CN117560883A - Extreme ultraviolet xenon lamp driving power supply - Google Patents
Extreme ultraviolet xenon lamp driving power supply Download PDFInfo
- Publication number
- CN117560883A CN117560883A CN202410026293.4A CN202410026293A CN117560883A CN 117560883 A CN117560883 A CN 117560883A CN 202410026293 A CN202410026293 A CN 202410026293A CN 117560883 A CN117560883 A CN 117560883A
- Authority
- CN
- China
- Prior art keywords
- power supply
- fixedly connected
- mounting
- xenon lamp
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052724 xenon Inorganic materials 0.000 title claims abstract description 25
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 title claims abstract description 25
- 230000001681 protective effect Effects 0.000 claims abstract description 43
- 230000005855 radiation Effects 0.000 claims abstract description 6
- 238000007789 sealing Methods 0.000 claims description 14
- 238000003825 pressing Methods 0.000 claims description 11
- 238000009434 installation Methods 0.000 claims description 6
- 239000000428 dust Substances 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 8
- 238000012423 maintenance Methods 0.000 abstract description 8
- 238000004804 winding Methods 0.000 abstract description 3
- 238000005096 rolling process Methods 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/02—Details
- H05K5/0217—Mechanical details of casings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
- H01J61/523—Heating or cooling particular parts of the lamp
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/02—Details
- H05K5/0213—Venting apertures; Constructional details thereof
- H05K5/0214—Venting apertures; Constructional details thereof with means preventing penetration of rain water or dust
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/02—Details
- H05K5/03—Covers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/02—Arrangements of circuit components or wiring on supporting structure
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/14—Mounting supporting structure in casing or on frame or rack
- H05K7/1401—Mounting supporting structure in casing or on frame or rack comprising clamping or extracting means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20009—Modifications to facilitate cooling, ventilating, or heating using a gaseous coolant in electronic enclosures
- H05K7/20136—Forced ventilation, e.g. by fans
- H05K7/20181—Filters; Louvers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2089—Modifications to facilitate cooling, ventilating, or heating for power electronics, e.g. for inverters for controlling motor
- H05K7/20909—Forced ventilation, e.g. on heat dissipaters coupled to components
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Power Engineering (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
The invention relates to the technical field of xenon lamp power supplies, in particular to an extreme ultraviolet xenon lamp driving power supply which comprises a power supply shell, a heat radiation structure, a protection structure, a limiting structure, a mounting structure and a wiring structure, wherein the power supply shell is provided with a power supply opening; through protective structure dismantle protective cover and power casing fast, after the protective cover dismantles, the mounting panel in rethread mounting structure takes electrical components out power casing to overhaul, the maintenance space has been increased, heat radiation structure accelerates the inside air current circulation of power casing, can make the inside radiating effect of power casing better, simultaneously through the filter screen of power casing both sides, can prevent that outside dust from entering into inside from the louvre, avoid a large amount of dust to enter into the inside influence to the internal circuit of power casing, limit structure is convenient for fix between pivot and the protective cover after will rotating, the pivot after avoiding rotating takes place the rotation, wiring structure is convenient for wiring many wires, avoid many wires winding together to cause the influence to subsequent maintenance.
Description
Technical Field
The invention relates to the technical field of xenon lamp power supplies, in particular to an extreme ultraviolet xenon lamp driving power supply.
Background
The ultraviolet pulse xenon lamp driving power supply is a special type high-voltage power supply and is mainly used for driving an ultraviolet pulse xenon lamp to work.
However, traditional drive power supply is in the use, when needs overhauld inside electrical components, because electrical components all installs on the shell, can overhaul the space less when overhauling, lead to overhaul the flexibility relatively poor, and when dispelling the heat through the fan, can make outside dust blow into inside through the louvre, the dust enters into inside and falls to electrical components on can causing the influence to the circuit, and a plurality of wires in the inside electrical components are usually binded together through plastic ribbon, bind through plastic ribbon and can lead to the wire winding together, can cause the influence to subsequent overhaul maintenance.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides an extreme ultraviolet xenon lamp driving power supply.
The technical scheme adopted for solving the technical problems is as follows: an extreme ultraviolet xenon lamp driving power supply comprises a power supply shell, a mounting structure arranged on the power supply shell, a heat dissipation structure arranged on the power supply shell and a protection structure arranged on the power supply shell;
the mounting structure comprises a mounting plate, wherein the mounting plate is detachably connected to the power supply shell, two mounting columns are connected to the power supply shell in a sliding manner, the mounting columns are clamped with mounting grooves in the mounting plate, a connecting rod is fixedly connected to the mounting columns, the connecting rod is connected with the power supply shell in a sliding manner, and a tension spring is fixedly connected between the connecting rod and the power supply shell;
the power supply is characterized in that a protection structure is arranged on the power supply shell and comprises a protection cover, the power supply shell is detachably connected with the protection cover, two driving blocks are fixedly connected to the protection cover, the driving blocks are connected with the power supply shell in a sliding mode, and the driving blocks are matched with the inclined planes on the connecting rods in a sliding mode.
Specifically, two fixed sleeves are fixedly connected to the protective cover, fixed rods are connected to the fixed sleeves in a sliding mode, the two fixed rods are clamped with the power supply shell, and a first spring is fixedly connected between the fixed rods and the fixed sleeves.
Specifically, two fixedly connected with connecting block on the dead lever, rotate on the connecting block and be connected with the spliced pole, two rolling fit between the drive groove on spliced pole and the driving disk, the driving groove is oval structure, rotate between driving disk and the protective cover and be connected, fixedly connected with connecting axle on the driving disk, rotate between connecting axle and the protective cover and be connected.
Specifically, fix through limit structure between connecting axle and the protective cover, limit structure includes the slide, sliding connection has two slides on the connecting axle, fixedly connected with spacing post on the slide, be equipped with four spacing grooves that use with spacing post cooperation on the protective cover, two of them on spacing post and the protective cover block between the spacing groove.
Specifically, fixedly connected with connecting plate on the slide, sliding connection between connecting plate and the connecting axle, two fixed connection between connecting plate and the pressing block, sliding connection between pressing block and the connecting axle, fixedly connected with second spring between slide and the connecting axle.
Specifically, heat radiation structure includes the installing frame, can dismantle on the power casing and be connected with two installing frames, fixedly connected with filter screen on the installing frame, install two fans on the power casing, sliding connection has two fixed blocks on the power casing, two the block respectively with two installing frames between the block.
Specifically, two lead screws are rotatably connected to the power supply shell, and the two lead screws are respectively in threaded connection with the two fixing blocks.
Specifically, be equipped with wiring structure on the mounting structure, wiring structure includes the installation pole, install the installation pole on the mounting panel, install the wiring pole on the installation pole, be equipped with a plurality of wire casings on the wiring pole, rotate on the wiring pole and be connected with a plurality of closing plates that seal the wire casing.
Specifically, a plurality of all fixedly connected with pivot on the closing plate, rotate between pivot and the wiring pole and be connected, a plurality of all fixedly connected with torsional spring between pivot and the wiring pole.
Specifically, the wiring pole is last sliding connection has a plurality of gag levers, and is a plurality of the block between gag lever levers and the epaxial spacing hole of every pivot respectively, fixedly connected with third spring between gag lever levers and the wiring pole.
The beneficial effects of the invention are as follows:
(1) According to the extreme ultraviolet xenon lamp driving power supply, the mounting structure is arranged on the power supply shell, the protective structure is arranged on the power supply shell, so that the protective cover and the power supply shell are quickly disassembled, and after the protective cover is disassembled, the electric appliance component is brought out of the power supply shell to be overhauled through the mounting plate in the mounting structure, so that the overhauling space is increased, and the overhauling flexibility is improved.
(2) According to the extreme ultraviolet xenon lamp driving power supply, the radiating structure is arranged on the power supply shell, the arrangement of the radiating structure quickens the airflow circulation in the power supply shell, so that the radiating effect in the power supply shell is better, meanwhile, external dust can be prevented from entering the power supply shell from the radiating holes through the filter screens on the two sides of the power supply shell, and a large amount of dust is prevented from entering the power supply shell to influence an internal circuit.
(3) According to the extreme ultraviolet xenon lamp driving power supply, the connecting shaft and the protective cover are fixed through the limiting structure, the limiting structure is convenient to fix the rotating shaft after rotation with the protective cover, and the rotating shaft after rotation is prevented from autorotation.
(4) According to the extreme ultraviolet xenon lamp driving power supply, the wiring structure is arranged on the mounting structure, the wiring structure is convenient for wiring the plurality of wires, and the influence of the winding of the plurality of wires on subsequent overhauling and maintenance is avoided.
Drawings
The invention will be further described with reference to the drawings and examples.
FIG. 1 is a schematic view of the overall structure provided by the present invention;
FIG. 2 is an enlarged schematic view of the portion A shown in FIG. 1;
FIG. 3 is a schematic diagram showing a connection structure between a protective cover and a power supply housing according to the present invention;
FIG. 4 is an enlarged schematic view of the B-section structure shown in FIG. 3;
FIG. 5 is an enlarged schematic view of the structure of the portion C shown in FIG. 3;
FIG. 6 is an enlarged schematic view of the structure of the portion D shown in FIG. 3;
FIG. 7 is an enlarged schematic view of the E-section structure shown in FIG. 6;
FIG. 8 is a schematic diagram of a connection structure of a connection shaft and a driving disk according to the present invention;
fig. 9 is an enlarged schematic view of the F-section structure shown in fig. 8;
FIG. 10 is a schematic view of a connection structure of a sealing plate and a wiring rod according to the present invention;
FIG. 11 is a schematic view of a connection structure between a sealing plate and a rotating shaft according to the present invention;
fig. 12 is an enlarged schematic view of the G portion structure shown in fig. 11;
fig. 13 is a schematic structural view of a limiting groove according to the present invention.
In the figure: 1. a power supply housing; 2. a heat dissipation structure; 201. a mounting frame; 202. a filter screen; 203. a fan; 204. a fixed block; 205. a screw rod; 3. a protective structure; 301. a protective cover; 302. a fixed sleeve; 303. a fixed rod; 304. a first spring; 305. a connecting block; 306. a connecting column; 307. a driving groove; 308. a drive plate; 309. a connecting shaft; 310. a driving block; 4. a limit structure; 401. a limit column; 402. a limit groove; 403. a slide plate; 404. a second spring; 405. a connecting plate; 406. pressing the blocks; 5. a mounting structure; 501. a mounting plate; 502. a mounting column; 503. a mounting groove; 504. a connecting rod; 505. a tension spring; 6. a wiring structure; 601. a mounting rod; 602. a wiring lever; 603. a sealing plate; 604. a wire slot; 605. a rotating shaft; 606. a torsion spring; 607. a limit rod; 608. a limiting hole; 609. and a third spring.
Detailed Description
The invention is further described in connection with the following detailed description in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the invention easy to understand.
As shown in fig. 1 to 13, the driving power supply for the euv xenon lamp comprises a power supply housing 1, a mounting structure 5 arranged on the power supply housing 1, a heat dissipation structure 2 arranged on the power supply housing 1, and a wiring structure 6 arranged on the mounting structure 5; the mounting structure 5 comprises a mounting plate 501, wherein the mounting plate 501 is detachably connected to the power supply shell 1, two mounting posts 502 are slidably connected to the power supply shell 1, the mounting posts 502 are clamped with mounting grooves 503 on the mounting plate 501, a connecting rod 504 is fixedly connected to the mounting posts 502, the connecting rod 504 is slidably connected with the power supply shell 1, and a tension spring 505 is fixedly connected between the connecting rod 504 and the power supply shell 1; the power supply shell 1 is provided with a protection structure 3, the protection structure 3 comprises a protection cover 301, the power supply shell 1 is detachably connected with the protection cover 301, the protection cover 301 is fixedly connected with two driving blocks 310, and the two driving blocks 310 are in sliding connection with the power supply shell 1.
Specifically, two drive piece 310 with respectively with two sliding fit between the inclined plane on the connecting rod 504, simultaneously when protective cover 301 upwards pulls out from power casing 1, can make drive piece 310 upward movement, when drive piece 310 pulls out, two connecting rods 504 can drive two erection columns 502 respectively under the effect of extension spring 505 and slide, make the block between the erection column 502 no longer and the mounting groove 503 on the mounting panel 501, can be with the electrical components wire of mounting panel 501 and the interface on the power casing 1 no longer be connected after this moment, take out mounting panel 501 from power casing 1 inside, can change or overhaul the electrical components that need change or overhaul, through dismantling the connection between mounting panel 501 and the power casing 1, be convenient for take electrical components out of power casing 1 through mounting panel 501 overhauls, the maintenance space has been increased, the maintenance flexibility has been improved, simultaneously, make connecting rod 504 drive two erection columns 502 no longer with the mounting panel between the block, be convenient for dismantle mounting panel 501 from power casing 1.
Specifically, two fixing sleeves 302 are fixedly connected to the protective cover 301, fixing rods 303 are slidably connected to the fixing sleeves 302, two fixing rods 303 are clamped with the power supply housing 1, a first spring 304 is fixedly connected between each fixing rod 303 and each fixing sleeve 302, a connecting block 305 is fixedly connected to each fixing rod 303, a connecting column 306 is rotatably connected to each connecting block 305, two connecting columns 306 are in rolling fit with driving grooves 307 on the driving disc 308, the driving grooves 307 are in oval structures, the driving disc 308 is rotatably connected with the protective cover 301, a connecting shaft 309 is fixedly connected to the driving disc 308, the connecting shaft 309 is rotatably connected with the protective cover 301, the connecting shaft 309 is fixed with the protective cover 301 through a limiting structure 4, the limiting structure 4 comprises a sliding plate 403, the connecting shaft 309 is slidably connected with two sliding plates 403, the sliding plates 403 are fixedly connected with limit posts 401, the protective cover 301 is provided with four limit grooves 402 matched with the limit posts 401, two limit posts 401 are clamped with two limit grooves 402 on the protective cover 301, the sliding plates 403 are fixedly connected with connecting plates 405, the connecting plates 405 are slidably connected with the connecting shaft 309, the two connecting plates 405 are fixedly connected with pressing blocks 406, the pressing blocks 406 are slidably connected with the connecting shaft 309, the sliding plates 403 are fixedly connected with second springs 404, meanwhile, when the interior is required to be overhauled, the pressing blocks 406 are pressed by inner hexagonal wrenches, the pressing blocks 406 can drive the two connecting plates 405 to slide downwards when sliding downwards, the two connecting plates 405 can drive the two sliding plates 403 to slide downwards when sliding downwards, when the slide plate 403 slides downwards, the second springs 404 shrink, and simultaneously, the two slide plates 403 can drive the two limit posts 401 to not be clamped with two limit grooves 402 on the protective cover 301, at this time, the connecting shaft 309 is rotated by the inner hexagonal wrench, so that the connecting shaft 309 drives the driving disc 308 to rotate, when the driving disc 308 rotates, the connecting posts 306 and the driving grooves 307 are in rolling fit, because the driving grooves 307 are elliptical, the two connecting posts 306 drive the two connecting blocks 305 to move oppositely, the two connecting blocks 305 can drive the two fixing rods 303 to slide oppositely when moving oppositely, the fixing rods 303 can slide with the fixing sleeves 302, meanwhile, the first springs 304 shrink, the two fixing rods 303 are not clamped with the power supply housing 1, after the connecting shaft 309 rotates ninety degrees, the inner hexagonal wrench is pulled out of the connecting shaft 309, the protective cover 301 can be dismounted from the power supply housing 1 under the action of the second springs 404, the two limit posts 306 are clamped with the other two limit grooves 402, the protective cover 301 can be dismounted from the power supply housing 1, the two fixing rods 303 can not be clamped with the two drive shafts 308, the two protective cover 301 can be dismounted from the power supply housing 1, and the power supply housing 1 can not be dismounted from the power supply housing 1, and the power supply housing 1 can be dismounted from the two limit posts can be dismounted, and the power supply housing 301 can be dismounted from the power supply housing 1, and the power supply housing 301 can be dismounted conveniently, and the power supply housing 301 can be dismounted, and the power supply housing 1 can be dismounted, and the power supply 1 can be conveniently, and the power station and the safety device can be mounted and the safety device.
Specifically, heat radiation structure 2 includes mounting frame 201, can dismantle on power casing 1 and be connected with two mounting frames 201, fixedly connected with filter screen 202 on the mounting frame 201, install two fans 203 on the power casing 1, sliding connection has two fixed blocks 204 on the power casing 1, two fixed blocks 204 respectively with two mounting frames 201 between the block, power casing 1 is gone up to rotate and is connected with two lead screws 205, two lead screws 205 respectively with two threaded connection between the fixed blocks 204, when need dispel the heat to the inside of power casing 1 in daily use, through starting two fans 203, through the cooperation use between two fans 203 for the inside air current circulation of power casing 1 can make the inside radiating effect of power casing 1 better, simultaneously through the filter screen 202 of power casing 1 both sides, can prevent that outside dust from entering into inside from the hole department to the inside of power casing 1, avoid a large amount of dust to enter into the inside circuit to cause the influence, when need lift off the filter screen 202 and clear up, can insert six edges 205 through six edges 205 and insert into the inside grooves of the block, can make and draw down the side by six edges and draw the side of the block to the side of the frame 201, and install the side by the screw and draw the frame 201 and install and make the side-down, the inside the window 201 is fixed, and the side of the frame is fixed, and the side 201 is firmly can be fixed, and the side and the inside is fixed and can be moved to the side through the side and the side is fixed, and the side is mounted.
Specifically, the wiring structure 6 includes a mounting rod 601, the mounting plate 501 is provided with the mounting rod 601, the mounting rod 601 is provided with a wiring rod 602, the wiring rod 602 is provided with a plurality of wire grooves 604, the wiring rod 602 is rotatably connected with a plurality of sealing plates 603 for sealing the wire grooves 604, a plurality of sealing plates 603 are fixedly connected with a rotating shaft 605, the rotating shaft 605 is rotatably connected with the wiring rod 602, a plurality of rotating shafts 605 are fixedly connected with torsion springs 606 between the wiring rod 602, the wiring rod 602 is slidably connected with a plurality of limiting rods 607, the limiting rods 607 are respectively clamped with limiting holes 608 on each rotating shaft 605, a third spring 609 is fixedly connected between the limiting rods 607 and the wiring rod 602, when an internal electrical component is in wiring, the limiting rods 607 can be pressed downwards, the third spring 609 contracts when the limiting rod 607 slides downwards, meanwhile, the limiting rod 607 is not clamped with the limiting hole 608 on the rotating shaft 605, at the moment, the sealing plate 603 can rotate out under the action of the torsion spring 606, at the moment, the sealing plate 603 is not used for sealing the wire grooves 604, wires can be placed in the wire grooves 604, the plurality of wires are prevented from being wound together to influence the subsequent maintenance through the arrangement of the plurality of wire grooves 604, after the wire wiring is completed, the sealing plate 603 is rotated, when the sealing plate 603 rotates to be parallel to the wiring rod 602, the limiting rod 607 slides upwards under the action of the third spring 609, the limiting rod 607 is clamped with the limiting hole 608 on the rotating shaft 605, the clamping between the limiting rod 607 and the rotating shaft 605 is realized through the clamping between the limiting rod 607 and the rotating shaft 605, the rotating sealing plate 603 is convenient to fix, the wire is prevented from sliding from the wire grooves 604 due to the rotation of the sealing plate 603, while the mounting bar 601 and the routing bar 602 may be mounted at different positions of the mounting plate 501 according to the routing positions of the wires.
When the power supply device is used, when the inside of the power supply shell 1 needs to be cooled in the daily use process, by starting the two fans 203 and matching the two fans 203, the air flow in the power supply shell 1 is quickened, the cooling effect in the power supply shell 1 is better, meanwhile, the filter screens 202 on the two sides of the power supply shell 1 can prevent external dust from entering the inside from cooling holes, so that a large amount of dust is prevented from entering the inside of the power supply shell 1 to influence an internal circuit, when the filter screens 202 need to be disassembled for cleaning, the filter screens can be inserted into the inner hexagonal grooves on the screw rod 205 through the inner hexagonal wrench, the screw rod 205 is rotated through the inner hexagonal wrench, the screw rod 205 drives the fixed block 204 to slide away from the mounting frame 201, so that the fixed block 204 is not clamped and abutted against the mounting frame 201, and the mounting frame 201 can be pulled upwards at the moment, the mounting frame 201 is disassembled from the power supply shell 1 for cleaning, and the firmness between the mounting frame 201 and the power supply shell 1 is improved through the abutting and clamped between the fixed block 204 and the mounting frame 201;
meanwhile, when the inside is required to be overhauled, the pressing block 406 can be pressed by the inner hexagonal wrench, the pressing block 406 can drive the two connecting plates 405 to slide downwards when sliding downwards, the two connecting plates 405 can drive the two sliding plates 403 to slide downwards when sliding downwards, the second springs 404 shrink when sliding plates 403 slide downwards, meanwhile, the two sliding plates 403 can drive the two limit posts 401 to be no longer blocked with the two limit slots 402 on the protective cover 301, at the moment, the connecting shaft 309 can be rotated by the inner hexagonal wrench, the connecting shaft 309 can drive the driving disc 308 to rotate, the connecting posts 306 and the driving slots 307 can be in rolling fit when the driving disc 308 rotates, the two connecting posts 306 can drive the two connecting posts 305 to move oppositely due to the elliptical driving slots 307, the two fixing rods 303 can be driven to slide oppositely when the two connecting posts 305 move oppositely, the fixing rods 303 slide with the fixing sleeves 302, meanwhile, the first springs 304 shrink, so that the two fixing rods 303 are not clamped with the power supply shell 1 any more, after the connecting shaft 309 rotates ninety degrees, the inner hexagonal wrench is pulled out of the connecting shaft 309, the two limiting columns 401 are clamped with the other two limiting grooves 402 under the action of the second springs 404, at the moment, the protective cover 301 can be detached from the power supply shell 1, the two fixing rods 303 are driven by the two driving discs 308 to be not clamped with the power supply shell 1, the protective cover 301 is conveniently and quickly detached from the power supply shell 1, the dismounting efficiency between the protective cover 301 and the power supply shell 1 is improved, meanwhile, the connecting shaft 309 after rotation is conveniently fixed through the clamping between the two limiting columns 401 and the limiting grooves 402 on the protective cover 301, and the connecting shaft 309 is prevented from rotating;
meanwhile, when the protective cover 301 is pulled out from the power supply shell 1, the driving block 310 moves upwards, when the driving block 310 is pulled out, the two connecting rods 504 respectively drive the two mounting posts 502 to slide under the action of the tension springs 505, so that the mounting posts 502 are not clamped with the mounting grooves 503 on the mounting plate 501, at the moment, after the electric component wires mounted on the mounting plate 501 are not connected with the interfaces on the power supply shell 1, the mounting plate 501 is taken out from the power supply shell 1, the electric component to be replaced or overhauled can be replaced, and the mounting plate 501 is detachably connected with the power supply shell 1, so that the electric component is conveniently brought out of the power supply shell 1 for overhauling through the mounting plate 501, the overhauling space is increased, the overhauling flexibility is improved, and meanwhile, the connecting rods 504 drive the connecting rods 504 to slide under the driving of the two mounting posts 502 and the mounting plate 501, so that the mounting plate 501 is not clamped with the mounting plate 501, and the mounting plate 501 can be conveniently and rapidly detached from the power supply shell 1;
when inside electrical components is wiring, the accessible is pushed down gag lever post 607, third spring 609 contracts when gag lever post 607 slides down, simultaneously block between gag lever post 607 and the spacing hole 608 on pivot 605 no longer, closing plate 603 can roll out under the effect of torsional spring 606 this moment, closing plate 603 no longer seals wire casing 604 this moment, can place the wire in a plurality of wire casings 604, through the setting of a plurality of wire casings 604, avoided many wires to twine together and cause the influence to subsequent maintenance, after the wire wiring is accomplished, through rotating closing plate 603, when closing plate 603 rotates to parallel with wiring pole 602 between, at this moment gag lever post 607 upwards slides under the effect of third spring 609, make block between gag lever post 607 and the spacing hole 608 on pivot 605, block between passing through gag lever post 607 and pivot 605, be convenient for fix closing plate 603 after rotating, avoid closing plate 603 to take place the rotation and lead to the landing from wire casing 604, can install mounting rod 601 and pole 602 in the different positions of mounting panel 501 according to the wiring position of wire simultaneously.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (10)
1. The extreme ultraviolet xenon lamp driving power supply is characterized by comprising a power supply shell (1), a mounting structure (5) arranged on the power supply shell (1) and a protection structure (3) arranged on the power supply shell (1);
the mounting structure (5) comprises a mounting plate (501), wherein the mounting plate (501) is detachably connected to the power supply shell (1), two mounting posts (502) are slidably connected to the power supply shell (1), the mounting posts (502) are clamped with mounting grooves (503) on the mounting plate (501), a connecting rod (504) is fixedly connected to the mounting posts (502), the connecting rod (504) is slidably connected with the power supply shell (1), and a tension spring (505) is fixedly connected between the connecting rod (504) and the power supply shell (1);
be equipped with protective structure (3) on power casing (1), protective structure (3) are including protective cover (301), can dismantle on power casing (1) and be connected with protective cover (301), fixedly connected with two drive blocks (310) on protective cover (301), two sliding connection between drive block (310) and power casing (1), two sliding fit between drive block (310) and the inclined plane on connecting rod (504) respectively.
2. The euv xenon lamp driving power supply according to claim 1, wherein: two fixed sleeves (302) are fixedly connected to the protective cover (301), fixed rods (303) are connected to the fixed sleeves (302) in a sliding mode, the two fixed rods (303) are clamped with the power supply shell (1), and a first spring (304) is fixedly connected between the fixed rods (303) and the fixed sleeves (302).
3. The euv xenon lamp driving power supply according to claim 2, wherein: two fixedly connected with connecting block (305) on dead lever (303), rotate on connecting block (305) and be connected with spliced pole (306), two between spliced pole (306) and drive groove (307) on driving disk (308) roll the cooperation, driving groove (307) are oval structure, rotate between driving disk (308) and protective cover (301) and be connected, fixedly connected with connecting axle (309) on driving disk (308), rotate between connecting axle (309) and protective cover (301) and be connected.
4. An euv xenon lamp driving source according to claim 3, wherein: the utility model discloses a protection cover, including connecting axle (309), guard cover (301) and connecting axle (309), fix through limit structure (4), limit structure (4) include slide (403), sliding connection has two slide (403) on connecting axle (309), fixedly connected with spacing post (401) on slide (403), be equipped with four spacing groove (402) that use with spacing post (401) cooperation on guard cover (301), two between two of spacing post (401) and guard cover (301) between spacing groove (402).
5. The euv xenon lamp driving power supply according to claim 4, wherein: the sliding plate (403) is fixedly connected with a connecting plate (405), the connecting plate (405) is in sliding connection with the connecting shaft (309), the two connecting plates (405) are fixedly connected with the pressing block (406), the pressing block (406) is in sliding connection with the connecting shaft (309), and the sliding plate (403) is fixedly connected with a second spring (404) between the connecting shaft (309).
6. The euv xenon lamp driving power supply according to claim 1, wherein: be equipped with heat radiation structure (2) on power casing (1), heat radiation structure (2) are including installing frame (201), can dismantle on power casing (1) and be connected with two installing frame (201), fixedly connected with filter screen (202) on installing frame (201), install two fans (203) on power casing (1), sliding connection has two fixed blocks (204) on power casing (1), two block between fixed block (204) and two installing frame (201) respectively.
7. The euv xenon lamp driving power supply according to claim 6, wherein: two lead screws (205) are rotatably connected to the power supply shell (1), and the two lead screws (205) are respectively connected with the two fixing blocks (204) through threads.
8. The euv xenon lamp driving power supply according to claim 1, wherein: be equipped with wiring structure (6) on mounting structure (5), wiring structure (6) are including installation pole (601), install installation pole (601) on mounting panel (501), install wiring pole (602) on installation pole (601), be equipped with a plurality of wire casings (604) on wiring pole (602), rotate on wiring pole (602) and be connected with a plurality of closing plates (603) that seal wire casings (604).
9. The euv xenon lamp driving power supply according to claim 8, wherein: the rotary shafts (605) are fixedly connected to the sealing plates (603), the rotary shafts (605) are rotationally connected with the wiring rods (602), and torsion springs (606) are fixedly connected between the rotary shafts (605) and the wiring rods (602).
10. The euv xenon lamp driving power supply according to claim 9, wherein: the wiring pole (602) is connected with a plurality of spacing poles (607) in a sliding way, a plurality of spacing poles (607) are respectively clamped with spacing holes (608) on each rotating shaft (605), and a third spring (609) is fixedly connected between the spacing poles (607) and the wiring pole (602).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410026293.4A CN117560883B (en) | 2024-01-09 | 2024-01-09 | Extreme ultraviolet xenon lamp driving power supply |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410026293.4A CN117560883B (en) | 2024-01-09 | 2024-01-09 | Extreme ultraviolet xenon lamp driving power supply |
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| CN117560883A true CN117560883A (en) | 2024-02-13 |
| CN117560883B CN117560883B (en) | 2024-03-19 |
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| CN202410026293.4A Active CN117560883B (en) | 2024-01-09 | 2024-01-09 | Extreme ultraviolet xenon lamp driving power supply |
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| CN117560883B (en) | 2024-03-19 |
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