CN117437176A - Method and device for determining available template, probe station and electronic equipment - Google Patents
Method and device for determining available template, probe station and electronic equipment Download PDFInfo
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Abstract
The application discloses a method and a device for determining an available template, a probe station and electronic equipment, and belongs to the technical field of semiconductors, wherein the method for determining the available template comprises the following steps: acquiring a template image of a target wafer template; extracting a straight line in the template image; judging whether the template image reaches a preset standard according to the straight line; and when the template image reaches a preset standard, determining that the target wafer template is available. The method has the advantages that the straight lines in the template image are extracted, the availability judgment of the template image is carried out by utilizing the straight lines, the process is simple, the calculated amount is small, the available template can be rapidly and accurately determined, and then template matching and accurate positioning and straightening can be carried out on the wafer.
Description
Technical Field
The application belongs to the technical field of semiconductors, and particularly relates to a method and a device for determining an available template, a probe station and electronic equipment.
Background
With the development of the semiconductor industry, the sizes of chips and components are smaller and smaller, and the requirements on the accuracy of chip testing are higher and higher. In the field of probe station testing, the deviation of the wafer angle is an important factor affecting the test yield, so that the wafer needs to be straightened to eliminate the influence of the angle deviation.
The most commonly used straightening and correcting method at present adopts vision to carry out positioning and correction, calculates the deflection angle of the wafer by using a template matching method, and then straightens the wafer by rotating a correcting platform by the same angle so as to straighten the wafer.
In order to improve the straightening precision, the straightening process involves multiple template matching, from rough correction to fine correction, so the quality requirement of the template is extremely high.
Disclosure of Invention
The purpose of the application is to provide a method and a device for determining available templates, a probe station and electronic equipment so as to determine templates with higher quality and further improve template matching precision.
According to a first aspect of embodiments of the present application, there is provided a method for determining an available template, where the method for determining an available template may include:
acquiring a template image of a target wafer template;
extracting a straight line in the template image;
judging whether the template image reaches a preset standard according to the straight line;
and when the template image reaches a preset standard, determining that the target wafer template is available.
In some optional embodiments of the present application, extracting straight lines in the template image includes:
carrying out graying treatment on the template image to obtain a gray image;
filtering the gray level image to obtain a filtered image;
performing edge detection processing on the filtered image to obtain a template edge image;
a straight line is extracted based on the template edge image.
In some optional embodiments of the present application, determining whether the template image meets a preset criterion according to the straight line includes:
judging whether the number of straight lines in the same direction in the template edge image exceeds a threshold value or not;
if yes, judging that the number of the template lines reaches a preset standard;
if not, judging that the template line number does not reach the preset standard, and re-acquiring the template image of the target wafer template.
In some optional embodiments of the present application, determining whether the number of straight lines in the same direction in the template edge image exceeds a threshold value includes:
acquiring the endpoint coordinates of a straight line;
calculating an equation of a straight line according to the endpoint coordinates;
determining that two straight lines with slopes and intercepts meeting the conditions of a straight line equation are collinear straight lines, and calculating the endpoint distance of the two collinear straight lines according to endpoint coordinates;
and merging the collinear lines with the end point distance smaller than the preset value to obtain a merged line.
In some optional embodiments of the present application, after merging collinear lines with an endpoint distance smaller than a preset value to obtain a merged line, the method for determining the available template further includes:
classifying the combined straight lines according to a preset slope standard to obtain the number of straight lines in the same direction.
In some optional embodiments of the present application, after performing the graying process on the template image to obtain the gray-scale image, the method for determining the available template further includes:
calculating an absolute difference value between a pixel value of each pixel point of the gray image and a pixel mean value of the gray image;
judging whether the template contrast reaches a preset standard according to the absolute difference value.
In some optional embodiments of the present application, after performing filtering processing on the gray scale image to obtain a filtered image, the method for determining an available template further includes:
converting the filtered image into a floating point image;
performing edge and detail enhancement processing on the floating point image to obtain an enhanced image;
calculating the sum of pixel absolute values of each pixel point of the enhanced image to obtain a pixel sum value;
and judging whether the definition of the template reaches a preset standard according to the pixel sum value.
According to a second aspect of embodiments of the present application, there is provided a determining apparatus for an available template, where the determining apparatus for an available template may include:
the acquisition module is used for acquiring a template image of the target wafer template;
the straight line extraction module is used for extracting straight lines in the template image;
and the judging module is used for judging whether the template image reaches a preset standard according to the straight line, and determining that the target wafer template is available when the template image reaches the preset standard.
In some optional embodiments of the present application, the straight line extraction module includes:
the graying processing unit is used for graying the template image to obtain a gray image;
the filtering unit is used for carrying out filtering treatment on the gray level image to obtain a filtered image;
the edge detection unit is used for carrying out edge detection processing on the filtered image to obtain a template edge image;
and a straight line extraction unit for extracting a straight line based on the template edge image.
In some optional embodiments of the present application, the determining module includes:
the straight line number judging unit is used for judging whether the number of straight lines in the same direction in the template edge image exceeds a threshold value; if yes, judging that the number of the template lines reaches a preset standard; if not, judging that the template line number does not reach the preset standard, and re-acquiring the template image of the target wafer template.
In some optional embodiments of the present application, the straight line number determining unit includes:
an acquisition subunit, configured to acquire an endpoint coordinate of a straight line;
an equation determining subunit for calculating an equation of a straight line according to the endpoint coordinates;
the determining subunit is used for determining that two straight lines with slopes and intercepts meeting the conditions of the straight line equation are collinear straight lines and calculating the endpoint distance of the two collinear straight lines according to the endpoint coordinates;
and the straight line merging subunit is used for merging collinear straight lines with the endpoint distance smaller than a preset value to obtain merged straight lines.
In some optional embodiments of the present application, the determining means of the available templates further comprises:
and the classification module is used for classifying the combined straight lines according to a preset slope standard to obtain the number of straight lines in the same direction.
In some optional embodiments of the present application, the determining means of the available templates further comprises:
the pixel calculation module is used for calculating an absolute difference value between the pixel value of each pixel point of the gray image and the pixel mean value of the gray image;
and the pixel judging module is used for judging whether the contrast of the template reaches a preset standard according to the absolute difference value.
In some optional embodiments of the present application, the determining means of the available templates further comprises:
the floating point type image conversion module is used for converting the filtered image into a floating point type image;
the enhancement processing module is used for carrying out edge and detail enhancement processing on the floating point image to obtain an enhanced image;
the pixel sum value calculation module is used for calculating the sum of the pixel absolute values of each pixel point of the enhanced image to obtain a pixel sum value;
and the pixel judging module is used for judging whether the definition of the template reaches a preset standard according to the pixel sum value.
According to a third aspect of embodiments of the present application, there is provided a probe station for determining available templates using the method for determining available templates according to any of the embodiments of the first aspect.
According to a fourth aspect of embodiments of the present application, there is provided an electronic device, which may include:
a processor;
a memory for storing processor-executable instructions;
wherein the processor is configured to execute instructions to implement a method of determining available templates as shown in any of the embodiments of the first aspect.
The technical scheme of the application has the following beneficial technical effects:
according to the method, the straight line in the template image is extracted, the availability judgment of the template image is carried out by utilizing the straight line, the process is simple, the calculated amount is small, the available template can be rapidly and accurately determined, template matching can be carried out, and accurate positioning and straightening can be carried out on a wafer.
Drawings
FIG. 1 is a flow chart of a method of determining available templates in an exemplary embodiment of the present application;
FIG. 2 is a gray scale image of a template in an exemplary embodiment of the present application;
FIG. 3 is a filtered image of a template in an exemplary embodiment of the present application;
FIG. 4 is a template edge image of a template in an exemplary embodiment of the present application;
FIG. 5 is a straight line extracted image of a template in an exemplary embodiment of the present application;
FIG. 6 is a rectilinear merged image of a template in an exemplary embodiment of the present application;
FIG. 7 is an absolute difference image of a template in an exemplary embodiment of the present application;
FIG. 8 is a floating point enhanced image of a template in an exemplary embodiment of the present application;
FIG. 9 is a Laplace image of a template in an exemplary embodiment of the present application taking an absolute value image;
FIG. 10 is a schematic diagram of a device for determining available templates in an exemplary embodiment of the present application;
FIG. 11 is a schematic diagram of the structure of a probe station in an exemplary embodiment of the present application;
fig. 12 is a schematic diagram of a hardware structure of an electronic device in an exemplary embodiment of the present application.
Detailed Description
For the purposes of making the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail below with reference to the accompanying drawings. It should be understood that the description is only exemplary and is not intended to limit the scope of the present application. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the concepts of the present application.
A layer structure schematic diagram according to an embodiment of the present application is shown in the drawings. The figures are not drawn to scale, wherein certain details may be exaggerated and some details may be omitted for clarity. The shapes of the various regions, layers and relative sizes, positional relationships between them shown in the drawings are merely exemplary, may in practice deviate due to manufacturing tolerances or technical limitations, and one skilled in the art may additionally design regions/layers having different shapes, sizes, relative positions as actually required.
It will be apparent that the embodiments described are some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.
In the description of the present application, it should be noted that the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In addition, the technical features described below in the different embodiments of the present application may be combined with each other as long as they do not collide with each other.
In the process of straightening and correcting the wafer, the accuracy of template matching is greatly affected, such as characteristic points on the surface of the wafer, dirt interference on the surface of the wafer, chromatic aberration on the surface of the wafer, illumination and the like. Therefore, the quality of the selected wafer surface template has a great influence on the matching precision, and the template is selected subjectively by equipment operators, which has certain requirements on the experience of the operators. Operators are very likely to have low template selection quality due to insufficient experience, so that matching errors are caused, the wafer is not straightened, and the testing precision of equipment is affected. Therefore, the application provides a method and a device for determining an available template, a probe station and electronic equipment to determine a template with higher quality, so that the accuracy of subsequent matching is improved.
The method, the device, the probe station and the electronic equipment for determining the available templates provided by the embodiment of the application are described in detail through specific embodiments and application scenes thereof with reference to the accompanying drawings.
As shown in fig. 1, in a first aspect of the embodiments of the present application, a method for determining an available template is provided, where the method for determining an available template may include:
s110: acquiring a template image of a target wafer template;
s120: extracting a straight line in the template image;
s130: judging whether the template image reaches a preset standard according to the straight line;
s140: and when the template image reaches a preset standard, determining that the target wafer template is available.
The method of the embodiment is simple in process and small in calculated amount, can quickly and accurately determine the available template by extracting the straight line in the template image and judging the availability of the template image by utilizing the straight line, and can further perform template matching and accurately position and straighten the wafer.
For a more clear description, the following description will be given for the above steps, respectively:
first, step S110: and obtaining a template image of the target wafer template.
To obtain the template image, this step first determines the area of the registered template and then determines whether the size of the template image is available, if undersized, which would result in no subsequent lines to be found in the image, so that when the image is undersized, the template needs to be re-registered. Wherein the size of the image size can be determined according to the actual situation.
Step S120 follows: and extracting straight lines in the template image.
The step is the basis of the method of the embodiment, the template image can be processed before the straight line is extracted, the edge of the template is extracted, and then the line contained in the template is extracted by using the straight line detection method.
Step S130 follows: judging whether the template image reaches a preset standard according to the straight line.
The step is the core of the method of the embodiment, and whether the template is available or not is obtained by judging the straight line in the template.
Finally, step S140: and when the template image reaches a preset standard, determining that the target wafer template is available.
The research shows that under the condition that the lines in the templates do not reach the standard, the possibility of generating position deviation in matching is greatly increased, so that the matching precision of the templates is greatly influenced, and therefore, the extracted straight lines are compared with the preset standard in the step, and whether the target wafer template is available is further determined.
In some embodiments, extracting straight lines in the template image includes:
carrying out graying treatment on the template image to obtain a gray image;
filtering the gray level image to obtain a filtered image;
performing edge detection processing on the filtered image to obtain a template edge image;
a straight line is extracted based on the template edge image.
Before extracting the straight line in the embodiment, the template image is further required to be processed, firstly, the template image is subjected to gray-scale processing, and an image shown in fig. 2 is obtained; the image is then filtered to obtain the image shown in fig. 3. Illustratively, the filtering process may select gaussian filtering to eliminate noise; finally, edge detection processing is carried out, and an image shown in fig. 4 is obtained. Illustratively, in the edge detection process, the edge detection operator includes, but is not limited to: canny, sobel, rrewitt or Roberts. Wherein the Canny operator may be the preference. After edge detection, straight line extraction can be performed, resulting in an image as shown in fig. 5. For example, hough straight line detection may be selected for extraction in the straight line extraction process.
In some embodiments, determining whether the template image meets the preset criteria according to the straight line includes:
judging whether the number of straight lines in the same direction in the template edge image exceeds a threshold value or not;
if yes, judging that the number of the template lines reaches a preset standard;
if not, judging that the template line number does not reach the preset standard, and re-acquiring the template image of the target wafer template.
In this embodiment, the number of lines in the template is controlled by clamping, and if the number of straight lines in the same direction reaches a threshold value, the template can be considered to reach a preset standard. If the straight lines in the same direction do not reach the quantity threshold, the template is considered to not reach the preset standard, and the template image of the target wafer template needs to be acquired again.
In some embodiments, determining whether the number of lines in the same direction in the template edge image exceeds a threshold comprises:
acquiring the endpoint coordinates of a straight line;
calculating an equation of a straight line according to the endpoint coordinates;
determining that two straight lines with slopes and intercepts meeting the conditions of a straight line equation are collinear straight lines, and calculating the endpoint distance of the two collinear straight lines according to endpoint coordinates;
and merging the collinear lines with the end point distance smaller than the preset value to obtain a merged line.
In this embodiment, after the straight lines are extracted, a plurality of segments may be formed by one straight line, and in this embodiment, the plurality of segments of straight lines are combined to form an image as shown in fig. 6. In the specific merging process, whether the line segments are collinear or not needs to be judged, in this embodiment, a linear equation is calculated by using the end point coordinates of the line segments, for example, y=kx+b, and k and b of the straight line where each line segment is located need to be calculated, that is, the slope and the intercept, so that the inclination angle difference of different line segments can be calculated, meanwhile, the distance between different line segments needs to be judged, and the difference value, the absolute difference value and the like of the intercept can be used as judgment conditions. As long as the distance between the two straight lines can be judged to be relatively close. For example, the threshold value of the linear inclination angle difference may be 5 degrees, the absolute difference of the intercept may be set to 3, and when the inclination angle difference of the two line segments is less than 5 degrees and the absolute difference of the intercept is less than 3, the two line segments are judged to be collinear.
The line segment for determining the collineation is not necessarily a line segment in a straight line, and the two line segments also need to satisfy that the distance between the end points is smaller. For example, if two of four endpoints of two collinear line segments are less than 5 pixels apart, the two line segments may be considered to belong to a straight line, so that the two line segments may be combined to obtain an image as shown in fig. 6.
In some embodiments, after merging collinear lines with an end point distance smaller than a preset value to obtain a merged line, the method for determining the available template further includes:
classifying the combined straight lines according to a preset slope standard to obtain the number of straight lines in the same direction.
In this embodiment, the multiple combined straight lines are classified according to a slope standard, which may be exemplified by classifying according to an inclination angle, setting the inclination angle to be 45 degrees, classifying the inclination angle with an inclination angle greater than 45 degrees into a class, and may be referred to as a longitudinal line; tilt angles less than or equal to 45 degrees fall into another category and may be referred to as transverse lines. And then counting the number of the straight lines in each class, and judging the availability of the template according to the number of the straight lines in each class. Illustratively, a line score of 0 if the number of horizontal or vertical lines is less than 3, and a score of 1 otherwise. If the line score is 0, the fact that the number of straight lines in the template image is too small is indicated, the matching precision of the subsequent templates is influenced, and the templates need to be registered again; if the score is 1, the number of lines meets the requirement, and the specific number standard is not limited in the invention.
In some embodiments, after the graying process is performed on the template image to obtain a gray scale image, the method for determining the available template further includes:
calculating an absolute difference value between a pixel value of each pixel point of the gray image and a pixel mean value of the gray image;
judging whether the template contrast reaches a preset standard according to the absolute difference value.
The present embodiment determines the availability of the template from another dimension, i.e., determines the template using contrast. For example, the absolute difference between the pixel value and the average value of each pixel point of the gray image can be calculated, each absolute difference is assigned to the pixel point at the corresponding position, the contrast image shown in fig. 7 is drawn, then the number of pixels with the pixel value exceeding a set value (the set value can be 10) in the contrast image is counted, the ratio of the number of the pixels to the total number of the pixels is calculated, and the ratio is converted into the corresponding contrast score according to the ratio; the accumulated value may be obtained by dividing the accumulated value by 1000 by the pixel value of the pixel point exceeding the set value (the set value may be 10) in the contrast image, and if the contrast score is greater than 100, the contrast score may be directly set to 100, and if the contrast score is less than 100, the contrast score may be determined according to the actual calculation result.
The higher the contrast score, the better the template quality, and if the contrast score is smaller than the set contrast score, the lower the contrast of the template image, the later template matching precision is affected, and the template needs to be re-registered.
In some embodiments, after the gray scale image is filtered to obtain a filtered image, the method for determining the available template further includes:
converting the filtered image into a floating point image;
performing edge and detail enhancement processing on the floating point image to obtain an enhanced image;
calculating the sum of pixel absolute values of each pixel point of the enhanced image to obtain a pixel sum value;
and judging whether the definition of the template reaches a preset standard according to the pixel sum value.
The present embodiment determines the availability of the template from another dimension, i.e., determines the template with sharpness. In the process of calculating the definition, the filtered image can be converted into a floating point image and the detail can be enhanced, so that the definition calculation is facilitated.
For example, the filtered image may be converted first, converting the pixel point to a 64-bit floating point type image; then, the floating point image is subjected to Laplace conversion to form a Laplace image shown in FIG. 8; next, taking an absolute value of each pixel point of the laplace image to obtain a laplace absolute value image, wherein the pixel value of the laplace image has a negative value, and the absolute value conversion is equivalent to converting the negative value into a positive value as shown in fig. 9; next, calculating the sum of all pixel values in the Laplace absolute value image; the sharpness calculation may then be performed.
The sharpness calculation formula is as follows:
definition = sum of laplacian absolute image pixels/(template image length. Template image width)
And finally, judging the availability of the template by utilizing the definition. Illustratively, the definition is divided by 1000 to obtain a definition score, if the definition score is greater than 100, the definition score is directly set to 100, and if the definition score is less than 100, the definition score is determined according to the actual calculation result. If the definition score is smaller than the set definition score, the template image is fuzzy, the matching precision of the subsequent template is affected, and the template needs to be registered again.
It should be noted that, in the method for determining an available template provided in the embodiment of the present application, the execution body may be a device for determining an available template, or a control module in the device for determining an available template, where the control module is used for executing the method for determining an available template. In the embodiment of the application, a method for executing the determination of the available template by using the determination device of the available template is taken as an example, and the determination device of the available template provided in the embodiment of the application is described.
As shown in fig. 10, in a second aspect of the embodiments of the present application, there is provided a determining apparatus for an available template, where the determining apparatus for an available template may include:
an acquisition module 1010, configured to acquire a template image of a target wafer template;
a straight line extracting module 1020 for extracting straight lines in the template image;
and a judging module 1030, configured to judge whether the template image meets a preset standard according to the straight line, and determine that the target wafer template is available when the template image meets the preset standard.
In some embodiments, the straight line extraction module 1020 includes:
the graying processing unit is used for graying the template image to obtain a gray image;
the filtering unit is used for carrying out filtering treatment on the gray level image to obtain a filtered image;
the edge detection unit is used for carrying out edge detection processing on the filtered image to obtain a template edge image;
and a straight line extraction unit for extracting a straight line based on the template edge image.
In some embodiments, the determining module 1030 includes:
the straight line number judging unit is used for judging whether the number of straight lines in the same direction in the template edge image exceeds a threshold value; if yes, judging that the number of the template lines reaches a preset standard; if not, judging that the template line number does not reach the preset standard, and re-acquiring the template image of the target wafer template.
In some embodiments, the straight line number judging unit includes:
an acquisition subunit, configured to acquire an endpoint coordinate of a straight line;
an equation determining subunit for calculating an equation of a straight line according to the endpoint coordinates;
the determining subunit is used for determining that the slope and the intercept of the linear equation meet the conditions, the two straight lines are collinear straight lines, and calculating the endpoint distance of the two collinear straight lines according to the endpoint coordinates;
and the straight line merging subunit is used for merging collinear straight lines with the endpoint distance smaller than a preset value to obtain merged straight lines.
In some embodiments, the means for determining available templates further comprises:
and the classification module is used for classifying the combined straight lines according to a preset slope standard to obtain the number of straight lines in the same direction.
In some embodiments, the means for determining available templates further comprises:
the pixel calculation module is used for calculating an absolute difference value between the pixel value of each pixel point of the gray image and the pixel mean value of the gray image;
and the pixel judging module is used for judging whether the contrast of the template reaches a preset standard according to the absolute difference value.
In some embodiments, the means for determining available templates further comprises:
the floating point type image conversion module is used for converting the filtered image into a floating point type image;
the enhancement processing module is used for carrying out edge and detail enhancement processing on the floating point image to obtain an enhanced image;
the pixel sum value calculation module is used for calculating the sum of the pixel absolute values of each pixel point of the enhanced image to obtain a pixel sum value;
and the pixel judging module is used for judging whether the definition of the template reaches a preset standard according to the pixel sum value.
The determining device of the available templates in the embodiment of the application may be a device, or may be a component, an integrated circuit, or a chip in a terminal. The device may be a mobile electronic device or a non-mobile electronic device. By way of example, the mobile electronic device may be a cell phone, tablet computer, notebook computer, palm computer, vehicle-mounted electronic device, wearable device, ultra-mobile personal computer (ultra-mobile personal computer, UMPC), netbook or personal digital assistant (personal digital assistant, PDA), etc., and the non-mobile electronic device may be a server, network attached storage (Network Attached Storage, NAS), personal computer (personal computer, PC), television (TV), teller machine or self-service machine, etc., and the embodiments of the present application are not limited in particular.
The determining device of the available templates in the embodiments of the present application may be a device having an operating system. The operating system may be an Android operating system, an ios operating system, or other possible operating systems, which are not specifically limited in the embodiments of the present application.
The determining device for the available templates provided in the embodiment of the present application can implement each process implemented by the method embodiment of fig. 1, and in order to avoid repetition, a description is omitted here.
Optionally, as shown in fig. 11, the embodiment of the present application further provides a probe station 1100, including a processor 1101, a memory 1102, and a program or an instruction stored in the memory 1102 and capable of running on the processor 1101, where the program or the instruction implements each process of the above embodiment of the method for determining a usable template when executed by the processor 1101, and the same technical effects can be achieved, and for avoiding repetition, a detailed description is omitted herein.
It should be noted that, the probe station in the embodiment of the present application includes the above-described mobile probe station and non-mobile probe station.
Fig. 12 is a schematic hardware structure of an electronic device implementing an embodiment of the present application.
The electronic device 1200 includes, but is not limited to: radio frequency unit 1201, network module 1202, audio output unit 1203, input unit 1204, sensor 1205, display unit 1206, user input unit 1207, interface unit 1208, memory 1209, and processor 1210.
Those skilled in the art will appreciate that the electronic device 1200 may also include a power source (e.g., a battery) for powering the various components, which may be logically connected to the processor 1210 by a power management system, such as to perform functions such as managing charging, discharging, and power consumption by the power management system. The electronic device structure shown in fig. 12 does not constitute a limitation of the electronic device, and the electronic device may include more or less components than illustrated, or may combine certain components, or may be arranged in different components, which are not described in detail herein.
It should be understood that in the embodiment of the present application, the input unit 1204 may include a graphics processor (Graphics Processing Unit, GPU) 12041 and a microphone 12042, and the graphics processor 12041 processes image data of still pictures or videos obtained by an image capturing device (such as a camera) in a video capturing mode or an image capturing mode. The display unit 1206 may include a display panel 12061, and the display panel 12061 may be configured in the form of a liquid crystal display, an organic light emitting diode, or the like. The user input unit 1207 includes a touch panel 12071 and other input devices 12072. The touch panel 12071 is also called a touch screen. The touch panel 12071 may include two parts, a touch detection device and a touch controller. Other input devices 12072 may include, but are not limited to, a physical keyboard, function keys (e.g., volume control keys, switch keys, etc.), a trackball, a mouse, a joystick, and so forth, which are not described in detail herein. Memory 1209 may be used to store software programs as well as various data including, but not limited to, application programs and an operating system. Processor 1210 may integrate an application processor that primarily processes operating systems, user interfaces, applications, etc., with a modem processor that primarily processes wireless communications. It will be appreciated that the modem processor described above may not be integrated into processor 1210.
The embodiment of the application further provides a readable storage medium, on which a program or an instruction is stored, where the program or the instruction implements each process of the above embodiment of the method for determining the available template when executed by a processor, and the same technical effects can be achieved, so that repetition is avoided, and no further description is given here.
Wherein the processor is a processor in the electronic device described in the above embodiment. The readable storage medium includes a computer readable storage medium such as a Read-Only Memory (ROM), a random access Memory (Random Access Memory, RAM), a magnetic disk or an optical disk, and the like.
The embodiment of the application further provides a chip, the chip includes a processor and a communication interface, the communication interface is coupled with the processor, the processor is configured to run a program or an instruction, implement each process of the above embodiment of the method for determining the available templates, and achieve the same technical effect, so that repetition is avoided, and no further description is provided here.
It should be understood that the chips referred to in the embodiments of the present application may also be referred to as system-on-chip chips, chip systems, or system-on-chip chips, etc.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element. Furthermore, it should be noted that the scope of the methods and apparatus in the embodiments of the present application is not limited to performing the functions in the order shown or discussed, but may also include performing the functions in a substantially simultaneous manner or in an opposite order depending on the functions involved, e.g., the described methods may be performed in an order different from that described, and various steps may also be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.
From the above description of the embodiments, it will be clear to those skilled in the art that the above-described embodiment method may be implemented by means of software plus a necessary general hardware platform, but of course may also be implemented by means of hardware, but in many cases the former is a preferred embodiment. Based on such understanding, the technical solutions of the present application may be embodied essentially or in a part contributing to the prior art in the form of a computer software product stored in a storage medium (such as ROM/RAM, magnetic disk, optical disk), comprising several instructions for causing a terminal (which may be a mobile phone, a computer, a server, or a network device, etc.) to perform the methods described in the embodiments of the present application.
The embodiments of the present application have been described above with reference to the accompanying drawings, but the present application is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many forms may be made by those of ordinary skill in the art without departing from the spirit of the present application and the scope of the claims, which are also within the protection of the present application.
Claims (10)
1. A method of determining available templates, comprising:
acquiring a template image of a target wafer template;
extracting a straight line in the template image;
judging whether the template image reaches a preset standard according to the straight line;
and when the template image reaches a preset standard, determining that the target wafer template is available.
2. The method of claim 1, wherein the extracting straight lines in the template image comprises:
carrying out graying treatment on the template image to obtain a gray image;
filtering the gray level image to obtain a filtered image;
performing edge detection processing on the filtered image to obtain a template edge image;
and extracting a straight line based on the template edge image.
3. The method for determining available templates according to claim 2, wherein the determining whether the template image meets a preset criterion according to the straight line comprises:
judging whether the number of straight lines in the same direction in the template edge image exceeds a threshold value or not;
if yes, judging that the number of the template lines reaches a preset standard;
if not, judging that the template line number does not reach the preset standard, and re-acquiring the template image of the target wafer template.
4. A method for determining available templates according to claim 3, wherein said determining whether the number of lines in the same direction in the template edge image exceeds a threshold value comprises:
acquiring the endpoint coordinates of a straight line;
calculating an equation of a straight line according to the endpoint coordinates;
determining that two straight lines with slopes and intercepts meeting the conditions of the straight line equation are collinear straight lines, and calculating the endpoint distances of the two collinear straight lines according to the endpoint coordinates;
and merging the collinear lines with the end point distance smaller than a preset value to obtain a merged line.
5. The method according to claim 4, wherein after the combining the collinear lines having the end point distance smaller than a preset value to obtain a combined line, the method further comprises:
and classifying the combined straight lines according to a preset slope standard to obtain the number of straight lines in the same direction.
6. The method for determining available templates according to claim 2, wherein after the subjecting the template image to the graying process to obtain a gray-scale image, the method for determining available templates further comprises:
calculating an absolute difference value between a pixel value of each pixel point of the gray image and a pixel mean value of the gray image;
judging whether the template contrast reaches a preset standard according to the absolute difference value.
7. The method according to claim 2, wherein after the filtering the gray scale image to obtain a filtered image, the method further comprises:
converting the filtered image into a floating point image;
performing edge and detail enhancement processing on the floating point image to obtain an enhanced image;
calculating the sum of pixel absolute values of each pixel point of the enhanced image to obtain a pixel sum value;
and judging whether the definition of the template reaches a preset standard according to the pixel sum value.
8. A device for determining available templates, comprising:
the acquisition module is used for acquiring a template image of the target wafer template;
the straight line extraction module is used for extracting straight lines in the template image;
and the judging module is used for judging whether the template image reaches a preset standard according to the straight line, and determining that the target wafer template is available when the template image reaches the preset standard.
9. A probe station for determining available templates using the method for determining available templates according to any of claims 1-7.
10. An electronic device, comprising: a processor, a memory and a program or instruction stored on said memory and executable on said processor, said program or instruction when executed by the processor implementing the steps of the method for determining available templates according to any of claims 1-7.
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| CN202311182241.8A CN117437176A (en) | 2023-09-13 | 2023-09-13 | Method and device for determining available template, probe station and electronic equipment |
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