CN117564460A - Non-optical contact heterogeneous material high-strength ultrafast laser welding method - Google Patents
Non-optical contact heterogeneous material high-strength ultrafast laser welding method Download PDFInfo
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- CN117564460A CN117564460A CN202311516389.0A CN202311516389A CN117564460A CN 117564460 A CN117564460 A CN 117564460A CN 202311516389 A CN202311516389 A CN 202311516389A CN 117564460 A CN117564460 A CN 117564460A
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- 238000003466 welding Methods 0.000 title claims abstract description 69
- 239000000463 material Substances 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 title claims abstract description 31
- 239000012780 transparent material Substances 0.000 claims abstract description 62
- 229910052751 metal Inorganic materials 0.000 claims abstract description 43
- 239000002184 metal Substances 0.000 claims abstract description 43
- 230000003287 optical effect Effects 0.000 claims abstract description 43
- 239000007769 metal material Substances 0.000 claims abstract description 33
- 230000007797 corrosion Effects 0.000 claims abstract description 10
- 238000005260 corrosion Methods 0.000 claims abstract description 10
- 238000009736 wetting Methods 0.000 claims abstract description 10
- 239000000126 substance Substances 0.000 claims abstract description 8
- 239000010980 sapphire Substances 0.000 claims description 13
- 229910052594 sapphire Inorganic materials 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 238000002679 ablation Methods 0.000 claims description 11
- 238000004544 sputter deposition Methods 0.000 claims description 11
- 238000000608 laser ablation Methods 0.000 claims description 10
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 230000004927 fusion Effects 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 229910000838 Al alloy Inorganic materials 0.000 claims description 2
- 229910001374 Invar Inorganic materials 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000005350 fused silica glass Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 238000003892 spreading Methods 0.000 claims description 2
- 230000007480 spreading Effects 0.000 claims description 2
- 238000002844 melting Methods 0.000 abstract description 8
- 230000008018 melting Effects 0.000 abstract description 8
- 239000000155 melt Substances 0.000 abstract description 2
- 238000012545 processing Methods 0.000 abstract description 2
- 239000011521 glass Substances 0.000 description 11
- 239000010935 stainless steel Substances 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 238000005304 joining Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 238000010008 shearing Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 230000000845 anti-microbial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004100 electronic packaging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000006060 molten glass Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/21—Bonding by welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/18—Dissimilar materials
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention relates to the field of laser micro-nano processing application, and provides a high-strength ultrafast laser welding method for non-optical contact transparent/metal heterogeneous materials. The method specifically comprises the following steps: preparing micro grooves by ablating the surface of a transparent material with ultra-fast laser, and improving the surface wetting angle in a corrosion mode; stacking a non-optical contact transparent material and a metal material, wherein the surface of a micro groove of the transparent material is opposite to the upper surface of the metal and is clamped by a clamp; the ultra-fast laser focus is positioned in the middle of the heterogeneous interface and is opened, the metal material is heated to expand and melt, the expanded and melted substances flow and are sputtered to uniformly spread to the left and right sides of the transparent material micro-groove, and meanwhile, the high-temperature metal melt is heated and melts the transparent material through heat conduction, so that the efficient mutual melting or combination of the heterogeneous materials is realized; and welding by using ultra-fast laser according to the appointed path, and finally realizing sample welding. The method improves the welding strength and stability of the non-optical contact transparent/metal heterogeneous material.
Description
Technical Field
The invention relates to the field of ultrafast laser welding application, in particular to a high-strength laser welding method of non-optical contact transparent/metal heterogeneous materials.
Background
Transparent materials such as glass, sapphire, optical crystals and the like have excellent chemical properties, physical properties and optical characteristics, and simultaneously have the characteristics of good mechanical properties, corrosion resistance, high temperature resistance and the like, so that the transparent materials play an indispensable role in daily life and scientific research production. These transparent materials have been widely used in the fields of aerospace, medical health, consumer electronics, and microwave device windows. However, transparent materials often suffer from problems of connection with metallic materials when used in opto-electromechanical systems. Copper, for example, is widely used in assembly with glass in the fields of electronic packaging and MEMS fabrication as a metal having excellent electrical conductivity, thermal conductivity, desirable antimicrobial effect, ductility and corrosion resistance. However, due to the large differences in physical and chemical properties of glass and copper, conventional joining methods such as mechanical joining, diffusion joining, brazing, and the like have difficulty in achieving highly reliable bonding of the two materials. In addition, glass is often used as an optically functional material for applications such as optical windows and lenses. However, due to the mechanical property limitation of glass, it is required to connect it with metal to improve the mechanical property of the system and apply to the high and new technical field. Therefore, for the problem of connection of transparent materials to metals, the conventional method is difficult to meet the requirement of high-reliability connection, and further research and development of new methods are required.
Ultrafast laser welding is a new fusion welding method in which a laser is passed through glass and focused on an interface between the glass and metal to form a heat source, thereby joining the molten glass and metal together. The ultra-fast laser welding has the advantages of small thermal effect, high precision and the like, is very suitable for connecting various glasses and metals, in this respect, the disclosed patent (CN 116900471A) can homogenize the beam form while prolonging the focal depth range, and the requirement of the clearance distance on the surface of the glass to be welded is reduced by adopting the laser beam with long focal depth, so that the non-optical contact is realized, and the welding quality of the processing area of the transparent glass material is improved by carrying out homogenization shaping on the laser beam; the disclosed patent (CN 113199143A) forms Bessel beams through a shaping lens, so that a double-light-path ultrafast laser welding device for Gaussian beam welding and Bessel beam laser welding is formed, and high-quality and low-cost non-optical contact and optical contact welding of glass materials is realized. However, in existing multiple types of ultrafast laser welding applications, optical contact between samples (high quality polishing of samples and spacing between samples less than 1/4 wavelength) is often relied on, which is often difficult to meet in practical applications, especially for heterogeneous material welding applications of large format transparent window mirrors and metal substrates. In the existing non-optical contact transparent/metal heterogeneous material welding application, the ablation of the ultra-fast laser on the metal is difficult to be limited effectively, so that the formed welding strength is limited, and the practical requirement is difficult to meet.
Therefore, how to regulate the heterogeneous interface contact and the mutual fusion behavior in the ultra-fast welding process of transparent/metallic heterogeneous materials becomes a new problem and challenge. The invention prepares the shape-controllable micro-groove in the transparent material by an ultrafast laser pretreatment mode, and regulates and controls the wetting angle of the micro-groove by chemical corrosion to increase the fluidity of molten liquid. On the one hand, the pretreatment provides free space for sputtering formed by ultra-fast laser ablation of metal materials, and meanwhile, the ablation sputtering can be effectively limited in a micro-groove space, so that heating and melting of molten sputtering metal materials on the groove walls (namely transparent materials) of the micro-groove are accelerated, and finally, high-strength mutual melting of heterogeneous materials is formed. The high-quality, high-efficiency and low-cost welding of most transparent/metal heterogeneous materials under the non-optical contact condition is realized.
Disclosure of Invention
Aiming at the problems, the invention provides a high-strength ultrafast laser welding method for non-optical contact transparent/metal heterogeneous materials, which comprises the steps of preparing micro grooves on the surface of the transparent materials by ablating, improving the surface wetting angle by a corrosion mode, stacking the non-optical contact transparent materials and the metal materials by a clamp, heating and expanding the metal materials under the action of the ultrafast laser, and uniformly spreading the expanded and fused materials to the left and right sides of the micro grooves of the transparent materials under the flowing and sputtering conditions, and heating and melting the transparent materials by heat conduction of high-temperature metal melts, so that the efficient mutual melting or combination of the heterogeneous materials is realized, the strength of the transparent/metal heterogeneous materials during non-optical contact is improved, and higher shearing strength is provided for welding surfaces, thereby solving the problems of insufficient strength, low stability and the like during optical contact welding and non-optical contact welding.
In order to achieve the above purpose, the present invention provides a method for welding a non-optical contact transparent/metal material with high strength, comprising the following steps:
(1) Preparing a micro groove by performing laser ablation on a transparent material by an ultrafast laser ablation method, and improving a surface wetting angle by a corrosion mode;
(2) The transparent material and the metal material are stacked, the surface of the micro groove of the transparent material is opposite to the upper surface of the metal, and the micro groove is clamped by a clamp, so that a free space is provided for the heterogeneous material to expand due to heating;
(3) By adjusting the ultrafast laser, the metal material is heated, expanded and melted, and the expanded and melted substances flow and are uniformly spread to the left and right sides of the transparent material micro-groove under sputtering, and at the moment, the high-temperature metal melt can heat and melt the transparent material through heat conduction, so that the efficient mutual melting or combination of heterogeneous materials is realized;
(4) And welding by using ultra-fast laser according to the appointed path, and finally realizing sample welding.
Further, the focus of the ultra-fast laser ablation is on the surface of the transparent material and is changed along with the occurrence of ablation, so that a better ablation effect is achieved.
Further, the width of the micro groove is 1-10 mu m, the depth is 2-30 mu m, and the micro groove is distributed in an arc shape or a round shape.
Further, the ultrafast laser is a picosecond laser or a femtosecond laser.
Further, the wavelength of the ultrafast laser is in the range of 266-2000nm.
Further, the interface is in a non-optical contact state when the transparent material and the metal material are stacked, and the metal and the transparent material can be not polished.
Further, the surface of the transparent material micro groove is opposite to the upper surface of the metal material.
Further, the focus of the ultrafast laser is located in the middle of the heterogeneous interface.
Further, the transparent material is sapphire, fused quartz, ceramic, silicon or the like.
Further, the metal material is invar, titanium alloy, aluminum alloy, copper and other materials.
Furthermore, the high-strength ultrafast laser welding method of the non-optical contact transparent/metal heterogeneous material is characterized in that shape-controllable micro grooves are prepared in the transparent material in an ultrafast laser pretreatment mode, wetting angles of the micro grooves are regulated and controlled through chemical corrosion, and the fluidity of molten liquid is increased.
Further, a method for high-strength ultrafast laser welding of non-optical contact transparent/metallic heterogeneous materials comprises a laser, a beam expander, a reflector and a focusing mirror, and is characterized in that; the device also comprises an optical component for adjusting the light path of the laser emitted by the laser to be perpendicular to the surface of the workpiece to be processed, a clamp for clamping the stacked transparent material and metal samples and a moving platform for driving the clamp to move, wherein the clamp can adjust the gap between the transparent material samples and the metal samples.
In general, compared with the prior art, the above technical solution conceived by the present invention mainly has the following advantages:
1. in the ultra-fast laser welding method of transparent/metal heterogeneous materials, the optical contact of a sample is mainly relied on, and the ablation and sputtering of the ultra-fast laser to the metal materials are restrained through the optical contact of the sample. Optical contact dissimilar material welding is expensive and effective optical contact is also difficult to achieve in large format (diameter greater than 50 mm) sample welding applications. The method improves the welding strength, stability, air tightness and the like by adopting an ultra-fast laser preparation micro-groove mode, effectively solves the dependence of ultra-fast welding of heterogeneous materials on optical contact of samples, and is favorable for further popularizing the ultra-fast laser welding technology and method of the heterogeneous materials.
2. Specifically, the micro groove is prepared by ultra-fast laser, on one hand, the shape of the micro groove can be controlled (diameter, depth, distribution mode and the like), and enough and proper free space is provided for ultra-fast laser ablation of metal materials in heterogeneous material welding, so that the influence of thermal expansion and sputtering of the metal materials on the connection strength of samples is avoided. On the other hand, the micro-groove surface wetting angle is improved by further carrying out corrosion treatment on the micro-groove, when the ultrafast laser action metal generates metal melt and sputtering, the contact surface of the high-temperature metal melt and sputtering and the transparent micro-groove is increased, so that the efficient fusion and connection of the metal and the transparent material are realized in the free space of the micro-groove, and the welding strength is improved.
3. In addition, under the support of the advantages, the ultra-fast laser can realize effective welding of transparent/metal heterogeneous materials to be welded according to a specified path. In dissimilar material welding applications, shear strength and hermeticity of the weld formation are of major concern. According to the invention, a large amount of metal materials are deposited in the free space of the micro-groove prepared by the ultrafast laser, so that the shearing strength of welding can be obviously improved, and the impact of thermal expansion and sputtering impact of the metal materials on sample connection is avoided in the free space, so that the welding stability and the welding air tightness can be further improved.
Therefore, the invention can further obviously improve the welding strength, stability and air tightness while solving the problem of effective welding of transparent/metal heterogeneous materials, and has obvious technical advantages.
Drawings
FIG. 1 is a system diagram of the invention for preparing micro grooves on the surface of an ultrafast laser ablated transparent material.
Fig. 2 is a system diagram of a high-strength laser welding apparatus for transparent and metallic materials according to the present invention.
FIG. 3 is a schematic diagram of a transparent material micro-groove according to the present invention.
Reference numerals illustrate: 1-ultrafast laser; 2-a control system; 3-laser beam; 4-beam expander; 5-expanding a laser beam; a 6-mirror; 7-focusing mirror; 8-a transparent material; 9-a micro groove; 10-laser ablation focus; 11-a metal material; 12-laser welding focus.
Detailed Description
In order to make the technical problems, technical solutions and advantages to be solved more apparent, the following detailed description will be given with reference to the accompanying drawings and specific embodiments. The description of these embodiments is provided to assist understanding of the present invention, but is not intended to limit the present invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Aiming at the problems that the existing welding scheme is difficult to obtain high strength, the influence of laser ablation is difficult to reduce, non-optical contact welding is difficult to be completed with high strength, and the like, the invention provides a high-strength welding method for non-optical contact transparent/metal heterogeneous materials.
The structure of an example provided by the invention is shown in fig. 1 and 2, and the invention is equipment for performing ultra-fast laser welding on non-optical contact transparent/metal heterogeneous materials. The device consists of an ultrafast laser 1, a control system 2, a beam expander 4, a reflector 6, a focusing mirror 7 and a workbench.
In this embodiment, the ultrafast laser 1, the beam expander 4, the reflector 6 and the focusing mirror 7 are located on the same optical path, and the optical path vertically enters the focusing mirror 7 after being reflected by the reflector 6. The condenser 7 is located above the table. The control system 2 is respectively connected with the ultrafast laser 1 and the workbench and is used for controlling the ultrafast laser 1 and the workbench to work.
The ultra-fast laser generally emits picosecond laser or femtosecond laser, and the wavelength of the output beam of the ultra-fast laser 1 is 266-2000nm.
When the ultra-fast laser beam expander works, the ultra-fast laser 1 outputs a wavelength range (266-2000 nm), the laser beam 3 is expanded through the beam expander 4, and then the laser beam 5 after the beam expansion is reflected by the reflector 6; the expanded laser beam 5 is focused by a focusing mirror 7 onto the surface of a transparent material 8. The control system 2 controls the ultrafast laser 1 and the workbench to ablate the surface of the transparent material 8, the laser focus is continuously regulated by the control system 2 in the ablation process to realize higher-efficiency ablation, and finally, the preparation of the micro-grooves 9 with controllable shapes of the transparent material 8 is completed.
When the ultra-fast laser beam expander works, the ultra-fast laser 1 outputs a wavelength range (266-2000 nm), the laser beam 3 is expanded through the beam expander 4, and then the laser beam 5 after the beam expansion is reflected by the reflector 6; the expanded laser beam 5 is focused to the middle of the interface between the transparent material 8 to be welded and the metal material 11 through the focusing mirror 7. The control system 2 controls the ultrafast laser 1 and the workbench to weld the interface between the transparent material 8 and the metal material 11, so as to finish the welding of the non-optical contact transparent/metal heterogeneous material.
Specific examples:
example 1: in this example, taking the transparent material 8 as sapphire and the metal material 11 as titanium alloy as examples, the sapphire is selected to have a size of about 10mm×7mm×3mm, the titanium alloy is selected to have a size of about 30mm×20mm×5mm, and the roughness ra=3.3 nm of the crystal plane is used, and laser welding is performed according to the steps in the method for high-strength ultrafast laser welding of the non-optical contact transparent/metal heterogeneous material provided in the above embodiment.
In the transparent material ablation step, the output wavelength of the ultrafast laser is 780nm, the pulse is 164fs, and the repetition frequency is 1MHz. The laser energy of the ultrafast laser ablates the surface of the sapphire, so that micro grooves with Gaussian profiles are prepared on the surface of the sapphire, wherein the micro grooves are in an inverted cone shape, the diameter of the upper surface is 5 microns, the depth is 3 microns, the sapphire is placed in a mixed solution of sulfuric acid and phosphoric acid (3:1), the temperature is set to 300 ℃, and etching is carried out for 6 minutes under the condition of not stirring, so that the wetting angle of the sapphire is improved.
In the step of welding the transparent/metal material, the control system 2 enables the laser 3 emitted by the ultrafast laser to pass through the sapphire on the upper layer and then be focused on the interface to be welded, wherein the interface to be welded is the middle of the heterogeneous interface of the transparent material 8 and the metal material 11. The pulse width of the ultrafast laser was set to 164fs, the output power was 10W, the repetition frequency was 1MHz, and the output wavelength was 780nm. And the control system controls the laser and the workbench to weld according to the set welding route, the heated and melted titanium alloy is sputtered into the sapphire micro-groove and spread out, the high-temperature titanium metal melt can heat and melt the sapphire through the heat conduction effect, and the high-efficiency mutual melting or combination of heterogeneous materials is realized in the micro-groove, so that the welding between the titanium alloy and the sapphire is completed.
Example 2: in this example, the transparent material 8 is quartz glass, the metal material 11 is stainless steel, the quartz glass is about 20mm×10mm×2mm, the stainless steel is about 30mm×20mm×5mm, and the roughness ra=3.3 nm of the crystal face is used, and the laser welding is performed according to the steps in the method of high-strength ultrafast laser welding of the non-optical contact transparent/metal heterogeneous material provided in the above embodiment.
In the transparent material ablation step, the output wavelength of the ultrafast laser is 1040nm, the pulse is 388fs, and the repetition frequency is 100kHz. The laser energy of the ultrafast laser ablates the surface of the quartz glass, thereby preparing the micro groove with controllable shape on the surface of the quartz glass, wherein the micro groove is in an inverted cone shape, the diameter of the upper surface is 5 mu m, the depth is 3 mu m, and then the quartz glass is placed in saturated NH 4 HF 2 Solution (HF: NH) 4 F=3: 2) The temperature was set at 80 ℃ (±1℃) and etched for 95 minutes without stirring to improve the wetting angle.
In the step of welding the transparent/metal material, the laser 3 emitted by the ultrafast laser 1 passes through the quartz glass on the upper layer and then is focused on the interface to be welded, namely, the interface to be welded is the middle of the heterogeneous interface of the transparent material 8 and the metal material 11 through the control system 2. The pulse width of the ultrafast laser was set to 388fs, the output power was 8W, the repetition frequency was 100kHz, and the output wavelength was 1040nm. And the control system controls the laser and the workbench to weld according to the set welding route, heated and melted stainless steel is sputtered into the quartz glass micro-groove and spread out, and the high-temperature stainless steel melt can heat and melt quartz glass through the heat conduction effect at the moment, so that the high-efficiency mutual melting or combination of heterogeneous materials is realized in the micro-groove, and the welding between the stainless steel and the quartz glass is completed.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.
Claims (10)
1. A method of high intensity ultrafast laser welding of non-optical contact transparent/metallic heterogeneous materials, comprising:
step one, preparing a micro groove by carrying out laser ablation on a transparent material by an ultrafast laser ablation method, and improving a surface wetting angle by a corrosion mode.
And step two, stacking the transparent material and the metal material, wherein the surface of the micro-groove of the transparent material is opposite to the upper surface of the metal, and clamping the transparent material by using a clamp, so that the micro-groove structure provides a free space for the heterogeneous material to expand due to heating.
And thirdly, heating and expanding the metal material by adjusting the ultrafast laser, and uniformly spreading the expanded and fused substance to the left and right of the micro groove of the transparent material under the flowing and sputtering conditions, wherein the high-temperature metal melt can heat and melt the transparent material through heat conduction, so that the efficient mutual fusion or combination of heterogeneous materials is realized.
And fourthly, welding by using ultra-fast laser according to a specified path, and finally realizing sample welding.
2. The method of claim 1, wherein in the first step, the focal point of the ultra-fast laser ablation is on the surface of the transparent material and is changed along with the occurrence of ablation, so as to achieve better ablation effect.
3. The method of claim 1, wherein in the first step, the micro grooves have a width of 1-10 μm and a depth of 2-30 μm, and are distributed in an arcuate shape or a circular shape.
4. The method of claim 1, wherein in the first and third steps, the ultrafast laser is picosecond laser or femtosecond laser, and the ultrafast laser is in the wavelength range of 266-2000nm.
5. The method of claim 1, wherein in the second step, the interface between the transparent material and the metal material is in a non-optical contact state when the transparent material and the metal material are stacked, and the metal and the transparent material may not be polished.
6. The method of claim 1, wherein in step three, the focal point of the ultrafast laser is located in the middle of the heterointerface.
7. The method of high intensity ultrafast laser welding of non-optical contact transparent/metallic heterogeneous materials according to claim 1, wherein the transparent material is sapphire, fused quartz, ceramic, silicon, or the like.
8. The method of claim 1, wherein the metallic material is invar, titanium alloy, aluminum alloy, copper, or the like.
9. A high-strength ultrafast laser welding method for non-optical contact transparent/metallic heterogeneous materials is characterized in that shape-controllable micro grooves are prepared in the transparent materials in an ultrafast laser pretreatment mode, wetting angles of the micro grooves are regulated and controlled through chemical corrosion, and fluidity of molten liquid is increased.
10. The high-strength ultrafast laser welding method for the non-optical contact transparent/metal heterogeneous material comprises a laser, a beam expander, a reflecting mirror and a focusing mirror, and is characterized by further comprising an optical assembly, a clamp and a moving platform, wherein the optical assembly is used for adjusting the light path of laser emitted by the laser to be perpendicular to the surface of a workpiece to be processed, the clamp is used for clamping stacked transparent material and metal sample, and the moving platform is used for driving the clamp to move, and the clamp can adjust the gap between the transparent material sample and the metal sample.
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