CN117550558B - Ozone generator applied to semiconductor production - Google Patents
Ozone generator applied to semiconductor production Download PDFInfo
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- CN117550558B CN117550558B CN202410009504.3A CN202410009504A CN117550558B CN 117550558 B CN117550558 B CN 117550558B CN 202410009504 A CN202410009504 A CN 202410009504A CN 117550558 B CN117550558 B CN 117550558B
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- disturbing
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- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 56
- 239000004065 semiconductor Substances 0.000 title claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 239000000428 dust Substances 0.000 claims abstract description 128
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 32
- 238000001914 filtration Methods 0.000 claims abstract description 29
- 238000007789 sealing Methods 0.000 claims description 36
- 238000007790 scraping Methods 0.000 claims description 27
- 239000000498 cooling water Substances 0.000 claims description 9
- 238000007599 discharging Methods 0.000 claims description 5
- 239000012535 impurity Substances 0.000 abstract description 9
- 238000002360 preparation method Methods 0.000 abstract description 9
- 239000007789 gas Substances 0.000 description 71
- 238000000034 method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000003651 drinking water Substances 0.000 description 1
- 235000020188 drinking water Nutrition 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/66—Regeneration of the filtering material or filter elements inside the filter
- B01D46/68—Regeneration of the filtering material or filter elements inside the filter by means acting on the cake side involving movement with regard to the filter elements
- B01D46/681—Regeneration of the filtering material or filter elements inside the filter by means acting on the cake side involving movement with regard to the filter elements by scrapers, brushes or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/90—Odorous compounds not provided for in groups B01D2257/00 - B01D2257/708
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/60—Feed streams for electrical dischargers
- C01B2201/66—Pretreatment of the feed
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Inorganic Chemistry (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Treating Waste Gases (AREA)
Abstract
The invention discloses an ozone generator applied to semiconductor production, which comprises a machine body, wherein one side of the machine body is provided with a gas filtering component, the gas filtering component comprises an air inlet filter pipe, the top of one side of the air inlet filter pipe is provided with an air inlet, the inner side of the air inlet filter pipe is provided with a dust removing inner cylinder, the dust removing inner cylinder is provided with a dust removing active carbon filter core, the other side of the air inlet filter pipe is provided with an air inlet disturbing pipe, and the air inlet disturbing pipe penetrates through the air inlet filter pipe and is arranged on the dust removing inner cylinder; through the structure that this has gas filtration subassembly that sets up, when using the device to prepare ozone, can pass through filter assembly with gas to filter impurity and peculiar smell in the gas, avoid containing impurity entering equipment inside in the gas, improve the preparation purity of ozone, and the dust after the cleanness is convenient to collect and discharge, increased the life of this structure, reduced manufacturing cost, improved the practicality and the convenience of the device.
Description
Technical Field
The invention belongs to the technical field of ozone generators, and particularly relates to an ozone generator applied to semiconductor production.
Background
The ozone generator is a device for preparing ozone gas, ozone is easy to decompose and can not be stored, and the ozone generator is required to be used in a site preparation site, so that the ozone generator is required to be used in any site where ozone can be used, and the ozone generator is widely applied to the fields of drinking water, sewage, industrial oxidation, food processing, fresh keeping, medical synthesis, space sterilization and the like, and the ozone gas generated by the ozone generator can be directly utilized and can also be mixed with liquid to participate in reaction through a mixing device. According to the high-voltage frequency of the generator, the ozone generator mainly comprises three types of power frequency 50-60Hz, intermediate frequency 400-1000Hz and high frequency more than 1000Hz, and the medium-high frequency generator has the advantages of small volume, low power consumption and large ozone output, and is the most commonly used product at present.
The patent with the application number of 202110485361.X discloses a high-purity, high-concentration and miniaturized ozone generator applied to semiconductors, which organically combines a dielectric material which is modified to prevent discharge, an integrated high-voltage discharge assembly and a finishing structure which ensures 0.025-0.1 mm between a low-voltage ground electrode and a dielectric, and solves the technical problem of low ozone production concentration in the field for a long time; in combination with the ozone generator used in the above application, when in use, gas is usually directly introduced into the device, so that the reaction gas contacts with the electrode to prepare ozone, if the gas contains certain impurities and the like, the purity and stability of the device are affected, and meanwhile, downstream products are easily affected, so that the practicability of the device is reduced.
Disclosure of Invention
The invention aims to provide an ozone generator applied to semiconductor production, which aims to solve the problems that when the ozone generator in the application is used, gas is usually directly introduced into equipment, so that reaction gas contacts with an electrode to prepare ozone, and if the gas contains certain impurities and the like, the purity and stability of the equipment are affected, and downstream products are easily affected, so that the practicability of the device is reduced.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides an ozone generator for semiconductor production usefulness, includes the organism, gas filtration subassembly is installed to one side of organism, gas filtration subassembly includes the air inlet filter tube, one side top of air inlet filter tube is provided with the air intake, the dust removal inner tube is installed to the inboard of air inlet filter tube, install dust removal active carbon filter core on the dust removal inner tube, the air inlet disturbing pipe is installed to the opposite side of air inlet filter tube, the air inlet disturbing pipe runs through the air inlet filter tube setting on the dust removal inner tube, gas filtration subassembly is used for filtering the inside gas through the air inlet filter tube.
Preferably, the top of dust removal inner tube is provided with the sealing rod, the bottom of dust removal inner tube is provided with sealed base, the top of dust removal active carbon filter core is spacing fixed through the sealing rod, the bottom of dust removal active carbon filter core is fixed with the dust removal inner tube through sealed base.
Preferably, the sealing base is provided with a threaded fixing hole, the top of the sealing base is provided with a sealing strip, and the dust removal active carbon filter element is sealed with the sealing base through the sealing strip.
Preferably, the top of air inlet filter tube is installed and is removed dust motor, the inboard of air inlet filter tube is located the bottom of dust motor and is provided with the dust removal and scrape the axle, the epaxial symmetry of scraping of dust removal is installed and is removed dust scraper blade, the epaxial strip of scraping of removing dust to being provided with of dust removal scraper blade.
Preferably, the dust removing scraping plate and the dust removing scraping strip are driven to rotate through a dust removing motor, and the dust removing scraping strip contacts and fits the inner surface of the dust removing active carbon filter element.
Preferably, the bottom of the air inlet filter pipe is provided with an ash collecting groove, and a manual ash discharging valve is arranged at the bottom of the ash collecting groove.
Preferably, the disturbing motor is installed at the top of the air inlet disturbing pipe, the driving shaft is installed at the bottom of the disturbing motor and located at the inner side of the air inlet disturbing pipe, the driving gear is installed at the bottom of the driving shaft, the sealing bearing is arranged on the inner wall of the air inlet disturbing pipe, the air disturbing pipe is installed at the inner side of the sealing bearing, and the air disturbing grid plate is arranged at the inner side of the air disturbing pipe.
Preferably, one end of the gas disturbing pipe is provided with a driven gear, the driven gear is assembled with the driving gear in a meshed mode, the gas disturbing pipe is driven to rotate through the disturbing motor, and meanwhile the gas disturbing pipe and the air inlet disturbing pipe are sealed to rotate through a sealing bearing.
Preferably, the top of the front surface of the machine body is also provided with a main control panel, the other side of the machine body is provided with a cooling water outlet pipe, a cooling water inlet pipe and an ozone outlet pipe in sequence, the air inlet filter pipe is connected and installed on the inner side of the machine body through an air inlet turbulent flow pipe, and the end part of the other side of the machine body is symmetrically provided with a cooling fan.
Compared with the prior art, the invention has the beneficial effects that:
through the structure with the gas filtering component, when the device is used for preparing ozone, the gas can pass through the filtering component, so that impurities and peculiar smell in the gas are filtered, the impurities in the gas are prevented from entering the equipment, the preparation purity of the ozone is improved, and meanwhile, downstream products are prevented from being influenced;
The synchronous ash removing structure is arranged in the filter assembly, when the device is used for filtering gas, dust contained in the gas is accumulated, if the dust is accumulated more, the gas filtering efficiency is affected, the inner surface of the dust removing filter element can be scraped while the dust removing filter element is used for filtering, the dust is prevented from being adsorbed on the surface of the dust removing filter element, and the cleaned dust is convenient to collect and discharge, so that the service life of the structure is prolonged, the production cost is reduced, and the practicability and convenience of the device are improved;
Meanwhile, when the gas passes through the air inlet filter pipe and then enters the air inlet turbulence pipe, the gas enters the air inlet turbulence pipe and then enters the equipment to be contacted with the electrode, and when the gas passes through the air inlet turbulence pipe, the turbulence of the gas can be promoted, so that more vortex and rotational flow are generated in the flowing process of the gas, the turbulence can increase the collision opportunity between gas molecules, and additional turbulence is introduced, and the flowing path of the gas is more tortuous by changing the direction and the speed of the gas entering the ozone generator, so that the mixing time of the gas in the flowing process is increased, the gas is in a more uniform state before entering the ozone generator, and the yield and the purity of ozone are improved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic diagram of the internal structure of the air intake filter of the present invention;
FIG. 3 is a schematic view of the internal structure of the intake manifold of the present invention;
FIG. 4 is a schematic diagram of a separation structure of a dust removing scraper and a dust removing filter of the invention;
FIG. 5 is a schematic view of the structure of FIG. 2A according to the present invention;
In the figure: 100. a body; 101. a main control panel; 102. a heat radiation fan; 103. a cooling water outlet pipe; 104. a cooling water inlet pipe; 105. an ozone outlet pipe; 200. an air inlet filter pipe; 201. a dust removal motor; 202. a dust removal scraping shaft; 203. a dust removal scraper; 204. a dust removal active carbon filter element; 205. a dust removal inner cylinder; 206. a sealing rod; 207. sealing the base; 208. dedusting scraping strips; 209. a sealing strip; 210. a threaded fixing hole; 211. an air inlet; 300. an intake air flow disturbing pipe; 301. a gas disturbance tube; 302. a gas disturbance grid plate; 303. sealing the bearing; 304. a driven gear; 305. a disturbance motor; 306. a drive shaft; 307. a drive gear; 400. an ash collecting groove; 401. a manual ash discharge valve.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
Referring to fig. 1,2 and 3, the present invention provides a technical solution: the semiconductor is widely applied in the fields of integrated circuits, consumer electronics, communication systems, photovoltaic power generation, illumination, high-power conversion and the like, an ozone generator can be used for providing high-concentration ozone in the semiconductor processing process, the high-concentration ozone can be used for cleaning a semiconductor wafer and the surface and removing organic residues, metals, particles and other pollutants on the surface, the quality of semiconductor processing is ensured, the ozone generator applied to semiconductor production comprises a machine body 100, one side of the machine body 100 is provided with a gas filtering component, the gas filtering component comprises an air inlet filter tube 200, one side top of the air inlet filter tube 200 is provided with an integrally formed air inlet 211, the inner side of the air inlet filter tube 200 is provided with an integral dust removing inner tube 205, the dust removing inner tube 205 is provided with a dust removing active carbon filter element 204, the other side of the air inlet filter tube 200 is communicated with an air inlet flow disturbing tube 300, the air inlet disturbing pipe 300 is arranged on the dust removing inner cylinder 205 in a penetrating way through the air inlet disturbing pipe 200, when the air passes through the air inlet disturbing pipe 300 after passing through the air inlet disturbing pipe 200, the air filtering component is used for filtering the air passing through the air inlet disturbing pipe 200, impurities contained in the air are reduced, when the ozone generator used in the application is used for preparing ozone for processing semiconductors, the air enters from the air inlet 211, the finished product is discharged from the ozone outlet pipe 105 after being contacted with an electrode, and cooling water enters from the cooling water inlet pipe 104 and then is discharged from the cooling water outlet pipe 103 in the preparation process, when the air enters into the air inlet filter pipe 200 from the air inlet 211 in the preparation process, the dust removing active carbon filter element 204 is arranged on the dust removing inner cylinder 205 at the inner side of the air inlet filter pipe 200, the top of the dust removing active carbon filter element 204 is limited and fixed through the sealing rod 206, the bottom of the dust removal active carbon filter element 204 is sealed and fixed with the sealing base 207 through the sealing strip 209, so that the sealing effect is ensured, after gas enters the air inlet filter tube 200, the gas enters the air inlet disturbing tube 300 through the filtration of the dust removal active carbon filter element 204, impurities and peculiar smell in the gas can be removed through the filtration, the purity of the dust and the like is prevented from being influenced when ozone is prepared, and meanwhile, downstream products of ozone preparation are prevented from being influenced.
Specifically, the top welded fastening sealing rod 206 of dust removal inner tube 205 for fix a position the dust removal active carbon filter core 204 of installation, guarantee the stability of dust removal active carbon filter core 204, avoid the during operation to influence its stability, the bottom of dust removal inner tube 205 is provided with integrated into one piece's seal base 207, the top of dust removal active carbon filter core 204 is spacing fixed through sealing rod 206, the bottom of dust removal active carbon filter core 204 is fixed through seal base 207 and dust removal inner tube 205, and set up screw thread fixed orifices 210 on the seal base 207, conveniently pack into the bolt through screw thread fixed orifices 210, and seal base 207's top is provided with sealing strip 209, still seal through sealing strip 209 between dust removal active carbon filter core 204 and the seal base 207, guarantee gaseous sealed effect, prevent that gas from revealing from dust removal active carbon filter core 204's gap department, avoid entering the gas in the air inlet disturbing pipe 300 to contain more impurity.
Example 2
On the basis of embodiment 1, please refer to fig. 1, fig. 2, fig. 4 and fig. 5, the present invention provides a technical solution: the utility model provides an be applied to ozone generator that semiconductor production was used, dust motor 201 is fixed on the top of air inlet filter tube 200, the inboard of air inlet filter tube 200 is located the bottom of dust motor 201 and is provided with dust removal scraping shaft 202, dust removal scraping shaft 202 passes through dust removal motor 201 and drives the work, dust removal scraping shaft 202 is last to be fixed with dust removal scraper blade 203 symmetrically, dust removal scraper blade 203 is last to be provided with dust removal scraping strip 208 symmetrically, dust removal scraper blade 203 passes through dust removal motor 201 drive rotation with dust removal scraping strip 208, and dust removal scraping strip 208 contact laminating dust removal active carbon filter core 204's internal surface, can scrape dust removal active carbon filter core 204 internal surface when dust removal scraper blade 203 rotates, and still can play certain stand wear and tear through dust removal scraping strip 208 contact, thereby better deashing, the bottom of air inlet filter tube 200 is provided with album ash groove 400 simultaneously, the bottom of the dust collecting tank 400 is provided with a manual dust discharging valve 401, dust falls into the dust collecting tank 400 and then is discharged through the manual dust discharging valve 401, when the dust removing active carbon filter element 204 is filtered, the inner surface of the dust collecting tank generates certain dust, if the dust on the surface of the dust removing active carbon filter element 204 is more, the passing efficiency of gas is reduced, the preparation effect is affected, at the moment, the dust removing motor 201 works to drive the dust removing scraping shaft 202 to rotate, the dust removing scraping plate 203 arranged on the dust removing scraping shaft 202 synchronously rotates, the dust removing scraping strip 208 arranged at the edge of the dust removing scraping plate 203 is attached to the inner wall of the dust removing active carbon filter element 204 when rotating, so that the dust attached to the inner wall of the dust removing active carbon filter element 204 is scraped, the scraped dust falls into the dust collecting tank 400 at the bottom of the air inlet filter tube 200, when the manual dust discharging valve 401 is opened after the use is finished, the dust is collected and treated in a concentrated manner, the service life of the structure is prolonged, and the convenience in use is improved.
Example 3
On the basis of embodiment 2, please refer to fig. 1, 3 and 4, the present invention provides a technical solution: an ozone generator for semiconductor production, a disturbance motor 305 is fixedly arranged at the top of an air inlet disturbance pipe 300, a driving shaft 306 is arranged at the bottom of the disturbance motor 305 and positioned at the inner side of the air inlet disturbance pipe 300, a driving gear 307 is arranged at the bottom of the driving shaft 306, when the disturbance motor 305 works, the driving gear 307 is driven to rotate by the driving shaft 306, a sealing bearing 303 is arranged on the inner wall of the air inlet disturbance pipe 300, a gas disturbance pipe 301 is arranged at the inner side of the sealing bearing 303, a gas disturbance grid plate 302 is arranged at the inner side of the gas disturbance pipe 301, meanwhile, the gas disturbance pipe 301 and the air inlet disturbance pipe 300 are sealed and rotated by the sealing bearing 303, the tightness of the structure is ensured, the gas is better ensured to pass through the gas disturbance grid plate 302, one end of the gas disturbance pipe 301 is provided with an integrated driven gear 304, the driven gear 304 is meshed and assembled with the driving gear 307, when the driving gear 307 rotates, the gas disturbing pipe 301 is driven to rotate by the driven gear 304 which is meshed with the driving gear 307, when filtered gas enters the gas disturbing pipe 300, the disturbing motor 305 works to drive the driving shaft 306 to rotate, one end of the driving shaft 306 is meshed with the driven gear 304 at the end part of the gas disturbing pipe 301 by the driving gear 307, when the driving gear 307 rotates, the gas disturbing pipe 301 is driven to rotate by the meshing, the gas disturbing pipe 301 is sealed and rotated by the sealing bearing 303, and when the gas passes through the gas disturbing grid plate 302 in the gas disturbing pipe 301, the turbulence of the gas is promoted by the gas disturbing grid plate 302, so that more vortex and whirl are generated in the gas flowing process, the collision opportunity among gas molecules is increased, and the rotation can introduce additional disturbance, so that the flowing path of the gas is more tortuous, the mixing time of the gas in the flowing process is increased, the gas is more uniformly contacted with the electrode in the machine body 100 before entering the ozone generator, so that the yield and purity of the ozone are improved, adverse effects caused by insufficiently mixed gas are avoided, and the practicability of the device is improved.
Example 4
On the basis of embodiment 3, through setting up the air inlet filter tube 200 that has dust removal active carbon filter core 204, can filter the gas that gets into, the dust that remains in dust removal active carbon filter core 204 internal surface after the filtration simultaneously can be scraped by the dust removal scraper 203 of installation, and dust removal active carbon filter core 204 is removable to be changed, the dust that scrapes simultaneously falls in album ash groove 400 and conveniently retrieve the processing, and when the gas filters the back and gets into air inlet disturbance flow tube 300, still accessible pivoted gas disturbance flow tube 301 makes gas produce more vortex and whirl in the flow process, make the flow path of gas more tortuous, thereby increase the mixing time of gas in the flow process, make gas reach more even state before entering ozone generator, improve the preparation efficiency and the purity of ozone, better preparation use.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides an be applied to ozone generator that semiconductor production used, includes organism (100), gas filtration subassembly, its characterized in that are installed to one side of organism (100): the gas filtering assembly comprises a gas inlet filtering pipe (200), a gas inlet (211) is formed in the top of one side of the gas inlet filtering pipe (200), a dust removal inner barrel (205) is arranged on the inner side of the gas inlet filtering pipe (200), a dust removal active carbon filter element (204) is arranged on the dust removal inner barrel (205), a gas inlet flow disturbing pipe (300) is arranged on the other side of the gas inlet filtering pipe (200), the gas inlet flow disturbing pipe (300) penetrates through the gas inlet filtering pipe (200) and is arranged on the dust removal inner barrel (205), and the gas filtering assembly is used for filtering gas passing through the inside of the gas inlet filtering pipe (200);
the top of the air inlet filter pipe (200) is provided with a dust removal motor (201), the inner side of the air inlet filter pipe (200) is positioned at the bottom of the dust removal motor (201) and is provided with a dust removal scraping shaft (202), the dust removal scraping shaft (202) is symmetrically provided with dust removal scraping plates (203), and the dust removal scraping plates (203) are provided with dust removal scraping strips (208);
The air inlet disturbing pipe is characterized in that a disturbing motor (305) is arranged at the top of the air inlet disturbing pipe (300), a driving shaft (306) is arranged at the bottom of the disturbing motor (305) and located at the inner side of the air inlet disturbing pipe (300), a driving gear (307) is arranged at the bottom of the driving shaft (306), a sealing bearing (303) is arranged on the inner wall of the air inlet disturbing pipe (300), a gas disturbing pipe (301) is arranged at the inner side of the sealing bearing (303), and a gas disturbing grid plate (302) is arranged at the inner side of the gas disturbing pipe (301).
2. An ozone generator for use in semiconductor manufacturing as claimed in claim 1, wherein: the top of dust removal inner tube (205) is provided with sealing rod (206), the bottom of dust removal inner tube (205) is provided with seal base (207), the top of dust removal active carbon filter core (204) is spacing fixed through sealing rod (206), the bottom of dust removal active carbon filter core (204) is fixed with dust removal inner tube (205) through seal base (207).
3. An ozone generator for use in semiconductor manufacturing according to claim 2, wherein: threaded fixing holes (210) are formed in the sealing base (207), sealing strips (209) are arranged at the top of the sealing base (207), and the dust removal active carbon filter element (204) is sealed with the sealing base (207) through the sealing strips (209).
4. An ozone generator for use in semiconductor manufacturing as claimed in claim 1, wherein: the dust removal scraping plate (203) and the dust removal scraping strip (208) are driven to rotate through the dust removal motor (201), and the dust removal scraping strip (208) is contacted and attached to the inner surface of the dust removal active carbon filter element (204).
5. An ozone generator for use in semiconductor manufacturing as claimed in claim 1, wherein: the bottom of the air inlet filter pipe (200) is provided with an ash collecting groove (400), and a manual ash discharging valve (401) is arranged at the bottom of the ash collecting groove (400).
6. An ozone generator for use in semiconductor manufacturing as claimed in claim 1, wherein: one end of the gas disturbing pipe (301) is provided with a driven gear (304), the driven gear (304) is meshed with the driving gear (307), the gas disturbing pipe (301) is driven to rotate by the disturbing motor (305), and meanwhile, the gas disturbing pipe (301) and the air inlet disturbing pipe (300) are sealed to rotate by a sealing bearing (303).
7. An ozone generator for use in semiconductor manufacturing as claimed in claim 1, wherein: the front surface top of organism (100) still installs main control panel (101), cooling water outlet pipe (103), cooling water inlet pipe (104) and ozone outlet pipe (105) are installed in proper order to the opposite side of organism (100), inlet air filter pipe (200) are installed through inlet air disturbing pipe (300) connection the inboard of organism (100), radiator fan (102) are installed to the opposite side tip symmetry of organism (100).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410009504.3A CN117550558B (en) | 2024-01-04 | 2024-01-04 | Ozone generator applied to semiconductor production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410009504.3A CN117550558B (en) | 2024-01-04 | 2024-01-04 | Ozone generator applied to semiconductor production |
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| Publication Number | Publication Date |
|---|---|
| CN117550558A CN117550558A (en) | 2024-02-13 |
| CN117550558B true CN117550558B (en) | 2024-04-26 |
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| CN202410009504.3A Active CN117550558B (en) | 2024-01-04 | 2024-01-04 | Ozone generator applied to semiconductor production |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112044185A (en) * | 2020-08-25 | 2020-12-08 | 界首市鸿鑫塑业有限公司 | Plastic processing waste gas pump drainage processing apparatus |
| CN114452780A (en) * | 2022-02-11 | 2022-05-10 | 河北化工医药职业技术学院 | Industry volatile organic compounds VOCs treatment facility |
| CN217567956U (en) * | 2022-04-14 | 2022-10-14 | 泰州华一环保科技有限公司 | Dust filtering device of drum type dust remover |
-
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112044185A (en) * | 2020-08-25 | 2020-12-08 | 界首市鸿鑫塑业有限公司 | Plastic processing waste gas pump drainage processing apparatus |
| CN114452780A (en) * | 2022-02-11 | 2022-05-10 | 河北化工医药职业技术学院 | Industry volatile organic compounds VOCs treatment facility |
| CN217567956U (en) * | 2022-04-14 | 2022-10-14 | 泰州华一环保科技有限公司 | Dust filtering device of drum type dust remover |
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| CN117550558A (en) | 2024-02-13 |
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