CN117359537A - Clamp for replacing bearing and method for replacing bearing - Google Patents
Clamp for replacing bearing and method for replacing bearing Download PDFInfo
- Publication number
- CN117359537A CN117359537A CN202210767276.7A CN202210767276A CN117359537A CN 117359537 A CN117359537 A CN 117359537A CN 202210767276 A CN202210767276 A CN 202210767276A CN 117359537 A CN117359537 A CN 117359537A
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- CN
- China
- Prior art keywords
- bearing
- clamp
- center
- clamp body
- replacing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 17
- -1 Polyoxymethylene Polymers 0.000 claims description 9
- 229930040373 Paraformaldehyde Natural products 0.000 claims description 6
- 239000004698 Polyethylene Substances 0.000 claims description 6
- 239000004743 Polypropylene Substances 0.000 claims description 6
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 claims description 6
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 claims description 6
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 claims description 6
- 229920000573 polyethylene Polymers 0.000 claims description 6
- 229920006324 polyoxymethylene Polymers 0.000 claims description 6
- 229920001155 polypropylene Polymers 0.000 claims description 6
- 229920003023 plastic Polymers 0.000 claims description 3
- 239000004033 plastic Substances 0.000 claims description 3
- 239000004800 polyvinyl chloride Substances 0.000 claims description 3
- 238000013461 design Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/02—Assembly jigs
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mounting Of Bearings Or Others (AREA)
Abstract
The invention discloses a fixture for replacing a bearing and a method for replacing the bearing, wherein the fixture for replacing the bearing of a wafer rotating device comprises: the clamp comprises a clamp base and a clamp body, wherein the clamp body comprises a circular upper surface and a circular lower surface, the diameter of the circular lower surface is larger than that of the circular upper surface, the clamp base and the clamp body are used for clamping a bearing, the bearing comprises an inner ring and an outer ring, the circular upper surface covers the inner ring, and the circular lower surface can completely cover the outer ring.
Description
Technical Field
The present invention relates to a jig for replacing a bearing and a method of replacing a bearing using the same.
Background
Integrated circuit fabrication involves transferring a circuit design from an IC design factory onto a silicon wafer by means of optical imaging, and finally patterning desired electronic components on the silicon wafer according to the design architecture, wherein the integrated circuit fabrication process includes multiple processes of film deposition, photoresist generation, development, etching of films, photoresist removal, and the like, and multiple processes of cleaning, polishing, and the like, and most of the processes require material application or polishing in a rotating manner. The wafer rotation device can be used in the manufacturing process to carry the wafer and provide a smooth rotation speed of the wafer.
However, the wafer rotating device is easy to wear the components because of the frequent rotation.
Disclosure of Invention
In view of the above, the present invention provides a fixture that facilitates replacement of bearings in a wafer rotation device.
According to a preferred embodiment of the present invention, a jig for replacing a bearing of a wafer rotating apparatus includes a jig base, a jig body including a circular upper surface and a circular lower surface having a diameter larger than that of the circular upper surface, wherein the jig base and the jig body are for holding a bearing, the bearing includes an inner ring and an outer ring, the circular upper surface covers the inner ring, and the circular lower surface can entirely cover the outer ring.
According to a preferred embodiment of the present invention, a method of replacing a bearing of a wafer rotating apparatus includes providing a jig base and a jig body, wherein the jig body includes a circular upper surface and a circular lower surface, the circular lower surface has a diameter larger than that of the circular upper surface, a bolt is disposed at a center of the jig base, then a ring gear is provided, a first bearing is embedded in a center of the ring gear, wherein the first bearing includes a first inner ring and a first outer ring, then a bearing dismounting step includes clamping the bearing with the jig base and the jig body, the circular upper surface of the jig body covers the first inner ring, the bolt passes through the center of the first bearing and the center of the jig body, then a nut is screwed onto the bolt from an end of the bolt in a direction of the jig body to push the first bearing out of the center of the ring gear, and then a second bearing is removed after the bearing dismounting step, wherein a shape of the second bearing and a shape of the first bearing are identical, then a bearing mounting step includes placing the second bearing at a center of the ring gear, and a second bearing contacting the lower surface of the jig body and a second bearing on the other side of the ring gear are placed opposite to the center of the ring gear, and a screw is inserted in a direction of the jig body and the bolt passes through the second bearing and the screw.
In order to make the above objects, features and advantages of the present invention more comprehensible, preferred embodiments accompanied with figures are described in detail below. The following preferred embodiments and drawings are, however, for purposes of reference and illustration only and are not intended to limit the scope of the invention.
Drawings
FIG. 1 is a schematic diagram of a wafer rotation apparatus according to a preferred embodiment of the invention;
FIG. 2 is a schematic view of a ring gear and bearing according to a preferred embodiment of the present invention;
FIG. 3 is a schematic view of a fixture for replacing a bearing of a wafer rotation device according to a preferred embodiment of the present invention;
FIGS. 4-5 are schematic diagrams illustrating a method of disassembling a bearing of a wafer rotation apparatus according to a preferred embodiment of the present invention;
fig. 6 to 7 are schematic views showing a method of loading a bearing of a wafer rotating apparatus according to a preferred embodiment of the present invention.
Description of the main reference signs
10 wafer rotating device
12 carrier table
14 annular gear
14a front face
14b back side
16 bearing
16a inner ring
16b outer ring
16c ball
18 rotating disk
20 groove
22 clamp
24 clamp base
26 clip body
26a round upper surface
26b round lower surface
28 bolt
30 wrench
32 nut
34 gasket
116 first bearing
116a first inner ring
116b first outer ring
216 second bearing
216a second inner ring
216b second outer ring
Detailed Description
FIG. 1 is a wafer rotation apparatus according to a preferred embodiment of the invention. Fig. 2 shows a ring gear and a bearing according to a preferred embodiment of the invention. Fig. 3 illustrates a fixture for replacing a bearing of a wafer rotation device according to a preferred embodiment of the present invention.
As shown in fig. 1, a wafer rotating apparatus 10 includes a carrier 12, a ring gear 14 disposed on the carrier 12, and a bearing 16 disposed at the center of the ring gear 14. A straight shaft (not shown) is positioned within carrier 12 through bearings 16. In addition, the wafer rotation apparatus 10 further includes a rotating disk 18 covering the ring gear 14 and the bearing 16. As shown in fig. 2, a ring gear 14 is divided into a front face 14a and a rear face 14b, and a groove 20 is formed in the center of the front face 14a of the ring gear 14, and the groove 20 is used for embedding the bearing 16. The bearing 16 is divided into an inner ring 16a and an outer ring 16b, the diameter of the outer ring 16b being larger than the diameter of the inner ring 16a, and a plurality of balls 16c being provided between the inner ring 16a and the outer ring 16 b. The diameter of the outer ring 16b is the same as the diameter of the groove 20 of the ring gear 14.
As shown in fig. 3, a jig 22 for replacing a bearing of a wafer rotating apparatus includes a jig base 24, a jig main body 26, the jig main body 26 including a circular upper surface 26a and a circular lower surface 26b, the circular lower surface 26b having a diameter larger than that of the circular upper surface 26a, wherein the jig base 24 and the jig main body 26 are for holding the bearing 16 in fig. 2, the circular upper surface 26a covers an inner ring 16a of the bearing 16, the circular lower surface 26b may entirely cover an outer ring 16b, that is, the diameter of the circular upper surface 26a must be larger than or equal to that of the inner ring 16a of the bearing 16, and the diameter of the circular upper surface 26a is smaller than that of the outer ring 16 b. The diameter of the circular lower surface 26b is equal to or greater than the diameter of the outer ring 16b of the bearing 16. In addition, a bolt 28 is provided in the center of the clamp base 24, and the clamp base 24 and the clamp body 26 comprise Polyoxymethylene (POM), polyethylene (PE), polypropylene (PP), polyvinyl chloride (PVC), ABS (Acrylonitrile-Butadiene-Styrene) plastic or other elastic materials.
Fig. 4 to 5 are views showing a method of disassembling a bearing of a wafer rotating apparatus according to a preferred embodiment of the present invention, wherein fig. 4 is an exploded view of fig. 5, and in fig. 4 and 5, elements having the same function will be used with the same reference numerals as in fig. 1 to 3. Referring to fig. 4 and 5, a clamp base 24 and a clamp body 26 are provided, wherein the clamp body 26 includes a circular upper surface 26a and a circular lower surface 26b, the circular lower surface 26b has a diameter larger than that of the circular upper surface 26a, a bolt 28 is disposed at the center of the clamp base 24, then a ring gear 14 is provided, a first bearing 116 is inserted into the center of the ring gear 14 while the first bearing 116 includes a first inner ring 116a and a first outer ring 116b, then a bearing removing step is performed, the back surface 14b of the ring gear 14 is faced upward, that is, the face of the ring gear 14 having the groove 20 is faced downward, the clamp base 24 is placed under the ring gear 14, the clamp body 26 is placed over the ring gear 14, the first bearing 116 is clamped by the clamp base 24 and the clamp body 26, the circular upper surface 26a of the clamp body 26 covers the first inner ring 116a, the bolt 28 passes through the center of the first bearing 116 and the center of the clamp body 26, then a nut 32 is pushed out of the end of the bolt 28 by a spanner 30 toward the clamp body 26 by the end of the bolt 28 to remove the first bearing 24 and the clamp body 26 from the center of the ring gear 14. A spacer 34 may also be placed between the nut 32 and the clamp body 26 to prevent the nut 32 from damaging the surface of the clamp body 26.
Fig. 6 to 7 are views showing a method of loading a bearing of a wafer rotating apparatus according to a preferred embodiment of the present invention, wherein fig. 6 is an exploded view of fig. 7, and in fig. 6 and 7, elements having the same function will be used with the same reference numerals as in fig. 1 to 3. Referring to fig. 6 and 7, a second bearing 216 is provided, wherein the shape of the second bearing 216 is identical to the shape of the first bearing 116, that is, the second bearing 216 is a replacement for the first bearing 116, then a bearing-loading step is performed, which includes upward facing the front face 14a of the ring gear 14, then aligning the second bearing 216 with the groove 20 in the center of the front face 14a of the ring gear 14, and placing the circular lower surface 26b of the clamp body 26 in contact with the second bearing 216 and the clamp base 24 on the other side of the ring gear 14 with respect to the clamp body 26, that is, placing the clamp body 26 on the front face 14a of the ring gear 14, placing the clamp base 24 on the back face 14b of the ring gear 14, where the bolt 28 passes through the center of the second bearing 216 and the center of the clamp body 26, then screwing the nut 32 onto the bolt 28 from the end of the bolt 28 toward the clamp body 26, and placing the spacer 34 between the nut 32 and the clamp body 26 can likewise prevent the nut 32 from damaging the surface of the clamp body 26. While pushing the second bearing 216, the circular lower surface 26b of the clamp body 26 contacts the second bearing 216, and because the diameter of the circular lower surface 26b is greater than or equal to the diameter of the outer ring 216b of the second bearing 216, the second bearing 216 will be entirely covered by the circular lower surface 26b, and while pushing, the pushing force from the clamp body 26 can be applied on the second bearing 216 on average. After the second bearing 216 is embedded, the clamp base 24 and the clamp body 26 are removed. The replacement of the first bearing 116 is completed at this time.
Traditionally, the bearings are replaced by a wrench, such as a socket wrench, inserted into the space between the bearing balls to knock the bearings out, however, this approach can cause the carrier to wobble and the bearings to be damaged. The clamp designed in the anti-observation scheme is relatively flexible and elastic in material, so that the surface of the bearing cannot be damaged when the clamp contacts the bearing, and in addition, the bearing can be pushed in or pushed out by the average applied thrust because the contact surfaces of the clamp and the bearing are even, and therefore, the bearing is uniformly stressed around the bearing and cannot shake.
The foregoing description is only of the preferred embodiments of the invention, and all changes and modifications that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Claims (10)
1. A fixture for replacing a bearing of a wafer rotation device, comprising:
a clamp base;
a clamp body comprising a circular upper surface and a circular lower surface, the circular lower surface having a diameter greater than the diameter of the circular upper surface; wherein the clamp base and the clamp body are used to clamp a bearing, the bearing comprising an inner ring and an outer ring, the diameter of the circular upper surface being greater than or equal to the diameter of the inner ring and less than the diameter of the outer ring, the circular lower surface being capable of completely covering the outer ring.
2. The fixture for replacing bearings of a wafer rotating apparatus as recited in claim 1, further comprising a bolt disposed at a center of the fixture base.
3. A chuck for use in replacing a bearing of a wafer rotation device as recited in claim 2, wherein said bolt passes through a center of said bearing and a center of said chuck body when said chuck base and said chuck body clamp said bearing.
4. A chuck for use in replacing a bearing of a wafer rotating apparatus as in claim 3, wherein said chuck base and said chuck body are screwed onto said bolt by a nut from the end of said bolt toward said chuck body to detach or mount said bearing while clamping said bearing.
5. The jig for replacing bearings of a wafer rotating apparatus of claim 1, wherein the jig base and the jig body comprise Polyoxymethylene (POM), polyethylene (PE), polypropylene (PP), polyvinyl chloride (PVC) or ABS (Acrylonitrile-Butadiene-Styrene) plastic.
6. A chuck for use in replacing a bearing of a wafer rotation device as recited in claim 1, wherein the bearing is embedded in a center of a ring gear, and a rotating disk covers the ring gear to constitute the wafer rotation device.
7. A method of replacing a bearing of a wafer rotation device, comprising:
providing a clamp base and a clamp body, wherein the clamp body comprises a circular upper surface and a circular lower surface, the diameter of the circular lower surface is larger than that of the circular upper surface, and a bolt is arranged in the center of the clamp base;
providing a ring gear, wherein a first bearing is embedded in the center of the ring gear, and the first bearing comprises a first inner ring and a first outer ring;
performing a bearing removal step comprising:
clamping the bearing with the clamp base and the clamp body, the circular upper surface of the clamp body covering the first inner ring, the bolt passing through the center of the first bearing and the center of the clamp body;
screwing a nut onto the bolt from the end of the bolt toward the clamp body to push out the first bearing from the center of the ring gear; and
after the bearing removal step, removing the clamp base and the clamp body;
providing a second bearing, wherein the shape of the second bearing is identical to the shape of the first bearing; the step of loading the bearing is carried out, comprising:
aligning the second bearing with the center of the ring gear, and contacting the circular lower surface of the clamp body with the second bearing and placing the clamp base on the other side of the ring gear with respect to the clamp body, the bolt passing through the center of the second bearing and the center of the clamp body;
screwing the nut onto the bolt from the end of the bolt toward the clamp body to embed the second bearing into the center of the ring gear; and
after the bearing loading step, the clamp base and the clamp body are removed.
8. The method of replacing a bearing of a wafer rotation device of claim 7, wherein the second bearing comprises a second inner ring and a second outer ring, the circular lower surface of the clamp body entirely covering the second outer ring.
9. The method of replacing a bearing of a wafer rotation device as recited in claim 7, further comprising providing a rotating disk covering the ring gear to compose a wafer rotation device after the step of loading the bearing.
10. The method of replacing a bearing of a wafer rotation device of claim 7, wherein the clamp base and the clamp body comprise Polyoxymethylene (POM), polyethylene (PE), polypropylene (PP), polyvinylchloride (PVC) or ABS (Acrylonitrile-Butadiene-Styrene) plastic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210767276.7A CN117359537A (en) | 2022-06-30 | 2022-06-30 | Clamp for replacing bearing and method for replacing bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210767276.7A CN117359537A (en) | 2022-06-30 | 2022-06-30 | Clamp for replacing bearing and method for replacing bearing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117359537A true CN117359537A (en) | 2024-01-09 |
Family
ID=89398929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210767276.7A Pending CN117359537A (en) | 2022-06-30 | 2022-06-30 | Clamp for replacing bearing and method for replacing bearing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117359537A (en) |
-
2022
- 2022-06-30 CN CN202210767276.7A patent/CN117359537A/en active Pending
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