CN117479801A - Film thickness detection method, film thickness detection substrate and display device - Google Patents
Film thickness detection method, film thickness detection substrate and display device Download PDFInfo
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- 238000001514 detection method Methods 0.000 title claims abstract description 57
- 239000000758 substrate Substances 0.000 title claims abstract description 34
- 239000000463 material Substances 0.000 claims abstract description 149
- 238000007641 inkjet printing Methods 0.000 claims abstract description 131
- 238000007639 printing Methods 0.000 claims abstract description 40
- 238000000034 method Methods 0.000 claims abstract description 16
- 238000012360 testing method Methods 0.000 claims description 64
- 238000012886 linear function Methods 0.000 claims description 9
- 239000000976 ink Substances 0.000 abstract description 194
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 230000008569 process Effects 0.000 description 7
- 239000000243 solution Substances 0.000 description 5
- 238000001291 vacuum drying Methods 0.000 description 5
- 230000005525 hole transport Effects 0.000 description 4
- 229940090044 injection Drugs 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000005019 vapor deposition process Methods 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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Abstract
The application discloses a film thickness detection method, a film thickness detection substrate and a display device. The film thickness detection method comprises the following steps: at least three ink-jet printing areas are arranged on a film thickness detection substrate at intervals, a plurality of pixel grooves are arranged in each ink-jet printing area, and the areas of all the pixel grooves are the same; printing a first ink material, a second ink material and a third ink material in each ink-jet printing area respectively, wherein the number of ink drops in the ink-jet printing in a plurality of pixel grooves in each ink-jet printing area is increased in sequence; and obtaining film thickness values of a plurality of pixel grooves in each ink-jet printing area according to a preset sequence of the ink drop numbers, drawing a relation curve of the ink drop numbers and the film thickness values of each ink-jet printing area, and judging film thickness uniformity of the printed first ink material, second ink material and third ink material. The method and the device can ensure uniform film formation at the edge position and avoid film thickness result distortion caused by mutual pollution of different inks at the boundary position.
Description
Technical Field
The present disclosure relates to the field of display technologies, and in particular, to a film thickness detection method, a film thickness detection substrate, and a display device.
Background
Compared with a liquid crystal display, the organic light emitting diode (Organic Light Emi tt ing Diode, OLED) display device has the advantages of self-luminescence, quick response, bright color, wide viewing angle and the like, and is a novel display technology of the next generation with great potential.
The OLED display technology has two main manufacturing processes, namely, an FMM (fine metal mask) vapor deposition process and an inkjet printing process. The main difference between these two processes is the equipment and raw materials. The vapor deposition process is to evaporate and condense the solid organic raw material onto the OLED substrate in vacuum equipment to obtain a film. The ink-jet printing process is different, and mainly comprises the steps of dissolving an organic material in a solvent, directly printing the organic material in a target pixel through a high-precision spray head, and obtaining a film through VCD (vacuum drying) and baking (bak) processes.
Before the structural optimization performance of the device is designed, the film forming condition of the ink for ink-jet printing in pixels needs to be collected, especially after the back of the rake process, the film thickness Tool curve (film forming thickness corresponding to unit volume of ink) of the luminous layer film is required to be collected, and the capacity of three pixels for accommodating different inks needs to be monitored due to the possible difference of RGB opening ratio design.
Currently, the general practice is to divide the active area (AA area) into three areas disposed adjacently, and print a hole injection Layer (Hole Inject ion Layer, HIL), a hole transport Layer (Hole Transport Layer, HTL) and a luminescent material Layer (EML) from top to bottom in each area, and the volumes of the printing inks in each area are different, and the design has the following problems: (1) when the ink is printed, the film formation at the edge position is possibly uneven due to the influence of VCD and rake temperature; (2) the possibility of mutual pollution of different inks at the boundary position, so that the film thickness result is distorted; (3) the film thickness monitoring area has a single function.
Disclosure of Invention
The invention aims to provide a film thickness detection method, a film thickness detection substrate and a display device, which are used for solving the technical problem that when the film forming uniformity of ink for inkjet printing in pixels is detected at present, film forming is uneven at the edge position, and different inks are mutually polluted at the boundary position to cause distortion of film thickness results.
In order to achieve the above object, the present invention provides a film thickness detection method comprising the steps of:
at least three ink-jet printing areas are arranged on a film thickness detection substrate at intervals, a plurality of pixel grooves are arranged in each ink-jet printing area, and the areas of all the pixel grooves are the same;
printing a first ink material, a second ink material and a third ink material in each ink-jet printing area respectively, wherein in each ink-jet printing area, the number of ink drops in the plurality of pixel grooves in ink-jet printing is increased in sequence according to a preset sequence of the number of ink drops;
according to a preset sequence of the ink drop numbers, obtaining film layer thickness values of a plurality of pixel grooves in each ink-jet printing area, and drawing a relation curve of the ink drop numbers and the film layer thickness values of each ink-jet printing area;
and respectively judging the uniformity of the film thickness of the first ink material, the second ink material and the third ink material according to the relation curve of the ink drop number and the film thickness value corresponding to each ink jet printing area.
Further, in the step of setting a plurality of pixel grooves in each ink-jet printing area, the number of the set pixel grooves is N; the number of ink drops in the ink jet printing in the plurality of pixel grooves in each ink jet printing area is sequentially increased drop by drop; wherein N is an integer.
Further, the step of respectively determining the uniformity of the film thickness of the printed first, second and third ink materials according to the relationship curve of the number of ink drops and the film thickness value corresponding to each ink jet printing area includes:
acquiring the ink type of the inkjet printing in each inkjet printing area;
constructing a linear function Y=aX+b for the relation curve of the number of ink drops and the film thickness value corresponding to each ink jet printing area, wherein X represents the ink volume corresponding to the number of ink drops, Y represents the film thickness value corresponding to the number of ink drops, a represents the slope, and b represents the film thickness parameter;
calculating a linear function Y=corresponding to each ink jet printing areaLinear degree of correlation R of ax+b 2 ；
According to |R 2 -1| determining film thickness uniformity of printing the first, second and third ink materials per ink jet printing zone, wherein |R 2 A smaller value of-1 indicates a better uniformity of the film thickness.
Further, in another embodiment, the step of determining film thickness uniformity of printing the first ink material, the second ink material and the third ink material according to the relationship between the number of ink droplets and the film thickness value corresponding to each ink jet printing area includes:
acquiring the ink type of the inkjet printing in each inkjet printing area;
calculating the difference value of the film forming thickness of two adjacent ink drops according to the relation curve of the ink drop number and the film thickness value corresponding to each ink jet printing area, and taking the difference value as the film forming thickness of the next ink drop;
calculating the variance of film thickness of all single drops of ink in each ink-jet printing zone;
and judging the uniformity of the film forming thickness of each ink jet printing area for printing the first ink material, the second ink material and the third ink material according to the variance, wherein the smaller the variance value is, the better the uniformity of the film forming thickness is.
Further, the film thickness detection method further includes the steps of:
at least one film thickness test area is further arranged on the film thickness detection substrate, a plurality of pixel grooves are arranged in the film thickness test area, and the areas of all the pixel grooves are the same;
sequentially printing a drop of first ink material, second ink material and third ink material in a pixel groove of the film thickness test area;
calculating the average film forming thickness in the pixel groove of the film thickness test area;
calculating the average film thickness of printing one drop of the first ink material, the second ink material and the third ink material in each ink-jet printing area;
and comparing the average film forming thickness in the pixel groove of the film thickness test area with the average film forming thickness of one drop of first ink material, second ink material and third ink material printed in all the ink jet printing areas, and respectively judging the uniformity of the film forming thickness of the first ink material, the second ink material and the third ink material printed.
Further, the film thickness detection method further includes the steps of:
a first film thickness test area and a second film thickness test area are arranged on the film thickness detection substrate, a plurality of pixel grooves are arranged in the first film thickness test area and the second film thickness test area, and the areas of all the pixel grooves are the same;
sequentially printing a first ink material, a second ink material and a third ink material in a pixel groove in the first film thickness test area;
after a first time interval, sequentially printing a first ink material, a second ink material and a third ink material with the same drop number as the second film thickness test area in a pixel groove in the second film thickness test area;
calculating average film forming thicknesses in pixel grooves of the first film thickness test area and the second film thickness test area respectively;
and comparing the average film thickness in the pixel grooves of the first film thickness test area and the second film thickness test area, and judging the uniformity of the film thickness of the first ink material, the second ink material and the third ink material.
The application also provides a film thickness detection substrate for realizing the film thickness detection method; at least three ink-jet printing areas are arranged on the film thickness detection substrate at intervals, a plurality of pixel grooves are arranged in each ink-jet printing area, and the areas of all the pixel grooves are the same.
Further, a plurality of pixel grooves in each ink jet printing area are arranged on a straight line.
Further, the film thickness detection substrate is provided with a display area, and the at least three ink-jet printing areas are arranged in the display area and are adjacently arranged; at least one film thickness test area is further arranged in the display area, and the film thickness test area is arranged at the side parts of the at least three ink-jet printing areas; and arranging a plurality of pixel grooves in the film thickness test area, wherein the areas of all the pixel grooves are the same.
The application also provides a display device, display device is equipped with display panel, display panel's luminous layer rete is through the preparation of inkjet printing mode, luminous layer's rete thickness homogeneity is through adopting the membrane thickness detection method that the aforesaid was examined.
The invention has the technical effects that the film thickness detection method, the film thickness detection substrate and the display device are provided, the ink jet printing areas for printing the first ink material, the second ink material and the third ink material are respectively arranged, the plurality of pixel grooves are arranged in each ink jet printing area, the film forming uniformity at the edge position can be ensured, and one ink is independently printed in each ink jet printing area, so that the distortion of film thickness results caused by mutual pollution at the boundary positions of different inks is avoided.
Drawings
Technical solutions and other advantageous effects of the present application will be made apparent from the following detailed description of specific embodiments of the present application with reference to the accompanying drawings.
Fig. 1 is a flowchart of a film thickness detection method according to an embodiment of the present application.
Fig. 2 is a schematic structural diagram of a film thickness detection substrate according to an embodiment of the present application.
Fig. 3 is a flowchart of a step of determining film thickness uniformity of printing the first ink material, the second ink material and the third ink material according to the relationship between the number of ink droplets and the thickness value of the film layer corresponding to each ink jet printing area provided in embodiment 1 of the present application.
Fig. 4 is a graph of ink drop count versus film thickness values for corresponding RGB pixels of HIL ink provided in an embodiment of the present application.
Fig. 5 is a flowchart of a step of determining film thickness uniformity of printing the first ink material, the second ink material and the third ink material according to the relationship between the number of ink droplets and the thickness value of the film layer corresponding to each ink jet printing area provided in embodiment 2 of the present application.
Fig. 6 is a diagram of a comparison of ink drops before and after printing in a pixel slot in an inkjet printing area according to an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It will be apparent that the described embodiments are only some, but not all, of the embodiments of the present application. All other embodiments, which can be made by those skilled in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application.
Example 1
In order to achieve the above object, as shown in fig. 1, in combination with the film thickness detection substrate structure shown in fig. 2, a film thickness detection method is provided in embodiment 1 of the present invention, and the film thickness detection method includes the following steps:
s1, at least three ink-jet printing areas are arranged on a film thickness detection substrate at intervals, a plurality of pixel grooves are arranged in each ink-jet printing area, and the areas of all the pixel grooves are the same;
s2, respectively printing a first ink material, a second ink material and a third ink material in each ink-jet printing area, wherein in each ink-jet printing area, the number of ink drops in the ink-jet printing of a plurality of pixel grooves is sequentially increased according to the preset sequence of the number of ink drops;
s3, according to a preset sequence of the ink drop numbers, obtaining film layer thickness values of a plurality of pixel grooves in each ink-jet printing area, and drawing a relation curve of the ink drop numbers and the film layer thickness values of each ink-jet printing area;
s4, respectively judging the uniformity of the film thickness of the first ink material, the second ink material and the third ink material according to the relation curve of the ink drop number and the film thickness value corresponding to each ink jet printing area.
Gaps exist among the three ink-jet printing areas, a circle of blank positions are reserved around each ink-jet printing area, a plurality of ink-jet printing areas are arranged at intervals, and the purpose of avoiding mutual pollution among inks from affecting film thickness data accuracy is achieved. Providing a plurality of pixel grooves in each ink jet printing area can ensure uniform film formation at the edge locations.
The embodiment is suitable for detecting the uniformity of the film thickness of the light emitting layer of the organic electroluminescent diode, so that the first ink material, the second ink material and the third ink material are respectively ink materials for manufacturing the hole injection layer, the hole transport layer and the light emitting material layer, and specifically, the first ink material, the second ink material and the third ink material.
In the step of arranging a plurality of pixel grooves in each ink-jet printing area, the number of the arranged pixel grooves is N; the number of ink drops in the ink jet printing in the plurality of pixel grooves in each ink jet printing area is sequentially increased drop by drop; wherein N is an integer.
The preset sequence of the ink drop numbers is in an increasing or decreasing mode, the preset sequence of the ink drop numbers is preferably in an increasing mode, and the ink drop numbers of the ink jet printing in a plurality of pixel grooves in each ink jet printing area are sequentially 0,1,2, … … and N-1; at this time, the pixel groove having the ink droplet count of 0 forms a blank control group.
It may also be preferable that the number of ink droplets ink jet printed in the plurality of pixel cells in each ink jet printing area is 1,2, … …, N-1, N in order.
For example, in a case where three ink jet printing areas are provided on a film thickness detection substrate at intervals, eight pixel grooves, i.e., n=8, are provided in each of the ink jet printing areas, and are divided into eight small areas, and the number of ink droplets printed in the eight pixel grooves is sequentially 0,1,2,3,4,5,6,7 or sequentially 1,2,3,4,5,6,7,8 in such a manner that the number of ink droplets is equal to 1. The difference between the film thicknesses in any adjacent pixel grooves is the film thickness formed by one drop of ink.
The application only prints hole injection layer ink in the first ink-jet printing area, only prints hole transport layer ink in the second ink-jet printing area, only prints luminescent material layer ink in the third ink-jet printing area, and through printing an ink in each ink-jet printing area alone, avoid having mutual pollution to lead to film thickness result distortion at the juncture position at different inks.
To prevent the influence of VCD (vacuum-drying) and baking (bak) drying, data collection was performed only on the film thickness in the pixel cell.
As shown in fig. 3, in this embodiment, the step of determining film thickness uniformity of printing the first ink material, the second ink material and the third ink material according to the relationship curve between the number of ink droplets and the film thickness value corresponding to each ink jet printing area includes:
s11, acquiring the ink type of the ink jet printing in each ink jet printing area;
s12, constructing a linear function Y=aX+b for the relation curve of the number of ink drops and the film thickness value corresponding to each ink jet printing area, wherein X represents the ink volume corresponding to the number of ink drops, Y represents the film thickness value corresponding to the number of ink drops, a represents the slope, and b represents the film thickness parameter;
s13, calculating the linear correlation degree R of the linear function Y=aX+b corresponding to each ink-jet printing area 2 ；
S14, according to |R 2 -1| determining film thickness uniformity of printing the first, second and third ink materials per ink jet printing zone, wherein |R 2 A smaller value of-1 indicates a better uniformity of the film thickness.
As shown in fig. 4, since the light emitting efficiency and light color of the OLED device are closely related to the film thickness of each layer of the light emitting layer, the film thickness is precisely printed to obtain the OLED device with the best performance; taking the HIL tool (embossing pattern) as an example, using the same HIL ink, because the ink is printed in a mode that the volume of each drop of ink is the same and the drop by drop increases, defining one drop of ink as X pl, setting the thickness of 1-8 drops of ink to be printed into RGB pixels, and performing film thickness test after the printing process is finished to obtain a drop number-film thickness relation curve Y=ax+b, R 2 Indicating a degree of linear correlation, a closer to 1 indicates more reliable data.
In fig. 4, for HIL ink, three types of pixels can be classified as R, G, B according to RGB pixels, and a linear function formed by a relation curve of the ink droplet count of HIL-R for R pixel and the film thickness value is calculated as y=12.27x+4.5078, R thereof 2 =0.9941. The linear function of the ink drop count versus film thickness value for HIL-G for the G pixel was calculated as y= 12.823x-4.1085, R 2 = 0.0.9919. The linear function formed by the plot of ink drop number versus film thickness value for HIL-B for B pixels was calculated as y=9.6459x+0.7298, R 2 ＝0.9908。
Due to the RGB pixel opening differences, the G pixel opening is minimal, the thicker the final film is printed for the same volume of ink. Therefore, the application sets the areas of all pixel grooves to be the same.
The relation curve of the ink drop number and the film thickness value can also be called a film thickness Tool curve, and an incremental printing mode with different drop numbers at intervals can be set during printing so as to obtain the film thickness Tool curve; at this time, the slope of the film thickness Tool curve is a multiple of the single drop interval printing method.
Further, the film thickness detection method further includes the steps of:
at least one film thickness test area is further arranged on the film thickness detection substrate, a plurality of pixel grooves are arranged in the film thickness test area, and the areas of all the pixel grooves are the same; that is, the structure of the film thickness test region is set to be the same as that of the ink jet printing region;
sequentially printing a drop of first ink material, second ink material and third ink material in a pixel groove of the film thickness test area;
calculating the average film forming thickness in the pixel groove of the film thickness test area;
calculating the average film thickness of printing one drop of the first ink material, the second ink material and the third ink material in each ink-jet printing area;
and comparing the average film forming thickness in the pixel groove of the film thickness test area with the average film forming thickness of one drop of first ink material, second ink material and third ink material printed in all the ink jet printing areas, and respectively judging the uniformity of the film forming thickness of the first ink material, the second ink material and the third ink material printed.
The film thickness testing area is arranged, so that the film thickness uniformity of the first ink material, the second ink material and the third ink material is judged and printed in a film thickness comparison mode of the film thickness testing area and the ink jet printing area, the film thickness monitoring comparison judging mode is increased, and the function singleness is avoided.
Further, the film thickness detection method further includes the steps of:
a first film thickness test area and a second film thickness test area are arranged on the film thickness detection substrate, a plurality of pixel grooves are arranged in the first film thickness test area and the second film thickness test area, and the areas of all the pixel grooves are the same;
sequentially printing a first ink material, a second ink material and a third ink material in a pixel groove in the first film thickness test area;
after a first time interval, sequentially printing a first ink material, a second ink material and a third ink material with the same drop number as the second film thickness test area in a pixel groove in the second film thickness test area;
calculating average film forming thicknesses in pixel grooves of the first film thickness test area and the second film thickness test area respectively;
and comparing the average film thickness in the pixel grooves of the first film thickness test area and the second film thickness test area, and judging the uniformity of the film thickness of the first ink material, the second ink material and the third ink material.
And printing the first ink material, the second ink material and the third ink material (i.e. HIL+HTL+EML ink) in the upper and lower film thickness test areas of the ink jet printing area so as to monitor the film thickness in the actual printing process and confirm the uniformity of the film formed on the substrate.
The film thickness testing areas are arranged, film thickness uniformity of the first ink material, the second ink material and the third ink material is judged and printed through film thickness comparison modes among the film thickness testing areas, the film thickness monitoring comparison judging modes are increased, and single functions are avoided.
Example 2
As shown in fig. 5, embodiment 2 includes all the technical features of embodiment 1, and the difference is that in embodiment 2, the step of determining film thickness uniformity of printing the first ink material, the second ink material and the third ink material according to the relationship between the number of ink droplets and the film thickness value corresponding to each ink jet printing area includes:
s21, acquiring ink types of ink jet printing in each ink jet printing area;
s22, calculating the difference value of the film forming thickness of two adjacent ink drops according to the relation curve of the ink drop number and the film thickness value corresponding to each ink jet printing area, and taking the difference value as the film forming thickness of the next ink drop;
s23, calculating the variance of film forming thickness of all single-drop ink in each ink-jet printing area;
s24, judging the uniformity of the film forming thickness of the first ink material, the second ink material and the third ink material printed in each ink jet printing area according to the variance, wherein the smaller the variance value is, the better the uniformity of the film forming thickness is.
According to the method, the uniformity of the film thickness of the first ink material, the second ink material and the third ink material printed in each ink-jet printing area can be judged according to the variance mode of the film thickness, the film thickness monitoring comparison judging mode is increased, and single functions are avoided.
Based on the same inventive concept as the film thickness detection method, the present application further provides a film thickness detection substrate for implementing the film thickness detection method; wherein, at least three ink jet printing areas 1 are arranged on the film thickness detection substrate at intervals, a plurality of pixel grooves 2 are arranged in each ink jet printing area, and the areas of all the pixel grooves 2 are the same.
As shown in fig. 2, a plurality of pixel grooves 2 in each inkjet printing area 1 are arranged on a straight line.
As shown in fig. 2, the film thickness detection substrate is provided with a display area 3, and the at least three ink jet printing areas 1 are arranged in the display area 3 and are adjacently arranged; at least one film thickness test area 4 is further arranged in the display area 3, and the film thickness test area 4 is arranged at the side parts of the at least three ink-jet printing areas 1; a plurality of pixel grooves 2 are provided in the film thickness test region 4, and the areas of all the pixel grooves 2 are the same.
As shown in fig. 6, a comparison of the front and rear of the ink droplets 5 printed in the pixel grooves 2 in the ink jet printing area 1 is shown.
The application also provides a display device, display device is equipped with display panel, display panel's luminous layer rete is through the preparation of inkjet printing mode, luminous layer's rete thickness homogeneity is through adopting the membrane thickness detection method that the aforesaid was examined.
The invention has the technical effects that the film thickness detection method, the film thickness detection substrate and the display device are provided, the ink jet printing areas for printing the first ink material, the second ink material and the third ink material are respectively arranged, the plurality of pixel grooves are arranged in each ink jet printing area, the film forming uniformity at the edge position can be ensured, and one ink is independently printed in each ink jet printing area, so that the distortion of film thickness results caused by mutual pollution at the boundary positions of different inks is avoided.
In the foregoing embodiments, the descriptions of the embodiments are emphasized, and for parts of one embodiment that are not described in detail, reference may be made to related descriptions of other embodiments.
The foregoing describes in detail a film thickness detection method, a film thickness detection substrate and a display device provided in the embodiments of the present application, and specific examples are applied to illustrate the principles and embodiments of the present application, where the foregoing description of the embodiments is only used to help understand the technical solution and core idea of the present application; those of ordinary skill in the art will appreciate that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.
Claims (10)
1. A film thickness detection method, characterized by comprising the steps of:
at least three ink-jet printing areas are arranged on a film thickness detection substrate at intervals, a plurality of pixel grooves are arranged in each ink-jet printing area, and the areas of all the pixel grooves are the same;
printing a first ink material, a second ink material and a third ink material in each ink-jet printing area respectively, and in each ink-jet printing area, ink which is printed in an ink-jet manner in a plurality of pixel grooves according to a preset sequence of the number of ink drops;
according to a preset sequence of the ink drop numbers, obtaining film layer thickness values of a plurality of pixel grooves in each ink-jet printing area, and drawing a relation curve of the ink drop numbers and the film layer thickness values of each ink-jet printing area;
and respectively judging the uniformity of the film thickness of the first ink material, the second ink material and the third ink material according to the relation curve of the ink drop number and the film thickness value corresponding to each ink jet printing area.
2. The method according to claim 1, wherein in the step of disposing a plurality of pixel grooves in each of the ink-jet printing areas, the number of pixel grooves disposed is N; the number of ink drops in the ink jet printing in the plurality of pixel grooves in each ink jet printing area is sequentially increased drop by drop; wherein N is an integer.
3. The method according to claim 1, wherein the step of determining film thickness uniformity of printing the first ink material, the second ink material, and the third ink material according to the relationship between the number of ink droplets and the film thickness value for each ink jet printing area, respectively, comprises:
acquiring the ink type of the inkjet printing in each inkjet printing area;
constructing a linear function Y=aX+b for the relation curve of the number of ink drops and the film thickness value corresponding to each ink jet printing area, wherein X represents the ink volume corresponding to the number of ink drops, Y represents the film thickness value corresponding to the number of ink drops, a represents the slope, and b represents the film thickness parameter;
calculating the linear correlation degree R of the corresponding linear function Y=aX+b of each ink-jet printing zone 2 ；
According to |R 2 -1| determining film thickness uniformity of printing the first, second and third ink materials per ink jet printing zone, wherein |R 2 A smaller value of-1 indicates a better uniformity of the film thickness.
4. The method according to claim 1, wherein the step of determining film thickness uniformity of printing the first ink material, the second ink material, and the third ink material according to the relationship between the number of ink droplets and the film thickness value for each ink jet printing area, respectively, comprises:
acquiring the ink type of the inkjet printing in each inkjet printing area;
calculating the difference value of the film forming thickness of two adjacent ink drops according to the relation curve of the ink drop number and the film thickness value corresponding to each ink jet printing area, and taking the difference value as the film forming thickness of the next ink drop;
calculating the variance of film thickness of all single drops of ink in each ink-jet printing zone;
and judging the uniformity of the film forming thickness of each ink jet printing area for printing the first ink material, the second ink material and the third ink material according to the variance, wherein the smaller the variance value is, the better the uniformity of the film forming thickness is.
5. The method for detecting a film thickness according to claim 1, further comprising the steps of:
at least one film thickness test area is further arranged on the film thickness detection substrate, a plurality of pixel grooves are arranged in the film thickness test area, and the areas of all the pixel grooves are the same;
sequentially printing a drop of first ink material, second ink material and third ink material in a pixel groove of the film thickness test area;
calculating the average film forming thickness in the pixel groove of the film thickness test area;
calculating the average film thickness of printing one drop of the first ink material, the second ink material and the third ink material in each ink-jet printing area;
and comparing the average film forming thickness in the pixel groove of the film thickness test area with the average film forming thickness of one drop of first ink material, second ink material and third ink material printed in all the ink jet printing areas, and respectively judging the uniformity of the film forming thickness of the first ink material, the second ink material and the third ink material printed.
6. The method for detecting a film thickness according to claim 1, further comprising the steps of:
a first film thickness test area and a second film thickness test area are arranged on the film thickness detection substrate, a plurality of pixel grooves are arranged in the first film thickness test area and the second film thickness test area, and the areas of all the pixel grooves are the same;
sequentially printing a first ink material, a second ink material and a third ink material in a pixel groove in the first film thickness test area;
after a first time interval, sequentially printing a first ink material, a second ink material and a third ink material with the same drop number as the second film thickness test area in a pixel groove in the second film thickness test area;
calculating average film forming thicknesses in pixel grooves of the first film thickness test area and the second film thickness test area respectively;
and comparing the average film thickness in the pixel grooves of the first film thickness test area and the second film thickness test area, and judging the uniformity of the film thickness of the first ink material, the second ink material and the third ink material.
7. A film thickness detection substrate for realizing the film thickness detection method according to any one of claims 1 to 6;
at least three ink-jet printing areas are arranged on the film thickness detection substrate at intervals, a plurality of pixel grooves are arranged in each ink-jet printing area, and the areas of all the pixel grooves are the same.
8. The film thickness detection substrate according to claim 7, wherein a plurality of pixel grooves in each of the ink jet printing regions are arranged on a straight line.
9. The film thickness detection substrate according to claim 7, wherein the film thickness detection substrate is provided with a display area, the at least three inkjet printing areas are provided in the display area with a gap between two adjacent inkjet printing areas;
at least one film thickness test area is further arranged in the display area, and the film thickness test area is arranged at the side parts of the at least three ink-jet printing areas; and arranging a plurality of pixel grooves in the film thickness test area, wherein the areas of all the pixel grooves are the same.
10. A display device provided with a display panel, wherein a light-emitting layer film of the display panel is produced by an inkjet printing method, and uniformity of film thickness of the light-emitting layer is checked by using the film thickness detection method according to any one of claims 1 to 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310384234.XA CN117479801A (en) | 2023-04-03 | 2023-04-03 | Film thickness detection method, film thickness detection substrate and display device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310384234.XA CN117479801A (en) | 2023-04-03 | 2023-04-03 | Film thickness detection method, film thickness detection substrate and display device |
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| Publication Number | Publication Date |
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| CN117479801A true CN117479801A (en) | 2024-01-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202310384234.XA Pending CN117479801A (en) | 2023-04-03 | 2023-04-03 | Film thickness detection method, film thickness detection substrate and display device |
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| Country | Link |
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| CN (1) | CN117479801A (en) |
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- 2023-04-03 CN CN202310384234.XA patent/CN117479801A/en active Pending
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