CN117551280A - Fluorinated metal organic framework material for fluorine-containing electron special gas purification and preparation method thereof - Google Patents

Fluorinated metal organic framework material for fluorine-containing electron special gas purification and preparation method thereof Download PDF

Info

Publication number
CN117551280A
CN117551280A CN202410041342.1A CN202410041342A CN117551280A CN 117551280 A CN117551280 A CN 117551280A CN 202410041342 A CN202410041342 A CN 202410041342A CN 117551280 A CN117551280 A CN 117551280A
Authority
CN
China
Prior art keywords
organic framework
metal
framework material
bzc
fluorinated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202410041342.1A
Other languages
Chinese (zh)
Other versions
CN117551280B (en
Inventor
黄宏亮
郑铭泽
仲崇立
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tianjin Polytechnic University
Original Assignee
Tianjin Polytechnic University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tianjin Polytechnic University filed Critical Tianjin Polytechnic University
Priority to CN202410041342.1A priority Critical patent/CN117551280B/en
Publication of CN117551280A publication Critical patent/CN117551280A/en
Application granted granted Critical
Publication of CN117551280B publication Critical patent/CN117551280B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/22Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising organic material
    • B01J20/223Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising organic material containing metals, e.g. organo-metallic compounds, coordination complexes
    • B01J20/226Coordination polymers, e.g. metal-organic frameworks [MOF], zeolitic imidazolate frameworks [ZIF]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/28Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
    • B01J20/28002Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their physical properties
    • B01J20/28011Other properties, e.g. density, crush strength
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30Processes for preparing, regenerating, or reactivating
    • B01J20/34Regenerating or reactivating
    • B01J20/3425Regenerating or reactivating of sorbents or filter aids comprising organic materials
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G83/00Macromolecular compounds not provided for in groups C08G2/00 - C08G81/00
    • C08G83/008Supramolecular polymers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/151Reduction of greenhouse gas [GHG] emissions, e.g. CO2

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)

Abstract

The invention relates to the technical field of gas adsorption separation, in particular to a fluorinated metal organic framework material for purifying fluorine-containing electron-specific gas and a preparation method thereof, wherein the chemical molecular formula of the fluorinated metal organic framework material is Zn 4 (bzc‑CF 3 ) 3 Coordination polymers formed by the organic ligand 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid and the metal salt zinc nitrate hexahydrate; the Zn is 4 (bzc‑CF 3 ) 3 Is contained in the skeleton of (1)Tetrahedral form of metal clusters { Zn ] 44 -O) said metal cluster { Zn } 44 -O) } six sides of the tetrahedron are bridged by the ligand 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid, which extends spatially indefinitely by the above-described connection, forming a three-dimensional cage-like skeleton. The Zn is 4 (bzc‑CF 3 ) 3 Has high chemical stability and thermal stability to C 3 F 8 And C 3 F 6 The separation has infinite selectivity, and can be regenerated and repeatedly used after adsorption.

Description

Fluorinated metal organic framework material for fluorine-containing electron special gas purification and preparation method thereof
Technical Field
The invention relates to the technical field of gas adsorption separation, in particular to a fluorinated metal organic framework material for purifying fluorine-containing electron-specific gas and a preparation method thereof.
Background
The electronic special gas is widely used in the electronic industry fields such as integrated circuits, semiconductors, solar batteries, 5G communication and the like, and is a key base material required by the electronic industry production. Among them, the integrated circuit is considered as the "root" of the information society, and the high-purity fluorine-containing electron specialty gas is used as a cleaning gas and a plasma etching gas necessary for the very large scale integrated circuit industry, which is called as the "blood" of the integrated circuit industry, which can ensure the generation of the very large scale integrated circuit in the chip manufacturing process and ensure that the circuit can effectively function.
Octafluoropropane (C) 3 F 8 ) And hexafluoroethane (C) 2 F 6 ) Is a common fluorine-containing electronic special gas, and has the characteristics of stable chemical property, nonflammability and the like. Compared with the traditional industrial gas, the requirement of the integrated circuit field on the purity of the electronic special gas is higher, because the purity directly determines the performance, the integration level and the yield of the product. In fact, every order of magnitude of improvement in the electron-specific gas purity can promote the semiconductor device to generate a qualitative leap. However, industrially C 3 F 8 And C 2 F 6 Is usually prepared by pyrolysis of polytetrafluoroethylene or perfluoroolefins and fluorine addition, with the inevitable co-production of hexafluoropropylene (C 3 F 6 ) Impurities are present.
Realization of C 3 F 6 /C 3 F 8 Is to prepare high purity C 3 F 8 The key of electron special gas. In addition, the recovered C 3 F 6 Is also an important raw material for preparing the fluorine-containing polymer. Due to C 3 F 6 /C 3 F 8 Has very similar physical and chemical properties, small size difference and easy formation of azeotrope during low temperature rectificationThe prior industry mainly carries out separation by a thermally driven extractive distillation method. Because of the multiple phase changes, the method has the advantages of large equipment investment, high energy consumption and lower separation factor. Thus, developing efficient, low energy C 3 F 6 /C 3 F 8 The separation technology has important significance. The non-thermal driven adsorption separation method has good application prospect in gas separation due to simple equipment, less investment and low energy consumption under normal temperature operation, and is particularly suitable for deep removal of low-concentration impurities and very suitable for refining ultra-high-purity electronic special gas.
As a novel class of porous materials, metal Organic Framework (MOF) materials are crystalline porous materials with regular pore structures formed by coordination self-assembly of organic bridging ligands and metal ions or metal clusters. Compared with the traditional porous material, the MOF material has high crystallinity, large specific surface area and various types, and particularly, the pore structure and chemical composition of the MOF material are easy to finely regulate and control on the molecular scale.
Since the purity of the product is highly dependent on the separation efficiency, development of a suitable C is urgently required 3 F 6 /C 3 F 8 Advanced adsorbents for molecular sieve separation of mixtures to meet electronic semiconductor and integrated circuit manufacturing industry C 3 F 8 Special purity requirements for the electron-specific gas. However, consider C 3 F 6 And C 3 F 8 Is very similar in molecular size, the pore size of the MOF is adjusted on a sub-angstrom scale to achieve C 3 F 6 And C 3 F 8 Molecular sieve separation of (c) remains a challenge. In addition to C 3 F 8 Outside the special size, ideal C 3 F 6 /C 3 F 8 The separation adsorbent also deals with C 3 F 6 Adsorption has a high affinity and has a strong structure to achieve cyclic regeneration.
Disclosure of Invention
In view of the technical problems existing in the prior art, one of the purposes of the present invention is to provide a fluorinated metal-organic framework material which has high stability and is resistant to C 3 F 6 Has very high adsorption capacity and excellent C 3 F 8 Segregation selectivity and good reproducibility.
The invention aims at realizing the following technical scheme:
a fluorinated metal organic framework material, the chemical molecular formula of which is Zn 4 (bzc-CF 3 ) 3 Named Zn-bzc-CF 3 The fluorinated metal-organic framework material Zn-bzc-CF 3 Is a coordination polymer formed by an organic ligand 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid and metallic salt zinc nitrate hexahydrate; the fluorinated metal-organic framework material Zn-bzc-CF 3 The framework of the (C) is in a cage shape.
Based on the scheme, further, the fluorinated metal-organic framework material Zn-bzc-CF 3 Contains tetrahedrally-formed metal clusters { Zn } in the framework 44 -O) said metal cluster { Zn } 44 -O) } six sides of the tetrahedron are bridged by the organic ligand 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid, each 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid linking two { Zn } 44 -O) } clusters, which are spatially infinitely extended by the above-described connection means, form a three-dimensional cage-like skeleton.
Based on the scheme, further, from the angle of framework connection construction, zn-bzc-CF 3 The crystal material belongs to a three-dimensional metal-organic framework crystal material, the crystal structure of the crystal material belongs to a cubic crystal system, the space group is FM/3M, and the unit cell side length is a=b=c= 20.2100A.
On the basis of the scheme, further, the fluorinated metal-organic framework material has a small pore diameter and a large pore volume, and the size of the pore diameter is 5.13A multiplied by 4.84A.
A second object of the present invention is to provide a fluorinated metal-organic framework material Zn-bzc-CF 3 The preparation method of (2) comprises the following steps: organic monomer 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid and zinc nitrate hexahydrate are subjected to thermal reaction in N, N-diethyl formamide (DEF) solution to obtain a caged fluorinated metal-organic framework material, and then the caged fluorinated metal-organic framework material is obtained after the solution is washed by the DEF and methanol.
Based on the scheme, the reaction condition of the thermal reaction is that the reaction temperature is 140-160 ℃ and the reaction time is 36-60h.
Based on the above scheme, preferably, the molar ratio of the organic monomer 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid to zinc nitrate hexahydrate is 1:2.
a third object of the present invention is to provide a fluorinated metal-organic framework material at C 3 F 6 /C 3 F 8 Use in selective separations.
The beneficial technical effects of the invention are as follows:
1. the metal organic framework material Zn-bzc-CF 3 The preparation steps are simple, and expensive catalysts and organic solvents are not needed.
2. The metal organic framework material Zn-bzc-CF 3 Has high chemical stability and thermal stability, and excellent C 3 F 8 Separation performance.
3. The metal framework material is Zn-bzc-CF 3 For C 3 F 8 And C 3 F 6 The separation has infinite selectivity.
4. The metal framework material is Zn-bzc-CF 3 Can be regenerated well after adsorption and can be repeatedly used.
Drawings
FIG. 1 is a schematic diagram of the synthesis of a fluorinated metal-organic framework material;
FIG. 2 is a powder X-ray diffraction (PXRD) pattern of a fluorinated metal-organic framework material;
FIG. 3 is N of a fluorinated metal-organic framework material 2 Adsorption and desorption isotherms;
FIG. 4 is a Scanning Electron Microscope (SEM) image of a fluorinated metal-organic framework material;
FIG. 5 is a graph of thermogravimetric analysis of a fluorinated metal-organic framework material;
FIG. 6 is a temperature swing X-ray diffraction diagram of a fluorinated metal-organic framework material;
FIG. 7 is a graph of fluorinated metal-organic framework material vs. C at 273K 3 F 8 And C 3 F 6 Is a adsorption isotherm of (2);
FIG. 8 is a graph of fluorinated metal-organic framework material vs. C at 298K 3 F 8 And C 3 F 6 Is a adsorption isotherm of (2);
FIG. 9 is a graph of fluorinated metal-organic framework material versus C at 323K 3 F 8 And C 3 F 6 Is a adsorption isotherm of (2);
FIG. 10 is a fluorinated metal-organic framework material vs. C 3 F 8 And C 3 F 6 Is a breakthrough column separation graph;
FIG. 11 is a graph of fluorinated metal-organic framework material vs. C at 298K 3 F 6 Adsorption isotherm cycle diagram;
FIG. 12 is a fluorinated metal-organic framework material vs. C 3 F 8 /C 3 F 6 Is a breakthrough column separation cycle chart;
FIG. 13 is a XRD contrast plot of a fluorinated metal-organic framework material after 24h immersion in solutions of different pH;
FIG. 14 is a graph of C after soaking the fluorinated metal-organic framework material in solutions of different pH for 24 hours 3 F 6 Is a adsorption isotherm of (2);
FIG. 15 is a graph of fluorinated metal-organic framework material vs. C at 298K 3 F 8 XRD contrast pattern after adsorption isotherm cycle pattern;
FIG. 16 is a fluorinated metal-organic framework material vs. C 3 F 8 /C 3 F 6 XRD contrast pattern after breakthrough of column separation cycle pattern;
FIG. 17 is a fluorinated metal-organic framework material vs. C 3 F 8 /C 3 F 6 C after breaking through column separation cycle chart 3 F 6 Is a solid phase, and is a solid phase.
Detailed Description
The invention is described in further detail below with reference to the drawings and examples.
The test methods described in the following examples are all conventional methods unless otherwise specified; the reagents and materials, unless otherwise specified, are commercially available.
Example 1
Fluorinated metal organic framework materialMaterial Zn-bzc-CF 3 The preparation method of (2) comprises the following steps:
2mol of zinc nitrate hexahydrate and 1mol of 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid are dissolved in 30ml of DEF solvent, the solution is placed in a 75ml reactor bottle, the temperature of the solution in the reactor bottle is increased to 140 ℃ for 60 hours, the reaction is completed, the solution is cooled, the solid is centrifugally collected, washed by the DEF, then washed by methanol and dried at 60 ℃ to obtain the target product.
Example 2
Fluorinated metal-organic framework material Zn-bzc-CF 3 The preparation method of (2) comprises the following steps:
2mol of zinc nitrate hexahydrate and 1mol of 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid are dissolved in 30ml of DEF solvent, the solution is placed in a 75ml reactor bottle, the solution in the reactor bottle is heated to 160 ℃ for 36 hours, after the reaction is finished, the solution is cooled, the solid is centrifugally collected, washed by the DEF, then washed by methanol and dried at 60 ℃ to obtain the target product.
Example 3
Fluorinated metal-organic framework material Zn-bzc-CF 3 The preparation method of (2) comprises the following steps:
2mol of zinc nitrate hexahydrate and 1mol of 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid are dissolved in 30ml of DEF solvent, the solution is placed in a 75ml reactor bottle, the temperature of the solution in the reactor bottle is increased to 150 ℃ for 48 hours, the reaction is completed, the solution is cooled, the solid is centrifugally collected, washed by the DEF, then washed by methanol and dried at 60 ℃ to obtain the target product.
A schematic diagram of the synthesis of the fluorinated metal-organic framework materials described in examples 1-3 is shown in FIG. 1.
For the metal organic framework materials Zn-bzc-CF prepared in examples 1-3 3 Characterization is performed:
(1) Powder X-ray diffraction characterization
Taking a certain amount of the fluorinated metal-organic framework material Zn-bzc-CF synthesized in the examples 1-3 3 Performing powder X-ray diffraction test; the test results are shown in FIG. 2, in which the abscissa 2Theta is twice the incident angle of the x-rays and the ordinate is the intensity of the diffraction peak, it is possible toIt was found that the synthesized Zn-bzc-CF 3 XRD of (C) and simulated Zn-bzc-CF 3 Every peak of XRD of (B) corresponds to, explaining Zn-bzc-CF 3 Has been successfully synthesized.
(2) Nitrogen adsorption
A certain amount of dried sample is weighed and placed in a test tube for vacuum degassing, and nitrogen adsorption at 77K is tested after degassing is finished. FIG. 3 is a schematic view of Zn-bzc-CF 3 N at 77K 2 Adsorption and desorption patterns, wherein the abscissa is relative pressureP/P 0 P 0 Represents the saturated vapor pressure of the gas at the adsorption temperature,Pthe pressure of the gas phase at adsorption equilibrium is indicated. The material shows reversible typical type I N 2 Adsorption isotherms, adsorption and desorption branches are closed, and no hysteresis phenomenon exists, which indicates the inherent microporosity characteristic.
(3) Scanning Electron Microscope (SEM) images
FIG. 4 is a fluorinated metal-organic framework material Zn-bzc-CF 3 From the Scanning Electron Microscope (SEM) image of (C), zn-bzc-CF can be seen 3 Exhibits a regular cubic morphology and has high crystallinity.
(4) Thermogravimetric analysis
FIGS. 5 and 6 are thermogravimetric analysis and temperature-variable X-ray diffraction patterns of fluorinated metal-organic framework material from which Zn-bzc-CF can be seen 3 The collapse is not started until 470 ℃, and the heat stability is good.
Example 4
For fluoridized metal organic framework material Zn-bzc-CF 3 Go through C 3 F 8 /C 3 F 6 Adsorption separation test
Taking a certain amount of the metal organic framework material Zn-bzc-CF synthesized in the examples 1-3 3 Vacuum degassing in test tube, and testing C under 273K, 298K and 323K conditions 3 F 8 And C 3 F 6 And (5) adsorption.
FIGS. 7, 8 and 9 show Zn-bzc-CF 3 C under 273K, 298K and 323K conditions, respectively 3 F 8 And C 3 F 6 Adsorption etcTemperature line, C at 273K,100KPa 3 F 8 And C 3 F 6 The adsorption capacity of (C) is 1.6cm respectively 3 /g and 55cm 3 /g, C at 298K,100KPa 3 F 8 And C 3 F 6 The adsorption capacity of (C) is 1.5cm respectively 3 /g and 47cm 3 /g, C at 323K,100KPa 3 F 8 And C 3 F 6 The adsorption capacity of (C) is 1.5cm respectively 3 /g and 43cm 3 /g。
Breakthrough experiments were performed using a multicomponent adsorption breakthrough curve analyzer (BSD-MAB). About 0.8g of a sample of the fluorinated metal-organic framework material was placed in a cylindrical quartz tube (phi 6mm by 60 mm). The space at both ends of the tube is tightly filled with quartz wool. To separate C 3 F 6 /C 3 F 8 The gas mixture, the mixture system was flowed through the sample bed at 298K and the outlet concentration was analyzed by mass spectrometry. The samples were regenerated by flowing through a bed loaded with metal organic framework material at a constant flow rate for 2 hours at 140 ℃ before each test. FIG. 10 is a fluorinated metal-organic framework material vs. C 3 F 8 And C 3 F 6 Is a breakthrough column separation graph of (1), wherein the ordinate is the relative concentrationC/C 0 CIn order to obtain the outlet concentration,C 0 is the inlet concentration; as shown in FIG. 10, zn-bzc-CF 3 Has excellent separation capability. C (C) 3 F 8 Eluting at the beginning of the process, which is similar to C 3 F 8 Is expected to be consistent. In contrast, C 3 F 6 Continuously adsorbing in column for 27min to directly produce high purity C 3 F 8 (>99.9%)。
The recycling of the adsorbent is of great importance in practical industrial applications. Zn-bzc-CF with 5 cycles 3 Is tested. After the cyclic test, C as shown in FIG. 11 3 F 6 The adsorption capacity of the catalyst is basically unchanged, and the catalyst has good cyclic regeneration capacity. To demonstrate that in Zn-bzc-CF 3 Middle C 3 F 8 /C 3 F 6 Recyclability of separation, C 3 F 8 /C 3 F 6 The separation of the fixed bed adsorption was carried out 5 times in succession. After each test, zn-bzc-CF 3 Regeneration was carried out by vacuum desorption for 2 hours. As shown in FIG. 12, zn-bzc-CF 3 Adsorption layer pair C of adsorbent 3 F 6 Is almost the same, indicating that Zn-bzc-CF 3 Has good cycle performance and regeneration capability.
To prove Zn-bzc-CF 3 We will Zn-bzc-CF 3 Soaking in solution with different pH values for 24h, and then performing X-ray diffraction test, wherein figure 13 is XRD contrast diagram of fluorinated metal-organic framework material after soaking in solution with different pH values for 24h, and the abscissa is 2Theta twice the incident angle of X-rays, and the ordinate is the intensity of diffraction peak, as shown in figure 13, and the Zn-bzc-CF after soaking in solution with different pH values 3 Its XRD is identical to the original XRD and C 3 F 6 The adsorption amount of Zn-bzc-CF was not changed 3 Has high stability, and in addition, is tested with Zn-bzc-CF 3 XRD and C after 5 static adsorption cycles and after 5 fixed bed adsorbtion 3 F 6 See fig. 14, 15, 16 and 17, wherein fig. 15 is the adsorption isotherm of fluorinated metal-organic framework material at 298K for C 3 F 8 XRD contrast pattern after adsorption isotherm cycle pattern; FIG. 16 is a fluorinated metal-organic framework material vs. C 3 F 8 /C 3 F 6 XRD contrast pattern after breakthrough of column separation cycle pattern; in XRD patterns, the abscissa 2Theta is twice the incident angle of x-rays, and the ordinate is the intensity of diffraction peaks, and as shown in FIGS. 14, 15, 16 and 17, the experimental samples are consistent with the initial samples, demonstrating Zn-bzc-CF 3 Has high stability.
Separation mechanism study
To further understand the metal organic framework material Zn-bzc-CF 3 Molecular screening mechanism on channel, density Functional Theory (DFT) calculation of first principle is adopted for C 3 F 6 /C 3 F 8 The separation process performs an interaction energy scan. In Zn-bzc-CF 3 On, with C 3 F 6 And C 3 F 8 Diffusion processThe associated Minimum Energy Path (MEP) is a function of distance from cage to cage through. The diffusion path length is about 7.5A, the interaction potential of the gas molecules relative to the pore pocket relative position, and the calculated MEP spectrum shows that for fluorinated Zn-bzc-CF 3 ,C 3 F 6 The diffusion energy barrier through the pore diameter increases from 17.1kJ/mol to 63.3kJ/mol, whereas C 3 F 8 The kinetic energy barrier of (C) is significantly increased from 28.6kJ/mol to 250kJ/mol. This indicates that C due to pore size narrowing 3 F 8 The transport of molecules is kinetically inhibited, indicating that the ideal molecular screening effect is to mimic C by the size of the fluorination window of a cage MOF with trifluoromethyl groups 3 F 6 /C 3 F 8 Is separated from the other components.

Claims (8)

1. A fluorinated metal-organic framework material is characterized in that the chemical molecular formula of the fluorinated metal-organic framework material is Zn 4 (bzc-CF 3 ) 3 Named Zn-bzc-CF 3
The fluorinated metal-organic framework material Zn-bzc-CF 3 Is a porous coordination polymer formed by an organic ligand 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid and metallic salt zinc nitrate hexahydrate;
the Zn is 4 (bzc-CF 3 ) 3 The framework of the (C) is in a cage shape.
2. The metal-organic framework fluoride material according to claim 1, characterized in that the metal-organic framework fluoride material Zn 4 (bzc-CF 3 ) 3 Contains tetrahedrally-formed metal clusters { Zn } in the framework 44 -O) said metal cluster { Zn } 44 -O) } six sides of the tetrahedron are bridged by the organic ligand 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid, each 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid linking two { Zn } 44 -O) } clusters, which are spatially infinitely extended by the above-described connection means, form a three-dimensional cage-like skeleton.
3. The metal-organic framework material of claim 1 wherein Zn-bzc-CF is from a framework connection construction perspective 3 The crystal material belongs to a three-dimensional metal-organic framework crystal material, the crystal structure of the crystal material belongs to a cubic crystal system, the space group is FM/3M, and the unit cell side length is a=b=c= 20.2100A.
4. The metal-organic framework material of claim 1, wherein the metal-organic framework material has a small pore size and a large pore volume, the small pore size being 5.13 a x 4.84 a.
5. A method of preparing a fluorinated metal-organic framework material according to any one of claims 1 to 4, comprising the steps of: organic ligand 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid and zinc nitrate hexahydrate are subjected to thermal reaction in N, N-diethyl formamide (DEF) solution to obtain a caged fluorinated metal-organic framework material, and then the caged fluorinated metal-organic framework is obtained after washing with DEF and methanol.
6. The method for preparing a fluorinated metal-organic framework material according to claim 5, wherein the reaction condition of the thermal reaction is that the reaction temperature is 140-160 ℃ and the reaction time is 36-60h.
7. The method for preparing a fluorinated metal-organic framework material according to claim 5, wherein the molar ratio of the organic ligand 5- (trifluoromethyl) -1H-pyrazole-4-carboxylic acid to zinc nitrate hexahydrate is 1:2.
8. a fluorinated metal-organic framework material as in any one of claims 1-4 at C 3 F 6 /C 3 F 8 Use in selective separations.
CN202410041342.1A 2024-01-11 2024-01-11 Fluorinated metal organic framework material for fluorine-containing electron special gas purification and preparation method thereof Active CN117551280B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202410041342.1A CN117551280B (en) 2024-01-11 2024-01-11 Fluorinated metal organic framework material for fluorine-containing electron special gas purification and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202410041342.1A CN117551280B (en) 2024-01-11 2024-01-11 Fluorinated metal organic framework material for fluorine-containing electron special gas purification and preparation method thereof

Publications (2)

Publication Number Publication Date
CN117551280A true CN117551280A (en) 2024-02-13
CN117551280B CN117551280B (en) 2024-03-15

Family

ID=89813318

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202410041342.1A Active CN117551280B (en) 2024-01-11 2024-01-11 Fluorinated metal organic framework material for fluorine-containing electron special gas purification and preparation method thereof

Country Status (1)

Country Link
CN (1) CN117551280B (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104258814A (en) * 2014-09-09 2015-01-07 西北大学 Metal organic framework material with CO2 preferential adsorption separation function and preparation method of metal organic framework material
CN105026854A (en) * 2012-08-15 2015-11-04 阿科玛股份有限公司 Adsorption systems using metal-organic frameworks
WO2019231297A1 (en) * 2018-05-31 2019-12-05 한국화학연구원 Novel metal-organic framework having porous structure formed from zirconium cluster secondary building unit and multi-binding linker

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105026854A (en) * 2012-08-15 2015-11-04 阿科玛股份有限公司 Adsorption systems using metal-organic frameworks
CN104258814A (en) * 2014-09-09 2015-01-07 西北大学 Metal organic framework material with CO2 preferential adsorption separation function and preparation method of metal organic framework material
WO2019231297A1 (en) * 2018-05-31 2019-12-05 한국화학연구원 Novel metal-organic framework having porous structure formed from zirconium cluster secondary building unit and multi-binding linker

Also Published As

Publication number Publication date
CN117551280B (en) 2024-03-15

Similar Documents

Publication Publication Date Title
CN111072987B (en) Two fluorinated metal organic framework materials, preparation and low-carbon hydrocarbon separation application thereof
CN113019330B (en) Preparation of copper-based metal-organic framework material and acetylene/carbon dioxide separation application thereof
CN110270314B (en) Effectively separate CO in flue gas2Preparation method of naphthalimide Zn-MOF
CN111116296B (en) Method for separating benzene and cyclohexane
CN115028850B (en) Metal organic framework material for adsorbing and separating acetylene/ethylene mixed gas and preparation method thereof
CN112844321A (en) Synthesis preparation of series column support type metal organic framework materials and separation application of low-carbon hydrocarbons of series column support type metal organic framework materials
Li et al. Cryogenic gas chromatographic separation of hydrogen isotopes using pillared-layer MOFs composites as stationary phase
CN113583244A (en) Metal organic framework material and preparation method and application thereof
CN117551280B (en) Fluorinated metal organic framework material for fluorine-containing electron special gas purification and preparation method thereof
CN111777769B (en) Metal organic framework material for efficiently separating mixed gas and preparation method and application thereof
CN113171764A (en) IL/MOF/COF composite material, and preparation method and application thereof
CN113214493A (en) Preparation of cobalt-based metal organic framework material and low-carbon hydrocarbon separation application thereof
CN114452938B (en) Alkane preferential adsorption microporous material and preparation method and application thereof
CN115282941A (en) Metal organic framework material and preparation method and application thereof
CN112679781B (en) Method for realizing efficient gas separation of COFs (carbon-on-glass) thin film through post-synthesis modification
CN114874448A (en) Preparation method and application of metal organic framework material with hierarchical holes
Li et al. Trace SO 2 capture within the engineered pore space using a highly stable SnF 6 2−-pillared MOF
CN117205705B (en) The aluminum-based metal-organic framework material is shown in C 3 F 8 /N 2 Application in separation
Xian et al. Simultaneous removal of C 2 H 2 and C 2 H 6 for C 2 H 4 purification by robust MOFs featuring a high density of heteroatoms
CN114085386B (en) Large-scale synthesis method of low-cost Cu (BDC) and application of large-scale synthesis method in ethane-ethylene separation
CN115947949B (en) Porous metal organic framework material and synthesis method thereof, adsorbent and method for purifying ethylene
CN111514843A (en) CaF with high specific surface area and high thermal stability2Nano material and preparation method and application thereof
CN113908808A (en) An MOF separation material in N2/O2Use in separations
CN118063789B (en) Porous double condensed ring ligand coordination polymer material, preparation method thereof and application of porous double condensed ring ligand coordination polymer material in separation of toluene/methylcyclohexane
CN117362660B (en) Metal organic framework material Zr-MOF, and preparation method and application thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant