CN117348125B - Moth-eye anti-reflection structure with leakage mode resonance effect - Google Patents
Moth-eye anti-reflection structure with leakage mode resonance effect Download PDFInfo
- Publication number
- CN117348125B CN117348125B CN202311498893.2A CN202311498893A CN117348125B CN 117348125 B CN117348125 B CN 117348125B CN 202311498893 A CN202311498893 A CN 202311498893A CN 117348125 B CN117348125 B CN 117348125B
- Authority
- CN
- China
- Prior art keywords
- moth
- eye
- reflection
- layer
- parameters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000000694 effects Effects 0.000 title claims abstract description 38
- 239000000463 material Substances 0.000 claims abstract description 33
- 238000002834 transmittance Methods 0.000 claims abstract description 21
- 238000005457 optimization Methods 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 5
- 238000004458 analytical method Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 238000004364 calculation method Methods 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052594 sapphire Inorganic materials 0.000 claims description 2
- 239000010980 sapphire Substances 0.000 claims description 2
- 230000002401 inhibitory effect Effects 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 4
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 230000005764 inhibitory process Effects 0.000 description 11
- 239000002086 nanomaterial Substances 0.000 description 11
- 238000001228 spectrum Methods 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000005253 cladding Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/028—Optical fibres with cladding with or without a coating with core or cladding having graded refractive index
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D30/00—Reducing energy consumption in communication networks
- Y02D30/70—Reducing energy consumption in communication networks in wireless communication networks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention relates to a moth-eye anti-reflection structure with a leaky mode resonance effect, which comprises a basal layer, a waveguide layer and a grating layer which are sequentially arranged, wherein the refractive index of the waveguide layer is respectively larger than the equivalent refractive index of the grating layer and the refractive index of the basal layer material; the grating layer is a moth-eye period array microstructure, wherein the shape and the parameters of each moth-eye structure are the same, the parameters of the waveguide layer and the shape and the parameters of the moth-eye structure are subjected to multi-parameter combination optimization, so that an optimized moth-eye anti-reflection structure is obtained, when an external incident field and a leakage mode in the waveguide layer meet a leakage mode resonance phase matching condition, a leakage mode resonance effect is excited, and at the moment, the optimized moth-eye anti-reflection structure is used for enhancing the reflection of a long-wave broadband wide angle and suppressing the short-wave single-point zero diffraction high-transmission and high-order diffraction. The invention simultaneously combines the anti-reflection performance of two wave bands of long-wave band wide-angle anti-reflection and short-wave single-point zero-level high-transmittance, and has the advantages of simple processing and more stable microstructure.
Description
Technical Field
The invention belongs to the technical field of anti-reflection micro-nano structures, and particularly relates to a moth-eye anti-reflection structure with a leakage mode resonance effect.
Background
Humans are inspired by the moth eyes, starting from the research of the bionic moth eye micro-nano structure, the moth eye structure equivalent is regarded as the continuous change of the refractive index of the material surface along the height direction, the gradient refractive index distribution at the medium interface is realized, the characteristic of natural anti-reflection property is realized, and the method has wide application prospect. The size of the moth-eye micro-nano structure is generally smaller than the incident wavelength, and the moth-eye micro-nano structure has the structural characteristic of sub-wavelength, namely, the structure period is smaller than the wavelength scale, so that the moth-eye micro-nano structure has no high diffraction order in reflection and transmission. Meanwhile, if the wide-spectrum anti-reflection of the moth-eye micro-nano structure is to be realized, the moth-eye micro-nano structure needs to meet the requirement that the height is more than half of the wavelength of a long wave, so that the wide-spectrum anti-reflection moth-eye micro-structure unit needs to have a high aspect ratio, which can cause loose material surface, weaken the surface mechanical strength of the material and greatly reduce the damage resistance and the difficulty of a micro-nano processing technology.
In addition, the moth-eye micro-nano structure with a broad spectrum anti-reflection function is a common anti-reflection design at present. However, for short wavelength bands, the moth-eye micro-nano structure does not meet the requirement of a sub-wavelength structure, and a higher order diffraction phenomenon can be generated. These diffraction effects result in energy dispersion and scattering, reducing zero-order transmittance, and thus affecting anti-reflection properties. Therefore, the conventional moth-eye micro-nano structure cannot take account of the antireflection of the short wave band, and the application of the moth-eye micro-nano structure is limited.
Disclosure of Invention
Aiming at the problems, the invention provides the moth-eye anti-reflection structure with the leakage mode resonance effect, which is mainly based on the combination of the leakage mode principle and the moth-eye structure, and can realize the diffraction inhibition of a short wave band single point while meeting the requirement of long wave band wide angle anti-reflection, so that the zero-order transmittance is greatly improved.
In order to achieve the above purpose, the invention adopts the following technical scheme:
The moth-eye anti-reflection structure with the leaky mode resonance effect comprises a basal layer, a waveguide layer and a grating layer which are sequentially arranged, wherein the refractive index of the waveguide layer material is respectively larger than the equivalent refractive index of the grating layer and the refractive index of the basal layer material;
The grating layer is a moth-eye period array microstructure, wherein the shape and the parameters of each moth-eye structure are the same, the parameters of the waveguide layer and the shape and the parameters of the moth-eye structure are subjected to multi-parameter combination optimization according to the requirement of long-wave broadband wide-angle antireflection and the leakage mode principle, so that an optimized moth-eye antireflection structure is obtained, when an external incident field and a leakage mode in the waveguide layer meet the leakage mode resonance phase matching condition, the leakage mode resonance effect is excited, and at the moment, the optimized moth-eye antireflection structure is used for antireflection to the long-wave broadband wide angle and for inhibition to short-wave single-point zero-order diffraction high transmission and high-order diffraction;
Wherein, the process of performing multi-parameter combination optimization on the parameters of the waveguide layer and the shape and parameters of the moth-eye structure comprises the following steps:
step 1: presetting the period and the material of a moth-eye structure, presetting the material and the thickness of a waveguide layer and presetting the material of a basal layer;
Step 2: setting a parameter initial value of a moth eye structure, determining parameters meeting the phase matching condition of a leakage mode according to the range of gradient refractive indexes at the medium interface of the grating layer, wherein the gradient refractive index has the following calculation formula:
ne＝(fnH 2+(1-f)nL 2)1/2 (1)
Wherein n e is a graded refractive index which varies with the height of the moth eye; n H is the refractive index of the grating layer, n L is the low refractive index of the cover grating layer; f is duty ratio, and the value range is 0-1;
Step 3: changing the shape, height and duty ratio of the moth-eye structure, combining the period of the moth-eye structure, the refractive index of the grating layer and the low refractive index of the covering grating layer, performing multi-parameter combined transmittance analysis by using optical simulation software, analyzing the influence of different parameters on the long-wave broadband wide-angle transmittance, obtaining an optimized moth-eye structure, and obtaining the grating layer meeting the long-wave broadband anti-reflection and leakage mode resonance conditions;
Step 4: and changing the material and thickness of the waveguide layer, optimizing the overall structural parameters of the moth-eye anti-reflection structure by utilizing optical simulation software again, carrying out joint optimization on the parameters of the moth-eye anti-reflection structure and other parameters of the moth-eye anti-reflection structure during optimization, considering both long-wave broadband wide-angle anti-reflection when the short-wave single point is optimized to meet the leakage mode resonance mode, and finally obtaining the optimized moth-eye anti-reflection structure.
The invention has the following beneficial effects:
(1) The moth-eye anti-reflection structure with the leakage mode resonance effect provided by the invention realizes wide-angle anti-reflection in a long spectrum band, and the transmittance exceeds 98%;
(2) According to the moth-eye anti-reflection structure with the leaky mode resonance effect, when a shortwave single point does not meet a sub-wavelength condition, structural parameters are optimized according to the leaky mode resonance effect theory, so that light wave energy at the shortwave single point is redistributed, and zero-order diffraction high-transmittance and high-order diffraction inhibition are realized;
(3) The moth-eye anti-reflection structure with the leaky mode resonance effect can be applied to an optical window, the medium-infrared band moth-eye structure parameters meet the anti-reflection condition, diffraction inhibition is realized at a short-band single point according to the leaky mode principle on the basis of realizing medium-bandwidth wide-angle anti-reflection, zero-order transmittance of the short-wave single point is increased, and anti-reflection performance of two bands is considered;
(4) The moth-eye anti-reflection structure with the leakage mode resonance effect provided by the invention has the advantages of simpler processing, more stable microstructure and wide market potential.
Drawings
FIG. 1 is a schematic diagram of a moth-eye antireflection structure with leaky mode resonance effect according to an embodiment of the invention;
FIG. 2 is a graph showing the transmittance at different angles of incidence in the range of 0 to 40℃in the 3 to 5 μm band;
FIG. 3 is a graph of transmittance contrast for the zero order and other diffraction orders in the 1530nm to 1570nm band.
Detailed Description
The invention provides a moth-eye anti-reflection structure with a leaky mode resonance effect, which can realize diffraction-free high anti-reflection in a single-point spectrum of a short wave band while guaranteeing the anti-reflection in a long-wave spectrum. The principle is summarized in that the upper moth-eye structure is utilized to realize the long-wave-band wide-angle antireflection; meanwhile, according to the leakage mode principle, when the leakage mode in the incident field and the waveguide layer meets the phase matching condition, the resonance effect of the leakage mode is excited, so that the diffraction energy is redistributed, the diffraction energy is concentrated in zero-order diffraction by optimizing structural parameters, and the zero-order transmittance is realized for a short-wave single point. The technical scheme of the invention will be described in detail below with reference to the accompanying drawings and preferred embodiments.
As shown in fig. 1, the moth-eye antireflection structure with leaky mode resonance effect provided in this embodiment includes a substrate layer 1, a waveguide layer 2, and a grating layer 3 sequentially disposed.
The upper surface of the substrate layer 1 is provided with a waveguide layer 2, and the lower surface of the substrate layer 1 is in direct contact with air, and has the function of transmitting incident light. The specific shape of the substrate layer 1 can be varied according to the optical instrument used, and the most basic shape is mainly round, rectangular or square, and can be designed into other shapes.
The waveguide layer 2 has a fixed thickness, the upper surface is provided with a grating layer 3, and the lower surface is attached to the substrate layer 1. The waveguide layer is used for supporting propagation of a leakage mode, the refractive index of the waveguide layer material is larger than that of the substrate layer material, and meanwhile, the refractive index of the waveguide layer material is also larger than that of the grating layer equivalent refractive index, so that the resonance condition of the leakage mode is met.
The grating layer 3 is a moth-eye periodic array microstructure and consists of a plurality of moth-eye structures which are uniformly distributed in an array and have the same shape and parameters. The grating layer 3 has the effect of providing leaky mode resonance phase matching conditions. The moth-eye structure in this embodiment is in a truncated cone shape, and the parameters of the moth-eye structure mainly include a top diameter D, a bottom diameter D, a height D g, and a period T of the truncated cone.
Alternatively, the material of the substrate layer 1 is quartz glass, and the material of the grating layer 3 and the waveguide layer 2 is sapphire.
And (3) carrying out multi-parameter combination optimization on the parameters of the waveguide layer and the shape and parameters of the moth-eye structure according to the requirements of the long-wave broadband wide-angle anti-reflection and the leakage mode principle, and obtaining the optimized moth-eye anti-reflection structure meeting the long-wave broadband wide-angle anti-reflection and leakage mode resonance conditions. When the external incident field and a leakage mode in the waveguide layer meet the leakage mode resonance phase matching condition, the leakage mode resonance effect is excited, and the optimized moth-eye anti-reflection structure is used for carrying out wide-angle anti-reflection on a long-wavelength broadband and high-transmission and high-order diffraction inhibition on short-wavelength single-point zero-order diffraction.
The process for performing multi-parameter combination optimization on the parameters of the waveguide layer and the shape and parameters of the moth-eye structure specifically comprises the following steps:
Step 1: because the morphology, parameters and materials of the moth-eye structure can influence the anti-reflection performance, the period of the grating layer, the materials of the moth-eye structure and the like are firstly determined during optimization, so that the period and the materials of the moth-eye structure are firstly preset, and meanwhile, the materials and the thickness of the waveguide layer and the materials of the substrate layer are preset.
Step 2: on the basis of the step 1, setting a more reasonable parameter initial value of the moth-eye structure, and then determining parameters meeting the phase matching condition of the leakage mode according to the range of the gradient refractive index.
The gradient refractive index distribution at the moth-eye medium interface continuously changes along with the height, and the refractive indexes of different moth-eye shapes can be calculated in a layered manner at normal incidence, and the calculation formula is as follows:
ne＝(fnH 2+(1-f)nL 2)1/2 (1)
Wherein n e is the equivalent refractive index calculated in layers, namely the graded gradient refractive index which varies with the height of the moth eye; n H is the grating layer refractive index (high refractive index), n L is the low refractive index of the cladding grating layer; f is duty ratio, which is the ratio of the grating layer diameter (the value range is between the bottom end diameter and the top end diameter) to the grating period T, and the value range is 0-1. The refractive index of the grating layer is uniformly changed, the equivalent refractive index of each adjacent layer is infinitely close according to the morphology of the moth-eye structure, and the smaller the interval of the equivalent refractive indexes is, the better the broadband anti-reflection effect of the moth-eye structure is. And setting parameters meeting the phase matching condition of the leakage mode according to the gradient refractive index range of the moth-eye medium interface.
Step 3: in the optimization process, the coupling influence of a certain parameter on different orders of diffraction waves is not independent, so that the parameters such as the shape, the height and the duty ratio of the moth-eye structure are required to be changed, and the period, the material, the refractive index of the grating layer, the low refractive index of the covered grating layer and the like of the moth-eye structure are combined, the optical simulation software (for example Virtuallab Fusion) is utilized to perform multi-parameter combined transmittance analysis, the influence of different parameters on the wide-angle transmittance of the wavelength and broadband is analyzed, the optimized moth-eye structure is obtained, and the grating layer meeting the resonance conditions of the long-wavelength and broadband wide-angle antireflection and leakage mode is further obtained.
Step 4: and when the parameters of the upper moth-eye structure and other parameters of the moth-eye anti-reflection structure are optimized, the parameters of the short-wave single-point position are optimized to meet the requirement of the leakage mode resonance mode, and the long-wave broadband wide-angle anti-reflection is considered, so that the moth-eye anti-reflection structure for high transmission in the long-wave broadband wide-angle and high transmission in short-wave single-point zero diffraction and high-order diffraction inhibition is finally obtained after multi-parameter combination analysis. When the external diffracted optical field and the leaky modes in the waveguide layer are coupled to each other, the leaky mode resonance effect is excited, resulting in redistribution of the energy of the light wave. The leaky mode meets the leaky mode resonance phase matching condition, and the refractive index of the waveguide layer material is required to be larger than the equivalent refractive index of the grating layer material and the refractive index of the substrate layer material respectively, namely n w>ne and n w>ns, and the leaky mode resonance effect is excited according to the leaky mode resonance phase matching condition optimization parameter. In the waveguide grating structure, the guided mode propagation constant β i of the ith order evanescent diffraction wave is formulated as:
βi＝k0(nL sinθ-iλ/T) (2)
Equation (2) expresses the phase matching condition of the i-th order evanescent diffraction wave and the guided mode. Where k 0 =2pi/λ, λ is the wavelength, n L is the refractive index of the cladding layer, θ is the incident angle, i is the diffraction order, and T is the grating period, i.e. the period of the moth-eye structure. Satisfying the effective propagation coefficient may produce a resonance effect. For a uniform waveguide structure, solving the guided mode propagation constant β i can be obtained from the eigen equation of the isotropic planar waveguide, and the characteristic equation of TE polarization is as follows:
wherein, Wherein gamma i、δi、ki represents the propagation wave numbers of the cladding layer, the substrate layer and the waveguide layer, respectively; n L、ns、ne represents the refractive index of the cladding layer, the refractive index of the substrate layer and the equivalent refractive index of the waveguide layer, and d w is the thickness of the waveguide layer. When the leakage mode meets the phase matching condition, the shortwave realizes the redistribution of the light wave energy under the condition that the subwavelength structure is not met, so that the transmissivity is mainly concentrated on zero-order diffraction. It should be noted that, when optimizing design parameters, the upper layer moth-eye parameters and other parameters of the moth-eye anti-reflection structure are not completely and independently optimized, and when the short-wave single point is optimized to meet the leakage mode resonance mode, the long-wave broadband wide-angle anti-reflection is also required to be considered, so that the final purpose of optimizing the parameters is to consider the indexes of the two spectral bands of the long wave and the short wave.
The period of the moth-eye structure after optimization in this embodiment is t=1.3 μm, the shape of each moth-eye structure is a truncated cone, the diameter of the top end of the truncated cone is d= 611.96nm, the diameter of the bottom end of the truncated cone is d=1.289 μm, and the height of the truncated cone is D g = 2.5965 μm. The waveguide layer 2 has a fixed thickness of 91.922nm. The thickness of the substrate layer 1 is 500 nm-5 mm, and can be selected according to the applied instrument and practical situation.
The moth-eye anti-reflection structure provided by the embodiment combines the leakage mode principle with the moth-eye structure, optimizes parameters by utilizing the leakage mode resonance principle on the basis of guaranteeing wide-angle anti-reflection of a long-wave wide-spectrum band, causes diffraction energy of other diffraction orders to be redistributed, realizes high-order diffraction inhibition of single point of a short-wave band under a non-sub-wavelength condition, and realizes high transmittance in a zero-order diffraction mode. The moth-eye anti-reflection structure with the leaky mode resonance effect can realize wide-angle anti-reflection of a long wave spectrum band according to the moth-eye microstructure, simultaneously, the leaky mode principle is utilized to meet the single-point diffraction inhibition of a short wave band under the non-sub-wavelength condition, zero-order high transmittance is realized, and meanwhile, the anti-reflection performance of the long wave band and the short wave band is considered.
Taking the case that the mid-infrared band meets wide-angle anti-reflection as an example, according to the specific parameters of the optimized moth-eye structure given in the embodiment, simulation is carried out in Virtuallab Fusion software to obtain a transmissivity result which is shown in figure 2, and according to figure 2, the transmissivity exceeds 98% when the light enters at different angles within the range of 0-40 ℃ in the 3-5 mu m band, so that the wide-angle anti-reflection of the long-wave broadband is realized; fig. 3 shows the transmission of the same antireflective structure at zero and other diffraction orders (±1) at normal incidence at wavelengths of 1530nm to 1570 nm. The moth-eye anti-reflection structure realizes diffraction inhibition by light wave energy redistribution at a short wave 1550nm, and as can be seen from the figure 3, the diffraction efficiency of the + -1 level is lower than 0.9%, and the zero-level transmittance reaches 96.288%. The moth-eye anti-reflection structure meets the leakage mode principle on the basis of medium-wave broadband wide-angle anti-reflection, realizes high-order diffraction suppression of short-wave single points, and realizes diffraction concentration in 1550nm laser spectrum.
The moth-eye anti-reflection structure with the leakage mode resonance effect has the advantages that:
(1) The moth-eye anti-reflection structure with the leakage mode resonance effect provided by the invention realizes wide-angle anti-reflection in a long spectrum band, and the transmittance exceeds 98%;
(2) According to the moth-eye anti-reflection structure with the leaky-mode resonance effect, when a shortwave single point does not meet a sub-wavelength condition, the optical wave energy at the shortwave single point is redistributed according to the leaky-mode resonance effect theoretical optimization parameter, so that zero-order diffraction high-transmittance and high-order diffraction inhibition are realized;
(3) The moth-eye anti-reflection structure with the leaky mode resonance effect can be applied to an optical window, the medium-infrared band moth-eye structure parameters meet the anti-reflection condition, diffraction inhibition is realized at a short-band single point according to the leaky mode principle on the basis of realizing medium-bandwidth wide-angle anti-reflection, zero-order transmittance of the short-wave single point is increased, and anti-reflection performance of two bands is considered;
(4) The moth-eye anti-reflection structure with the leakage mode resonance effect provided by the invention has the advantages of simpler processing, more stable microstructure and wide market potential.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (6)
1. The moth-eye anti-reflection structure with the leakage mode resonance effect is characterized by comprising a substrate layer, a waveguide layer and a grating layer which are sequentially arranged, wherein the waveguide layer is used for supporting the propagation of a leakage mode, and the refractive index of a waveguide layer material is respectively larger than the equivalent refractive index of the grating layer and the refractive index of the substrate layer material, so that the leakage mode resonance condition is met;
The grating layer has the function of providing a leakage mode resonance phase matching condition, the grating layer is a moth-eye period array microstructure, wherein the shape and parameters of each moth-eye structure are the same, the parameters of the waveguide layer and the shape and parameters of the moth-eye structure are subjected to multi-parameter combination optimization according to the requirement of long-wave broadband wide-angle anti-reflection and a leakage mode principle, so that an optimized moth-eye anti-reflection structure is obtained, when an external incident field and a leakage mode in the waveguide layer meet the leakage mode resonance phase matching condition, the leakage mode resonance effect is excited, and at the moment, the optimized moth-eye anti-reflection structure is used for carrying out wide-angle anti-reflection on a long-wave broadband and single-point zero-order diffraction in a short wave band and inhibiting high-order diffraction;
Wherein, the process of performing multi-parameter combination optimization on the parameters of the waveguide layer and the shape and parameters of the moth-eye structure comprises the following steps:
step 1: presetting the period and the material of a moth-eye structure, presetting the material and the thickness of a waveguide layer and presetting the material of a basal layer;
Step 2: setting a parameter initial value of a moth eye structure, determining parameters meeting the phase matching condition of a leakage mode according to the range of gradient refractive indexes at the medium interface of the grating layer, wherein the gradient refractive index has the following calculation formula:
ne＝(fnH 2+(1-f)nL 2)1/2 (1)
Wherein n e is a graded refractive index which varies with the height of the moth eye; n H is the refractive index of the grating layer, n L is the low refractive index of the cover grating layer; f is duty ratio, and the value range is 0-1;
Step 3: changing the shape, height and duty ratio of the moth-eye structure, combining the period, material and grating layer refractive index of the moth-eye structure and the low refractive index of the covered grating layer, performing multi-parameter combined transmittance analysis by using optical simulation software, analyzing the influence of different parameters on the long-wave broadband wide-angle transmittance, obtaining an optimized moth-eye structure, and obtaining a grating layer meeting the long-wave broadband wide-angle anti-reflection and leakage mode resonance conditions;
Step 4: and changing the material and thickness of the waveguide layer, optimizing the overall structural parameters of the moth-eye anti-reflection structure by utilizing optical simulation software again, carrying out joint optimization on the parameters of the moth-eye structure and other parameters of the moth-eye anti-reflection structure when optimizing, and considering long-wave broadband wide-angle anti-reflection when the short-wave single point is optimized to meet the leakage mode resonance mode, so as to finally obtain the optimized moth-eye anti-reflection structure.
2. The moth-eye antireflection structure with leakage mode resonance effect according to claim 1, wherein the period of the moth-eye structure after optimization is 1.3 μm, each moth-eye structure is in the shape of a truncated cone, the diameter of the top end of the truncated cone is 611.96nm, the diameter of the bottom end is 1.289 μm, and the height is 2.5965 μm.
3. A moth-eye antireflection structure having a leaky mode resonance effect as claimed in claim 2, wherein said waveguide layer has a thickness of 91.922nm.
4. A moth-eye antireflection structure having a leaky mode resonance effect as claimed in claim 1 or 2, wherein said base layer is circular, rectangular or square in shape.
5. A moth-eye antireflection structure having a leaky mode resonance effect as claimed in claim 1 or 2, wherein the thickness of said base layer is 500nm to 5mm.
6. A moth-eye antireflection structure having a leaky mode resonance effect as claimed in claim 1 or 2, wherein the material of said base layer is quartz glass, and the material of said waveguide layer and said grating layer is sapphire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311498893.2A CN117348125B (en) | 2023-11-13 | 2023-11-13 | Moth-eye anti-reflection structure with leakage mode resonance effect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311498893.2A CN117348125B (en) | 2023-11-13 | 2023-11-13 | Moth-eye anti-reflection structure with leakage mode resonance effect |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117348125A CN117348125A (en) | 2024-01-05 |
| CN117348125B true CN117348125B (en) | 2024-05-24 |
Family
ID=89371083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311498893.2A Active CN117348125B (en) | 2023-11-13 | 2023-11-13 | Moth-eye anti-reflection structure with leakage mode resonance effect |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117348125B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003302532A (en) * | 2002-04-12 | 2003-10-24 | Mitsubishi Chemicals Corp | Polarizing plate and method for manufacturing the same |
| CN101315440A (en) * | 2008-07-14 | 2008-12-03 | 苏州大学 | Zero level restraint phase mask in 248 nanometer wave range |
| CN105866868A (en) * | 2016-04-09 | 2016-08-17 | 南昌航空大学 | Broadband micro nano two-dimensional multitooth grating trap filter |
| CN106772741A (en) * | 2016-12-05 | 2017-05-31 | 江南大学 | A kind of method that guide mode resonance filtering is realized using single graded material grating |
| CN113740940A (en) * | 2021-09-06 | 2021-12-03 | 长春理工大学 | Wide-bandwidth angle anti-reflection composite micro-nano structure surface and preparation method thereof |
-
2023
- 2023-11-13 CN CN202311498893.2A patent/CN117348125B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003302532A (en) * | 2002-04-12 | 2003-10-24 | Mitsubishi Chemicals Corp | Polarizing plate and method for manufacturing the same |
| CN101315440A (en) * | 2008-07-14 | 2008-12-03 | 苏州大学 | Zero level restraint phase mask in 248 nanometer wave range |
| CN105866868A (en) * | 2016-04-09 | 2016-08-17 | 南昌航空大学 | Broadband micro nano two-dimensional multitooth grating trap filter |
| CN106772741A (en) * | 2016-12-05 | 2017-05-31 | 江南大学 | A kind of method that guide mode resonance filtering is realized using single graded material grating |
| CN113740940A (en) * | 2021-09-06 | 2021-12-03 | 长春理工大学 | Wide-bandwidth angle anti-reflection composite micro-nano structure surface and preparation method thereof |
Non-Patent Citations (2)
| Title |
|---|
| 基于"蛾眼"灵感的抗反射微纳结构表面技术;付跃刚 等;《非控与探测》;20180930;第第1卷卷(第第2期期);第1-8页 * |
| 宽光谱广角蛾眼抗反射超表面结构设计分析;林鹤 等;《中国激光》;20190131;第第46卷卷(第第1期期);第0113002-1至0113002-6页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117348125A (en) | 2024-01-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111158070B (en) | Double-layer achromatic lens based on all-dielectric super-surface | |
| CN112946796B (en) | Broadband high-reflection high-threshold low-dispersion mirror and design method thereof | |
| WO2007121082A2 (en) | Solar cell efficiencies through periodicity | |
| US20110085232A1 (en) | Multi-spectral filters, mirrors and anti-reflective coatings with subwavelength periodic features for optical devices | |
| CN105891925B (en) | 1064 nanometers of polarization independent wideband high-diffraction efficiency bilayer reflection-type all dielectric gratings | |
| CN111610649B (en) | Narrow-band super-surface device | |
| CN103076647B (en) | Surface plasmon polariton type flat channel filter based on metal-insulator-metal structure | |
| CN109442772B (en) | Method for improving absorption and utilization efficiency of solar energy | |
| CN117348125B (en) | Moth-eye anti-reflection structure with leakage mode resonance effect | |
| US20220268995A1 (en) | Thin film optical waveguide and preparation method therefor | |
| Fang et al. | Design and analysis of Salisbury screens and Jaumann absorbers for solar radiation absorption | |
| Cho et al. | Analysis on design and fabrication of high-diffraction-efficiency multilayer dielectric gratings | |
| CN113711110A (en) | Diffractive optical element, method for designing an efficient achromatic diffractive structure, and method for manufacturing an efficient achromatic diffractive element | |
| Liu et al. | Narrowband filter in a heterostructured multilayer containing ultrathin metallic films | |
| CN113031121B (en) | Anti-reflection lens for infrared ray | |
| Mouldi et al. | Broad multilayer antireflection coating by apodized and chirped photonic crystal | |
| Zhang et al. | Single mode-fiber scale based square solid immersion metalens for single quantum emitters | |
| Barrow et al. | Influence of subwavelength grating asymmetry on long-wavelength infrared transmittance filters | |
| CN111323874B (en) | Composite structure photonic crystal wavelength division multiplexing device and use method thereof | |
| Owens et al. | Optical properties of one-dimensional metal–dielectric photonic band-gap structures with low index dielectrics | |
| Liu et al. | Influence of parametric uncertainties on narrow width bandpass optical filter of prism pair coupled planar optical waveguide | |
| CN110261947A (en) | A kind of infrared low reflection sub-wavelength structure based on dielectric grating | |
| Rafi et al. | Wideband Linear Wire-grid Plasmonic Polarizer for Visible and Near-Infrared Applications | |
| Duan et al. | Band-stop filter based on a metal/insulator-disk array/metal structure | |
| Rafi et al. | Dual-band nanostructured polarizer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |