CN117484514A - Position calibration and debugging method and structure of carrying arm and cutting workbench - Google Patents
Position calibration and debugging method and structure of carrying arm and cutting workbench Download PDFInfo
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- CN117484514A CN117484514A CN202410007502.0A CN202410007502A CN117484514A CN 117484514 A CN117484514 A CN 117484514A CN 202410007502 A CN202410007502 A CN 202410007502A CN 117484514 A CN117484514 A CN 117484514A
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- 238000005520 cutting process Methods 0.000 title claims abstract description 74
- 238000000034 method Methods 0.000 title claims abstract description 22
- 238000012360 testing method Methods 0.000 claims description 13
- 238000002360 preparation method Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 abstract description 11
- 239000000463 material Substances 0.000 abstract description 9
- 238000003754 machining Methods 0.000 abstract description 2
- 238000012545 processing Methods 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000012790 confirmation Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- -1 electricity Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000009347 mechanical transmission Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1679—Programme controls characterised by the tasks executed
- B25J9/1692—Calibration of manipulator
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a position calibration and debugging method and structure of a carrying arm and a cutting workbench, comprising two identical debugging clamp plates with calibration and debugging holes at two ends, and two calibration and positioning jigs, wherein the outer diameter of each calibration and positioning jig corresponds to the inner diameter of each calibration and debugging hole; the middle connecting plate is matched and connected with the middle connecting plate at the bottom of the carrying arm through a positioning locking piece, and the center of the middle connecting plate and the center of the debugging clamp plate are on the same straight line; the other debugging clamp plate is connected with the reference plate at the top of the cutting workbench in a matched manner through a positioning locking piece, and the reference plate and the center of the debugging clamp plate are in the same straight line. Compared with the traditional purely manual hand-eye matching adjustment mode, the invention realizes the accurate position calibration and adjustment between the carrying arm and the cutting workbench of the carrying mechanism, and ensures the coordinate position precision between the carrying arm and the cutting workbench, thereby ensuring the integral machining precision of the full-automatic scribing precise sorting machine on the semiconductor material.
Description
Technical Field
The invention belongs to the technical field of calibration and debugging between components of semiconductor cutting equipment, and particularly relates to a position calibration and debugging method and structure of a carrying arm and a cutting workbench.
Background
The full-automatic precise dicing sorter is precise numerical control equipment integrating the technologies of water, gas, electricity, air static pressure, high-speed spindle, precise mechanical transmission, sensor, automatic control and the like. The high-speed spindle of the full-automatic precise dicing sorter has the highest rotating speed of 40000 rpm, and during dicing, an ultrathin diamond grinding wheel blade which is arranged on the spindle head of the spindle and rotates at high speed and has the thickness of only 0.032mm is utilized to scribe along the cutting line between grains on main stream products such as QFN, BGA, LGA in advanced packaging in the semiconductor integrated circuit industry, the scribing track cannot deviate from the cutting line, and the defects such as grain collapse or crack cannot be caused after the scribing. Because of the specificity of the semiconductor material, the full-automatic scribing precision sorting machine has higher and harsher requirements than other industries on the technical parameters such as straightness, cutting depth, edge breakage and the like of the full-automatic scribing precision sorting machine when the material is cut; when cutting the mainstream products such as QFN, BGA, LGA and the like in advanced packaging in the semiconductor integrated circuit industry, the requirement on processing precision needs to reach the mu m level.
By introducing the full-automatic scribing precise sorting machine, the requirement on the processing precision of the semiconductor material is extremely high. The conveying arm of the conveying mechanism of the full-automatic precise scribing sorter is arranged above the cutting workbench and can move in the X-axis direction and the Y-axis direction, so that the conveying arm and the cutting workbench can be precisely matched to finish cutting and sucking conveying of the semiconductor material, and the whole machining precision of the full-automatic precise scribing sorter on the semiconductor material can be ensured; therefore, before the full-automatic precise dicing classifier is used, it is necessary to confirm the coordinate position relationship between the transfer arm of the transfer mechanism of the full-automatic precise dicing classifier and the dicing table and to calibrate and debug the same.
In the prior art, the confirmation and calibration of the coordinate position relationship between the carrying arm of the carrying mechanism and the cutting workbench are completed by manual operation, and the debugging process is as follows: firstly, the carrying arm is controlled to move to the vicinity of the upper part of the cutting workbench, then the center of the middle connecting plate at the bottom of the carrying arm is manually adjusted to be matched with eyes to observe whether the center of the middle connecting plate at the bottom of the carrying arm is aligned with the center of the reference plate at the top of the cutting workbench, and the debugging is finally completed through multiple times of adjustment. The debugging method has the following problems: the device has no special debugging tool, and because the device is adjusted by matching a pure manual hand and an eye, errors exist in the angle observed by a person, so that the position calibration and debugging are inaccurate, and the processing precision of a semiconductor material product is reduced; in addition, multiple adjustment is needed, time is consumed, and production efficiency is reduced. Therefore, in order to solve the above-mentioned problems, it is necessary to provide a position calibration and adjustment method and structure for a handling arm and a cutting table.
Disclosure of Invention
The invention aims at the problems and overcomes the defects of the prior art, and provides a position calibration and debugging method and structure for a carrying arm and a cutting workbench.
In order to achieve the above purpose, the present invention adopts the following technical scheme.
On one hand, the position calibration and debugging method for the carrying arm and the cutting workbench provided by the invention comprises a preparation working stage and a debugging working stage;
the preparation stage comprises: selecting two identical debugging clamp plates with calibration and debugging holes at two ends, installing a positioning locking piece between a middle connecting plate at the bottom of a carrying arm and one debugging clamp plate, fixedly connecting the middle connecting plate at the bottom of the carrying arm with the debugging clamp plate through the positioning locking piece, and ensuring that the center of the debugging clamp plate and the center of the middle connecting plate are on the same straight line, and the calibration and debugging holes at two ends of the debugging clamp plate are detected out of the middle connecting plate; a positioning locking piece is arranged between a reference plate at the top of the cutting workbench and another debugging clamp plate, the reference plate at the top of the cutting workbench is fixedly connected with the debugging clamp plate through the positioning locking piece, the center of the debugging clamp plate and the center of the reference plate are ensured to be on the same straight line, and the calibration debugging holes at the two ends of the debugging clamp plate are detected out of the reference plate;
the debugging working phase comprises the following steps: selecting two calibration positioning jigs to be matched with the two debugging jig plates for use, wherein the outer diameter of the calibration positioning jigs corresponds to the inner diameter of the calibration debugging holes; firstly, controlling a carrying arm to move above a cutting workbench through a computer numerical control system of a full-automatic precise scribing separator, and enabling a debugging clamp plate arranged on a middle connecting plate at the bottom of the carrying arm to be primarily aligned with a debugging clamp plate on a reference plate at the top of the cutting workbench in a manual mode; and then two calibration positioning jigs are respectively inserted into the calibration and test holes at the end parts of the two primarily aligned debugging jig plates until the two primarily aligned debugging jig plates can move up and down in a sliding manner in the calibration and test holes at the end parts of the two debugging jig plates, and the positions of the carrying arm and the cutting workbench at the moment are recorded in a program of a computer numerical control system, so that the position calibration and test of the carrying arm and the cutting workbench are completed.
As a preferable scheme of the invention, the centers of the two ends of the debugging clamp plate are symmetrically provided with the convex blocks, and the calibration debugging hole is arranged at the center of the convex blocks.
As another preferable mode of the invention, the positioning locking piece adopts a hasp.
As another preferable scheme of the invention, the hasp comprises a hasp male end and a hasp female end, and the hasp male end and the hasp female end are respectively and correspondingly arranged on a middle connecting plate at the bottom of the carrying arm and a debugging clamp plate which is in fit connection with the middle connecting plate; the base plate at the top of the cutting workbench and the debugging clamp plate which is matched and connected with the base plate are respectively provided with a hasp male end and a hasp female end correspondingly.
On the other hand, the position calibration and debugging structure of the carrying arm and the cutting workbench comprises two identical debugging clamp plates with calibration and debugging holes at two ends and two calibration and positioning jigs, wherein the outer diameter of each calibration and positioning jig corresponds to the inner diameter of each calibration and debugging hole; the middle connecting plate is matched and connected with the middle connecting plate at the bottom of the carrying arm through a positioning locking piece, and the center of the middle connecting plate and the center of the debugging clamp plate are on the same straight line; the other debugging clamp plate is connected with the reference plate at the top of the cutting workbench in a matched manner through a positioning locking piece, and the reference plate and the center of the debugging clamp plate are in the same straight line; when the handling arm moves to the upper part of the cutting workbench, and the debugging clamp plate arranged on the middle connecting plate at the bottom of the handling arm is primarily aligned with the debugging clamp plate on the reference plate at the top of the cutting workbench, the two calibration positioning jigs can be respectively inserted into the calibration test holes at the end parts of the two primarily aligned debugging clamp plates and can move up and down in a sliding manner in the calibration test holes at the end parts of the two debugging clamp plates.
As a preferable scheme of the invention, the centers of the two ends of the debugging clamp plate are symmetrically provided with the convex blocks, and the calibration debugging hole is arranged at the center of the convex blocks.
As another preferable mode of the invention, the positioning locking piece adopts a hasp.
As another preferable scheme of the invention, the hasp comprises a hasp male end and a hasp female end, and the hasp male end and the hasp female end are respectively and correspondingly arranged on a middle connecting plate at the bottom of the carrying arm and a debugging clamp plate which is in fit connection with the middle connecting plate; the base plate at the top of the cutting workbench and the debugging clamp plate which is matched and connected with the base plate are respectively provided with a hasp male end and a hasp female end correspondingly.
The invention has the beneficial effects that:
according to the position calibration and debugging method and structure for the carrying arm and the cutting workbench, provided by the invention, the debugging process is completed by matching two identical debugging clamp plates with calibration and debugging holes at two ends with the carrying arm and the cutting workbench, and the two calibration and positioning jigs are matched with the carrying arm and the cutting workbench respectively; by the position calibration and debugging method and structure, time can be saved for processing the semiconductor material, and production efficiency can be improved.
Drawings
Fig. 1 is a schematic structural view of a position calibration and adjustment method for a handling arm and a cutting table according to the present invention.
FIG. 2 is a schematic diagram of a second method for adjusting and debugging the position of a handling arm and a cutting table according to the present invention.
The marks in the figure: the device comprises a carrying arm 1, a middle connecting plate 2, a calibration and test hole 3, a protruding block 4, a positioning locking piece 5, a debugging fixture plate 6, a calibration and positioning fixture 7, a reference plate 8 and a cutting workbench 9.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects solved by the invention more clear, the invention is further described in detail below with reference to the accompanying drawings and the detailed description. It should be understood that the detailed description is presented by way of example only and is not intended to limit the invention.
Referring to fig. 1 and fig. 2, a method for calibrating and debugging positions of a cutting table and a handling arm according to an embodiment of the present invention includes a preparation working stage and a debugging working stage. The preparation stage comprises: selecting two identical debugging clamp plates 6 with calibration and debugging holes 3 at two ends, installing a positioning locking piece 5 between the middle connecting plate 2 at the bottom of the carrying arm 1 and one debugging clamp plate 6, fixedly connecting the middle connecting plate 2 at the bottom of the carrying arm 1 with the debugging clamp plate 6 through the positioning locking piece 5, ensuring that the center of the debugging clamp plate 6 and the center of the middle connecting plate 2 are on the same straight line, and ensuring that the calibration and debugging holes 3 at two ends of the debugging clamp plate 6 extend out of the middle connecting plate 2; a positioning locking piece 5 is arranged between a reference plate 8 at the top of the cutting workbench 9 and another debugging clamp plate 6, the reference plate 8 at the top of the cutting workbench 9 is fixedly connected with the debugging clamp plate 6 through the positioning locking piece 5, the center of the debugging clamp plate 6 and the center of the reference plate 8 are ensured to be in the same straight line, and the calibration debugging holes 3 at the two ends of the debugging clamp plate 6 extend out of the reference plate 8. The debugging working phase comprises the following steps: then two calibration positioning jigs 7 are selected to be matched with the two debugging jig plates 6 for use, and the outer diameter of the calibration positioning jigs 7 corresponds to the inner diameter of the calibration debugging holes 3; firstly, a computer numerical control system of a full-automatic precise scribing separator is used for controlling a carrying arm 1 to move above a cutting workbench 9, and a debugging clamp plate 6 arranged on a middle connecting plate 2 at the bottom of the carrying arm 1 and a debugging clamp plate 6 arranged on a reference plate 8 at the top of the cutting workbench 9 are aligned preliminarily in a manual mode; then, two calibration positioning jigs 7 are respectively inserted into the calibration and debugging holes 3 at the end parts of the two primarily aligned debugging clamp plates 6 until the two debugging clamp plates 6 can move up and down in a sliding manner in the calibration and debugging holes 3 at the end parts of the two debugging clamp plates 6, and the positions of the carrying arm 1 and the cutting workbench 9 at the moment are recorded in a program of a computer numerical control system, so that the position calibration and debugging of the carrying arm 1 and the cutting workbench 9 are completed.
As a preferable scheme of the invention, the calibration positioning jig 7 can adopt a pin shaft, the centers of two ends of the debugging fixture plate 6 are symmetrically provided with the convex blocks 4, and the calibration debugging holes 3 are arranged at the centers of the convex blocks 4.
As a preferable scheme of the invention, the positioning locking piece 5 adopts a hasp, the hasp comprises a hasp male end and a hasp female end, and the hasp male end and the hasp female end are respectively correspondingly arranged on the middle connecting plate 2 at the bottom of the carrying arm 1 and the debugging clamp plate 6 which is in fit connection with the middle connecting plate 2; a hasp male end and a hasp female end are respectively correspondingly arranged on a reference plate 8 at the top of a cutting workbench 9 and a debugging clamp plate 6 which is in fit connection with the reference plate 8; the male end and the female end of the hasp can be matched and locked.
Referring to fig. 1 and 2, the position calibration and debugging structure for a handling arm and a cutting workbench provided by the embodiment of the invention comprises two identical debugging clamp plates 6 with calibration and debugging holes 3 at two ends, and two calibration and positioning jigs 7, wherein the outer diameter of each calibration and positioning jig 7 corresponds to the inner diameter of each calibration and debugging hole 3; the debugging clamp plate 6 is connected with the middle connecting plate 2 at the bottom of the carrying arm 1 in a matched manner through the positioning locking piece 5, and the middle connecting plate 2 and the center of the debugging clamp plate 6 are in the same straight line; the other debugging clamp plate 6 is matched and connected with the reference plate 8 at the top of the cutting workbench 9 through the positioning locking piece 5, and the reference plate 8 and the center of the debugging clamp plate 6 are on the same straight line; when the carrying arm 1 moves above the cutting workbench 9, so that the debugging clamp plate 6 mounted on the middle connecting plate 2 at the bottom of the carrying arm 1 and the debugging clamp plate 6 on the reference plate 8 at the top of the cutting workbench 9 are primarily aligned, the two calibration positioning jigs 7 can be respectively inserted into the calibration and test holes 3 at the end parts of the two primarily aligned debugging clamp plates 6 and can move up and down in a sliding manner in the calibration and test holes 3 at the end parts of the two debugging clamp plates 6.
As a preferable scheme of the invention, the calibration positioning jig 7 can adopt a pin shaft, the centers of two ends of the debugging fixture plate 6 are symmetrically provided with the convex blocks 4, and the calibration debugging holes 3 are arranged at the centers of the convex blocks 4.
As a preferable scheme of the invention, the positioning locking piece 5 adopts a hasp, the hasp comprises a hasp male end and a hasp female end, and the hasp male end and the hasp female end are respectively correspondingly arranged on the middle connecting plate 2 at the bottom of the carrying arm 1 and the debugging clamp plate 6 which is in fit connection with the middle connecting plate 2; a hasp male end and a hasp female end are respectively correspondingly arranged on a reference plate 8 at the top of a cutting workbench 9 and a debugging clamp plate 6 which is in fit connection with the reference plate 8; the male end and the female end of the hasp can be matched and locked.
In summary, the two identical debugging clamp plates 6 with the calibration holes 3 at the two ends and the two calibration positioning jigs 7 are respectively matched with the carrying arm 1 and the cutting workbench 9 to finish the debugging process, compared with the traditional method without special debugging tools and with pure manual hand-eye matching adjustment, the invention realizes the accurate position calibration debugging between the carrying arm 1 and the cutting workbench 9 of the carrying mechanism, ensures the coordinate position precision between the carrying arm 1 and the cutting workbench 9, and further ensures the integral processing precision of the full-automatic scribing precision sorter on the semiconductor material.
It should be understood that the foregoing detailed description of the present invention is provided for illustration only and is not limited to the technical solutions described in the embodiments of the present invention, and those skilled in the art should understand that the present invention may be modified or substituted for the same technical effects; as long as the use requirement is met, the invention is within the protection scope of the invention.
Claims (8)
1. A position calibration and debugging method for a carrying arm and a cutting workbench is characterized in that: the method comprises a preparation working stage and a debugging working stage;
the preparation stage comprises: selecting two identical debugging clamp plates with calibration and debugging holes at two ends, installing a positioning locking piece between a middle connecting plate at the bottom of a carrying arm and one debugging clamp plate, fixedly connecting the middle connecting plate at the bottom of the carrying arm with the debugging clamp plate through the positioning locking piece, and ensuring that the center of the debugging clamp plate and the center of the middle connecting plate are on the same straight line, and the calibration and debugging holes at two ends of the debugging clamp plate are detected out of the middle connecting plate; a positioning locking piece is arranged between a reference plate at the top of the cutting workbench and another debugging clamp plate, the reference plate at the top of the cutting workbench is fixedly connected with the debugging clamp plate through the positioning locking piece, the center of the debugging clamp plate and the center of the reference plate are ensured to be on the same straight line, and the calibration debugging holes at the two ends of the debugging clamp plate are detected out of the reference plate;
the debugging working phase comprises the following steps: selecting two calibration positioning jigs to be matched with the two debugging jig plates for use, wherein the outer diameter of the calibration positioning jigs corresponds to the inner diameter of the calibration debugging holes; firstly, controlling a carrying arm to move above a cutting workbench through a computer numerical control system of a full-automatic precise scribing separator, and enabling a debugging clamp plate arranged on a middle connecting plate at the bottom of the carrying arm to be primarily aligned with a debugging clamp plate on a reference plate at the top of the cutting workbench in a manual mode; and then two calibration positioning jigs are respectively inserted into the calibration and test holes at the end parts of the two primarily aligned debugging jig plates until the two primarily aligned debugging jig plates can move up and down in a sliding manner in the calibration and test holes at the end parts of the two debugging jig plates, and the positions of the carrying arm and the cutting workbench at the moment are recorded in a program of a computer numerical control system, so that the position calibration and test of the carrying arm and the cutting workbench are completed.
2. The method for adjusting and debugging the position of a handling arm and a cutting table according to claim 1, wherein: protruding blocks are symmetrically arranged at the centers of two ends of the debugging clamp plate, and the calibration debugging holes are formed in the centers of the protruding blocks.
3. The method for adjusting and debugging the position of a handling arm and a cutting table according to claim 1, wherein: the positioning locking piece adopts a hasp.
4. A method of adjusting and debugging the position of a handling arm and a cutting table according to claim 3, wherein: the hasp comprises a hasp male end and a hasp female end, and the hasp male end and the hasp female end are respectively and correspondingly arranged on a middle connecting plate at the bottom of the carrying arm and a debugging fixture plate which is in fit connection with the middle connecting plate; the base plate at the top of the cutting workbench and the debugging clamp plate which is matched and connected with the base plate are respectively provided with a hasp male end and a hasp female end correspondingly.
5. Position calibration debugging structure of handling arm and cutting workstation, its characterized in that: the device comprises two identical debugging fixture plates with calibration holes at two ends and two identical calibration positioning jigs, wherein the outer diameters of the two identical calibration positioning jigs correspond to the inner diameters of the calibration holes; the middle connecting plate is matched and connected with the middle connecting plate at the bottom of the carrying arm through a positioning locking piece, and the center of the middle connecting plate and the center of the debugging clamp plate are on the same straight line; the other debugging clamp plate is connected with the reference plate at the top of the cutting workbench in a matched manner through a positioning locking piece, and the reference plate and the center of the debugging clamp plate are in the same straight line; when the handling arm moves to the upper part of the cutting workbench, and the debugging clamp plate arranged on the middle connecting plate at the bottom of the handling arm is primarily aligned with the debugging clamp plate on the reference plate at the top of the cutting workbench, the two calibration positioning jigs can be respectively inserted into the calibration test holes at the end parts of the two primarily aligned debugging clamp plates and can move up and down in a sliding manner in the calibration test holes at the end parts of the two debugging clamp plates.
6. The position calibration and adjustment structure for a carrier arm and a cutting table according to claim 5, wherein: protruding blocks are symmetrically arranged at the centers of two ends of the debugging clamp plate, and the calibration debugging holes are formed in the centers of the protruding blocks.
7. The position calibration and adjustment structure for a carrier arm and a cutting table according to claim 5, wherein: the positioning locking piece adopts a hasp.
8. The position calibration and adjustment structure for a carrier arm and a cutting table according to claim 7, wherein: the hasp comprises a hasp male end and a hasp female end, and the hasp male end and the hasp female end are respectively and correspondingly arranged on a middle connecting plate at the bottom of the carrying arm and a debugging fixture plate which is in fit connection with the middle connecting plate; the base plate at the top of the cutting workbench and the debugging clamp plate which is matched and connected with the base plate are respectively provided with a hasp male end and a hasp female end correspondingly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410007502.0A CN117484514B (en) | 2024-01-03 | 2024-01-03 | Position calibration and debugging method and structure of carrying arm and cutting workbench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410007502.0A CN117484514B (en) | 2024-01-03 | 2024-01-03 | Position calibration and debugging method and structure of carrying arm and cutting workbench |
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| Publication Number | Publication Date |
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| CN117484514A true CN117484514A (en) | 2024-02-02 |
| CN117484514B CN117484514B (en) | 2024-03-01 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH636549A5 (en) * | 1979-05-14 | 1983-06-15 | Graphicart Int | Device for presetting a tool nose by means of a pneumatic nozzle |
| JP2001156129A (en) * | 1999-11-30 | 2001-06-08 | Tokyo Seimitsu Co Ltd | Alignment device for wafer and contact board |
| RU2279964C1 (en) * | 2005-05-27 | 2006-07-20 | Научно-исследовательский институт Гознака | Method of positioning of tool in reference system of machine tool in automated engraving complex |
| WO2023049945A1 (en) * | 2021-09-30 | 2023-04-06 | Trotec Laser Gmbh | Method for determining a position of a workpiece in a machining area of a laser plotter for cutting, engraving, marking and/or inscribing the workpiece, and calibration method, and laser plotter therefor |
| CN116741676A (en) * | 2023-08-14 | 2023-09-12 | 沈阳和研科技股份有限公司 | Film-free cutting workpiece back-pushing feed box structure |
| CN117133690A (en) * | 2023-10-25 | 2023-11-28 | 沈阳和研科技股份有限公司 | Full-automatic cutting and sorting integrated dicing saw |
-
2024
- 2024-01-03 CN CN202410007502.0A patent/CN117484514B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH636549A5 (en) * | 1979-05-14 | 1983-06-15 | Graphicart Int | Device for presetting a tool nose by means of a pneumatic nozzle |
| JP2001156129A (en) * | 1999-11-30 | 2001-06-08 | Tokyo Seimitsu Co Ltd | Alignment device for wafer and contact board |
| RU2279964C1 (en) * | 2005-05-27 | 2006-07-20 | Научно-исследовательский институт Гознака | Method of positioning of tool in reference system of machine tool in automated engraving complex |
| WO2023049945A1 (en) * | 2021-09-30 | 2023-04-06 | Trotec Laser Gmbh | Method for determining a position of a workpiece in a machining area of a laser plotter for cutting, engraving, marking and/or inscribing the workpiece, and calibration method, and laser plotter therefor |
| CN116741676A (en) * | 2023-08-14 | 2023-09-12 | 沈阳和研科技股份有限公司 | Film-free cutting workpiece back-pushing feed box structure |
| CN117133690A (en) * | 2023-10-25 | 2023-11-28 | 沈阳和研科技股份有限公司 | Full-automatic cutting and sorting integrated dicing saw |
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| CN117484514B (en) | 2024-03-01 |
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