CN117448749A - Reaction spray gun of flame hydrolysis deposition device - Google Patents
Reaction spray gun of flame hydrolysis deposition device Download PDFInfo
- Publication number
- CN117448749A CN117448749A CN202311699054.7A CN202311699054A CN117448749A CN 117448749 A CN117448749 A CN 117448749A CN 202311699054 A CN202311699054 A CN 202311699054A CN 117448749 A CN117448749 A CN 117448749A
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- CN
- China
- Prior art keywords
- pipeline
- air
- jet pipeline
- jet
- mounting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 24
- 230000007062 hydrolysis Effects 0.000 title claims abstract description 19
- 238000006460 hydrolysis reaction Methods 0.000 title claims abstract description 19
- 230000008021 deposition Effects 0.000 title claims abstract description 17
- 239000007921 spray Substances 0.000 title claims abstract description 17
- 238000002347 injection Methods 0.000 claims abstract description 34
- 239000007924 injection Substances 0.000 claims abstract description 34
- 238000009423 ventilation Methods 0.000 claims abstract description 26
- 238000007789 sealing Methods 0.000 claims description 24
- 230000000149 penetrating effect Effects 0.000 claims description 7
- 230000000694 effects Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 abstract description 10
- 238000002485 combustion reaction Methods 0.000 abstract description 7
- 239000001301 oxygen Substances 0.000 description 11
- 229910052760 oxygen Inorganic materials 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 10
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- 239000001257 hydrogen Substances 0.000 description 6
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000003245 coal Substances 0.000 description 2
- 239000000567 combustion gas Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910003910 SiCl4 Inorganic materials 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Abstract
The invention provides a reaction spray gun of a flame hydrolysis deposition device, which relates to the technical field of reaction spray guns and comprises a first air injection pipeline, wherein a second air injection pipeline is arranged in the middle of the first air injection pipeline, a third air injection pipeline is arranged in the middle of the second air injection pipeline, a protection pipeline is arranged on a fourth air injection pipeline through a positioning assembly, a first ventilation pipeline, a second ventilation pipeline, a third ventilation pipeline and a fourth ventilation pipeline are fixedly arranged on a mounting plate at equal intervals, and a circular ring is arranged on the protection pipeline. The invention solves the problems of insufficient combustion and difficult control of gas proportion caused by different gases sprayed from the same nozzle. In addition, the diameter of the outlet of the pipeline is contracted, so that the distance between the reaction ignition position and the pipeline is increased, the damage of high-temperature flame to the pipeline is reduced, and the generation cost is further reduced. Finally, the detachable protection tube is designed, and the cost can be further effectively reduced through the replacement of local parts without integral replacement.
Description
Technical Field
The invention relates to the technical field of reaction spray guns, in particular to a reaction spray gun of a flame hydrolysis deposition device.
Background
The prior silicon-based silicon dioxide planar lightwave circuit technology is rapidly developed and is commonly used for manufacturing various optical/passive devices, and the preparation of silicon-based silicon dioxide materials by a flame hydrolysis method has the advantages of high deposition speed and good process repeatability, and is a preferred process for preparing silicon-based silicon dioxide optical waveguide devices at present, such as a high-pressure double-oxygen flow internal combustion type pulverized coal flame spray gun in the patent application No. CN93200983.2, which consists of a primary ignition combustion nozzle, a secondary mixing combustion chamber (8), an outlet nozzle (7) and a high-speed water cooler consisting of water inlet and outlet pipes (2) and (3), wherein the primary ignition combustion nozzle consists of a primary oxygen delivery pipe (11), a pulverized coal spray pipe (1), a cyclone device (4), an ignition device (9) and a flame stabilizer (5), and is characterized in that the pressure of the input oxygen is not less than 0.15MPa, at least one section with at least two oxygen supplementing holes is arranged on the secondary oxygen spray pipe (10) along the axis direction, and the length of the combustion chamber (8) is not less than 3 times the diameter of the outlet of the nozzle. The spray gun has high flow velocity, high flame temperature, high rigidity and high heat supply intensity, and becomes a high-efficiency high-energy-saving device in smelting. However, in the above technical solution, different gases are sprayed from the same nozzle, so that the gases cannot be fully combusted, and meanwhile, the ratio of the different gases is difficult to control, so that the process controllability is poor.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a reaction spray gun of a flame hydrolysis deposition device, which solves the problems of insufficient combustion and difficult control of gas proportion caused by different gases sprayed from the same nozzle. In addition, the diameter of the outlet of the pipeline is contracted, so that the distance between the reaction ignition position and the pipeline is increased, the damage of high-temperature flame to the pipeline is reduced, and the generation cost is further reduced. Finally, the detachable protection tube is designed, and the cost can be further effectively reduced through the replacement of local parts without integral replacement.
Technical scheme (one)
In order to achieve the above purpose, the invention is realized by the following technical scheme: the utility model provides a flame hydrolysis deposition device's reaction spray gun, includes first jet-propelled pipeline, first jet-propelled pipeline mid-mounting has the second jet-propelled pipeline, second jet-propelled pipeline mid-mounting has the third jet-propelled pipeline, third jet-propelled pipeline mid-mounting has the fourth jet-propelled pipeline, be provided with locating component on the fourth jet-propelled pipeline, install the protection pipeline through locating component on the fourth jet-propelled pipeline, first jet-propelled pipeline lower extreme fixed mounting has the mounting panel, equidistant fixed mounting has first vent pipe, second vent pipe, third vent pipe, fourth vent pipe on the mounting panel, first vent pipe, second vent pipe, third vent pipe, fourth vent pipe respectively with first jet-propelled pipeline, second jet-propelled pipeline, third jet-propelled pipeline, fourth jet-propelled pipeline connection, the integration is provided with the ring on third jet-propelled pipeline, the second jet-propelled pipeline inner wall.
Preferably, the positioning assembly comprises an upper mounting plate and a lower mounting plate, the lower end of the protection pipeline is fixedly provided with the upper mounting plate, and the upper end of the fourth air injection pipeline is fixedly provided with the lower mounting plate.
Preferably, the upper surface of the lower mounting plate is provided with a sealing groove, and the upper surface of the lower mounting plate is provided with a plurality of clamping grooves at equal intervals.
Preferably, the sealing ring is fixedly arranged at the lower end of the upper mounting disc, the sealing ring is arranged inside the sealing groove, the clamping block is fixedly arranged on the lower surface of the upper mounting disc, and the clamping block is arranged inside the clamping groove.
Preferably, clamping plates are arranged on the side surfaces of the lower mounting plate through bolts.
Preferably, the fixing holes are formed in the clamping blocks in a penetrating mode.
Preferably, the fixing column is fixedly arranged on the inner surface of the clamping plate, and the top end of the fixing column is movably arranged in the fixing hole through the clamping groove.
Preferably, the ring is tapered.
Preferably, the first ventilation duct, the second ventilation duct, and the third ventilation duct are concentric circles.
The invention provides a reaction spray gun of a flame hydrolysis evaporation device. The beneficial effects are as follows:
1. the reaction gas and the first vent pipe, oxygen and the second vent pipe, hydrogen and third vent pipe, helium and fourth vent pipe are connected, through first jet pipe, the second jet pipe, the third jet pipe, the different gases of fourth jet pipe supply, so that the required combustion gas of flame is produced more efficiently, through staff's rotation bolt, make the bolt remove to the direction of keeping away from lower mounting plate, simultaneously can make splint remove to the direction of keeping away from lower mounting plate, and because fourth jet pipe upper end fixed mounting has lower mounting plate, the seal groove has been seted up to lower mounting plate upper surface, a plurality of draw-in grooves have been seted up to lower mounting plate upper surface equidistance, go up mounting plate lower extreme fixed mounting has the sealing ring, the sealing ring sets up inside the seal groove, go up mounting plate lower surface fixed mounting has the fixture block, the fixture block sets up inside the draw-in groove, lower mounting plate side all has the splint through the bolt, a plurality of fixture blocks have all run through the fixed orifices, the fixed column top activity and pass the draw-in groove setting inside the fixed orifices, so that can follow the fixed column top breaks away from the fixed orifices inside, just can not receive a plurality of draw-in grooves at this time at the same time, can be replaced the protection device through the work on the upper mounting plate upper surface equidistance, can be further replaced the protection device, can be realized through the protection device, the cost can be replaced by the protection device.
2. By shrinking the diameter of the outlet of the pipeline, the distance of the reaction ignition position is increased, which is favorable for reducing the damage of high-temperature flame to the pipeline and further reduces the generation cost.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic side view of the present invention;
FIG. 3 is a schematic view of a fourth jet pipeline according to the present invention;
FIG. 4 is a schematic view of a protective pipe structure according to the present invention;
FIG. 5 is a schematic view of a clamping plate structure according to the present invention;
fig. 6 is a schematic cross-sectional view of the present invention.
1, a first air injection pipeline; 2. a second jet pipe; 3. a third jet pipe; 4. a fourth jet pipe; 5. protecting the pipeline; 6. a positioning assembly; 601. an upper mounting plate; 602. a lower mounting plate; 603. a clamping plate; 604. sealing grooves; 605. a clamping groove; 606. a seal ring; 607. a clamping block; 608. a fixing hole; 609. a bolt; 610. fixing the column; 7. a circular ring; 8. a mounting plate; 9. a first ventilation duct; 10. a second vent conduit; 11. a third vent line; 12. and a fourth vent pipe.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1, 2 and 3, the embodiment of the invention provides a reaction spray gun of a flame hydrolysis deposition device, which comprises a first air injection pipeline 1, a second air injection pipeline 2 is installed in the middle of the first air injection pipeline 1, a third air injection pipeline 3 is installed in the middle of the second air injection pipeline 2, a fourth air injection pipeline 4 is installed in the middle of the third air injection pipeline 3, a positioning component 6 is arranged on the fourth air injection pipeline 4, a protection pipeline 5 is installed on the fourth air injection pipeline 4 through the positioning component 6, a mounting plate 8 is fixedly installed at the lower end of the first air injection pipeline 1, a first ventilation pipeline 9, a second ventilation pipeline 10, a third ventilation pipeline 11 and a fourth ventilation pipeline 12 are fixedly installed on the mounting plate 8 at equal intervals, the first ventilation pipeline 9, the second ventilation pipeline 10, the third ventilation pipeline 11 and the fourth ventilation pipeline 12 are respectively connected with the first air injection pipeline 1, the second air injection pipeline 2, the third air injection pipeline 3 and the fourth air injection pipeline 4, and a circular ring 7 is arranged on the inner walls of the third air injection pipeline 3 and the second air injection pipeline 2.
As shown in fig. 2, 3, 4 and 6, the positioning assembly 6 comprises an upper mounting plate 601 and a lower mounting plate 602, the lower end of the protection pipeline 5 is fixedly provided with the upper mounting plate 601, the upper end of the fourth air injection pipeline 4 is fixedly provided with the lower mounting plate 602, the upper surface of the lower mounting plate 602 is provided with a sealing groove 604, the upper surface of the lower mounting plate 602 is equidistantly provided with a plurality of clamping grooves 605, the lower end of the upper mounting plate 601 is fixedly provided with a sealing ring 606, the sealing ring 606 is arranged in the sealing groove 604, the lower surface of the upper mounting plate 601 is fixedly provided with a clamping block 607, the clamping block 607 is arranged in the clamping groove 605, the side surface of the lower mounting plate 602 is provided with a clamping plate 603 through bolts 609, a plurality of clamping blocks 607 are provided with fixing holes 608 in a penetrating manner, the inner surface of the clamping plate 603 is fixedly provided with a fixing column 610, the top end of the fixing column 610 is movably arranged in the fixing holes 608 in a penetrating manner through the clamping grooves 605, the bolt 609 is rotated by a worker, so that the bolt 609 moves in a direction far away from the lower mounting plate 602, and meanwhile, the clamping plate 603 moves in a direction far away from the lower mounting plate 602, and because the lower mounting plate 602 is fixedly arranged at the upper end of the fourth air injection pipeline 4, the sealing groove 604 is arranged on the upper surface of the lower mounting plate 602, a plurality of clamping grooves 605 are equidistantly arranged on the upper surface of the lower mounting plate 602, the sealing ring 606 is fixedly arranged at the lower end of the upper mounting plate 601, the sealing ring 606 is arranged in the sealing groove 604, the clamping blocks 607 are fixedly arranged on the lower surface of the upper mounting plate 601, the clamping plates 603 are arranged on the side surfaces of the lower mounting plate 602 through the bolts 609, the fixing holes 608 are respectively formed by penetrating through the clamping blocks 607, the fixing columns 610 are fixedly arranged on the inner surfaces of the clamping plates 603, the top ends of the fixing columns 610 are movably arranged in the fixing holes 608 in a penetrating manner, at this time, the top end of the fixing column 610 is separated from the fixing hole 608, the clamping block 607 is not bound in the clamping groove 605, and the protecting pipe 5 is taken out from the device by the upward pulling of the protecting pipe 5 by the staff, otherwise, the protecting pipe 5 can be installed on the device, so that the protecting pipe 5 can be replaced by the staff conveniently.
As shown in fig. 2, 3, 4 and 6, the annular ring 7 is conical, so that the diameters of the outlet positions of the third air injection pipeline 3 and the second air injection pipeline 2 can be reduced, the air pressure is increased, the distance between the hydrogen and the oxygen is further, the reaction ignition position of the hydrogen and the oxygen is increased, and the temperature of the quartz torch head is reduced, therefore, quartz materials with lower refractory temperature can be selected, and the production cost is further effectively reduced.
As shown in fig. 1, the first ventilation duct 9, the second ventilation duct 10, and the third ventilation duct 11 are concentric circles, so that the gas can be uniformly injected.
Working principle: when the device is needed, the reaction gas (BCl 3 or SiCl4 or POCl 3) is connected with the first ventilation pipeline 9, the oxygen is connected with the second ventilation pipeline 10, the hydrogen is connected with the third ventilation pipeline 11, the helium is connected with the fourth ventilation pipeline 12, and the supply gas is respectively sprayed out through the first air spraying pipeline 1, the second air spraying pipeline 2, the third air spraying pipeline 3 and the fourth air spraying pipeline 4 so as to generate combustion gas needed by flame more efficiently. Meanwhile, the mixture is mixed and burned in proportion, the powder mixture of B2O3, siO2 and P2O5 is generated based on a flame hydrolysis method and uniformly covers the surface of a wafer, and then a film is generated through subsequent annealing. When the protection pipeline 5 needs to be disassembled, at the moment, the bolt 609 is rotated by a worker, so that the bolt 609 moves in the direction away from the lower mounting plate 602, meanwhile, the clamping plate 603 moves in the direction away from the lower mounting plate 602, and because the lower mounting plate 602 is fixedly arranged at the upper end of the fourth air injection pipeline 4, the sealing groove 604 is arranged on the upper surface of the lower mounting plate 602, the plurality of clamping grooves 605 are equidistantly arranged on the upper surface of the lower mounting plate 602, the sealing ring 606 is fixedly arranged at the lower end of the upper mounting plate 601, the sealing ring 606 is arranged in the sealing groove 604, the clamping block 607 is fixedly arranged on the lower surface of the upper mounting plate 601, the clamping block 607 is arranged in the clamping groove 605, the clamping plates 603 are arranged on the side surfaces of the lower mounting plate 602 through the bolts 609, the plurality of clamping blocks 607 are provided with the fixing holes 608 in a penetrating manner, the inner surface of the clamping plate 603 is fixedly provided with the fixing columns 610, the top of the fixing column 610 moves and passes through the clamping groove 605 to be arranged in the fixing hole 608, at this time, the top of the fixing column 610 is separated from the inside of the fixing hole 608, the clamping block 607 is not bound in the clamping groove 605, at this time, the protecting pipeline 5 is taken out from the device by the upward pulling of the protecting pipeline 5 by a worker, otherwise, the protecting pipeline 5 can be arranged on the device, the protecting pipeline 5 can be conveniently replaced by the worker, the diameter of the outlet positions of the third air injection pipeline 3 and the second air injection pipeline 2 is reduced by arranging the circular ring 7 on the inner walls of the third air injection pipeline 3 and the second air injection pipeline 2, the air pressure is increased, the distance between the hydrogen and the oxygen is further, the reaction ignition position of the hydrogen and the oxygen is increased, the temperature of the quartz torch head is reduced, and therefore, the quartz material with lower fireproof temperature can be selected, and the production cost is effectively reduced.
It should be understood that the foregoing examples of the present invention are merely illustrative of the present invention and not limiting of the embodiments of the present invention, and that various other changes and modifications can be made by those skilled in the art based on the above description, and it is not intended to be exhaustive of all of the embodiments, and all obvious changes and modifications that come within the scope of the invention are defined by the following claims.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. Reaction spray gun of a flame hydrolysis deposition device, comprising a first jet pipe (1), characterized in that: the novel air-jet pipeline is characterized in that a second air-jet pipeline (2) is arranged in the middle of the first air-jet pipeline (1), a third air-jet pipeline (3) is arranged in the middle of the second air-jet pipeline (2), a fourth air-jet pipeline (4) is arranged in the middle of the third air-jet pipeline (3), a positioning component (6) is arranged on the fourth air-jet pipeline (4), a protection pipeline (5) is arranged on the fourth air-jet pipeline (4) through the positioning component (6), a mounting plate (8) is fixedly arranged at the lower end of the first air-jet pipeline (1), a first air-jet pipeline (9), a second air-jet pipeline (10), a third air-jet pipeline (11) and a fourth air-jet pipeline (12) are fixedly arranged on the mounting plate (8) at equal intervals, and the first air-jet pipeline (9), the second air-jet pipeline (10), the third air-jet pipeline (11) and the fourth air-jet pipeline (12) are respectively connected with the first air-jet pipeline (1), the second air-jet pipeline (2), the third air-jet pipeline (3) and the fourth air-jet pipeline (4), and the third air-jet pipeline (2) are integrally provided with a circular ring (7).
2. A reaction lance for a flame hydrolysis deposition device according to claim 1, wherein: the positioning assembly (6) comprises an upper mounting disc (601) and a lower mounting disc (602), the upper mounting disc (601) is fixedly arranged at the lower end of the protection pipeline (5), and the lower mounting disc (602) is fixedly arranged at the upper end of the fourth air injection pipeline (4).
3. A reaction lance for a flame hydrolysis deposition apparatus as set forth in claim 2, wherein: a sealing groove (604) is formed in the upper surface of the lower mounting plate (602), and a plurality of clamping grooves (605) are formed in the upper surface of the lower mounting plate (602) at equal intervals.
4. A reaction lance for a flame hydrolysis deposition apparatus as set forth in claim 3, wherein: the sealing device is characterized in that a sealing ring (606) is fixedly arranged at the lower end of the upper mounting plate (601), the sealing ring (606) is arranged inside the sealing groove (604), a clamping block (607) is fixedly arranged on the lower surface of the upper mounting plate (601), and the clamping block (607) is arranged inside the clamping groove (605).
5. The reaction spray gun of a flame hydrolysis deposition device of claim 4, wherein: the side surfaces of the lower mounting plate (602) are provided with clamping plates (603) through bolts (609).
6. A reaction lance for a flame hydrolysis deposition apparatus as set forth in claim 5, wherein: the clamping blocks (607) are provided with fixing holes (608) in a penetrating way.
7. The reaction spray gun of a flame hydrolysis deposition device of claim 6, wherein: the inside surface fixed mounting of splint (603) has fixed column (610), fixed column (610) top activity and pass draw-in groove (605) setting are inside fixed orifices (608).
8. A reaction lance for a flame hydrolysis deposition device according to claim 1, wherein: the circular ring (7) is conical.
9. A reaction lance for a flame hydrolysis deposition device according to claim 1, wherein: the first ventilation pipeline (9), the second ventilation pipeline (10) and the third ventilation pipeline (11) are concentric circles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311699054.7A CN117448749A (en) | 2023-12-12 | 2023-12-12 | Reaction spray gun of flame hydrolysis deposition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311699054.7A CN117448749A (en) | 2023-12-12 | 2023-12-12 | Reaction spray gun of flame hydrolysis deposition device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117448749A true CN117448749A (en) | 2024-01-26 |
Family
ID=89595093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311699054.7A Pending CN117448749A (en) | 2023-12-12 | 2023-12-12 | Reaction spray gun of flame hydrolysis deposition device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117448749A (en) |
-
2023
- 2023-12-12 CN CN202311699054.7A patent/CN117448749A/en active Pending
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