CN117471136A - Probe - Google Patents

Abstract

The probe according to an embodiment of the present invention includes: a first contact portion; a second contact portion; an intermediate portion provided between the first contact portion and the second contact portion; a first elastic portion connected to the first contact portion and the intermediate portion, and extending and contracting along an arrangement direction in which the first contact portion and the second contact portion are connected; a second elastic portion connected to the intermediate portion and the second contact portion and extending and contracting in the arrangement direction; and a side wall portion extending from the intermediate portion in the arrangement direction.

Description

Probe

Technical Field

The present invention relates to a probe.

Background

Unless otherwise indicated herein, what is described in this section does not constitute prior art to the claims in this application and is not admitted to be prior art by inclusion in this section.

Generally, a semiconductor Module refers to a generic term for a circuit board or the like including stacked semiconductor elements for performing a specific function, and includes, for example, a Display Module (Display Module), a Camera Module (Camera Module), a communication Module, a memory card, a video card, a telephone socket Module (Phone Socket Module), a semiconductor probe card, and the like.

The module socket is a device mounted for electrically connecting such a semiconductor module to a circuit board such as a motherboard, and may be provided to electrically connect to a connection structure of the circuit board, and a predetermined function is realized by inserting connection terminals of the semiconductor module into the socket.

The conventional module socket performs insertion and removal in the form of a forced engagement inserted by forcibly pushing the semiconductor module toward the upper portion of the socket pins included in the module socket. Therefore, the product has a problem of damage due to excessive friction.

In addition, recently, with the high integration of semiconductor modules, circuit patterns formed on a wafer by a manufacturing process become highly integrated, and thus a pitch between adjacent contact pads, i.e., a pitch (pitch), is formed very narrow.

Therefore, to reduce the spacing of adjacent pins, the thickness of each pin is designed to be thin.

However, as described above, when the thickness of the leads is thinned, the strength is lowered, so that a lateral force applied in the inspection process causes damage to the leads or damage to the contact pads on the wafer in contact with the leads.

In addition, if there is a step difference in the contact pads of the wafer to be inspected, there is a problem in that the contact pads cannot be brought into contact with the specific probes, and thus accurate inspection cannot be performed.

Thus, conventionally, a pin of a spring structure is used, but since the spring structure is formed in a zigzag shape, a path of a current from an upper end contact portion abutting against an inspection device in contact with a semiconductor to a lower end contact portion abutting against an inspection object increases, resulting in an increase in a contact resistance value.

In addition, there is a problem in that the spring structure is deformed due to loss of elastic restoring force by a lateral force applied in the inspection process.

Prior art literature

Patent literature

Korean patent No. 10-0984876 (10 th 2010 4 th announcement)

Disclosure of Invention

Problems to be solved by the invention

The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a probe in which a path of a current to a second contact portion is shortened by including a side wall portion in the probe having an elastic portion, thereby reducing a contact resistance value.

The problems to be solved by the present invention are not limited to the above-mentioned problems, and other non-mentioned problems will be clearly understood by those skilled in the art from the following description.

Solution for solving the problem

The probe according to an embodiment of the present invention may include: a first contact portion; a second contact portion; an intermediate portion provided between the first contact portion and the second contact portion; a first elastic portion connected to the first contact portion and the intermediate portion, and extending and contracting along an arrangement direction in which the first contact portion and the second contact portion are connected; a second elastic portion connected to the intermediate portion and the second contact portion and extending and contracting in the arrangement direction; and a side wall portion extending from the intermediate portion in the arrangement direction.

The first elastic portion may be connected to form a zigzag by at least one first straight portion and at least one first curved portion, and the second elastic portion may be connected to form a zigzag by at least one second straight portion and at least one second curved portion.

The side wall portion may include: a first sidewall located at one side of the probe, the first sidewall may include: a first region extending along the arrangement direction to the first contact portion; and a second region extending along the arrangement direction to the second contact portion.

The side wall portion may further include: a second sidewall located at the other side corresponding to the one side of the probe, the second sidewall may include: a third region extending along the arrangement direction to the first contact portion; and a fourth region extending along the arrangement direction to the second contact portion.

A predetermined first gap may be provided between at least one of the first curved portion and the second curved portion and the side wall portion.

When the probe is brought into contact with the object through the first contact portion and the second contact portion, at least a partial region of the side wall portion facing the first bending portion and the second bending portion may be brought into contact with any partial region of the first bending portion and the second bending portion.

At least a partial region of the sidewall portion facing the first and second curved portions may be formed with a predetermined pattern structure.

The pattern structure may include a wave-shaped structure.

The predetermined first gap may be a distance between at least one of the first curved portion and the second curved portion and a peak formed in the sidewall portion.

The probe may further include a cover portion positioned in front of and behind the intermediate portion, the first elastic portion, the second elastic portion, and the side wall portion.

The cover portion may have at least one through hole formed in one direction.

Effects of the invention

According to the present invention constituted by the solution as described above, the following effects are provided.

The probe according to an embodiment of the present invention includes the side wall portion extending in the arrangement direction, and shortens the path of the current to the second contact portion, so that the contact resistance value at the second contact portion can be reduced.

The effects of the present invention are not limited to the above-mentioned effects, and other effects not mentioned will be clearly understood by those skilled in the art from the following description.

Drawings

Fig. 1 is a top view showing a probe according to an embodiment of the present invention.

FIG. 2 is a top view of the probe after a lateral force is applied, illustrating an embodiment of the present invention.

FIG. 3 is a diagram showing the use of the probe according to an embodiment of the present invention.

Fig. 4 is a graph showing a Force (Force) and a contact resistance value generated at the second contact portion by a distance by which the probe is compressed by a lateral Force according to an embodiment of the present invention.

Fig. 5a is a diagram illustrating current flow in a probe before a lateral force is applied in accordance with an embodiment of the present invention.

Fig. 5b is a diagram illustrating the current flow in the probe after a lateral force is applied in accordance with an embodiment of the present invention.

Fig. 6 is a top view showing a probe according to another embodiment of the present invention.

Fig. 7 is a top view showing a probe after a lateral force is applied according to another embodiment of the present invention.

FIG. 8 is a view showing a state of use of a probe according to another embodiment of the present invention.

Fig. 9a to 9d are diagrams showing a space between an elastic portion and a side wall portion in a probe according to another embodiment of the present invention.

Fig. 10 is a diagram showing the flow of current in a probe according to another embodiment of the present invention.

FIG. 11 is a perspective view of a probe according to yet another embodiment of the present invention.

Fig. 12 is an exploded perspective view of a probe according to yet another embodiment of the present invention.

Fig. 13a is a front view of a cover in a probe according to yet another embodiment.

Fig. 13b is a top view of a probe according to yet another embodiment of the invention.

Fig. 13c is a diagram showing a relationship between a gap between an elastic portion and a cover portion and a width of a probe in a probe according to still another embodiment of the present invention.

Fig. 13d is a graph showing a force and a contact resistance value generated at the second contact portion by a distance by which the probe is compressed by a lateral force according to still another embodiment of the present invention, according to a distance between the elastic portion and the cover portion.

Fig. 13e is a graph showing a force and a contact resistance value generated at the second contact portion by a distance by which the probe is compressed by a lateral force according to still another embodiment of the present invention, according to a distance between the elastic portion and the cover portion.

Description of the reference numerals

10: probe with a probe tip

100: a first contact part

200: a second contact part

201: bending groove

300: intermediate portion

400: a first elastic part

410: first straight line portion

420: a first bending part

500: a second elastic part

510: a second straight line part

520: a second bending part

600: side wall portion

610: first side wall

611: first region

613: second region

620: a second side wall

621: third region

623: fourth region

700: a cover part.

Detailed Description

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those having ordinary skill in the art can easily implement the same. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. For the purpose of clearly illustrating the present invention, parts irrelevant to the description are omitted in the drawings, and like parts are given like reference numerals throughout the specification.

Throughout this specification, when a portion is referred to as "comprising" a component, it is meant that it does not exclude other components, and may further comprise other components, unless otherwise indicated. In the present specification, the term "connected" between a certain portion and another portion includes not only a case of direct connection but also a case of connection with another member interposed therebetween and a case of electrical connection with another member interposed therebetween. In addition, in the entire specification, when a certain component is referred to as being "on" another component, this includes not only a case where the certain component is in contact with the other component but also a case where there is another component between the two components. In addition, expressions such as "first," "second," and the like, used in this specification may modify various components without regard to order and/or importance, which are used merely to distinguish one component from another component and do not limit the component, and do not necessarily mean other components. For example, "first direction" and "second direction" may represent the same direction, or may represent different directions.

Fig. 1 is a plan view showing a probe 10 according to an embodiment of the present invention, fig. 2 is a plan view showing the probe 10 according to an embodiment of the present invention after a lateral force is applied thereto, and fig. 3 is a view showing a state of use of the probe 10 according to an embodiment of the present invention.

The probe 10 may include: the first contact portion 100, the second contact portion 200, the intermediate portion 300, the first elastic portion 400, the second elastic portion 500, and the side wall portion 600.

Wherein the first contact part 100 is formed with at least one contact protrusion protruding upward toward the inspection device, through which it can be contacted with the inspection device.

For example, as shown in fig. 1 to 3, three contact protrusions are preferably formed to contact the inspection device, but not limited thereto, at least one contact protrusion such as a single contact protrusion, a plurality of contact protrusions, or the like may be formed.

In addition, the second contact portion 200 includes a contact terminal extending to a lower portion, and an electrical signal may be applied by the contact terminal contacting contact pads formed on the printed circuit board and the wafer.

Wherein the width of the contact terminal can be formed longer to prevent deformation or damage caused by a lateral force.

The intermediate portion 300 may be disposed between the first contact portion 100 and the second contact portion 200.

The intermediate portion 300 may be formed in a plate shape extending in a direction (for example, an orthogonal direction) intersecting an arrangement direction in which the first contact portion 100 and the second contact portion 200 are connected, between the first contact portion 100 and the second contact portion 200.

The intermediate portion 300 is provided between the first contact portion 100 and the second contact portion 200 to separate the first elastic portion 400 and the second elastic portion 500, and thus forces generated at the first contact portion 100 and the second contact portion 200 by lateral forces in accordance with an arrangement direction in which the first contact portion 100 and the second contact portion 200 are connected do not affect each other, whereby stability of the first contact portion 100 and the second contact portion 200 can be improved, and stability can be maintained against external vibrations or external forces.

The first elastic portion 400 is connected to the first contact portion 100 and the intermediate portion 300, and is stretchable along the arrangement direction in which the first contact portion 100 and the second contact portion 200 are connected.

Referring to fig. 1 to 3, the first elastic part 400 may be formed in a zigzag shape by connecting at least one first straight part 410 and at least one first curved part 420.

In addition, as shown in fig. 2, when the probe 10 is applied with a lateral force, the first elastic portion 400 is compressively deformed in the vertical direction so that the first bending portion 420 can be displaced in both sides according to the strength of the lateral force to approach or abut against the sidewall portion 600.

The second elastic portion 500 is connected to the intermediate portion 300 and the second contact portion 200, and is stretchable in the arrangement direction.

Referring to fig. 1 to 3, the second elastic part 500 may be formed in a zigzag shape by connecting at least one second straight part 510 and at least one second curved part 520.

When the probe 10 is applied with a lateral force, the second elastic portion 500 is compressively deformed in the vertical direction, and the second bending portion 520 may be displaced in both sides according to the strength of the lateral force to approach or abut against the sidewall portion 600.

In addition, the side wall portion 600 may be formed in a plate shape extending from the intermediate portion 300 in the arrangement direction.

Since the sidewall part 600 extends in both directions from the middle part 300, it is possible to prevent the first elastic part 400 and the second elastic part 500 from being unable to be restored by the elastic restoring force when the probe 10 is applied with the lateral force so that the outer shape is deformed. In addition, since the sidewall 600 is located at one side of the probe 10, the insertion process of the probe 10 into the inspection apparatus is facilitated, and the work efficiency can be improved. That is, the sidewall part 600 may serve as a guide for the actions of the first and second elastic parts 400 and 500.

As shown in fig. 1 to 3, the sidewall part 600 may include a first sidewall 610 located at one side of the probe 10, and the first sidewall 610 may include: a first region 611 extending to the first contact portion 100 along the arrangement direction; and a second region 613 extending to the second contact portion 200 along the arrangement direction.

The first region 611 of the first sidewall 610 is connected with the middle portion 300, and one end thereof may be formed corresponding to the position of the first contact portion 100, but is not limited thereto. For example, one end of the first region 611 may be bent toward the first contact portion 100 to function to prevent the first contact portion 100 from being separated to the outside.

The second region 613 of the first sidewall 610 is connected to the middle portion 300, and one end thereof may be formed corresponding to the position of the second contact portion 200, but is not limited thereto. For example, one end of the second region 613 may be bent in the direction of the second contact portion 200 to function to prevent the second contact portion 200 from being separated to the outside.

Fig. 6 is a plan view showing a probe 10 according to another embodiment of the present invention, fig. 7 is a plan view showing the probe 10 according to another embodiment of the present invention after a lateral force is applied, and fig. 8 is a view showing a use state of the probe 10 according to another embodiment of the present invention.

Referring to fig. 6 to 8, the sidewall part 600 may further include a second sidewall 620 located at one side of the probe 10, and the second sidewall 620 may include: a third region 621 extending to the first contact portion 100 along the arrangement direction; and a fourth region 623 extending along the arrangement direction to the second contact portion 200.

The third area 621 of the second sidewall 620 is connected to the middle portion 300, and one end thereof may be formed corresponding to the position of the first contact portion 100, but is not limited thereto. For example, one end of the third region 621 may be bent in the direction of the first contact portion 100 to function to prevent the first contact portion 100 from being separated to the outside.

The fourth region 623 of the second sidewall 620 is connected to the middle portion 300, and one end thereof may be formed corresponding to the position of the second contact portion 200, but is not limited thereto. For example, one end of the fourth region 623 may be bent toward the second contact portion 200 to function to prevent the second contact portion 200 from being separated to the outside.

In addition, the thickness of the fourth region 623 of the second sidewall 620 may be formed to be thinner than that of the third region 621, and the second contact portion 200 may be formed with the bending groove 201 at a position opposite to the fourth region 623 such that the second contact portion 200 may be displaced upward when the second elastic portion 500 is compressed by a lateral force.

Fig. 9a is a view for enlarging the interval between the elastic parts 400, 500 and the sidewall part 600 in the probe 10 according to another embodiment of the present invention.

Referring to fig. 9a, a predetermined first gap S may exist between at least one of the first curved portion 420 and the second curved portion 520 and the sidewall portion 600.

In addition, at least a partial region of the sidewall part 600 facing the first and second curved parts 420 and 520 may be formed with a predetermined pattern structure.

For example, as shown in fig. 9a, a predetermined pattern structure in a partial region of the sidewall part 600 is formed in a wave-shaped structure, and an area of the sidewall part 600 facing the first and second curved parts 420 and 520, which is contacted when contacted, is increased, so that current can smoothly move along the sidewall part 600.

For another example, the predetermined pattern structure may include not only a wavy structure but also a structure having a periodic shape such as a zigzag shape.

The predetermined pattern structure may be formed in at least a part or all of the areas of the sidewall part 600 facing the first and second curved parts 420 and 520, thereby adjusting the contact resistance value of the probe 10.

In addition, the preset first gap S may be represented by a distance between at least one of the first curved portion 420 and the second curved portion 520 and a peak formed at the sidewall portion 600.

As described above, when the probe 10 is applied with a lateral force, the first and second elastic parts 400 and 500 are compressively deformed in the vertical direction, and the first and second curved parts 420 and 520 are displaced in both sides according to the strength of the lateral force, and thus, a predetermined first gap S is formed between at least one of the first and second curved parts 420 and 520 and the sidewall part 600, so that the force generated at the second contact part 200 can be reduced.

Fig. 4 is a graph showing Force (Force) and contact resistance values generated at the second contact portion 200 by a distance by which the probe 10 is compressed by a lateral Force according to an embodiment of the present invention, fig. 5a is a graph showing current flow in the probe 10 before the lateral Force is applied according to an embodiment of the present invention, fig. 5b is a graph showing current flow in the probe 10 after the lateral Force is applied according to an embodiment of the present invention, and fig. 10 is a graph showing current flow in the probe 10 according to another embodiment of the present invention.

Referring to fig. 4 to 5b and 10, when the probe 10 is in contact with an object through the first and second contact portions 100 and 200, at least partial areas of the sidewall portions 600 facing the first and second curved portions 420 and 520 may be in contact with any partial areas of the first and second curved portions 420 and 520.

Referring to the right view of fig. 4, it can be confirmed that as the distance by which the probe 10 is compressed by the lateral force increases, the contact resistance value generated according to the current path from the first contact portion 100 to the second contact portion 200 of the probe 10 corresponding to an embodiment of the present invention decreases as compared to the conventional probe.

For example, referring to fig. 5a, in the probe 10 before being applied with a lateral force according to an embodiment of the present invention, the current flow F1 from the first contact part 100 to the second contact part 200 is constituted by a path along which all components of the first elastic part 400 and the second elastic part 500 move in a zigzag shape.

On the other hand, referring to fig. 5b, unlike the conventional path, in the probe 10 according to an embodiment of the present invention, the current flow F2 from the first contact part 100 to the second contact part 200 is constituted by a path detouring along the second region 613 of the first sidewall 610, and since the current uses a path shorter than the conventional path, it is possible to reduce the contact resistance value generated according to the current flow from the first contact part 100 to the second contact part 200.

For another example, referring to fig. 10, in the probe 10 before the lateral force is applied in another embodiment of the present invention, the current flow F1 from the first contact part 100 to the second contact part 200 may be constituted by a path moving in a zigzag shape along the first elastic part 400 and the second elastic part 500.

On the other hand, in the probe 10 after the lateral force is applied in another embodiment of the present invention, the current flow F2 from the first contact portion 100 to the second contact portion 200 is constituted by a path along which the first region 611 and the second region 613 of the first sidewall 610 move and a path along which the third region 621 and the fourth region 623 of the second sidewall 620 move, whereby the contact resistance value generated according to the current flow from the first contact portion 100 to the second contact portion 200 can be reduced.

As described above, as the contact resistance value generated in the second contact portion 200 decreases, the occurrence of measurement errors due to a minute change in the electric signal at the time of inspection can be reduced.

Fig. 9b is a diagram showing a relationship between a space between the elastic parts 400, 500 and the sidewall part 600 and a width W of the probe 10 in the probe 10 according to another embodiment of the present invention; fig. 9c is a graph showing Force (Force) and contact resistance values generated at the second contact portion 200 by the distance the probe 10 is compressed by a lateral Force according to another embodiment of the present invention, according to the interval between the elastic portions 400, 500 and the sidewall portion 600; fig. 9d is a graph showing a Force (Force) and a contact resistance value generated at the second contact portion 200 by a distance by which the probe 10 is compressed by a lateral Force according to another embodiment of the present invention, according to a distance between the elastic portions 400, 500 and the sidewall portion 600.

Referring to fig. 9b, the gap S may be designed or determined based on a gap constant and the width W of the probe 10. For example, the relationship between the gap S between the elastic portions 400, 500 and the side wall portion 600 and the width W of the probe 10 may be designed to be "S.ltoreq.0.02W".

For example, when the width W of the probe 10 is 500 μm, the gap S between the elastic parts 400, 500 and the sidewall part 600 may be designed to be 10 μm, when the width W of the probe 10 is 800 μm, the gap S between the elastic parts 400, 500 and the sidewall part 600 may be set to be 16 μm, and when the width W of the probe 10 is 1000 μm, the gap S between the elastic parts 400, 500 and the sidewall part 600 may be designed to be 20 μm.

However, the ratio between the gap S between the elastic portions 400, 500 and the side wall portion 600 and the width W of the probe 10 is arbitrarily set, and the ratio may be changed.

In addition, as shown in fig. 9c to 9d, when a lateral force is applied to the probe 10 (the gap is designed to be 15 μm) of an embodiment of the present invention such that the second contact portion 200 is displaced 400 μm toward the inside of the probe 10, a contact resistance value generated according to the flow of current from the first contact portion 100 to the second contact portion 200 may be measured as 163.7mΩ.

On the other hand, when the probe 10 of another embodiment of the present invention is applied with a lateral force such that the second contact portion 200 is displaced 400 μm toward the inside of the probe 10 (the gap is designed to be 15 μm), the contact resistance value generated according to the current flow from the first contact portion 100 to the second contact portion 200 can be measured as 89.6mΩ.

As described above, it was confirmed that in the probe 10 according to the other embodiment of the present invention, the contact resistance value generated according to the current flow from the first contact portion 100 to the second contact portion 200 was smaller than that of the probe 10 according to the one embodiment of the present invention.

In addition, for example, as shown in fig. 9c to 9d, in the probe 10 of another embodiment of the present invention, in the case where the preset first gap S between the elastic parts 400, 500 and the sidewall part 600 is 15 μm, when a lateral Force is applied such that the second contact part 200 is displaced 400 μm toward the inside of the probe 10, a contact resistance value generated according to the flow of current from the first contact part 100 to the second contact part 200 may be measured as 89.6mΩ, and a Force (Force) generated at the second contact part 200 may be measured as 26N.

In addition, for example, as shown in fig. 9c to 9d, in the probe 10 of another embodiment of the present invention, in the case where the preset first gap S between the elastic parts 400, 500 and the sidewall part 600 is 10 μm, when a lateral Force is applied such that the second contact part 200 is displaced 400 μm toward the inside of the probe 10, a contact resistance value generated according to the flow of current from the first contact part 100 to the second contact part 200 may be measured as 70.6mΩ, and a Force (Force) generated at the second contact part 200 may be measured as 26N.

In addition, for example, as shown in fig. 9c to 9d, in the probe 10 of another embodiment of the present invention, in the case where the preset first gap S between the elastic parts 400, 500 and the sidewall part 600 is 5 μm, when a lateral Force is applied such that the second contact part 200 is displaced 400 μm toward the inside of the probe 10, a contact resistance value generated according to the flow of current from the first contact part 100 to the second contact part 200 may be measured as 52.7mΩ, and a Force (Force) generated at the second contact part 200 may be measured as 36.7N.

As described above, it was confirmed that as the preset first gap S was reduced from 15 μm to 10 μm and 5 μm, the contact resistance value of the probe 10 was reduced and the Force (Force) generated at the second contact portion 200 was increased.

FIG. 11 is a perspective view of a probe 10 according to yet another embodiment of the present invention; FIG. 12 is an exploded perspective view of a probe 10 according to yet another embodiment of the present invention; FIG. 13a is a front view of a cover 700 in a probe 10 according to yet another embodiment;

FIG. 13b is a top view of a probe 10 according to yet another embodiment of the present invention; fig. 13c is a diagram showing a relationship between the interval between the elastic parts 400, 500 and the cover part 700 and the width a of the probe 10 in the probe 10 according to still another embodiment of the present invention; FIG. 13d is a graph showing force and contact resistance values generated at a second contact portion by a distance by which a probe according to still another embodiment of the present invention is compressed by a lateral force, according to a distance between an elastic portion and a cover portion; fig. 13e is a graph showing a force and a contact resistance value generated at the second contact portion by a distance by which the probe is compressed by a lateral force according to still another embodiment of the present invention, according to a distance between the elastic portion and the cover portion.

The probe 10 according to still another embodiment of the present invention may further include a cover 700 positioned in front and rear of the intermediate portion 300, the first elastic portion 400, the second elastic portion 500, and the sidewall portion 600.

Referring to fig. 12 to 13c, a predetermined second gap B may exist between the cover 700 and at least one of the first and second elastic parts 400 and 500.

The second gap B may be designed or determined based on the gap constant and the width a of the probe 10.

For example, the relationship between the second gap B between the elastic portions 400, 500 and the side wall portion 600 and the width A of the probe 10 may be designed to be "B.ltoreq.0.03A".

For example, when the width a of the probe 10 is 100 μm, the second gap B between the elastic parts 400, 500 and the cover part 700 may be designed to be 3 μm, when the width a of the probe 10 is 200 μm, the second gap B between the elastic parts 400, 500 and the cover part 700 may be designed to be 6 μm, and when the width a of the probe 10 is 270 μm, the second gap B between the elastic parts 400, 500 and the cover part 700 may be designed to be 8.1 μm.

However, the ratio between the second gap B between the elastic parts 400, 500 and the cover part 700 and the width a of the probe 10 is arbitrarily set, and may be changed.

When the probe 10 is contacted with the object through the first and second contact parts 100 and 200, at least a partial region of the cover part 700 facing the first and second elastic parts 400 and 500 may be contacted with any partial region of the first and second elastic parts 400 and 500.

When the probe 10 is applied with a lateral force, the first elastic part 400 or the second elastic part 500 is bent forward or backward of the cover part 700, so that a portion of the first elastic part 400 or a portion of the second elastic part 500 may approach or abut against the cover part 700 provided forward or backward.

For example, as shown in fig. 13d to 13e, in the probe 10 according to still another embodiment of the present invention, in the case where the predetermined second gap B between the elastic parts 400, 500 and the cover part 700 is 12 μm, when a lateral Force is applied such that the second contact part 200 is displaced 100 μm toward the inside of the probe 10, a contact resistance value generated according to the flow of current from the first contact part 100 to the second contact part 200 may be measured as 138.3mΩ, and a Force (Force) generated at the second contact part 200 may be measured as 8.7N.

For example, as shown in fig. 13d to 13e, in the probe 10 according to still another embodiment of the present invention, in the case where the predetermined second gap B between the elastic parts 400, 500 and the cover part 700 is 10 μm, when a lateral Force is applied such that the second contact part 200 is displaced toward the inside of the probe 10 by 100 μm, a contact resistance value generated according to the flow of current from the first contact part 100 to the second contact part 200 may be measured as 108.8mΩ, and a Force (Force) generated at the second contact part 200 may be measured as 9.2N.

For example, as shown in fig. 13c, in the probe 10 according to still another embodiment of the present invention, in the case where the predetermined second gap B between the elastic parts 400, 500 and the cover part 700 is 8 μm, when a lateral Force is applied such that the second contact part 200 is displaced 100 μm toward the inside of the probe 10, a contact resistance value according to a current flow from the first contact part 100 to the second contact part 200 may be measured as 55.2mΩ, and a Force (Force) generated at the second contact part 200 may be measured as 9.3N.

For example, as shown in fig. 13d to 13e, in the probe 10 according to still another embodiment of the present invention, in the case where the predetermined second gap B between the elastic parts 400, 500 and the cover part 700 is 5 μm, when a lateral Force is applied such that the second contact part 200 is displaced toward the inside of the probe 10 by 100 μm, a contact resistance value generated according to the flow of current from the first contact part 100 to the second contact part 200 may be measured as 48.8mΩ, and a Force (Force) generated at the second contact part 200 may be measured as 9.1N.

For example, as shown in fig. 13d to 13e, in the probe 10 according to still another embodiment of the present invention, in the case where the predetermined second gap B between the elastic parts 400, 500 and the cover part 700 is 2 μm, when a lateral Force is applied such that the second contact part 200 is displaced toward the inside of the probe 10 by 100 μm, a contact resistance value according to a current flow from the first contact part 100 to the second contact part 200 may be measured as 40.2mΩ, and a Force (Force) generated at the second contact part 200 may be measured as 9.9N.

As described above, it was confirmed that as the preset second gap B was reduced from 12 μm to 10 μm, 8 μm, 5 μm, 2 μm, the contact resistance value of the probe 10 was reduced.

As described above, by further including the cover 700 located at the front and rear sides of the intermediate portion 300, the first elastic portion 400, the second elastic portion 500, and the side wall portion 600, the outer shapes of the first elastic portion 400 and the second elastic portion 500 can be prevented from being deformed to be separated from the outside, and when the probe 10 is applied with a lateral force, the first elastic portion 400 or the second elastic portion 500 is bent forward or backward of the cover 700, so that a portion of the first elastic portion 400 or a portion of the second elastic portion 500 is brought close to or brought into contact with the cover 700 provided at the front and rear sides, whereby a contact resistance value generated according to a current path corresponding to the first contact portion 100 to the second contact portion 200 can be reduced.

As described above, according to the probe 10 of the present invention, since the sidewall part 600 extends in both directions from the middle part 300, when the probe 10 is applied with a lateral force, it is possible to prevent the first elastic part 400 and the second elastic part 500 from being unable to recover by an elastic restoring force so as to deform the outer shape, and since the path of the current flow is shortened, it is possible to reduce the contact resistance value generated according to the current path from the first contact part 100 to the second contact part 200, so that the process of inserting the probe 10 into the inspection device becomes easy, and the work efficiency can be improved.

In addition, a predetermined pattern structure in a partial region of the sidewall part 600 is formed in a wave-shaped structure, and an area of contact of at least partial regions of the sidewall part 600 facing the first and second curved parts 420 and 520 at the time of contact increases, so that current can smoothly move along the sidewall part 600; further, by further including the cover 700 positioned in front of and behind the intermediate portion 300, the first elastic portion 400, the second elastic portion 500, and the side wall portion 600, the outer shapes of the first elastic portion 400 and the second elastic portion 500 can be prevented from being deformed and separated to the outside.

The above description of the present invention is for the purpose of illustration and it should be understood by those skilled in the art that the present invention may be easily modified into other specific forms without changing the technical spirit or essential features of the present invention. The above embodiments should therefore be understood to be illustrative in all respects and not restrictive. For example, individual components described as being of a single type may be implemented in a distributed fashion, as well as components described as being distributed may be implemented in a combination.

Furthermore, the scope of the invention is determined by the appended claims rather than the foregoing detailed description, and all changes or modifications that come within the meaning and range of equivalency of the claims are intended to be embraced therein.

Claims (12)

1. A probe, comprising:

a first contact portion;

a second contact portion;

an intermediate portion provided between the first contact portion and the second contact portion;

a first elastic portion connected to the first contact portion and the intermediate portion, and extending and contracting along an arrangement direction in which the first contact portion and the second contact portion are connected;

a second elastic portion connected to the intermediate portion and the second contact portion, and extending and contracting in the arrangement direction; and

A side wall portion extending from the intermediate portion in the arrangement direction.

2. The probe of claim 1, wherein the probe comprises a probe body,

the first elastic part is connected and arranged in a zigzag shape by at least one first straight line part and at least one first bending part,

the second elastic part is connected and arranged in a zigzag shape by at least one second straight line part and at least one second bending part.

3. The probe of claim 1, wherein the probe comprises a probe body,

the side wall portion includes: a first sidewall located at one side of the probe,

the first sidewall includes:

a first region extending to the first contact portion along the arrangement direction; and

And a second region extending to the second contact portion along the arrangement direction.

4. The probe according to claim 3, wherein,

the side wall portion further includes: a second sidewall located at the other side corresponding to the one side of the probe,

the second sidewall includes:

a third region extending to the first contact portion along the arrangement direction; and

And a fourth region extending to the second contact portion along the arrangement direction.

5. The probe according to claim 2, wherein,

a predetermined first gap exists between at least one of the first curved portion and the second curved portion and the side wall portion.

6. The probe according to claim 5, wherein,

when the probe is brought into contact with an object through the first contact portion and the second contact portion, at least a partial region of the side wall portion facing the first bending portion and the second bending portion is brought into contact with any partial region of the first bending portion and the second bending portion.

7. The probe according to claim 5, wherein,

at least a partial region of the sidewall portion facing the first and second curved portions is formed with a predetermined pattern structure.

8. The probe of claim 7, wherein the probe comprises a probe body,

the pattern structure includes a wave-shaped structure.

9. The probe of claim 8, wherein the probe comprises a probe body,

the preset first gap represents a distance between at least one of the first curved portion and the second curved portion and a peak formed at the side wall portion.

10. The probe of claim 1, further comprising:

and a cover part positioned in front of and behind the first elastic part, the second elastic part and the side wall part.

11. The probe of claim 10, wherein the probe comprises a probe body,

a preset second gap exists between at least one of the first elastic part and the second elastic part and the cover part.

12. The probe of claim 11, wherein the probe comprises a probe body,

when the probe is brought into contact with an object through the first contact portion and the second contact portion, at least a partial region in the cover portion facing the first elastic portion and the second elastic portion is brought into contact with any partial region of the first elastic portion and the second elastic portion.