CN117597762A - 带电粒子检测器 - Google Patents
带电粒子检测器 Download PDFInfo
- Publication number
- CN117597762A CN117597762A CN202280047586.XA CN202280047586A CN117597762A CN 117597762 A CN117597762 A CN 117597762A CN 202280047586 A CN202280047586 A CN 202280047586A CN 117597762 A CN117597762 A CN 117597762A
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- CN
- China
- Prior art keywords
- detector
- array
- sample
- particles
- backscatter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
- H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2441—Semiconductor detectors, e.g. diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2446—Position sensitive detectors
- H01J2237/24465—Sectored detectors, e.g. quadrants
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24475—Scattered electron detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2448—Secondary particle detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3175—Lithography
- H01J2237/31774—Multi-beam
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP21183804.0 | 2021-07-05 | ||
| EP21183804.0A EP4117016A1 (fr) | 2021-07-05 | 2021-07-05 | Détecteur de particules chargées |
| PCT/EP2022/067786 WO2023280642A1 (fr) | 2021-07-05 | 2022-06-28 | Détecteur de particules chargées |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117597762A true CN117597762A (zh) | 2024-02-23 |
Family
ID=76807513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202280047586.XA Pending CN117597762A (zh) | 2021-07-05 | 2022-06-28 | 带电粒子检测器 |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP4117016A1 (fr) |
| CN (1) | CN117597762A (fr) |
| IL (1) | IL309285A (fr) |
| WO (1) | WO2023280642A1 (fr) |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4897545A (en) * | 1987-05-21 | 1990-01-30 | Electroscan Corporation | Electron detector for use in a gaseous environment |
| US7129502B2 (en) | 2003-03-10 | 2006-10-31 | Mapper Lithography Ip B.V. | Apparatus for generating a plurality of beamlets |
| TWI497557B (zh) | 2009-04-29 | 2015-08-21 | Mapper Lithography Ip Bv | 包含靜電偏轉器的帶電粒子光學系統 |
| NL1036912C2 (en) | 2009-04-29 | 2010-11-01 | Mapper Lithography Ip Bv | Charged particle optical system comprising an electrostatic deflector. |
| WO2011089955A1 (fr) * | 2010-01-20 | 2011-07-28 | 株式会社日立ハイテクノロジーズ | Appareil à faisceau de particules chargées |
| NL2007604C2 (en) | 2011-10-14 | 2013-05-01 | Mapper Lithography Ip Bv | Charged particle system comprising a manipulator device for manipulation of one or more charged particle beams. |
| NL2006868C2 (en) | 2011-05-30 | 2012-12-03 | Mapper Lithography Ip Bv | Charged particle multi-beamlet apparatus. |
| EP3201939B1 (fr) * | 2014-10-02 | 2021-03-03 | 908 Devices Inc. | Spectrométrie de masse par détection des particules chargées positivement et négativement |
| US10504687B2 (en) | 2018-02-20 | 2019-12-10 | Technische Universiteit Delft | Signal separator for a multi-beam charged particle inspection apparatus |
| US10395887B1 (en) | 2018-02-20 | 2019-08-27 | Technische Universiteit Delft | Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column |
| US10748739B2 (en) | 2018-10-12 | 2020-08-18 | Kla-Tencor Corporation | Deflection array apparatus for multi-electron beam system |
| US10978270B2 (en) | 2018-12-19 | 2021-04-13 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam device, interchangeable multi-aperture arrangement for a charged particle beam device, and method for operating a charged particle beam device |
-
2021
- 2021-07-05 EP EP21183804.0A patent/EP4117016A1/fr not_active Withdrawn
-
2022
- 2022-06-28 CN CN202280047586.XA patent/CN117597762A/zh active Pending
- 2022-06-28 WO PCT/EP2022/067786 patent/WO2023280642A1/fr active Application Filing
- 2022-06-28 IL IL309285A patent/IL309285A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| IL309285A (en) | 2024-02-01 |
| WO2023280642A1 (fr) | 2023-01-12 |
| TW202318466A (zh) | 2023-05-01 |
| EP4117016A1 (fr) | 2023-01-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication |