CN117655470A - Argon arc welding process and tool for CVD reaction chamber for semiconductor - Google Patents
Argon arc welding process and tool for CVD reaction chamber for semiconductor Download PDFInfo
- Publication number
- CN117655470A CN117655470A CN202311800567.2A CN202311800567A CN117655470A CN 117655470 A CN117655470 A CN 117655470A CN 202311800567 A CN202311800567 A CN 202311800567A CN 117655470 A CN117655470 A CN 117655470A
- Authority
- CN
- China
- Prior art keywords
- reaction cavity
- sliding
- block
- sleeve
- arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003466 welding Methods 0.000 title claims abstract description 64
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 title claims abstract description 40
- 229910052786 argon Inorganic materials 0.000 title claims abstract description 20
- 239000004065 semiconductor Substances 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims abstract description 17
- 230000008569 process Effects 0.000 title claims abstract description 16
- 238000004140 cleaning Methods 0.000 claims abstract description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 8
- 238000001514 detection method Methods 0.000 claims abstract description 7
- 238000003825 pressing Methods 0.000 claims description 43
- 230000007246 mechanism Effects 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 4
- 238000005336 cracking Methods 0.000 abstract description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 15
- 239000007789 gas Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The invention discloses an argon arc welding process of a CVD reaction chamber for a semiconductor, which comprises the following steps: s1, cleaning: cleaning the reaction cavity cylinder body, the reaction cavity waterway cover plate, the flange and the waterway joint; s2, mounting: the reaction cavity cylinder body, the reaction cavity waterway cover plate, the flange and the waterway joint are arranged on a tool; s3, welding: placing the tool on a turntable, then welding a reaction cavity cylinder body and a reaction cavity waterway cover plate, and then sequentially welding a waterway joint and a flange to obtain a CVD reaction cavity; s4, detecting: and adopting a water pressure detection device to ensure that the CVD reaction cavity is maintained for 24 hours under the water pressure of 0.8 MPa. The process of the invention is to assemble the reaction cavity cylinder body, the reaction cavity waterway cover plate, the flange and the waterway joint at one time through the welding tool, and then to weld at one time, thereby avoiding the position deviation of the reaction cavity cylinder body during welding and reducing the deformation and cracking during welding.
Description
Technical Field
The invention relates to the technical field of CVD reaction cavity welding, in particular to a CVD reaction cavity argon arc welding process and tool for a semiconductor.
Background
Chemical Vapor Deposition (CVD), which refers to the process of synthesizing coatings or nanomaterials by reacting chemical gases or vapors on the surface of a substrate, is the most widely used technique in the semiconductor industry for depositing a wide variety of materials, including a wide range of insulating materials, most metallic materials and metallic alloy materials. The main principle is as follows: two or more gaseous starting materials are introduced into a reaction chamber and then they chemically react with each other to form a new material which is deposited on the wafer surface.
The reaction and deposition of chemical gas are mainly carried out in a CVD reaction cavity, so that the performance of the CVD reaction cavity has great influence on the quality of the generated material, the existing CVD reaction cavity is mainly formed by adopting a TIG welding mode, and the welding is easy to deform and crack after welding due to difficult clamping of parts such as a reaction cavity barrel body and the like.
Disclosure of Invention
In order to solve the technical problems, the invention provides an argon arc welding process and tool for a CVD reaction chamber for semiconductors.
The technical scheme of the invention is as follows: an argon arc welding process of a CVD reaction chamber for a semiconductor comprises the following steps:
s1, cleaning
Cleaning the reaction cavity cylinder body, the reaction cavity waterway cover plate, the flange and the waterway joint;
s2, mounting
The reaction cavity cylinder body, the reaction cavity waterway cover plate, the flange and the waterway connector are arranged on a tool;
s3, welding
Placing the tool on a rotary table, then welding a reaction cavity cylinder body and a reaction cavity waterway cover plate, after the reaction cavity cylinder body and the reaction cavity waterway cover plate are welded, sequentially welding a waterway joint and a flange, and obtaining a CVD reaction cavity after the welding is completed;
s4, detection
And adopting a water pressure detection device to ensure that the CVD reaction cavity is maintained for 24 hours under the water pressure of 0.8 MPa.
Description: according to the process, the reaction cavity cylinder body, the reaction cavity waterway cover plate, the flange and the waterway joint are assembled at one time through the welding tool, and then one-time welding is carried out, so that the position deviation of the reaction cavity cylinder body during welding is avoided, and the deformation and cracking during welding are reduced.
Further, in the step S3, the welding is performed by adopting a direct current forward connection and wire filling manner, the welding current is 160-180A, and the rotating speed of the turntable is 10min/r.
Description: the welding mode and the welding parameters can ensure the performance of the welding seam and the welding efficiency.
On the other hand, the invention provides a tool used in the argon arc welding process, which comprises a support and a plurality of arc-shaped supporting blocks which are arranged on the support in a sliding manner and are used for supporting the inner wall of the cylinder body of the reaction cavity;
the support is provided with a positioning ring for assisting in positioning the outer wall of the cylinder body of the reaction cavity, each arc-shaped supporting block is provided with a sliding block on the inner side, and the bottom surface of the support is provided with a sliding groove for sliding connection with the sliding block.
Description: above-mentioned frock adopts the holding ring to fix a position reaction chamber stack shell to outwards slide the inner wall to reaction chamber stack shell through the arc supporting shoe and support, can adjust to the reaction chamber stack shell of different internal diameters, support simultaneously firmly, reaction chamber stack shell position when having effectively avoided the welding takes place the skew.
As an alternative scheme of the invention, the sliding chute penetrates through the support, a gasket is arranged on the bottom surface of the support at the position corresponding to the sliding chute, a plurality of bolts are connected to the gasket through threads, and a plurality of threaded holes for matching with the corresponding bolts are formed in the bottom surface of each sliding block.
Description: the position of the arc-shaped supporting block can be directly fixed through the bolts, so that the position of the arc-shaped supporting block is stable, the disassembly is convenient, the use is simple, and the manufacturing cost is low.
As another alternative scheme of the invention, a rotating shaft is arranged at the central axis of the support, one end of the rotating shaft penetrates through the support and is connected with the driving mechanism, and a movable sleeve is connected on the rotating shaft in a threaded manner;
the side wall of the movable sleeve is provided with a plurality of connecting plates corresponding to the sliding blocks one by one, and the connecting plates are hinged with the corresponding sliding blocks through connecting rods.
Description: the rotary shaft can be driven to rotate through the driving mechanism, so that the movable sleeve can move up and down along the rotary shaft, and the movable sleeve can push the sliding blocks to slide outwards simultaneously through the connecting rods when moving downwards, so that the reaction cavity barrel is fixed, the reaction cavity barrel is stable in position, and the operation is simple and convenient.
Further, a rotating disc, a fixed disc and an annular air bag are sleeved on the rotating shaft from top to bottom in sequence; the movable sleeve is positioned between the fixed disc and the annular air bag;
the fixed disc and the annular air bag are both rotationally connected with the rotating shaft, the fixed disc is fixedly connected with the support, two ends of the annular air bag are respectively contacted with the movable sleeve and the support, and the air inlet of the annular air bag is provided with a one-way valve;
the fixed disc is provided with a plurality of sleeves which are in one-to-one correspondence with the arc-shaped supporting blocks, a piston is connected in the sleeve in a sliding and sealing manner, one end of the piston is connected with a sliding rod in a rotating and sealing manner, and one end of the sliding rod penetrates through the sleeve and is sequentially sleeved with a friction wheel, a connecting block and a pressing block; the sleeves are communicated with the annular air bags through pipelines;
the connecting block is in sliding connection with the sliding rod, the connecting block is fixedly connected with the arc-shaped supporting block, the pressing block is positioned on the outer side of the arc-shaped supporting block and used for clamping the waterway cover plate of the reaction cavity, the friction wheel is connected with the pressing block through a spring, and a plurality of friction blocks which are in contact with the friction wheel by sliding of the sliding rod are arranged on the rotating disc;
the piston is provided with a vent hole, and an exhaust channel which is communicated with the vent hole in a rotating way is arranged in the sliding rod.
Description: when the movable sleeve moves downwards, the movable sleeve can extrude the annular air bag, so that a plurality of sliding rods extend outwards simultaneously until the friction blocks on the rotating disc are in contact with the friction wheels, the sliding rods can drive the pressing blocks to turn over, at the moment, the piston deflates, the plurality of pressing blocks clamp the reaction cavity waterway cover plate under the action of the springs, and the coaxiality of the reaction cavity waterway cover plate and the reaction cavity barrel body is ensured while the operation is simple, so that the position deviation during welding is avoided.
Still further, the briquetting comprises vertical screw thread piece and the arc piece of setting transversely, screw thread piece passes through threaded connection with the slide bar.
Description: the mode of threaded connection is connected firmly, is convenient for the change and the maintenance of briquetting simultaneously, and low in manufacturing cost, the practicality is good.
Further, a rubber gasket used for being in contact with the waterway cover plate of the reaction cavity is arranged on the inner side of the arc-shaped block.
Description: the rubber gasket can play a certain buffering role, and damage to the surface of the waterway cover plate of the reaction cavity caused by the arc-shaped block is avoided.
Further, a sliding column is arranged on the inner wall of the connecting block, and a combined groove matched with the sliding column is formed in the side wall of the sliding rod;
the combined groove comprises two linear grooves which are arranged in a central symmetry mode and an arc groove which is arranged at one end of each linear groove and used for connecting the two linear grooves.
Description: the linear groove can ensure that the sliding rod does not rotate randomly when sliding, so that the position deviation of the sliding rod is avoided, the arc groove can limit the rotation angle of the sliding rod, and the sliding rod is prevented from rotating excessively.
Further, one end of each of the plurality of connecting rods is provided with an arc sleeve, the outer wall of each arc sleeve is provided with teeth, the connecting plates are transversely connected with toothed plates which are engaged with the corresponding arc sleeves by sliding in a sliding manner, the toothed plates are connected with the connecting plates in a sliding manner through a plurality of spring rods arranged on the toothed plates, and the connecting plates are provided with first air bags which are used for pushing the toothed plates to be separated from the arc sleeves by inflation;
the movable sleeve consists of a threaded sleeve at the upper end and a lifting sleeve at the lower end, the threaded sleeve is in limit rotation connection with the lifting sleeve, and the connecting plate is arranged on the side wall of the lifting sleeve;
the upper ends of the connecting plates are respectively provided with a pressing column, the pressing columns are vertically connected with sliding holes formed in the connecting plates in a sliding mode, second air bags communicated with the first air bags are arranged in the sliding holes, and a plurality of pressing plates which are used for pressing downwards in a one-to-one correspondence mode through rotation of the pressing plates and the pressing columns are arranged on the side walls of the threaded sleeves.
Description: the pinion rack can be with the tooth meshing on the arc cover, makes the connecting rod by the lock dead, avoids reaction chamber stack shell to be removed at will by fixed back connecting rod, makes the fixed of reaction chamber stack shell more firm, and when the pivot rotates, the clamp plate can push down the pressure post, makes the second gasbag aerify in to first gasbag, and first gasbag can promote pinion rack and arc cover and separate, avoids influencing the reciprocates of movable sleeve.
The beneficial effects of the invention are as follows:
(1) The process of the invention is to assemble the reaction cavity cylinder body, the reaction cavity waterway cover plate, the flange and the waterway joint at one time through the welding tool, and then to weld at one time, thereby avoiding the deviation of the position of the reaction cavity cylinder body during welding and reducing the deformation and cracking during welding.
(2) The tool adopts the positioning ring to position the reaction cavity cylinder body, supports the inner wall of the reaction cavity cylinder body by outwards sliding the arc-shaped supporting blocks, can adjust the reaction cavity cylinder bodies with different inner diameters, and meanwhile, has stable support, and effectively avoids the position deviation of the reaction cavity cylinder body during welding.
(3) According to the tool disclosed by the invention, the rotating shaft can be driven to rotate through the driving mechanism, so that the movable sleeve can move up and down along the rotating shaft, and when the movable sleeve moves downwards, the plurality of sliding blocks are pushed by the connecting rods to simultaneously slide outwards, so that the reaction cavity cylinder body is fixed, the position of the reaction cavity cylinder body is stable, and meanwhile, the operation is simple and convenient, and the practicability is good.
Drawings
FIG. 1 is a schematic view showing the overall structure of embodiment 1 of the present invention;
FIG. 2 is a schematic diagram of a tooling structure according to embodiment 1 of the present invention;
FIG. 3 is a schematic view of the bottom structure of the tooling of embodiment 1 of the present invention;
FIG. 4 is a schematic view of the arc-shaped supporting block according to the embodiment 1 of the present invention;
FIG. 5 is a schematic diagram of a tooling structure according to embodiment 4 of the present invention;
FIG. 6 is a cross-sectional view of the tooling of example 4 of the present invention;
FIG. 7 is a schematic diagram of a clamping structure of a tool according to embodiment 5 of the present invention;
FIG. 8 is a schematic structural diagram of an unclamped state of the tool according to embodiment 5 of the present invention;
FIG. 9 is a cross-sectional view of the tooling of example 5 of the present invention;
FIG. 10 is a schematic view showing the structure of a sleeve according to embodiment 5 of the present invention;
FIG. 11 is a schematic view showing the structure of a rotary disk according to embodiment 5 of the present invention;
FIG. 12 is a schematic view of a sliding rod according to embodiment 5 of the present invention;
FIG. 13 is a schematic view of the internal structure of the tooling of embodiment 6 of the present invention;
fig. 14 is an enlarged view at a of fig. 13;
FIG. 15 is a cross-sectional view of a web according to example 6 of the present invention;
FIG. 16 is a schematic view showing the structure of a movable sleeve according to embodiment 6 of the present invention;
the device comprises a 1-reaction chamber cylinder, a 2-reaction chamber waterway cover plate, a 3-flange, a 4-waterway connector, a 5-tool, a 51-support, a 511-positioning ring, a 52-arc-shaped supporting block, a 521-sliding block, a 522-connecting block, a 53-gasket, a 531-bolt, a 54-rotating shaft, a 55-movable sleeve, a 551-connecting plate, a 552-connecting rod, a 553-threaded sleeve, a 554-lifting sleeve, a 56-rotating disc, a 561-friction block, a 57-fixed disc, a 58-annular air bag, a 6-sleeve, a 61-piston, a 611-air vent, a 62-sliding rod, a 621-exhaust channel, a 63-friction wheel, a 64-pressing block, a 641-threaded block, a 642-arc-shaped block, a 7-toothed plate, a 71-arc-shaped sleeve, a 72-first air bag, a 73-spring rod, a 74-pressing column, a 75-second air bag and a 76-pressing plate.
Detailed Description
The invention will be described in further detail with reference to the following embodiments to better embody the advantages of the invention.
Example 1
An argon arc welding process of a CVD reaction chamber for a semiconductor comprises the following steps:
s1, cleaning
Cleaning the reaction cavity cylinder body 1, the reaction cavity waterway cover plate 2, the flange 3 and the waterway joint 4;
s2, mounting
The reaction cavity cylinder body 1, the reaction cavity waterway cover plate 2, the flange 3 and the waterway joint 4 are arranged on a tool 5;
s3, welding
Placing the tool 5 on a rotary table, then welding the reaction cavity cylinder body 1 and the reaction cavity waterway cover plate 2, after the reaction cavity cylinder body 1 and the reaction cavity waterway cover plate 2 are welded, sequentially welding the waterway joint 4 and the flange 3, and obtaining a CVD reaction cavity after the welding is completed; the welding is carried out in a direct current forward connection and wire filling mode, the welding current is 170A, and the rotating speed of the turntable is 10min/r;
s4, detection
Adopting a water pressure detection device to enable the CVD reaction cavity to be maintained for 24 hours under the water pressure of 0.8 MPa;
as shown in fig. 1, the tool used in the argon arc welding process comprises a support 51 and three arc-shaped supporting blocks 52 which are arranged on the support 51 in a sliding manner and are used for supporting the inner wall of the reaction cavity barrel 1;
as shown in fig. 2, the support 51 is provided with a positioning ring 511 for assisting in positioning the outer wall of the reaction chamber barrel 1, a slide block 521 is provided on the inner side of each arc-shaped supporting block 52, and a slide groove for slidably connecting with the slide block 521 is provided on the bottom surface of the support 51;
as shown in fig. 3 and 4, the sliding groove penetrates through the support 51, a gasket 53 is disposed on the bottom surface of the support 51 at the position corresponding to the sliding groove, two bolts 531 are connected to the gasket 53 in a threaded manner, and two threaded holes for matching with the corresponding bolts 531 are disposed on the bottom surface of each sliding block 521.
The working principle of the tool 5 is as follows: the reaction chamber cylinder 1 is placed on the support 51, then the slide block 521 is slid, the slide block 521 drives the arc-shaped supporting block 52 to fix the reaction chamber cylinder 1, and then the bolt 531 is screwed, so that the position of the slide block 521 is fixed.
Example 2
This embodiment is substantially the same as embodiment 1 except that the welding current is 160A.
Example 3
This embodiment is substantially the same as embodiment 1 except that the welding current is 180A.
Example 4
As shown in fig. 5 and 6, the present embodiment is basically the same as embodiment 1, except that a rotating shaft 54 is disposed at the central axis of the support 51, and the lower end of the rotating shaft 54 passes through the support 51 and is connected with a driving mechanism, the driving mechanism adopts a commercial motor, and a movable sleeve 55 is screwed on the rotating shaft 54;
the side wall of the movable sleeve 55 is provided with three connecting plates 551 corresponding to the slide blocks 521 one by one, and the connecting plates 551 are hinged with the corresponding slide blocks 521 through connecting rods 552.
The working principle of the tool 5 is as follows: the driving mechanism drives the rotating shaft 54 to rotate, the rotating shaft 54 drives the movable sleeve 55 to move up and down along the rotating shaft 54 when rotating, and when the movable sleeve 55 moves down, the movable sleeve 55 pushes the sliding blocks 521 to slide outwards through the connecting rods 552, so that the three sliding blocks 521 drive the three arc-shaped supporting blocks 52 to simultaneously support outwards, and the reaction cavity barrel 1 is fixed.
Example 5
As shown in fig. 7, this embodiment is basically the same as embodiment 4, except that a rotating disc 56, a fixed disc 57 and an annular air bag 58 are sleeved on the rotating shaft 54 from top to bottom in sequence; the movable sleeve 55 is positioned between the fixed disc 57 and the annular air bag 58;
as shown in fig. 9, the fixed disc 57 and the annular air bag 58 are both rotatably connected with the rotating shaft 54, the fixed disc 57 is fixedly connected with the support 51 through a connecting rod, the upper end and the lower end of the annular air bag 58 are respectively contacted with the movable sleeve 55 and the support 51, a one-way valve is arranged at an air inlet of the annular air bag 58, the one-way valve adopts the prior art product, and the one-way valve is unidirectionally communicated from the outside to the direction of the annular air bag 58;
as shown in fig. 10, the fixing plate 57 is provided with three sleeves 6 corresponding to the arc-shaped supporting blocks 52 one by one, a piston 61 is connected in a sliding seal manner in the sleeves 6, the right end of the piston 61 is connected with a sliding rod 62 in a rotating seal manner, and the right end of the sliding rod 62 penetrates through the sleeves 6 and is sequentially sleeved with a friction wheel 63, a connecting block 522 and a pressing block 64; the three sleeves 6 are communicated with the annular air bag 58 through pipelines;
the connecting block 522 is slidably connected with the sliding rod 62, the connecting block 522 is fixedly connected with the arc-shaped supporting block 52, the pressing block 64 is located at the outer side of the arc-shaped supporting block 52 and is used for clamping the reaction chamber waterway cover plate 2, the friction wheel 63 is connected with the pressing block 64 through a spring, as shown in fig. 11, and six friction blocks 561 which are in sliding contact with the friction wheel 63 by utilizing the sliding rod 62 are arranged on the rotating disc 56;
the piston 61 is provided with a vent hole 611, and the slide bar 62 is internally provided with an exhaust passage 621 which is communicated with the vent hole 611 in a rotating way;
the pressing block 64 consists of a vertically arranged threaded block 641 and a transversely arranged arc-shaped block 642, and the threaded block 641 is in threaded connection with the sliding rod 62;
a rubber gasket for contacting with the reaction cavity waterway cover plate 2 is arranged on the inner side of the arc-shaped block 642;
a sliding column is arranged on the inner wall of the connecting block 522, and a combined groove for being matched with the sliding column is arranged on the side wall of the sliding rod 62;
as shown in fig. 12, the combined slot comprises two centrally symmetrical linear slots and an arc slot arranged at the right end of the linear slot and used for connecting the two linear slots.
The working principle of the tool 5 is as follows: as shown in fig. 8, the tooling is in an unclamped state, at this time, the pressing block 64 is positioned at the inner side of the waterway cover plate 2 of the reaction chamber, and the movable sleeve 55 moves downwards and extrudes the annular air bag 58 along with the rotation of the rotating shaft 54, and the air after the annular air bag 58 is compressed enters the sleeve 6, so that the sliding rod 62 extends outwards;
until the slide bar 62 drives the pressing block 64 to move to the outer side of the reaction cavity waterway cover plate 2, the friction wheel 63 also moves to the position where the friction block 561 is located, the friction wheel 63 drives the slide bar 62 to rotate 180 degrees along with the continued rotation of the rotating disc 56, the pressing block 64 can turn 180 degrees along with the slide bar 62, and the exhaust passage 621 rotates to be aligned with the air release hole 611;
the gas in the sleeve 6 is automatically discharged, the slide bar 62 is contracted under the action of the spring until the pressing block 64 is contacted with the reaction chamber waterway cover plate 2, and at the moment, the reaction chamber waterway cover plate 2 is fixed by the pressing block 64.
Example 6
As shown in fig. 13 and 14, this embodiment is substantially the same as embodiment 4, except that the right ends of a plurality of the connecting rods 552 are each provided with an arc-shaped sleeve 71, teeth are provided on the outer wall of the arc-shaped sleeve 71, the connecting plates 551 are transversely slidably connected with toothed plates 7 for meshing with the corresponding arc-shaped sleeves 71 by sliding, the toothed plates 7 are slidably connected with the connecting plates 551 through two spring rods 73 provided thereon, the left ends of the two spring rods 73 are each passed through a support plate provided on the connecting plates 551 and connected with a movable plate, springs provided on the spring rods 73 are provided between the toothed plates 7 and the support plate, and the connecting plates 551 are provided with first air bags 72 for pushing the toothed plates 7 to separate from the arc-shaped sleeves 71 by inflation, the left ends of the first air bags 72 are connected with the support plates, and the right ends of the first air bags 72 are connected with the movable plates;
as shown in fig. 16, the movable sleeve 55 is composed of a threaded sleeve 553 at the upper end and a lifting sleeve 554 at the lower end, the threaded sleeve 553 is in spacing 120-degree rotation connection with the lifting sleeve 554, the threaded sleeve 553 is in rotation connection with the lifting sleeve 554 through an annular groove arranged on the threaded sleeve 553, the lower end of the threaded sleeve 553 is provided with a fixed plate, limiting plates for limiting the rotation of the threaded sleeve 553 are arranged in the lifting sleeves 554 at the left side and the right side of the fixed plate, and the connecting plate 551 is arranged on the side wall of the lifting sleeve 554;
the upper ends of the three connecting plates 551 are respectively provided with a pressing column 74, the pressing columns 74 are vertically and slidably connected with sliding holes formed in the connecting plates 551, as shown in fig. 15, second air bags 75 communicated with the first air bags 72 are arranged in the sliding holes, and three pressing plates 76 which are in one-to-one correspondence with the pressing columns 74 by rotation of the pressing plates are arranged on the side walls of the threaded sleeves 553.
The working principle of the toothed plate 7 is as follows: in the initial state, the toothed plate 7 is meshed with the teeth on the arc-shaped sleeve 71, and at the moment, the right end of the connecting rod 552 is locked;
as the driving mechanism drives the rotating shaft 54 to rotate, the rotating shaft 54 drives the threaded sleeve 553 to rotate first, the pressing plate 76 rotates along with the threaded sleeve 553 until the pressing plate 76 is aligned with the connecting plate 551, at this time, the threaded sleeve 553 is limited by the rotation of the limiting plate, meanwhile, the pressing plate 76 presses down the pressing column 74, so that the gas in the second gas bag 75 enters the first gas bag 72, the first gas bag 72 stretches to push the movable plate to slide rightwards, the toothed plate 7 slides rightwards to be separated from the arc-shaped sleeve 71, and at this time, the right end of the connecting rod 552 can rotate;
as the shaft 54 continues to rotate, the screw sleeve 553 can move downwards along the shaft 54, the screw sleeve 553 drives the lifting sleeve 554 to move downwards together until the arc-shaped supporting block 52 fixes the reaction chamber barrel 1, then the driving mechanism drives the shaft 54 to rotate reversely by 60 degrees, the pressing plate 76 is separated from the pressing post 74, the toothed plate 7 slides leftwards under the action of the spring rod 73 and is meshed with the arc-shaped sleeve 71, and at the moment, the right end of the connecting rod 552 is locked.
Claims (10)
1. The argon arc welding process of the CVD reaction chamber for the semiconductor is characterized by comprising the following steps of:
s1, cleaning
Cleaning the reaction cavity cylinder body (1), the reaction cavity waterway cover plate (2), the flange (3) and the waterway joint (4);
s2, mounting
The reaction cavity cylinder body (1), the reaction cavity waterway cover plate (2), the flange (3) and the waterway joint (4) are arranged on a tool (5);
s3, welding
Placing a tool (5) on a rotary table, then welding a reaction cavity cylinder body (1) and a reaction cavity waterway cover plate (2), and after the reaction cavity cylinder body (1) and the reaction cavity waterway cover plate (2) are welded, sequentially welding a waterway joint (4) and a flange (3), and obtaining a CVD reaction cavity after the welding is completed;
s4, detection
And adopting a water pressure detection device to ensure that the CVD reaction cavity is maintained for 24 hours under the water pressure of 0.8 MPa.
2. The argon arc welding process of a CVD reaction chamber for a semiconductor according to claim 1, wherein in the step S3, the welding is performed by adopting a direct current positive connection and wire filling mode, the welding current is 160-180A, and the rotating speed of a turntable is 10min/r.
3. A CVD reaction chamber argon arc welding tool for a semiconductor, which is used for realizing the CVD reaction chamber argon arc welding process for a semiconductor according to any one of claims 1-2, characterized in that the tool comprises a support (51) and a plurality of arc-shaped supporting blocks (52) which are arranged on the support (51) in a sliding manner and are used for supporting the inner wall of a reaction chamber cylinder body (1);
the support (51) is provided with a positioning ring (511) for assisting in positioning the outer wall of the reaction cavity barrel (1), a sliding block (521) is arranged on the inner side of each arc-shaped supporting block (52), and the bottom surface of the support (51) is provided with a sliding groove for sliding connection with the sliding block (521).
4. A CVD reactor argon arc welding tool for semiconductors according to claim 3, wherein the chute penetrates through the support (51), a gasket (53) is arranged on the bottom surface of the support (51) at the position corresponding to the chute, a plurality of bolts (531) are connected to the gasket (53) in a threaded manner, and a plurality of threaded holes for matching with the corresponding bolts (531) are formed in the bottom surface of each slider (521).
5. A CVD reactor argon arc welding tool for semiconductors according to claim 3, wherein a rotating shaft (54) is arranged at the central axis of the support (51), one end of the rotating shaft (54) passes through the support (51) and is connected with a driving mechanism, and a movable sleeve (55) is connected with the rotating shaft (54) in a threaded manner;
the side wall of the movable sleeve (55) is provided with a plurality of connecting plates (551) corresponding to the sliding blocks (521) one by one, and the connecting plates (551) are hinged with the corresponding sliding blocks (521) through connecting rods (552).
6. The argon arc welding tool for the CVD reaction cavity for the semiconductor according to claim 5, wherein a rotating disc (56), a fixed disc (57) and an annular air bag (58) are sleeved on the rotating shaft (54) from top to bottom in sequence; the movable sleeve (55) is positioned between the fixed disc (57) and the annular air bag (58);
the fixed disc (57) and the annular air bag (58) are both in rotary connection with the rotary shaft (54), the fixed disc (57) is fixedly connected with the support (51), two ends of the annular air bag (58) are respectively contacted with the movable sleeve (55) and the support (51), and a one-way valve is arranged at an air inlet of the annular air bag (58);
the fixed disc (57) is provided with a plurality of sleeves (6) which are in one-to-one correspondence with the arc-shaped supporting blocks (52), a piston (61) is connected in a sliding and sealing manner in the sleeve (6), one end of the piston (61) is connected with a sliding rod (62) in a rotating and sealing manner, and one end of the sliding rod (62) penetrates through the sleeve (6) and is sequentially sleeved with a friction wheel (63), a connecting block (522) and a pressing block (64); the sleeves (6) are communicated with the annular air bag (58) through pipelines;
the connecting block (522) is in sliding connection with the sliding rod (62), the connecting block (522) is fixedly connected with the arc-shaped supporting block (52), the pressing block (64) is positioned at the outer side of the arc-shaped supporting block (52) and used for clamping the waterway cover plate (2) of the reaction cavity, the friction wheel (63) is connected with the pressing block (64) through a spring, and a plurality of friction blocks (561) which are in sliding contact with the friction wheel (63) by the sliding rod (62) are arranged on the rotating disc (56);
the piston (61) is provided with a vent hole (611), and the slide bar (62) is internally provided with an exhaust passage (621) which is communicated with the vent hole (611) in a rotating way.
7. The argon arc welding tool for the CVD reaction cavity for the semiconductor according to claim 6, wherein the pressing block (64) consists of a threaded block (641) which is vertically arranged and an arc-shaped block (642) which is transversely arranged, and the threaded block (641) is connected with the sliding rod (62) through threads.
8. The argon arc welding tool for the CVD reaction chamber for the semiconductor according to claim 7, wherein a rubber gasket for contacting with the reaction chamber waterway cover plate (2) is arranged on the inner side of the arc-shaped block (642).
9. The argon arc welding tool for the CVD reaction chamber for the semiconductor according to claim 6, wherein a slide column is arranged on the inner wall of the connecting block (522), and a combined groove matched with the slide column is arranged on the side wall of the slide rod (62);
the combined groove comprises two linear grooves which are arranged in a central symmetry mode and an arc groove which is arranged at one end of each linear groove and used for connecting the two linear grooves.
10. The argon arc welding tool for the CVD reaction cavity for the semiconductor according to claim 5, wherein one end of each of the plurality of connecting rods (552) is provided with an arc sleeve (71), teeth are arranged on the outer wall of the arc sleeve (71), a toothed plate (7) which is used for being meshed with the corresponding arc sleeve (71) by sliding is transversely connected to the connecting plate (551), the toothed plate (7) is in sliding connection with the connecting plate (551) through a plurality of spring rods (73) arranged on the toothed plate (7), and a first air bag (72) which is used for pushing the toothed plate (7) to be separated from the arc sleeve (71) by inflation is arranged on the connecting plate (551);
the movable sleeve (55) consists of a threaded sleeve (553) at the upper end and a lifting sleeve (554) at the lower end, the threaded sleeve (553) is in limit rotation connection with the lifting sleeve (554), and the connecting plate (551) is arranged on the side wall of the lifting sleeve (554);
the upper ends of the connecting plates (551) are respectively provided with a pressing column (74), the pressing columns (74) are vertically connected with sliding holes formed in the connecting plates (551) in a sliding mode, second air bags (75) communicated with the first air bags (72) are arranged in the sliding holes, and a plurality of pressing plates (76) which rotate by utilizing the pressing plates to be in one-to-one correspondence with the pressing columns (74) are arranged on the side walls of the threaded sleeves (553).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311800567.2A CN117655470A (en) | 2023-12-26 | 2023-12-26 | Argon arc welding process and tool for CVD reaction chamber for semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311800567.2A CN117655470A (en) | 2023-12-26 | 2023-12-26 | Argon arc welding process and tool for CVD reaction chamber for semiconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117655470A true CN117655470A (en) | 2024-03-08 |
Family
ID=90086389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311800567.2A Pending CN117655470A (en) | 2023-12-26 | 2023-12-26 | Argon arc welding process and tool for CVD reaction chamber for semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117655470A (en) |
-
2023
- 2023-12-26 CN CN202311800567.2A patent/CN117655470A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110281012A (en) | A kind of truss-like forging ring flange automation machining production line | |
| CN111192830B (en) | Method for processing diode pin of electronic component | |
| CN111618467B (en) | New energy automobile exhaust pipe welding process | |
| CN109227741A (en) | A kind of annular perforating device of tubular object extruding | |
| CN112620994B (en) | Tank type pressure container manufacturing and welding process | |
| CN117655470A (en) | Argon arc welding process and tool for CVD reaction chamber for semiconductor | |
| CN217255029U (en) | Center positioning quartz tube polishing device | |
| CN113400005A (en) | Full-automatic intelligent manufacturing equipment with universal structure for floor sweeping robot | |
| CN210188533U (en) | Double-piston type pneumatic double-acting feeding chuck | |
| CN101176938A (en) | Gas protecting means for preparing superhard abrasive material tools through induction brazing | |
| CN107225297B (en) | A kind of gear-hobbing machine and its gear fixture | |
| CN210908762U (en) | Welding tool with multi-angle adjustment function | |
| CN111940688A (en) | Pressure head mechanism for metal casting molding machine | |
| CN208323180U (en) | The clamping device of metal packaging tank | |
| CN211135263U (en) | Feeding device for machining corrugated pipe | |
| CN111063551A (en) | Intelligent rotary capacitor welding robot equipment | |
| CN112981342B (en) | Production process of integrally-formed tube target | |
| CN1176168A (en) | Center mechanism of tyre vulcanizer | |
| CN113000951A (en) | Effectual tapping machine | |
| CN209368330U (en) | A kind of piston ring processing unit (plant) convenient to use | |
| CN201511250U (en) | Gear-rack type clamping mechanism | |
| CN116907763B (en) | Material taking suction nozzle performance detection device and detection method | |
| CN215841735U (en) | Radial preparation liquid chromatographic column for integral bed separation medium | |
| CN214162245U (en) | Feeding and discharging manipulator for compressor production | |
| CN216763468U (en) | Loading and unloading device of plasma cleaning equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |