CN117620414A - Laser beam splitting fusion welding device and method - Google Patents

Abstract

The invention relates to the technical field of laser welding processing, in particular to a laser beam splitting welding device and a laser beam splitting welding method. The laser comprises a laser, a plurality of laser welding heads, a beam splitting structure and a clamp, wherein the laser is used for emitting pulse laser; the laser welding head is used for receiving the pulse laser emitted by the laser and focusing the pulse laser; the beam splitting structure is used for splitting laser emitted by the laser welding head into a plurality of laser beams and transmitting the split laser beams to a workpiece to be welded; the clamp is used for clamping and fixing the workpiece to be welded so that the welding spot of the workpiece to be welded receives the beam splitting laser. The device of this application simple structure, operation convenient to use can realize the synchronous processing to a plurality of solder joints on the single work piece that waits to weld through the beam split, has promoted welding efficiency by a wide margin, is applicable to the accurate welding processing of various metals, and can not increase the cost and the processing cost of whole device by a wide margin, has very big spreading value.

Description

Laser beam splitting fusion welding device and method

Technical Field

The invention relates to the technical field of laser welding processing, in particular to a laser beam splitting welding device and a laser beam splitting welding method.

Background

The laser deep-melting welding is a method for connecting materials by adopting a continuous laser to emit laser beams to the materials to be processed, and after the laser irradiates the materials, the materials are evaporated to form small holes, the small holes filled with steam are like a blackbody, almost all incident light energy is absorbed, and heat is transferred out of the outer wall of the height Wen Kongqiang, so that metal surrounding the periphery of the cavity is melted. The wall material continuously evaporates under the irradiation of the laser beam to generate high-temperature steam, and the surface tension of the wall layer formed by the liquid flow outside the hole wall is maintained and kept in dynamic balance with the steam pressure continuously generated in the hole cavity. The beam continuously enters the aperture, the aperture is always in a flowing stable state, molten metal surrounding the aperture wall moves forward as the leading beam advances, the molten metal fills the void left after the aperture is removed and condenses therewith, and a weld is formed.

In the aspect of metal precise fusion welding, the main stream laser welding equipment of the conventional ferrous metal is a QCW optical fiber laser of an infrared band, a vibrating mirror is used for welding multiple welding spots, and the average speed of single welding spots is between 200ms and 1000 ms. The Chinese patent with the patent number of CN112846487A discloses an ultrafast laser multi-focus large-pitch parallel processing device and method, wherein the device comprises an ultrafast laser generator, a beam expander, a beam splitter prism, a spatial light modulator, a reflector, a long-distance beam splitting transmission array group, a focusing vibrating mirror group and a workpiece; the ultra-fast laser generates ultra-short pulse laser beams, the laser beams are subjected to modulation by the spatial light modulator and the optical device, the long-distance beam splitting transmission array group carries out beam splitting transmission, the laser beams are incident to the focusing vibrating mirror group to be focused, and a plurality of areas and a plurality of workpieces on a large-format workpiece are subjected to multi-focus parallel processing. The device breaks through the limit of the micron-sized light beam spacing modulated by the spatial light modulator and the optical device, improves the beam splitting distance from micron-sized to above meter-sized, and solves the problem of difficult processing of a plurality of areas or a plurality of workpieces on a large-format workpiece. However, the device has some problems that the device realizes simultaneous processing of multiple areas and multiple workpieces, a beam splitting transmission array group is actually constructed on the whole device, laser beams are split by the beam splitting transmission array group, a plurality of laser processing heads are formed on the device, then synchronous processing of the multiple areas and the multiple workpieces is realized, but the realization mode needs to greatly change the device, the manufacturing cost is greatly improved, in addition, each laser processing head can only process a single welding spot, each laser processing head needs to adjust the focus, for processing a large-area single workpiece, the synchronous processing of multiple welding spots can be realized by the processing device, but the prior adjusting procedure is very complicated, the processing efficiency is not greatly improved, the device is not applicable to processing a small-area single workpiece, the synchronous processing of multiple welding spots cannot be realized, and the application range is very limited.

Disclosure of Invention

The invention aims to solve the defects of the background technology and provides a laser beam splitting welding device and a laser beam splitting welding method.

The technical scheme of the invention is as follows: a laser beam splitting welding device comprises,

a laser for emitting pulsed laser light;

the laser welding head is used for receiving pulse laser emitted by the laser and focusing the pulse laser;

the beam splitting structure is used for splitting laser emitted by the laser welding head into a plurality of laser beams and transmitting the split laser beams to a workpiece to be welded;

and the clamp is used for clamping and fixing the workpiece to be welded so that the welding spot of the workpiece to be welded receives the beam splitting laser.

According to the laser beam splitting welding device provided by the application, the beam splitting structure comprises,

the beam splitter is a diffraction lens for splitting an incident beam and deflecting the incident angle of each beam of split laser under the condition of not changing the diameter of the incident beam, and is positioned on an optical path between the laser welding head and the clamp.

According to the laser beam splitting welding device, the beam splitting mirror splits an incident beam into 2-16 beams of beam splitting lasers.

According to the laser beam splitting welding device, the laser is a QCW laser with the emitted pulse laser wavelength of 535 nm-1200 nm, average power of 450W, peak power of 500-4500W, pulse width of 1 ms-30 ms, light emitting frequency of 1 Hz-500 Hz and output optical fiber core diameter of 200 uM-400 uM.

According to the laser beam splitting welding device provided by the application, the device also comprises,

the collimator is used for adjusting pulse laser emitted by the laser into parallel light;

the high-speed light splitting device is used for splitting the laser passing through the collimator for different time;

the laser fiber coupling device is connected with the laser welding head through different optical fibers and is used for coupling laser emitted by the high-speed light splitting device into the optical fibers and transmitting the laser into the laser welding head.

According to the laser beam-splitting welding device provided by the application, the fixture comprises,

the bottom plate is of a plate-shaped structure for placing a lower piece in a workpiece to be welded, and the upper end surface of the bottom plate is provided with a groove for placing the lower piece;

the cover plate is fixed on the upper end face of the bottom plate and used for clamping and fixing an upper piece in a workpiece to be welded on a lower piece, and a passing structure for passing each beam of beam splitting laser is arranged on the cover plate.

According to the laser beam splitting welding device provided by the application, the through structure comprises a plurality of through holes formed in the cover plate; the through holes are in one-to-one correspondence with the beam splitting lasers.

The application also provides a laser beam splitting welding method, which adopts the laser beam splitting welding device to weld, and comprises the following steps:

s1, placing a lower piece and an upper piece of a workpiece to be welded in a clamp, and clamping the lower piece and the upper piece through the clamp;

s2, adjusting a two-dimensional platform where the clamp is positioned and a lifting platform where the laser welding head is positioned, and pre-adjusting a focus of the laser welding head for emitting laser;

s3, arranging a beam splitting structure between the laser welding head and the clamp;

s4, adjusting the two-dimensional platform to enable welding spots of workpieces to be welded to correspond to the beam splitting lasers, and adjusting the lifting platform to enable the focal points of the beam splitting lasers to be aligned with the welding spots;

s5, adjusting the power of the laser, triggering the laser, forming a plurality of beam splitting lasers after the lasers pass through the beam splitting structure, and enabling the beam splitting lasers to act on corresponding welding spots one by one to weld a workpiece;

s6, welding the workpieces to be welded on the other group of fixtures according to the steps S1-S5, simultaneously taking the welded workpieces from the fixtures which finish welding, replacing the new workpieces to be welded, and alternately carrying out the welding until all the workpieces are welded.

According to the laser beam splitting welding method provided by the application, in the step S1, the method for clamping the lower sheet and the upper sheet by the clamp comprises the following steps: the lower piece is placed on a bottom plate of the clamp, a groove for placing the lower piece is formed in the bottom plate, the upper piece is placed on the lower piece, the positions, where the lower piece and the upper piece need to be welded, are aligned, a cover plate of the clamp is covered on the bottom plate, the lower piece and the upper piece are clamped between the cover plate and the bottom plate, the cover plate and the bottom plate are fixed, and clamping and fixing of workpieces to be welded are completed.

According to the laser beam splitting welding method provided by the application, in the step S2, the method for pre-adjusting the focus of the emitted laser of the laser welding head includes: and testing the focus position of laser emitted by the laser welding head by adjusting the two-dimensional platform and the lifting platform, and adjusting the lifting platform to enable the laser defocusing amount to be a set value.

According to the laser beam splitting welding method provided by the application, the set value is-1 mm-2 mm.

According to the laser beam splitting welding method provided by the application, in the step S3, the method for arranging the beam splitting structure between the laser welding head and the fixture includes: according to the welding processing requirement of the workpiece to be welded, a beam splitter meeting the requirement is selected, and the beam splitter is arranged between the laser welding head and the clamp.

According to the laser beam splitting welding method provided by the application, in the step S4, the method for adjusting the lifting platform to align the focus of the beam splitting laser with the welding spot comprises the following steps: and (3) reversely adjusting the laser welding head according to the adjusting direction of the laser welding head in the step S2, wherein the adjusting quantity is the pre-adjusting quantity of the laser welding head in the step S2.

According to the laser beam splitting welding method provided by the application, in the step S6, the method for welding the workpieces to be welded on the other group of fixtures includes: and a high-speed light splitting device is arranged on the light path of the laser, and the laser emitted by the laser is switched from the laser welding head for completing the welding processing to the laser welding head to be processed through the high-speed light splitting device.

The application has the advantages that: 1. according to the laser welding device, the beam splitting structure is arranged on the outgoing light path of the laser welding head, a single laser beam is split into a plurality of beam splitting lasers by the beam splitting structure, the beam splitting lasers are applied to welding spots of a workpiece to be welded one by one, a plurality of welding spots on the workpiece to be welded can be machined at the same time, the workpiece welding efficiency is greatly improved, the laser welding device can be applied to the technical field of precision welding of various metals, meanwhile, only the beam splitting structure is added, the device does not depend on a complicated and heavy mechanical structure, the whole manufacturing cost of the whole device is extremely low, and the device is suitable for being popularized and used in a large range;

2. the beam splitter achieves the purpose of laser beam splitting through the beam splitter, has a simple structure, is low in cost and easy to obtain, is convenient to arrange, can customize the corresponding beam splitter according to the processing requirements of workpieces to be welded, and can not greatly improve the whole processing cost while greatly improving the processing efficiency;

3. the beam splitter can split 2-16 beams, so that the beam splitter can be suitable for the welding processing requirements of 2-16 welding spots on a workpiece to be welded, the welding processing range is extremely wide, and the beam splitter is suitable for the processing requirements of metal precision welding;

4. the laser device has the advantages that the structure is simple, the materials are convenient to obtain, and the generated pulse laser can achieve a good welding effect;

5. according to the laser beam splitter, the high-speed beam splitter is arranged on the emergent light path of the laser, and can split the emitted laser of the laser in time, so that continuous processing operation can be performed by configuring a plurality of clamps, and the overall processing efficiency is further improved;

6. the clamp is simple in structure, convenient to operate and use, and capable of rapidly clamping and fixing workpieces to be welded with sheet structures;

7. according to the fixture, the through holes are formed in the cover plate of the fixture, so that the through holes can be aligned with welding spots, the beam splitting laser penetrates through the through holes to weld the welding spots, and the fixture is simple to operate and convenient to rotate;

8. the processing method is very simple, and can simultaneously process a plurality of welding spots on the workpiece to be welded at one time through beam splitting of the beam splitting structure, so that the processing efficiency of the workpiece to be welded is greatly improved, and the processing cost of the whole processing procedure is not increased;

9. the clamping and fixing mode of the workpiece to be welded is very simple, and the installation and operation are very convenient;

10. the laser focus adjustment method and device can be used for pre-adjusting the emitted laser of the laser welding head, so that the confirmation of the laser focus is facilitated, and meanwhile, the rapid adjustment of the laser focus in the subsequent processing is facilitated;

11. the preset adjustment amount is set reasonably, so that the subsequent rapid adjustment of the laser focus is greatly facilitated, and the alignment operation of the laser focus and the welding spot is facilitated;

12. the beam splitting structure is arranged in a very simple mode, and a beam splitting lens with proper customization is selected to be arranged between the laser welding head and the clamp;

13. the method is very simple for aligning and focusing the laser focus and the welding spot, and only the lifting platform is adjusted according to the pre-adjusting direction, so that a great amount of focusing time is saved;

14. the high-speed beam splitting device is arranged, so that rapid and continuous processing of multiple clamps can be realized, and the processing efficiency is greatly improved.

The device of this application simple structure, operation convenient to use can realize the synchronous processing to a plurality of solder joints on the single work piece that waits to weld through the beam split, has promoted welding efficiency by a wide margin, is applicable to the accurate welding processing of various metals, and can not increase the cost and the processing cost of whole device by a wide margin, has very big spreading value.

Drawings

Fig. 1: the laser beam splitting welding device of the application is used for welding a schematic diagram;

fig. 2: the clamp clamps the structural schematic diagram of the workpiece to be welded;

wherein: 1-a laser; 2-a collimator; 3-a high-speed spectroscopic device; 4-a laser fiber coupling device; 5-a laser welding head; 6-beam splitter; 7-splitting laser;

11-a bottom plate; 12-cover plate; 13-groove; 14-through holes; 15-a first locating pin; 16-a second locating pin;

101-blanking; 102-loading.

Detailed Description

Embodiments of the present invention are described in detail below, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present invention and should not be construed as limiting the invention.

In the description of the present invention, it should be understood that the terms "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

The invention will now be described in further detail with reference to the drawings and to specific examples.

The utility model relates to a laser beam splitting welding device, the welding device of this application mainly used carries out beam splitting processing through single beam laser to the welding of metal work piece, forms many beam splitting laser, and every beam splitting laser can be used to a solder joint of work piece on, once can carry out the synchronous welding of many solder joints of single work piece, has promoted the efficiency of welding process by a wide margin, can not cause too big promotion to the cost of whole device simultaneously.

Specifically, as shown in fig. 1-2, the laser beam splitting welding device of the present application includes a laser 1, a laser welding head 5, a beam splitting structure and a fixture, where the laser 1 is used for emitting pulse laser; the laser welding head 5 is used for receiving the pulse laser emitted by the laser 1 and focusing the pulse laser; the beam splitting structure is used for splitting the laser emitted by the laser welding head 5 into a plurality of laser beams and transmitting the split laser beams 7 to a workpiece to be welded; the clamp is used for clamping and fixing the workpiece to be welded so that the welding spot of the workpiece to be welded receives the beam splitting laser 7.

In actual processing, the method can be carried out according to the following steps:

s1, placing a lower sheet 101 and an upper sheet 102 of a workpiece to be welded in a clamp, and clamping the lower sheet 101 and the upper sheet 102 through the clamp;

the welding device mainly welds a metal sheet structure, and can also process other forms of structures, and the metal sheet structure is taken as an example for explanation;

s2, adjusting a two-dimensional platform where the clamp is positioned and a lifting platform where the laser welding head 5 is positioned, and pre-adjusting a focus of the laser welding head 5 for emitting laser;

the clamp is a clamping structure arranged on the two-dimensional platform, and the two-dimensional platform can move transversely and longitudinally along the horizontal direction, so that a workpiece to be welded fixed on the two-dimensional platform can be subjected to plane position adjustment through the two-dimensional platform;

the laser welding head 5 is arranged on a lifting platform, and the lifting platform can move in the vertical direction, so that the laser welding head 5 can adjust in the vertical direction, and the three-dimensional relationship between the laser welding head 5 and a workpiece to be welded can be adjusted under the combined action of the two-dimensional platform and the lifting platform;

the purpose of pre-adjusting the laser welding head 5 is to find the focus of the laser emitted by the laser welding head 5, and simultaneously, the subsequent adjustment of the focus position is convenient;

s3, arranging a beam splitting structure between the laser welding head 5 and the clamp;

the laser welding head 5 emits laser to directly pass through a beam splitting structure, the beam splitting structure splits a single beam of laser emitted by the laser welding head 5 into a plurality of beams of beam splitting laser 7, and each beam of beam splitting laser 7 corresponds to one welding spot;

s4, adjusting the two-dimensional platform to enable a welding spot of a workpiece to be welded to correspond to the beam splitting laser 7, and adjusting the lifting platform to enable the focus of the beam splitting laser 7 to be aligned with the welding spot;

the two-dimensional platform adjusts the plane position, so that the position of a welding spot to be welded on a workpiece to be welded corresponds to the beam splitting laser 7, and the lifting platform adjusts the vertical position, so that the focus corresponds to the welding spot;

s5, adjusting the power of the laser 1, triggering laser, forming a plurality of beam splitting lasers 7 after the laser passes through the beam splitting structure, and enabling the beam splitting lasers 7 to act on corresponding welding spots one by one to weld a workpiece;

in the welding process, the two-dimensional platform is kept in a static state, and the beam splitting laser 7 is focused on a welding spot to weld a workpiece;

s6, welding the workpieces to be welded on the other group of fixtures according to the steps S1-S5, simultaneously taking the welded workpieces off from the fixtures which finish welding, replacing the new workpieces to be welded, and alternately performing until all the workpieces are welded;

according to the laser welding device, the laser device 1 can be designed, the laser welding heads 5 are arranged, each group of laser welding heads 5 can weld and process a group of workpieces to be welded, after the group of workpieces are machined, laser can be immediately transmitted to the other group of laser welding heads 5 to weld and process the other group of workpieces to be welded, continuous machining is achieved, and the machining efficiency of the workpieces can be further improved.

In some embodiments of the present application, the beam splitting structure is optimized, specifically, as shown in fig. 1, the beam splitting structure of the present embodiment includes a beam splitter 6, where the beam splitter 6 is a diffraction lens that splits an incident beam and deflects an incident angle of each beam splitting laser 7 without changing a diameter of the incident beam, and the beam splitter 6 is located on an optical path between the laser welding head 5 and the fixture.

The beam splitter 6 splits the laser beam by utilizing the principle of optical diffraction, and the beam splitter 6 can ensure higher beam splitting uniformity and flexibly adjust beam splitting angles on the premise of not changing the diameter of the incident beam after the laser beam passes through the beam splitter 6, and the beam splitter 6 splits between 2 and 16 beams in the embodiment.

In other embodiments of the present application, the laser 1 and the laser light path structure are optimized, and specifically, the laser 1 of this embodiment is a QCW laser with a pulse emitting wavelength of 535nm to 1200nm, an average power of 450W, a peak power of 500 to 4500W, a pulse width of 1ms to 30ms, an output frequency of 1Hz to 500Hz, and an output fiber core diameter of 200uM to 400 uM. In practical application, the laser 1 of other types may be used as long as the welding function described in the present embodiment can be realized.

In addition, the present embodiment is provided with a collimator 2, a high-speed spectroscopic device 3, and a laser fiber coupling device 4 on the laser light path of the laser 1, wherein the collimator 2 is for adjusting the pulse laser light emitted by the laser 1 to parallel light; the high-speed beam splitter 3 is used for splitting the laser light passing through the collimator 2 for different time periods; the laser fiber coupling device 4 is connected with the laser welding head 5 through different optical fibers and is used for coupling laser emitted by the high-speed light splitting device 3 into the optical fibers and transmitting the laser into the laser welding head 5.

The high-speed beam splitting device 3 splits the laser beam in time, that is, the high-speed beam splitting device 3 is actually connected with the plurality of laser welding heads 5 through optical fibers, the high-speed beam splitting device 3 transmits the laser to the laser welding heads 5 which are being processed through the optical fibers, and after the first laser welding head 5 finishes processing the workpiece, the high-speed beam splitting device 3 transmits the laser to another group of laser welding heads 5 through the optical fibers to process another group of workpieces, that is, each time, a welding process of one group of laser welding heads 5 is performed.

The laser fiber coupling device 4 is connected to a plurality of fiber branches, and each fiber branch includes a set of collimators, a set of laser welding heads 5, and a set of beam mirrors 6, as shown in fig. 1, and this embodiment includes two fiber branches.

In the preferred embodiment of the present application, the above-mentioned structure of the fixture is optimized, specifically, as shown in fig. 2, the fixture includes a bottom plate 11 and a cover plate 12, the bottom plate 11 is a plate-shaped structure for placing the lower sheet 101 in the workpiece to be welded, and a groove 13 for placing the lower sheet 101 is formed on the upper end surface of the bottom plate 11; the cover plate 12 is fixed on the upper end surface of the bottom plate 11, and is used for clamping and fixing the upper sheet 102 in the workpiece to be welded on the lower sheet 101, and a passing structure for passing each beam of beam splitting laser 7 is arranged on the cover plate 12.

In practical application, the bottom plate 11 is provided with a plurality of first locating pins 15 with the diameter of 5mm, the cover plate 12 is provided with a plurality of first locating holes corresponding to the first locating pins 15, the groove 13 of the bottom plate 11 is internally provided with a plurality of second locating pins 16 with the diameter of 2mm, the lower piece 101 of the workpiece is provided with a plurality of second locating holes corresponding to the second locating pins 16, and the lower piece 101 is limited in the groove 13 through the second locating pins 16.

As shown in fig. 2, the through structure includes a plurality of through holes 14 formed in the cover plate 12, and the plurality of through holes 14 are in one-to-one correspondence with the beam-splitting laser 7.

In actual processing, the beam-splitting laser 7 is focused on the upper sheet 102 through the through hole 14, and the welding process is performed.

When the laser beam splitting welding device is used for welding workpieces, the workpieces to be welded are fixed on a clamp, a lower piece 101 with the workpieces to be welded is placed in a groove 13 of a bottom plate 11, a second positioning pin 16 in the groove 13 penetrates through a second positioning hole on the lower piece 101, then an upper piece 102 is placed on the lower piece 101, positions where the two pieces are required to be welded and butted are aligned, a cover plate 12 is covered on the bottom plate 11, a first positioning pin 15 on the bottom plate 11 penetrates through a first positioning hole on the cover plate 12, and clamping and fixing operation of the workpieces to be welded is completed; then, adjusting a two-dimensional platform where the clamp is positioned and a lifting platform where the laser welding head 5 is positioned, wherein the purpose of adjustment is to test the focus position of laser emitted by the laser welding head 5, find out the position with the smallest focus light spot with the highest emitted laser intensity as the focus position, and then adjust the lifting platform to enable the laser defocusing amount to be-1 mm-2 mm, and enable the laser light spot to be 100 um-500 um; then arranging a beam splitter 6, wherein the beam splitter 6 is selected and customized according to the number of welding spots on a workpiece to be welded, for example, the position of four welding spots on the workpiece to be welded is provided, and the beam splitter 6 splits 4 annular light beams with the diameter of 10-200 mu m; according to the product size, the coordinates of the laser welding head 5 are adjusted in the laser welding software, the two-dimensional platform is driven to adjust the plane positions of the workpiece to be welded and the clamp, so that the beam splitting lasers 7 of the beam splitting mirror 6 are in one-to-one correspondence with the through holes 14 on the cover plate 12, and the lifting platform is adjusted by-2 mm to 1mm according to the direction of pre-adjusting the laser welding head 5, so that the focus can be focused on the welding spot; according to the size of the stainless steel sheet, a welding pattern is made in welding software, parameters are set to be laser power 450W, laser pulse width 1 ms-30 ms, frequency 1 Hz-200 Hz and laser times 1 time, laser is triggered, the laser enters a laser welding head 5 through a collimator 2, a high-speed beam splitting device 3 and a laser fiber coupling device 4, the laser welding head 5 emits laser to be split into 4 beams of split laser 7 through a beam splitter 6, and each beam of split laser 7 acts on a welding spot of a workpiece to be welded through a through hole 14 on a cover plate 12; after the welding is finished, the high-speed beam splitting device 3 splits the laser to the other group of laser welding heads 5, cuts off the laser of the laser welding heads 5 for finishing the welding process, and processes the other group of workpieces according to the flow; and sequentially carrying out until all the workpieces are processed.

The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (10)

1. A laser beam splitting welding device is characterized in that: comprising the steps of (a) a step of,

-a laser (1), the laser (1) being adapted to emit pulsed laser light;

the laser welding head (5) is used for receiving the pulse laser emitted by the laser (1) and focusing the pulse laser;

the beam splitting structure is used for splitting laser emitted by the laser welding head (5) into a plurality of laser beams and transmitting the split laser beams (7) to a workpiece to be welded;

and the clamp is used for clamping and fixing the workpiece to be welded so that the welding spot of the workpiece to be welded receives the beam splitting laser (7).

2. A laser beam splitting fusion welding apparatus as defined in claim 1, wherein: the beam-splitting structure comprises a beam-splitting device,

the beam splitter (6) is a diffraction lens which splits an incident beam and deflects the incident angle of each beam of split laser (7) under the condition that the diameter of the incident beam is not changed, and the beam splitter (6) is positioned on an optical path between the laser welding head (5) and the clamp.

3. A laser beam splitting fusion welding apparatus as defined in claim 1, wherein: also included is a method of manufacturing a semiconductor device,

a collimator (2), wherein the collimator (2) is used for adjusting pulse laser emitted by the laser (1) into parallel light;

a high-speed beam splitting device (3), wherein the high-speed beam splitting device (3) is used for splitting laser passing through the collimator (2) for different time;

and the laser optical fiber coupling device (4) is connected with the laser welding head (5) through different optical fibers and is used for coupling laser emitted by the high-speed light splitting device (3) into the optical fibers and transmitting the laser into the laser welding head (5).

4. A laser beam splitting fusion welding apparatus as defined in claim 1, wherein: the clamp may be configured to be coupled to a clamp,

the bottom plate (11), the bottom plate (11) is a plate-shaped structure for placing a lower piece (101) in a workpiece to be welded, and a groove (13) for placing the lower piece (101) is formed in the upper end face of the bottom plate (11);

the cover plate (12), the cover plate (12) is fixed on the upper end face of the bottom plate (11) and is used for clamping and fixing an upper piece (102) in a workpiece to be welded on a lower piece (101), and a passing structure for each beam of beam splitting laser (7) to pass through is arranged on the cover plate (12).

5. A laser beam splitting fusion welding apparatus as defined in claim 4, wherein: the through structure comprises a plurality of through holes (14) formed on the cover plate (12); the through holes (14) are in one-to-one correspondence with the beam splitting lasers (7).

6. A laser beam splitting welding method is characterized in that: the method adopts the laser beam splitting welding device as defined in any one of claims 1 to 5 for welding, and comprises the following steps:

s1, placing a lower piece (101) and an upper piece (102) of a workpiece to be welded in a clamp, and clamping the lower piece (101) and the upper piece (102) through the clamp;

s2, adjusting a two-dimensional platform where the clamp is positioned and a lifting platform where the laser welding head (5) is positioned, and pre-adjusting a focus of the laser emitted by the laser welding head (5);

s3, arranging a beam splitting structure between the laser welding head (5) and the clamp;

s4, adjusting the two-dimensional platform to enable a welding spot of a workpiece to be welded to correspond to the beam splitting laser (7), and adjusting the lifting platform to enable a focus of the beam splitting laser (7) to be aligned with the welding spot;

s5, adjusting the power of the laser (1), triggering laser, forming a plurality of beam-splitting lasers (7) after the laser passes through the beam-splitting structure, and enabling the beam-splitting lasers (7) to act on corresponding welding spots one by one to weld a workpiece;

s6, welding the workpieces to be welded on the other group of fixtures according to the steps S1-S5, simultaneously taking the welded workpieces from the fixtures which finish welding, replacing the new workpieces to be welded, and alternately carrying out the welding until all the workpieces are welded.

7. A laser beam splitting fusion welding method according to claim 6, wherein: in the step S1, the method for clamping the lower sheet (101) and the upper sheet (102) by the clamp includes: the lower piece (101) is placed on a bottom plate (11) of the clamp, a groove (13) for placing the lower piece (101) is formed in the bottom plate (11), the upper piece (102) is placed on the lower piece (101), the positions, where the lower piece (101) and the upper piece (102) need to be welded, are aligned, the cover plate (12) of the clamp is covered on the bottom plate (11), the lower piece (101) and the upper piece (102) are clamped between the cover plate (12) and the bottom plate (11), the cover plate (12) and the bottom plate (11) are fixed, and clamping and fixing of workpieces to be welded are completed.

8. A laser beam splitting fusion welding method according to claim 6, wherein: in the step S2, the method for pre-adjusting the focus of the emitted laser of the laser welding head (5) comprises the following steps: the focal position of laser emitted by the laser welding head (5) is tested by adjusting the two-dimensional platform and the lifting platform, and then the lifting platform is adjusted to enable the laser defocusing amount to be a set value.

9. A laser beam splitting fusion welding method according to claim 6, wherein: in the step S4, the method for adjusting the lifting platform to align the focus of the beam splitting laser (7) with the welding spot includes: and (3) reversely adjusting the laser welding head (5) according to the adjusting direction of the laser welding head (5) in the step S2, wherein the adjusting quantity is the pre-adjusting quantity of the laser welding head (5) in the step S2.

10. A laser beam splitting fusion welding method according to claim 6, wherein: in the step S6, the method for welding the workpieces to be welded on the other group of fixtures includes: a high-speed beam splitting device (3) is arranged on the optical path of the laser (1), and laser emitted by the laser (1) is switched from a laser welding head (5) for completing welding processing to a laser welding head (5) to be processed through the high-speed beam splitting device (3).