CN117589712A - Super-surface sensor and preparation method and application thereof - Google Patents
Super-surface sensor and preparation method and application thereof Download PDFInfo
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- 238000002360 preparation method Methods 0.000 title claims abstract description 10
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- 229910021389 graphene Inorganic materials 0.000 claims abstract description 82
- 229910052751 metal Inorganic materials 0.000 claims abstract description 82
- 239000002184 metal Substances 0.000 claims abstract description 82
- 239000004642 Polyimide Substances 0.000 claims abstract description 59
- 229920001721 polyimide Polymers 0.000 claims abstract description 59
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 34
- 239000010931 gold Substances 0.000 claims abstract description 32
- 229910052737 gold Inorganic materials 0.000 claims abstract description 32
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- 238000002955 isolation Methods 0.000 claims abstract description 22
- 239000000126 substance Substances 0.000 claims abstract description 16
- 239000010410 layer Substances 0.000 claims description 144
- 238000004528 spin coating Methods 0.000 claims description 11
- 239000002356 single layer Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 239000010975 amethyst Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 125000006850 spacer group Chemical group 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 19
- 230000008859 change Effects 0.000 abstract description 10
- 206010020751 Hypersensitivity Diseases 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 4
- 230000035945 sensitivity Effects 0.000 abstract description 4
- CKLJMWTZIZZHCS-REOHCLBHSA-N L-aspartic acid Chemical compound OC(=O)[C@@H](N)CC(O)=O CKLJMWTZIZZHCS-REOHCLBHSA-N 0.000 description 19
- 235000003704 aspartic acid Nutrition 0.000 description 19
- OQFSQFPPLPISGP-UHFFFAOYSA-N beta-carboxyaspartic acid Natural products OC(=O)C(N)C(C(O)=O)C(O)=O OQFSQFPPLPISGP-UHFFFAOYSA-N 0.000 description 19
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- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
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Abstract
The invention belongs to the technical field of biochemical detection, and particularly relates to a super-surface sensor and a preparation method and application thereof. The invention provides a super-surface sensor, which comprises a substrate layer, a polyimide basal layer, a metal micro-resonance layer, a polyimide isolation layer and a graphene layer which are sequentially laminated; the graphene layer also comprises nano gold particles dispersed on the surface of the graphene layer. When the super-surface sensor provided by the invention is used for detecting biochemical substances, graphene of the graphene layer in the super-surface sensor is covalently combined with the biochemical substances to be detected, and the biochemical substances to be detected change the dielectric environment of the graphene, so that the fermi level of the graphene is changed, the conductivity is changed, and the amplitude of terahertz waves is changed. Meanwhile, due to the tip effect of the nano gold particles, the resonance of the metal micro resonator in the metal micro resonant layer is enhanced, and the amplitude change of the terahertz waves is more obvious, so that the sensitivity of detection is improved, and the hypersensitive qualitative detection is realized.
Description
Technical Field
The invention belongs to the technical field of biochemical detection, and particularly relates to a super-surface sensor and a preparation method and application thereof.
Background
Terahertz (THz) waves are located between microwaves and light waves in the electromagnetic spectrum and have many excellent characteristics such as fingerprint spectrum, high light transmittance, non-ionizing radiation damage and strong anti-interference capability. Because THz waves are non-ionized, do not damage biological tissue, and are sensitive to vibration and rotation patterns of many biomolecules, terahertz spectroscopy is useful for identifying biochemical substances, such as for analysis of proteins, viruses, antibiotics, DNA, or RNA. However, the sensitivity of the current THz sensing system for identifying and detecting biological samples still has some problems, mainly because the wavelength of THz is not matched with the size of target biological molecules, so that electromagnetic response is very weak, and hypersensitivity detection is difficult to realize.
Disclosure of Invention
In view of the above, the invention provides a super-surface sensor, a preparation method and application thereof, and the super-surface sensor provided by the invention has higher detection sensitivity to biochemical substances.
In order to solve the technical problems, the invention provides a super-surface sensor, which comprises a substrate layer, a polyimide basal layer, a metal micro-resonance layer, a polyimide isolation layer and a graphene layer which are sequentially laminated;
the graphene layer also comprises nano gold particles dispersed on the surface of the graphene layer.
Preferably, the graphene layer is composed of single-layer graphene, and the thickness of the graphene layer is the thickness of the single-layer graphene.
Preferably, the average particle diameter of the nano gold particles is 4.8-5.2 nm.
Preferably, the metal micro-resonant layer comprises a plurality of metal units which are arranged in an array type periodically, and the metal units comprise rectangular metal resonators and C-shaped metal resonators which are arranged from left to right.
Preferably, the interval between the rectangular metal resonator and the C-shaped metal resonator in each metal unit is 11-13 μm;
the metal unit is square, and the side length of the square is 98-102 mu m;
the thickness of the metal micro-resonance layer is 190-210 nm.
Preferably, the material of the substrate layer is quartz glass or monocrystalline silicon wafer;
the thickness of the substrate layer is 290-310 mu m.
Preferably, the polyimide base layer has a thickness of 4.5 to 5.5 μm.
Preferably, the thickness of the polyimide isolation layer is 2.5-3.5 μm.
The invention also provides a preparation method of the super-surface sensor, which comprises the following steps:
spin-coating polyimide on any surface of the substrate layer to obtain a polyimide basal layer;
sputtering a metal micro-resonator on the surface of the polyimide substrate layer to obtain a metal micro-resonant layer;
polyimide is spin-coated on the surface of the metal micro-resonance layer to obtain a polyimide isolation layer;
depositing graphene on the surface of the polyimide isolation layer to obtain a graphene layer;
and dispersing nano gold particles on the surface of the graphene layer to obtain the super-surface sensor.
The invention also provides the application of the super-surface sensor in the aspect of detecting biochemical substances or the super-surface sensor prepared by the preparation method according to the technical scheme.
The invention provides a super-surface sensor, which comprises a substrate layer, a polyimide basal layer, a metal micro-resonance layer, a polyimide isolation layer and a graphene layer which are sequentially laminated; the graphene layer also comprises nano gold particles dispersed on the surface of the graphene layer. When the super-surface sensor provided by the invention is used for detecting biochemical substances, graphene of the graphene layer in the super-surface sensor is covalently combined with the biochemical substances to be detected, and the biochemical substances to be detected can change the dielectric environment of the graphene, so that the fermi level of the graphene is changed, the conductivity is changed, and the amplitude of terahertz waves is changed. Meanwhile, due to the tip effect of the nano gold particles, the resonance of the metal micro resonator in the metal micro resonant layer is enhanced, and the amplitude change of the terahertz waves is more obvious, so that the sensitivity of detection is improved, and the quantitative detection of the hypersensitivity is realized.
Drawings
Fig. 1 is a schematic structural diagram of a super-surface sensor prepared in embodiment 1, wherein 3 is a terahertz wave, 4 is a nano gold particle, 5 is a graphene layer, 6 is a polyimide isolation layer, 7 is a metal microresonator layer, 8 is a polyimide substrate layer, and 9 is a quartz glass substrate layer;
FIG. 2 is a schematic structural diagram of a metal unit in a metal micro-resonant layer in embodiment 1, wherein 1 is a rectangular metal resonator and 2 is a C-shaped metal resonator;
FIG. 3 is a schematic diagram of the arrangement of metal unit arrays in the metal micro-resonant layer in embodiment 1;
FIG. 4 is a graph showing transmission spectra of the sensors prepared in examples 1 to 5 and comparative example 1; wherein 100. Mu.L refers to example 2, 200. Mu.L refers to example 3, 300. Mu.L refers to example 4, 400. Mu.L refers to example 5, 500. Mu.L refers to example 1, and bare refers to comparative example 1;
FIG. 5 is a graph showing the transmission spectrum after aspartic acid solutions of different mass concentrations were added dropwise to the surface of the super-surface sensor prepared in example 1, wherein bare is the detection result without aspartic acid solution being added dropwise;
FIG. 6 is a time-domain spectrum of aspartic acid at different concentrations using the super surface sensor prepared in example 1, wherein bare is the detection result without dropping aspartic acid solution.
Detailed Description
The invention provides a super-surface sensor, which comprises a substrate layer, a polyimide basal layer, a metal micro-resonance layer, a polyimide isolation layer and a graphene layer which are sequentially laminated;
the graphene layer also comprises nano gold particles dispersed on the surface of the graphene layer.
The present invention provides a subsurface sensor comprising a substrate layer. In the present invention, the material of the substrate layer is preferably a piece of amethyst glass or a single crystal silicon wafer, more preferably amethyst glass. In the present invention, the thickness of the substrate layer is preferably 290 to 310. Mu.m, more preferably 300. Mu.m. In the invention, the substrate layer has smaller terahertz wave loss, which is beneficial to the detection of terahertz waves; while the substrate layer also serves to support the entire device.
The present invention provides a subsurface sensor comprising a polyimide substrate layer. In the present invention, the thickness of the polyimide base layer is preferably 4.5 to 5.5 μm, more preferably 5 μm. In the present invention, the polyimide substrate has excellent thermal stability and corrosion resistance as a flexible material.
The invention provides a super-surface sensor comprising a metal micro-resonance layer. In the invention, the metal micro-resonance layer comprises a plurality of metal units which are arranged periodically in an array manner, wherein each metal unit comprises a rectangular metal resonator and a C-shaped metal resonator which are arranged from left to right; the interval between the rectangular metal resonator and the C-shaped metal resonator is preferably 11 to 13 μm, more preferably 12 μm. In the present invention, the metal unit is preferably square, and the side length of the square is preferably 98 to 102 μm, more preferably 100 μm. In the present invention, the rectangular metal resonator and the C-shaped metal resonator are preferably made of aluminum. The invention has no special requirement on the number of the metal units, and can be designed according to actual needs. In the present invention, the thickness of the metal microresonator layer is preferably 190 to 210nm, more preferably 200nm.
The present invention provides a subsurface sensor comprising a polyimide isolation layer. In the present invention, the thickness of the polyimide separator is preferably 2.5 to 3.5 μm, more preferably 3 μm. In the invention, the polyimide isolation layer has the function of protecting the graphene layer, so that the performance of the graphene layer is more stable.
The invention provides a super-surface sensor comprising a graphene layer. In the present invention, the graphene layer is preferably composed of a single-layer graphene, and the thickness of the graphene layer is the thickness of the single-layer graphene.
The super-surface sensor provided by the invention further comprises nano gold particles dispersed on the surface of the graphene layer. In the present invention, the average particle diameter of the nano-gold particles is preferably 4.8 to 5.2nm, more preferably 5nm.
In the invention, the graphene layer and the nano gold particles are main functional devices for realizing ultrasensitive detection. In the invention, when the external terahertz wave passes through the super-surface sensor, the metal micro-resonant layer can be coupled with the terahertz wave to generate a resonant transparent window, so that a characteristic spectrogram of transmission amplitude is obtained. Co-adsorption of the substance to be detected and the graphene layer in the super-surface sensor can influence the doping intensity of graphene in the graphene layer so as to change the conductivity of the graphene and the degree of the valence environment, and further generate initial change on the amplitude of terahertz photons. Along with the increase of the concentration of the substance to be detected, the Fermi level of the graphene gradually approaches to the Dirac point, and the transmission amplitude continuously rises; the concentration of the substance to be detected is continuously increased, and the Fermi level can cross over the Dirac point, so that the transmission amplitude of the terahertz wave is continuously reduced. Meanwhile, due to the tip effect of the nano gold particles, a local electric field is induced, so that the change of the amplitude is enhanced, and ultra-sensitive amplitude sensing is realized.
The invention also provides a preparation method of the super-surface sensor, which comprises the following steps:
spin-coating polyimide on any surface of the substrate layer to obtain a polyimide basal layer;
sputtering a metal micro-resonator on the surface of the polyimide substrate layer to obtain a metal micro-resonant layer;
polyimide is spin-coated on the surface of the metal micro-resonance layer to obtain a polyimide isolation layer;
depositing graphene on the surface of the polyimide isolation layer to obtain a graphene layer;
and dispersing nano gold particles on the surface of the graphene layer to obtain the super-surface sensor.
Polyimide is spin-coated on any surface of the substrate layer to obtain a polyimide base layer. The spin coating is preferably performed by using a spin coater. The invention has no special requirement on the condition parameters of the spin coating, and only needs to obtain a polyimide substrate layer.
After the polyimide substrate layer is obtained, the metal micro-resonator is sputtered on the surface of the polyimide substrate layer to obtain the metal micro-resonator layer. In the present invention, the sputtering front preferably further comprises: and performing exposure and development after spin coating photoresist on the surface of the polyimide substrate layer. The present invention preferably performs sputtering in areas not covered by photoresist. The invention preferably adjusts the shape, distribution and size of the metal microresonator by a photolithographic process. In the present invention, the sputtering is preferably magnetron sputtering. The magnetron sputtering method is not particularly limited, and the magnetron sputtering method can be adopted in a conventional mode in the field.
After the metal micro-resonance layer is obtained, polyimide is spin-coated on the surface of the metal micro-resonance layer to obtain a polyimide isolation layer. The spin coating is preferably performed by using a spin coater. The invention has no special requirement on the condition parameters of the spin coating, and only needs to obtain a polyimide isolation layer.
After the polyimide isolation layer is obtained, graphene is deposited on the surface of the polyimide isolation layer, so that a graphene layer is obtained. In the present invention, the deposition is preferably chemical vapor deposition. The chemical vapor deposition is not particularly limited, and the chemical vapor deposition is performed in a conventional manner in the art.
After the graphene layer is obtained, the gold nanoparticle is dispersed on the surface of the graphene layer, so that the super-surface sensor is obtained. In the present invention, the method for dispersing the nano gold particles on the surface of the graphene layer preferably comprises the following steps:
dispersing nano gold particles in water to obtain nano gold dispersion liquid;
and (3) dripping the nano gold dispersion liquid on the surface of the graphene layer, drying, and repeating the steps of dripping and drying to obtain nano gold particles dispersed on the surface of the graphene layer.
In the present invention, the mass concentration of the gold nanoparticles in the gold nanoparticle dispersion is preferably 0.045 to 0.055mg/mL, more preferably 0.05mg/mL. In the present invention, 100. Mu.L of the gold nanoparticle dispersion is preferably added dropwise to a 1.2cm region, and the drying temperature is preferably 75 to 85 ℃, more preferably 80 ℃. The drying time is not particularly limited in the present invention, as long as the solvent can be removed. In the present invention, the number of times of repeating the dropping and the drying is preferably 1 to 5 times, more preferably 2 to 4 times. In the invention, 100-500 mu L of nano gold dispersion liquid is preferably dripped on the surface of the graphene layer. In the present invention, since the nanogold dispersion is negatively charged, covalent bonding of graphene and nanogold particles occurs.
The invention also provides an application of the super-surface sensor prepared by the technical scheme or the preparation method of the technical scheme in detecting biochemical substances. In the present invention, the biochemical substance preferably includes an amino acid, a protein, or a cell; the amino acid is preferably aspartic acid.
In the present invention, the method of detection preferably comprises the steps of:
preparing standard solutions of substances to be tested with different concentrations;
respectively dripping the standard solutions onto the surface of the super-surface sensor, and then detecting terahertz waves to obtain a standard terahertz spectrum;
drawing a standard curve according to the standard terahertz spectrum and the concentration of the standard solution;
dripping the solution to be detected on the surface of the super-surface sensor, and then carrying out terahertz wave detection to obtain a terahertz spectrum to be detected;
and carrying the data of the terahertz spectrum to be measured into a standard curve to obtain the concentration of the solution to be measured.
In the present invention, the mass concentration of the standard solution is preferably 10fg/mL to 2mg/mL.
In the present invention, the volume of the standard solution to be dropped on the surface of the super surface sensor is preferably 24 to 26. Mu.L, more preferably 25. Mu.L. The terahertz wave detection method has no special requirement on the terahertz wave detection mode, and the terahertz wave detection method can be adopted by a mode conventional in the art.
The technical solutions provided by the present invention are described in detail below in conjunction with examples for further illustrating the present invention, but they should not be construed as limiting the scope of the present invention.
Example 1
Spin-coating polyimide on one surface of the quartz glass with the thickness of 300 mu m, the length of 1.2cm and the width of 1.2cm by using a spin coater to obtain a polyimide substrate layer;
performing exposure and development after spin coating photoresist on the surface of the polyimide substrate layer; performing magnetron sputtering on the area which is not covered by the photoresist to obtain a metal micro-resonance layer with the thickness of 200 nm; the metal micro-resonant layer comprises 1.4X10 4 The metal units are arranged in an array mode, each metal unit comprises a rectangular metal resonator and a C-shaped metal resonator, the distance between the rectangular metal resonators is 12 mu m, and each metal unit is rectangular with a side length of 100 mu m;
spin-coating polyimide on the surface of the metal micro-resonance layer by using a spin coater to obtain a polyimide isolation layer with the thickness of 3 mu m;
depositing single-layer graphene on the surface of the polyimide isolation layer by chemical vapor deposition to obtain a graphene layer;
dispersing nano gold particles in water to obtain nano gold dispersion liquid with the mass concentration of 0.05 mg/mL; and (3) dripping 100 mu L of nano gold dispersion liquid onto the surface of the graphene layer, drying at 80 ℃, and repeating the steps of dripping and drying for 5 times to obtain the super-surface sensor.
Example 2
A super surface sensor was prepared according to the method of example 1, except that the number of times of dropping the gold nanoparticle dispersion liquid on the surface of the graphene layer was 1.
Example 3
A super surface sensor was prepared according to the method of example 1, except that the number of times of dropping the gold nanoparticle dispersion liquid on the surface of the graphene layer was 2.
Example 4
A super surface sensor was prepared according to the method of example 1, except that the number of times of dropping the gold nanoparticle dispersion liquid on the surface of the graphene layer was 3.
Example 5
A super surface sensor was prepared according to the method of example 1, except that the number of times of dropping the gold nanoparticle dispersion liquid on the surface of the graphene layer was 4.
Comparative example 1
A super-surface sensor was prepared according to the method of example 1, except that no gold nanoparticles were added dropwise to the surface of the graphene layer, which was not dispersed.
Fig. 1 is a schematic structural diagram of a super-surface sensor prepared in embodiment 1, wherein 3 is a terahertz wave, 4 is a nano gold particle, 5 is a graphene layer, 6 is a polyimide isolation layer, 7 is a metal microresonator layer, 8 is a polyimide substrate layer, and 9 is a quartz glass substrate layer.
Fig. 2 is a schematic structural diagram of a metal unit in a metal microresonator in embodiment 1, where 1 is a rectangular metal resonator and 2 is a C-shaped metal resonator.
FIG. 3 is a schematic diagram showing the arrangement of metal unit arrays in the metal micro-resonant layer in example 1;
the sensors prepared in examples 1 to 5 and comparative example 1 were examined using a Time Domain Spectrometer (TDS) to obtain transmission spectra, as shown in fig. 4, in which 100 μl refers to example 2, 200 μl refers to example 3, 300 μl refers to example 4, 400 μl refers to example 5, 500 μl refers to example 1, and bare refers to comparative example 1. As can be seen from fig. 4, the transmittance of the sensor increases with increasing concentration of nanogold, because nanogold enhances coupling between metals, so that the projected amplitude continuously increases. And as the concentration of nanogold increases, the increase in transmittance tends to saturate.
Dissolving aspartic acid powder in water to obtain aspartic acid solution with mass concentration of C 1 10.48fg/mL, C 2 716.65pg/mL, C 3 30.99ng/mL, C 4 639.48ng/mL, C 5 1.05mg/mL.
Concentrating 25 μL of the mixture into C 1 ～C 5 The transmission spectrum of the ultra-surface sensor prepared in example 1 was measured by a terahertz time-domain spectrometer (TDS) after the solvent was evaporated by dropping the aspartic acid solution to obtain fig. 5, wherein bare is the measurement result without dropping the aspartic acid solution. As can be seen from fig. 5, the transmission amplitude of the sensor varies with the concentration of aspartic acid. With increasing aspartic acid concentration, the super surface sensor is at f 2 The transmittance at the point is gradually increased compared to the absence of the analyte. At C 2 And C 3 Where the transmittance of the sensor reaches a maximum at the same time and at C 3 And C 5 Sequentially decrease because the sensor is at C 3 When the fermi level of the graphene has crossed the dirac point, the conductivity begins to increase so that the transmission amplitude begins to decrease, at C 5 The amplitude decays below bare and the amplitude of the decay is very large.
Due to the fabrication technology of CVD, this example employs p-type doped graphene with an initial fermi level at the valence band. Concentrating 25 μL of the mixture into C 1 ～C 5 The aspartic acid solution of (2) is dripped on the surface of the super surface sensor prepared in the example 1, and after the solvent is evaporated, the super surface sensor is detected by using a terahertz time-domain spectrometer (THz-TDS) to obtain time-domain spectrums of aspartic acid with different concentrations, as shown in fig. 6, wherein bare is a detection result without dripping the aspartic acid solution. When a negatively charged aspartic acid solution is dripped on the super-surface sensor, electron doping of graphene is caused, so that the electron concentration of the graphene is increased, and the Fermi level moves towards the guide band, as shown by E in the figure F0 To E to F1 As shown. Since the fermi level of graphene is close to the dirac point, its conductivity decreases and transmittance increases. When the aspartic acid concentration increases to C 2 (716.65 pg/mL) Fermi level from E F1 Transition to E F2 Further approaching the dirac point, the conductivity of the graphene decreases again, and the transmittance of the sensor continues to increase. Until the concentration of aspartic acid increases to C 3 (30.99 ng/mL) the Fermi level has crossed the Dirac point such thatTransmittance at this time and C 2 Is substantially uniform. Concentration of aspartic acid from C 3 Increased to C 5 At the same time, the Fermi level of graphene gradually gets far from the Dirac point, the conductivity continuously increases, so that the transmissivity of the sensor continuously decreases and the conductivity is equal to that of C 5 Reaching the lowest point.
The metal micro-resonant layer of the super-surface sensor provided by the invention resonates to form two transmission valleys and a transparent window, and the transparent window is sensitive to external changes and can be used for detecting environmental changes. Under the action of aspartic acid, the super-surface sensor enables the graphene layer to be electronically doped, changes the conductivity of graphene to cause the change of dielectric environment, and further enables the amplitude of terahertz waves to be changed. Meanwhile, due to the tip effect of the nano gold particles, the amplitude change is enhanced, and the hypersensitivity quantitative detection of the amino acid is realized through the amplitude change.
Although the foregoing embodiments have been described in some, but not all, embodiments of the invention, it should be understood that other embodiments may be devised in accordance with the present embodiments without departing from the spirit and scope of the invention.
Claims (10)
1. The super-surface sensor is characterized by comprising a substrate layer, a polyimide basal layer, a metal micro-resonance layer, a polyimide isolation layer and a graphene layer which are sequentially laminated;
the graphene layer also comprises nano gold particles dispersed on the surface of the graphene layer.
2. The super surface sensor according to claim 1, wherein the graphene layer is composed of a single layer of graphene, and the thickness of the graphene layer is the thickness of the single layer of graphene.
3. The super surface sensor according to claim 1, wherein the average particle diameter of the nano gold particles is 4.8 to 5.2nm.
4. The subsurface sensor as recited in claim 1 wherein the metal microresonator layer comprises a plurality of metal units arranged periodically in an array, the metal units comprising rectangular metal resonators and C-shaped metal resonators arranged from left to right.
5. The super surface sensor as claimed in claim 4, wherein a space between said rectangular metal resonator and C-shaped metal resonator in each of said metal units is 11 to 13 μm;
the metal unit is square, and the side length of the square is 98-102 mu m;
the thickness of the metal micro-resonance layer is 190-210 nm.
6. The subsurface sensor according to claim 1, wherein the material of the substrate layer is a piece of amethyst glass or a piece of monocrystalline silicon;
the thickness of the substrate layer is 290-310 mu m.
7. The subsurface sensor as recited in claim 1 wherein the polyimide substrate layer has a thickness of 4.5 to 5.5 μm.
8. The subsurface sensor as recited in claim 1 wherein the polyimide spacer layer has a thickness of 2.5 to 3.5 μm.
9. A method of manufacturing a super surface sensor as claimed in any one of claims 1 to 8, comprising the steps of:
spin-coating polyimide on any surface of the substrate layer to obtain a polyimide basal layer;
sputtering a metal micro-resonator on the surface of the polyimide substrate layer to obtain a metal micro-resonant layer;
polyimide is spin-coated on the surface of the metal micro-resonance layer to obtain a polyimide isolation layer;
depositing graphene on the surface of the polyimide isolation layer to obtain a graphene layer;
and dispersing nano gold particles on the surface of the graphene layer to obtain the super-surface sensor.
10. Use of a super surface sensor according to any one of claims 1 to 8 or prepared according to the preparation method of claim 9 for detecting biochemical substances.
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