CN117492193A - Flattened nanostructure inverted grating glass slide based on continuum bound state - Google Patents
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Abstract
The invention provides a planar nanostructure inverted grating glass slide based on a continuum binding state, which comprises the following components: inverted nanostructured uniform gratings and nanostructured uniform substrates. When the nanostructure glass slide is used for tissue slice detection, a tissue slice is paved on the upper plane of the grating structure relative to the grating layer, so that visible light is incident from the lower part, diffraction is generated in the inverted grating structure, and diffraction waves act on the grating vectors in a vector-doubling way, so that wave vector matching is achieved between the diffraction waves and the waveguide under specific wavelength, guided mode resonance phenomenon is excited, and then an evanescent wave field is formed on the upper surface of the structure. And the interaction between the enhancement light and the tissue slice is further enhanced by breaking the symmetry protection of the grating, so that the real-time nondestructive imaging of the high-saturation tissue slice with ultra-narrow line width is realized, and the real-time imaging of the tissue slice is performed by using the inverted grating with the flat upper surface, so that the detection nonuniformity caused by the patterning surface with larger waviness can be avoided.
Description
Technical Field
The invention relates to the field of guided mode resonance nanostructure and tissue slice imaging, in particular to a flattened nanostructure inverted grating glass slide based on a continuum binding state.
Background
In recent years, applications of the nano-structure super-surface cover a plurality of fields such as integrated optics, biological optics, information optics, topological optics and nonlinear optics, and research on application of the nano-structure super-surface to various fields such as disease detection, environmental protection and food sanitation is more and more, and the nano-structure super-surface has important scientific significance and practical value especially in the field of biological sensing. For example, the current researchers rely on silver metal nano hole structure glass slides to realize the instant imaging of full-color tissue slices without dyeing, so that the time for realizing the imaging of the tissue slices by the existing dyeing method is greatly shortened, but the researchers ignore the inherent loss of metals in the visible light range, so that the imaging with lower color purity of the tissue slices is caused, and meanwhile, the transmittance is low, so that the contrast of light and dark is also caused.
In addition, the glass slide based on the silver metal nano-hole structure omits the problems that a silver metal material is easy to oxidize, the surface holes are uneven, and tissue slices can generate 'pits' under microscopic morphology, so that the tissue slices are not uniformly spread, and imaging is affected.
Disclosure of Invention
Aiming at the problems of low saturation, low light and dark contrast and uneven surface of the existing nano glass slide, which cause the imaging non-uniformity of the tissue slice, the invention aims to excite a quasi-continuous body binding state by breaking structural symmetry through a flat tissue slice detection area and an inverted nano structure uniform grating to form a flattened nano glass slide with ultrahigh light and dark contrast and saturation, thereby forming tissue slice imaging with high light and dark contrast and saturation when the tissue slice is placed on the glass slide. The invention provides a planar nanostructure inverted grating glass slide based on a continuum binding state.
The invention provides a planar nanostructure inverted grating glass slide based on a continuum binding state, which comprises the following components: the structure comprises an inverted homogeneous nano-structure uniform grating and a nano-structure uniform substrate, wherein the nano-structure uniform substrate is connected to the lower surface of the inverted homogeneous nano-structure uniform grating, the inverted homogeneous nano-structure uniform grating comprises a grating unit, the nano-structure uniform substrate comprises a substrate unit, the grating unit and the substrate unit form a nano glass slide unit structure, the grating unit and the substrate unit are mutually embedded to form an effective functional layer, and the effective functional layer comprises a first unit component, a second unit component, a third unit component and a fourth unit component which are sequentially arranged.
Preferably, the inverted homogeneous nanostructure uniform grating is made of sapphire, silicon dioxide or silicon nitride, and the nanostructure uniform substrate is made of any one or more of sapphire, silicon dioxide, silicon nitride and transparent epoxy resin.
Preferably, in the visible light range, the refractive index of the silicon dioxide ranges from 1.45 to 1.47, the refractive index of the silicon ranges from 3.4 to 3.48, the refractive index of the silicon dioxide ranges from 1.76 to 1.80, the refractive index of the silicon nitride ranges from 2.0 to 2.1, and the refractive index of the transparent epoxy resin ranges from 1.4 to 1.5.
Preferably, the inverted homogeneous nanostructure uniform grating is made of silicon nitride, and the nanostructure uniform substrate is made of transparent epoxy resin; preferably, the refractive index of the silicon nitride is 2.02.
Preferably, the grating period of the inverted homonanostructure uniform grating is defined as p, and the initial grating width w of the grating unit 0 The degree of asymmetry Deltaw of the inverted homonanostructure uniform grating is p/4, the width w of the first unit component 1 Width w of the third unit part 3 Identical, w 1 =w 3 =w 0 Width w of the second unit cell 2 Is w 0 +Deltaw, the width w of the fourth unit part 4 Is w 0 -aw, the asymmetry factor eta of the active functional layer being defined as aw/w 0 。
Preferably, the thickness h of the effective functional layer 1 Thickness h of waveguide layer in the inverted homonanostructure uniform grating is 10-200nm 2 Thickness h of the nanostructure uniform substrate is 10-200nm 3 The grating period p of the inverted homogeneous nano-structure uniform grating is 400-800nm and the asymmetry factor Deltaw/w of the effective functional layer is 100-3 mm 0 Is 0.1-1.0。
Preferably, the thickness h of the effective functional layer 1 Thickness h of waveguide layer in the inverted homonanostructure uniform grating is 70nm 2 Thickness h of the nanostructured uniform substrate is 80nm 3 The grating period p of the inverted homogeneous nano-structure uniform grating is 400-800nm and the asymmetry factor Deltaw/w of the effective functional layer is 100nm 0 0.1.
Preferably, the tissue slice detection layer is connected to the upper surface of the inverted homogeneous nanostructure uniform grating.
The invention provides a planar nanostructure inverted grating glass slide based on a continuum binding state, which comprises the following components: the device comprises an inverted homogeneous nanostructure uniform grating and a nanostructure uniform substrate, wherein the nanostructure uniform substrate is connected to the lower surface of the inverted homogeneous nanostructure uniform grating, the inverted homogeneous nanostructure uniform grating comprises a grating unit, the nanostructure uniform substrate comprises a substrate unit, the grating unit and the substrate unit form a nano glass slide unit structure, the grating unit and the substrate unit are mutually embedded to form an effective functional layer, and the effective functional layer comprises a first unit component, a second unit component, a third unit component and a fourth unit component which are sequentially arranged. When the actual tissue slice detection is carried out, the tissue slice is paved on the upper plane of the grating structure relative to the grating layer, the uniform spreading of the tissue slice is realized through the surface of the flattened glass slide, meanwhile, the visible light is incident from the lower part of the grating structure, the high light-dark contrast is obtained through the full-medium guided-mode resonance grating structure, the dissymmetry of the grating structure is further broken, the binding state in the quasi-continuum is excited, the interaction between light and the tissue slice is further enhanced through the binding state in the continuum, the imaging saturation, the color purity and the light-dark contrast are improved, and the tissue slice can be subjected to the real-time nondestructive imaging of the tissue slice with high saturation and high contrast when the tissue slice is placed on the flattened nano-structure inverted grating glass slide based on the binding state of the continuum.
Drawings
FIG. 1 is a schematic structural diagram of a planar nanostructure inverted grating slide based on continuum confinement provided by an embodiment of the present invention;
FIG. 2 is a reflectance spectrum diagram of a flattened nanostructured inverted grating slide with a grating layer thickness of 10-100nm provided by an embodiment of the present invention;
FIG. 3 is a reflectance spectrum plot of a planarized nanostructured inverted grating slide with a waveguide layer thickness of 10-100nm provided by an embodiment of the present invention;
FIG. 4 is a reflectance spectrum plot of a planarized nanostructured inverted grating slide with a grating period of 420-600nm provided by an embodiment of the present invention;
FIG. 5a is a graph of reflectance spectra of a flattened nanostructured inverted grating slide having a waveguide layer thickness of 50nm, a grating period of 500nm, and a grating duty cycle of 0.8 for TM polarized light incidence provided by an embodiment of the present invention;
FIG. 5b is a graph of reflectance spectra of a flattened nanostructured inverted grating slide having a waveguide layer thickness of 50nm, a grating period of 500nm, and a grating duty cycle of 0.8 for TE polarized light incidence provided by an embodiment of the present invention;
FIG. 5c is a graph of reflectance spectra of a flattened nanostructured inverted grating slide having a waveguide layer thickness of 50nm, a grating period of 500nm, and a grating duty cycle of 0.8 for TEM polarized light incidence provided by an embodiment of the present invention;
FIG. 6a is a graph of reflectance spectra of a planarized nanostructured inverted grating slide with a fixed TM polarization light incidence, with a change in incidence angle of 0-90 degrees, provided by an embodiment of the present invention;
FIG. 6b is a graph of reflectance spectra of a planarized nanostructured inverted grating slide with a fixed TE polarization light incidence, with a change in incidence angle of 0-90 degrees, provided by an embodiment of the present invention;
FIG. 6c is a graph of reflectance spectra of a planarized nanostructured inverted grating slide with a fixed angle of incidence of 90 degrees and a change in azimuth of 0-90 degrees provided by an embodiment of the present invention;
FIG. 7a is a graph showing normalized transverse electric field intensity distribution of a planar nanostructured inverted grating slide having a waveguide layer thickness of 50nm, a grating period of 500nm, and a grating duty cycle of 0.8 at a resonance wavelength under fixed TE polarized light incidence provided by an embodiment of the present invention;
FIG. 7b is a graph showing normalized transverse electric field intensity distribution of a planar nanostructured inverted grating slide having a waveguide layer thickness of 50nm, a grating period of 500nm, and a grating duty cycle of 0.8 at a resonance wavelength under fixed TM polarized light incidence provided by an embodiment of the present invention;
FIG. 8 is a graph of reflectance spectra of a planarized nanostructured inverted grating slide under the optimal parameters provided by embodiments of the present invention;
FIG. 9 is a reflectance spectrum plot of a planarized nanostructured inverted grating slide with an asymmetry factor of 0.1-0.9 provided by an embodiment of the invention;
FIG. 10 is a graph of normalized transverse electric field intensity distribution at resonance wavelength for a planarized nanostructured inverted grating slide with asymmetry factors of 1.0 and 0.1 provided by an embodiment of the invention;
FIG. 11 is a reflectance spectrum plot of a planarized nanostructured inverted grating slide with an asymmetry factor of 1.0 and a Pt/C thickness of 30-70nm provided by an embodiment of the present invention;
FIG. 12 is a reflectance spectrum plot of a planarized nanostructured inverted grating slide with an asymmetry factor of 0.1 and a Pt/C thickness of 30-70nm provided by an embodiment of the present invention;
FIG. 13 is a bulk sensitivity of a planarized nanostructured inverted grating slide under a preferred version provided by an embodiment of the invention;
FIG. 14a is a graph showing the relationship between reflectance spectrum and tissue slice thickness for a planarized nanostructured inverted grating slide under a no break structure versus procedure provided by an embodiment of the present invention;
FIG. 14b is a graph showing the relationship between reflectance spectrum and tissue slice thickness for a planarized nanostructured inverted grating slide under a preferred embodiment of the invention;
reference numerals illustrate: 1. an inverted homogenous nanostructured uniform grating; 2. a nanostructure uniform substrate; 3. a tissue slice detection layer.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
The embodiment of the invention provides a flattened nanostructure inverted grating glass slide based on a continuum binding state, which comprises the following components: the structure comprises an inverted homogeneous nanostructure uniform grating 1 and a nanostructure uniform substrate 2, wherein the nanostructure uniform substrate 2 is connected to the lower surface of the inverted homogeneous nanostructure uniform grating 1, the inverted homogeneous nanostructure uniform grating 1 comprises a grating unit, the nanostructure uniform substrate 2 comprises a substrate unit, the grating unit and the substrate unit form a nano glass slide unit structure, the grating unit and the substrate unit are mutually embedded to form an effective functional layer, and the effective functional layer comprises a first unit component, a second unit component, a third unit component and a fourth unit component which are sequentially arranged. When the imaging detection of the actual tissue slice is carried out, visible light is made to enter from the lower part, diffraction is carried out on the inverted grating structure, and the diffraction wave can act on the grating vector in a vector-doubling mode, so that the wave vector is matched with the waveguide under the specific wavelength, the guided mode resonance phenomenon is excited, and an evanescent wave field is formed on the upper surface of the structure. And the interaction between the enhanced light and the tissue slice is further enhanced by breaking the symmetry protection of the grating, so that the detection imaging of the high-saturation tissue slice with ultra-narrow line width is realized.
Further, the inverted homogeneous nanostructure uniform grating 1 is made of sapphire Al 2 O 3 Or silicon Si, or silicon dioxide SiO 2 Or silicon nitride Si 3 N 4 The method comprises the steps of carrying out a first treatment on the surface of the The material of the nano-structure uniform substrate 2 is sapphire Al 2 O 3 Or silicon Si, or silicon dioxide SiO 2 Or silicon nitride Si 3 N 4 Or any one or more of transparent epoxy PDMS. In a preferred embodiment, the inverted homogenous nanostructured uniform grating 1 is made of silicon nitride Si 3 N 4 The material of the nanostructure uniform substrate 2 is transparent epoxy resin PDMS.
Further, in the visible light band, siO 2 Has a refractive index in the range of 1.45-1.47, si has a refractive index in the range of 3.40-3.48, al 2 O 3 Has a refractive index in the range of 3.00-3.08, si 3 N 4 The refractive index of (2) is in the range of 2.60-2.65. In a preferred embodiment, si 3 N 4 The refractive index of (2) is 2.02.
Further, the nanoscopic slides are defined by the following parameters: the thickness of the effective functional layer is h 1 The thickness of the waveguide layer in the inverted homogeneous nano-structured uniform grating is h 2 The thickness of the nanostructure uniform substrate is h 3 The grating period of the inverted homogeneous nanostructure uniform grating is p, and the initial width of the grating unit is w 0 The degree of asymmetry of the inverted homogeneous nanostructured uniform grating is Deltaw, and the width of the first unit component is w 1 The width of the second unit part is w 2 The width of the third unit part is w 3 The width of the fourth unit part is w 4 The asymmetry factor eta of the effective functional layer is delta w/w 0 The thickness H of layer 3 is detected by tissue section.
In a specific embodiment, the thickness h of the effective functional layer 1 Thickness h of waveguide layer in the inverted homonanostructure uniform grating 1 is 10-200nm 2 The nanostructure is 10-200nm, and the thickness h of the substrate 2 is uniform 3 The grating period p of the inverted homogeneous nano-structured uniform grating 1 is 400-800nm, and the initial grating width w of the grating unit is 100-3 mm 0 The degree of asymmetry Deltaw of the inverted homonanostructure uniform grating 1 is p/4, the width w of the first unit cell is 1 Width w of the third unit part 3 Identical, w 1 =w 3 =w 0 Width w of the second unit cell 2 Is w 0 +Deltaw, the width w of the fourth unit part 4 Is w 0 -aw, the asymmetry factor aw/w of the active functional layer 0 0.1-1.0.
In a preferred embodiment, the thickness h of the active functional layer 1 Thickness h of waveguide layer in inverted homonanostructured uniform grating 1 of 70nm 2 Thickness h of the nanostructured uniform substrate 2 at 80nm 3 The grating period p of the grating unit is 400-800nm and the asymmetry factor Deltaw/w of the effective functional layer is 100nm 0 0.1.
Example 1
The embodiment discloses a planar nanostructure inverted grating glass slide based on continuum bound state, comprising: the tissue slice detection layer 3 is connected to the upper surface of the inverted homogeneous nanostructure uniform grating 1, the nanostructure uniform substrate 2 is connected to the lower surface of the inverted homogeneous nanostructure uniform grating 1, the inverted homogeneous nanostructure uniform grating 1 comprises a grating unit, the nanostructure uniform substrate 2 comprises a substrate unit, the grating unit and the substrate unit form a nano glass slide unit structure, the grating unit and the substrate unit are mutually embedded to form an effective functional layer, and the effective functional layer comprises a first unit component, a second unit component, a third unit component and a fourth unit component which are sequentially arranged.
As one embodiment of the invention, the inverted homogeneous nanostructure uniform grating 1 forms a visible light grating unit structure, and the visible light grating unit structure is made of silicon nitride Si 3 N 4 . The nanostructure uniform substrate 2 forms a flat metal plane sensing area, and the material of the sensing area is silicon dioxide SiO 2 。
As an embodiment of the present invention, silicon nitride Si in the visible light range 3 N 4 The refractive index of (2) is 2.02.
As an embodiment of the present invention, the thickness h of the effective functional layer 1 50nm, inverted homogenous nanometersThickness h of waveguide layer in structurally uniform grating 1 2 50nm, the period p of the inverted homogeneous nanostructured uniform grating 1 is 500nm, the asymmetry factor eta of the effective functional layer is 0.1, and the thickness h of the nanostructured uniform substrate 2 3 Is 1um.
In the embodiment of the invention, when visible light enters the inverted grating from the right lower part, the inverted grating excites the guided mode resonance phenomenon, and the interaction between the enhanced light and the tissue slice is further enhanced by breaking the symmetry protection of the grating, so that the detection imaging of the high-saturation tissue slice with ultra-narrow line width is realized, as shown in fig. 9, the resonance trough peak is positioned at the position of 600nm, the line width is gradually narrowed along with the reduction of an asymmetry factor, and the half-height width is narrowest when the asymmetry factor is 0.1, and the incident light is incident on a glass slide at the moment to show red with high purity and high brightness contrast. As shown in fig. 10, the electric field distribution of the nano-slide with the asymmetry factor of 0.1 is in a continuum binding state mode at 602nm, the electric field is tightly bound on the surface of the tissue slice detection area and enhanced, and therefore, the planarized nano-structure inverted grating slide based on the continuum binding state can realize high-purity color detection imaging of the tissue slice.
It can be understood that the visible light is incident from the lower part and diffracted in the inverted grating structure, and the diffraction wave can act on the grating vector in a vector-multiplied way, so that the diffraction wave can be matched with the wave guide in a vector way under a specific wavelength, the guided mode resonance phenomenon is excited, and an evanescent wave field is formed on the upper surface of the structure. And by breaking the symmetry protection of the grating, the interaction between the enhanced light and the tissue slice is enhanced under the resonance condition, so that the high-saturation tissue slice detection imaging with ultra-narrow linewidth is realized.
Example two
As one embodiment of the invention, the thickness h of the effective functional layer when a tissue slice is laid on the upper surface of the nano-slide 1 Thickness h of waveguide layer in inverted homonanostructure uniform grating 1 of 100nm 2 The period p of the inverted homogeneous nanostructure uniform grating 1 is 500nm, the asymmetry factor eta of the effective functional layer is 0.1, and the nano junction is 100nmThickness h of uniform substrate 2 3 Is 1um.
FIG. 13 shows the volume sensitivity of the tissue slice detected by the nano glass slide according to the preferred embodiment, wherein during detection, tissue slice samples are placed on the upper surface of the nano glass slide, different positions of the tissue slice are detected respectively, the refractive indexes of the tissue slice are different, and the resonance wavelength position variation corresponding to the refractive indexes of the tissue slice are detected respectively, so that the volume sensitivity of the detection area of the nano glass slide reaches 416.7nm/RIU, the quality factor reaches 41670, and the planar nano-structure inverted grating glass slide based on the constraint state of the continuum has higher volume refractive index sensitivity, has stronger sensing performance on the whole refractive index of the tissue slice, and can sensitively represent different colors.
Example III
As one embodiment of the invention, the thickness h of the effective functional layer when a tissue slice is laid on the upper surface of the nano-slide 1 Thickness h of 100nm, inverted homonanostructure uniform grating 1 waveguide layer 2 The period p of the inverted homogeneous nanostructured uniform grating 1 is 500nm, the asymmetry factor eta of the effective functional layer is 0.1, and the thickness h of the nanostructured uniform substrate 2 is 100nm 3 Is 1um.
FIG. 14b shows the relationship between the resonant wavelength shift and the surface tissue slice thickness for a planarized nanostructured inverted grating slide under the preferred embodiment of the invention, where the slide exhibits high saturation and high contrast spectra and images at tissue slice thicknesses between 10-100 nm. The thickness of the unit group tissue slice is 10nm, and the resonance wavelength shift of the structure gradually increases with the increase of the number of layers of the tissue slice. Each tissue slice layer laid on the nano-slide causes the previous reflection resonance spectrum shift to exceed 5nm, which is a very superior sensing performance, and compared with the common planar nano-structure inverted grating slide without breaking symmetry, the planar nano-structure inverted grating slide based on the continuous body bound state can be reflected by fig. 14a and 14b, and has higher color saturation under the condition that each unit tissue slice layer causes the same wavelength offset, and has better tissue slice imaging function.
Compared with the prior art, the invention provides a flattened nanostructure inverted grating glass slide based on a continuum binding state, which has the following beneficial effects: the tissue slice is only required to be tiled in a tissue slice detection area of the structure, and the tissue slice is not required to be dyed in advance, so that the high saturation imaging can be realized. Meanwhile, detection nonuniformity caused by the surface roughness of the existing silver nano hole array nano glass slide is avoided, and the color purity and the brightness contrast of tissue slice imaging are obviously improved by means of a continuum binding state, so that when the tissue slice is placed on the planar nanostructure inverted grating glass slide based on the continuum binding state, the tissue slice imaging with high color purity and high contrast can be realized.
While the present invention has been described with reference to the specific embodiments thereof, the scope of the present invention is not limited thereto, and any changes or substitutions will be apparent to those skilled in the art within the scope of the present invention, and are intended to be covered by the present invention. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
In the description of the present application, it should be understood that the terms "upper," "lower," "inner," "outer," and the like indicate an orientation or a positional relationship based on that shown in the drawings, and are merely for convenience of description and simplification of the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present application. The word 'comprising' does not exclude the presence of elements or steps not listed in a claim. The word 'a' or 'an' preceding an element does not exclude the presence of a plurality of such elements. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage. Any reference signs in the claims shall not be construed as limiting the scope.
Claims (8)
1. A planarized nanostructured inverted grating slide based on continuum confinement, comprising: the structure comprises an inverted homogeneous nanostructure uniform grating and a nanostructure uniform substrate, wherein the nanostructure uniform substrate is connected to the lower surface of the inverted homogeneous nanostructure uniform grating, the inverted homogeneous nanostructure uniform grating comprises a plurality of grating units, the nanostructure uniform substrate comprises a plurality of substrate units, the grating units and the substrate units form a nano glass slide unit structure, the lower surface of the grating units are protruded to form a first unit component and a third unit component, the upper surface of the substrate units are protruded to form a second unit component and a fourth unit component, and the first unit component, the second unit component, the third unit component and the fourth unit component are mutually embedded and sequentially arranged to form an effective functional layer.
2. The planar nanostructure inverted grating slide based on continuum confinement state of claim 1, wherein the inverted homogenous nanostructure uniform grating is made of sapphire, or silicon dioxide, or silicon nitride;
the nanostructure uniform substrate is made of any one or more of sapphire, silicon dioxide, silicon nitride and transparent epoxy resin.
3. A planarized nanostructured inverted grating slide according to claim 2, wherein the refractive index of the silicon dioxide is in the range of 1.45-1.47, the refractive index of the silicon is in the range of 3.40-3.48, the refractive index of the sapphire is in the range of 3.00-3.08, and the refractive index of the silicon nitride is in the range of 2.60-2.65 in the visible light range.
4. A planarized nanostructured inverted grating slide according to claim 3, wherein the inverted homogenous nanostructured uniform grating is comprised of silicon nitride and the nanostructured uniform substrate is comprised of transparent epoxy; the refractive index of the silicon nitride is 2.02.
5. A planarized nanostructured inverted grating slide according to claim 1, wherein the grating period of the inverted homogenous nanostructured uniform grating is defined as p, the grating initial width w of the grating elements 0 The degree of asymmetry Deltaw of the inverted homonanostructure uniform grating is p/4, the width w of the first unit component 1 Width w of the third unit part 3 Identical, w 1 =w 3 =w 0 Width w of the second unit cell 2 Is w 0 +Deltaw, the width w of the fourth unit part 4 Is w 0 -aw, the asymmetry factor eta of the active functional layer being defined as aw/w 0 。
6. The planarized nanostructured inverted grating slide of claim 5 wherein said effective functional layer has a thickness h 1 Thickness h of waveguide layer in the inverted homonanostructure uniform grating is 10-200nm 2 Thickness h of the nanostructure uniform substrate is 10-200nm 3 The grating period p of the inverted homogeneous nano-structure uniform grating is 400-800nm and the asymmetry factor Deltaw/w of the effective functional layer is 100-3 mm 0 0.1-1.0.
7. The planarized nanostructured inverted grating slide of claim 6 wherein said effective functional layer has a thickness h 1 Thickness h of waveguide layer in the inverted homonanostructure uniform grating is 70nm 2 Thickness h of the nanostructured uniform substrate is 80nm 3 An asymmetry factor Deltaw/w of the effective functional layer of 100nm 0 0.1.
8. The planarized nanostructured inverted grating slide of claim 1 further comprising a tissue slice detection layer attached to the upper surface of the inverted homogenous nanostructured uniform grating.
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