CN117662868A - Transmission pipeline assembly and temperature control system of integrated circuit temperature control equipment - Google Patents

Abstract

The invention relates to the technical field of heat preservation of liquid transmission pipelines of integrated circuit temperature control equipment, in particular to a transmission pipeline assembly and a temperature control system of integrated circuit temperature control equipment. The transmission pipeline component of the integrated circuit temperature control equipment comprises a transmission pipeline and a plurality of flexible outer pipes, wherein the transmission pipeline comprises flexible pipe sections; the flexible outer pipes are sleeved on the flexible pipe sections, and a vacuum heat insulation cavity is formed between the transmission pipeline and the flexible outer pipes. A vacuum heat insulation cavity is formed between the transmission pipeline and the flexible outer pipe, the vacuum heat insulation cavity can provide a good heat insulation environment for the flexible pipe section of the transmission pipeline, the heat insulation effect of the transmission pipeline is improved, the service life of the transmission pipeline is prolonged, the maintenance cost is reduced, and the heat insulation requirement is met. The flexible pipe section can be bent, and the flexible outer pipe can be bent along with the bending of the flexible pipe section, so that different installation positions are adapted, the heat preservation effect of the transmission pipeline at the bending position meets the requirements of users, and the maintenance cost is reduced.

Description

Transmission pipeline assembly and temperature control system of integrated circuit temperature control equipment

Technical Field

The invention relates to the technical field of heat preservation of liquid transmission pipelines of integrated circuit temperature control equipment, in particular to a transmission pipeline assembly and a temperature control system of integrated circuit temperature control equipment.

Background

With the development of technology, the transmission pipeline has wide application range in various industries, taking the integrated circuit manufacturing industry as an example, and with the development of integrated circuit manufacturing process, the temperature range of processes such as etching and the like is between-120 ℃ and 200 ℃, and the integrated circuit temperature control equipment needs to control the temperature of main process equipment through the transmission pipeline. The heat-insulating structure of the transmission pipeline adopts rubber-plastic heat-insulating cotton or aviation heat-insulating material and the like. The installation environment of transmission pipeline installation can not be the completely smooth environment, can need bend transmission pipeline and dodge usually, but at the in-process of dodging of bending, the insulation construction of transmission pipeline receives extruded condition to be difficult to avoid, insulation construction extrusion deformation has reduced the heat preservation effect, and such transmission pipeline produces the comdenstion water easily under low temperature, causes insulation material carbonization easily under high temperature, produces problems such as granule pollution. And the transmission pipeline is usually arranged along the height of the floor, so that the maintenance transmission pipeline relates to high-altitude operation, and the maintenance and the replacement are inconvenient. If the thickness of the insulation structure is increased directly on the transmission pipeline, the cost is high.

Disclosure of Invention

The present invention is directed to solving at least one of the technical problems existing in the related art. Therefore, the invention provides a transmission pipeline assembly of integrated circuit temperature control equipment, which is used for solving the defects that the transmission pipeline assembly is difficult to bend and the heat insulation structure of the bent transmission structure is easy to squeeze in the prior art.

The invention further provides a temperature control system.

According to an embodiment of the first aspect of the present invention, a transmission pipeline assembly of an integrated circuit temperature control device includes:

a transfer line comprising a flexible tube segment;

the flexible pipe sections are sleeved with the flexible outer pipes, and a vacuum heat insulation cavity is formed between the transmission pipeline and the flexible outer pipes.

According to the transmission pipeline assembly of the integrated circuit temperature control equipment, the vacuum heat insulation cavity is formed between the transmission pipeline and the flexible outer pipe, and can provide a good heat insulation environment for the flexible pipe section of the transmission pipeline, so that the heat insulation effect of the transmission pipeline is improved, the service life of the transmission pipeline is prolonged, the maintenance cost is reduced, and the heat insulation requirement of liquid transmission of the integrated circuit temperature control equipment is met. The flexible pipe section can be bent, and the flexible outer pipe can be bent along with the bending of the flexible pipe section, so that different installation positions are adapted, the heat preservation effect of the transmission pipeline at the bending position meets the requirements of users, and the maintenance cost is reduced.

According to one embodiment of the invention, a number of supports are arranged between the flexible pipe section and the flexible outer pipe, which supports are arranged at intervals along the extension direction of the insulating chamber.

According to one embodiment of the invention, the support is a cross-shaped ring.

According to one embodiment of the invention, the flexible tube section is a bellows.

According to one embodiment of the invention, the flexible outer tube comprises a corrugated section and connecting sections at two ends of the corrugated section, wherein the connecting sections are provided with interfaces communicated with the vacuum heat insulation cavity.

According to one embodiment of the invention, the transmission pipeline comprises a plurality of sections of flexible pipe sections which are mutually spaced, and the flexible outer pipe and the flexible pipe sections are arranged in a one-to-one correspondence.

According to one embodiment of the invention, the transmission pipeline comprises a connecting pipe section positioned between adjacent flexible pipe sections, an inflatable membrane is wrapped outside the connecting pipe section, an inflatable cavity is arranged inside the inflatable membrane, the inflatable membrane has an inflated state and a contracted state, and in the inflated state, the inflatable cavity is inflated, and the inflatable membrane is inflated to be larger; in the contracted state, the inflatable cavity is deflated and the inflatable membrane is contracted.

According to one embodiment of the invention, the transmission line comprises a connecting tube section between adjacent flexible tube sections, the connecting tube section being externally wrapped with a deformation frame, the deformation frame forming a protection space for the connecting tube section, the deformation frame having an expanded state and a contracted state, the protection space decreasing during switching of the expanded state towards the contracted state; the protection space increases during switching of the contracted state toward the expanded state.

According to one embodiment of the present invention, the number of the flexible outer tubes is one corresponding to one of the transmission pipelines, and the length of the flexible outer tubes is matched with the length of the transmission pipeline.

According to a second aspect of the present invention, a temperature control system includes an integrated circuit temperature control device and a transmission pipeline assembly of the integrated circuit temperature control device, where the transmission pipeline is connected to the integrated circuit temperature control device.

Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

Drawings

In order to more clearly illustrate the invention or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of an assembly structure of a flexible outer tube according to an embodiment of the present invention;

FIG. 2 is a schematic cross-sectional view of FIG. 1;

FIG. 3 is a schematic illustration of an assembled configuration of an inflatable membrane and transfer tubing provided in accordance with one embodiment of the present invention;

FIG. 4 is a schematic cross-sectional view of an inflatable membrane and transfer line in an inflated state, according to one embodiment of the present invention;

FIG. 5 is a schematic cross-sectional view of an inflatable membrane in a contracted state and a transfer line provided by one embodiment of the present invention;

FIG. 6 is a schematic diagram of an assembled configuration of a temperature control system according to an embodiment of the present invention;

FIG. 7 is a schematic view of a deformed frame sleeved on a transmission pipeline and in an open state according to an embodiment of the present invention;

FIG. 8 is a schematic view of a deformed frame sleeved on a transmission pipeline and in a contracted state according to an embodiment of the present invention;

FIG. 9 is a schematic view of a partially enlarged structure at A provided in FIG. 7;

FIG. 10 is a schematic view of a connection assembly according to one embodiment of the present invention;

FIG. 11 is a schematic cross-sectional view of a connection assembly according to one embodiment of the present invention connected to another connection assembly;

FIG. 12 is a schematic view of a structure of a connection board according to an embodiment of the present invention;

fig. 13 is a schematic structural view of a fixing member mounted to a deformation frame according to an embodiment of the present invention.

Reference numerals:

10. an inflatable membrane; 11. an air-filling cavity;

20. an air pump;

30. a mounting ring; 31. an inflation inlet; 32. an air valve;

100. a deformation frame; 101. a protection space; 110. a connection assembly; 111. a connecting plate; 112. a connecting member; 113. a mounting hole; 114. clamping springs; 115. a limit boss; 116. an elastic member; 117. a limit step; 118. a stop block; 119. a limit groove;

120. a connecting ring;

130. a support member;

200. a fixing member;

300. a transmission line; 310. a flexible tube section; 320. connecting pipe sections;

400. a flexible outer tube; 410. a vacuum heat insulation chamber; 420. a corrugated section; 430. a connection section; 440. an interface;

500. and a support.

Detailed Description

Embodiments of the present invention are described in further detail below with reference to the accompanying drawings and examples. The following examples are illustrative of the invention but are not intended to limit the scope of the invention.

In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the embodiments of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the embodiments of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "connected" and "connected" are to be construed broadly, and may be, for example, fixed or removable, wherein the fixed connection may include an integral connection; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in embodiments of the present invention will be understood in detail by those of ordinary skill in the art.

In embodiments of the invention, unless expressly specified and limited otherwise, a first feature "up" or "down" on a second feature may be that the first and second features are in direct contact, or that the first and second features are in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the embodiments of the present invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

Referring to fig. 1 and 2, a transmission pipeline assembly of an integrated circuit temperature control device according to an embodiment of the present invention includes a transmission pipeline 300 and a plurality of flexible outer pipes 400, where the transmission pipeline 300 includes a flexible pipe section 310; a plurality of flexible outer tubes 400 are sleeved on the flexible tube section 310, and a vacuum heat insulation cavity 410 is formed between the transmission pipeline 300 and the flexible outer tubes 400.

According to the transmission pipeline assembly of the integrated circuit temperature control equipment, the vacuum heat insulation cavity 410 is formed between the transmission pipeline 300 and the flexible outer pipe 400, and can provide a good heat insulation environment for the flexible pipe section 310 of the transmission pipeline 300, so that the heat insulation effect of the transmission pipeline 300 is improved, the service life of the transmission pipeline 300 is prolonged, the maintenance cost is reduced, and the heat insulation requirement of liquid transmission of the integrated circuit temperature control equipment is met. The flexible pipe section 310 can be bent, and the flexible outer pipe 400 can be bent along with the bending of the flexible pipe section 310, so that different installation positions are adapted, the heat preservation effect of the transmission pipeline 300 at the bending position meets the requirements of users, and the maintenance cost is reduced.

The flexible outer tube 400 and the flexible tube segment 310 of the present invention are not limited to use in a bending position, but may be used in a straight tube position.

It will be appreciated that the flexible tube sections 310 are provided in the transfer tubing 300, and that the transfer tubing 300 is somewhat flexible and can bend under lateral forces to facilitate adaptation to various shapes and arrangements at different locations of the transfer tubing 300.

The flexible outer tube 400 is sleeved on the flexible tube section 310, so that the transmission pipeline 300 can be protected, and the flexible tube section 310 of the transmission pipeline 300 is prevented from being extruded. While the formation of a vacuum insulation chamber between flexible outer tube 400 and flexible tube segment 310 may also provide an insulating effect.

The vacuum environment is a good insulating medium and can reduce the transfer of heat from the transfer line 300, thereby ensuring efficient operation of the integrated circuit temperature control device. After the conventional pipeline system is used for a long time, due to heat conduction and external environment, the transmission efficiency may be reduced or the temperature inside the pipeline may fluctuate, and the service life of the transmission pipeline 300 may be greatly prolonged by sleeving the flexible outer pipe 400 in the vacuum heat insulation cavity 410 formed by the flexible pipe section 310. Because of the improvement of the heat preservation effect, the maintenance frequency and the maintenance cost are correspondingly reduced.

It will be appreciated that because flexible tube segment 310 and flexible outer tube 400 can be bent, the thermal insulation effect still meets the requirements of transfer line 300 of the integrated circuit temperature control device, even in the bent position, due to the presence of vacuum insulation chamber 410.

According to an embodiment of the present invention, referring to fig. 2, a plurality of supporting members 500 are provided between the flexible pipe section 310 and the flexible outer pipe 400, and the supporting members 500 are spaced apart along the extension direction of the insulation chamber.

It is understood that support 500 may provide structural support for flexible tube segment 310 and flexible outer tube 400. The support 500 ensures that the transfer line 300 maintains a stable shape and structure, reducing the risk of deformation or damage, since the transfer line 300 may be subjected to various external forces or pressure of the flowing medium inside during operation.

In one embodiment, the support 500 is a cross-shaped ring. Of course, the support 500 may also be a partition, without specific limitation herein.

Referring to FIG. 1, flexible tube segment 310 is a bellows, according to one embodiment of the present invention. It can be understood that the bellows is composed of a plurality of corrugations, can effectively disperse and bear internal pressure, has good flexibility due to the corrugated structure design of the bellows, can be conveniently bent and twisted, and is suitable for various complex installation environments.

Referring to fig. 1, according to an embodiment of the present invention, a flexible outer tube 400 includes a corrugated section 420 and connection sections 430 at both ends of the corrugated section 420, the connection sections 430 being provided with interfaces 440 communicating with a vacuum insulation chamber 410.

It will be appreciated that the connecting sections 430 are located at both ends of the corrugated section 420 for connecting the corrugated section 420 together to form a continuous flexible outer tube 400. The connection section 430 is provided with an interface 440 that communicates with the vacuum insulated cavity 410. These interfaces 440 allow for an operative connection with other components or systems to effect sealing and communication of the vacuum insulated chamber 410.

According to one embodiment of the present invention, transmission line 300 includes a plurality of flexible tube segments 310 spaced apart from one another, flexible outer tube 400 and flexible tube segments 310 being disposed in a one-to-one correspondence. It will be appreciated that each flexible tube segment 310 has its own individual flexible outer tube 400, and that each flexible tube segment 310 has its own vacuum insulation lumen 410. The design is such that each flexible tube segment 310 and its corresponding flexible outer tube 400 form a single module. This modular design simplifies the production and assembly process, while also facilitating maintenance and replacement.

According to one embodiment of the present invention, the number of flexible outer tubes 400 is one corresponding to one of the transmission lines 300, and the length of the flexible outer tubes 400 is matched with the length of the transmission line 300. It will be appreciated that matching the length of the flexible outer tube 400 to the length of the transfer tubing 300 ensures that the entire transfer tubing 300 is completely encased within the flexible outer tube 400, thereby forming a continuous vacuum insulated cavity 410. This provides an overall insulating effect, ensuring that the liquid or gas in the pipeline is temperature stable during transport. The design ensures that the appearance of the pipeline system is tidier and more uniform, has no redundant parts or connection points, and improves the overall aesthetic degree.

In one embodiment, the temperature control system further comprises a vacuum pump (not shown) in communication with the vacuum insulated chamber.

Referring to fig. 2 to 5, according to an embodiment of the present invention, a transmission line 300 includes a connection pipe section 320 between adjacent flexible pipe sections 310, an inflatable membrane 10 is wrapped around the outside of the connection pipe section 320, an inflation chamber 11 is provided inside the inflatable membrane 10, the inflatable membrane 10 has an inflated state in which the inflatable chamber 11 is inflated and the inflatable membrane 10 is inflated to be larger; in the contracted state, the inflation lumen 11 is deflated and the inflation diaphragm 10 is contracted.

By providing the inflatable membrane 10 to protect the transfer line 300, the impact of extrusion on the transfer line 300 can be effectively reduced. The inflatable membrane 10 can be in an inflated state, an interval space is provided for the transmission pipeline 300 through the inflatable cavity 11, the gas in the inflatable cavity 11 can provide a good heat insulation environment for the transmission pipeline 300, and the heat insulation effect of the transmission pipeline 300 is improved, so that the service life of the transmission pipeline 300 is prolonged, the maintenance cost is reduced, and the heat insulation requirement of liquid transmission of the integrated circuit temperature control equipment is met. In the transport or storage state, the inflatable membrane 10 may also be in a contracted state, reducing floor and space occupation.

It can be appreciated that the inflation cavity 11 is inflated, so that the inflation diaphragm 10 can expand greatly, the transmission pipeline 300 can be completely wrapped by the inflation protecting layer, the inflation diaphragm 10 can form an inflation protecting layer around the transmission pipeline 300, and the inflation protecting layer can effectively absorb and disperse external extrusion force, so that the influence of external factors such as impact, extrusion or abrasion on the transmission pipeline 300 can be effectively reduced. Meanwhile, the gas in the air filling cavity 11 can provide a good heat insulation environment for the transmission pipeline 300, the heat loss can be effectively reduced in the heat insulation environment, and the heat insulation effect of the transmission pipeline 300 is improved. For liquid transmission of the integrated circuit temperature control equipment, the improvement of the heat preservation effect can ensure the temperature stability of the liquid in the transmission process, thereby ensuring the normal operation of the integrated circuit. Even if the heat insulating material provided on the outside of the transfer line 300 is seriously damaged, the transfer line 300 can maintain a good heat insulating effect by the inflation chamber 11 of the inflation diaphragm 10. The problems of condensed water generated by the transmission pipeline 300 at low temperature, granular pollution generated by carbonization of the heat insulation material of the transmission pipeline 300 at high temperature and the like are avoided.

It will be appreciated that the inflatable membrane 10 may be reduced in space when it is in a contracted state. This is advantageous for transporting and storing the transfer piping, and more transfer piping 300 provided with the inflatable membrane 10 can be accommodated in a limited space, improving space utilization efficiency.

When the transmission pipeline 300 provided with the inflatable membrane 10 is installed, the contracted state of the inflatable membrane 10 enables the transmission pipeline 300 to be more flexible, different layout and configuration requirements can be more easily met, for example, when the transmission pipeline 300 needs to be installed at a relatively narrow installation position, the inflatable cavity 11 can be subjected to air leakage treatment, and part of air in the inflatable cavity 11 is discharged, so that the volume of the inflatable membrane 10 is reduced, the installation is simpler, and meanwhile, the protection effect can be achieved.

Referring to fig. 6, the protection assembly of the transmission line 300 further includes an air pump 20, and the air pump 20 is adapted to supply air to the inflation chamber 11 to switch the inflation diaphragm 10 between the inflated state and the contracted state according to an embodiment of the present invention.

It will be appreciated that automatic switching of the state of the inflatable membrane 10 may be achieved by the air pump 20 providing air to the inflatable chamber 11. The air pump 20 can rapidly inflate or deflate the inflation lumen 11, thereby rapidly switching the state of the inflation diaphragm 10. The state of the inflatable membrane 10 can be flexibly and rapidly adjusted according to actual requirements, for example, the inflatable membrane can be switched to a contracted state to reduce space occupation during transportation, and can be switched to an inflated state to provide protection during use.

According to one embodiment of the present invention, the air pump 20 continuously flows the air of the inflation chamber 11 in the inflated state. It will be appreciated that air has a low coefficient of thermal conductivity, but that air's thermal conductivity increases with increasing temperature, as high temperatures can cause increased movement of air molecules, thereby increasing the rate of heat transfer. The air pump 20 is arranged, so that the air in the air cavity can continuously flow, heat in the air is taken away, and the air in the air cavity can keep good heat insulation effect.

According to one embodiment of the present invention, the gas in the air pump 20 may be at least one of dry air and nitrogen. The dry air and nitrogen have good stability or inertness, are not easy to react with other substances, and are low in manufacturing cost, and are suitable for being used as the gas in the air charging chamber 11.

According to one embodiment of the invention, the protection assembly of the transmission line 300 further comprises a mounting ring 30, the mounting ring 30 is connected with the inflatable membrane 10, the mounting ring 30 is provided with an inflation inlet 31, and the inflation inlet 31 is communicated with the inflation cavity 11. It can be appreciated that the mounting ring 30 can provide support for the inflatable membrane 10, and the aperture of the mounting ring 30 is larger than that of the transmission pipeline 300, so that the inflatable membrane 10 can be conveniently sleeved on the transmission pipeline 300, and the process of installing and detaching the inflatable membrane 10 is more convenient and quick. The inflation port 31 provided on the mounting ring 30 communicates with the inflation chamber 11, and the air pump 20 can supply air to the inflation chamber 11 through the inflation port 31, so that the inflation diaphragm 10 is switched between the inflated state and the contracted state.

It will be appreciated that the inflation inlet 31 is provided on one side of the mounting ring 30 to facilitate connection of the air pump 20, so that the connection operation is simpler and the complexity of the connection is reduced. Meanwhile, when the air charging port 31 is concentrated at one side, the maintenance, inspection, replacement and the like operations are more convenient.

According to an embodiment of the present invention, the number of the air charge ports 31 is an even number, and the air charge ports 31 are symmetrically arranged along the central axis of the mounting ring 30. It will be appreciated that when the inflation ports 31 are provided in an even number and symmetrically, it is possible to ensure that the inflatable membrane 10 is uniformly stressed when inflated, so that the inflation of the inflatable membrane 10 is more balanced. Since the air charging openings 31 are symmetrically arranged, the mounting ring 30 is simpler to mount and more attractive.

In some embodiments, one of the symmetrically disposed inflation ports 31 is an air inlet and the other is a gas outlet.

According to one embodiment of the invention, the air charging port 31 is provided with an air valve 32, and the air valve 32 controls the on-off of the air charging chamber 11. The air valve 32 can control the air flow of the air charging cavity 11, when the air charging or the air discharging is needed to be stopped, the air valve 32 can rapidly cut off the air flow, the control accuracy is improved, and the operation is more convenient.

According to one embodiment of the invention, the transfer line assembly further comprises a thermal insulation structure disposed between the line and the inflatable membrane 10. It can be appreciated that the thermal insulation structure can effectively reduce heat dissipation in the transmission pipeline assembly, and ensure the stability of the temperature of the transmission medium. The expansion and contraction of materials such as the pipeline and the inflatable diaphragm 10 caused by temperature change are reduced, and the service life is prolonged.

According to one embodiment of the invention, the thermal insulation structure is at least one of a fibrous material thermal insulation structure, an organic plastic thermal insulation structure and a rubber plastic thermal insulation structure. It is understood that the fiber material, the organic plastic material and the rubber plastic material have low heat conductivity coefficient, can effectively reduce heat transfer and provide excellent heat preservation effect. And they are lightweight and do not place a weight burden on the transfer line 300. Meanwhile, the heat insulation material has good corrosion resistance, can resist the corrosion of most chemical substances, and ensures the long-term stability and effectiveness of the heat insulation structure.

Referring to fig. 2, 7 and 8, according to an embodiment of the present invention, a transmission pipeline 300 includes a connection pipe section 320 between adjacent flexible pipe sections 310, a deformation frame 100 is wrapped around the connection pipe section 320, the deformation frame 100 forms a protection space 101 of the connection pipe section 320, the deformation frame 100 has an opened state and a contracted state, and the protection space 101 is reduced during switching of the opened state to the contracted state; the protection space 101 increases during the switching of the contracted state toward the expanded state.

The deformation frame 100 can be switched between an open state and a contracted state, and in the contracted state, the deformation frame 100 can reduce the occupied space and space, and is convenient to transport. In the open state, the protection space 101 of the transmission pipeline 300 can be increased, the transmission pipeline 300 cannot be extruded in the laying and installing process, extrusion deformation of the heat insulation layer is avoided, the transmission pipeline 300 can maintain the original heat insulation effect without increasing the thickness of the heat insulation layer through simple structure setting, the damage possibility of the transmission pipeline 300 is further reduced, and the maintenance cost of a user is reduced.

It should be noted that, the protection space 101 formed by the deformation frame 100 may be circular, triangular or other shaped structures, as long as the cross section of the transmission pipeline 300 is completely located in the protection space 101. The user can adjust the shape and size of the protection space 101 of the deformation frame 100 according to the installation requirement.

It will be appreciated that the transfer line 300 may employ a deformed frame 100 in part and an inflatable membrane 10 in part, and is not particularly limited herein.

Referring to fig. 7 and 8, according to an embodiment of the present invention, the deformation frame 100 includes a plurality of connection assemblies 110, the plurality of connection assemblies 110 are sequentially connected to form a connection ring 120, and a protection space 101 is formed inside the connection ring 120. It will be appreciated that the configuration of the attachment ring 120 may provide overall stability. The annular structure can disperse external stress, improves the compression resistance and the tensile resistance of the frame, and ensures that the frame is more stable. The protection space 101 formed inside the connection ring 120 can effectively protect the internal transmission pipeline 300, the connection ring 120 can also resist partial external impact, a relatively safe environment is provided for the transmission pipeline 300, and the influence of the external environment on the internal transmission pipeline 300 is reduced.

Referring to fig. 9 and 10, according to an embodiment of the present invention, the connection assembly 110 includes a connection plate 111 and a connection member 112, the connection member 112 is connected to a first end of the connection plate 111, a second end of the connection plate 111 is provided with a mounting hole 113, and the mounting hole 113 is adapted to be rotatably connected to the connection member 112 of an adjacent connection assembly 110. It can be appreciated that the connection assemblies 110 in the connection ring 120 are sequentially connected end to end, the mounting hole 113 at the second end of each connection assembly 110 corresponds to the connection member 112 at the first end of the adjacent connection assembly 110, and the mounting hole 113 and the connection member 112 are rotationally connected, so that the deformed frame 100 has good deformation capability, and the shape and structure of the frame can be easily changed by adjusting the relative angle of the connection assemblies 110, so as to adapt to different application requirements.

It should be noted that, the connection between the connection board 111 and the connection component 112 may be a fixed connection or a detachable connection, where the fixed connection may include an integral connection, in other words, the connection board 111 and the connection component 112 may be separate components, or the connection component 112 may be integrally formed with the connection board 111.

In one embodiment, the connection plate 111 and the connection member 112 are separate members, respectively, and the connection plate 111 is provided at both a first end and a second end with a mounting hole 113, the mounting hole 113 at the first end of the connection plate 111 is used for mounting the connection member 112, and the mounting hole 113 at the second end of the connection plate 111 is used for connecting the connection member 112 of the connection assembly 110 assembled adjacent thereto.

Referring to fig. 9, 10 and 12, the connecting assembly 110 further includes a clamp spring 114, the first end of the connecting member 112 is connected to the connecting plate 111, the second end of the connecting assembly is provided with a limiting boss 115, and the clamp spring 114 is disposed between the limiting boss 115 and the corresponding connecting plate 111. It can be appreciated that, by arranging the snap spring 114 between the limiting boss 115 and the corresponding connecting plate 111, the connection stability between the connecting part 112 and the connecting plate 111 can be greatly enhanced, and the connecting assembly 110 can still maintain tight connection when being subjected to external force or vibration due to the elasticity of the snap spring 114 and the arrangement of the limiting boss 115, is not easy to loosen, and can effectively prevent the connecting part 112 from accidentally falling off from the connecting plate 111.

It will be appreciated that the design of the snap spring 114 allows for a simpler assembly process. When the assembly is carried out, the connecting part 112 is only required to be inserted into the connecting plate 111 of the adjacent connecting assembly 110 corresponding to the connecting part, and then the clamp spring 114 is placed between the limiting boss 115 and the connecting plate 111, so that the assembly can be completed. The design improves the assembly efficiency and reduces the production cost.

Referring to fig. 10 and 12, the connecting assembly 110 further includes an elastic member 116, and the elastic member 116 is disposed between the clamp spring 114 and the connecting plate 111.

It will be appreciated that the resilient member 116 may automatically adjust and compensate to some degree for dimensional changes between the mounting plates of two adjacent connection assemblies 110 to fill in small gaps between the connection members 112 and the connection plates 111, thereby enhancing the strength of the connection.

In one embodiment, referring to fig. 8 and 10, the connection board 111 includes a stop 118 and a limiting groove 119, wherein one of the stop 118 and the limiting groove 119 is disposed at a first end of the connection board 111, and the other is disposed at a second end of the connection board 111.

The stop 118 of the connecting plate 111 is matched with the limit groove 119 of the other connecting plate 111 to limit the rotation of the two connecting plates at 0-180 degrees, and the two limit grooves form a locking structure of the deformed frame 100 in a contracted state and an expanded state to prevent the disordered rotation of the connecting assembly 120.

In one embodiment, referring to fig. 10, the mounting hole 113 is provided with a limiting step 117, a first end of the elastic member 116 abuts against the limiting step 117, and a second end of the elastic member 116 abuts against the clamp spring 114. Through setting up spacing step 117, the elastic component 116 can accurately be positioned in mounting hole 113, can locate connecting component 112 and butt on spacing step 117 with the one end cover of elastic component 116 earlier, and the other end directly butt can accomplish the installation on jump ring 114, has effectively improved assembly efficiency.

Referring to fig. 7 and 9, according to an embodiment of the present invention, an upper end surface of the connection plate 111 of any one connection assembly 110 is in contact with a lower end surface of the connection plate 111 of an adjacent connection assembly 110. It will be appreciated that the stability of the connecting ring 120 so configured is greater and enables even and efficient transfer of force from one connecting assembly 110 to another connecting assembly 110 when subjected to external forces or deformation, thereby maintaining the stability and balance of the overall structure.

According to an embodiment of the present invention, referring to fig. 7, a plurality of connection rings 120 are provided, the connection rings 120 are disposed at intervals along the axial direction of the deformation frame 100, and the connection rings 120 are connected by a support member 130. It will be appreciated that the modular design of the connection ring 120 makes maintenance and repair work relatively simple. If a certain connecting ring 120 is damaged, only the connecting ring 120 needs to be replaced, the whole frame does not need to be replaced, and the maintenance cost and time are reduced.

It can be appreciated that in the case where the upper end surface of the connection plate 111 of any one connection assembly 110 is in contact with the lower end surface of the connection plate 111 of an adjacent connection assembly 110, the spacing between the connection rings 120 axially disposed is the same, and the lengths of the support members 130 are the same, so that the same-sized support members 130 can be used, and the manufacturing cost is reduced.

The support member 130 may be a support bar or a support plate, and is not particularly limited herein.

Referring to fig. 13, the protection assembly of the transmission line 300 further includes a fixing member 200, the deformation frame 100 is mounted to the fixing member 200, and the line is fixed to the fixing member 200 according to an embodiment of the present invention. It will be appreciated that by mounting the deformation frame 100 on the fixing member 200 and fixing the pipe to the fixing member 200, the stability of the overall structure can be greatly improved. The fixing member 200 provides a firm support for the deformation frame 100 and the pipe line, preventing them from being displaced or deformed when being subjected to external force or vibration.

According to one embodiment of the present invention, the deformation frame 100 and the transmission line 300 are coaxially disposed. It is understood that when the deformation frame 100 is in the contracted state, the connection plates 111 of the deformation frame 100 can be abutted against the transmission pipelines 300, so that the temperature control system cannot be mutually extruded during transportation, and the placement stability of each transmission pipeline 300 is higher.

According to one embodiment of the present invention, the temperature control system further includes a locking mechanism (not shown) for locking the deformed frame 100 in either the expanded state or the contracted state. It can be appreciated that, by the locking mechanism, the deformation frame 100 can be ensured to be kept stable in the opened or contracted state, accidental folding or unfolding can be prevented, safety can be improved, frequent movement of the deformation frame 100 can be reduced, and the service life of the deformation frame 100 can be prolonged.

In one embodiment, the locking mechanism is provided on an end face of the connection plate 111, one of the connection plate 111 and the other connection plate 111 is provided with a positioning projection, and the other is provided with a first positioning groove and a second positioning groove which are provided at intervals. The deformation frame 100 is in a contracted state when the positioning protrusion is engaged with the first positioning groove, and the deformation frame 100 is in an expanded state when the positioning protrusion is engaged with the second positioning groove.

Of course, it is also possible that one of the connection plate 111 and the other connection plate 111 is provided with a positioning groove, and the other one is provided with a first positioning protrusion and a second positioning protrusion which are arranged at intervals.

It should be noted that the embodiments herein are merely examples, and the locking mechanism may be other forms.

According to a second aspect of the present invention, a temperature control system is provided, which includes an integrated circuit temperature control device and a transmission pipeline assembly of the integrated circuit temperature control device, where the transmission pipeline 300 is connected to the integrated circuit temperature control device.

It should be noted that, since the temperature control system of the present invention includes the transmission pipeline assembly of the integrated circuit temperature control device, all the technical effects of the transmission pipeline assembly of the integrated circuit temperature control device are provided, and are not repeated herein.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. A transmission line assembly for an integrated circuit temperature control device, comprising:

-a transfer line (300), the transfer line (300) comprising a flexible tube section (310);

the flexible pipe sections (310) are sleeved with the flexible outer pipes (400), and a vacuum heat insulation cavity (410) is formed between the transmission pipeline (300) and the flexible outer pipes (400).

2. The transmission line assembly of an integrated circuit temperature control device according to claim 1, characterized in that a number of supports (500) are arranged between the flexible pipe section (310) and the flexible outer pipe (400), the supports (500) being arranged at intervals along the extension direction of the insulating chamber.

3. The transfer line assembly of an integrated circuit temperature control device of claim 2, wherein the support (500) is a spider.

4. The transmission line assembly of an integrated circuit temperature control device according to claim 1, wherein the flexible tube section (310) is a bellows.

5. The transmission line assembly of an integrated circuit temperature control device according to claim 4, wherein the flexible outer tube (400) comprises a corrugated section (420) and connection sections (430) at both ends of the corrugated section (420), the connection sections (430) being provided with an interface (440) communicating with the vacuum insulation chamber (410).

6. The transmission line assembly of an integrated circuit temperature control device according to any one of claims 1 to 5, wherein the transmission line (300) includes a plurality of sections of the flexible pipe section (310) spaced apart from each other, and the flexible outer pipe (400) and the flexible pipe section (310) are disposed in one-to-one correspondence.

7. The transmission line assembly of an integrated circuit temperature control device according to claim 6, wherein the transmission line (300) comprises a connection tube section (320) located between adjacent flexible tube sections (310), an inflatable membrane (10) is wrapped outside the connection tube section (320), an inflation chamber (11) is provided inside the inflatable membrane (10), the inflatable membrane (10) has an inflated state and a contracted state, in the inflated state, the inflatable chamber (11) is inflated, and the inflatable membrane (10) is inflated to a greater extent; in the contracted state, the inflation lumen (11) is deflated and the inflation diaphragm (10) is contracted.

8. The transmission line assembly of an integrated circuit temperature control device according to claim 6, wherein the transmission line (300) comprises a connection pipe section (320) between adjacent flexible pipe sections (310), the connection pipe section (320) being externally wrapped with a deformation frame (100), the deformation frame (100) forming a protection space (101) of the connection pipe section (320), the deformation frame (100) having an expanded state and a contracted state, the protection space (101) decreasing during switching of the expanded state towards the contracted state; the protection space (101) increases during switching of the contracted state towards the expanded state.

9. The transfer line assembly of an integrated circuit temperature control device according to any one of claims 1 to 5, wherein the number of flexible outer tubes (400) is one for one transfer line (300), and the length of the flexible outer tubes (400) matches the length of the transfer line (300).

10. A temperature control system, characterized by comprising an integrated circuit temperature control device and a transmission line assembly of the integrated circuit temperature control device according to any of claims 1 to 9, said transmission line (300) being connected to said integrated circuit temperature control device.