CN117604493A - Inner furnace tube assembly and reaction furnace - Google Patents

Abstract

The application provides an interior furnace tube assembly and reaction furnace relates to semiconductor or photovoltaic material processing field, has solved the technical problem that interior furnace tube is big in the shaping degree of difficulty in technology. The inner furnace tube assembly is applied to a reaction furnace, the reaction furnace comprises an outer furnace tube and an inner furnace tube assembly, wherein the inner furnace tube assembly comprises: the first mounting frame is provided with a hollowed-out area; the second mounting frame is arranged in parallel with the first mounting frame; the two ends of each connecting rod are respectively connected with the first mounting frame and the second mounting frame; the connecting rods are sequentially arranged around the hollow areas to form a cavity, and the hollow areas are configured as openings of the cavity. Through this kind of structure, when manufacturing interior boiler tube subassembly, only need simple first mounting bracket of manufacturing on the production technology, connecting rod and second mounting bracket just can assemble into interior boiler tube subassembly, reduced interior boiler tube subassembly's manufacturing degree of difficulty.

Description

Inner furnace tube assembly and reaction furnace

Technical Field

The invention relates to the field of semiconductor or photovoltaic material processing, in particular to an inner furnace tube assembly and a reaction furnace.

Background

With the development of semiconductor or photovoltaic material processing technology, a part of chemical vapor deposition (Chemical Vapor Deposition, CVD) equipment adopts a double-layer furnace tube structure, i.e., an outer furnace tube is sleeved outside an inner furnace tube, and the inner furnace tube is used as a process chamber. However, the integrally formed inner furnace tube is difficult to form in the process, so that the integrally formed inner furnace tube cannot be widely used.

Disclosure of Invention

The present application has been made in order to solve the above technical problems. The embodiment of the application provides an inner furnace tube assembly and a reaction furnace.

In a first aspect, an embodiment of the present application provides an inner furnace tube assembly for a reaction furnace, the reaction furnace including an outer furnace tube and an inner furnace tube assembly, wherein the inner furnace tube assembly includes: the first mounting frame is provided with a hollowed-out area; the second mounting frame is arranged in parallel with the first mounting frame; the two ends of each connecting rod are respectively connected with the first mounting frame and the second mounting frame; the connecting rods are sequentially arranged around the hollow areas to form a cavity, and the hollow areas are configured as openings of the cavity.

In some embodiments, the first mount includes a first recess and the second mount includes a second recess; the first end of connecting rod is pegged graft in first recess, and the second end of connecting rod is pegged graft in the second recess.

In some embodiments, the first groove is a first annular groove and the second groove is a second annular groove, the first annular groove and the second annular groove being coaxially disposed; the first ends of the connecting rods are inserted into the first annular groove, the second ends of the connecting rods are inserted into the second annular groove, and the connecting rods are sequentially arranged into an annular shape along the first annular groove, wherein the side surfaces of the adjacent connecting rods are in contact.

In some embodiments, the chamber has a process chamber therein; the inner furnace tube assembly further comprises a mounting plate and a side plate, wherein the mounting plate is positioned on one side, far away from the first mounting frame, of the second mounting frame, the side plate is connected with the second mounting frame and the mounting plate, and the second mounting frame, the mounting plate and the side plate are surrounded to form a uniform flow cavity; the second mounting frame is provided with a plurality of air inlets and at least one first vent hole, the air inlets are configured to convey process gas to the uniform flow cavity, and the first vent hole is connected with the uniform flow cavity and the process cavity so as to convey the gas in the uniform flow cavity to the process cavity.

In some embodiments, the connecting rod comprises a hollow rod, and the hollow rod communicates with the gas inlet holes to deliver the process gas to the uniform flow chamber using the hollow rod.

In some embodiments, the chamber has a process chamber therein; wherein, interior furnace tube assembly still includes: the side plate is connected with the second mounting frame and the mounting plate to form a uniform flow cavity; wherein the second mount further comprises a plurality of inlet holes configured to deliver process gas to the uniform flow chamber; the connecting rod comprises a hollow rod, the hollow rod passes through the second mounting frame and is communicated with the uniform flow cavity, the side wall of the hollow rod is provided with a second ventilation hole, and the second ventilation hole is connected with the cavity of the hollow rod and the process cavity so as to convey gas in the uniform flow cavity to the process cavity.

In some embodiments, at least one first strut is disposed within the uniform flow chamber for connecting the second mount and the mounting plate.

In some embodiments, the first leg is coupled to a central region of the second mount and/or the first leg is coupled to a central region of the mounting plate.

In some embodiments, the outer furnace tube has a receiving cavity configured to receive the inner furnace tube assembly, the cavity having a process chamber therein; the first mounting frame is provided with a third air vent, and the third air vent is communicated with the accommodating cavity and the process chamber.

In some embodiments, the outer furnace tube has a receiving cavity configured to receive the inner furnace tube assembly, the cavity having a process chamber therein; the connecting rod is provided with a fourth air hole which is communicated with the accommodating cavity and the process chamber.

In a second aspect, an embodiment of the present application provides a reaction furnace, including: the inner furnace tube assembly according to any one of the first aspect; the outer furnace tube has a receiving cavity configured to receive the inner furnace tube assembly.

The embodiment of the application provides an interior furnace tube assembly and reaction furnace, this interior furnace tube assembly is applied to the reaction furnace, and the reaction furnace includes outer furnace tube and interior furnace tube assembly, and wherein, interior furnace tube assembly includes: the first mounting frame is provided with a hollowed-out area; the second mounting frame is arranged in parallel with the first mounting frame; the two ends of each connecting rod are respectively connected with the first mounting frame and the second mounting frame; the connecting rods are sequentially arranged around the hollow areas to form a cavity, and the hollow areas are configured as openings of the cavity. Through this kind of structure, when manufacturing interior boiler tube subassembly, only need simple first mounting bracket of manufacturing on the production technology, connecting rod and second mounting bracket just can assemble into interior boiler tube subassembly, reduced interior boiler tube subassembly's manufacturing degree of difficulty.

Drawings

The foregoing and other objects, features and advantages of the present application will become more apparent from the following more particular description of embodiments of the present application, as illustrated in the accompanying drawings. The accompanying drawings are included to provide a further understanding of embodiments of the application and are incorporated in and constitute a part of this specification, illustrate the application and not constitute a limitation to the application. In the drawings, like reference numerals generally refer to like parts or steps.

FIG. 1 is a cross-sectional view of an inner furnace tube assembly according to an exemplary embodiment of the present application.

Fig. 2 is a schematic diagram illustrating a cross section of a connecting rod according to an exemplary embodiment of the present application.

FIG. 3 is a cross-sectional view of an inner furnace tube assembly according to an exemplary embodiment of the present application.

FIG. 4 is a cross-sectional view of an inner furnace tube assembly according to an exemplary embodiment of the present application.

Fig. 5 is a cross-sectional view illustrating a reaction furnace according to an exemplary embodiment of the present application.

Fig. 6 is a cross-sectional view illustrating a reaction furnace according to another exemplary embodiment of the present application.

Fig. 7 is a cross-sectional view illustrating a reaction furnace according to another exemplary embodiment of the present application.

Fig. 8 is a partial enlarged view of a reaction furnace according to an exemplary embodiment of the present application.

Fig. 9 is a cross-sectional view illustrating a reaction furnace according to another exemplary embodiment of the present application.

Reference numerals:

100. an inner furnace tube assembly; 110. a first mounting frame; 111. a first groove; 112. a third vent hole; 120. a second mounting frame; 121. a second groove; 122. an air inlet hole; 123. a first vent hole; 130. a connecting rod; 131. a hollow rod; 1311. a second vent hole; 132. fourth air holes; 133. a solid rod; 140. a mounting plate; 150. a side plate; 160. an air inlet pipe; 170. a first support column; 180. a thermocouple; 200. a reaction furnace; 210. an outer furnace tube; 220. a clamping disc; 230. a flange plate; 231. an air suction hole; 240. a main furnace body; 250. and a tail end cover.

Detailed Description

The following description of the technical solutions in the embodiments of the present application will be made clearly and completely with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.

Summary of the application

The semiconductor or photovoltaic material is widely applied to industries such as electronics, new energy and the like. Both semiconductor and photovoltaic materials generally require chemical treatment to be applied to the product, chemical vapor deposition (Chemical Vapor Deposition, CVD) techniques being one of these treatments. Chemical vapor deposition is a process in which gaseous or vapor substances are used to chemically react on the surface of a silicon wafer to form solid deposits. Among them, the low pressure chemical vapor deposition (Low Pressure Chemical Vapor Deposition, LPCVD) apparatus is a common processing apparatus.

With the development of semiconductor or photovoltaic material processing technology, some LPCVD apparatuses begin to adopt a double-layer furnace tube structure, i.e., an outer furnace tube is sleeved outside an inner furnace tube, and the inner furnace tube is used as a process chamber. However, the integrally formed inner furnace tube is difficult to form in the process, so that the integrally formed inner furnace tube cannot be widely used.

In view of the foregoing, the present application provides an inner furnace tube assembly and a reaction furnace, the inner furnace tube assembly is applied to the reaction furnace, the reaction furnace comprises an outer furnace tube and an inner furnace tube assembly, wherein the inner furnace tube assembly comprises: the first mounting frame is provided with a hollowed-out area; the second mounting frame is arranged in parallel with the first mounting frame; the two ends of each connecting rod are respectively connected with the first mounting frame and the second mounting frame; the connecting rods are sequentially arranged around the hollow areas to form a cavity, and the hollow areas are configured as openings of the cavity. Through this kind of structure, when manufacturing interior boiler tube subassembly, only need simple first mounting bracket of manufacturing on the production technology, connecting rod and second mounting bracket just can assemble into interior boiler tube subassembly, reduced interior boiler tube subassembly's manufacturing degree of difficulty.

Exemplary apparatus

FIG. 1 is a cross-sectional view of an inner furnace tube assembly according to an exemplary embodiment of the present application. As shown in fig. 1, the inner furnace tube assembly 100 is applied to a reaction furnace, the reaction furnace comprises an outer furnace tube and the inner furnace tube assembly 100, wherein the inner furnace tube assembly 100 comprises: the first mounting frame 110 is provided with a hollowed-out area; the second mounting frame 120 is disposed parallel to the first mounting frame 110; the two ends of each connecting rod 130 are respectively connected with the first mounting frame 110 and the second mounting frame 120; the connecting rods 130 are sequentially arranged around a hollow area to form a cavity, and the hollow area is configured as an opening of the cavity.

Wherein the furnace mouth is used for feeding and discharging the boat structure, and the furnace mouth can be sealed through the furnace door.

With this structure, first, when manufacturing the inner furnace tube assembly 100, only the first mounting bracket 110, the second mounting bracket 120, and the plurality of connection bars 130, which are simple in manufacturing process, are required to assemble the inner furnace tube assembly 100. Second, in the related art, the difficulty of processing and forming the integrally formed inner furnace tube is high, and the manufacturing cost is high, so that the inner furnace tube is damaged due to deformation, defect and other reasons, the inner furnace tube needs to be replaced entirely, and if the connecting rod 130 is damaged, the connecting rod 130 is replaced directly in the inner furnace tube assembly 100, so that the cost is saved. Thirdly, the connecting rod 130 can be recovered after being used, and can be reused after being detected to be qualified after being simply cleaned and polished, so that the material cost is greatly reduced. Fourth, the connecting rods 130 are smaller in size and convenient for transportation, and in practical applications, connecting rods 130 with different cross-sectional shapes, different diameters and different tube wall thicknesses (for hollow rods 131 described below) can be selected as assembly raw materials for the inner furnace tube assembly 100. For the inner furnace tube assembly 100 with different specifications, only the first mounting frame 110 and the second mounting frame 120 with different specifications are required to be produced, and the connecting rod 130 can be produced in batches according to the fixed specifications, so that the manufacturing cost of the inner furnace tube assembly 100 is greatly reduced.

Fig. 2 is a schematic diagram illustrating a cross section of a connecting rod according to an exemplary embodiment of the present application.

In some embodiments, as shown in fig. 2, the connecting rod 130 includes a solid rod 133 and/or a hollow rod 131.

In some embodiments, as shown in fig. 2, the cross-section of the connecting rod 130 may be circular, polygonal (e.g., triangular, trapezoidal, rectangular, etc.), elliptical, etc.

In some embodiments, as shown in fig. 3. The cross-section of the inner furnace tube assembly 100 may be polygonal (e.g., square), circular, or elliptical, etc.

FIG. 3 is a cross-sectional view of an inner furnace tube assembly according to an exemplary embodiment of the present application. FIG. 4 is a cross-sectional view of an inner furnace tube assembly according to an exemplary embodiment of the present application.

In some embodiments, as shown in fig. 3 and 4, the first mount 110 includes a first recess 111 and the second mount 120 includes a second recess 121; the first end of the connecting rod 130 is inserted into the first groove 111, and the second end of the connecting rod 130 is inserted into the second groove 121. Through setting up first recess 111 and second recess 121, can stabilize fixed connecting rod 130 to when assembling interior furnace tube assembly 100, only need insert connecting rod 130 in first recess 111 and the second recess 121, can assemble into interior furnace tube assembly 100, it is very convenient.

In some embodiments, the number of first grooves 111 is the same as the number of connecting rods 130, and the number of second grooves 121 is the same as the number of connecting rods 130, i.e., each connecting rod 130 corresponds to one first groove 111 and one second groove 121 coaxially disposed with the first groove 111, and each connecting rod 130 is inserted into a different first groove 111 and second groove 121, respectively.

In some embodiments, as shown in fig. 3 and 4, the first groove 111 is a first annular groove, and the second groove 121 is a second annular groove, the first annular groove being disposed coaxially with the second annular groove; wherein, the first ends of the plurality of connecting rods 130 are inserted into the first annular groove, the second ends of the plurality of connecting rods 130 are inserted into the second annular groove, and the plurality of connecting rods 130 are sequentially arranged into a ring shape along the first annular groove, wherein, the sides of the adjacent connecting rods 130 are contacted.

Illustratively, as shown in fig. 3, the first groove 111 is an annular groove provided along an edge of the first mounting bracket 110, and as shown in fig. 4, the second groove 121 is an annular groove provided along an edge of the second mounting bracket 120.

By providing the first annular groove and the second annular groove, the plurality of connecting rods 130 can be inserted into the same groove at the same end, so that the connecting rods 130 can be tightly connected, and process gas overflows into the space between the outer furnace tube and the inner furnace tube assembly 100 in the outer furnace tube accommodating cavity.

In some embodiments, the cross section of the first groove 111 is square with a hollowed-out area, the cross section of the second groove 121 is square with a hollowed-out area, and the first groove 111 and the second groove 121 are coaxially arranged; the first ends of the plurality of connecting rods 130 are inserted into the first grooves 111, the second ends of the plurality of connecting rods 130 are inserted into the second grooves 121, and the plurality of connecting rods 130 are sequentially arranged into a square shape along the first grooves 111, wherein the sides of adjacent connecting rods 130 are contacted. By this structure, the first mounting bracket 110, the second mounting bracket 120 and the connecting rod 130 can be spliced into the inner furnace tube assembly 100 with a square cross section.

In some embodiments, the first groove 111 and/or the second groove 121 may be through grooves, that is, the connecting rod 130 may pass through the first groove 111 and/or the second groove 121 after being inserted into the first groove 111 and/or the second groove 121.

In some embodiments, as shown in fig. 1 and 4, a process chamber is within the chamber; wherein the inner furnace tube assembly 100 further comprises: the mounting plate 140 and the side plate 150, wherein the mounting plate 140 is positioned on one side of the second mounting frame 120 far away from the first mounting frame 110, the side plate 150 is connected with the second mounting frame 120 and the mounting plate 140, and the second mounting frame 120, the mounting plate 140 and the side plate 150 are surrounded to form a uniform flow cavity; the second mounting frame 120 is provided with a plurality of air inlets 122 and at least one first air vent 123, the air inlets 122 are configured to deliver process gas to the uniform flow chamber, and the first air vent 123 connects the uniform flow chamber and the process chamber to deliver the gas in the uniform flow chamber to the process chamber.

Illustratively, as shown in fig. 4, the second mount 120 includes a plurality of through holes including an air intake hole 122 and a first air vent 123 therein.

In some embodiments, the air intake holes 122 may be arranged in the same arrangement as the first air vent 123, and/or the air intake holes 122 may be arranged in the same regular pattern as the second grooves 121. As shown in fig. 4, the air intake hole 122 and the first air vent 123 are disposed around each other in multiple circles, and the air intake hole 122 and the second groove 121 are disposed together in a border area of the second mounting frame 120.

In some embodiments, the plurality of first ventilation holes 123 may be uniformly distributed on the second mounting frame 120, and illustratively, the plurality of first ventilation holes 123 may be disposed on the second mounting frame 120 in a plurality of circles as shown in fig. 4, or the plurality of first ventilation holes 123 may be disposed on the second mounting frame 120 in a grid shape.

Fig. 5 is a cross-sectional view illustrating a reaction furnace according to an exemplary embodiment of the present application.

In some embodiments, as shown in FIG. 5, the inner furnace tube assembly 100 further comprises: the air intake pipe 160, a first end of the air intake pipe 160 communicates with the air intake hole 122, and a second end of the air intake pipe 160 communicates with an external air supply device.

Fig. 6 is a cross-sectional view illustrating a reaction furnace according to an exemplary embodiment of the present application.

In other embodiments, as shown in fig. 6, the connecting rod 130 includes a hollow rod 131, and the hollow rod 131 communicates with the gas inlet hole 122 to deliver the process gas to the uniform flow chamber using the hollow rod 131. Wherein the connection rod 130 may be entirely hollow rod 131, or the connection rod 130 may include the hollow rod 131 and the solid rod 133.

In this way, the inner furnace tube assembly 100 does not need to be provided with the air inlet tube 160, and can be connected with an external air supply device through the hollow rod 131 in the connecting rod 130 as the air inlet tube and convey the process gas to the uniform flow cavity, so that the air inlet tube 160 does not need to be independently manufactured when the inner furnace tube 100 is manufactured, the manufacturing process of the inner furnace tube assembly 100 is simplified, the hollow rod 131 simultaneously takes on the functions of inputting the process gas and enclosing the process chamber of the inner furnace tube assembly 100, the air inlet tube 160 does not need to be arranged in an extra space, and the occupied space in the inner furnace tube assembly 100 is saved.

Fig. 7 is a cross-sectional view illustrating a reaction furnace according to an exemplary embodiment of the present application.

In other embodiments, as shown in fig. 1 and 7, a process chamber is provided within the chamber; wherein the inner furnace tube assembly 100 further comprises: a mounting plate 140 and a side plate 150, wherein the mounting plate 140 is located at a side of the second mounting frame 120 away from the first mounting frame 110, and the side plate 150 connects the second mounting frame 120 and the mounting plate 140 to form a uniform flow chamber; wherein the second mount 120 further comprises a plurality of gas inlet holes 122, the gas inlet holes 122 configured to deliver process gas to the uniform flow chamber; the connecting rod 130 comprises a hollow rod 131, the hollow rod 131 passes through the second mounting frame 120 to be communicated with the uniform flow cavity, wherein the side wall of the hollow rod 131 is provided with a second air vent 1311, and the second air vent 1311 is connected with the cavity of the hollow rod 131 and the process cavity so as to convey the gas in the uniform flow cavity to the process cavity.

In this way, the inlet holes 122 may be connected to the gas supply structure to introduce the process gas into the uniform flow chamber, and then the process gas, after being uniformly mixed in the uniform flow chamber, may enter the hollow tube 131 and enter the process chamber through the second gas through holes 1311 formed in the hollow tube 131.

In some embodiments, the air supply structure may include an air intake duct 160, i.e., a first end of the air intake duct 160 communicates with the air intake hole 122, and a second end of the air intake duct 160 communicates with an external air supply device.

In some embodiments, the air supply structure may further include a hollow rod 131 having no second air vent 1311, i.e., the hollow rod 131 having no second air vent 1311 has a first end connected to the air intake hole 122 and a second end connected to an external air supply.

In other embodiments, the connecting rod 130 includes a hollow rod 131, the side wall of the hollow rod 131 having at least one second vent hole 1311, the second vent hole 1311 connecting the cavity of the hollow rod 131 and the process chamber for gas within the cavity of the hollow rod 1311 to enter the process chamber.

Specifically, one end of the hollow rod 131 is inserted into the second groove 121, and the other end thereof is in communication with an external gas supply device, such as the first groove 111, into which the other end of the hollow rod 131 is inserted, so that the external gas supply device can introduce process gas into the hollow rod 131 and then the process gas can flow into the process chamber from the second gas through holes 1311. Wherein the connection rod 130 may be entirely hollow rod 131, or the connection rod 130 may include the hollow rod 131 and the solid rod 133.

In this way, a plurality of process gases can be uniformly mixed in the cavity of the hollow shaft 131 and flowed into the process chamber, thereby enhancing the process effect.

In some embodiments, as shown in FIG. 1, the inner furnace tube assembly 100 further includes at least one first leg 170, the first leg 170 being disposed within the uniform flow chamber for connecting the second mounting bracket 120 and the mounting plate 140. Here, the first support posts 170 serve to maintain the relative distance of the second mounting bracket 120 and the mounting plate 140, thereby preventing the mounting plate 140 from being depressed.

In some embodiments, the first leg 170 is coupled to a central region of the second mount 120 and/or the first leg is coupled to a central region of the mounting plate 140. Here, the first support column 170 is provided at the central region of the second mounting bracket 120 and/or the mounting plate 140, and may enhance the supporting effect on the second mounting bracket 120 and the mounting plate 140, thereby preventing the mounting plate 140 from being depressed.

In some embodiments, as shown in FIG. 1, the outer furnace tube has a receiving cavity configured to receive the inner furnace tube assembly 100, the cavity having a process chamber therein; the first mounting frame 110 has a third vent 112, and the third vent 112 communicates the receiving chamber with the process chamber.

Specifically, a layer of sediment film (such as silicon carbide film and commonly called poly film) is attached to the inner wall of the process chamber in the reaction process, the sediment film is thicker and thicker along with the increase of the process times, and if the inner furnace tube is deformed, the sediment film can fall off from the inner wall of the process chamber, so that the product to be processed is damaged or the reaction furnace is blocked. In the embodiment of the application, the double-layer furnace tube structure (i.e. the inner furnace tube assembly 100 and the outer furnace tube) is arranged, and the process chamber and the accommodating chamber are kept consistent in gas pressure through the third air hole 112 between the inner furnace tube assembly 100 and the outer furnace tube, and when the inner furnace tube assembly 100 is pumped to a vacuum state, the accommodating chamber is also pumped to the vacuum state simultaneously due to the communication of the process chamber and the accommodating chamber, and the inner and outer sides of the inner furnace tube assembly 100 are in the vacuum state, so that the inner and outer air pressures of the inner furnace tube assembly 100 are the same, deformation cannot be generated, the inner side of the outer furnace tube is in the vacuum state, and the outer side of the outer furnace tube is outside air pressure. In this way, the outer furnace tube bears the pressure generated by the air pressure difference, the inner furnace tube 110 cannot deform due to the air pressure difference, and the probability of falling off of the sediment film is reduced, so that the film is prevented from falling off to damage the product to be processed or to block the reaction furnace.

In addition, since the process gas is introduced into the process chamber through the first vent hole 123 of the second mounting bracket 120 or the second vent hole 1311 of the hollow rod 131, the gas near one side of the first mounting bracket 110 is more likely to be the reacted waste gas, and the third vent hole 112 is provided in the first mounting bracket 110, so that the introduction of the unreacted gas into the receiving chamber can be reduced, and the introduction of the reacted waste gas into the receiving chamber can be increased, thereby improving the utilization rate of the process gas.

In some embodiments, the material of the connecting rod 130 may be any of silicon carbide, metal, ceramic, quartz. The quartz and the metal have stronger structural strength and are less deformed at high temperature, so that the probability of falling off of a sediment film can be reduced; and for silicon carbide, the silicon carbide and the sediment film are made of the same material, so that the probability of falling off of the sediment film can be reduced.

Fig. 8 is a partial enlarged view of a reaction furnace according to an exemplary embodiment of the present application.

In some embodiments, as shown in FIG. 8, the outer furnace tube has a receiving cavity configured to receive the inner furnace tube assembly 100, with a process chamber within the cavity; the connecting rod 130 has a fourth air hole 132, and the fourth air hole 132 communicates the accommodating chamber with the process chamber.

In a specific example, the fourth air hole 132 is disposed at an end of the connection rod 130 near the second mounting frame 120.

In some embodiments, the connecting rod 130 is a hollow rod 131, and the fourth sub-air hole 132 includes a first sub-air hole and a second sub-air hole, wherein the first sub-air hole communicates with the cavity of the connecting rod and the process chamber, and the second sub-air hole communicates with the cavity of the connecting rod and the receiving chamber. In particular, in the case that the connection rod 130 is a hollow rod 131, holes are required to be perforated on both side pipe walls facing the process chamber and the receiving chamber, respectively, in order to communicate the process chamber and the receiving chamber.

In some embodiments, as shown in FIG. 5, the inner furnace tube assembly 100 further comprises a thermocouple 180, the second mounting bracket 120 further comprises a third recess, a first end of the thermocouple 180 is inserted into the third recess, a second end of the thermocouple 180 is connected to an external power supply, and the thermocouple 180 is used to measure the temperature of the process chamber.

In the above embodiment, the inner furnace tube assembly 100 is applied to a reaction furnace, the reaction furnace includes an outer furnace tube and the inner furnace tube assembly 100, wherein the inner furnace tube assembly 100 includes: the first mounting frame 110 is provided with a hollowed-out area; the second mounting frame 120 is disposed parallel to the first mounting frame 110; the two ends of each connecting rod 130 are respectively connected with the first mounting frame 110 and the second mounting frame 120; the connecting rods 130 are sequentially arranged around a hollow area to form a cavity, and the hollow area is configured as an opening of the cavity. Through the structure, when the inner furnace tube assembly 100 is manufactured, the inner furnace tube assembly 100 can be assembled by only the first mounting frame 110, the connecting rod 130 and the second mounting frame 120 which are simple to manufacture in the production process, so that the manufacturing difficulty of the inner furnace tube assembly 100 is reduced.

Based on the same inventive concept, the embodiment of the present application also provides a reaction furnace 200. Fig. 9 is a cross-sectional view illustrating a reaction furnace according to an exemplary embodiment of the present application. As shown in FIG. 9, a reactor 200 includes an inner furnace tube assembly 100 as described in any of the embodiments above; the outer furnace tube 210, the outer furnace tube 210 has a receiving cavity configured to receive the inner furnace tube assembly 100.

In some embodiments, the cross-section of the outer furnace tube 210 is polygonal, circular, or elliptical.

In some embodiments, the material of the outer furnace tube 210 may be any of metal, silicon carbide, quartz, ceramic, and silicon.

In some embodiments, as shown in fig. 9, the reactor 200 further includes: the clamping disc 220 is connected with one surface of the first mounting frame 110, which is away from the connecting rod 130; the flange 230 connects the outer furnace tube 210 and the clamping plate 220 in a sealing manner, so that the accommodating cavity forms a sealing chamber.

Specifically, the inner side of the flange 230 includes a fourth groove, the clamping disc 220 is at least partially embedded in the fourth groove, and the port of the outer furnace tube 210 is connected to the flange 230. The flange 230 and the clamping disc 220 can keep a fixed distance between the inner furnace tube 100 and the outer furnace tube 210, seal the accommodating cavity, and enhance the structural stability and the sealing performance of the reaction furnace 200.

In some embodiments, the reactor 200 further includes a sealing strip disposed between the clamping disk 220 and the first mounting frame 110.

In some embodiments, as shown in FIG. 9, the flange 230 has pumping holes 231, the pumping holes 231 communicating pumping equipment with the process chamber. By providing the pumping holes 231, the gases of the process chamber and the receiving chamber can be pumped.

In some embodiments, the flange 230 further includes a first through hole, the chuck 220 further includes a second through hole, the first through hole and the second through hole are coaxially connected, the second end of the air inlet pipe 160 is inserted into the first through hole and the second through hole to communicate with an external air supply device, and/or the second end of the thermocouple 180 is inserted into the first through hole and the second through hole to connect with an external power supply device.

In some embodiments, when the hollow rod 131 is connected to an external air supply, the first groove 111 into which the hollow rod 131 is inserted communicates with the first through hole and the second through hole, for example, the first groove 111 and the second through hole may communicate with each other through a vent pipe or an adapter, etc., and the first through hole communicates with the external air supply.

In some embodiments, as shown in fig. 9, the reactor 200 further includes: the main furnace body 240, the main furnace body 240 comprising a heating chamber configured to house the outer furnace tube 210. Specifically, the main furnace body 240 has opposite first and second end openings, and the first end opening of the main furnace body 240 is connected to the flange 230.

In some embodiments, as shown in fig. 9, the reactor 200 further includes a tail end cap 250, the tail end cap 250 being configured to close the second end opening of the main furnace body 240.

In some embodiments, the main furnace body 240 includes a first cavity therein, the tail end cover 250 includes a second cavity therein, and the first cavity and the second cavity are filled with heat insulation cotton, so that the heat emitted from the reaction furnace 200 can be prevented from scalding workers.

In some embodiments, the reactor 200 further includes a heating structure (e.g., a resistance wire), which may be disposed within the heating chamber, for example.

The basic principles of the present application have been described above in connection with specific embodiments, however, it should be noted that the advantages, benefits, effects, etc. mentioned in the present application are merely examples and not limiting, and these advantages, benefits, effects, etc. are not to be considered as necessarily possessed by the various embodiments of the present application. Furthermore, the specific details disclosed herein are for purposes of illustration and understanding only, and are not intended to be limiting, as the application is not intended to be limited to the details disclosed herein as such.

The block diagrams of the devices, apparatuses, devices, systems referred to in this application are only illustrative examples and are not intended to require or imply that the connections, arrangements, configurations must be made in the manner shown in the block diagrams. As will be appreciated by one of skill in the art, the devices, apparatuses, devices, systems may be connected, arranged, configured in any manner. Words such as "including," "comprising," "having," and the like are words of openness and mean "including but not limited to," and are used interchangeably therewith. The terms "or" and "as used herein refer to and are used interchangeably with the term" and/or "unless the context clearly indicates otherwise. The term "such as" as used herein refers to, and is used interchangeably with, the phrase "such as, but not limited to.

It is also noted that in the apparatus, devices and methods of the present application, the components or steps may be disassembled and/or assembled. Such decomposition and/or recombination should be considered as equivalent to the present application.

The previous description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other aspects without departing from the scope of the application. Thus, the present application is not intended to be limited to the aspects shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

The foregoing description has been presented for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of the application to the form disclosed herein. Although a number of example aspects and embodiments have been discussed above, a person of ordinary skill in the art will recognize certain variations, modifications, alterations, additions, and subcombinations thereof.

Claims (11)

1. An inner furnace tube assembly, characterized in that it is applied to a reaction furnace comprising an outer furnace tube and the inner furnace tube assembly, wherein the inner furnace tube assembly comprises:

the first mounting frame is provided with a hollowed-out area;

the second installation frame is arranged in parallel with the first installation frame;

the two ends of each connecting rod are respectively connected with the first mounting frame and the second mounting frame;

the connecting rods are sequentially arranged around the hollow areas to form a cavity, and the hollow areas are configured as openings of the cavity.

2. The inner furnace tube assembly of claim 1, wherein the first mount comprises a first recess and the second mount comprises a second recess;

the first end of the connecting rod is inserted into the first groove, and the second end of the connecting rod is inserted into the second groove.

3. The inner furnace tube assembly of claim 2, wherein the first groove is a first annular groove and the second groove is a second annular groove, the first annular groove and the second annular groove being coaxially disposed;

the first ends of the connecting rods are inserted into the first annular grooves, the second ends of the connecting rods are inserted into the second annular grooves, and the connecting rods are sequentially arranged into an annular shape along the first annular grooves, wherein the side faces of the adjacent connecting rods are in contact.

4. The inner furnace tube assembly of claim 1, wherein the cavity has a process chamber therein;

the inner furnace tube assembly further comprises a mounting plate and a side plate, wherein the mounting plate is positioned on one side, far away from the first mounting frame, of the second mounting frame, the side plate is connected with the second mounting frame and the mounting plate, and a uniform flow cavity is formed by surrounding the second mounting frame, the mounting plate and the side plate;

the second mounting frame is provided with a plurality of air inlets and at least one first vent hole, the air inlets are configured to convey process gas to the uniform flow cavity, and the first vent hole is connected with the uniform flow cavity and the process cavity so as to convey the gas in the uniform flow cavity to the process cavity.

5. The inner furnace tube assembly of claim 4, wherein the connecting rod comprises a hollow rod and the hollow rod communicates with the inlet orifice to deliver process gas to the uniform flow chamber using the hollow rod.

6. The inner furnace tube assembly of claim 1, wherein the cavity has a process chamber therein;

wherein, interior boiler tube subassembly still includes: the mounting plate is positioned on one side, far away from the first mounting frame, of the second mounting frame, and the side plate is connected with the second mounting frame and the mounting plate to form a uniform flow cavity;

wherein the second mount further comprises a plurality of gas inlet holes configured to deliver process gas to the uniform flow chamber;

the connecting rod comprises a hollow rod, the hollow rod penetrates through the second mounting frame to be communicated with the uniform flow cavity, the side wall of the hollow rod is provided with a second ventilation hole, and the second ventilation hole is connected with the cavity of the hollow rod and the process cavity so as to convey gas in the uniform flow cavity to the process cavity.

7. The inner furnace tube assembly according to any one of claims 4 to 6, further comprising at least one first leg disposed within the uniform flow chamber for connecting the second mounting bracket and the mounting plate.

8. The inner furnace tube assembly of claim 7, wherein the first leg is connected to a central region of the second mounting bracket and/or the first leg is connected to a central region of the mounting plate.

9. The inner furnace tube assembly of any one of claims 1 to 3, wherein the outer furnace tube has a receiving cavity configured to receive the inner furnace tube assembly, the cavity having a process chamber therein;

the first mounting frame is provided with a third air vent, and the third air vent is communicated with the accommodating cavity and the process chamber.

10. The inner furnace tube assembly of any one of claims 1 to 3, wherein the outer furnace tube has a receiving cavity configured to receive the inner furnace tube assembly, the cavity having a process chamber therein;

the connecting rod is provided with a fourth air hole, and the fourth air hole is communicated with the accommodating cavity and the process chamber.

11. A reaction furnace, characterized by comprising:

the inner furnace tube assembly of any one of claims 1 to 10;

an outer furnace tube having a receiving cavity configured to receive the inner furnace tube assembly.