CN117470089A - Multi-point laser interferometry device - Google Patents
Multi-point laser interferometry device Download PDFInfo
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- CN117470089A CN117470089A CN202311420260.XA CN202311420260A CN117470089A CN 117470089 A CN117470089 A CN 117470089A CN 202311420260 A CN202311420260 A CN 202311420260A CN 117470089 A CN117470089 A CN 117470089A
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- 238000004556 laser interferometry Methods 0.000 title claims abstract description 30
- 230000010287 polarization Effects 0.000 claims abstract description 123
- 239000013307 optical fiber Substances 0.000 claims abstract description 28
- 238000005259 measurement Methods 0.000 claims abstract description 26
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000005305 interferometry Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 5
- 238000010008 shearing Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention discloses a multipoint laser interferometry device, which aims to solve the technical problems that the existing interferometry device is low in measurement accuracy and cannot realize high-accuracy positioning. The device specifically comprises a double-frequency laser, an energy beam splitter, a polarization beam splitter prism, an optical fiber coupler and the like; the dual-frequency laser emits orthogonal linearly polarized light with frequency difference; the energy beam splitter is arranged on the light path where the orthogonal linearly polarized light is located; the polarization beam splitting prism is arranged on the light path of the split light beam; the polarizing beam-splitting prism comprises four sides, wherein the first side is opposite to the third side, and the second side is opposite to the fourth side; the energy beam splitter is positioned at the first side of the polarization beam splitter prism; the first wave plate is positioned between the third side of the polarization beam splitter prism and the mirror to be tested and can receive the light beam directly transmitted by the polarization beam splitter prism; the first right-angle prism and the second right-angle prism are respectively positioned on the second side and the fourth side of the polarization beam splitter prism; the optical fiber coupler is positioned on the first side of the polarization beam splitter prism and is used for receiving the final emergent light.
Description
Technical Field
The invention relates to a laser interferometry device, in particular to a multipoint laser interferometry device.
Background
Currently, in a laser interferometry device, displacement measurement is generally performed by one round trip of a beam of light and two round trips of a beam of light, and there is a Keysight10715A differential interferometer commonly used, and the basic optical resolution of 4/λ is realized by using the two round trips of the measurement light. In contrast, in order to obtain higher measurement fineness, by utilizing the characteristics of parallel plates, on the basis of a measurement structure, double-light-path measurement is formed, so that each light path is four times of optical subdivision, and the common parallel plates are often applied to transverse shearing interferometry to measure the deflection and the inclination of the same axial light path of a plurality of light waves, or to perform interval tuning beam splitting or wave front superposition by multi-light-beam interferometry; but its measurement accuracy is still lower, can't carry out high accurate location to measuring the basement.
Disclosure of Invention
The invention aims to provide a multipoint laser interferometry device to solve the technical problems that the existing interferometry device is low in measurement accuracy and cannot realize high-accuracy positioning.
In order to achieve the above object, the present invention provides a multi-point laser interferometry device for displacement measurement, which is characterized in that: the device comprises a dual-frequency laser, an energy beam splitter, a polarization beam splitter prism, a first wave plate, a first right angle prism, a second right angle prism and an optical fiber coupler;
the dual-frequency laser emits orthogonal linearly polarized light with frequency difference;
the energy beam splitter is arranged on an optical path where the orthogonal linearly polarized light is located and used for splitting the orthogonal linearly polarized light;
the polarization beam splitting prism is arranged on the light path of the split light beam; the polarization splitting prism comprises four sides, wherein the first side is opposite to the third side, and the second side is opposite to the fourth side; the energy beam splitter is positioned at the first side of the polarization beam splitter prism;
the first wave plate is positioned between the third side of the polarization beam splitter prism and the mirror to be tested and can receive the light beam directly transmitted by the polarization beam splitter prism;
the first right-angle prism and the second right-angle prism are respectively positioned at the second side and the fourth side of the polarization beam-splitting prism and are used for changing the path of the light beam through twice reflection and enabling the light beam to be incident to the polarization beam-splitting prism again;
the optical fiber coupler is positioned at the first side of the polarization beam splitter prism and is used for receiving the final emergent light.
Further, one surface of the energy beam splitter facing the dual-frequency laser is partially plated with a first antireflection film, the other surface of the energy beam splitter facing away from the dual-frequency laser is partially plated with an internal reflection film, and the other surface of the energy beam splitter facing away from the dual-frequency laser is partially plated with a semi-transparent semi-reflection film, and the other surface of the energy beam splitter is plated with a second antireflection film; the energy beam splitter is inclined to the polarization beam splitter prism, so that the first antireflection film corresponds to an emergent port of the dual-frequency laser, and meanwhile, a light beam transmitted through the first antireflection film can be reflected to the internal reflection film through the semi-transparent semi-reflective film and then emergent through the second antireflection film;
the polarization beam splitter prism is an orthogonal polarization beam splitter prism and can be used for re-splitting orthogonal linear polarized light according to the frequency difference.
Further, one side of the energy beam splitter facing the dual-frequency laser is plated with an antireflection film, and the other side of the energy beam splitter facing away from the dual-frequency laser is plated with a linear polarization beam splitter film, so that the energy beam splitter can split orthogonal linear polarized light according to the frequency difference.
Further, the first wave plate is a quarter wave plate.
The invention also provides a multipoint laser interferometry device for displacement measurement, which is characterized in that: the device comprises a dual-frequency laser, an energy beam splitter, a polarization beam splitter prism, a first wave plate, a second right angle prism, an optical fiber coupler and a second wave plate;
the dual-frequency laser emits orthogonal linearly polarized light with frequency difference;
the energy beam splitter is arranged on an optical path where the orthogonal linearly polarized light is located and used for splitting the orthogonal linearly polarized light;
the polarization beam splitting prism is arranged on the light path of the split light beam; the polarization splitting prism comprises four sides, wherein the first side is opposite to the third side, and the second side is opposite to the fourth side; the energy beam splitter is positioned at the first side of the polarization beam splitter prism;
the first wave plate is positioned between the third side of the polarization beam splitter prism and the mirror to be tested and can receive the light beam directly transmitted by the polarization beam splitter prism;
the second right-angle prism is positioned at the fourth side of the polarization beam splitter prism and is used for changing the path of the light beam through twice reflection and enabling the light beam to be incident to the polarization beam splitter prism again;
the second wave plate is positioned on a light path between the polarization beam splitter prism and the second right-angle prism;
the optical fiber coupler is positioned on the second side of the polarization beam splitter prism and is used for receiving the final emergent light.
Further, one surface of the energy beam splitter facing the dual-frequency laser is partially plated with a first antireflection film, the other surface of the energy beam splitter facing away from the dual-frequency laser is partially plated with an internal reflection film, and the other surface of the energy beam splitter facing away from the dual-frequency laser is partially plated with a semi-transparent semi-reflection film, and the other surface of the energy beam splitter is plated with a second antireflection film; the energy beam splitter is inclined to the polarization beam splitter prism, so that the first antireflection film corresponds to an emergent port of the dual-frequency laser, and meanwhile, a light beam transmitted through the first antireflection film can be reflected to the internal reflection film through the semi-transparent semi-reflective film and then transmitted through the second antireflection film;
the polarization beam splitter prism is an orthogonal polarization beam splitter prism and can be used for re-splitting orthogonal linear polarized light according to the frequency difference.
Further, one side of the energy beam splitter facing the dual-frequency laser is plated with an antireflection film, and the other side of the energy beam splitter facing away from the dual-frequency laser is plated with a linear polarization beam splitter film, so that the energy beam splitter can split orthogonal linear polarized light according to the frequency difference.
Further, the first wave plate and the second wave plate are quarter wave plates.
The invention also provides a multipoint laser interferometry device for gas detection, which is characterized in that: the device comprises a dual-frequency laser, an energy beam splitter, a polarization beam splitter prism, a first wave plate, a reflecting mirror, a second right-angle prism, an optical fiber coupler, a second wave plate, an air cavity to be tested and a reference air cavity;
the dual-frequency laser emits orthogonal linearly polarized light with frequency difference;
the energy beam splitter is arranged on an optical path where the orthogonal linearly polarized light is located and used for splitting the orthogonal linearly polarized light;
the polarization beam splitting prism is arranged on the light path of the split light beam; the polarization splitting prism comprises four sides, wherein the first side is opposite to the third side, and the second side is opposite to the fourth side; the energy beam splitter is positioned at the first side of the polarization beam splitter prism;
the reflecting mirror is positioned on a transmission light path of the third side of the polarization splitting prism;
the first wave plate is positioned on a light path between the third side of the polarization beam splitter prism and the reflecting mirror;
the second right-angle prism is positioned at the fourth side of the polarization beam splitter prism and is used for changing the path of the light beam through twice reflection and enabling the light beam to be incident to the polarization beam splitter prism again;
the second wave plate is positioned on a light path between the polarization beam splitter prism and the second right-angle prism;
the optical fiber coupler is positioned at the second side of the polarization beam splitter prism and is used for receiving the final emergent light;
the air cavity to be detected and the reference air cavity are both positioned between the energy beam splitter and the polarization beam splitter prism and are respectively positioned on light paths where light beams with different energies are positioned.
Further, one surface of the energy beam splitter facing the dual-frequency laser is plated with an antireflection film, and the other surface of the energy beam splitter facing away from the dual-frequency laser is plated with a linear polarization beam splitting film, so that the energy beam splitter can split orthogonal linear polarized light according to the frequency difference;
the first wave plate and the second wave plate are quarter wave plates.
The invention has the beneficial effects that:
1. compared with the current single-frequency incidence mode, the invention can ensure the synchronous incidence of two paths of light beams with frequency difference, can realize four times of optical subdivision of single incidence, acquire more stable and reliable measurement data, can not only meet the measurement requirements of high precision and high alignment, but also realize the same-light-path comparison measurement and reference measurement shunt adjustment.
2. The multipoint laser interferometry device provided by the invention can form a plurality of measuring points with different laser wavelengths for calibration and detection, acquire fitting surface shape change in a measuring plane by analyzing interference information of different points in the measuring plane, can realize surface shape detection in the whole detecting plane by detecting for a plurality of times, and can be widely applied to a transverse shearing interferometer and a multi-beam interferometer of an aberration wavefront.
Drawings
FIG. 1 is a schematic diagram of a first embodiment of a multi-point laser interferometry apparatus according to the present invention;
FIG. 2 is a schematic diagram of a second embodiment of a multi-point laser interferometry apparatus according to the present invention;
FIG. 3 is a schematic diagram of a third embodiment of a multi-point laser interferometry apparatus according to the present invention;
FIG. 4 is a schematic diagram of a fourth embodiment of a multi-point laser interferometry apparatus according to the present invention;
FIG. 5 is a schematic diagram of a fifth embodiment of a multi-point laser interferometry device according to the present invention.
Reference numerals:
the device comprises a 1-dual-frequency laser, a 2-energy beam splitter, a 3-polarization beam splitter prism, a 4-first wave plate, a 5-mirror to be tested, a 6-first right-angle prism, a 7-second right-angle prism, an 8-optical fiber coupler, a 9-second wave plate, a 10-air cavity to be tested, a 11-reference air cavity and a 12-reflecting mirror.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention uses the characteristics of parallel plates and four times of subdivision characteristics of the light path structure, and firstly: in the same light path, the double light beams can obtain two paths of identical displacement measurement values at the same time, and high-precision laser measurement values are obtained by different light path variation amounts; second,: obtaining high parallelism of the measuring substrate by parallel distribution of four light beams; third,: the four times optical subdivision is realized by both measuring lights.
Embodiment one:
as shown in fig. 1, a multi-point laser interferometry device includes a dual-frequency laser 1, an energy beam splitter 2 (parallel plate), a polarization beam splitter 3, a first wave plate 4, a first right angle prism 6, a second right angle prism 7, and an optical fiber coupler 8; the dual-frequency laser emits orthogonal linearly polarized light with a frequency difference (i.e., frequency f1 and frequency f 2); the energy beam splitter 2 is arranged on an optical path where the orthogonal linear polarized light is located, 45-degree angular distribution is shown with an optical axis of the orthogonal linear polarized light, one surface part of the energy beam splitter 2 facing the dual-frequency laser 1 is plated with a first antireflection film, the first antireflection film corresponds to an emergent opening of the dual-frequency laser 1, the other part is plated with an internal reflection film, one surface part of the energy beam splitter, which is back to the dual-frequency laser 1, is plated with a semi-transparent semi-reflective film, the other part is plated with a second antireflection film, a light beam transmitted through the first antireflection film can be reflected to the internal reflection film through the semi-transparent semi-reflective film and then is emergent through the second antireflection film, and finally the dual-frequency linear polarized light forms an energy ratio of 1 after passing through the energy beam splitter 2: 1 and a second outgoing light; the first emergent light is light which is transmitted by the first antireflection film, the semi-transparent semi-reflective film and the second emergent light is light which is transmitted by the first antireflection film, the semi-transparent semi-reflective film, the internal reflection film and the second antireflection film, and the first emergent light and the second emergent light both comprise orthogonal linearly polarized light with f1 and f2 frequencies; the polarization splitting prism 3 is arranged on the light path where the first emergent light and the second emergent light are positioned; the polarization beam splitter prism 3 is an orthogonal polarization beam splitter prism, and can be used for re-splitting orthogonal linear polarized light according to the frequency f1 and the frequency f2; the polarization splitting prism 3 includes four sides, wherein the first side is opposite to the third side, and the second side is opposite to the fourth side; the energy beam splitter 2 is positioned at the first side of the polarization beam splitter prism 3; the third side is used for setting a mirror 5 to be tested; the first emergent light is split by the polarization splitting prism 3 to form first reflected light and first transmitted light; the second emergent light is split by the polarization splitting prism 3 to form second reflected light and second transmitted light; the first wave plate 4 is a quarter wave plate, when the vertically polarized light passes through the quarter wave plate, the vertically polarized light is converted into circularly polarized light, and when the circularly polarized light passes through the quarter wave plate again, horizontally polarized light is formed, which is equivalent to passing through a half wave plate; the quarter wave plate is arranged on the light path where the first transmitted light and the second transmitted light are located and is positioned between the third side of the polarization splitting prism 3 and the mirror 5 to be detected; the first transmitted light and the second transmitted light are sequentially transmitted through the first wave plate 4, reflected by the mirror to be tested 5, and transmitted back to the polarization beam splitter prism 3 through the first wave plate 4 again to form two beams of third reflected light; the first right-angle prism 6 is arranged on the light path where the two beams of third reflected light are located, the two beams of third reflected light are reflected twice by the first right-angle prism 6 to change the path, return to the polarization beam splitter prism 3, then sequentially reflected by the polarization beam splitter prism 3, transmitted by the first wave plate 4, reflected by the mirror 5 to be tested, retransmitted by the first wave plate 4 and transmitted by the polarization beam splitter prism 3, and finally enter the optical fiber coupler 8; the second right-angle prism 7 is arranged on the light path where the first reflected light and the second reflected light are located, the first reflected light and the second reflected light respectively return to the polarization beam splitter prism 3 through the second right-angle prism 7 in a twice reflection changing path, and then are reflected to the optical fiber coupler 8 through the polarization beam splitter prism 3, and when the light beams are incident into the first right-angle prism 6 and the second right-angle prism 7 through linear polarized light, the polarization direction is not changed; the optical fiber coupler 8 is arranged at the first side of the polarization beam splitter prism 3 and is used for receiving the final emergent light to realize displacement measurement of interference signals. The optical fiber coupler 8 comprises an optical fiber detector and a polarizer, and the incident light passes through the polarizer to modulate the polarization direction to form interference.
Embodiment two:
as shown in fig. 1, this embodiment is a dual-point laser interferometry device according to the first embodiment, and has a structure substantially the same as that of the first embodiment, except that in this embodiment, an antireflection film is coated on a surface of the energy beam splitter 2 facing the dual-frequency laser 1, and a linear polarization beam splitter film is coated on a surface of the energy beam splitter 2 facing away from the dual-frequency laser 1, so that the energy beam splitter 2 can split orthogonal linearly polarized light according to frequency differences f1 and f2, and after splitting, the frequency of the first outgoing light is f1, and the frequency of the second outgoing light is f2; the first emergent light is transmitted by the polarization beam splitter prism 3 in sequence, is transmitted by the first wave plate 4 and is vertically incident to the mirror 5 to be tested, is reflected by the mirror 5 to be tested, is transmitted by the first wave plate 4, is reflected by the polarization beam splitter prism 3, is reflected by the first right angle prism 6, changes the path by twice reflection, is reflected by the polarization beam splitter prism 3, is transmitted by the first wave plate 4, is reflected by the mirror 5 to be tested, is transmitted by the first wave plate 4, is transmitted by the polarization beam splitter prism 3, and finally enters the optical fiber coupler 8; the second emergent light is reflected by the polarization beam splitter prism 3, reflected by the second right angle prism 7 twice to change the path, reflected by the polarization beam splitter prism 3 again, and finally enters the optical fiber coupler 8 to realize displacement measurement of interference signals.
Embodiment III:
as shown in fig. 3, this embodiment is substantially the same as the first embodiment except that the first right angle prism 6 is not included in the structure but the second wave plate 9 is included; the optical fiber coupler 8 is arranged on the second side of the polarization splitting prism 3; the second wave plate 9 is disposed between the polarization splitting prism 3 and the second right angle prism 7.
The first emergent light after passing through the energy beam splitter 2 is split by the polarization beam splitter prism 3 and then is divided into transmitted light with the frequency f1 and reflected light with the frequency f2; the transmitted light with the frequency f1 is transmitted through the first wave plate 4, vertically enters the mirror 5 to be tested, is reflected by the mirror 5 to be tested, is transmitted through the first wave plate 4, is reflected by the polarization beam splitter prism 3, and finally enters the optical fiber coupler 8; the reflected light with the frequency f2 is transmitted by the second wave plate 9 and vertically enters the second right-angle prism 7, is transmitted by the second wave plate 9 again through the second right-angle prism 7 to enter the polarization beam splitter prism 3 after being reflected twice to change the path, is transmitted by the polarization beam splitter prism 3, and finally enters the optical fiber coupler 8 to realize displacement measurement of interference signals.
Embodiment four:
as shown in fig. 4, the present embodiment is substantially the same as the third embodiment, except that in the present embodiment, an antireflection film is plated on a surface of the energy beam splitter 2 facing the dual-frequency laser 1, and a linear polarization beam splitter film is plated on a surface of the energy beam splitter facing away from the dual-frequency laser 1, so that the energy beam splitter 2 can split orthogonal linear polarized light according to frequency differences f1 and f2, and after beam splitting, the frequency of the first outgoing light is f1, and the frequency of the second outgoing light is f2; the first emergent light is transmitted by the polarization beam splitter prism 3, transmitted by the first wave plate 4, reflected by the mirror to be tested 5, transmitted by the first wave plate 4 and reflected by the polarization beam splitter prism 3, and finally enters the optical fiber coupler 8; the second emergent light is reflected by the polarization beam splitter prism 3, transmitted by the second wave plate 9, reflected by the second right angle prism 7 twice to change the path, transmitted by the second wave plate 9 again, transmitted by the polarization beam splitter prism 3, and finally enters the optical fiber coupler 8 to realize displacement measurement of interference signals.
Fifth embodiment:
as shown in fig. 5, a multipoint laser interferometry device is used for detecting gas, and its structure is basically the same as that of the fourth embodiment, except that in this embodiment, a reflecting mirror 12 is disposed at the position of the mirror 5 to be detected, and an air cavity 10 to be detected and a reference air cavity 11 are disposed between the energy beam splitter 2 and the polarization beam splitter prism 3; the air cavity 10 to be tested is positioned on the light path where the first emergent light is positioned; the reference air cavity 11 is positioned on the light path of the second emergent light; the first emergent light and the second emergent light respectively pass through the air cavity 10 to be detected and the reference air cavity 11 and then enter the polarization beam splitter prism 3, so that parameter measurement of the air to be detected is realized;
according to the multipoint laser interferometry device provided by the invention, each measuring light can realize 4 times of optical subdivision, and the reference signal and the measuring signal are divided under the synchronous hierarchy. In addition, the invention takes high-precision measurement and high-precision positioning control as measurement purposes, satisfies the same-path comparison, simultaneously realizes separation adjustment of the reference signal and the measurement signal, and can realize the simplicity and high-precision contraposition of optical structure adjustment.
The foregoing is merely illustrative of specific embodiments of the present invention, and the scope of the present invention is not limited thereto, but any changes or substitutions within the technical scope of the present invention should be covered by the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A multipoint laser interferometry device for displacement measurement, characterized in that: the device comprises a dual-frequency laser (1), an energy beam splitter (2), a polarization beam splitter prism (3), a first wave plate (4), a first right-angle prism (6), a second right-angle prism (7) and an optical fiber coupler (8);
the dual-frequency laser (1) emits orthogonal linearly polarized light with frequency difference;
the energy beam splitter (2) is arranged on an optical path where the orthogonal linearly polarized light is located and used for splitting the orthogonal linearly polarized light;
the polarization beam splitting prism (3) is arranged on the light path of the split light beam; the polarization splitting prism (3) comprises four sides, wherein the first side is opposite to the third side, and the second side is opposite to the fourth side; the energy beam splitter (2) is positioned at the first side of the polarization beam splitter prism (3);
the first wave plate (4) is positioned between the third side of the polarization beam splitter prism (3) and the mirror (5) to be tested, and can receive the light beam directly transmitted by the polarization beam splitter prism (3);
the first right-angle prism (6) and the second right-angle prism (7) are respectively positioned at the second side and the fourth side of the polarization beam-splitting prism (3) and are used for changing the light beam path through twice reflection and enabling the light beam to be incident to the polarization beam-splitting prism (3) again;
the optical fiber coupler (8) is positioned on the first side of the polarization beam splitting prism (3) and is used for receiving final emergent light.
2. The multipoint laser interferometry device of claim 1, wherein: one surface of the energy beam splitter (2) facing the dual-frequency laser (1) is partially plated with a first antireflection film, the other part is plated with an internal reflection film, one surface of the energy beam splitter facing away from the dual-frequency laser (1) is partially plated with a semi-transparent semi-reflection film, and the other part is plated with a second antireflection film; the energy beam splitter (2) is inclined to the polarization beam splitter prism (3) so that the first antireflection film corresponds to an emergent opening of the dual-frequency laser (1), and meanwhile, a light beam transmitted through the first antireflection film can be reflected to the internal reflection film through the semi-transparent semi-reflective film and then emergent through the second antireflection film;
the polarization beam splitter prism (3) is an orthogonal polarization beam splitter prism and can be used for re-splitting orthogonal linear polarized light according to the frequency difference.
3. The multipoint laser interferometry device of claim 1, wherein: the energy beam splitter (2) is coated with an antireflection film on one face facing the dual-frequency laser (1), and is coated with a linear polarization beam splitter on one face facing away from the dual-frequency laser (1), so that the energy beam splitter (2) can split orthogonal linear polarized light according to the frequency difference.
4. A multi-point laser interferometry device according to claim 1 or 2 or 3, wherein: the first wave plate (4) is a quarter wave plate.
5. A multipoint laser interferometry device for displacement measurement, characterized in that: the device comprises a dual-frequency laser (1), an energy beam splitter (2), a polarization beam splitter prism (3), a first wave plate (4), a second right angle prism (7), an optical fiber coupler (8) and a second wave plate (9);
the dual-frequency laser (1) emits orthogonal linearly polarized light with frequency difference;
the energy beam splitter (2) is arranged on an optical path where the orthogonal linearly polarized light is located and used for splitting the orthogonal linearly polarized light;
the polarization beam splitting prism (3) is arranged on the light path of the split light beam; the polarization splitting prism (3) comprises four sides, wherein the first side is opposite to the third side, and the second side is opposite to the fourth side; the energy beam splitter (2) is positioned at the first side of the polarization beam splitter prism (3);
the first wave plate (4) is positioned between the third side of the polarization beam splitter prism (3) and the mirror (5) to be tested, and can receive the light beam directly transmitted by the polarization beam splitter prism (3);
the second right-angle prism (7) is positioned at the fourth side of the polarization beam-splitting prism (3) and is used for changing the path of the light beam through twice reflection and enabling the light beam to be incident to the polarization beam-splitting prism (3) again;
the second wave plate (9) is positioned on a light path between the polarization beam splitting prism (3) and the second right-angle prism (7);
the optical fiber coupler (8) is positioned on the second side of the polarization beam splitting prism (3) and is used for receiving the final emergent light.
6. The multipoint laser interferometry device of claim 5, wherein: one surface of the energy beam splitter (2) facing the dual-frequency laser (1) is partially plated with a first antireflection film, the other part is plated with an internal reflection film, one surface of the energy beam splitter facing away from the dual-frequency laser (1) is partially plated with a semi-transparent semi-reflection film, and the other part is plated with a second antireflection film; the energy beam splitter (2) is inclined to the polarization beam splitter prism (3) so that the first antireflection film corresponds to an emergent port of the dual-frequency laser (1), and meanwhile, a light beam transmitted through the first antireflection film can be reflected to the internal reflection film through the semi-transparent semi-reflective film and then transmitted through the second antireflection film;
the polarization beam splitter prism (3) is an orthogonal polarization beam splitter prism and can be used for re-splitting orthogonal linear polarized light according to the frequency difference.
7. The multipoint laser interferometry device of claim 5, wherein: the energy beam splitter (2) is coated with an antireflection film on one face facing the dual-frequency laser (1), and is coated with a linear polarization beam splitter on one face facing away from the dual-frequency laser (1), so that the energy beam splitter (2) can split orthogonal linear polarized light according to the frequency difference.
8. The multipoint laser interferometry device according to claim 5 or 6 or 7, wherein: the first wave plate (4) and the second wave plate (9) are quarter wave plates.
9. A multipoint laser interferometry device for gas detection, characterized in that: the device comprises a dual-frequency laser (1), an energy beam splitter (2), a polarization beam splitter prism (3), a first wave plate (4), a reflecting mirror (12), a second right-angle prism (7), an optical fiber coupler (8), a second wave plate (9), an air cavity to be detected (10) and a reference air cavity (11);
the dual-frequency laser (1) emits orthogonal linearly polarized light with frequency difference;
the energy beam splitter (2) is arranged on an optical path where the orthogonal linearly polarized light is located and used for splitting the orthogonal linearly polarized light;
the polarization beam splitting prism (3) is arranged on the light path of the split light beam; the polarization splitting prism (3) comprises four sides, wherein the first side is opposite to the third side, and the second side is opposite to the fourth side; the energy beam splitter (2) is positioned at the first side of the polarization beam splitter prism (3);
the reflecting mirror (12) is positioned on a transmission light path of the third side of the polarization beam splitter prism (3);
the first wave plate (4) is positioned on a light path between the third side of the polarization beam splitter prism (3) and the reflecting mirror (12);
the second right-angle prism (7) is positioned at the fourth side of the polarization beam-splitting prism (3) and is used for changing the path of the light beam through twice reflection and enabling the light beam to be incident to the polarization beam-splitting prism (3) again;
the second wave plate (9) is positioned on a light path between the polarization beam splitting prism (3) and the second right-angle prism (7);
the optical fiber coupler (8) is positioned at the second side of the polarization beam splitting prism (3) and is used for receiving the final emergent light;
the air cavity (10) to be detected and the reference air cavity (11) are both positioned between the energy beam splitter (2) and the polarization beam splitter prism (3) and are respectively positioned on light paths where different energy beams are positioned.
10. The multipoint laser interferometry device of claim 9, wherein: one side of the energy beam splitter (2) facing the dual-frequency laser (1) is plated with an antireflection film, and the other side of the energy beam splitter facing away from the dual-frequency laser (1) is plated with a linear polarization beam splitter film, so that the energy beam splitter (2) can split orthogonal linear polarized light according to the frequency difference;
the first wave plate (4) and the second wave plate (9) are quarter wave plates.
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