CN117408591A - Application method of IOT (internet of things) platform based on semiconductor logistics equipment - Google Patents
Application method of IOT (internet of things) platform based on semiconductor logistics equipment Download PDFInfo
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- CN117408591A CN117408591A CN202311513648.4A CN202311513648A CN117408591A CN 117408591 A CN117408591 A CN 117408591A CN 202311513648 A CN202311513648 A CN 202311513648A CN 117408591 A CN117408591 A CN 117408591A
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- G—PHYSICS
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Abstract
The invention discloses an application method of an IOT platform based on semiconductor logistics equipment, which comprises the following steps: linking the production field device to an intelligent data acquisition gateway; the gateway acquisition system of the intelligent data acquisition gateway is used for uniformly converting the data into a form and forwarding the form; the intelligent data acquisition gateway respectively stores the forwarded data to an IOT platform database through definition of basic information and extension information of production field devices by the IOT platform; and the IOT platform analyzes the data through the visual monitoring module of the application layer and evaluates the operation environment of the production field device. The invention realizes data transfer and cooperative interaction between each informatization system and the machine equipment.
Description
Technical Field
The invention belongs to the technical field of semiconductor transportation, and particularly relates to an application method of an IOT platform based on semiconductor logistics equipment.
Background
With the rapid development of the semiconductor industry, automated material handling has become a mainstream operational situation in the semiconductor industry worldwide today when semiconductor manufacturing technologies are highly developed. The whole factory is composed of a plurality of production devices, a plurality of logistics devices and a plurality of automation devices of storage devices.
The traditional factory production line can not carry out visual monitoring to each node position on the production line during production operation, and then when production abnormality occurs at a certain station, abnormal existence can not occur at the first time, and the production efficiency is slow.
Disclosure of Invention
The invention aims to solve the technical problems and provides an application method of an IOT platform based on semiconductor logistics equipment, so that data flow and cooperative interaction between each informatization system and machine equipment are realized. In order to achieve the above purpose, the technical scheme of the invention is as follows:
an application method of an IOT platform based on semiconductor logistics equipment comprises the following steps: 1) Linking the production field device to an intelligent data acquisition gateway;
2) The gateway acquisition system of the intelligent data acquisition gateway is used for uniformly converting the data into a form and forwarding the form;
3) The intelligent data acquisition gateway respectively stores the forwarded data to an IOT platform database through definition of basic information and extension information of production field devices by the IOT platform;
4) And the IOT platform analyzes the data through the visual monitoring module of the application layer and evaluates the operation environment of the production field device.
Specifically, the field devices in step 1) are defined as device layers that include semiconductor automated handling devices, factory shop process devices, and factory shop storage devices.
Specifically, the forwarding step in step 2) includes defining collected data, recording the equipment layer into a gateway collection system, and newly adding scalar data and original byte data to be collected; defining an IOT platform database, and importing configured acquisition data, equipment information, data request information and OEE information into the IOT platform database of the IOT Internet of things platform; processing the data; the IOT platform access method comprises the steps that IOT platform data are sent out, and the IOT platform access to an IOT platform database; the application layer requests to acquire data in a uniform protocol format.
Specifically, in step 2), the scalar data inputs the implemented interaction address, data type and data value of the corresponding device; the original byte data needs to customize byte address and address length, and then the multi-node, address index and data type are customized according to the address length.
Specifically, the application layer in step 2) includes a third party system module, which includes an MES system, a WMS system, and an ERP system.
Specifically, the basic information in the step 3) includes a device name and a state; the extended information equipment RFID and the equipment sensor information.
Compared with the prior art, the application method of the IOT platform based on the semiconductor logistics equipment has the following main advantages: linking each hardware device by using a TCP protocol, and outputting the acquired device information; the inter-engineering conveying trolley and the related control system interact with a material control system MCS system (material control system); the acquisition layer is downwards connected with equipment to realize man-machine interaction, data acquisition, edge calculation and storage functions, the IOT edge service layer and local service are upwards connected, multi-level and multi-scene data integration, analysis and application are realized through a platform, meanwhile, the IOT is used as an IOT data center and can be used for docking other informatization systems of enterprises through an MCS system, data stream conversion and collaborative interaction between each informatization system and machine equipment are easily realized, an intelligent digital management mode of a whole flow and a whole scene is created, and the aim of reducing cost and enhancing efficiency is fulfilled.
Drawings
FIG. 1 is a schematic diagram of a system architecture according to an embodiment of the present invention;
fig. 2 is a flowchart of the application method in the present embodiment.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely, but is apparent to those skilled in the art in view of the present invention.
Examples:
referring to fig. 1-2, the present embodiment is a system of IOT internet of things platform based on semiconductor logistics equipment, which includes an equipment layer, a data acquisition layer, a data processing layer, and an application layer;
the equipment layer comprises semiconductor automatic handling equipment, factory production workshop process equipment and factory production workshop storage equipment. In particular, but not limited to, AMR robots, OHT crown blocks, ERACK electronic racks, STOCKER stereoscopic repositories, LIFTER lifts, and AGV handling carts. The equipment layer is interconnected with the data acquisition layer, and the data acquisition layer is utilized to acquire and sort the data of each equipment in the equipment layer.
The data acquisition layer comprises a PMS system and an intelligent data acquisition gateway, wherein the PMS system uniformly forwards the format of the data acquired by the equipment layer after being converted based on an http protocol of TCP protocol link equipment; the intelligent data acquisition gateway directly acquires data and forwards the data based on the gateway acquisition system.
The data processing layer comprises an IOT (internet of things) platform and particularly comprises an analysis and processing module and a storage and integration module, so that data forwarded by the data acquisition layer is effectively monitored, scheduled and managed in real time.
The application layer comprises a third party system module, a production signboard module, a history tracing module and a visual monitoring module, the main task of the application layer is to develop various application systems based on data provided by the data processing layer, and the third party system module comprises an MES system, a WMS system and an ERP system, so that intelligent management of the semiconductor logistics equipment is realized.
An application method of an IOT platform based on semiconductor logistics equipment comprises the following steps:
1) Linking the production field device to an intelligent data acquisition gateway; the intelligent data acquisition gateway needs to support different communication protocols when linking devices, including Modbus, plc, MQ, mqtt. Production field devices are defined as a device layer that includes semiconductor automated handling devices, factory shop process devices, and factory shop storage devices.
2) The gateway acquisition system of the intelligent data acquisition gateway is used for uniformly converting the data into a form and forwarding the form, such as WEB API; the forwarding process specifically comprises the steps of defining collected data, recording a device layer into a gateway collection system, adding scalar data and original byte data to be collected, and recording interaction addresses, data types and data values realized by corresponding devices by the scalar data; the original byte data needs to customize byte address and address length, and then the multi-node, address index and data type are customized according to the address length.
And defining an IOT platform database, and importing the configured acquisition data, equipment information, data request information and OEE information into the IOT platform database of the IOT Internet of things platform.
Data processing, due to the diversity of device protocols, the data processing of the common Modbus TCP protocol is to process Modbus TCP frame format: header (7B) +frame structure PDU, header format: transaction identification (which may be understood as sequence number 2B of the message) +protocol identification (2B, 0000 represents Modbus-TCP protocol) +length (next data length 2B) +unit identification (which may be understood as device address 1B). Frame structure PDU function code (1B) +data (n).
And (3) the data of the IOT platform are sent out, the IOT platform accesses the IOT platform database, and the effective and useful data are output outwards in a unified format, such as secs/gam or web api format.
The application layer requests to acquire data in a uniform protocol format. The application layer includes a third party system module including a MES system, a WMS system, and an ERP system.
3) The intelligent data acquisition gateway respectively stores the forwarded data into an IOT platform database through definition of basic information and extension information of production field devices by the IOT Internet of things platform, wherein the device name and the state are basic information, the device RFID and the device sensor information are extension information.
4) The IOT platform analyzes the data through the visual monitoring module of the application layer, evaluates the operation environment of the production field device, and accordingly enables the start-stop and abnormal positioning of the production field device, and an intelligent decision scheme is provided for information processing.
When the embodiment is applied, the intelligent data acquisition gateway of the IOT platform links down the equipment, so that the functions of man-machine interaction, data acquisition, edge calculation and storage are realized, the IOT edge service layer and local service are linked up, multi-level and multi-scene data integration, analysis and application are realized through the platform, meanwhile, the IOT is used as an IOT data center to be in butt joint with other informationized systems of an enterprise through MCS, data flow and cooperative interaction between each informationized system and machine equipment are easily realized, the enterprise is helped to build an intelligent digital management mode of a full-flow full-scene, and the power-assisted enterprise realizes the aim of reducing cost and enhancing efficiency.
The system has higher system automation degree: the device interaction information is imported in a self-defined mode, and scalar data are directly collected to the IOT platform. More flexible data acquisition tool: the information of the equipment is directly collected through the original bytes, and the same equipment data is collected uniformly through the structural design. More open diverse data interfaces: and more software and hardware products are linked to create a full-digital management system. More stable remote debugging tool: remote uploading/downloading program, remote interface monitoring, transparent PLC, quick connection and quick maintenance.
In the description of the present invention, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and for example, "connected" may be a fixed connection, a removable connection, or an integral connection; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the description of the present specification, the terms "one embodiment," "some embodiments," "particular embodiments," and the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Although the embodiments of the present invention are described above, the embodiments are only used for facilitating understanding of the present invention, and are not intended to limit the present invention. Any person skilled in the art can make any modification and variation in form and detail without departing from the spirit and scope of the present disclosure, but the scope of the present disclosure is to be determined by the appended claims.
Claims (6)
1. An application method of an IOT platform based on semiconductor logistics equipment is characterized by comprising the following steps:
1) Linking the production field device to an intelligent data acquisition gateway;
2) The gateway acquisition system of the intelligent data acquisition gateway is used for uniformly converting the data into a form and forwarding the form;
3) The intelligent data acquisition gateway respectively stores the forwarded data to an IOT platform database through definition of basic information and extension information of production field devices by the IOT platform;
4) And the IOT platform analyzes the data through the visual monitoring module of the application layer and evaluates the operation environment of the production field device.
2. The application method of the IOT internet of things platform based on the semiconductor logistics equipment of claim 1, wherein the application method comprises the following steps: the field devices described in step 1) are defined as device layers that include semiconductor automated handling devices, factory shop process devices, and factory shop storage devices.
3. The application method of the IOT internet of things platform based on the semiconductor logistics equipment of claim 1, wherein the application method comprises the following steps: the forwarding step in the step 2) comprises the steps of defining collected data, recording an equipment layer into a gateway collection system, and newly adding scalar data and original byte data to be collected; defining an IOT platform database, and importing configured acquisition data, equipment information, data request information and OEE information into the IOT platform database of the IOT Internet of things platform; processing the data; the IOT platform access method comprises the steps that IOT platform data are sent out, and the IOT platform access to an IOT platform database; the application layer requests to acquire data in a uniform protocol format.
4. The application method of the IOT internet of things platform based on the semiconductor logistics equipment according to claim 3, wherein the application method comprises the following steps: step 2), inputting the realized interactive address, data type and data value of the corresponding device by the scalar data; the original byte data needs to customize byte address and address length, and then the multi-node, address index and data type are customized according to the address length.
5. The application method of the IOT internet of things platform based on the semiconductor logistics equipment according to claim 3, wherein the application method comprises the following steps: the application layer in step 2) includes a third party system module including an MES system, a WMS system, and an ERP system.
6. The application method of the IOT internet of things platform based on the semiconductor logistics equipment of claim 1, wherein the application method comprises the following steps: the basic information in the step 3) comprises equipment names and states; the extended information equipment RFID and the equipment sensor information.
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