CN117630785A - Integrated circuit electrostatic discharge simulator calibration assembly and method - Google Patents
Integrated circuit electrostatic discharge simulator calibration assembly and method Download PDFInfo
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- CN117630785A CN117630785A CN202311370211.XA CN202311370211A CN117630785A CN 117630785 A CN117630785 A CN 117630785A CN 202311370211 A CN202311370211 A CN 202311370211A CN 117630785 A CN117630785 A CN 117630785A
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- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000012360 testing method Methods 0.000 claims abstract description 31
- 239000000523 sample Substances 0.000 claims abstract description 22
- 239000002184 metal Substances 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 229910052755 nonmetal Inorganic materials 0.000 claims abstract description 5
- 238000012544 monitoring process Methods 0.000 claims description 12
- 238000005070 sampling Methods 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 4
- 230000001960 triggered effect Effects 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 230000001939 inductive effect Effects 0.000 claims description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 2
- 230000000712 assembly Effects 0.000 abstract 1
- 238000000429 assembly Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 11
- 230000010354 integration Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
- G01R31/002—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing where the device under test is an electronic circuit
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
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Abstract
The application discloses an integrated circuit electrostatic discharge simulator calibration assembly, which comprises a resistor, a current probe and an attenuator which are fixed in a nonmetal shell. The metal shell is provided with a port A, a port B and a port ground. The resistor is connected between the port A and the port B; and a wire is connected between the port B and the port ground. The lead is provided with the current probe, and the current probe is connected to a test end arranged on the metal shell through the attenuator. The application also includes methods of testing using the assemblies. The problem of there is the unreliable in this application when solving prior art's test in-process manual operation.
Description
Technical Field
The application relates to the technical field of electromagnetic compatibility testing, in particular to a pulse calibration assembly and a pulse calibration method of an integrated circuit discharge simulator based on an HBM model.
Background
The electrostatic discharge sensitivity test is a key electromagnetic compatibility test item, and the electrostatic discharge test simulator commonly used in the market at present mainly completes the electrostatic discharge sensitivity test on equipment-level products. Simulator calibration studies for simulating electrostatic discharge processes in integrated circuits are scarce. In calibrating integrated circuit electrostatic discharge simulators, separate calibration equipment is mostly used by each calibration laboratory. However, this calibration method introduces new unnecessary interference to calibration due to small aperture size of the current probe for calibration, easy bending of the short-circuit current cable, unreliable connection mode of 500 Ω discharge load, and the like. Especially, when performing the outer work of examining, damage calibration subassembly easily, influence the accuracy of tracing to the source.
Disclosure of Invention
The application provides an integrated circuit electrostatic discharge simulator calibration assembly and a method, in particular to a pulse calibration assembly of an integrated circuit electrostatic discharge simulator based on an HBM model, which solves the problem of unreliability in the manual operation in the test process of the prior art.
The embodiment of the application provides an integrated circuit electrostatic discharge simulator calibration assembly, which comprises a resistor, a current probe and an attenuator, wherein the resistor, the current probe and the attenuator are fixed in a nonmetal shell;
the metal shell is provided with a port A, a port B and a port ground;
the resistor is connected between the port A and the port B; a wire is connected between the port B and the port ground;
the lead is provided with the current probe, and the current probe is connected to a test end arranged on the metal shell through the attenuator.
Preferably, the test terminal is a test terminal of a BNC connector.
Preferably, the resistor is a noninductive resistor.
Preferably, the resistance is 500 Ω.
Preferably, the wires are of a unidirectional opposite-plug connection structure.
Preferably, the current probe is a coil surrounding the wire.
Preferably, the cable used for the connection is a tin-plated single-core copper wire.
Preferably, the nonmetallic housing is insulated.
The embodiment of the application also provides a calibration method of the integrated circuit electrostatic discharge simulator, which uses the calibration assembly of the integrated circuit electrostatic discharge simulator in any embodiment of the application, and comprises the following steps: and disconnecting the lead wire through an inserting structure at the inner side of the nonmetal shell, and replacing the current probe.
The embodiment of the application also provides a calibration method of the integrated circuit electrostatic discharge simulator, which uses the integrated circuit electrostatic discharge simulator calibration assembly according to any one of the embodiments of the application, and comprises at least 1 steps as follows:
the ground terminal of the equipment to be calibrated is connected to the port ground of the component, and the discharge terminal of the test terminal of the equipment to be calibrated is connected to the port A of the component; the monitoring terminal of the component is connected to a sampling oscilloscope through a coaxial line, the discharging voltage of the calibrated equipment is set and triggered, and the current waveform is read in the oscilloscope to realize calibration;
the ground terminal of the equipment to be calibrated is connected to the port ground of the component, and the discharge terminal of the test terminal of the equipment to be calibrated is connected to the port B of the component; the monitoring terminal of the component is connected to a sampling oscilloscope through a coaxial line, the discharging voltage of the calibrated equipment is set and triggered, and the current waveform is read in the oscilloscope to realize calibration.
The above-mentioned at least one technical scheme that this application embodiment adopted can reach following beneficial effect:
the integrated circuit electrostatic discharge calibration assembly designed by the application adopts an integrated thought, an insulating nonmetallic material is used for a shell, and a calibration loop and a monitoring probe are built in. The calibration assembly can solve the common problems encountered in the calibration. When the integrated circuit electrostatic discharge simulator is used, the calibration work of the integrated circuit electrostatic discharge simulator discharge current can be realized by only connecting the electrostatic discharge equipment to be detected to the calibration assembly according to the calibration steps required by the calibration standard, the operation is convenient, the reliability is high, and the repeated test result is stable. The calibration component designed by the application can be used for electromagnetic compatibility measuring units and test institutions in the industries of domestic military industry, automobiles, electronics and the like. The method can provide a tracing basis for the sensitive phenomenon in the electrostatic test process of each stage of integrated circuit development. The calibration assembly has the typical characteristics of small volume, light weight, high calibration efficiency, high integration level and high precision, can provide an important technical means for the calibration work of the integrated circuit electrostatic discharge simulator, and provides a convenient calibration tool for the outfield calibration work.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute an undue limitation to the application. In the drawings:
FIG. 1 is a schematic diagram of an ESD device calibration (short-circuit current) of a prior art integrated circuit;
FIG. 2 is a schematic diagram of an integrated circuit ESD device calibration (500Ω load discharge current) of the prior art;
FIG. 3 is a schematic diagram of the internal structure of an ESD simulator calibration assembly of the present application;
FIGS. 4.1-4.3 are schematic diagrams illustrating external configurations of an integrated circuit ESD simulator calibration assembly of the present application, wherein FIG. 4.1 is a front view, FIG. 4.2 is a top view, and FIG. 4.3 is a rear view;
FIG. 5 is a schematic diagram (short circuit current) of calibration using the integrated circuit electrostatic discharge simulator calibration assembly of the present application;
FIG. 6 is a schematic diagram of calibration using the integrated circuit electrostatic discharge simulator calibration assembly of the present application (500 Ω load discharge current).
Detailed Description
For the purposes, technical solutions and advantages of the present application, the technical solutions of the present application will be clearly and completely described below with reference to specific embodiments of the present application and corresponding drawings. It will be apparent that the described embodiments are only some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.
The following describes in detail the technical solutions provided by the embodiments of the present application with reference to the accompanying drawings.
A conventional calibration schematic (short-circuit current) of an esd calibration device for an ic is shown in fig. 1, and a calibration schematic (500 Ω load discharge current) of an esd calibration device for an ic is shown in fig. 2.
When calibrating integrated circuit electrostatic discharge simulators using conventional means, a separate calibration device is typically used. The calibration equipment has the problems that the current probe has small aperture size, a short-circuit current cable is easy to bend, and the connection mode of the 500 omega discharge load is unreliable, and new interference can be introduced to related work during metering calibration, so that the stability of calibration data is affected. And the calibration assembly is more easily damaged when the external inspection is performed due to the influence of the reasons, and the accuracy of the calibration tracing of the integrated circuit electrostatic discharge simulator is directly influenced.
At present, an integrated pulse calibration assembly for an integrated circuit electrostatic discharge simulator is not yet available in the market. In order to solve the problems encountered by the calibration equipment during calibration, the application designs a pulse calibration assembly based on an integrated circuit discharge simulator under an HBM model. The calibration component can realize calibration work of the discharge short-circuit current of the human body model and the discharge current in a 500 omega load mode. The integrated circuit electrostatic discharge calibration assembly shell designed by the application adopts an insulated nonmetallic shell, and the built-in calibration loop and the monitoring probe form a calibration assembly, so that the calibration work of the discharge current of the integrated circuit electrostatic discharge simulator can be realized.
FIG. 3 is a schematic diagram of the internal structure of the ESD simulator calibration assembly of the present application.
In a preferred embodiment of the present application, the calibration assembly is internally configured with a non-inductive resistor, a current probe, an attenuator, and is secured within a non-metallic housing of the calibration assembly. Wherein the resistance between the a terminal and ground should be 500 Ω.
In the preferred embodiment of the application, the internal connection line from the B terminal to the ground terminal adopts a single-line opposite-plug connection structure, and the structure has the advantages of meeting the calibration index requirement and being convenient for calibrating and replacing the built-in current monitoring probe.
In a preferred embodiment of the present application, the protective housing used is of non-metallic insulating material.
In a preferred embodiment of the present application, the built-in cable is a tin-plated single core copper wire.
In the preferred embodiment of the present application, a built-in 500 Ω resistor is selected as the noninductive resistor.
In the preferred embodiment of the application, the calibration component of the discrete integrated circuit discharge simulator is integrated, the principle is that the integrated packaging form of a current probe, a short-circuit line and a high-precision discharge load is adopted, the accuracy, the stability and the operability of an electrostatic discharge calibration system are effectively improved, and the calibration of the human electrostatic discharge current waveform of the integrated circuit electrostatic discharge simulator is realized.
The integrated circuit electrostatic discharge simulator calibration component designed by the application can optimize common problems encountered when the current integrated circuit electrostatic discharge simulator is calibrated, and realize more accurate, stable and rapid calibration of the integrated circuit electrostatic discharge simulator discharge current waveform.
Fig. 4.1-4.3 are schematic diagrams of external structures of an esd simulator calibration assembly for an integrated circuit of the present application, wherein fig. 4.1 is a front view, fig. 4.2 is a top view, and fig. 4.3 is a rear view. As can be seen, the calibration end of the calibration assembly has two input terminals A, B, one ground connection terminal; the monitoring end is provided with a monitoring terminal of the BNC connector. For convenience of operation, the ports are arranged at positions where the monitoring terminals are arranged on the rear panel and the terminals A\B\are arranged on the front panel.
The pulse calibration assembly based on the integrated circuit discharge simulator under the HBM model is suitable for the integrated circuit electrostatic discharge test equipment described in GJB 548B, ANSI/ESD STM 5.1. The integrated circuit HBM model electrostatic discharge simulator is a test device capable of simulating electrostatic discharge caused by charges carried by a human body and evaluating the antistatic capability of the integrated circuit. The simulator consists of a discharge host, a cable, a discharge module and a discharge pin. The test configuration diagrams are shown in fig. 5 to 6.
Fig. 5 is a schematic diagram (short circuit current) of calibration using the integrated circuit electrostatic discharge simulator calibration assembly of the present application. When the static discharge short-circuit current under the HBM model is calibrated, the ground end of the device to be calibrated is connected to the ground end of the calibration assembly, and the discharge terminal of the test end of the device to be calibrated is connected to the A terminal of the calibration assembly. The monitoring terminal of the calibration assembly is connected to a high-speed sampling oscilloscope through a coaxial line. Setting the discharge voltage of the integrated circuit electrostatic discharge simulator and triggering, and manually reading the current waveform at the oscilloscope end to realize calibration.
FIG. 6 is a schematic diagram of calibration using the integrated circuit electrostatic discharge simulator calibration assembly of the present application (500 Ω load discharge current). When the static discharge current is loaded by 500 omega under the HBM model, the ground terminal of the test port of the device to be calibrated is connected to the ground terminal of the calibration assembly, and the discharge terminal of the test port of the device to be calibrated is connected to the B terminal of the calibration assembly. The monitoring terminal of the calibration assembly is connected to a high-speed sampling oscilloscope through a coaxial line. Setting the discharge voltage of the integrated circuit electrostatic discharge simulator and triggering, and manually reading the current waveform at the oscilloscope end to realize calibration.
The calibration assembly provided by the application can rapidly and stably realize the calibration work of the discharge current of the test equipment.
The calibration assembly can be used for calibrating electrostatic discharge current parameters at the level of 100-8000V, and can also be used for calibrating integrated circuit electrostatic discharge simulators with larger or smaller magnitude after the matched current probes and attenuators are replaced.
The calibration assembly can reduce the layout time of the calibration assembly. The calibration component covers the short-circuit current under the HBM model and the calibration capability under the 500 omega discharge load state. The device has the advantages of strong independence, high integration level, convenient movement and suitability for the capability of outfield calibration. When the integrated circuit is sensitive, the integrated circuit electrostatic discharge pulse source can be calibrated, current waveform parameters can be read, and important support is provided for integrated circuit fault elimination and correction.
The pulse calibration assembly of the integrated circuit discharge simulator based on the HBM model can be used for electromagnetic compatibility measuring units and test institutions in the industries of domestic military industry, automobiles, electronics and the like. The method can provide a tracing basis for the sensitive phenomenon in the electrostatic test process of each stage of integrated circuit development. The calibration assembly has the typical characteristics of small volume, light weight, high calibration efficiency, high integration level and high precision, can provide an important technical means for the calibration work of the integrated circuit electrostatic discharge simulator, and provides a very good calibration method for the outfield calibration work.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of additional identical elements in a process, method, article or apparatus that comprises the element.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless expressly stated otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. It will be understood that when an element is "connected" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present. Further, "connected" as used herein may include wirelessly connected or wirelessly coupled. The term "and/or" as used herein includes all or any element and all combination of one or more of the associated listed items.
It will be understood by those skilled in the art that all terms (including technical, term and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs unless defined otherwise.
The foregoing is merely exemplary of the present application and is not intended to limit the present application. Various modifications and changes may be made to the present application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc. which are within the spirit and principles of the present application are intended to be included within the scope of the claims of the present application.
Claims (10)
1. An integrated circuit electrostatic discharge simulator calibration assembly is characterized by comprising a resistor, a current probe and an attenuator which are fixed in a nonmetal shell;
the metal shell is provided with a port A, a port B and a port ground;
the resistor is connected between the port A and the port B; a wire is connected between the port B and the port ground;
the lead is provided with the current probe, and the current probe is connected to a test end arranged on the metal shell through the attenuator.
2. The integrated circuit electrostatic discharge simulator calibration assembly of claim 1, wherein the test terminal is a test terminal of a BNC connector.
3. The integrated circuit electrostatic discharge simulator calibration assembly of claim 1, wherein the resistor is a non-inductive resistor.
4. The integrated circuit electrostatic discharge simulator calibration assembly of claim 1, wherein the resistance is 500 Ω.
5. The integrated circuit electrostatic discharge simulator calibration assembly of claim 1, wherein the wire is a unidirectional interposer connection.
6. The integrated circuit electrostatic discharge simulator calibration assembly of claim 1, wherein the current probe is a coil surrounding the wire.
7. The integrated circuit electrostatic discharge simulator calibration assembly of claim 1, wherein the cable for the connection is a tin-plated single core copper wire.
8. The integrated circuit electrostatic discharge simulator calibration assembly of claim 1, wherein the non-metallic housing is insulated.
9. A method of calibrating an electrostatic discharge simulator of an integrated circuit using the assembly of any of claims 1-8, comprising at least 1 of the steps of:
the ground terminal of the equipment to be calibrated is connected to the port ground of the component, and the discharge terminal of the test terminal of the equipment to be calibrated is connected to the port A of the component; the monitoring terminal of the component is connected to a sampling oscilloscope through a coaxial line, the discharging voltage of the calibrated equipment is set and triggered, and the current waveform is read in the oscilloscope to realize calibration;
the ground terminal of the equipment to be calibrated is connected to the port ground of the component, and the discharge terminal of the test terminal of the equipment to be calibrated is connected to the port B of the component; the monitoring terminal of the component is connected to a sampling oscilloscope through a coaxial line, the discharging voltage of the calibrated equipment is set and triggered, and the current waveform is read in the oscilloscope to realize calibration.
10. A method of calibrating an electrostatic discharge simulator of an integrated circuit using the assembly of any of claims 1-8, comprising the steps of:
and disconnecting the lead wire through an inserting structure at the inner side of the nonmetal shell, and replacing the current probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311370211.XA CN117630785A (en) | 2023-10-20 | 2023-10-20 | Integrated circuit electrostatic discharge simulator calibration assembly and method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311370211.XA CN117630785A (en) | 2023-10-20 | 2023-10-20 | Integrated circuit electrostatic discharge simulator calibration assembly and method |
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| Publication Number | Publication Date |
|---|---|
| CN117630785A true CN117630785A (en) | 2024-03-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311370211.XA Pending CN117630785A (en) | 2023-10-20 | 2023-10-20 | Integrated circuit electrostatic discharge simulator calibration assembly and method |
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| Country | Link |
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| CN (1) | CN117630785A (en) |
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2023
- 2023-10-20 CN CN202311370211.XA patent/CN117630785A/en active Pending
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