CN117630787A - Hall sensor and temperature sensor calibration system - Google Patents
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- CN117630787A CN117630787A CN202311541914.4A CN202311541914A CN117630787A CN 117630787 A CN117630787 A CN 117630787A CN 202311541914 A CN202311541914 A CN 202311541914A CN 117630787 A CN117630787 A CN 117630787A
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- 239000000523 sample Substances 0.000 claims abstract description 28
- 230000033001 locomotion Effects 0.000 claims description 17
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 13
- 229910052802 copper Inorganic materials 0.000 claims description 13
- 239000010949 copper Substances 0.000 claims description 13
- 238000005057 refrigeration Methods 0.000 claims description 9
- 239000000306 component Substances 0.000 description 8
- 238000005481 NMR spectroscopy Methods 0.000 description 6
- 239000001307 helium Substances 0.000 description 6
- 229910052734 helium Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
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- 230000009286 beneficial effect Effects 0.000 description 1
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Abstract
The present disclosure provides a hall sensor and temperature sensor calibration system, comprising: a superconducting standard magnet, a magnetic field calibration reference probe and a multifunctional calibration structure; room temperature holes are reserved on the left side and the right side of the superconducting standard magnet; the magnetic field calibration reference probe and the multifunctional calibration structure extend into room temperature holes on two sides of the superconducting standard magnet respectively and are symmetrically arranged relative to the center of the superconducting standard magnet; the multifunctional calibration structure is characterized in that one end, close to the magnetic field calibration reference probe, of the multifunctional calibration structure is provided with a sensor placement tool, the inside of the sensor placement tool is in a vacuum state, and a Hall sensor to be calibrated, a reference temperature sensor and a plurality of temperature sensors to be calibrated are arranged; the other end of the multifunctional calibration structure is a cryostat assembly used for providing a constant temperature environment for the Hall sensor to be calibrated, and the temperature range of the constant temperature environment is 4.2K to room temperature. The system can provide a calibration environment with a large-span magnetic field range and a large-span temperature zone for the Hall sensor, improve the calibration efficiency and acquire more comprehensive calibration data.
Description
Technical Field
The disclosure relates to the technical field of superconducting magnet magnetic field measurement, in particular to a Hall sensor and a temperature sensor calibration system.
Background
The superconducting magnet is a core component of the next-generation miniaturized and compact heavy ion treatment device, and can remarkably reduce the size and weight of the superconducting synchrotron and the rotating frame. The magnetic field measurement work is an important link for checking the design and the processing process of the magnet component, and in order to measure the magnetic field parameters of the superconducting magnet under the actual operation working condition with high precision, the magnetic field sensor and the temperature sensor need to be calibrated under the same working condition. Since the nonlinearity of the hall sensor is mainly related to temperature, and the hall sensor has the shobnikov-de Haas effect under the conditions of low temperature and strong magnetic field, namely, the phenomenon that the conductivity of a material oscillates along with the change of the magnetic field, so that the hall coefficient generates certain oscillation, and about 1% deviation is generated when the magnetic field is large, the hall sensor needs to be calibrated at different temperatures. The design and the operation of the ion therapy superconducting magnet are guided through accurate and comprehensive magnetic field measurement data, the beam adjusting efficiency is improved, and meanwhile, the operation efficiency of ion therapy equipment can be improved, so that the ion therapy superconducting magnet has very important significance.
Disclosure of Invention
In view of the above, the present invention provides a hall sensor and a temperature sensor calibration system.
One aspect of the present disclosure provides a hall sensor and temperature sensor calibration system, comprising: a superconducting standard magnet, a magnetic field calibration reference probe and a multifunctional calibration structure; room temperature holes are reserved on the left side and the right side of the superconducting standard magnet; the magnetic field calibration reference probe and the multifunctional calibration structure extend into the superconducting standard magnet from two room temperature holes respectively and are symmetrically arranged relative to the center of the superconducting standard magnet; the multifunctional calibration structure is characterized in that one end, close to the magnetic field calibration reference probe, of the multifunctional calibration structure is provided with a sensor placement tool, a vacuum environment is arranged inside the sensor placement tool, and a Hall sensor to be calibrated, a reference temperature sensor and a plurality of temperature sensors to be calibrated are arranged; the other end of the multifunctional calibration structure is a cryostat assembly used for providing a constant temperature environment for the Hall sensor to be calibrated, and the temperature range of the constant temperature environment is 4.2K to room temperature.
According to an embodiment of the present disclosure, the sensor placement tool includes: the cold guide is connected with a copper bar, one end of the copper bar is provided with the Hall sensor to be calibrated, the reference temperature sensor and the heater, the other end of the copper bar is annularly provided with the plurality of temperature sensors to be calibrated around the end part, and the other end of the copper bar is connected with the cryostat assembly; the first cold screen is arranged in the shell of the sensor placement tool and covers the cold guide connection copper bar.
According to an embodiment of the present disclosure, the cryostat assembly comprises: the refrigerating assembly, the primary cold head, the secondary cold head and the second cold screen; the refrigeration assembly, the primary cold head, the secondary cold and the sensor placement tool are connected in sequence; the second cold screen is arranged in the shell of the cryostat assembly and covers the primary cold head and the secondary cold head.
According to an embodiment of the present disclosure, the multifunctional calibration structure further includes: and the rotary motion mechanism is connected with the sensor placement tool and is used for adjusting the angle of the Hall sensor to be calibrated.
According to an embodiment of the present disclosure, the hall sensor to be calibrated includes: the first Hall sensor to be calibrated and the second Hall sensor to be calibrated; the first hall sensor to be calibrated and the second hall sensor to be calibrated are respectively horizontally placed and vertically placed relative to the superconducting standard magnet; one of the first hall sensor to be calibrated and the second hall sensor to be calibrated is used for providing a reference coefficient, and the other one of the first hall sensor to be calibrated and the second hall sensor to be calibrated is matched with the rotary motion mechanism to adjust to be perpendicular to the magnetic field direction of the superconducting standard magnet.
According to an embodiment of the present disclosure, further comprising: the horizontal movement mechanism is connected with the multifunctional calibration structure and used for adjusting the multifunctional calibration structure to move relative to the room temperature hole of the superconducting standard magnet.
According to an embodiment of the present disclosure, further comprising: and the support structure is arranged below the multifunctional calibration structure and is used for supporting the multifunctional calibration structure.
According to an embodiment of the present disclosure, the magnetic field calibration reference probe is an NMR probe.
According to the embodiment of the disclosure, the intensity of the magnetic field generated by the superconducting standard magnet ranges from 0T to 4T, and the uniformity is less than or equal to 0.01%.
According to an embodiment of the present disclosure, the distance between the magnetic field calibration reference probe and the multifunctional calibration structure is less than 1.5mm.
The above at least one technical scheme adopted in the embodiment of the disclosure can achieve the following beneficial effects:
the embodiment of the disclosure provides a Hall sensor and a temperature sensor calibration system, which uses a high-uniformity superconducting magnet and a cryostat assembly to provide a calibration environment with a large-span magnetic field range (0-4T) and a large-span temperature zone (4.2K-room temperature) for the Hall sensor, so that nonlinear effects of the Hall sensor under different temperatures and background magnetic fields can be fully and comprehensively researched, and more accurate data can be obtained. The Hall sensor calibration and the temperature sensor calibration are integrated into a set of system, so that the calibration efficiency is improved, and more comprehensive calibration data is provided.
Drawings
For a more complete understanding of the present disclosure and the advantages thereof, reference is now made to the following descriptions taken in conjunction with the accompanying drawings, in which:
FIG. 1 schematically illustrates a schematic diagram of a Hall sensor and temperature sensor calibration system provided by an embodiment of the present disclosure;
FIG. 2 schematically illustrates a structural schematic of a multi-functional calibration structure provided by an embodiment of the present disclosure;
fig. 3 schematically illustrates a structural schematic diagram of a sensor placement tool provided in an embodiment of the present disclosure;
fig. 4 schematically illustrates a schematic structure of a cryostat assembly provided by an embodiment of the present disclosure.
Reference numerals illustrate:
1-superconducting standard magnet; 2-magnetic field calibration reference probe; 3-a multifunctional calibration structure; 31-a sensor placement tool; 32-cryostat assembly; 33-a rotary motion mechanism; 34-a horizontal movement mechanism; 35-a support structure; 311-cold-conducting connecting copper bars; 312-hall sensor to be calibrated; 313—a reference temperature sensor; 314—a heater; 315-a temperature sensor to be calibrated; 316-first cold screen; 321-primary cold head; 322-secondary cold head; 323-a second cold screen; 324-a connector; 325-helium tube.
Detailed Description
Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood that the description is only exemplary and is not intended to limit the scope of the present disclosure. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the concepts of the present disclosure.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. The terms "comprises," "comprising," and/or the like, as used herein, specify the presence of stated features, steps, operations, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, or components.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It should be noted that the terms used herein should be construed to have meanings consistent with the context of the present specification and should not be construed in an idealized or overly formal manner.
Fig. 1 schematically illustrates a schematic diagram of a hall sensor and a temperature sensor calibration system provided in an embodiment of the present disclosure.
As shown in fig. 1, a hall sensor and temperature sensor calibration system provided in an embodiment of the present disclosure includes a superconducting standard magnet 1, a magnetic field calibration reference probe 2, and a multifunctional calibration structure 3. Wherein room temperature holes are reserved on the left side and the right side of the superconducting standard magnet 1; the magnetic field calibration reference probe 2 and the multifunctional calibration structure 3 respectively extend into the two room temperature holes of the superconducting standard magnet 1 and are symmetrically arranged relative to the center of the superconducting standard magnet 1; the end, close to the magnetic field calibration reference probe 2, of the multifunctional calibration structure 3 is provided with a sensor placing tool 31, the inside of the sensor placing tool 31 is in a vacuum state, and a hall sensor 312 to be calibrated, a reference temperature sensor 313 and a plurality of temperature sensors 315 to be calibrated are arranged; the other end of the multifunctional calibration structure 3 is a cryostat assembly 32 for providing a constant temperature environment for the hall sensor 312 to be calibrated, the temperature range of the constant temperature environment being 4.2K to room temperature.
In this embodiment, superconducting standard magnet 1 provides a background magnetic field with high uniformity required for hall sensor 312 to be calibrated, and can ensure good field uniformity of less than or equal to 0.01% in the range of 0-4T magnetic field. The magnetic field calibration reference probe 2 is based on NMR, which uses intrinsic properties (gyromagnetic ratio) of atomic nuclei and is insensitive to temperature, so that measurement accuracy is highest among all current magnetic measurement sensors, and is usually used as a calibration standard of other sensors to provide a magnetic field reference for the hall sensor 312 to be calibrated.
Fig. 2 schematically illustrates a structural schematic diagram of a multifunctional calibration structure provided in an embodiment of the present disclosure.
As shown in fig. 2, in the present embodiment, the multifunctional calibration structure 3 includes a sensor placement tool 31 and a cryostat assembly 32. Wherein, frock 31 is placed to the sensor is used for realizing hall sensor and temperature sensor's demarcation function, and cryostat subassembly 32 is used for providing low temperature constant temperature environment for frock 31 is placed to the sensor, reduces the temperature error that produces in the calibration.
As shown in fig. 2, in the present embodiment, the multifunctional calibration structure 3 further includes a rotational movement mechanism 33, a horizontal movement mechanism 34, and a support structure 35. The rotary motion mechanism 33 is connected with the sensor placement tool 31, and is used for reducing angle errors generated in the calibration process by adjusting the angle of the Hall sensor 312 to be calibrated in the sensor placement tool 31 through the cooperation of a servo motor and a gear. The horizontal movement mechanism 34 is connected with the multifunctional calibration structure 3 and is used for adjusting the movement of the multifunctional calibration structure 3 relative to the room temperature hole of the superconducting standard magnet 1 and sending the multifunctional calibration structure 3 into the well-centered field of the superconducting standard magnet 1. The supporting structure 35 is arranged below the multifunctional calibration structure 3 and used for supporting the multifunctional calibration structure 3, and the pitch angle of the supporting structure can be adjusted to a certain extent so as to reduce the position error generated when the sensor placement tool 31 is calibrated, thereby improving the accuracy of the system.
Fig. 3 schematically illustrates a structural schematic diagram of a sensor placement tool provided in an embodiment of the present disclosure.
As shown in fig. 3, the sensor placement fixture 31 includes a cold conductive connection copper bar 311 and a first cold screen 316. One end of the cold-conducting connecting copper rod 311 is provided with a Hall sensor 312 to be calibrated, a reference temperature sensor 313 and a heater 314, the other end is annularly provided with a plurality of temperature sensors 315 to be calibrated around the end part, and the other end is connected with the low-temperature thermostat component 32; the first cold screen 316 is arranged in the shell of the sensor placing tool 31, covers the cold-conducting connection copper rod 311, and provides a vacuum environment for the hall sensor 312 to be calibrated, the reference temperature sensor 313 and the temperature sensor 315 to be calibrated. The cold-conducting connection copper rod 311 is used as a cold energy transmission path to provide a low-temperature environment for the Hall sensor. The first cold screen 316 provides a vacuum environment for the hall sensor, isolates heat transfer between the hall sensor and an external heat source, and keeps the temperature of the hall sensor stable by isolating external heat and reducing heat leakage in the cavity. The reference temperature sensor 313 is a high-precision temperature sensor for accurately reading the real-time temperature of the hall sensor. The heater 314 is used to adjust the temperature of the hall sensor so that the temperature fluctuation is controlled within 1 ℃, and the corresponding magnetic field fluctuation can be less than 0.01%. Calibration of the temperature sensor 315 to be calibrated can be performed by warming the secondary coldhead 322 and reading back the readout from the high accuracy temperature sensor as a reference.
In this embodiment, the hall sensor 312 to be calibrated, which is disposed at one end of the cold-conducting connection copper bar 311, may include a first hall sensor to be calibrated and a second hall sensor to be calibrated. The first hall sensor to be calibrated and the second hall sensor to be calibrated are respectively horizontally placed and vertically placed relative to the superconducting standard magnet 1; wherein, one of the first hall sensor to be calibrated and the second hall sensor to be calibrated is used for providing a reference coefficient, and the other one of the first hall sensor to be calibrated and the second hall sensor to be calibrated is matched with the rotary motion mechanism 33 to adjust the direction of the magnetic field of the superconducting standard magnet 1 to be perpendicular.
Fig. 4 schematically illustrates a schematic structure of a cryostat assembly provided by an embodiment of the present disclosure.
As shown in fig. 4, cryostat assembly 32 includes a refrigeration assembly, a primary coldhead 321, a secondary coldhead 322, and a second coldscreen 323. The refrigeration component, the primary cold head 321, the secondary cold head 322 and the sensor placement tool 31 are connected in sequence; a second cold screen 323 disposed within the housing of cryostat assembly 32 and covering primary cold head 321 and secondary cold head 322.
The refrigeration assembly in fig. 4 shows a helium tube 325 for carrying the refrigerated helium gas. Helium pipe 325 conveys helium gas from an evaporator in the refrigerator to the compressor, and after compression, conveys helium gas back to the evaporator, and the circulating refrigeration provides enough refrigeration power. The primary cold head 321 and the secondary cold head 322 are respectively a primary cold head 321 and a secondary cold head 322 of the GM refrigerator, and are used as refrigeration power providing components for realizing refrigeration effect for the sensor placement tool 31. The second cold screen 323 is used for isolating heat transfer between the sensor and an external heat source, and keeps the temperature of the hall sensor stable by isolating external heat and reducing heat leakage in the cavity. The connection 324 connects the cryostat assembly 32 with the sensor placement tool 31 via bolts.
The specific assembly debugging process of the Hall sensor and the temperature sensor calibration system provided by the embodiment of the disclosure is as follows.
First, the relative positions of the main components of the entire calibration structure system are determined according to fig. 1.
Next, the assembly from the inner structure to the outer structure is started with the relative position shown in fig. 1, the sensor placement fixture 31 shown in fig. 3 is connected to the cryostat assembly 32 shown in fig. 4, and the overall assembly adjustment is performed in combination with the multifunctional calibration structure 3 of fig. 2. The structure assembly sequence of the sensor placement tool 31 shown in fig. 4 includes: firstly, installing two Hall sensors to be calibrated, which are respectively perpendicular to and parallel to the magnetic field direction, pressing a reference temperature sensor 313, then plugging a heater 314 in the corresponding middle, leading out a corresponding sensor signal wire, fixing a corresponding sensor probe through a screw and a cover plate, and finally installing 8 temperature sensors 315 to be calibrated (calibrated in a warming mode) at the root of a sensor placement tool 31 until the probe placement tool is installed. Finally, the low-temperature matching component shown in fig. 4 is integrated into the multifunctional calibration structure 3 shown in fig. 2, and a corresponding rotary motion mechanism 33 and an adjusting mechanism corresponding to the whole calibration structure are configured for preliminary collimation adjustment.
Finally, the magnetic field calibration reference probe 2 and the multifunctional calibration structure 3 in the calibration system structure shown in fig. 1 are respectively sent into the center good field region of the superconducting standard magnet 1 from room temperature holes on the left side and the right side of the superconducting standard magnet 1. The two are placed symmetrically relative to the center of the superconducting standard magnet, the placement distance of the two is reduced as far as possible, and the placement relative distance is required to be smaller than 1.5mm. The simulation calculation can better ensure that the magnetic field value change is less than 1Gs when the distance between the two is within 10 mm. Thus, the structural assembly of the whole calibration system is completed. It should be noted that the whole process needs the laser tracker and the target seat to perform collimation matching, the position of the magnetic center is transferred to a datum point on the outer surface of the magnet, and the collimation precision is required to be within +/-0.05 m. The whole calibration system structure can be used for calibrating the follow-up Hall sensor and the temperature sensor after being assembled.
According to the Hall sensor and the temperature sensor calibration system provided by the embodiment of the disclosure, the high-uniformity superconducting magnet and the cryostat assembly 32 are used for providing a calibration environment with a large-span magnetic field range (0-4T) and a large-span temperature zone (4.2K-room temperature) for the Hall sensor, so that nonlinear effects of the Hall sensor under different temperatures and background magnetic fields can be fully and comprehensively studied, and more accurate data can be obtained. The Hall sensor calibration and the temperature sensor calibration are integrated into a set of system, so that the calibration efficiency is improved, and more comprehensive calibration data is provided.
The system is provided with a rotary motion mechanism 33 at the tail end of the refrigerator, so that the whole multifunctional calibration structure 3 can rotate, and therefore, angle errors caused by Hall plate installation can be eliminated to a certain extent, and the calibration result is more accurate.
Because the NMR measurement probe cannot work in an environment lower than 0 ℃, the Hall sensor and the temperature sensor calibration system provided by the embodiment of the invention place 2NMR of the magnetic field calibration reference probe at the room temperature end, and place the Hall sensor 312 to be calibrated in a vacuum environment, thereby not only taking the high precision of NMR as the reference of Hall calibration, but also being compatible with the low-temperature environment of Hall piece operation, and skillfully solving the problem of incompatibility of the operation working conditions of the NMR probe. The NMR probe and the hall sensor sample to be measured are placed in the high field of the superconducting magnet, so that the reliability of the calibration result is ensured.
Those skilled in the art will appreciate that the features recited in the various embodiments of the disclosure and/or in the claims may be provided in a variety of combinations and/or combinations, even if such combinations or combinations are not explicitly recited in the disclosure. In particular, the features recited in the various embodiments of the present disclosure and/or the claims may be variously combined and/or combined without departing from the spirit and teachings of the present disclosure. All such combinations and/or combinations fall within the scope of the present disclosure.
While the present disclosure has been shown and described with reference to certain exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present disclosure as defined by the appended claims and their equivalents. The scope of the disclosure should, therefore, not be limited to the above-described embodiments, but should be determined not only by the following claims, but also by the equivalents of the following claims.
Claims (10)
1. A hall sensor and temperature sensor calibration system, comprising:
a superconducting standard magnet (1), a magnetic field calibration reference probe (2) and a multifunctional calibration structure (3);
room temperature holes are reserved on the left side and the right side of the superconducting standard magnet (1);
the magnetic field calibration reference probe (2) and the multifunctional calibration structure (3) respectively extend into room temperature holes at two sides of the superconducting standard magnet (1) and are symmetrically arranged relative to the center of the superconducting standard magnet (1);
one end, close to the magnetic field calibration reference probe (2), of the multifunctional calibration structure (3) is provided with a sensor placement tool (31), a vacuum environment is arranged inside the sensor placement tool (31), and a Hall sensor (312), a reference temperature sensor (313) and a plurality of temperature sensors (315) to be calibrated are arranged;
the other end of the multifunctional calibration structure (3) is provided with a cryostat assembly (32) which is used for providing a constant temperature environment for the Hall sensor (312) to be calibrated, and the temperature range of the constant temperature environment is 4.2K to room temperature.
2. The hall sensor and temperature sensor calibration system according to claim 1, wherein the sensor placement fixture (31) comprises:
the cold conducting connecting copper rod (311), one end is provided with the Hall sensor (312), the reference temperature sensor (313) and the heater (314), the other end is annularly provided with the plurality of temperature sensors (315) to be calibrated around the end part, and the other end is connected with the cryostat assembly (32);
the first cold screen (316) is arranged in the shell of the sensor placement tool (31), covers the cold guide connection copper bar (311), and is in a vacuum environment.
3. The hall sensor and temperature sensor calibration system of claim 1, wherein the cryostat assembly (32) comprises:
the refrigerating assembly, the primary cold head (321), the secondary cold head (322) and the second cold screen (323);
the refrigeration assembly, the primary cold head (321), the secondary cold head (322) and the sensor placement tool (31) are sequentially connected;
and the second cold screen (323) is arranged in the shell of the cryostat assembly (32) and covers the primary cold head (321) and the secondary cold head (322).
4. The hall sensor and temperature sensor calibration system according to claim 1, wherein the multifunctional calibration structure (3) further comprises:
and the rotary motion mechanism (33) is connected with the sensor placement tool (31) and is used for adjusting the angle of the Hall sensor (312) to be calibrated.
5. The hall sensor and temperature sensor calibration system of claim 4, wherein the hall sensor (312) to be calibrated comprises:
the first Hall sensor to be calibrated and the second Hall sensor to be calibrated;
the first hall sensor to be calibrated and the second hall sensor to be calibrated are respectively horizontally placed and vertically placed relative to the superconducting standard magnet (1);
one of the first hall sensor to be calibrated and the second hall sensor to be calibrated is used for providing a reference coefficient, and the other one of the first hall sensor to be calibrated and the second hall sensor to be calibrated is matched with the rotary motion mechanism (33) to adjust the direction of the magnetic field of the superconducting standard magnet (1) to be perpendicular.
6. The hall sensor and temperature sensor calibration system of claim 1, further comprising:
the horizontal movement mechanism (34) is connected with the multifunctional calibration structure (3) and is used for adjusting the direction movement of the multifunctional calibration structure (3) relative to the room temperature hole of the superconducting standard magnet (1).
7. The hall sensor and temperature sensor calibration system of claim 1, further comprising:
and the supporting structure (35) is arranged below the multifunctional calibration structure (3) and is used for supporting the multifunctional calibration structure (3).
8. Hall sensor and temperature sensor calibration system according to claim 1, characterized in that the magnetic field calibration reference probe (2) is an NMR probe.
9. The hall sensor and temperature sensor calibration system according to claim 1, wherein the intensity of the magnetic field generated by the superconducting standard magnet (1) ranges from 0 to 4T, and the uniformity is less than or equal to 0.01%.
10. Hall sensor and temperature sensor calibration system according to claim 1, characterized in that the distance of the magnetic field calibration reference probe (2) and the multifunctional calibration structure (3) is less than 1.5mm.
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| CN113049145A (en) * | 2021-03-29 | 2021-06-29 | 中国空气动力研究与发展中心设备设计与测试技术研究所 | Equipment for carrying out full-system-width low-temperature comprehensive calibration on temperature measurement system |
| CN115165154A (en) * | 2022-06-30 | 2022-10-11 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Temperature sensor calibration system and method |
| CN115113126A (en) * | 2022-07-13 | 2022-09-27 | 核工业西南物理研究院 | Device and method for testing and calibrating metal Hall probe |
| CN116222824A (en) * | 2023-03-20 | 2023-06-06 | 北京东方计量测试研究所 | High-precision low-temperature sensor calibration device and calibration method |
| CN117007097A (en) * | 2023-08-15 | 2023-11-07 | 中冶长天国际工程有限责任公司 | Sensor temperature calibration method, device, system, electronic equipment and medium |
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