtain a first background spectrum and a second background spectrum, wherein the first background spectrum and the second background spectrum comprise a first spectrum overlapping region;
the linear array detector is also used for detecting the spectrum of the first narrowband light source;
the linear array detector is also used for determining the spectrum of the object to be detected according to the spectrum of the first narrowband light source, the first mixed spectrum, the second mixed spectrum, the first background spectrum and the second background spectrum.
Illustratively, the broad spectrum light source includes an active illumination light source, such as a halogen tungsten light active light source, and the narrowband light source includes a light-emitting diode (LED) light source, such as a narrowband LED calibration light source.
It will be appreciated that the mixed spectrum includes the background spectrum and the response of the first narrowband light source after illuminating the surface of the object to be measured, which is diffusely reflected into the field of view of the instrument. The background spectrum comprises a response generated by any light except the wide-spectrum light source entering the instrument view field or a response generated by the surface reflection of the object to be detected entering the instrument view field, and a response generated by the first narrow-band light source entering the instrument view field.
It should be noted that, the spectrum of the first narrowband light source may be detected by the linear array detector alone, or may be obtained by the linear array detector when detecting the mixed spectrum or the background spectrum. The first spectrum overlapping region corresponds to a spectrum of the first narrowband light source, which may be understood as including a spectrum of the first narrowband light source in the first spectrum overlapping region, where the spectrum of the first narrowband light source is used to splice adjacent first mixed spectrum and second mixed spectrum, and is used to splice adjacent second background spectrum and third background spectrum.
In the technical scheme, the first narrow-band light source is additionally arranged in the miniature infrared spectrometer, the acquisition of the multi-section mixed spectrum and the multi-section background spectrum is sequentially completed, the linear array detector is utilized to realize the splicing of the multi-section spectrum, and then the spectrum of the object to be detected is obtained, so that the volume of the spectrum instrument can be compressed, and the effective detection of the wide spectrum range can be ensured.
With reference to the first aspect, in certain implementations of the first aspect, a band range of the first spectral overlap region is greater than or equal to a band range of a spectrum of the first narrowband light source.
Illustratively, the band range of the first spectrum overlapping region is 1000nm to 1600nm, and the band range of the spectrum of the corresponding first narrowband light source is greater than or equal to 1000nm and less than or equal to 1600nm, for example, 1200nm to 1400nm.
With reference to the first aspect, in certain implementation manners of the first aspect, the linear array detector is further configured to:
splicing the first mixed spectrum and the second mixed spectrum according to the spectrum of the first narrowband light source to obtain a full-section mixed spectrum;
splicing the first background spectrum and the second background spectrum according to the spectrum of the first narrowband light source to obtain a full-segment background spectrum;
and determining the spectrum of the object to be detected according to the mixed spectrum of the whole section and the background spectrum of the whole section.
In this implementation manner, the linear array detector can realize the splicing of multiple sections of mixed spectrums (for example, a first mixed spectrum and a second mixed spectrum) and the splicing of multiple sections of background spectrums (for example, a first background spectrum and a second background spectrum) through the spectrums of a narrow-band light source (for example, a first narrow-band light source), so that the full-band spectrum of the object to be detected is determined, the volume of the spectrum instrument can be compressed, and the effective detection of a wide-spectrum range can be ensured.
With reference to the first aspect, in certain implementations of the first aspect, the linear array detector is further configured to:
determining a first part spectrum of the object to be detected according to the first mixed spectrum and the first background spectrum, and determining a second part spectrum of the object to be detected according to the second mixed spectrum and the second background spectrum;
and according to the spectrum of the first narrowband light source, splicing the first part of spectrum of the object to be detected and the second part of spectrum of the object to be detected, and determining the spectrum of the object to be detected.
In this implementation manner, the linear array detector can realize the splicing of partial spectrums (for example, a first partial spectrum of the object to be detected and a second partial spectrum of the object to be detected) of multiple segments of the object to be detected through the spectrums of the narrow-band light source (for example, a first narrow-band light source), so as to determine the full spectrum of the object to be detected, and ensure the effective detection of a wide spectrum range.
With reference to the first aspect, in certain implementation manners of the first aspect, the linear array detector is further configured to:
the first system spectrum is calibrated from the pre-stored spectrum of the first narrowband light source, the first system spectrum comprising a full segment of the background spectrum.
Illustratively, with the cover of the instrument lens closed, the broad spectrum light source (e.g., a halogen tungsten active light source) is turned off and the first narrowband light source (e.g., narrowband LED calibration light source 105) is turned on, collecting the first system spectrum.
It will be appreciated that the first system spectrum includes a first narrowband light source incident instrument field of view, and the response generated on the linear array detector, i.e., the spectral position of the narrowband LED calibration light source.
In the implementation manner, because the spectrum of the narrow-band LED calibration light source is fixed when leaving the factory, whether the instrument is offset or not or whether the light path needs to be further adjusted can be determined by comparing the collected first system spectrum with the spectrum of the pre-stored narrow-band LED calibration light source when leaving the factory, and the accuracy, the spectrum quality and the stability of the obtained wide-spectrum are further ensured.
With reference to the first aspect, in certain implementations of the first aspect, the linear array detector is further configured to:
a second system spectrum is calibrated based on a relative wavelength relationship between the spectrum of the pre-stored broad spectrum light source and the spectrum of the first narrowband light source, the second system spectrum comprising a full segment of the mixed spectrum.
Illustratively, in the case where the cover of the instrument lens is closed, the first narrowband light source is kept in an on state, while the broad spectrum light source is turned on, and the second system spectrum is acquired.
It will be appreciated that the second system spectrum comprises both the reflectance spectrum of the surface of the object to be measured and the spectrum of the first narrowband light source, and that the relative wavelength relationship of the spectra of the first narrowband light source and the broad spectrum light source can be determined.
In this implementation, since the relative position between the spectrum of the narrowband LED calibration light source and the spectrum of the active light source of the halogen lamp is fixed at the time of shipment, by comparing the second system spectrum with the pre-stored relative position between the spectrum of the narrowband LED calibration light source and the spectrum of the active light source of the halogen lamp at the time of shipment, it can be determined whether the broad spectrum light source is aged or not.
In the application, the spectrum of the narrow-band LED calibration light source is introduced, so that the registration of spectrum positions and wavelength calibration are facilitated. This is because the calibration light source has much diffuse reflection light intensity compared with the object to be measured, and thus the spectrum of the first narrowband light source in the acquired first system spectrum and second system spectrum is relatively obvious.
With reference to the first aspect, in certain implementations of the first aspect, the at least one narrowband light source further includes a second narrowband light source, the second narrowband light source being different from the first narrowband light source in a center wavelength; wherein:
The scanning grating is also used for controlling the plane grating to split the mixed light beam of the first light beam and the second light beam at a third angle through the micro stepping motor to obtain a fifth diffraction light beam;
the linear array detector is also used for detecting the fifth diffracted light beam to obtain a third mixed spectrum, the second mixed spectrum and the third mixed spectrum comprise a second spectrum superposition area, and the second spectrum superposition area corresponds to the spectrum of the second narrowband light source;
the scanning grating is also used for controlling the plane grating to split the second light beam at a third angle through the micro stepping motor to obtain a sixth diffraction light beam;
the linear array detector is also used for detecting the sixth diffracted light beam to obtain a third background spectrum, and the second background spectrum and the third background spectrum comprise a second spectrum superposition area;
the linear array detector is also used for detecting the spectrum of the second narrow-band light source;
the linear array detector is further used for determining the full-segment spectrum of the object to be detected according to the spectrum of the first narrow-band light source, the spectrum of the second narrow-band light source, the first mixed spectrum, the second mixed spectrum and the third mixed spectrum, and the first background spectrum, the second background spectrum and the third background spectrum.
It should be noted that, the spectrum of the second narrowband light source may be detected by the linear array detector alone, or may be obtained by the linear array detector when detecting the mixed spectrum or the background spectrum. The second spectrum overlapping region corresponds to the spectrum of the second narrowband light source, which can be understood as including the spectrum of the second narrowband light source in the second spectrum overlapping region, where the spectral line of the second narrowband light source is used for splicing the adjacent second mixed spectrum and the adjacent third mixed spectrum, and for splicing the adjacent second background spectrum and the adjacent third background spectrum.
In the implementation mode, the second narrowband light source is additionally arranged in the miniature infrared spectrometer, the collection of the third mixed spectrum and the third background spectrum is sequentially completed, and then the linear array detector is utilized to splice the multi-section mixed spectrum and the multi-section background spectrum, so that the spectrum of the object to be detected is obtained, and the effective detection of a wider spectrum range can be ensured.
It should be noted that, the splicing between the second mixed spectrum and the third mixed spectrum, and the splicing between the second background spectrum and the third background spectrum may refer to the splicing between the first mixed spectrum and the second mixed spectrum, and the splicing between the first background spectrum and the second background spectrum in the above method, and for brevity, will not be described in detail here.
In the application, the spectrum is spliced mainly by means of narrowband light sources (for example, a first narrowband light source and a second narrowband light source) in the overlapping area of adjacent spectrum segments, and the absolute position of the spectrum imaged on the detector linear array is not relied on any more, so that the positioning error or the repetition error existing when the scanning grating rotates can be compensated.
It should be understood that the above spectra of the first narrowband light source, the spectra of the second narrowband light source, the first mixed spectrum, the second mixed spectrum, and the third mixed spectrum, the first background spectrum, the second background spectrum, and the third background spectrum are only examples given for ease of understanding the solution, and should not constitute any limitation to the technical solution of the present application. That is, the number of the narrow-band light source, the mixed spectrum, and the background spectrum is not particularly limited in the present application.
With reference to the first aspect, in certain implementations of the first aspect, a band range of the second spectral overlap region is greater than or equal to a band range of a spectrum of the second narrowband light source.
Illustratively, the second spectrum overlapping region has a band range of 1600nm to 2000nm, and the corresponding second narrowband light source has a band range of spectrum greater than or equal to 1600nm and less than or equal to 2000nm, such as 1800nm to 2000nm.
With reference to the first aspect, in certain implementations of the first aspect, the at least one narrowband light source is uniformly disposed at an edge of a field of view of the miniature infrared spectrometer.
In this implementation, the position of the narrowband light source should be as close as possible to the field of view of the spectroscopic instrument, so that the instrument can be guaranteed to detect the object to be detected while receiving the spectrum from the narrowband light source. Meanwhile, shielding of diffuse reflection light on the surface of the object to be detected should be avoided as much as possible, so that energy loss of the object to be detected is reduced. Moreover, the illumination of the narrowband light source to the object to be measured should be avoided as much as possible, i.e. the spectrum of the narrowband light source is a superimposed spectrum after being reflected by the object to be measured.
In other words, the narrow-band light source is not placed on the optical path formed between the object 104 to be measured and the light shielding tube 106, the converging lens 107, the slit diaphragm 108, and the plane mirror 109 as much as possible.
In one example, to increase energy utilization, at least one narrowband light source may be uniformly disposed within an inside edge region of a window sheet inside a spectroscopic instrument.
With reference to the first aspect, in certain implementations of the first aspect, the micro-stepper motor comprises an open loop motor.
In the implementation mode, the miniature stepping motor in the scanning grating is driven by an open-loop motor, so that the volume of the spectrometer is further miniaturized, and the cost is reduced.
With reference to the first aspect, in certain implementations of the first aspect, the at least one narrowband light source comprises a monochromatic light emitting diode, LED, light source.
In this implementation, the miniature stepper motor in the scanning grating is driven with an open loop motor, so that the volume of the spectrometer is reduced, and the cost is reduced. Meanwhile, the wavelength range of monochromatic light of the monochromatic LED is narrower, so that the positioning precision of the spectrometer can achieve the splicing effect brought by a high-precision closed-loop motor, and further a high-precision spectrum is obtained. In other words, compared with the closed-loop motor, which is limited by size and cost, the volume and cost are reduced, and the acquisition of high-precision spectrum can be ensured.
In a second aspect, there is provided an electronic device comprising: a micro infrared spectrometer as described in any of the implementations of the first aspect above.
In a third aspect, an electronic device is provided, comprising: the device comprises a processor and a micro infrared spectrometer, wherein the micro infrared spectrometer comprises a wide-spectrum light source, at least one narrow-band light source, a scanning grating and a linear array detector, the scanning grating comprises a planar grating and a micro stepping motor, and the at least one narrow-band light source comprises a first narrow-band light source; wherein:
the wide-spectrum light source is used for emitting a first light beam to the surface of the object to be detected, and the first light beam is incident to the plane grating through diffuse reflection of the surface of the object to be detected;
the first narrow-band light source is used for emitting a second light beam to the plane grating;
the scanning grating is used for controlling the plane grating to split the mixed light beam of the first light beam and the second light beam at a first angle and a second angle through the micro stepping motor so as to obtain a first diffraction light beam and a second diffraction light beam;
the linear array detector is used for respectively detecting the first diffraction light beam and the second diffraction light beam to obtain a first mixed spectrum and a second mixed spectrum, wherein the first mixed spectrum and the second mixed spectrum comprise a first spectrum superposition area, and the first spectrum superposition area corresponds to the spectrum of the first narrowband light source;
the scanning grating is also used for controlling the plane grating to split the second light beam at the first angle and the second angle through the micro stepping motor so as to obtain a third diffraction light beam and a fourth diffraction light beam;
The linear array detector is also used for detecting the third diffraction light beam and the fourth diffraction light beam respectively to obtain a first background spectrum and a second background spectrum, wherein the first background spectrum and the second background spectrum comprise a first spectrum overlapping region;
the linear array detector is also used for detecting the spectrum of the first narrowband light source;
a processor for receiving the spectrum of the first narrowband light source, the first mixed spectrum and the second mixed spectrum, and the first background spectrum and the second background spectrum from the miniature infrared spectrometer;
the processor is further configured to determine a spectrum of the object to be measured according to the spectrum of the first narrowband light source, the first mixed spectrum, the second mixed spectrum, and the first background spectrum and the second background spectrum.
With reference to the third aspect, in certain implementations of the third aspect, a band range of the first spectral overlap region is greater than or equal to a band range of a spectrum of the first narrowband light source.
With reference to the third aspect, in certain implementations of the third aspect, the processor is further configured to:
splicing the first mixed spectrum and the second mixed spectrum according to the spectrum of the first narrowband light source to obtain a full-section mixed spectrum;
splicing the first background spectrum and the second background spectrum according to the spectrum of the first narrowband light source to obtain a full-segment background spectrum;
And determining the spectrum of the object to be detected according to the mixed spectrum of the whole section and the background spectrum of the whole section.
With reference to the third aspect, in certain implementations of the third aspect, the processor is further configured to:
determining a first part spectrum of the object to be detected according to the first mixed spectrum and the first background spectrum, and determining a second part spectrum of the object to be detected according to the second mixed spectrum and the second background spectrum;
and according to the spectrum of the first narrowband light source, splicing the first part of spectrum of the object to be detected and the second part of spectrum of the object to be detected, and determining the spectrum of the object to be detected.
With reference to the third aspect, in certain implementations of the third aspect, the processor is further configured to:
and calibrating a first system spectrum according to the pre-stored spectrum of the first narrowband light source, wherein the first system spectrum comprises a full-segment background spectrum.
With reference to the third aspect, in certain implementations of the third aspect, the processor is further configured to:
and calibrating a second system spectrum according to the relative wavelength relation between the spectrum of the pre-stored broad spectrum light source and the spectrum of the first narrow-band light source, wherein the second system spectrum comprises a full-segment mixed spectrum.
With reference to the third aspect, in certain implementations of the third aspect, the at least one narrowband light source further includes a second narrowband light source, the second narrowband light source being different from the first narrowband light source in a center wavelength; wherein:
The scanning grating is also used for controlling the plane grating to split the mixed light beam of the first light beam and the second light beam at a third angle through the micro stepping motor to obtain a fifth diffraction light beam;
the linear array detector is also used for detecting the fifth diffracted light beam to obtain a third mixed spectrum, the second mixed spectrum and the third mixed spectrum comprise a second spectrum superposition area, and the second spectrum superposition area corresponds to the spectrum of the second narrowband light source;
the scanning grating is also used for controlling the plane grating to split the second light beam at a third angle through the micro stepping motor to obtain a sixth diffraction light beam;
the linear array detector is also used for detecting the sixth diffracted light beam to obtain a third background spectrum, and the second background spectrum and the third background spectrum comprise a second spectrum superposition area;
the linear array detector is also used for detecting the spectrum of the second narrow-band light source;
the processor is further used for receiving the spectrum of the second narrowband light source, the third mixed spectrum and the third background spectrum from the miniature infrared spectrometer;
the processor is further configured to determine a spectrum of the object to be measured according to the spectrum of the first narrowband light source, the spectrum of the second narrowband light source, the first mixed spectrum, the second mixed spectrum, and the third mixed spectrum, and the first background spectrum, the second background spectrum, and the third background spectrum.
With reference to the third aspect, in certain implementations of the third aspect, a band range of the second spectral overlap region is greater than or equal to a band range of a spectrum of the second narrowband light source.
Drawings
Fig. 1 is a schematic structural diagram of a micro infrared spectrometer according to an embodiment of the present application.
Fig. 2 is a schematic flow chart of a method for acquiring and splicing multiple spectrum in a time-sharing manner according to an embodiment of the present application.
Fig. 3 is a schematic flow chart of another method for acquiring and splicing multi-segment spectrum in a time-sharing manner according to an embodiment of the present application.
Fig. 4 is a schematic diagram of an imaging position and a stitching position of a multi-segment spectrum according to an embodiment of the present application.
Fig. 5 is a schematic diagram of a result of multi-segment spectrum stitching according to an embodiment of the present application.
Fig. 6 is a schematic diagram of the result of another multi-segment spectral stitching provided in an embodiment of the present application.
Fig. 7 is a schematic diagram of the result of another multi-segment spectral stitching provided in an embodiment of the present application.
Fig. 8 is a flow chart illustrating a method of spectral self-calibration according to an embodiment of the present application.
Fig. 9 is a schematic structural diagram of an electronic device provided in an embodiment of the present application.
Detailed Description
The technical solutions in the present application will be described below with reference to the accompanying drawings.
The spectrum analyzer is an important component of modern optical instruments, and qualitative and quantitative analysis of the structure and components of substances is realized by applying the spectroscopic principle. The infrared spectrometer is one of the most important optical instruments, mainly applies the optical technology and the spectral detection technology principle to observe, analyze and process the structure and composition of the substance, has the advantages of high analysis precision, large measurement range, high measurement speed, small sample consumption and the like, is widely used in the departments of metallurgy, geology, petrochemical industry, medicine and health, environmental protection and the like, is also an essential instrument for aerospace, universe exploration, resource and hydrological survey, and has extremely important application value and wide market prospect.
In the spectrum detection process, in order to obtain a spectrum result with higher precision, the improved non-crossed asymmetric Czerny-Turner (CT) structure near infrared micro spectrometer or the non-scanning CT structure spectrometer is realized by adopting a closed-loop motor with higher cost. In contrast, in order to obtain a higher-precision spectrum result, a scanning grating designed based on micro-opt-electro-ro-mechanical system (MOEMS) technology requires higher processing precision and longer movement optical path (greater than 100 μm, very difficult process), and the spectrometer volume is difficult to further compress, the service life and accuracy of the instrument are limited, and the cost is higher.
In view of this, the application provides a miniature infrared spectrometer based on scanning grating and a spectrum self-calibration method, which can further compress the volume of the spectrometer, reduce the cost, realize wide-spectrum range detection and ensure the spectrum quality and stability. The spectrum instrument disclosed by the application can meet the requirements of people on the aspects of spectrum precision, light and small portability, rapid detection, real-time online and the like of the miniature spectrum instrument, and can be applied to a plurality of fields such as environment monitoring, field exploration, biological medical treatment, agricultural production, food safety, health monitoring, intelligent household appliances, military modernization and the like, and meets the spectrum detection requirements of rapid growth in daily life such as gem identification, fruit sugar degree detection, food composition, food freshness detection, distinguishing medicines, noninvasive blood sugar detection, indoor natural gas leakage detection, furniture harmful volatile matter detection and the like.
For the convenience of understanding the technical solutions of the present application, some concepts and technologies related to the present application will be briefly described.
1. Coupling of
Coupled may be understood as directly coupled and/or indirectly coupled, and "coupled connection" may be understood as a direct coupled connection and/or an indirectly coupled connection. The direct coupling may also be referred to as "electrical connection", which is understood to mean that components are in physical contact and electrically conductive, or may be understood to mean that different components in a circuit configuration are connected by physical lines, such as copper foil or wires of a printed circuit board (printed circuit board, PCB), which may transmit electrical signals. An "indirect coupling" is understood to mean that the two conductors are electrically conductive by means of a space/no contact. Indirect coupling may also be referred to as capacitive coupling, for example, where signal transmission is achieved by coupling between two spaced apart conductive members to form an equivalent capacitance.
2. Spectrum splicing
Splicing can mean that different individuals are connected together into a whole, and the application mainly refers to spectrum connection of different spectrum sections. Splicing the spectrum A and the spectrum B can be understood as splicing the spectrum A and the spectrum B end to end by using a normalization algorithm or removing the spectrum in the overlapped band range. For example, when the wavelength range of the spectrum A is 390nm to 500nm and the wavelength range of the spectrum B is 500nm to 780nm, the wavelength range after spectrum splicing is 390nm to 780nm. For another example, if the wavelength range of the spectrum A is 390nm to 600nm and the wavelength range of the spectrum B is 550nm to 780nm, the wavelength range after spectrum splicing is still 390nm to 780nm.
3. Infrared light
Infrared light generally refers to Infrared (IR), which is a generic term for electromagnetic waves having frequencies between microwave and visible light, frequencies between 0.3THz and 400THz, corresponding to radiation in vacuum having wavelengths between 760nm and 1000 um. It is invisible light with a lower frequency than red light.
4. Scanning grating
A grating (grating) is also called a diffraction grating, and is an optical element that disperses (splits) light into spectra by using a multi-slit diffraction principle, and is composed of a large number of parallel slits having equal widths and equal pitches. The different wavelength spectrums in the same-stage grating spectrum are not overlapped, but are sequentially arranged according to the sequence of the wavelengths, so that a series of discrete spectrums are formed. Thus, the composite light of various wavelengths, which are incident together in a mixed manner, is separated from each other after being diffracted by the grating, i.e., the spectroscopic principle of the diffraction grating. The scanning grating in the application is formed by coupling a planar blazed grating and a micro stepping motor, and the time-sharing acquisition of the multi-section spectrum can be realized through multi-angle light splitting of the scanning grating.
5. Diaphragm
The aperture is an edge, frame or specially provided apertured barrier of an optical element in the optical train. The aperture is used to limit the imaging beam size or imaging spatial unit.
6. Focus point
The focus refers to the convergence point of parallel light rays after being refracted by a lens or reflected by a curved mirror. The focal points include an image-side focal point and an object-side focal point. The object side focus is the object position at infinity, and the image side focus is the image position at infinity.
7. Stray light
Stray light refers to unwanted light projected onto the image plane by the optical system that does not participate in imaging.
8. Visual field
The field of view represents the maximum range that can be observed by the camera, the larger the field of view, the larger the range of observation. Typically expressed in terms of an angle, such as a viewing angle or field angle. The field angle is a measure of the angular range over which the photosensitive element receives an image. The lens of the optical instrument is taken as the vertex, and the object image of the measured object can pass through the included angle formed by the two edges of the maximum range of the lens.
In order to facilitate understanding of the technical solutions of the present application, the following description is made.
In the present application, "at least one" means one or more, and "a plurality" means two or more. In the text description of the present application, the character "/", generally indicates that the associated object is an or relationship.
In the present application, "first", "second" and various numerical numbers (e.g., #1, # 2) are merely for convenience of description and are not intended to limit the scope of the embodiments of the present application. The following sequence numbers of the processes do not mean the sequence of execution, and the execution sequence of the processes should be determined by the functions and internal logic of the processes, and should not constitute any limitation on the implementation process of the embodiments of the present application.
In this application, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In this application, "exemplary" or "such as" and the like are used to indicate examples, illustrations, or descriptions, and embodiments or designs described as "exemplary" or "such as" should not be construed as being preferred or advantageous over other embodiments or designs. The use of the word "exemplary" or "such as" is intended to present the relevant concepts in a concrete fashion to facilitate understanding.
In the present application, the term "central" indicates an orientation or positional relationship based on that shown in the drawings, for convenience of description and simplification of the description only, and does not indicate or imply that the apparatus or element in question must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application.
In this application, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature "above," "over" and "on" a second feature may be a first feature directly above or obliquely above the second feature, or simply indicate that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature. It should be understood that the terms "center," "upper," "lower," and the like indicate an orientation or a positional relationship based on that shown in the drawings, and are merely for convenience of description and to simplify the description, and do not necessarily indicate or refer to a device or element having to have a particular orientation, be configured and operated in a particular orientation, and thus should not be construed as limiting the present application.
In this application, unless explicitly stated and limited otherwise, the terms "mounted," "fixed," "disposed," and the like are to be construed broadly and when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
The technical scheme provided by the application will be described in detail below with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of a micro infrared spectrometer 100 according to an embodiment of the present application. As shown in fig. 1, the micro infrared spectrometer 100 includes: a halogen tungsten lamp active light source 101, a scanning grating, a small linear array detector 114, and a narrow band LED calibration light source 105.
The scanning grating includes a planar grating 111 and a micro stepper motor 112. Illustratively, the planar grating 111 is disposed above the micro stepper motor 112, and the scanning grating may be designed by coupling the planar grating 111 and the micro stepper motor 112.
In one example, a halogen tungsten lamp active light source 101 (i.e., a broad spectrum light source) is configured to emit a light signal #1 (i.e., a first light beam) onto a surface of an object 104 to be measured, and the first light beam is incident on a planar grating 111 through diffuse reflection on the surface of the object to be measured;
A narrow-band LED calibration light source 105 (i.e., a first narrow-band light source) for emitting an optical signal #2 (i.e., a second light beam) to the planar grating 111;
a scanning grating for controlling the plane grating 111 to split the mixed light of the optical signal #1 and the optical signal #2 at a first angle and a second angle by the micro stepping motor 112, so as to obtain a first diffraction beam and a second diffraction beam;
the linear array detector 114 is configured to detect the first diffracted beam and the second diffracted beam, and obtain a first mixed spectrum and a second mixed spectrum, where the first mixed spectrum and the second mixed spectrum include a first spectrum overlapping region, and the first spectrum overlapping region corresponds to a spectrum of the first narrowband light source;
the scanning grating is further used for controlling the plane grating 111 to split the optical signal #2 at a first angle and a second angle through the micro stepping motor 112 to obtain a third diffraction beam and a fourth diffraction beam;
the linear array detector 114 is further configured to detect the third diffracted beam and the fourth diffracted beam, respectively, to obtain a first background spectrum and the second background spectrum, where the first background spectrum and the second background spectrum include the first spectrum overlapping region;
the linear array detector is also used for determining the spectrum of the object to be detected according to the spectrum of the first narrowband light source, the first mixed spectrum, the second mixed spectrum, the first background spectrum and the second background spectrum.
Illustratively, the active light source 101 of the halogen lamp may be near-infrared light or infrared light, and the corresponding wavelength may be 900nm to 2500nm. The number of the narrow-band LED calibration light sources 105 may be one or more (for example, N-1), wherein the center wavelengths of any two narrow-band LED calibration light sources 105 are different from each other, and the wavelength range of the narrow-band LED calibration light sources 105 is less than or equal to the wavelength range of the overlapping region of the adjacent two-end spectra. For example, the wavelength ranges of the adjacent two spectra are 900nm to 1500nm and 1200nm to 1800nm, respectively, and the wavelength range of the spectrum overlapping region is 1200nm to 1500nm, and the wavelength range of the corresponding narrow-band LED calibration light source 105 belongs to 1200nm to 1500nm, may be 1200nm to 1400nm, may be 1300nm to 1500nm, and may be 1200nm to 1500nm, which is not particularly limited in the present application.
It should be appreciated that the micro stepper motor 112 operates on the principle of: the motor driver controls the winding of the stepping motor through an internal logic circuit according to external control pulse and direction signals, and the winding is electrified in the forward direction or the reverse direction at a certain time sequence, so that the forward direction or the reverse direction operation of the motor is realized.
Illustratively, the micro stepper motor may be an open loop motor.
A small linear array detector 114 may be placed at the focal plane of the converging mirror 113 for measuring the light intensity of each wavelength image point. For example, the small linear array detector 114 may be a charge coupled device (charge coupled device, CCD) array or other type of photodetector array. The small linear array detector 114 may be, for example, a combination of M row 1 column detector pixels (photodiodes (PDs)). In this implementation, the use of a small linear array detector 114 may reduce the number of rotations of the micro stepper motor 114, reducing errors due to mechanical structure.
The small linear array detector 114 may be connected to a readout circuit (sense circuit) for reading the spectral signal on the small linear array detector 114. It should be understood that the readout circuit is mainly composed of a MOS transistor and a capacitor compatible with the MOS process.
Wherein the position of the narrow band LED calibration light source 105 should meet the following requirements:
(1) In order to ensure that the instrument detects the object 104 to be detected and can receive the narrow-band spectrum from the narrow-band LED calibration light source 105, the position of the narrow-band LED calibration light source 105 should be installed in the field of view of the spectrum instrument as much as possible;
(2) In order to reduce the energy loss of the object 104 to be measured, the position of the narrow-band LED calibration light source 105 should be avoided as much as possible from shielding diffuse reflection light on the surface of the object 104 to be measured;
(3) The mounting position of the narrow-band LED calibration light source 105 should avoid the illumination of the object 104 to be measured by the narrow-band LED calibration light source 105 as much as possible, i.e. to avoid that the narrow-band spectrum is a superimposed spectrum after being reflected by the object 104 to be measured.
The narrow band LED calibration light source 105 may be placed at the edge of the field of view of the spectroscopic instrument, according to the placement requirements above. In other words, the narrow band LED calibration light source 105 should not be placed on the optical path formed between the object 104 to be measured and the light shielding barrel 106, the converging lens 107, the slit diaphragm 108, and the plane mirror 109.
Illustratively, to increase the energy utilization of the light beam, a narrow band LED calibration light source 105 may be disposed at the inside edge region of the window sheet 103. Alternatively, when the micro infrared spectrometer 100 includes a plurality of narrow band LED calibration light sources 105, the plurality of narrow band LED calibration light sources 105 may be uniformly placed at the inner edge of the window sheet 103. It should be appreciated that the center wavelengths of any two narrowband LED calibration light sources 105 are different.
In the present application, the narrow-band LED calibration light source 105 may be used to splice multiple spectra, enabling broad-band range detection.
In one example, the linear array detector 114 is further configured to splice the first mixed spectrum and the second mixed spectrum according to the spectrum of the first narrowband light source, to obtain a full-segment mixed spectrum; splicing the first background spectrum and the second background spectrum according to the spectrum of the first narrowband light source to obtain a full-segment background spectrum; and determining the spectrum of the object to be detected according to the mixed spectrum of the whole section and the background spectrum of the whole section.
In another example, the linear array detector 114 is further configured to determine a first partial spectrum of the object to be measured according to the first mixed spectrum and the first background spectrum, and determine a second partial spectrum of the object to be measured according to the second mixed spectrum and the second background spectrum; and according to the spectrum of the first narrowband light source, splicing the first part of spectrum of the object to be detected and the second part of spectrum of the object to be detected, and determining the spectrum of the object to be detected.
In the present application, the narrowband LED calibration light source 105 may also be used to calibrate the spliced multiple spectra, so as to ensure the accuracy of the acquired spectrum band.
In one example, the linear array detector 114 is configured to calibrate a first system spectrum from a pre-stored spectrum of the narrowband LED calibration light source 105, the first system spectrum comprising a full segment of the background spectrum.
It will be appreciated that with the cover of the instrument lens closed, this first system spectrum includes the response of the narrowband LED calibration light source 105 incident on the instrument field of view, generated on the linear array detector array 114, i.e., the spectral position of the narrowband LED calibration light source.
In another example, the linear array detector 114 is further configured to calibrate a second system spectrum according to a relative wavelength relationship between the spectrum of the pre-stored active halogen lamp light source 101 and the spectrum of the narrow band LED calibration light source 105, where the second system spectrum includes the full segment of the mixed spectrum.
It will be appreciated that with the cover of the instrument lens closed, the second system spectrum contains both the reflectance spectrum of the object surface 104 to be measured and the spectrum of the narrowband LED calibration light source 105, and that the relative wavelength relationship between the spectrum of the active light source 101 of the halogen lamp and the spectrum of the narrowband LED calibration light source 105 can be determined.
Optionally, the at least one narrowband light source further comprises a second narrowband light source, the second narrowband light source being different from the first narrowband light source in center wavelength; wherein:
the scanning grating is also used for controlling the plane grating to split the mixed light beam of the first light beam and the second light beam at a third angle through the micro stepping motor to obtain a fifth diffraction light beam;
the linear array detector is also used for detecting the fifth diffracted light beam to obtain a third mixed spectrum, the second mixed spectrum and the third mixed spectrum comprise a second spectrum superposition area, and the second spectrum superposition area corresponds to the spectrum of the second narrowband light source;
the scanning grating is also used for controlling the plane grating to split the second light beam at a third angle through the micro stepping motor to obtain a sixth diffraction light beam;
the linear array detector is also used for detecting the sixth diffracted light beam to obtain a third background spectrum, and the second background spectrum and the third background spectrum comprise a second spectrum superposition area;
The linear array detector is further used for determining the spectrum of the object to be detected according to the spectrum of the first narrow-band light source, the spectrum of the second narrow-band light source, the first mixed spectrum, the second mixed spectrum and the third mixed spectrum, and the first background spectrum, the second background spectrum and the third background spectrum.
In addition, the micro infrared spectrometer 100 further includes: an ellipsoidal reflector 102, a window sheet 103, a shading barrel 106, a converging lens 107, a slit diaphragm 108, a plane mirror 109, a collimator lens 110, and a converging lens 113. Wherein:
the ellipsoidal reflector 102 adopts a parabolic curved surface design, and is used for converging the light signal #1 emitted by the active light source 101 of the halogen tungsten lamp and reducing the light loss. The window sheet 103 is located above the light shielding tube 106 and is a transparent optical flat that functions to protect electronic components, sensors, or semiconductor elements in the optical path. The light shielding tube 106 is used for shielding part of stray light outside the instrument view field, the converging lens 107 is located between the light shielding tube 106 and the slit diaphragm 108, the focus of the converging lens 107 is located at the center of the slit diaphragm 108, and the slit diaphragm 108 is used for shielding part of stray light outside the instrument view field. That is, the light beam is in a straight line on the transmission light path of the light shielding tube 106, the converging lens 107, and the slit diaphragm 108. The plane mirror 109 is used to reflect the optical signal transmitted through the slit diaphragm 108. The collimator lens 110 is used to convert the received reflected light beam into parallel light, and the collimator lens 110 may be a separate lens or a mirror. The converging mirror 113 is used to focus the diffracted outgoing beam and finally is incident on the small linear array detector 114.
It should be noted that, the micro infrared spectrometer 100 shown in fig. 1 is only illustrated for easy understanding, and the relative distances between the components and the shapes and dimensions of the components are not necessarily the same as or scaled to the actual objects.
The principle of operation of the micro infrared spectrometer 100 is described in detail below with reference to fig. 1.
In the technical scheme of the application, the micro infrared spectrometer 100 is based on a crossed asymmetric CT light path structure, performs multi-angle light splitting through a scanning grating, achieves multi-section spectrum time-sharing convergence on a small linear array detector 114, adopts a narrow-band LED calibration light source 105 to assist in spectrum splicing and calibration, and utilizes a halogen tungsten lamp active light source 101 to perform active illumination in cooperation with an ellipsoidal reflector 102, so as to finally complete wide-spectrum detection.
It should be understood that the CT optical path structure includes a slit, two concave mirrors (collimator and focusing mirrors), a planar diffraction grating, and a CCD. CCD is one kind of photoelectric sensor and consists of photosensitive pixels in linear arrangement. Specifically, incident light is incident from a slit, collimated by a collimating mirror (collimating mirror), then is projected to a plane grating, diffraction is generated on the plane grating, the grating separates light rays with different wavelengths, and finally, the separated light rays are focused and irradiated to a CCD (charge coupled device) through a focusing mirror (focusing mirror) to collect and analyze corresponding signals.
In one possible implementation, the active light source 101 of the halogen lamp and the narrow band LED calibration light source 105 are turned on simultaneously. Wherein the narrowband LED calibration light source 105 has directionality and is directed toward the interior of the instrument. Specifically, the active light source 101 of the halogen tungsten lamp emits a light signal #1, which is converged by the ellipsoidal reflector 102, and then exits through the window sheet 103, and irradiates the surface of the object 104 to be measured. Light diffusely reflected by the surface of the object 104 to be measured, i.e. the first light beam. The narrow-band LED calibration light source 105 emits a light signal #2, and the light signal #2 is incident to the condensing lens 107 through the light-shielding barrel 106 together with the first light beam, and condensed at the center of the slit diaphragm 108. The first light beam passing through the slit diaphragm 108 is incident on the plane mirror 109, the reflected first light beam is firstly incident on the collimating mirror 110 for collimation, the collimated first light beam is then incident on the plane grating 111 for diffraction and light splitting, the diffracted emergent light is then incident on the converging mirror 113 for converging, and the converged spectral band is finally incident on the small linear array detector 114 for imaging.
In another possible implementation, the halogen active light source 101 is off and the narrow band LED calibration light source 105 is on. Specifically, the narrow-band LED calibration light source 105 emits the light signal #2, and the light signal #2 is first incident to the condensing lens 107 through the light-shielding barrel 106 and condensed at the center of the slit diaphragm 108. The first light beam passing through the slit diaphragm 108 is incident on the plane mirror 109, the reflected first light beam is firstly incident on the collimating mirror 110 for collimation, the collimated first light beam is then incident on the plane grating 111 for diffraction and light splitting, the diffracted emergent light is then incident on the converging mirror 113 for converging, and the converged spectral band is finally incident on the small linear array detector 114 for imaging.
Based on the two implementations, the path of the light signal #1 emitted by the active light source 101 of the halogen tungsten lamp is a-b-e-f-g-h, and the path of the light signal #2 emitted by the narrow-band LED calibration light source 105 is c-d-e-f-g-h. Alternatively, paths b and d may be completely coincident when the halogen active light source 101 and the narrow band LED calibration light source 105 are on at the same time.
The grating light splitting and the corresponding spectrum acquisition at a certain angle are completed, then the micro stepping motor 112 is controlled to drive the plane grating 114 to rotate to the next light splitting angle, and the steps are repeated continuously to complete the grating light splitting and the spectrum acquisition at the angle. And so on until full spectrum spectral detection is covered.
Illustratively, assuming that the rotation angle of the micro stepping motor 112 is 0 to a degrees, there are two spectroscopic angles of the corresponding planar grating 111, that is, there are two scanning positions of the planar grating, the coverage wavelength range of the spectrometer is 900nm to 1500nm, and the wavelength range of the line detector 114 (e.g., photodiode PD) is 300nm. When the first grating beam splitting is performed, the rotation angle of the stepping motor can be A/2 degrees, the plane grating is controlled to rotate to the grating position 1 for beam splitting, and the corresponding acquired spectrum wavelength range is 900-1200 nm; when the grating is split for the second time, the stepping motor is sequentially operated to A degrees, the plane grating is controlled to rotate to the grating position 2 for splitting, and the corresponding acquired spectrum wavelength range is 1200 nm-1500 nm, namely the spectrum detection of the full spectrum is realized.
Alternatively, assuming that the rotation angle of the micro stepping motor 112 is 0 to a degrees, there are three corresponding spectroscopic angles of the planar grating 111, that is, three scanning positions of the planar grating, and the coverage wavelength range of the spectrometer is 900nm to 2100nm, and the wavelength range of the pixel of the linear array detector 114 is 600nm. When the first grating beam splitting is performed, the rotation angle of the stepping motor can be A/3 degrees, the plane grating is controlled to rotate to the grating position 1 for beam splitting, and the corresponding collected spectrum wavelength range is 900-1500 nm; when the grating is split for the second time, the stepping motor sequentially runs to 2A/3 degrees, the plane grating is controlled to rotate to the grating position 2 for splitting, the corresponding collected spectrum wavelength range is 1200 nm-1800 nm, when the grating is split for the third time, the stepping motor sequentially runs to A degrees, the plane grating is controlled to rotate to the grating position 3 for splitting, the corresponding collected spectrum wavelength range is 1500 nm-2100 nm, and thus the spectrum detection of the whole spectrum is realized.
The coverage wavelength range (or range) of the spectrometer may be preset, and the larger the range is, the larger the spectroscopic angle of the planar grating is, and the larger the spectral range that can support measurement is. Similarly, the wavelength range corresponding to the spectrum of each measurement, and the center wavelength λ of the narrow-band LED calibration light source 105 may also be preset. It should be understood that the above description of the rotation full angle of the stepper motor, the grating splitting angle, the scanning position of the planar grating, the coverage of the full spectrum, and the wavelength range (e.g., 300 nm) of the pixels in the linear array detector array are only exemplary, and should not constitute any limitation of the technical solution of the present application.
It should be noted that whether the spectrum needs to be collected in sections and spliced mainly depends on the scanning wavelength range corresponding to the position of each scanning grating and the spectrum range to be measured. For example, the spectrum to be measured is 900 nm-1200 nm, and the scanning wavelength range corresponding to the position 1 of the scanning grating is 900 nm-1500 nm, so that the spectrum measurement can be completed through one grating scanning; for example, the spectrum to be measured is 900 nm-1800 nm, the scanning wavelength range corresponding to the position 1 of the scanning grating is 900 nm-1500 nm, and the scanning wavelength range corresponding to the position 2 of the scanning grating is 1200 nm-1800 nm, so that the spectrum measurement can be completed through two times of grating scanning, and meanwhile, the spectrums of the two times of scanning are required to be spliced to obtain a full-section spectrum.
Based on the micro infrared spectrometer 100 shown in fig. 1 and the working principle thereof, a method for splicing the collected multi-segment spectra will be described in detail with reference to fig. 2 and 3.
Fig. 2 is a flow chart of a method 200 for acquiring and splicing multi-segment spectrum in a time-sharing manner according to an embodiment of the present application. As shown in fig. 2, the method specifically comprises the following steps.
S210, a background spectrum #1 and a mixed spectrum #1 corresponding to the grating position 1 are acquired.
Illustratively, the micro stepping motor 112 is used to control the plane grating 111 to rotate to the grating position 1, the active light source 101 of the halogen tungsten lamp is turned off, the narrow-band LED calibration light source 105 is turned on, and the micro infrared spectrometer 100 is used to perform spectrum acquisition on the object 104 to be measured, so as to obtain a background spectrum #1.
It should be appreciated that the background spectrum #1 acquired by the micro infrared spectrometer 100 includes: any light other than the halogen tungsten lamp active light source 101 enters the instrument field of view, or is reflected by the object 104 to be measured into the instrument field of view, and the narrow band LED calibration light source 105 enters the instrument field of view.
Further, the grating position 1 is kept unchanged, the active light source 101 of the halogen tungsten lamp is turned on, and the micro infrared spectrometer 100 is used for carrying out spectrum acquisition aiming at the object 104 to be detected, so as to obtain a mixed spectrum #1.
It should be appreciated that the hybrid spectrum #1 acquired by the micro infrared spectrometer 100 includes: in step S210, after the object 104 to be measured is irradiated by the background spectrum #1 and the active light source 101 of the halogen tungsten lamp, the response generated by diffuse reflection entering the field of view of the instrument occurs.
S220, sequentially acquiring background spectrums #2 and …, background spectrum # N, mixed spectrums #2 and … and mixed spectrum #N corresponding to grating positions 2 and … and grating position N.
Illustratively, the micro stepping motor 112 is used to control the plane grating 111 to rotate from the grating position #1 to the grating position 2, the active light source 101 of the halogen tungsten lamp is turned off, the narrow-band LED calibration light source 105 is turned on, and the micro infrared spectrometer 100 is used to perform spectrum acquisition on the object 104 to be measured, so as to obtain a background spectrum #2.
Further, the grating position 2 is kept unchanged, the active light source 101 of the halogen tungsten lamp is turned on, and the micro infrared spectrometer 100 is used for carrying out spectrum acquisition aiming at the object 104 to be detected, so as to obtain a mixed spectrum #2.
Similarly, the background spectrum #3, …, the background spectrum #n, and the mixed spectrum #3, …, the mixed spectrum #n corresponding to the grating position 3, …, the grating position N are sequentially acquired.
The specific implementation manner of collecting the background spectra #3, … and the background spectra #n, and the corresponding mixed spectra #3, … and the mixed spectra #n may refer to the step S210, which is not repeated herein for brevity.
It should be noted that, the specific meanings of the background spectra #2, … and the background spectrum #n may refer to the meanings of the background spectrum #1, and similarly, the specific meanings of the mixed spectra #2, … and the mixed spectrum #n may refer to the meanings of the mixed spectrum #1, which are not repeated herein for brevity.
It should be appreciated that the N-band spectrum (including the background spectrum, or the mixed spectrum) contains N-1 splice regions, and that the narrow-band LED calibration light source 105 provides a calibration spectrum for the N-1 splice regions, i.e., the splicing of the N-band spectrum can be achieved by the N-1 different wavelength narrow-band LED calibration light source 105.
And S230, respectively splicing the N sections of background spectrums and the N sections of mixed spectrums according to the preset N-1 splicing positions to obtain a full section of background spectrums and a full section of mixed spectrums.
For example, n=3, the spectral wavelength range of the preset first splicing position is 1400nm to 1600nm, the spectral wavelength range of the second splicing position is 2000nm to 2200nm, the wavelength range of the collected first mixed spectrum is 900nm to 1600nm, the wavelength range of the collected first mixed spectrum is 1400nm to 2200nm, the wavelength range of the collected third mixed spectrum is 2000nm to 2500nm, the wavelength range of the collected first background spectrum is 1000nm to 1600nm, the wavelength range of the second background spectrum is 1400nm to 2200nm, the wavelength range of the third background spectrum is 2000nm to 2400nm, the wavelength range of the mixed spectrum of the whole section is 900nm to 2500nm, and the wavelength range of the background spectrum of the whole section is 1000nm to 2400nm.
The N-1 splice positions respectively correspond to the spectra of the N-1 narrow-band LED calibration light sources 105, and the N-1 splice positions corresponding to the splice of the N-segment background spectrum and the N-segment mixed spectrum are the same.
It should be noted that, the specific spectrum splicing operation may refer to the existing spectrum splicing technology, for example, the spectrum splicing is implemented through normalization processing, and for brevity, the description is not repeated here.
It should be understood that the above preset splice positions and numbers, as well as the wavelength ranges and numbers of the background spectrum and the mixed spectrum are only exemplary, and should not constitute any limitation on the technical solution of the present application.
S240, determining the full-segment spectrum of the object to be detected according to the full-segment background spectrum and the full-segment mixed spectrum.
For example, the wavelengths of the spectrums of the narrowband LED calibration light sources 105 in the full-segment background spectrum and the full-segment mixed spectrum obtained by the splicing in the step S230 are aligned and normalized, and then the full-segment background spectrum and the full-segment mixed spectrum are subjected to subtraction processing, so that the obtained spectrum curve is the full-segment spectrum of the object to be measured, that is, the reflection spectrum of the object to be measured.
Further, comparing the full spectrum of the object to be measured with the pre-stored spectrum (or the spectrum stored in the cloud) in the database can identify the structure or component information of the object to be measured 104.
Fig. 3 is a flow chart of another method 300 for acquiring and splicing multi-segment spectrum in a time-sharing manner according to an embodiment of the present application. As shown in fig. 3, the method specifically comprises the following steps.
S310, a background spectrum #1 and a mixed spectrum #1 corresponding to the grating position 1 are acquired.
S320, sequentially acquiring background spectrums #2 and …, background spectrum # N, mixed spectrums #2 and … and mixed spectrum #N corresponding to grating positions 2 and … and grating position N.
For the specific implementation of steps S310 and S320, reference may be made to steps S210 and S220 of the method 200, respectively, and for brevity, the description is omitted here.
S330, determining partial spectrums of the N sections of objects to be detected according to the N sections of background spectrums and the N sections of mixed spectrums.
For example, n=3, the wavelengths of the spectrum of the narrowband LED calibration light source 105 in the first segment background spectrum and the first segment mixed spectrum corresponding thereto are aligned, normalized, and subtracted, so as to obtain a partial spectrum of the first segment object to be measured corresponding thereto, for example, 900nm to 1600nm; similarly, the wavelength range of the portion where the second-stage object to be measured can be obtained is 1200nm to 2000nm, and the wavelength range of the portion spectrum of the third-stage object to be measured is 1800nm to 2500nm.
S340, according to the partial spectrums of the N sections of the objects to be detected and the preset N-1 splicing positions, splicing to obtain the full-section spectrums of the objects to be detected.
For example, n=3, the preset spectral wavelength range of the first splicing position is 1200nm to 1600nm, the spectral wavelength range of the second splicing position is 1800nm to 2000nm, and the spectral wavelength range of the whole spectrum of the object to be detected can be obtained by splicing is 900nm to 2500nm.
The N-1 splice positions respectively correspond to the spectra of the N-1 narrow-band LED calibration light sources 105, and the N-1 splice positions corresponding to the splice of the N-segment background spectrum and the N-segment mixed spectrum are the same.
It should be noted that, the specific spectrum splicing operation may refer to the existing spectrum splicing technology, for example, the spectrum splicing is implemented through normalization processing, and for brevity, the description is not repeated here.
It should be understood that the above preset splice positions and numbers, as well as the wavelength ranges and numbers of the background spectrum and the mixed spectrum are only exemplary, and should not constitute any limitation on the technical solution of the present application.
Further, the structure or component information of the object 104 to be measured can be identified by comparing the full spectrum of the object to be measured with the pre-stored spectrum in the database.
In summary, the spectrometer disclosed in the present application controls the plane grating 111 to rotate through the micro stepping motor 112, so as to achieve time-sharing acquisition of N-section spectra, and uses the narrow-band LED calibration light source 105 to splice the N-section spectra, so as to cover the full spectrum and achieve detection of the wide spectrum range.
Fig. 4 is a schematic diagram of an imaging position and a stitching position of a multi-segment spectrum according to an embodiment of the present application. As shown in fig. 4, taking n=3 as an example, an imaging position of the 3-segment spectrum on the linear array detector and a stitching position of the 3-segment spectrum corresponding to the 3 positions of the scanning grating are illustrated.
Illustratively, the 3-segment spectrum is collected based on the above method 200 or 300, and the corresponding wavelength ranges are 900nm to 1600nm, 1200nm to 2200nm, and 1800nm to 2500nm, respectively. There are 2 spectral overlap regions of the 3 segments of spectrum, each overlap region containing the spectrum of the narrowband LED calibration light source 105 of a particular wavelength, to facilitate the stitching of the 3 segments of spectrum, so that at least 2 narrowband LED calibration light sources of a particular wavelength are required. For example, the 2 spectral overlap regions correspond to wavelength ranges of 1200nm to 1600nm and 1800nm to 2200nm, the center wavelength of the narrowband LED calibration light source 105#1 is λ1, and the corresponding wavelength band range may be greater than or equal to 1200nm and less than or equal to 1600nm, such as 1300nm to 1500nm; the center wavelength of the narrow band LED calibration light source 105#2 is λ2, and the corresponding band range may be 1800nm or more and 2200nm or less, such as 1900nm to 2100nm.
To ensure splice accuracy, more narrow-band LED calibration light sources 105 of specific wavelengths may also be employed to aid in spectral splice. For example, 2 narrowband LED calibration light sources 105 are additionally added at the middle position of the spliced 3-section spectrum, after the 3-section spectrum is spliced, the 2 additionally added narrowband LED calibration light sources 105 are turned on, when a splicing error occurs, the spectrum can be further corrected through the center wavelength of the 2 narrowband LED calibration light sources 105, and then the spectrum splicing precision is ensured.
According to the above description, the multi-section spectrum splicing described in the present application mainly relies on the spectrum of the narrow-band LED calibration light source 105 in the splicing region of the adjacent spectrum sections, and does not depend on the absolute position on the spectral imaging and the small linear array detector any more, so as to compensate for the positioning error or the repetition error caused by the rotation of the scanning grating.
Based on the working principle of the micro infrared spectrometer 100 shown in fig. 1, the multi-section spectrum time-sharing acquiring and splicing method described in fig. 2 and 3, and the imaging position and splicing position of the multi-section spectrum shown in fig. 4, the following schematic diagrams of the results after the multi-section spectrum splicing shown in fig. 5 to 7 are provided.
Fig. 5 is a schematic diagram of a result of multi-segment spectrum stitching according to an embodiment of the present application. As shown in fig. 5, the two-section spectrum is included, and the splicing effect of the first-section spectrum and the second-section spectrum is good. Wherein, for the splicing area (overlapping area) of the two sections of spectrums, the end points of the first section of spectrum comprise n-2, n-1 and n, and correspondingly, the end points of the second section of spectrum are respectively 0, 1 and 2. In the implementation mode, the miniature stepping motor in the scanning grating is driven by the closed-loop motor, and the accuracy of spectrum splicing mainly depends on the closed-loop accuracy of the closed-loop motor, so that the accuracy of spectrum splicing can be improved by adopting the high-accuracy closed-loop motor. However, due to the closed loop motor size and cost limitations, miniaturization and low cost of spectrometer 100 will be affected.
Fig. 6 is a schematic diagram of the result of another multi-segment spectral stitching provided in an embodiment of the present application. As shown in fig. 6, the spectrum includes two spectra, and the first spectrum and the second spectrum are spliced with each other in error, and the spliced spectrum is spread, distorted, or the like. Wherein, for the splicing region (overlapping region) of the two spectra, the end points of the first spectrum comprise n-2, n-1 and n, and the end points of the second spectrum are respectively 0, 1 and 2. In this implementation, the micro stepper motor in the scanning grating is driven by an open loop motor, and although the volume of the spectrometer 100 can be further miniaturized, the position of the scanning grating cannot be determined because the rotation angle of the open loop motor cannot be determined in place, so that serious errors occur in spectrum splicing, and even false characteristic peaks can occur.
Fig. 7 is a schematic diagram of still another multi-segment spectral splice provided in an embodiment of the present application. As shown in fig. 7, the two-section spectrum is included, and the splicing effect of the first-section spectrum and the second-section spectrum is good. Wherein, for the splicing area (overlapping area) of the two sections of spectrums, the end points of the first section of spectrum comprise n-2, n-1 and n, and correspondingly, the end points of the second section of spectrum are respectively 0, 1 and 2. In the implementation mode, the miniature stepping motor in the scanning grating is driven in a self-calibration mode of an open-loop motor and a monochromatic LED, which is equivalent to adding a closed-loop feedback structure on the basis of the open-loop motor. The spectrometer 100 may be reduced in size and cost compared to the closed loop motor shown in fig. 5. Meanwhile, because the wavelength range of monochromatic light of the monochromatic LED is narrower, the positioning accuracy of the spectrometer 100 can also achieve the splicing effect brought by the high-accuracy closed-loop motor shown in fig. 5, and further obtain a high-accuracy spectrum.
In summary, comparing the results of the multi-segment spectra shown in fig. 5 to 7, it can be seen that the use of an open loop motor and a single-color LED as the micro stepping motor in the scanning grating of the micro infrared spectrometer 100 is an ideal solution.
It should be noted that the micro infrared spectrometer 100 disclosed in the present application further has a spectrum self-calibration function, for example, after the background spectrum and the mixed spectrum are obtained by using the method 200 or 300, spectrum self-calibration may be performed to ensure spectrum accuracy. The method of self-calibration of the optical system is described in detail below with reference to fig. 8.
Fig. 8 is a flow chart illustrating a method 800 for spectral self-calibration according to an embodiment of the present application. As shown in fig. 8, the following steps are specifically included.
S810, acquiring a first system spectrum, and comparing and calibrating the spectrum with a pre-stored spectrum of a narrowband LED calibration light source.
Illustratively, by turning the halogen lamp active light source 101 off and the narrow band LED calibration light source 105 on, and performing spectral acquisition by the methods 200 or 300 described above, a first system spectrum may be obtained, i.e., the response generated by the narrow band LED calibration light source 105 incident to the instrument field of view, on the array detector array 114, i.e., the spectral position of the narrow band LED calibration light source.
It should be appreciated that the spectrum of the narrowband LED calibration light source 105 is fixed at the factory, the response wavelength of the narrowband LED calibration light source 105 is calibrated at the factory, and the calibration result is pre-stored in a spectroscopic instrument (e.g., the linear array detector array 114), the calibration result being the response wavelength position of the narrowband LED calibration light source 105 on the linear array detector 114 (i.e., the spectrum of the narrowband LED calibration light source 105).
Further, by comparing the first system spectrum with the spectrum of the narrowband LED calibration light source 105 pre-stored at the time of shipment, it can be determined whether the instrument itself is shifted (e.g., the narrowband LED calibration light source 105, the light shielding barrel 106, the converging lens 107, the slit diaphragm 108, the plane mirror 109, etc., shown in fig. 1), and whether the optical path needs further adjustment (e.g., the optical path c-d-e-f-g shown in fig. 1). If the response wavelength of the narrowband LED calibration light source 105 on the linear array detector 114 is shifted, for example by +10nm, compared with the response wavelength of the pre-stored narrowband LED calibration light source 105 during factory calibration, the shift operation of-10 nm can be performed on the spectrum responded by the current linear array detector 114 at the algorithm end, so that the response wavelength position of the first system spectrum is consistent with the pre-stored response wavelength position during factory calibration, or the shift operation of-10 nm can be performed on the current linear array detector 114, so that the shift of the spectrum caused by the problems of instruments or light paths and the like can be calibrated.
Optionally, before performing step S810 described above, it is determined whether the cover of the instrument lens is in a closed state. If the cover of the instrument lens is in a closed state, starting to execute S810 and subsequent processes; otherwise, S810 and subsequent flows are not performed.
For example, the lid of the instrument may be periodically checked for closure, for example by comparing background noise to a pre-stored threshold level, and if the background noise exceeds the threshold level, determining that the lid of the instrument is closed, and otherwise considering that the lid of the instrument is open.
Optionally, the step of determining whether the cover of the instrument lens is in a closed state is performed after receiving the start calibration procedure manually selected by the user, and if the cover of the instrument lens is covered, the step S810 and subsequent procedures thereof are performed.
S820, a second system spectrum is acquired, the relative wavelength relation of the spectrums of the narrow-band LED calibration light source and the halogen tungsten lamp active light source is determined, and the relative wavelength relation of the spectrums of the narrow-band LED calibration light source 105 and the halogen tungsten lamp active light source 101 is compared and calibrated.
Illustratively, the second system spectrum may be obtained by maintaining the narrow-band LED calibration light source 105 on while turning on the active light source 101 of the halogen lamp, and performing spectrum acquisition by the methods 200 or 300 described above. Since the second system spectrum includes both the reflection spectrum of the object 104 to be measured and the spectrum of the narrow-band LED calibration light source 105, the relative wavelength relationship between the spectrum of the narrow-band LED calibration light source and the spectrum of the active light source of the halogen lamp can be determined.
It should be appreciated that the relative positions (or relative wavelength relationships) of the spectra of the narrowband LED calibration light source 105 and the active halogen light source 101 are fixed at the factory, and that the relative positions of the spectra of the narrowband LED calibration light source 105 and the active halogen light source 101 are calibrated at the factory and the calibration results are pre-stored in a spectroscopic instrument (e.g., linear array detector array 114).
Further, by comparing the relative wavelength relationship of the spectrum of the narrow-band LED calibration light source and the active light source of the halogen lamp in the second system spectrum with the pre-stored relative wavelength relationship of the spectrum of the narrow-band LED calibration light source 105 and the active light source 101 of the halogen lamp at the factory, it can be determined whether the active light source 101 of the halogen lamp is aged or not. If the comparison result shows that the relative wavelengths of the spectrum of the narrow-band LED calibration light source and the active light source of the halogen tungsten lamp in the second system spectrum are shifted, further calibration is required, and the specific calibration method is similar to the calibration method in step S810, which is not repeated here for brevity.
It should be appreciated that, since the narrowband LED calibration light source 105 is much stronger than the diffuse reflection light of the object 104 to be measured, the spectrum of the narrowband LED calibration light source in the first system spectrum obtained by the instrument detection in step S810 and the spectrum of the second system spectrum obtained by the instrument detection in step S820 will be more obvious, which is beneficial for the registration of the spectrum positions and the wavelength calibration.
It should be noted that, based on the steps S810 and S820, calibration of the instrument itself and the active light source of the halogen tungsten lamp can be achieved, and further, spectrum collection is performed by the calibrated micro infrared spectrometer 100, so that spectrum quality and stability can be ensured. Alternatively, steps S810 and S820 described above may or may not be performed before each spectrum (e.g., background spectrum and mixed spectrum) acquisition is performed, for example, once every 10 spectrum acquisitions are performed, which is not particularly limited in this application.
Optionally, after the steps S810 and S820, a more accurate spectrum of the object to be measured may be obtained by performing the steps S830 and S840.
S830, obtaining a background spectrum and a mixed spectrum.
The specific collection manner of the background spectrum and the mixed spectrum may refer to steps S210-S230 in the method 200, which are not described herein for brevity.
It should be noted that, before performing step S830, the cover of the instrument lens needs to be ensured to be in an open state. For example, it may be periodically checked whether the lid of the instrument is open, for example by comparing the background noise to a pre-stored threshold level, and if the background noise is below the threshold level, the lid of the instrument is considered to have been open, and vice versa.
S840, determining the spectrum of the object to be detected according to the background spectrum and the mixed spectrum.
For example, the response wavelengths of the spectrums of the narrowband LED calibration light sources 105 in the background spectrum and the mixed spectrum are aligned and normalized, and then the background spectrum and the mixed spectrum are subtracted, where the obtained spectrum curve is the spectrum of the object 104 to be measured, that is, the reflection spectrum of the object 104 itself to be measured.
Further, the spectrum of the object to be measured is compared with the pre-stored spectrum in the database, so that the structure or component information of the object to be measured 104 can be identified. For example, by identifying the nitrite content, the freshness of the substance is suggested; or, by identifying the protein content, prompting whether the material of the clothes is dermis; alternatively, the skin moisture content may be detected to give advice on use of the cosmetic, or the like.
The miniature infrared spectrometer disclosed by the application is based on a crossed asymmetric Czerny-Turner structure, adopts mature and efficient planar gratings and miniature stepping motors to be coupled into scanning gratings, realizes multi-angle light splitting through the scanning gratings, ensures that multiple sections of spectrums are converged on a small linear array detector in a time-sharing manner, and simultaneously adopts a narrow-band LED calibration light source to assist in spectrum splicing and calibration, and finally completes the acquisition of spectrum data with wide spectrum band, high precision, high resolution and high signal to noise ratio.
According to the technical scheme, the size of the instrument can be compressed without complex motor control and mechanical structure, and the planar grating is adopted instead of the MEMS grating, so that the light splitting efficiency and stability are ensured, and the cost and the control complexity are reduced. By providing a narrow-band LED calibration light source, a spectrum splicing and self-calibration scheme is provided, the problems of limited positioning precision, repeated precision and the like of a scanning grating are solved, the development cost and the control difficulty of the scanning grating are reduced, and the spectrum obtained by detection is ensured to be credible.
It will be appreciated that commercial portable or handheld spectroscopic analysis devices have been increasingly compressing spectrometers to the centimeter level and continuing to compress volumes to the millimeter level, even the micrometer level, and that integration of the miniature infrared spectrometer 100 shown in fig. 1 described above into a chip, or into an electronic device such as a smart phone, notebook computer, or the like has been a trend.
Fig. 9 is a schematic structural diagram of an electronic device 900 provided in an embodiment of the present application. The electronic device 900 may be an end consumer product or a 3C electronic product (computer, communication, consumer) such as a cell phone, a portable device, a tablet computer, an electronic reader, a notebook computer, a digital camera, a wearable device, an earphone, a watch, a digital camera, or a stylus. The electronic device 900 may also be a vehicle, or a control device applied to a vehicle, a vehicle machine, an in-vehicle device, or the like. The embodiment shown in fig. 9 is illustrated with an electronic device 900 that is a mobile phone.
The electronic device 900 may include a housing 91, a display 92, and a circuit board assembly 93. The display 92 and the circuit board assembly 93 are mounted to the housing 91. Specifically, the case 91 may include a rim and a rear cover. The bezel may be located between the display 92 and the rear cover. The frame may surround the periphery of the display 92 and surround the periphery of the rear cover, and the display 92 is spaced from the rear cover. The cavity formed between the display 92, the bezel, and the rear cover may be used to house the circuit board assembly 93, and the housing 91 may be used to secure the circuit board assembly 93. The circuit board assembly 93 may include a circuit board and a miniature infrared spectrometer 94 (shown in fig. 1) disposed on the circuit board.
The circuit board may be a printed circuit board, a flexible circuit board, an integrated circuit (or referred to as a chip), or the like. The circuit board may be a single panel, a double panel, depending on the number of electronic components carried on the circuit board. A single panel may refer to a circuit board that carries electronic components on a single side. The double-sided board may refer to a circuit board that carries electronic components on both sides. Depending on the type of electronic components carried on the circuit board, the circuit board may be a motherboard, a module board, a frame board, a radio frequency board, or an application processor (application processor, AP) board, or the like. The motherboard may be a main circuit board within the electronic device. The RF board may be used to carry radio frequency chips, radio frequency power amplifiers, wireless fidelity (wireless fidelity, WIFI) chips, and the like. The AP board may be used for System On Chip (SOC) components, double data rate memory, etc.
Optionally, the electronic device further comprises a processor, and the processor can splice and calibrate the spectrum of the object to be detected, so that the spectrum detection of a wide spectrum can be ensured, and the spectrum precision can be improved.
The processor is configured to receive the spectrum of the first narrowband light source, the first mixed spectrum, and the second mixed spectrum, and the first background spectrum and the second background spectrum from the miniature infrared spectrometer 94; and the spectrum of the object to be measured is determined according to the spectrum of the first narrowband light source, the first mixed spectrum and the second mixed spectrum, and the first background spectrum and the second background spectrum.
The micro infrared spectrometer 94 detects and acquires the spectrum of the first narrowband light source, the first mixed spectrum and the second mixed spectrum, and the implementation manner of the first background spectrum and the second background spectrum can be referred to the above method 200 or 300, and for brevity, will not be described herein.
In one example, the processor is configured to splice the first mixed spectrum and the second mixed spectrum according to the spectrum of the first narrowband light source to obtain a full-segment mixed spectrum; splicing the first background spectrum and the second background spectrum according to the spectrum of the first narrowband light source to obtain a full-segment background spectrum; and determining the spectrum of the object to be detected according to the mixed spectrum of the whole section and the background spectrum of the whole section.
In another example, the processor is further configured to determine a first portion of the spectrum of the object to be measured based on the first mixed spectrum and the first background spectrum; determining a second partial spectrum of the object to be detected according to the second mixed spectrum and the second background spectrum; and according to the spectrum of the first narrow-band light source, splicing the first part of spectrum of the object to be detected and the second part of spectrum of the object to be detected, and determining the spectrum of the object to be detected.
Specifically, taking fruit sugar degree detection as an example, the detection window of the micro infrared spectrometer 94 of the electronic device 900 is aligned to the fruit to collect the spectrum curve of the fruit, and the sugar degree of the fruit can be rapidly calculated through the built-in model algorithm of the micro infrared spectrometer 94, so that the purpose of rapid sugar degree detection is realized; alternatively, the micro infrared spectrometer 94 sends the collected spectrum to the processor of the electronic device 900, and the processor can rapidly calculate the sugar degree of the fruit, so as to achieve the purpose of rapid sugar degree detection. In addition, the micro infrared spectrometer 94 disclosed in the present application can also detect the alcohol content of white spirit, the protein content of milk and milk powder, and even distinguish whether vegetables are planted organically.
It will be clearly understood by those skilled in the art that, for convenience and brevity, the specific working procedures of the above-described system, apparatus and unit may refer to the corresponding procedures in the foregoing method embodiments, which are not repeated herein.
In the several embodiments provided in this application, it should be understood that the disclosed systems, devices, and methods may be implemented in other manners. For example, the apparatus embodiments described above are merely illustrative, such as the division of the units, merely a logical function division, and there may be additional manners of dividing the actual implementation, such as multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be an indirect coupling or communication connection via some interfaces, devices or units, or may be in electrical or other forms.
Those of ordinary skill in the art will appreciate that the various illustrative elements and algorithm steps described in connection with the embodiments disclosed herein may be implemented as electronic hardware, or combinations of computer software and electronic hardware. Whether such functionality is implemented as hardware or software depends upon the particular application and design constraints imposed on the solution. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the present application.
The foregoing is merely specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily think about changes or substitutions within the technical scope of the present application, and the changes and substitutions are intended to be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims (20)

1. A miniature infrared spectrometer, comprising: the device comprises a wide-spectrum light source, at least one narrow-band light source, a scanning grating and a linear array detector, wherein the scanning grating comprises a planar grating and a miniature stepping motor, and the at least one narrow-band light source comprises a first narrow-band light source, wherein:
the wide-spectrum light source is used for emitting a first light beam to the surface of the object to be detected, and the first light beam is incident to the plane grating through diffuse reflection of the surface of the object to be detected;
the first narrow-band light source is used for emitting a second light beam to the plane grating;
the scanning grating is used for controlling the plane grating to split the mixed light beam of the first light beam and the second light beam at a first angle and a second angle through the micro stepping motor to obtain a first diffraction light beam and a second diffraction light beam;
The linear array detector is used for respectively detecting the first diffraction light beam and the second diffraction light beam to obtain a first mixed spectrum and a second mixed spectrum, wherein the first mixed spectrum and the second mixed spectrum comprise a first spectrum superposition area, and the first spectrum superposition area corresponds to the spectrum of the first narrowband light source;
the scanning grating is further used for controlling the plane grating to split the second light beam at the first angle and the second angle through the micro stepping motor to obtain a third diffraction light beam and a fourth diffraction light beam;
the linear array detector is further configured to detect the third diffracted beam and the fourth diffracted beam, respectively, to obtain a first background spectrum and a second background spectrum, where the first background spectrum and the second background spectrum include the first spectrum overlapping region;
the linear array detector is also used for detecting the spectrum of the first narrowband light source;
the linear array detector is further configured to determine a spectrum of the object to be detected according to the spectrum of the first narrowband light source, the first mixed spectrum, the second mixed spectrum, and the first background spectrum and the second background spectrum.
2. The micro infrared spectrometer according to claim 1, wherein the band range of the first spectral overlap region is greater than or equal to the band range of the spectrum of the first narrowband light source.
3. The miniature infrared spectrometer of claim 1 or 2, wherein the linear array detector is further configured to:
splicing the first mixed spectrum and the second mixed spectrum according to the spectrum of the first narrowband light source to obtain a mixed spectrum of all sections;
splicing the first background spectrum and the second background spectrum according to the spectrum of the first narrowband light source to obtain a full-segment background spectrum;
and determining the spectrum of the object to be detected according to the mixed spectrum of the whole section and the background spectrum of the whole section.
4. The miniature infrared spectrometer of claim 1 or 2, wherein the linear array detector is further configured to:
determining a first partial spectrum of the object to be detected according to the first mixed spectrum and the first background spectrum, and determining a second partial spectrum of the object to be detected according to the second mixed spectrum and the second background spectrum;
and according to the spectrum of the first narrowband light source, splicing the first part of spectrum of the object to be detected and the second part of spectrum of the object to be detected, and determining the spectrum of the object to be detected.
5. The miniature infrared spectrometer of claim 3, wherein said linear array detector is further configured to:
and calibrating a first system spectrum according to the prestored spectrum of the first narrowband light source, wherein the first system spectrum comprises the background spectrum of the whole section.
6. The miniature infrared spectrometer of claim 3 or 5, wherein said linear array detector is further configured to:
and calibrating a second system spectrum according to a pre-stored relative wavelength relation between the spectrum of the wide-spectrum light source and the spectrum of the first narrow-band light source, wherein the second system spectrum comprises the full-segment mixed spectrum.
7. The micro infrared spectrometer according to any of claims 1-6, wherein the at least one narrowband light source further comprises a second narrowband light source, the second narrowband light source being different from the first narrowband light source in center wavelength; wherein:
the scanning grating is further used for controlling the plane grating to split the mixed light beam of the first light beam and the second light beam at a third angle through the micro stepping motor to obtain a fifth diffraction light beam;
the linear array detector is further configured to detect the fifth diffracted beam to obtain a third mixed spectrum, where the second mixed spectrum and the third mixed spectrum include a second spectrum overlapping region, and the second spectrum overlapping region corresponds to a spectrum of the second narrowband light source;
The scanning grating is further used for controlling the plane grating to split the second light beam at the third angle through the micro stepping motor to obtain a sixth diffracted light beam;
the linear array detector is further configured to detect the sixth diffracted beam to obtain a third background spectrum, where the second background spectrum and the third background spectrum include the second spectrum overlapping region;
the linear array detector is also used for detecting the spectrum of the second narrowband light source;
the linear array detector is further configured to determine a spectrum of the object to be detected according to the spectrum of the first narrowband light source, the spectrum of the second narrowband light source, the first mixed spectrum, the second mixed spectrum, and the third mixed spectrum, and the first background spectrum, the second background spectrum, and the third background spectrum.
8. The micro infrared spectrometer according to claim 7, wherein the band range of the second spectral overlap region is greater than or equal to the band range of the spectrum of the second narrowband light source.
9. The micro infrared spectrometer of any one of claims 1-8, wherein the center wavelengths of any two of the at least one narrowband light sources are different.
10. The micro infrared spectrometer according to any of claims 1-9, wherein the at least one narrowband light source is uniformly arranged at the field of view edge of the micro infrared spectrometer.
11. The micro infrared spectrometer according to any of claims 1-10, wherein the at least one narrowband light source is uniformly arranged in the inner edge region of a window sheet of the micro infrared spectrometer.
12. The miniature infrared spectrometer of any of claims 1-11, wherein said miniature stepper motor is an open loop motor.
13. The micro infrared spectrometer of claim 12, wherein the at least one narrowband light source comprises a monochromatic light emitting diode, LED, light source.
14. An electronic device, comprising: the miniature infrared spectrometer of any of claims 1-13.
15. An electronic device, comprising: the device comprises a processor and a micro infrared spectrometer, wherein the micro infrared spectrometer comprises a wide-spectrum light source, at least one narrow-band light source, a scanning grating and a linear array detector, the scanning grating comprises a planar grating and a micro stepping motor, and the at least one narrow-band light source comprises a first narrow-band light source; wherein:
The wide-spectrum light source is used for emitting a first light beam to the surface of the object to be detected, and the first light beam is incident to the plane grating through diffuse reflection of the surface of the object to be detected;
the first narrow-band light source is used for emitting a second light beam to the plane grating;
the scanning grating is used for controlling the plane grating to split the mixed light beam of the first light beam and the second light beam at a first angle and a second angle through the micro stepping motor to obtain a first diffraction light beam and a second diffraction light beam;
the linear array detector is used for respectively detecting the first diffraction light beam and the second diffraction light beam to obtain a first mixed spectrum and a second mixed spectrum, wherein the first mixed spectrum and the second mixed spectrum comprise a first spectrum superposition area, and the first spectrum superposition area corresponds to the spectrum of the first narrowband light source;
the scanning grating is further used for controlling the plane grating to split the second light beam at the first angle and the second angle through the micro stepping motor to obtain a third diffraction light beam and a fourth diffraction light beam;
the linear array detector is further configured to detect the third diffracted beam and the fourth diffracted beam, respectively, to obtain a first background spectrum and a second background spectrum, where the first background spectrum and the second background spectrum include the first spectrum overlapping region;
The linear array detector is also used for detecting the spectrum of the first narrowband light source;
the processor is configured to receive the spectrum of the first narrowband light source, the first mixed spectrum, and the second mixed spectrum, and the first background spectrum and the second background spectrum from the miniature infrared spectrometer;
the processor is further configured to determine a spectrum of the object to be measured according to the spectrum of the first narrowband light source, the first mixed spectrum, the second mixed spectrum, and the first background spectrum and the second background spectrum.
16. The electronic device of claim 15, wherein the processor is further configured to:
splicing the first mixed spectrum and the second mixed spectrum according to the spectrum of the first narrowband light source to obtain a mixed spectrum of all sections;
splicing the first background spectrum and the second background spectrum according to the spectrum of the first narrowband light source to obtain a full-segment background spectrum;
and determining the spectrum of the object to be detected according to the mixed spectrum of the whole section and the background spectrum of the whole section.
17. The electronic device of claim 15 or 16, wherein the processor is further configured to:
Determining a first partial spectrum of the object to be detected according to the first mixed spectrum and the first background spectrum, and determining a second partial spectrum of the object to be detected according to the second mixed spectrum and the second background spectrum;
and according to the spectrum of the first narrowband light source, splicing the first part of spectrum of the object to be detected and the second part of spectrum of the object to be detected, and determining the spectrum of the object to be detected.
18. The miniature infrared spectrometer of claim 16, wherein said processor is further configured to:
and calibrating a first system spectrum according to the prestored spectrum of the first narrowband light source, wherein the first system spectrum comprises the background spectrum of the whole section.
19. The miniature infrared spectrometer of claim 16 or 18, wherein said processor is further configured to: and calibrating a second system spectrum according to a pre-stored relative wavelength relation between the spectrum of the wide-spectrum light source and the spectrum of the first narrow-band light source, wherein the second system spectrum comprises the full-segment mixed spectrum.
20. The electronic device of any one of claims 15-19, wherein the at least one narrowband light source further comprises a second narrowband light source, the second narrowband light source being different from a center wavelength of the first narrowband light source; wherein:
The scanning grating is further used for controlling the plane grating to split the mixed light beam of the first light beam and the second light beam at a third angle through the micro stepping motor to obtain a fifth diffraction light beam;
the linear array detector is further configured to detect the fifth diffracted beam to obtain a third mixed spectrum, where the second mixed spectrum and the third mixed spectrum include a second spectrum overlapping region, and the second spectrum overlapping region corresponds to a spectrum of the second narrowband light source;
the scanning grating is further used for controlling the plane grating to split the second light beam at the third angle through the micro stepping motor to obtain a sixth diffracted light beam;
the linear array detector is further configured to detect the sixth diffracted beam to obtain a third background spectrum, where the second background spectrum and the third background spectrum include the second spectrum overlapping region;
the linear array detector is also used for detecting the spectrum of the second narrowband light source;
the processor is further configured to receive, from the micro infrared spectrometer, a spectrum of the second narrowband light source, the third mixed spectrum, and the third background spectrum;
The processor is further configured to determine a spectrum of the object to be measured according to the spectrum of the first narrowband light source, the spectrum of the second narrowband light source, the first mixed spectrum, the second mixed spectrum, and the third mixed spectrum, and the first background spectrum, the second background spectrum, and the third background spectrum.
CN202211021975.3A 2022-08-24 2022-08-24 Miniature infrared spectrometer and electronic equipment Pending CN117664892A (en)

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