CN117454060A - Linear motion device position measuring method and device, electronic equipment and storage medium - Google Patents

Linear motion device position measuring method and device, electronic equipment and storage medium Download PDF

Info

Publication number
CN117454060A
CN117454060A CN202311776190.1A CN202311776190A CN117454060A CN 117454060 A CN117454060 A CN 117454060A CN 202311776190 A CN202311776190 A CN 202311776190A CN 117454060 A CN117454060 A CN 117454060A
Authority
CN
China
Prior art keywords
encoder
value
preset
laser interferometer
preset point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202311776190.1A
Other languages
Chinese (zh)
Other versions
CN117454060B (en
Inventor
李奕宏
詹弋
罗凌云
邓锦祥
胡荏
李剑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ji Hua Laboratory
Original Assignee
Ji Hua Laboratory
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ji Hua Laboratory filed Critical Ji Hua Laboratory
Priority to CN202311776190.1A priority Critical patent/CN117454060B/en
Publication of CN117454060A publication Critical patent/CN117454060A/en
Application granted granted Critical
Publication of CN117454060B publication Critical patent/CN117454060B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/10—Complex mathematical operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/2428—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring existing positions of tools or workpieces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Data Mining & Analysis (AREA)
  • Mathematical Optimization (AREA)
  • Pure & Applied Mathematics (AREA)
  • Databases & Information Systems (AREA)
  • Software Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Algebra (AREA)
  • Mathematical Analysis (AREA)
  • Computational Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention provides a method and a device for measuring the position of a linear motion device, electronic equipment and a storage medium, and relates to the technical field of position measurement. The method for measuring the position of the linear motion device comprises the following steps: the motion platform is controlled to do linear motion according to a specified motion route and sequentially pass through a plurality of preset points; measuring the moving distance of the motion platform relative to the starting point by using a laser interferometer and an encoder respectively to obtain a laser interferometer measured value and an encoder measured value; and estimating the real-time position of the motion platform according to the real-time encoder measured value and the first position predicted value measured by the encoder. The position measuring method of the linear motion device can meet the high-frequency measuring requirement of the linear motion device by using the laser interferometer only once.

Description

Linear motion device position measuring method and device, electronic equipment and storage medium
Technical Field
The present invention relates to the field of position measurement technologies, and in particular, to a method and an apparatus for measuring a position of a linear motion device, an electronic device, and a storage medium.
Background
In the prior art, when high-precision position measurement is carried out on linear motion devices such as a machine tool linear shaft, a linear motor, a linear guide rail and the like, a laser interferometer is often required to meet the precision requirement (the measurement precision generally reaches the nanometer level), however, the laser interferometer is expensive, under the condition that a plurality of linear motion devices are required to carry out position measurement, in consideration of cost, a small number of laser interferometers are generally purchased and then the plurality of linear motion devices are subjected to position measurement in a batch measurement mode, the lower measurement efficiency can definitely cause a great deal of time consumption in the measurement process, meanwhile, the installation process and the use method of the laser interferometer are complex, the measurement efficiency is further reduced, the measurement period is greatly prolonged, and when the linear motion devices are required to carry out position measurement frequently, the laser interferometer is easily damaged by repeated disassembly and assembly and conversion.
In view of the above problems, no effective technical solution is currently available.
Disclosure of Invention
The invention aims to provide a linear motion device position measuring method, a linear motion device position measuring device, electronic equipment and a storage medium, which can meet the high-frequency measurement requirement of a linear motion device by using a laser interferometer only once.
In a first aspect, the present invention provides a method for measuring a position of a linear motion device, for the linear motion device, the linear motion device including an encoder and a motion platform, the encoder being configured to measure a current position of the motion platform, the method comprising the steps of:
s1, controlling the motion platform to do linear motion according to a specified motion route and sequentially pass through a plurality of preset points, wherein the preset points comprise a starting point and an ending point of the motion route;
s2, when the motion platform reaches each preset point, measuring the moving distance of the motion platform relative to the starting point by using a laser interferometer and an encoder respectively to obtain a laser interferometer measured value and an encoder measured value;
s3, calculating a first position preset value when the motion platform reaches each preset point according to the measured value of the laser interferometer and the measured value of the encoder;
s4, when the real-time position of the moving platform needs to be measured, estimating the real-time position of the moving platform according to the real-time encoder measured value measured by the encoder and the first position estimated value.
According to the position measuring method of the linear motion device, the laser interferometer is not required to be used repeatedly, each linear motion device only needs to use the laser interferometer once to obtain a plurality of measured values, and the position of the motion platform can be effectively measured for a long time by means of the plurality of measured values.
Further, the specific steps in step S3 include:
s31, calculating a weight coefficient according to the measured value of the laser interferometer and the measured value of the encoder;
s32, calculating the first position pre-estimation value according to the weight coefficient.
It can be seen that the first position pre-estimated value is calculated based on the measured value of the laser interferometer, so that the first position pre-estimated value has higher precision, and the subsequent measurement precision can be improved.
Further, the specific steps in step S31 include:
s311, calculating the weight coefficient according to the following formula:
；
；
；
；
；
wherein,for the weight coefficient corresponding to the ith preset point, < >>For the standard deviation of the laser interferometer measurements corresponding to the ith preset point, -th>For the standard deviation of the encoder measurement value corresponding to the ith preset point, +.>For the laser interferometer measurement value corresponding to the ith preset point, +.>For the average of all the laser interferometer measurements at the preset points,for the encoder measurement value corresponding to the i-th preset point, < >>For the average value of the encoder measurement values of all the preset points, i represents the ith preset point, and n is the total number of the preset points.
The weight coefficient when the second standard deviation predicted value of each preset point reaches the minimum value is obtained, and the first position predicted value is calculated according to the weight coefficient, so that the measurement accuracy can be improved to the greatest extent.
Further, the specific steps in step S32 include:
s321, calculating the first position estimated value according to the following formula:
;
wherein,and predicting a value for the first position corresponding to the ith preset point.
UsingSubstitute encoder measurement +.>The measuring precision can be effectively improved.
Further, the specific steps in step S4 include:
s41, calculating the real-time position of the motion platform according to the following formula:
；
；
wherein,for the real-time position of the motion platform, +.>For the real-time encoder measurement value, j is the serial number of the preset point before the current position of the moving platform, j+1 is the serial number of the preset point after the current position of the moving platform, and the current position of the moving platform is between the jth preset point and the jth+1 preset point>For the encoder measurement value of the j-th said preset point,>the (j+1) th encoder measurement value of the preset point, ">For the first position pre-estimated value of the j-th preset point,/th preset point>And (3) predicting a value for the first position of the j+1th preset point.
In a second aspect, the present invention provides a linear motion device position measurement device for a linear motion device, the linear motion device including an encoder and a motion platform, the encoder being for measuring a current position of the motion platform, comprising:
the control module is used for controlling the motion platform to do linear motion according to a specified motion route and sequentially pass through a plurality of preset points, wherein the preset points comprise a starting point and an ending point of the motion route;
the measuring module is used for measuring the moving distance of the moving platform relative to the starting point by using a laser interferometer and an encoder respectively when the moving platform reaches each preset point to obtain a laser interferometer measured value and an encoder measured value;
the first calculation module is used for calculating a first position pre-estimated value when the motion platform reaches each preset point according to the measured value of the laser interferometer and the measured value of the encoder;
and the second calculation module is used for estimating the real-time position of the motion platform according to the real-time encoder measured value measured by the encoder and the first position estimated value when the real-time position of the motion platform needs to be measured.
The linear motion device position measuring device provided by the invention can improve the subsequent measuring precision by only using the laser interferometer once, and can more accurately measure the position of the motion platform even if the laser interferometer is not used any more.
Further, the first calculation module is configured to perform, when calculating the first position predicted value when the motion platform reaches each preset point according to the laser interferometer measurement value and the encoder measurement value:
s31, calculating a weight coefficient according to the measured value of the laser interferometer and the measured value of the encoder;
s32, calculating the first position pre-estimation value according to the weight coefficient.
Further, the first calculation module is configured to perform, when calculating the weight coefficient from the laser interferometer measurement value and the encoder measurement value:
s311, calculating the weight coefficient according to the following formula:
；
；
；
；
；
wherein,for the weight coefficient corresponding to the ith preset point, < >>For the standard deviation of the laser interferometer measurements corresponding to the ith preset point, -th>For the ith preset point pairStandard deviation of the corresponding encoder measurement, +.>For the laser interferometer measurement value corresponding to the ith preset point, +.>For the average of all the laser interferometer measurements at the preset points,for the encoder measurement value corresponding to the i-th preset point, < >>For the average value of the encoder measurement values of all the preset points, i represents the ith preset point, and n is the total number of the preset points.
In a third aspect, the present invention provides an electronic device comprising a processor and a memory storing computer readable instructions which, when executed by the processor, perform the steps of the linear motion device position measurement method as provided in the first aspect above.
In a fourth aspect, the present invention provides a computer readable storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of the linear motion device position measurement method as provided in the first aspect above.
As can be seen from the above, the method for measuring the position of the linear motion device provided by the invention can estimate the position of the motion platform only by using the measured value instead of using the laser interferometer after obtaining the measured values of a plurality of points only by using the laser interferometer once.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of the embodiments of the invention. The objectives and other advantages of the invention may be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
Fig. 1 is a flowchart of a method for measuring a position of a linear motion device according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a position measuring device for a linear motion device according to an embodiment of the present invention.
Fig. 3 is a schematic structural diagram of an electronic device according to an embodiment of the present invention.
Description of the reference numerals:
100. a control module; 200. a measurement module; 300. a first computing module; 400. a second computing module; 13. an electronic device; 1301. a processor; 1302. a memory; 1303. a communication bus.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by a person skilled in the art without making any inventive effort, are intended to be within the scope of the present invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures. Meanwhile, in the description of the present invention, the terms "first", "second", and the like are used only to distinguish the description, and are not to be construed as indicating or implying relative importance.
Referring to fig. 1, fig. 1 is a flowchart of a method for measuring a position of a linear motion device. The linear motion device position measuring method is used for a linear motion device, the linear motion device comprises an encoder and a motion platform, the encoder is used for measuring the current position of the motion platform, and the method comprises the following steps:
s1, controlling a motion platform to do linear motion according to a specified motion route and sequentially pass through a plurality of preset points, wherein the preset points comprise a starting point and an ending point of the motion route;
s2, when the motion platform reaches each preset point, measuring the moving distance of the motion platform relative to the starting point by using a laser interferometer and an encoder respectively to obtain a laser interferometer measured value and an encoder measured value;
s3, calculating a first position estimated value when the motion platform reaches each preset point according to the measured value of the laser interferometer and the measured value of the encoder;
s4, when the real-time position of the motion platform needs to be measured, estimating the real-time position of the motion platform according to the real-time encoder measured value and the first position estimated value measured by the encoder.
In this embodiment, when the linear motion device is used for the first time, the laser interferometer is used to perform a position measurement on the motion platform, so as to obtain laser interferometer measurement values of a plurality of preset points, an encoder based on the linear motion device can also obtain encoder measurement values of a plurality of preset points, so that the first position preset value corresponding to each preset point can be calculated through the laser interferometer measurement values and the encoder measurement values, and then the laser interferometer can be removed.
In certain embodiments, the specific steps in step S3 include:
s31, calculating a weight coefficient according to the measured value of the laser interferometer and the measured value of the encoder;
s32, calculating a first position pre-estimation value according to the weight coefficient.
Specifically, for example, n preset points are selected on the movement route, which are respectivelyThe motion platform is sequentially fromExercise to->And stay for a period of time at each preset point to enable the laser interferometer to accurately obtain the measured value of the laser interferometer at each preset point, which is +.>And making the encoder accurately obtain the encoder measurement value of each preset point, respectively +.>。
Since the standard deviation of the laser interferometer measurement value is in direct proportion to the distance between the preset point and the light source, i.eWherein->Standard deviation of the laser interferometer measurement corresponding to the i-th preset point,/->Is a constant of precision>Can be obtained by querying the existing manual, +.>For the laser interferometer measurement corresponding to the i-th preset point,/th preset point>For the distance between the laser interferometer and the starting point position of the movement path,/for the distance between the laser interferometer and the starting point position of the movement path>Can be obtained by direct measurement by a laser interferometer, thereby obtaining standard deviation of each preset point, which is +.>。
For the encoder measurement values, since the positions of the preset points do not affect the standard deviation of the encoder measurement values, the standard deviations of the encoder measurement values of the respective preset points are obtained as followsAnd (2) andwherein->For presetting standard deviation->Can be obtained by inquiring the existing manual.
Thereafter, second position pre-estimated values of the preset points are calculated respectively，/>Wherein->For the second position preset value corresponding to the ith preset point, < >>For the total number of preset pointsAmount of the components.
Since the second position estimate is a weighted average of the laser interferometer measurements and the encoder measurements, the second position estimate for each preset point is，/>Wherein->The weight coefficient corresponding to the i-th preset point can be used for calculating the second standard deviation predicted value of each preset point，/>Wherein->The average value of the second position predicted values of all preset points is calculated.
In order to maximize the measurement accuracy, the second standard deviation predicted value of each preset point is minimized, namelyCalculating +.>Minimum value of (2) to obtain +.>And then get the productWhen (I)>To the minimum, from which it can be deduced that the weight coefficient is +.>。
Specifically, the specific steps in step S31 include:
s311, calculating a weight coefficient according to the following formula:
；
；
；
；
；
wherein,weight coefficient corresponding to the i-th preset point,/for the i-th preset point>Standard deviation of the laser interferometer measurement corresponding to the i-th preset point,/->For the standard deviation of the encoder measurement corresponding to the i-th preset point,/for the encoder measurement>For the laser interferometer measurement corresponding to the i-th preset point,/th preset point>For the mean value of the laser interferometer measurements for all preset points, < >>Preset for the ithEncoder measurement value corresponding to point,/>For the average of the encoder measurements for all preset points, i represents the i-th preset point and n is the total number of preset points.
Further, the specific steps in step S32 include:
s321, calculating a first position pre-estimated value according to the following formula:
;
wherein,and (5) predicting a value for the first position corresponding to the ith preset point.
Specifically, according to the first position pre-estimated value, a first standard deviation pre-estimated value of each preset point can be calculatedFrom the calculation result, it can be known that +.>Obviously less than->Therefore use +.>Substitute encoder measurement +.>The measuring precision can be effectively improved.
In certain embodiments, the specific steps in step S4 include:
s41, calculating the real-time position of the motion platform according to the following formula:
；
；
wherein,for the real-time position of the motion platform +.>For real-time encoder measurement, j is the sequence number of the previous preset point of the current position of the motion platform, j+1 is the sequence number of the next preset point of the current position of the motion platform, the current position of the motion platform is between the jth preset point and the jth+1th preset point, and the->Encoder measurement for the jth preset point, for example>Encoder measurement value of j+1th preset point,>for the first position preset value of the jth preset point,/th preset point>The first position of the j+1th preset point is estimated.
After the first position pre-estimated value is obtained by calculation, the measurement of the movement of the moving platform to any position on the designated movement route can be obtained by calculation through the calculation formula of the embodiment, specifically, the moving platform is assumed to move to the position X on the designated movement route, based on the positions of a plurality of preset points, the position X can be known to be between the jth preset point and the jth+1th preset point, and the encoder measured value obtained from the encoder is combined, so that the real-time position of the moving platform can be obtained through the calculation formula, and meanwhile, the third standard deviation pre-estimated value corresponding to the position X can also be obtainedWherein->Standard deviation of encoder measurement for position X, i.e +.>The method comprises the steps of carrying out a first treatment on the surface of the So far, the arbitrary position of the motion platform on the appointed motion route can be obtained by calculating the encoder measured value and the laser interferometer measured value of each preset point obtained by measuring with the laser interferometer for the first time, and the third standard deviation of the calculated result is obviously far smaller than the standard deviation of the encoder measured value, thereby achieving the effect of improving the measurement precision. The method has the advantages that the laser interferometer is only used once, long-term or high-frequency repeated use of the laser interferometer is not needed, damage risk and use cost of the laser interferometer are reduced, meanwhile, the measurement precision can be improved even if the laser interferometer is not used any more, and the method is simple, convenient and quick to measure, low in calculation complexity and high in reliability.
Referring to fig. 2, fig. 2 is a position measuring device for a linear motion device according to some embodiments of the present invention, where the linear motion device includes an encoder and a motion platform, the encoder is used to measure a current position of the motion platform, and the position measuring device is integrated in a back-end control apparatus in a form of a computer program, and includes:
the control module 100 is used for controlling the motion platform to do linear motion according to a specified motion route and sequentially pass through a plurality of preset points, wherein the preset points comprise a starting point and an ending point of the motion route;
the measuring module 200 is configured to measure, when the motion platform reaches each preset point, a moving distance of the motion platform relative to the starting point by using the laser interferometer and the encoder, respectively, so as to obtain a measured value of the laser interferometer and a measured value of the encoder;
a first calculation module 300, configured to calculate a first position estimated value when the motion platform reaches each preset point according to the measured value of the laser interferometer and the measured value of the encoder;
the second calculation module 400 is configured to estimate the real-time position of the motion platform according to the real-time encoder measurement value and the first position estimated value measured by the encoder when the real-time position of the motion platform needs to be measured.
In some embodiments, the first calculation module 300 performs when calculating the first position estimate when the motion stage reaches each preset point based on the laser interferometer measurements and the encoder measurements:
s31, calculating a weight coefficient according to the measured value of the laser interferometer and the measured value of the encoder;
s32, calculating a first position pre-estimation value according to the weight coefficient.
In some embodiments, the first calculation module 300 performs when used to calculate the weight coefficients from the laser interferometer measurements and the encoder measurements:
s311, calculating a weight coefficient according to the following formula:
；
；
；
；
；
wherein,weight coefficient corresponding to the i-th preset point,/for the i-th preset point>Standard deviation of the laser interferometer measurement corresponding to the i-th preset point,/->Encoder measurement for the i-th preset pointStandard deviation of the magnitude>For the laser interferometer measurement corresponding to the i-th preset point,/th preset point>For the mean value of the laser interferometer measurements for all preset points, < >>Encoder measurement value corresponding to the i-th preset point,>for the average of the encoder measurements for all preset points, i represents the i-th preset point and n is the total number of preset points.
In some embodiments, the first calculation module 300 performs, when used to calculate the first position estimate from the weight coefficients:
s321, calculating a first position pre-estimated value according to the following formula:
;
wherein,and (5) predicting a value for the first position corresponding to the ith preset point.
In some embodiments, the second calculation module 400 is configured to, when the real-time position of the motion platform needs to be measured, perform:
s41, calculating the real-time position of the motion platform according to the following formula:
；
；
wherein,for the real-time position of the motion platform +.>For real-time encoder measurement, j is the sequence number of the previous preset point of the current position of the motion platform, j+1 is the sequence number of the next preset point of the current position of the motion platform, the current position of the motion platform is between the jth preset point and the jth+1th preset point, and the->Encoder measurement for the jth preset point, for example>Encoder measurement value of j+1th preset point,>for the first position preset value of the jth preset point,/th preset point>The first position of the j+1th preset point is estimated.
Referring to fig. 3, fig. 3 is a schematic structural diagram of an electronic device according to an embodiment of the present invention, and the present invention provides an electronic device 13, including: processor 1301 and memory 1302, processor 1301 and memory 1302 being interconnected and communicating with each other by a communication bus 1303 and/or other form of connection mechanism (not shown), memory 1302 storing computer readable instructions executable by processor 1301, which when the electronic device is running, processor 1301 executes the computer readable instructions to perform the linear motion device position measurement method in any of the alternative implementations of the above embodiments when executed to perform the functions of: the motion platform is controlled to do linear motion according to a specified motion route and sequentially pass through a plurality of preset points, wherein the preset points comprise a starting point and an ending point of the motion route; when the motion platform reaches each preset point, measuring the moving distance of the motion platform relative to the starting point by using a laser interferometer and an encoder to obtain a laser interferometer measured value and an encoder measured value; when the real-time position of the motion platform needs to be measured, the real-time position of the motion platform is estimated according to the real-time encoder measured value and the first position estimated value measured by the encoder.
An embodiment of the present invention provides a computer readable storage medium having a computer program stored thereon, which when executed by a processor, performs the method for measuring a position of a linear motion device in any of the alternative implementations of the foregoing embodiment, so as to implement the following functions: the motion platform is controlled to do linear motion according to a specified motion route and sequentially pass through a plurality of preset points, wherein the preset points comprise a starting point and an ending point of the motion route; when the motion platform reaches each preset point, measuring the moving distance of the motion platform relative to the starting point by using a laser interferometer and an encoder to obtain a laser interferometer measured value and an encoder measured value; when the real-time position of the motion platform needs to be measured, the real-time position of the motion platform is estimated according to the real-time encoder measured value and the first position estimated value measured by the encoder.
The computer readable storage medium may be implemented by any type or combination of volatile or non-volatile Memory devices, such as static random access Memory (Static Random Access Memory, SRAM), electrically erasable Programmable Read-Only Memory (EEPROM), erasable Programmable Read-Only Memory (Erasable Programmable Read Only Memory, EPROM), programmable Read-Only Memory (PROM), read-Only Memory (ROM), magnetic Memory, flash Memory, magnetic disk, or optical disk.
In the embodiments provided in the present invention, it should be understood that the disclosed apparatus and method may be implemented in other manners. The above-described apparatus embodiments are merely illustrative, for example, the division of the units is merely a logical function division, and there may be other manners of division in actual implementation, and for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some communication interface, device or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form.
Further, the units described as separate units may or may not be physically separate, and units displayed as units may or may not be physical units, may be located in one place, or may be distributed over a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
Furthermore, functional modules in various embodiments of the present invention may be integrated together to form a single portion, or each module may exist alone, or two or more modules may be integrated to form a single portion.
In this document, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions.
The above description is only an example of the present invention and is not intended to limit the scope of the present invention, and various modifications and variations will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A linear motion device position measurement method for a linear motion device, the linear motion device comprising an encoder and a motion platform, the encoder being configured to measure a current position of the motion platform, the method comprising the steps of:
s1, controlling the motion platform to do linear motion according to a specified motion route and sequentially pass through a plurality of preset points, wherein the preset points comprise a starting point and an ending point of the motion route;
s2, when the motion platform reaches each preset point, measuring the moving distance of the motion platform relative to the starting point by using a laser interferometer and an encoder respectively to obtain a laser interferometer measured value and an encoder measured value;
s3, calculating a first position preset value when the motion platform reaches each preset point according to the measured value of the laser interferometer and the measured value of the encoder;
s4, when the real-time position of the moving platform needs to be measured, estimating the real-time position of the moving platform according to the real-time encoder measured value measured by the encoder and the first position estimated value.
2. The method for measuring a position of a linear motion device according to claim 1, wherein the specific steps in step S3 include:
s31, calculating a weight coefficient according to the measured value of the laser interferometer and the measured value of the encoder;
s32, calculating the first position pre-estimation value according to the weight coefficient.
3. The method of measuring a position of a linear motion device according to claim 2, wherein the specific steps in step S31 include:
s311, calculating the weight coefficient according to the following formula:
；
；
；
；
；
wherein,for the weight coefficient corresponding to the ith preset point, < >>For the standard deviation of the laser interferometer measurements corresponding to the ith preset point, -th>For the standard deviation of the encoder measurement value corresponding to the ith preset point, +.>For the laser interferometer measurement value corresponding to the ith preset point, +.>For the mean value of the laser interferometer measurements of all said preset points, +.>For the encoder measurement value corresponding to the i-th preset point, < >>For the average value of the encoder measurement values of all the preset points, i represents the ith preset point, and n is the total number of the preset points.
4. A method for measuring a position of a linear motion device according to claim 3, wherein the specific steps in step S32 include:
s321, calculating the first position estimated value according to the following formula:
;
wherein,and predicting a value for the first position corresponding to the ith preset point.
5. The method of measuring a position of a linear motion device according to claim 4, wherein the specific steps in step S4 include:
s41, calculating the real-time position of the motion platform according to the following formula:
；
；
wherein,for the real-time position of the motion platform, +.>For the real-time encoder measurement value, j is the serial number of the preset point before the current position of the moving platform, j+1 is the serial number of the preset point after the current position of the moving platform, and the current position of the moving platform is between the jth preset point and the jth+1 preset point>Encoder measurement for the j-th preset pointMagnitude of->The (j+1) th encoder measurement value of the preset point, ">For the first position pre-estimated value of the j-th preset point,/th preset point>And (3) predicting a value for the first position of the j+1th preset point.
6. A linear motion device position measurement device for a linear motion device, the linear motion device comprising an encoder and a motion platform, the encoder being configured to measure a current position of the motion platform, comprising:
the control module is used for controlling the motion platform to do linear motion according to a specified motion route and sequentially pass through a plurality of preset points, wherein the preset points comprise a starting point and an ending point of the motion route;
the measuring module is used for measuring the moving distance of the moving platform relative to the starting point by using a laser interferometer and an encoder respectively when the moving platform reaches each preset point to obtain a laser interferometer measured value and an encoder measured value;
the first calculation module is used for calculating a first position pre-estimated value when the motion platform reaches each preset point according to the measured value of the laser interferometer and the measured value of the encoder;
and the second calculation module is used for estimating the real-time position of the motion platform according to the real-time encoder measured value measured by the encoder and the first position estimated value when the real-time position of the motion platform needs to be measured.
7. The linear motion device position measurement apparatus of claim 6, wherein the first calculation module performs, when calculating the first position estimate value at which the motion stage reaches each of the preset points, based on the laser interferometer measurement value and the encoder measurement value:
s31, calculating a weight coefficient according to the measured value of the laser interferometer and the measured value of the encoder;
s32, calculating the first position pre-estimation value according to the weight coefficient.
8. The linear motion device position measurement apparatus of claim 7, wherein the first calculation module is configured to perform, when calculating the weight coefficients from the laser interferometer measurements and the encoder measurements:
s311, calculating the weight coefficient according to the following formula:
；
；
；
；
；
wherein,for the weight coefficient corresponding to the ith preset point, < >>For the standard deviation of the laser interferometer measurements corresponding to the ith preset point, -th>For the standard deviation of the encoder measurement value corresponding to the ith preset point, +.>For the laser interferometer measurement value corresponding to the ith preset point, +.>For the mean value of the laser interferometer measurements of all said preset points, +.>For the encoder measurement value corresponding to the i-th preset point, < >>For the average value of the encoder measurement values of all the preset points, i represents the ith preset point, and n is the total number of the preset points.
9. An electronic device comprising a processor and a memory storing computer readable instructions that, when executed by the processor, perform the steps of the linear motion device position measurement method of any one of claims 1-5.
10. A computer readable storage medium, on which a computer program is stored, characterized in that the computer program, when being executed by a processor, runs the steps in the linear motion device position measuring method according to any one of claims 1-5.
CN202311776190.1A 2023-12-22 2023-12-22 Linear motion device position measuring method and device, electronic equipment and storage medium Active CN117454060B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311776190.1A CN117454060B (en) 2023-12-22 2023-12-22 Linear motion device position measuring method and device, electronic equipment and storage medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311776190.1A CN117454060B (en) 2023-12-22 2023-12-22 Linear motion device position measuring method and device, electronic equipment and storage medium

Publications (2)

Publication Number Publication Date
CN117454060A true CN117454060A (en) 2024-01-26
CN117454060B CN117454060B (en) 2024-03-19

Family

ID=89591515

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311776190.1A Active CN117454060B (en) 2023-12-22 2023-12-22 Linear motion device position measuring method and device, electronic equipment and storage medium

Country Status (1)

Country Link
CN (1) CN117454060B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107422302A (en) * 2017-05-18 2017-12-01 重庆大学 A kind of method for improving cellphone subscriber's displacement estimated accuracy
WO2017219640A1 (en) * 2016-06-20 2017-12-28 广州视源电子科技股份有限公司 Trajectory planning method and device for mechanical arm
CN115079729A (en) * 2022-06-09 2022-09-20 上海精测半导体技术有限公司 Motion platform position compensation method and system and electronic equipment
CN116880356A (en) * 2023-06-30 2023-10-13 中国科学院信息工程研究所 Method and device for monitoring machining state of numerical control machine tool

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017219640A1 (en) * 2016-06-20 2017-12-28 广州视源电子科技股份有限公司 Trajectory planning method and device for mechanical arm
CN107422302A (en) * 2017-05-18 2017-12-01 重庆大学 A kind of method for improving cellphone subscriber's displacement estimated accuracy
CN115079729A (en) * 2022-06-09 2022-09-20 上海精测半导体技术有限公司 Motion platform position compensation method and system and electronic equipment
CN116880356A (en) * 2023-06-30 2023-10-13 中国科学院信息工程研究所 Method and device for monitoring machining state of numerical control machine tool

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
YIMING LIU ET AL.: "Soft, miniaturized, wireless olfactory interface for virtual reality", NATURE COMMUNICATIONS, vol. 14, no. 1, 9 May 2023 (2023-05-09), pages 1 - 14 *

Also Published As

Publication number Publication date
CN117454060B (en) 2024-03-19

Similar Documents

Publication Publication Date Title
CN107255795B (en) Indoor mobile robot positioning method and device based on EKF/EFIR hybrid filtering
CN106533750B (en) The forecasting system and method for non-stationary type application user concurrent amount under a kind of cloud environment
CN110039373B (en) Method and system for predicting thermal deformation of spindle of numerical control machine tool
US20210018198A1 (en) Building control system with adaptive online system identification
CN111279209B (en) Fingerprint data preprocessing method for improving positioning model
CN110068330B (en) Autonomous positioning method of robot based on ARMA model
CN112904266B (en) Method and device for predicting service life of electric energy meter
CN109379240A (en) Car networking flux prediction model construction method, device and electronic equipment
CN109767133A (en) The electric quantity compensating method and apparatus of data are recorded based on load
CN116659803A (en) Method for acquiring aerodynamic load of continuous wind tunnel based on balance zero point on-line monitoring
CN109159112A (en) A kind of robot motion&#39;s method for parameter estimation based on Unscented kalman filtering
CN111008727A (en) Power distribution station load prediction method and device
CN117454060B (en) Linear motion device position measuring method and device, electronic equipment and storage medium
Li et al. A wiener-based remaining useful life prediction method with multiple degradation patterns
CN115908051A (en) Method for determining energy storage capacity of power system
CN110210326B (en) Online train identification and speed estimation method based on optical fiber vibration signals
JP2015148934A (en) Power generation amount prediction device and power generation amount prediction method
CN105425582A (en) Kalman filtering based online calibrating method of Stewart mechanism
CN115202802A (en) Alarm threshold determination method, device, equipment, storage medium and alarm system
CN115235527A (en) Sensor external parameter calibration method and device and electronic equipment
US11868431B2 (en) Information processing apparatus, information processing method, and non-transitory computer readable medium
CN113125046B (en) Thermal resistance degradation detection method based on cross calibration technology
Yu et al. Unscented trainable Kalman filter based on deep learning method considering incomplete information
CN105989372B (en) Identify the method equipment and system of important and insensitive secondary cause indication character
CN114646328A (en) Method, device, equipment and medium for determining path information

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant