CN117405719A - Thin film material section scanning electron microscope sample preparation device - Google Patents
Thin film material section scanning electron microscope sample preparation device Download PDFInfo
- Publication number
- CN117405719A CN117405719A CN202311714474.8A CN202311714474A CN117405719A CN 117405719 A CN117405719 A CN 117405719A CN 202311714474 A CN202311714474 A CN 202311714474A CN 117405719 A CN117405719 A CN 117405719A
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- Prior art keywords
- sample
- plate
- fixed
- film material
- clamping
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- 239000000463 material Substances 0.000 title claims abstract description 69
- 239000010409 thin film Substances 0.000 title claims abstract description 12
- 238000002360 preparation method Methods 0.000 title claims abstract description 10
- 239000010408 film Substances 0.000 claims abstract description 77
- 238000003825 pressing Methods 0.000 claims abstract description 21
- 238000003780 insertion Methods 0.000 claims description 7
- 230000037431 insertion Effects 0.000 claims description 7
- 230000008602 contraction Effects 0.000 claims description 3
- 238000001125 extrusion Methods 0.000 claims 1
- 238000004154 testing of material Methods 0.000 abstract description 2
- 239000003292 glue Substances 0.000 abstract 3
- 239000000853 adhesive Substances 0.000 description 29
- 230000001070 adhesive effect Effects 0.000 description 29
- 238000010586 diagram Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 5
- 239000002585 base Substances 0.000 description 4
- 238000007664 blowing Methods 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000012528 membrane Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000001502 supplementing effect Effects 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000003014 ion exchange membrane Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000502 dialysis Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2202—Preparing specimens therefor
Abstract
The invention discloses a thin film material section scanning electron microscope sample preparation device, which relates to the technical field of material testing and comprises a connecting cover, wherein the top of a positioning block is provided with a flattening clamping piece positioned on one side of a sample flitch. According to the invention, the flattening clamping piece is arranged, when the fixed connecting block rotates relative to the first fixing frame, the limiting plate and the sample pasting plate form a right angle, and then when conducting glue and film materials are pasted, the edges of the conducting glue and the film materials are aligned with the limiting plate, so that the pasting of the conducting glue and the film materials can be limited, the pressing roller can press the pasted film materials by screwing the clamping screw rod through the screw driver, the flattening treatment is carried out on the film materials, the clamping plate extrudes the flattened film materials along with the movement of the clamping plate, and the flatness of the section of the film materials and the flatness of the sample pasting plate and the clamping plate are increased, so that the film materials are more suitable for scanning electron microscope observation.
Description
Technical Field
The invention relates to the technical field of material testing, in particular to a device for preparing a thin film material section scanning electron microscope sample.
Background
In the refining process of metallurgical industry, alkali is commonly used for dissolving ores, an ion exchange membrane is a film made of a high polymer material with ion exchange performance, the ion exchange membrane is a dialysis membrane and is different from a osmosis membrane, and the separation aim is achieved through the migration of solutes under the force field (such as electric field gradient, concentration gradient and pressure gradient), so that the microstructure of the film directly influences the quality of the film performance, further directly influences the circulation performance, the service life and the application safety, and therefore, the microscopic morphology observation is required to be carried out on the film material so as to obtain the key information of the thickness, the structure, the aperture, the coating distribution and the like of the film material.
When SEM observation is carried out on the section of the film material, the structure is easy to deform due to the fact that the thickness of the film material is thin and soft, the structure is easy to bend, the difficulty of sample preparation is high, when the film material is positioned, conductive adhesive needs to be manually adhered to one side of a clamp holder, one side of the conductive adhesive is flush with a section sample table, then lining paper is torn off by forceps, a film sample is adhered to one side of the section sample table through the conductive adhesive, and then the section of the sample is extruded and clamped.
Disclosure of Invention
The invention aims at: in order to solve the problem that the conducting resin and the film material are easy to be misplaced with the edge of the section sample stage when the film material is positioned, the device for preparing the film material section scanning electron microscope sample is provided.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a film material cross-section scanning electron microscope sample preparation device, includes even the lid, there is the mount pad at the top of even lid through threaded connection, the first screens hole that runs through to the mount pad bottom is seted up at the top of mount pad, a plurality of second screens holes that distribute along first screens hole circle heart equidistance are seted up at the top of mount pad, the inboard grafting of second screens hole has the locking pin, the top of locking pin is fixed with the positioning seat, the bottom of positioning seat is provided with the locating bolt that runs through first screens hole, the outside of locating bolt is provided with the positioning screw sleeve that is located the mount pad below, the top of positioning seat is fixed with first mount, the top of first mount is provided with right angle and links soon, the top of fixed link is installed the pendulum and is put the piece, the top of pendulum is pegged graft and is had the picture peg, the top of picture peg is fixed with the sample flitch, the top of pendulum is provided with the clamp splice that is located one side of flattening of piece, the sample flitch is used for taking off the film under the setting.
As still further aspects of the invention: the diameter of the outer wall of the positioning screw sleeve is larger than that of the first clamping hole, and the diameter of the positioning bolt is smaller than that of the first clamping hole.
As still further aspects of the invention: the right-angle rotating connecting piece comprises a rotating connecting shaft which is rotationally connected to the top of a first fixing frame through a bearing, the bottom of a fixed connecting block is connected with two ends of the rotating connecting shaft, two positioning jacks are formed in the rotating connecting shaft and are distributed ninety degrees along the circle center of the rotating connecting shaft, a through groove positioned below the rotating connecting shaft is formed in the first fixing frame, a first guide column is fixed on the inner wall of the through groove, a pressing block extending to the outer side of the through groove is sleeved on the first guide column, a reset spring connected with the bottom of the inner wall of the through groove is arranged at the bottom of the pressing block, and a bolt extending to the inside of the positioning jack is fixed at the top of the pressing block.
As still further aspects of the invention: the diameter of the bolt is equal to that of the positioning jack, and the contraction length of the reset spring is equal to the depth of the positioning jack.
As still further aspects of the invention: the flattening clamping piece comprises a first L-shaped side plate fixed on two sides of a first fixing frame, a cam is fixed on the top of the first L-shaped side plate, a guide groove is formed in one side, far away from a fixed connecting block, of the cam, a clamping screw rod is arranged in the clamping block, a sliding block in sliding connection with the clamping block is sleeved on the outer side of the clamping screw rod, a clamping plate positioned above the clamping block is fixed on the top of the sliding block, a swinging plate is rotatably connected to the top of the clamping plate through a rotating shaft, a compression roller positioned between a sample pasting plate and the clamping plate is rotatably connected to one side, far away from the clamping plate, of the swinging plate through a bearing, the rotary shaft outside that the swing link board is connected with the clamp position board top is through draw-in groove joint has the torsion spring that links to each other with the clamp position board, the both sides of sample flitch are fixed with the fly frame, the bottom of fly frame is fixed with the push away that is located the guide slot inside and links the slide bar, one side of swing block is fixed with the second L type curb plate, the top of second L type curb plate is fixed with the oblique guide rail, one side that the clamp position board was kept away from to the sample flitch is fixed with the second guide post, the cover is equipped with U type link on the second guide post, one side of U type link is fixed with the limiting plate that is located the benefit position board top, the bottom of U type link is fixed with the crowded position connecting rod that is located the oblique guide rail inboard.
As still further aspects of the invention: the bottom of limiting plate is in parallel state with the top of sample flitch, the width of limiting plate equals with the width of sample flitch top cross-section.
As still further aspects of the invention: the clamping plate is equal to the sample flitch in size, and the included angle between the swing plate and the top of the clamping plate is eighty degrees.
As still further aspects of the invention: the film uncovering unit comprises a position supplementing plate which is inserted on the sample attaching plate, a side connecting fixing frame is fixed on one side of the sample attaching plate away from the clamping plate, a position pushing screw rod is connected to the side connecting fixing frame in a rotating mode through a bearing, a thread sleeve is fixed on one side of the position supplementing plate away from the clamping plate, and the position pushing screw rod is inserted in the thread sleeve.
As still further aspects of the invention: the height of the position compensating plate is equal to that of the sample attaching plate, and the end face of the position compensating plate is flush with the side face of the sample attaching plate when the position compensating plate is in an initial state.
As still further aspects of the invention: the inside of screw thread cover is provided with pushing away bit lead screw assorted internal thread, the length of screw thread cover is less than the width of sample flitch.
Compared with the prior art, the invention has the beneficial effects that:
1. through setting up the clamp piece that flattens, when fixed connection piece rotates relative to first mount, clamp the position board and take place to misplace with the sample flitch, limiting plate and sample flitch form a right angle simultaneously, afterwards when pasting conductive paste, film material, only need with the edge alignment of conductive paste and film material with limiting plate, so alright spacing to paste conductive paste and film material, thereby improve the precision that conductive paste and film material pasted, can make the compression roller press down the film material after pasting through the screw driver screwing clamp the lead screw, thereby carry out flattening to film material, make clamp the position board extrude the film material after flattening along with the removal of clamp position board, thereby increase film material cross-section's roughness and with sample flitch, clamp position board's flush level, make film material more be suitable for scanning electron microscope observation;
2. through setting up right angle and rotating the piece, before fixing the film material that cuts, push down the briquetting down first, make the briquetting move down along the first guiding post in-process that moves down drive the bolt, thus make bolt and positioning jack separate, swing the fixed piece of linking at this moment and make the fixed piece rotate ninety degrees relative to first mount, so make bolt align with another positioning jack, loosen the briquetting and make the bolt insert in the positioning jack under the promotion of reset spring elastic restoring force, so alright make the sample flitch place horizontally, make the staff overlook the sample flitch top and edge alignment of conductive adhesive observe when pasting the conductive adhesive, easy to operate, offer convenience for subsequent conductive adhesive and film material to paste at the same time;
3. through setting up taking off the membrane unit, after accomplishing film material scanning motor observation, accessible screwdriver twists and pushes away the position lead screw for push away the relative side of position lead screw and link the fixed frame and take place to rotate, so make the thread bush remove along pushing away the outside of position lead screw, make the position board continue to remove towards the clamping plate, so alright make the conducting resin of pasting in sample flitch one side appear protruding, so make the clearance appear between conducting resin and the sample flitch, afterwards alright take off conducting resin and film material through tweezers, the use of follow-up device is convenient.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic diagram illustrating the connection between a mounting base and a positioning base according to the present invention;
FIG. 3 is a schematic diagram showing the connection of the positioning base and the sample sticking board according to the present invention;
FIG. 4 is a schematic view of the internal structure of the first fixing frame of the present invention;
FIG. 5 is a schematic diagram of the connection of a wobble block and a fixed connection block according to the present invention;
FIG. 6 is a schematic diagram of a pendulum block according to the present invention;
FIG. 7 is a schematic illustration of the connection of a sample plate to a clamping plate according to the present invention;
FIG. 8 is a schematic diagram of the connection of the clamping plate and the swing plate according to the present invention;
fig. 9 is a schematic diagram showing the connection of the movable frame and the cam according to the present invention.
In the figure: 1. a cover is connected; 2. a mounting base; 3. a first clamping hole; 4. a second clamping hole; 5. a positioning seat; 601. a first fixing frame; 602. sample pasting board; 603. a clamping plate; 604. a positioning block; 605. fixing the connecting blocks; 606. a rotary connecting shaft; 607. clamping and connecting a screw rod; 608. a movable frame; 609. a cam; 610. a first L-shaped side plate; 611. positioning bolts; 612. positioning the screw sleeve; 613. a locking pin; 614. pressing the blocks; 615. a limiting plate; 616. a swing connecting plate; 617. a slide block; 618. a through groove; 619. a return spring; 620. a first guide post; 621. a plug pin; 622. positioning the jack; 623. a position compensating plate; 624. a second L-shaped side plate; 625. a second guide post; 626. a U-shaped connecting frame; 627. a press roller; 628. a guide rail is connected obliquely; 629. a position-squeezing connecting rod; 630. a push lead screw; 631. a thread sleeve; 632. inserting plate; 633. a side connecting fixing frame; 634. a torsion spring; 635. a guide groove; 636. pushing and connecting the slide bar.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "configured" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art. Hereinafter, an embodiment of the present invention will be described in accordance with its entire structure.
Referring to fig. 1-9, in an embodiment of the invention, a thin film material section scanning electron microscope sample preparation device comprises a connecting cover 1, wherein the top of the connecting cover 1 is connected with an installation seat 2 through threads, a first clamping hole 3 penetrating to the bottom of the installation seat 2 is formed in the top of the installation seat 2, a plurality of second clamping holes 4 distributed at equal intervals along the circle center of the first clamping hole 3 are formed in the top of the installation seat 2, a locking pin 613 is inserted into the inner side of the second clamping hole 4, a positioning seat 5 is fixed at the top of the locking pin 613, a positioning bolt 611 penetrating through the first clamping hole 3 is arranged at the bottom of the positioning seat 5, a positioning screw sleeve 612 positioned below the installation seat 2 is arranged at the outer side of the positioning bolt 611, a first fixing frame 601 is fixed at the top of the positioning seat 5, a right-angle rotary connecting piece is arranged at the top of the first fixing frame 601, a swinging block 604 is arranged at the top of the fixing connecting block 605 through the right-angle rotary piece, a 632 is inserted into the top of the swinging block 604, a top 632 is fixed at the top of the swinging block 632, a top of the swinging block 602 is provided with a clamping plate 602, and a clamping plate 602 is arranged at the top of the clamping plate 602 for clamping a sample to be clamped down, and a sample is arranged on one side of a sample to be clamped and placed.
In this embodiment, when a sample is manufactured, firstly cutting a film material to be measured into a specified size, then brushing silver paste on one surface of the cut film, folding the film to enable one surface of the brushed silver paste to be mutually attached, operating a right-angle rotary connecting piece, enabling the sample attaching plate 602 to be horizontally placed through the operation of the right-angle rotary connecting piece, then tearing off conductive adhesive with the specified size, matching with a flattening clamping piece, pasting the conductive adhesive on one side of the sample attaching plate 602, enabling one side of the conductive adhesive to be flush with the top of the sample attaching plate 602, then tearing off lining paper on the conductive adhesive by forceps, pasting the film material on one side of the conductive adhesive, fixing the film material, then enabling the sample attaching plate 602 to recover through operating the right-angle rotary connecting piece, then enabling the fixed film material to be flattened through operating the flattening clamping piece, simultaneously pushing out bubbles between the films, placing the device for fixing the film into a metallographic polishing machine, setting polishing parameters and the like, cleaning the polished film sample by using absolute ethyl alcohol for a plurality of times, blowing off the polished film sample to be clean, and blowing off the polished film material to a gold film, and finally blowing off the film by a scanning unit, and carrying out imaging treatment on the film, and finally, shooting the film by blowing off the film material by a scanning unit.
Referring to fig. 1 and 2, the diameter of the outer wall of the positioning screw sleeve 612 is larger than the diameter of the first clamping hole 3, and the diameter of the positioning bolt 611 is smaller than the diameter of the first clamping hole 3.
In this embodiment, by setting this structure so that the locking pin 613 is inserted into the second locking hole 4 when the positioning bolt 611 is inserted into the first locking hole 3, the rotation of the positioning seat 5 is limited, and the positioning seat 5 is fixed when the positioning screw sleeve 612 is screwed to the outer side of the positioning bolt 611, so as to increase the stability of the connection between the mounting seat 2 and the positioning seat 5.
Referring to fig. 1 to 4, the right-angle rotary connecting piece includes a rotary connecting shaft 606 rotatably connected to the top of the first fixing frame 601 through a bearing, the bottom of the fixed connecting block 605 is connected to two ends of the rotary connecting shaft 606, two positioning insertion holes 622 are formed in the rotary connecting shaft 606, the two positioning insertion holes 622 are distributed ninety degrees along the center of the rotary connecting shaft 606, a through groove 618 located below the rotary connecting shaft 606 is formed in the first fixing frame 601, a first guide column 620 is fixed to the inner wall of the through groove 618, a pressing block 614 extending to the outer side of the through groove 618 is sleeved on the first guide column 620, a reset spring 619 connected to the bottom of the inner wall of the through groove 618 is arranged at the bottom of the pressing block 614, and a plug pin 621 extending to the inside of the positioning insertion hole 622 is fixed to the top of the pressing block 614.
In this embodiment, before fixing the cut film material, the pressing block 614 is pressed down, so that the pressing block 614 drives the latch 621 to move down along the first guiding post 620 in the process of moving down, so as to separate the latch 621 from the positioning jack 622, at this time, the fixing connecting block 605 is swung to enable the fixing connecting block 605 to rotate ninety degrees relative to the first fixing frame 601, so that the latch 621 is aligned with another positioning jack 622, the pressing block 614 is released to enable the latch 621 to be inserted into the positioning jack 622 under the pushing of the elastic restoring force of the restoring spring 619, so that the sample pasting board 602 can be placed horizontally, a worker can look down whether the top of the sample pasting board 602 is aligned with the edge of the conductive adhesive when pasting the conductive adhesive, the operation is simple, and convenience is provided for pasting the subsequent conductive adhesive and the film material.
Referring to FIG. 4, the diameters of the pins 621 and the positioning holes 622 are equal, and the contraction length of the return spring 619 is equal to the depth of the positioning holes 622.
In this embodiment, this structure is provided to limit the rotation shaft 606 when the latch 621 is inserted into the positioning insertion hole 622, and to separate the latch 621 from the positioning insertion hole 622 when the pressing block 614 moves downward, so as to increase the stability of the rotation shaft 606 after rotation.
Referring to fig. 1, fig. 3, fig. 5, fig. 6, fig. 7, fig. 8, fig. 9, the flattening clamping piece comprises a first L-shaped side plate 610 fixed on two sides of a first fixing frame 601, a cam 609 is fixed on the top of the first L-shaped side plate 610, a guide groove 635 is provided on one side of the cam 609 far away from the fixing connecting block 605, a clamping screw 607 is arranged in the clamping block 604, a sliding block 617 slidingly connected with the clamping block 604 is sleeved on the outer side of the clamping screw 607, a clamping plate 603 positioned above the clamping block 604 is fixed on the top of the sliding block 617, a swinging plate 616 is rotatably connected with a pressing roller 627 positioned between the clamping plate 603 through a bearing on one side of the clamping plate 603, a torsion spring 634 connected with the top of the clamping plate 603 is clamped on the outer side of the rotating shaft, a movable frame 608 is fixed on two sides of the sample clamping plate 602, a pushing sliding rod 636 positioned in the guide groove 635 is fixedly connected with the bottom of the movable frame, a second inclined frame 626 is fixedly connected with a second guide groove 626 positioned on one side of the clamping plate 626, a second inclined frame 626 is connected with the side of the second inclined frame 626 positioned on the side of the clamping plate, and the second inclined frame 626 is connected with the second guide groove 626 positioned on one side of the clamping plate 626.
In this embodiment, when the fixed link 605 rotates relative to the first fixing frame 601, the pushing slide bar 636 rotates along the guide groove 635, when the fixed link 605 rotates ninety degrees, the pushing slide bar 636 moves along the guide groove 635 to the protrusion of the cam 609, at this time, the movable frame 608 moves upward relative to the fixed link 605, so that the sample flitch 602 can be pushed to move relative to the positioning block 604, the clamping plate 603 is dislocated with the sample flitch 602, at the same time, the sample flitch 602 drives the U-shaped connecting frame 626 to move through the second guide post 625, at this time, the U-shaped connecting frame 626 moves along the oblique guide rail 628 through the displacement connecting rod 629, so that the limiting plate 615 moves relative to the sample flitch 602, the limiting plate 615 forms a right angle with the sample flitch 602, and then when the conductive adhesive and the film material is adhered, the adhesive between the conductive adhesive and the film material can be improved by only aligning the edges of the conductive adhesive and the film material with the limiting plates 615, so that the adhesive precision between the conductive adhesive and the film material can be improved, the screw rod 607 can be screwed by a screwdriver after the adhesive between the conductive adhesive and the film material is finished, the sliding block 617 moves along the screw rod 607 when the screw rod 607 rotates, the clamping plate 603 moves towards the sample pasting plate 602, when the pressing roller 627 contacts with the film material on one side of the sample pasting plate 602, the clamping plate 603 continues to move, the pressing roller 627 is pressed by the clamping plate 603 to move towards two sides of the clamping plate 603, so that the pressing roller 627 presses the adhered film material to level the film material, the clamping plate 603 presses the leveled film material along with the movement of the clamping plate 603, thereby increasing the flatness of the cross section of the film material and the flatness of the sample pasting plate 602 and the clamping plate 603, so that the film material is more suitable for scanning electron microscope observation.
Referring to fig. 6 and 7, the bottom of the limiting plate 615 is parallel to the top of the sample plate 602, and the width of the limiting plate 615 is equal to the width of the top section of the sample plate 602.
In this embodiment, when the sample board 602 rotates to a horizontal state by setting the structure, the limiting board 615 is protruded relative to the sample board 602, so that a right angle is formed between the limiting board 615 and the sample board 602, and similarly, when the sample board 602 rotates to a vertical state, the limiting board 615 is completely contracted to the top of the sample board 602, so as to prevent the limiting board 615 from shielding the adhered film material.
Referring to fig. 6, 7 and 8, the clamping plate 603 and the sample pasting plate 602 are equal in size, and the included angle between the swinging plate 616 and the top of the clamping plate 603 is eighty degrees.
In this embodiment, the flatness of the film material is improved by arranging the structure such that the pressing roller 627 presses and flattens the film material when the nip plate 603 moves toward the sample plate 602.
Referring to fig. 6 and 7, the film uncovering unit includes a position compensating plate 623 inserted on the sample pasting plate 602, a side connecting frame 633 is fixed on one side of the sample pasting plate 602 far from the clamping plate 603, a position pushing screw 630 is rotatably connected on the side connecting frame 633 through a bearing, a threaded sleeve 631 is fixed on one side of the position compensating plate 623 far from the clamping plate 603, and the position pushing screw 630 is inserted in the threaded sleeve 631.
In this embodiment, after the film material is observed by the scanning motor, the pushing screw 630 is screwed by the screwdriver, so that the opposite side connecting frame 633 of the pushing screw 630 rotates, and the threaded sleeve 631 moves along the outer side of the pushing screw 630, so that the bit supplementing plate 623 moves towards the bit clamping plate 603, and the conductive adhesive adhered to one side of the sample sticking plate 602 protrudes, so that a gap is formed between the conductive adhesive and the sample sticking plate 602, and then the conductive adhesive and the film material can be removed by tweezers, thereby providing convenience for using a subsequent device.
Referring to fig. 6 and 7, the height of the patch 623 is equal to that of the sample board 602, and the end surface of the patch 623 is flush with the side surface of the sample board 602 when the patch 623 is in the initial state.
In this embodiment, by setting the structure such that the conductive adhesive contacts one side of the patch board 623 when the conductive adhesive is adhered to one side of the sample board 602, the conductive adhesive is pushed when the patch board 623 moves relative to the sample board 602, so that a gap is formed between the conductive adhesive and the sample board 602.
Referring to fig. 7, the screw sleeve 631 has an internal screw thread matching with the push screw 630, and the length of the screw sleeve 631 is smaller than the width of the sample pasting board 602.
In the present embodiment, by providing this structure to restrict the movement rectangle of the patch plate 623, the patch plate 623 is prevented from being separated from the sample plate 602 during movement.
The foregoing description is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical solution of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.
Claims (10)
1. The utility model provides a film material cross-section scanning electron microscope sample prepares device, its characterized in that, including linking lid (1), the top that links lid (1) has mount pad (2) through threaded connection, first screens hole (3) that run through to mount pad (2) bottom are seted up at the top of mount pad (2), a plurality of second screens hole (4) that distribute along first screens hole (3) centre of a circle equidistance have been seted up at the top of mount pad (2), peg graft in the inboard of second screens hole (4) has locking pin (613), the top of locking pin (613) is fixed with positioning seat (5), the bottom of positioning seat (5) is provided with positioning bolt (611) that runs through first screens hole (3), the outside of positioning bolt (611) is provided with positioning screw sleeve (612) that are located mount pad (2) below, the top of positioning seat (5) is fixed with first mount (601), the top of first mount (601) is provided with right angle and revolves and links piece, the top of first mount (605) is fixed with picture peg graft (604) through linking piece (604), peg graft top (604) is fixed with picture peg (632), the top of the locating block (604) is provided with a flattening clamping piece positioned at one side of the sample flitch (602), and the sample flitch (602) is provided with a film uncovering unit for taking off a film.
2. The thin film material section scanning electron microscope sample preparation device according to claim 1, wherein the diameter of the outer wall of the positioning screw sleeve (612) is larger than the diameter of the first clamping hole (3), and the diameter of the positioning bolt (611) is smaller than the diameter of the first clamping hole (3).
3. The device for preparing a film material section scanning electron microscope sample according to claim 1, wherein the right-angle rotating connecting piece comprises a rotating connecting shaft (606) which is rotationally connected to the top of a first fixing frame (601) through a bearing, the bottom of the fixed connecting block (605) is connected with two ends of the rotating connecting shaft (606), two positioning jacks (622) are formed in the rotating connecting shaft (606), the two positioning jacks (622) are distributed at ninety degrees along the center of the rotating connecting shaft (606), a through groove (618) which is positioned below the rotating connecting shaft (606) is formed in the first fixing frame (601), a first guide column (620) is fixed on the inner wall of the through groove (618), a pressing block (614) which extends to the outer side of the through groove (618) is sleeved on the first guide column (620), a reset spring (619) which is connected with the bottom of the inner wall of the through groove (618) is arranged at the bottom of the pressing block (614), and a plug pin (619) which extends to the inner part of the positioning jack (622) is fixed at the top of the pressing block (614).
4. A thin film material section scanning electron microscope sample preparation apparatus according to claim 3, wherein the diameters of the plug pins (621) and the positioning insertion holes (622) are equal, and the contraction length of the return spring (619) is equal to the depth of the positioning insertion holes (622).
5. The device for preparing a sample of a thin film material section scanning electron microscope according to claim 3, wherein the flattening clamping piece comprises a first L-shaped side plate (610) fixed on two sides of a first fixing frame (601), a cam (609) is fixed on the top of the first L-shaped side plate (610), a guide groove (635) is formed on one side, far away from the fixed connecting block (605), of the cam (609), a clamping screw (607) is arranged in the swinging block (604), a sliding block (617) in sliding connection with the swinging block (604) is sleeved on the outer side of the clamping screw (607), a clamping plate (603) positioned above the swinging block (604) is fixed on the top of the sliding block (617), a swinging plate (616) is rotatably connected with a pressing roller (627) positioned between the sample attaching plate (602) and the clamping plate (603) through a bearing on one side, the swinging plate (616) is rotatably connected with the bottom of the fixed connecting block (608) through a guide groove (636), the two sides of the clamping plate (608) are movably connected with the inner side of the fixed connecting block (603) through a spring (636), one side of the swing block (604) is fixed with a second L-shaped side plate (624), the top of the second L-shaped side plate (624) is fixed with a diagonal connection guide rail (628), one side of the sample flitch (602) away from the clamping plate (603) is fixed with a second guide column (625), a U-shaped connecting frame (626) is sleeved on the second guide column (625), one side of the U-shaped connecting frame (626) is fixed with a limiting plate (615) positioned at the top of the compensation plate (623), and the bottom of the U-shaped connecting frame (626) is fixed with a position extrusion connecting rod (629) positioned on the inner side of the diagonal connection guide rail (628).
6. The device for preparing a sample of a thin film material section scanning electron microscope according to claim 5, wherein the bottom of the limiting plate (615) is parallel to the top of the sample attaching plate (602), and the width of the limiting plate (615) is equal to the width of the top section of the sample attaching plate (602).
7. The device for preparing a sample of a thin film material section scanning electron microscope according to claim 5, wherein the size of the clamping plate (603) is equal to that of the sample attaching plate (602), and the included angle between the swinging plate (616) and the top of the clamping plate (603) is eighty degrees.
8. The device for preparing a film material section scanning electron microscope sample according to claim 5, wherein the film uncovering unit comprises a position compensating plate (623) inserted on the sample attaching plate (602), a side connecting frame (633) is fixed on one side of the sample attaching plate (602) far away from the clamping plate (603), a position pushing screw (630) is rotatably connected on the side connecting frame (633) through a bearing, a threaded sleeve (631) is fixed on one side of the position compensating plate (623) far away from the clamping plate (603), and the position pushing screw (630) is inserted in the threaded sleeve (631).
9. The thin film material section scanning electron microscope sample preparation device according to claim 8, wherein the height of the patch panel (623) is equal to the height of the sample patch panel (602), and the end surface of the patch panel (623) is flush with the side surface of the sample patch panel (602) when the patch panel (623) is in an initial state.
10. The thin film material section scanning electron microscope sample preparation device according to claim 8, wherein the screw sleeve (631) is internally provided with an internal screw thread matched with the push screw (630), and the length of the screw sleeve (631) is smaller than the width of the sample flitch (602).
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