CN117428943B - Forming milling device and forming milling method for DBC ceramic substrate - Google Patents
Forming milling device and forming milling method for DBC ceramic substrate Download PDFInfo
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- CN117428943B CN117428943B CN202311745239.7A CN202311745239A CN117428943B CN 117428943 B CN117428943 B CN 117428943B CN 202311745239 A CN202311745239 A CN 202311745239A CN 117428943 B CN117428943 B CN 117428943B
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- 239000000919 ceramic Substances 0.000 title claims abstract description 61
- 239000000758 substrate Substances 0.000 title claims abstract description 55
- 238000003801 milling Methods 0.000 title claims abstract description 30
- 239000012634 fragment Substances 0.000 claims abstract description 12
- 238000007493 shaping process Methods 0.000 claims description 6
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims 5
- 238000000926 separation method Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/18—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by milling, e.g. channelling by means of milling tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/005—Devices for the automatic drive or the program control of the machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/04—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
- B28D7/046—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work the supporting or holding device being of the vacuum type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
- H01L21/4807—Ceramic parts
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Mining & Mineral Resources (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention discloses a forming milling device and a forming milling method of a DBC ceramic substrate, wherein the forming milling device comprises a slicing machine and a fragment device, one side of the slicing machine is fixedly connected with a support, the upper side of the support is fixedly connected with a supporting plate, and one end of the supporting plate is provided with the fragment device; the fragment device comprises a rotating frame, the rotating frame is rotationally connected to one side of a supporting plate, a driving motor is fixedly connected in the supporting plate, a main shaft of the driving motor is coaxially fixed with a rotating shaft of the rotating frame, a first linear propulsion device is arranged on one side of the rotating frame, the first linear propulsion device is fixedly connected with a box body, and a stretching groove is formed in one side of the box body, which is close to the supporting plate. According to the invention, the ceramic substrate enters the box body from the extending groove, the bottom of the ceramic substrate is supported by the cylinder, the upper edge of the left end face of the fan-shaped groove corresponds to the position of the cutting groove, the bottom of the breaking position of the ceramic substrate is supported, and then the box body is driven to rotate through the rotating frame, so that the ceramic substrate is conveniently broken by the position of the corresponding cutting groove.
Description
Technical Field
The invention relates to the technical field of ceramic substrate cutting, in particular to a forming milling device and a forming milling method of a DBC ceramic substrate.
Background
The DBC ceramic mother board is a composite copper-clad ceramic board prepared by directly sintering copper foil on the surface of Al2O3 or AlN ceramic by using a DBC technology, and has the characteristics of high heat conductivity, high electrical insulation, large current capacity, high mechanical strength, temperature characteristics matched with a silicon chip and the like. The technology of milling the DBC ceramic substrate unit plate is to cut the line of the unit plate edge by using laser milling or cutter head.
In the prior art, a certain thickness is remained during cutting in a forming and milling method of a DBC ceramic substrate of patent publication No. CN104051278B, a bending method is adopted to separate unit plates, adjacent cutting grooves are close in distance and are easy to influence each other, and due to insufficient bottom support, a collapse angle is easy to cause during bending, so that the reject ratio is higher.
Disclosure of Invention
The invention aims to solve the defects in the prior art, and provides a forming milling device and a forming milling method for a DBC ceramic substrate, so that the problems in the prior art are solved.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the shaping milling device of the DBC ceramic substrate comprises a slicing machine and a fragment device, wherein one side of the slicing machine is fixedly connected with a support, the upper side of the support is fixedly connected with a supporting plate, and one end of the supporting plate is provided with the fragment device;
the sheet breaking device comprises a rotating frame, the rotating frame is rotationally connected to one side of a supporting plate, a driving motor is fixedly connected in the supporting plate, a main shaft of the driving motor is coaxially fixed with a rotating shaft of the rotating frame, a first linear propulsion device is arranged on one side of the rotating frame, the first linear propulsion device is fixedly connected with a box body, a stretching-in groove is formed in one side, close to the supporting plate, of the box body, a discharge port is formed in the end face of one side of the box body, a through groove is formed in the upper side of the box body, a push plate is slidably connected in the through groove, a second linear propulsion device is arranged on the other side of the box body, and the second linear propulsion device is used for pushing the push plate to slide in the through groove;
the support plate is provided with a right-angle groove, a cylinder is fixedly connected in the right-angle groove, and the cylinder is provided with a sector groove.
As a preferable mode of the invention, the inside of the slicer is fixedly connected with a first motor, the first motor is fixedly connected with a rotating shaft, the lower end of the rotating shaft is fixedly connected with a cross beam, the cross beam is provided with a sliding groove, a sliding block is connected in the sliding groove in a sliding way, the cross beam is fixedly connected with a third linear propulsion device, the third linear propulsion device is fixedly connected with the sliding block, the sliding block is fixedly connected with a hanging pipe, the lower end of the hanging pipe is fixedly connected with a strip-shaped plate, and the bottom of the strip-shaped plate is uniformly provided with adsorption holes.
As a preferable mode of the invention, one side of the bracket is fixedly connected with the guide plate.
As a preferred mode of the invention, the fan angle of the fan-shaped groove is 60-90 degrees.
As a preferable mode of the invention, the upper side of the box body is fixedly connected with the vertical plate, the vertical plate is provided with a through groove, the cross rod is connected in a sliding manner in the through groove, a supporting spring is fixedly connected between the cross rod and the inner wall of the upper end of the through groove, the end of the cross rod is provided with a supporting rod, two ends of the supporting rod are respectively and fixedly connected with one side plate, and a round rod is connected between the two side plates in a rotating manner.
As a preferable mode of the invention, the round rod is wrapped with a rubber sleeve.
As a preferable mode of the invention, the upper end of the cross bar is fixedly connected with a guide post, and the guide post penetrates through the vertical plate and is connected in a sliding way.
As a preferable mode of the invention, the upper side of the rotating frame is provided with a base plate, the base plate is provided with a slope and a horizontal plane, and one end of the cross rod, which is far away from the supporting rod, is arranged corresponding to the base plate.
As a preferable mode of the invention, one end of the cross rod far away from the supporting rod is fixedly connected with two suspenders, the lower ends of the two suspenders are rotationally connected with a circular column, two arc-shaped grooves are arranged on the horizontal plane at intervals, and the arc-shaped grooves are arranged corresponding to the circular column;
the end of the cross rod is fixedly connected with a square rod, the square rod penetrates through the supporting rod in a sliding mode, and a horizontal spring is fixedly connected between the cross rod and the supporting rod.
A shaping milling method of a DBC ceramic substrate adopts the shaping milling device to process, and single unit small plates can be rapidly separated.
The invention has the advantages that: according to the forming milling device and the forming milling method for the DBC ceramic substrate, the ceramic substrate is cut into the plurality of cutting grooves in the longitudinal and transverse directions on the slicing machine, the cut ceramic substrate is transferred to the supporting plate, the rotating frame of the breaking device is rotated to the position horizontal to the ceramic substrate, the first linear pushing device pushes the box body to be sleeved on the ceramic substrate, namely, the ceramic substrate stretches into the box body from the grooves, the bottom of the ceramic substrate is supported by the cylinders, the upper edge of the left end face of the fan-shaped groove corresponds to the positions of the cutting grooves, the bottom of the breaking position of the ceramic substrate is supported, and then the rotating frame drives the box body to rotate, so that the ceramic substrate is broken by the corresponding cutting groove positions conveniently, and compared with manual breaking, the bottom of a broken line is provided with linear support, and therefore broken edges of separated unit plates are avoided.
According to the invention, as one end of the cross rod is supported at the upper end of the slope of the base plate by the suspender and the round column, the round rod below the other end of the cross rod is higher than the ceramic base plate, and along with the movement of the box body towards the ceramic base plate, the round column gradually transits to a horizontal plane along the slope of the base plate by the downward pressure of the supporting spring, and the round rod contacts the ceramic base plate and finally enters the cutting groove to support the cutting groove, so that the supporting protection capability of the cutting groove is improved, two adjacent cutting grooves are avoided, and when one of the adjacent two cutting grooves is separated independently, the other cutting groove is influenced.
After the round bar enters the cutting groove, the height is lower than that of the ceramic substrate, along with further movement of the box body, the square bar slides relative to the cross bar to buffer, and the round column slides into the second arc groove from the first arc groove, so that the round bar enters the adjacent cutting groove after being integrally lifted, the transition is convenient, the cutting grooves are sequentially supported, and therefore angle collapse during separation of the unit small plates is avoided.
Drawings
FIG. 1 is a schematic view of the basic structure of the present invention;
FIG. 2 is a schematic view of the structure of the interrupt sheet apparatus of the present invention;
FIG. 3 is an enlarged view of a portion of FIG. 2 at E;
FIG. 4 is a schematic view of a connection structure between a case and a rotating frame according to the present invention;
FIG. 5 is an enlarged view of a portion of FIG. 4 at M;
FIG. 6 is an enlarged view of a portion of FIG. 4 at N;
in the figure: 10. a vacuum chuck round table; 20. a ceramic substrate; 30. cutting a groove; 1. a slicer; 2. a fragment device; 11. a bracket; 12. a supporting plate; 21. A rotating frame; 22. a first linear propulsion device; 23. a case body; 24. extend into the groove; 25. a discharge port; 26. a through groove; 27. a push plate; 28. a second linear propulsion device; 121. a right angle slot; 3. a cylinder; 31. a fan-shaped groove; 4. a rotation shaft; 41. a cross beam; 42. a chute; 43. a slide block; 44. a third linear propulsion device; 45. a hanging pipe; 46. a strip-shaped plate; 5. a guide plate; 6. a vertical plate; 61. a through groove; 62. a cross bar; 63. a support spring; 65. a side plate; 66. a round bar; 67. a guide post; 7. a backing plate; 71. a slope; 72. a horizontal plane; 73. a boom; 74. a circular column; 75. an arc-shaped groove; 76. square rods; 77. a horizontal spring.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Example 1
As shown in fig. 1-6, the forming milling device for the DBC ceramic substrate provided by the invention comprises a slicing machine 1 and a fragment device 2, wherein the slicing machine 1 is provided with a vacuum chuck round table, a ceramic substrate 20 is adsorbed on the round table, a cutting groove 30 is cut on the ceramic substrate 20 by using a conventional mode such as a cutter disc or laser cutting, the depth of the cutting groove 30 is 1/2-2/3 of the thickness of the ceramic substrate 20, each unit small plate is convenient to separate subsequently, one side of the slicing machine 1 is fixedly connected with a support 11, the upper side of the support 11 is fixedly connected with a supporting plate 12, and one end of the supporting plate 12 is provided with the fragment device 2;
the fragment device 2 comprises a rotating frame 21, the rotating frame 21 is rotatably connected to one side of a supporting plate 12, a driving motor is fixedly connected in the supporting plate 12, a main shaft of the driving motor is coaxially fixed with a rotating shaft of the rotating frame 21, a first linear propulsion device 22 is arranged on one side of the rotating frame 21, the first linear propulsion device 22 is fixedly connected with a box body 23, an extending groove 24 is arranged on one side, close to the supporting plate 12, of the box body 23, an exhaust port 25 is arranged on the end face of one side of the box body 23, a through groove 26 is arranged on the upper side of the box body 23, a push plate 27 is connected in a sliding manner in the through groove 26, a second linear propulsion device 28 is arranged on the other side of the box body 23, and the second linear propulsion device 28 is used for pushing the push plate 27 to slide in the through groove 26;
the discharge opening 25 of the case 23 is provided with a secondary breaking device identical to the breaking device 2, and is shown in the drawings to avoid encumbrance, due to the structure of the same principle.
The supporting plate 12 is provided with a right-angle groove 121, a cylinder 3 is fixedly connected in the right-angle groove 121, the cylinder 3 is provided with a sector groove 31, and the sector angle of the sector groove 31 is 60-90 degrees.
According to the invention, a plurality of cutting grooves 30 are cut on the ceramic substrate 20 in a longitudinal and transverse manner on the slicing machine 1, the cut ceramic substrate 20 is transferred to the supporting plate 12, the rotating frame 21 of the slicing device 2 is firstly rotated to a position horizontal to the ceramic substrate 20, the first linear pushing device 22 pushes the box body 23 to be sleeved on the ceramic substrate 20, namely, the ceramic substrate 20 enters the box body 23 from the extending groove 24, the bottom of the ceramic substrate 20 is supported by the cylinder 3, the upper edge of the left end face of the sector groove 31 corresponds to the position of the cutting groove 30, the bottom of the breaking position of the ceramic substrate 20 is supported, and then the box body 23 is driven to rotate by the rotating frame 21, so that the ceramic substrate is conveniently broken by the position of the corresponding cutting groove 30.
Example 2
As shown in fig. 1-6, the slicer 1 is fixedly connected with a first motor, the first motor is fixedly connected with a rotating shaft 4, the lower end of the rotating shaft 4 is fixedly connected with a cross beam 41, the cross beam 41 is provided with a chute 42, a sliding block 43 is slidably connected in the chute 42, the cross beam 41 is fixedly connected with a third linear propulsion device 44, the third linear propulsion device 44 is fixedly connected with the sliding block 43, the sliding block 43 is fixedly connected with a hanging pipe 45, the hanging pipe 45 can be driven to lift by an electric push rod in the prior art, the lower end of the hanging pipe 45 is fixedly connected with a strip-shaped plate 46, and adsorption holes are uniformly formed in the bottom of the strip-shaped plate 46.
The first linear propulsion device 22, the second linear propulsion device 28 and the third linear propulsion device 44 are screw rod sliding block mechanisms or electric push rod mechanisms, are common linear propulsion mechanisms, can precisely control the pushing distance, and are convenient for separating the cutting grooves 30 of the ceramic substrate 20.
One side of the bracket 11 is fixedly connected with a guide plate 5, and a receiving box is arranged below the guide plate 5.
According to the invention, the negative pressure for adsorbing the ceramic substrate 20 is removed through the round table of the slicer 1, the rotary shaft 4 rotates the strip-shaped plate 46 to the position above one end of the ceramic substrate 20, the hanging pipe 45 descends and adsorbs the ceramic substrate 20, then the rotary shaft 4 rotates 180 degrees, the ceramic substrate 20 is transferred onto the supporting plate 12, the unit platelets are separated one by one, and the unit platelets are guided by the guide plate 5 to be stored in the receiving box.
Example 3
As shown in fig. 1-6, the upper side of the box body 23 is fixedly connected with a vertical plate 6, the vertical plate 6 is provided with a through groove 61, a cross rod 62 is slidably connected in the through groove 61, a supporting spring 63 is fixedly connected between the cross rod 62 and the inner wall of the upper end of the through groove 61, a supporting rod 64 is arranged at the end of the cross rod 62, two ends of the supporting rod 64 are respectively and fixedly connected with a side plate 65, a round rod 66 is rotatably connected between the two side plates 65, and a rubber sleeve is wrapped outside the round rod 66.
Further, the upper end of the cross bar 62 is fixedly connected with a guide post 67, the guide post 67 penetrates through the vertical plate 6 and is in sliding connection, and the guide post 67 provides vertical guide limit for the cross bar 62.
According to the invention, the cross rod 62 moves horizontally along with the box body 23, the round rod 66 at the bottom of the supporting rod 64 at the end of the cross rod 62 enters the cutting groove 30 to support, in order to cut each unit small plate, the edges of two adjacent unit small plates are cut, so that two adjacent cutting grooves 30 can appear, the unit small plates at the outermost ends are separated from the two adjacent cutting grooves 30, the round rod 66 is firstly filled into the outer cutting groove 30, and positioning support is formed at the bottom of the edge line at the outermost side of the cutting groove 30 through the cylinder 3 to form upper and lower clamping, when the unit small plates at the outermost sides are rotationally broken, the adjacent cutting grooves 30 do not move, the influence on the adjacent cutting grooves 30 is minimal, and the separation quality is improved.
Example 4
As shown in fig. 1-6, the upper side of the rotating frame 21 is provided with a base plate 7, the base plate 7 is provided with a slope 71 and a horizontal plane 72, and one end of the cross rod 62 away from the supporting rod 64 is arranged corresponding to the base plate 7.
Further, one end of the cross rod 62 far away from the supporting rod 64 is fixedly connected with two suspension rods 73, the lower ends of the two suspension rods 73 are rotatably connected with round posts 74, two arc-shaped grooves 75 are arranged on the horizontal surface 72 at intervals, and the arc-shaped grooves 75 are arranged corresponding to the round posts 74;
the end of the cross rod 62 is fixedly connected with a square rod 76, the square rod 76 penetrates through the support rod 64 in a sliding mode, and a horizontal spring 77 is fixedly connected between the cross rod 62 and the support rod 64.
In the present invention, the cross bar 62 is supported by the hanger rod 73 and the circular column 74 at one end at the upper end of the slope 71 of the backing plate 7, so that the circular rod 66 below the other end of the cross bar 62 is higher than the ceramic substrate 20, and as the box 23 moves toward the ceramic substrate 20, the circular column 74 gradually transits to the horizontal plane 72 along the slope 71 of the backing plate 7 by the downward pressure of the supporting spring 63, and the circular rod 66 contacts the ceramic substrate 20 and finally enters the cutting groove 30, so that the supporting protection capability of the cutting groove 30 is improved, two adjacent cutting grooves 30 are avoided, and when one of the two adjacent cutting grooves 30 is separated independently, the other is influenced.
After the round bar 66 enters the cutting groove 30, the height is lower than that of the ceramic substrate 20, and along with the further movement of the box body 23, the square bar 76 slides relative to the cross bar 62 to buffer, and the round column 74 slides into the second arc groove 75 from the first arc groove 75, so that the round bar 66 is integrally lifted and enters the adjacent cutting groove 30, thereby facilitating transition, and the cutting grooves 30 are sequentially supported, so that the corner collapse during the separation of the unit platelets is avoided;
after the adjacent cutting grooves 30 are separated, the whole of the fragment device 2 is retracted to the initial position, and the third linear pushing device 44, the sliding block 43, the hanging pipe 45 and the strip-shaped plate 46 feed the adsorbed ceramic substrate 20 to the box body 23, so that the subsequent separation operation one by one is facilitated.
A shaping milling method of a DBC ceramic substrate adopts an upper shaping milling device to process, and single unit small plates can be rapidly separated.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a shaping milling device of DBC ceramic substrate, includes slicer (1) and fragment device (2), its characterized in that: one side of the slicing machine (1) is fixedly connected with a bracket (11), the upper side of the bracket (11) is fixedly connected with a supporting plate (12), and one end of the supporting plate (12) is provided with a fragment device (2);
the piece breaking device (2) comprises a rotating frame (21), the rotating frame (21) is rotationally connected to one side of a supporting plate (12), a driving motor is fixedly connected in the supporting plate (12), a main shaft of the driving motor is coaxially fixed with a rotating shaft of the rotating frame (21), a first linear propulsion device (22) is arranged on one side of the rotating frame (21), the first linear propulsion device (22) is fixedly connected with a box body (23), a stretching groove (24) is formed in one side, close to the supporting plate (12), of the box body (23), an exhaust port (25) is formed in the end face of one side of the box body (23), a through groove (26) is formed in the upper side of the box body (23), a push plate (27) is connected in a sliding mode, a second linear propulsion device (28) is arranged on the other side of the box body (23), and the second linear propulsion device (28) is used for pushing the push plate (27) to slide in the through groove (26);
the support plate (12) is provided with a right-angle groove (121), a cylinder (3) is fixedly connected in the right-angle groove (121), and the cylinder (3) is provided with a fan-shaped groove (31);
the upper side of the box body (23) is fixedly connected with a vertical plate (6), the vertical plate (6) is provided with a through groove (61), a cross rod (62) is connected in a sliding manner in the through groove (61), a supporting spring (63) is fixedly connected between the cross rod (62) and the inner wall of the upper end of the through groove (61), a supporting rod (64) is arranged at the end of the cross rod (62), two ends of the supporting rod (64) are respectively and fixedly connected with one side plate (65), and a round connecting rod (66) is rotationally connected between the two side plates (65);
a base plate (7) is arranged on the upper side of the rotating frame (21), a slope (71) and a horizontal plane (72) are arranged on the base plate (7), and one end of the cross rod (62) far away from the supporting rod (64) is arranged corresponding to the base plate (7);
one end of the cross rod (62) far away from the supporting rod (64) is fixedly connected with two suspenders (73), the lower ends of the two suspenders (73) are rotationally connected with a circular column (74), two arc-shaped grooves (75) are arranged on the horizontal plane (72) at intervals, and the arc-shaped grooves (75) are arranged corresponding to the circular column (74);
the end of the cross rod (62) is fixedly connected with a square rod (76), the square rod (76) penetrates through the supporting rod (64) in a sliding mode, and a horizontal spring (77) is fixedly connected between the cross rod (62) and the supporting rod (64).
2. The molding and milling device for the DBC ceramic substrate according to claim 1, wherein: the slicing machine is characterized in that the slicing machine (1) is fixedly connected with a first motor, the first motor is fixedly connected with a rotary shaft (4), the lower end of the rotary shaft (4) is fixedly connected with a cross beam (41), the cross beam (41) is provided with a sliding groove (42), a sliding block (43) is connected in the sliding groove (42) in a sliding mode, the cross beam (41) is fixedly connected with a third linear propulsion device (44), the third linear propulsion device (44) is fixedly connected with the sliding block (43), the sliding block (43) is fixedly connected with a hanging pipe (45), the lower end of the hanging pipe (45) is fixedly connected with a strip-shaped plate (46), and adsorption holes are uniformly formed in the bottom of the strip-shaped plate (46).
3. The molding and milling device for the DBC ceramic substrate according to claim 1, wherein: one side of the bracket (11) is fixedly connected with the guide plate (5).
4. The molding and milling device for the DBC ceramic substrate according to claim 1, wherein: the sector angle of the sector groove (31) is 60-90 degrees.
5. The molding and milling device for the DBC ceramic substrate according to claim 1, wherein: the outside of the round rod (66) is wrapped with a rubber sleeve.
6. The molding and milling device for the DBC ceramic substrate according to claim 1, wherein: the upper end of the cross rod (62) is fixedly connected with a guide post (67), and the guide post (67) penetrates through the vertical plate (6) and is in sliding connection.
7. A forming milling method of a DBC ceramic substrate is characterized by comprising the following steps: processing with a forming milling device according to any one of claims 1 to 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311745239.7A CN117428943B (en) | 2023-12-19 | 2023-12-19 | Forming milling device and forming milling method for DBC ceramic substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311745239.7A CN117428943B (en) | 2023-12-19 | 2023-12-19 | Forming milling device and forming milling method for DBC ceramic substrate |
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| Publication Number | Publication Date |
|---|---|
| CN117428943A CN117428943A (en) | 2024-01-23 |
| CN117428943B true CN117428943B (en) | 2024-03-01 |
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| CN202311745239.7A Active CN117428943B (en) | 2023-12-19 | 2023-12-19 | Forming milling device and forming milling method for DBC ceramic substrate |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103347828A (en) * | 2011-02-09 | 2013-10-09 | 旭硝子株式会社 | Glass plate cutting method and glass plate cutting device |
| CN205289516U (en) * | 2016-01-21 | 2016-06-08 | 东莞商铌孚精密机械设备有限公司 | Branch board equipment of COB base plate for LED |
| CN111136806A (en) * | 2020-02-18 | 2020-05-12 | 安徽瑞龙玻璃机械股份有限公司 | Full-automatic glass tube cutting machine |
| CN219066769U (en) * | 2022-12-12 | 2023-05-23 | 智汇轩田智能系统(杭州)有限公司 | Edge breaking mechanism |
| CN220087563U (en) * | 2023-02-21 | 2023-11-24 | 福建华清电子材料科技有限公司 | Automatic breaking device for ceramic copper-clad substrate |
-
2023
- 2023-12-19 CN CN202311745239.7A patent/CN117428943B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103347828A (en) * | 2011-02-09 | 2013-10-09 | 旭硝子株式会社 | Glass plate cutting method and glass plate cutting device |
| CN205289516U (en) * | 2016-01-21 | 2016-06-08 | 东莞商铌孚精密机械设备有限公司 | Branch board equipment of COB base plate for LED |
| CN111136806A (en) * | 2020-02-18 | 2020-05-12 | 安徽瑞龙玻璃机械股份有限公司 | Full-automatic glass tube cutting machine |
| CN219066769U (en) * | 2022-12-12 | 2023-05-23 | 智汇轩田智能系统(杭州)有限公司 | Edge breaking mechanism |
| CN220087563U (en) * | 2023-02-21 | 2023-11-24 | 福建华清电子材料科技有限公司 | Automatic breaking device for ceramic copper-clad substrate |
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| CN117428943A (en) | 2024-01-23 |
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