CN117346889A - Super-surface spectrum sensing system, determination method and spectrometer - Google Patents
Super-surface spectrum sensing system, determination method and spectrometer Download PDFInfo
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- CN117346889A CN117346889A CN202311408505.7A CN202311408505A CN117346889A CN 117346889 A CN117346889 A CN 117346889A CN 202311408505 A CN202311408505 A CN 202311408505A CN 117346889 A CN117346889 A CN 117346889A
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D30/00—Reducing energy consumption in communication networks
- Y02D30/70—Reducing energy consumption in communication networks in wireless communication networks
Abstract
The invention relates to a hypersurface spectrum sensing system, a determination method and a spectrometer. The hypersurface spectrum sensing system comprises: the surface array detector and the super-surface light-splitting system comprise a plurality of super-surface units; the plurality of super-surface units are arranged on the upper surface of the area array detector; each of the super surface units comprises a plurality of identical super atoms; the super-surface unit is used for aiming at the fact that the set resonance wavelength value transmittance is different from the non-set resonance wavelength value transmittance, and plays a role in light splitting; one of the subsurface units corresponds to one set resonance wavelength value; the area array detector is used for detecting the light transmitted by the super-surface unit. According to the invention, the integrated super-surface light-splitting system is arranged on the upper surface of the area array detector, so that the volume of the spectrum sensing system is reduced, the volume of the spectrometer is further reduced, and the miniaturization of the spectrometer is realized.
Description
The application is a divisional application of patent application named as a hypersurface spectrum sensing system and spectrometer, and the application date of the original application is 2020, 03 and 26, and the application number is 202010221962.5.
Technical Field
The invention relates to the field of spectrum measurement, in particular to a hypersurface spectrum sensing system, a determination method and a spectrometer.
Background
The traditional spectrometer mainly comprises a light source illumination system, a light splitting system, a detection receiving system, a storage transmission system and a display system. The most critical components are a light splitting system, and can be divided into a grating spectrometer, a prism spectrometer and an interference spectrometer according to the difference of light splitting principles.
The light-splitting system in the traditional spectrometer is generally made of a grating, a prism or an interference light path, and the miniaturization of the dispersive elements such as the grating, the prism and the like is difficult, so that the traditional spectrometer has larger volume and is not suitable for use.
Disclosure of Invention
The invention aims to provide a hypersurface spectrum sensing system, a determination method and a spectrometer, so as to reduce the volume of the spectrum sensing system, further reduce the volume of the spectrometer and realize miniaturization of the spectrometer.
In order to achieve the above object, the present invention provides the following solutions:
a hypersurface spectrum sensing system comprising: an area array detector and a super-surface light splitting system; the super-surface light splitting system comprises a plurality of super-surface units; the plurality of super-surface units are arranged on the upper surface of the area array detector; each of the super surface units comprises a plurality of identical super atoms; the super-surface unit is used for enabling the light transmittance of the set resonance wavelength value to be different from the light transmittance of the non-set resonance wavelength value so as to achieve the effect of light splitting; one of the subsurface units corresponds to one set resonance wavelength value; the area array detector is used for detecting the light transmitted by the super-surface unit.
Optionally, the super surface spectroscopic system further comprises: the upper surface of the substrate is provided with the super-surface unit, and the lower surface of the substrate is provided with the area array detector.
Optionally, a plurality of the super atoms in each super surface unit are uniformly arranged in an array manner; the boundary distance between two adjacent super atoms in each super surface unit is smaller than the corresponding set resonance wavelength value.
Optionally, the size of each of the super surface units is larger than a first set value; the size of the super-surface unit is the area of an area surrounded by edge super-atoms in each super-surface unit; the first set value is 10 times of the largest set resonance wavelength value in the set resonance wavelength values corresponding to all the super atoms.
Optionally, the boundary distance between the super surface units is greater than a first set value; the first set value is 10 times of the largest set resonance wavelength value in the set resonance wavelength values corresponding to all the super atoms.
Optionally, the hypersurface spectrum sensing system further comprises: a connection part; the connecting part is an optical medium; the connecting part is used for fixing the area array detector on the lower surface of the substrate.
Optionally, the area array detector is a charge coupled device image sensor or a complementary metal oxide semiconductor sensor.
A method for determining a hypersurface spectrum sensing system is applied to the hypersurface spectrum sensing system; the determining method comprises the following steps:
acquiring a plurality of different super surface units; the set resonance wavelength values corresponding to different super-surface units are different; included within the super surface unit are: a plurality of superatoms arranged in an array; the boundary distance between two adjacent super atoms in each super surface unit is smaller than a corresponding set resonance wavelength value;
determining a first set value according to 10 times of the largest set resonance wavelength value in the set resonance wavelength values corresponding to all the super atoms; determining the size of each super-surface unit and the boundary distance between two adjacent super-surface units according to a first set value;
disposing a supersurface element of a determined size and boundary distance on an upper surface of a substrate;
the area array detector is arranged on the lower surface of the substrate.
A spectrometer, comprising: the system comprises a light beam collimation system, a data storage processing system, a display system and a hypersurface spectrum sensing system; the upper surface of a super-surface unit in the super-surface spectrum sensing system is provided with the light beam collimation system; the area array detector in the hypersurface spectrum sensing system is connected with the data storage processing system; the data storage processing system is connected with the display system.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects: the invention provides a hypersurface spectrum sensing system, a determination method and a spectrometer, wherein the hypersurface spectrum sensing system comprises: an area array detector and a plurality of super surface units; the plurality of super-surface units are arranged on the upper surface of the area array detector; each of the super-surface units includes a plurality of identical super-atoms; the super-surface unit is used for transmitting light with a set resonance wavelength value. By arranging the super atoms on the upper surface of the area array detector, the volume of the spectrum sensing system is reduced, the volume of the spectrometer is further reduced, and the miniaturization of the spectrometer is realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a super-atomic cylindrical structure in a super-surface spectrum sensing system according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a super-atomic square structure in a super-surface spectrum sensing system according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a super-atom of a square column shape in a super-surface spectrum sensing system according to an embodiment of the invention;
FIG. 4 is a schematic view of a super-atom of an elliptical cylindrical shape in a super-surface spectroscopic sensor system according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a triangular prism shape of a super-surface spectrum sensing system according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a super-atom of a trapezoidal prism shape in a super-surface spectrum sensing system according to an embodiment of the present invention;
FIG. 7 is a schematic view of a recess in a hypersurface spectrum sensing system according to an embodiment of the invention;
fig. 8 is a schematic structural diagram of a spectrometer according to an embodiment of the present invention.
Symbol description: 111-subsurface units, 112-substrates, 110-superatoms, 130-area array detectors, 120-connections, boundary distances between D2-subsurface units, distances between adjacent superatoms within the same subsurface unit, D1.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention aims to provide a miniaturized spectrum sensing system, which is miniaturized by arranging super atoms on the upper surface of an area array detector.
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
Example 1
As shown in fig. 1, a hypersurface spectrum sensing system comprising: an area array detector 130 and a super-surface spectroscopic system comprising a plurality of super-surface units 111; a plurality of the super surface units 111 are disposed on the upper surface of the area array detector 130; each of the super surface units 111 includes a plurality of identical super atoms 110; the nanostructure on the surface of optical material is generally lower than one wavelength in structure thickness, and has regulation function on light field, and the individual nanostructure is called super atom. The subsurface unit 111 is configured to make the light transmittance of the set resonance wavelength value different from the light transmittance of the non-set resonance wavelength value, so as to achieve the effect of light splitting. Meaning that: the light of the set resonance wavelength may be transmitted, the light of the non-set resonance wavelength may not be transmitted, or the light of the set resonance wavelength may not be transmitted, and the light of the non-set resonance wavelength may be transmitted. One of the subsurface units 111 corresponds to one set resonance wavelength value; in this embodiment, four subsurface units 111 are shown in fig. 1, the set resonant wavelength values are λ1, λ2, λ3 and λ4, respectively, the transmittance, reflectance, phase and polarization of light of different subsurface units are regulated and controlled, and the area array detector 130 is used for detecting the light transmitted by the subsurface units 111.
The shape of the super-atom is not limited, and as shown in fig. 3 to 7, super-atoms of several shapes are exemplified, but not limited thereto. In this embodiment, the shape of the super atom is a cylinder as shown in fig. 1, and the shape of the super atom may be a square as shown in fig. 2. When the super atom is cylindrical, the diameter of the upper surface of the cylinder is smaller than a set resonance wavelength value, and when the super atom is cubic, the length of the length or width of the cube is smaller than the set resonance wavelength value. The super-atomic material is a dielectric, which is a class of materials that corresponds to metals. When light irradiates a super-atom, an electric dipole and a magnetic dipole are generated in the super-atom structure. When the electric dipole and the magnetic dipole are in phase resonance, the resonance wavelength can be transmitted with high efficiency, but the non-resonance wavelength cannot be transmitted, when the resonance phase of the electric dipole and the magnetic dipole is different by odd times pi, the resonance wavelength cannot be transmitted, but the non-resonance wavelength is transmitted with high efficiency, so that the light splitting effect is generated.
As an alternative embodiment, as shown in fig. 2, the super surface spectroscopic system further includes: a substrate 112, wherein the super surface unit 111 is arranged on the upper surface of the substrate 112, and the area array detector 130 is arranged on the lower surface of the substrate 112; the material of the substrate 112 is an all-dielectric material, and may include, but is not limited to, one of titanium dioxide, silicon, vanadium dioxide, tungsten oxide, hafnium oxide, silicon dioxide, PMMA, titanium nitride, and the like.
As an alternative embodiment, as shown in fig. 2, the hypersurface spectrum sensing system further includes: a connection portion 120; the connection portion 120 is an optical medium transparent to light of a resonance wavelength of a corresponding test range, for example: if the wavelength range of the super-surface spectrum sensing system is 400nm-800nm, bonding the super-surface unit and the area array detector by adopting an adhesive material with good transmittance in the range of 400nm-800nm, wherein the adhesive layer is the connecting component; the connection portion 120 is used to fix the area array detector 130 on the lower surface of the substrate 112.
As an alternative embodiment, a plurality of the super atoms 110 in each of the super surface units 111 are arranged in an array; the boundary distance D1 between two adjacent super atoms 110 in each super surface unit 111 is smaller than the corresponding set resonance wavelength value, which is favorable for the common resonance of a plurality of super atoms and affects each other, so that the peak half-width of the transmittance is smaller, the spectroscopic performance is better, for example, the resonance wavelength value corresponding to the super atom in a certain super surface unit is 500nm, and then the boundary distance between the adjacent super atoms in the super surface unit is smaller than 500nm.
As an alternative embodiment, the super-atoms 110 in different super-surface units 111 may correspond to different set resonance wavelength values, and the more the number of super-surface units is designed, the higher the resolution, so the spectral resolution may be improved by designing enough super-surface units; for example, if the range of the super surface spectrum sensing system is 400nm-800nm, 10 super surface units are designed to have resonance wavelengths equally divided to 400nm-800nm, then his resolution is only 40nm, and if 100 super surface units are designed to have resonance wavelengths equally divided to 400nm-800nm, then the resolution can be 4nm.
As an alternative embodiment, the size of each of the super surface units 111 is greater than the first set value, which has the advantage of making the light splitting effect of the super surface unit stronger; the size of the super-surface units 111 is the area of the region surrounded by the edge super-atoms in each super-surface unit 111; the first set value is 10 times of the largest set resonance wavelength value in the set resonance wavelength values corresponding to all the super atoms. The subsurface units 111 are arranged periodically, meaning that the subsurface units are ordered on the substrate, or non-periodically, meaning that the subsurface units are randomly arranged on the substrate.
As an alternative embodiment, the boundary distance D2 between the two adjacent super-surface units 111 is greater than the first set value, which has the beneficial effect of avoiding crosstalk of optical signals between the super-surface units, and avoiding that diffraction phenomenon occurs when the distance between the two adjacent super-surface units is too close to affect optical information collection; the first set value is 10 times of the largest set resonance wavelength value among all the set resonance wavelength values corresponding to the meta-atoms 110. If the subsurface spectrum sensing system is for a range of resonant wavelength frequencies from 400nm to 800nm, the boundary distance between subsurface units is greater than 8 microns.
As an alternative embodiment, the area array detector 130 is a charge coupled device image sensor or a complementary metal oxide semiconductor sensor.
The super-surface nano structure is of a sub-wavelength size, so that the spectrum sensing system can be very small and is compatible with a semiconductor process, the cost is greatly reduced, the design requirement on a middle detection part of the sensing system is reduced, and the spectrum sensing system can be integrated with a common charge-coupled device image sensor or a complementary metal oxide semiconductor sensor. The present embodiment is not limited by the material, and the material is not required to have conductive properties. Meanwhile, the adopted super-surface unit in the embodiment enables wavelengths of different lights to resonate, enables resonant wavelengths to efficiently transmit a transmission mode, is not a near-field detection mode based on surface plasmons, and improves miniaturization and easy integration of a spectrum sensing system by arranging super atoms on an area array detector.
Example 2
As shown in fig. 8, a spectrometer includes: a beam collimation system, a data storage processing system, a display system, and the hypersurface spectrum sensing system of example 1; the upper surface of a super-surface unit in the super-surface spectrum sensing system is provided with the light beam collimation system; the area array detector in the hypersurface spectrum sensing system is connected with the data storage processing system; the data storage processing system is connected with the display system. Wherein the beam collimation system is typically an aperture or slit, a conventional optical component. The display system mainly adopts the prior art, such as a mobile phone, a computer and the like.
The spectrometer principle in this embodiment is mainly:
in order to realize a spectrometer which has high integration and high reliability and can be compatible with a semiconductor process, the embodiment adopts two technical ideas based on the fact that the super surface has different resonance characteristics for light with different resonance wavelengths, and the first one is that: light of the resonant wavelength is transmitted with high efficiency, and non-resonant light is scattered and reflected. Another is: the light of resonance wavelength has high reflection efficiency, and the light of non-resonance wavelength is transmitted. The back of the super-surface light-splitting device receives and acquires the optical signal through the area array detector, then the corresponding spectrum information is finally obtained through the spectrum analysis, the data processing and the storage display component, and the miniaturization of the spectrum sensing system is improved through setting super atoms on the area array detector.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other.
The principles and embodiments of the present invention have been described herein with reference to specific examples, the description of which is intended only to assist in understanding the methods of the present invention and the core ideas thereof; also, it is within the scope of the present invention to be modified by those of ordinary skill in the art in light of the present teachings. In view of the foregoing, this description should not be construed as limiting the invention.
Claims (9)
1. A hypersurface spectrum sensing system comprising: an area array detector and a super-surface light splitting system; the super-surface light splitting system comprises a plurality of super-surface units; the plurality of super-surface units are arranged on the upper surface of the area array detector; each of the super surface units comprises a plurality of identical super atoms; the super-surface unit is used for enabling the light transmittance of the set resonance wavelength value to be different from the light transmittance of the non-set resonance wavelength value so as to achieve the effect of light splitting; one of the subsurface units corresponds to one set resonance wavelength value; the area array detector is used for detecting the light transmitted by the super-surface unit.
2. The hypersurface spectrum sensing system of claim 1 wherein the hypersurface spectrum system further comprises: the upper surface of the substrate is provided with the super-surface unit, and the lower surface of the substrate is provided with the area array detector.
3. A hypersurface spectrum sensing system as claimed in claim 1 wherein a plurality of the hypersurface elements are arranged in an array; the boundary distance between two adjacent super atoms in each super surface unit is smaller than the corresponding set resonance wavelength value.
4. A hypersurface spectrum sensing system as claimed in claim 1 wherein the size of each hypersurface element is greater than a first set point; the size of the super-surface unit is the area of an area surrounded by edge super-atoms in each super-surface unit; the first set value is 10 times of the largest set resonance wavelength value in the set resonance wavelength values corresponding to all the super atoms.
5. The hypersurface spectrum sensing system as claimed in claim 1 wherein the boundary distance between the hypersurface elements is greater than a first set point; the first set value is 10 times of the largest set resonance wavelength value in the set resonance wavelength values corresponding to all the super atoms.
6. The hypersurface spectrum sensing system as claimed in claim 2 further comprising: a connection part; the connecting part is an optical medium; the connecting part is used for fixing the area array detector on the lower surface of the substrate.
7. The hypersurface spectrum sensing system of claim 1 wherein the area array detector is a charge coupled device image sensor or a complementary metal oxide semiconductor sensor.
8. A method of determining a hypersurface spectrum sensing system as claimed in any one of claims 1 to 7; the method is characterized by comprising the following steps:
acquiring a plurality of different super surface units; the set resonance wavelength values corresponding to different super-surface units are different; included within the super surface unit are: a plurality of superatoms arranged in an array; the boundary distance between two adjacent super atoms in each super surface unit is smaller than a corresponding set resonance wavelength value;
determining a first set value according to 10 times of the largest set resonance wavelength value in the set resonance wavelength values corresponding to all the super atoms; determining the size of each super-surface unit and the boundary distance between two adjacent super-surface units according to a first set value;
disposing a supersurface element of a determined size and boundary distance on an upper surface of a substrate;
the area array detector is arranged on the lower surface of the substrate.
9. A spectrometer, comprising: a beam collimation system, a data storage processing system, a display system and the hypersurface spectrum sensing system as claimed in any one of claims 1 to 7; the upper surface of a super-surface unit in the super-surface spectrum sensing system is provided with the light beam collimation system; the area array detector in the hypersurface spectrum sensing system is connected with the data storage processing system; the data storage processing system is connected with the display system.
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| CN202311408505.7A CN117346889A (en) | 2020-03-26 | 2020-03-26 | Super-surface spectrum sensing system, determination method and spectrometer |
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| CN202311408505.7A CN117346889A (en) | 2020-03-26 | 2020-03-26 | Super-surface spectrum sensing system, determination method and spectrometer |
| CN202010221962.5A CN113447121A (en) | 2020-03-26 | 2020-03-26 | Super surface spectrum sensing system and spectrum appearance |
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| CN114152339B (en) * | 2021-11-23 | 2023-06-16 | 中国工程物理研究院激光聚变研究中心 | Spectrum sensor based on geometric phase super-surface structure and spectrum reconstruction method |
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| WO2006130164A2 (en) * | 2004-08-19 | 2006-12-07 | University Of Pittsburgh | Chip-scale optical spectrum analyzers with enhanced resolution |
| CN102564586B (en) * | 2012-01-09 | 2013-08-07 | 南京邮电大学 | Miniature spectrograph with diffraction hole array structure and high resolution spectrum reconstruction method thereof |
| CN105628199B (en) * | 2014-10-26 | 2018-06-05 | 中国科学院重庆绿色智能技术研究院 | Chip-shaped spectrometer with second wavelength metallic structure |
| US10770505B2 (en) * | 2017-04-05 | 2020-09-08 | Intel Corporation | Per-pixel performance improvement for combined visible and ultraviolet image sensor arrays |
| US10490585B1 (en) * | 2018-05-14 | 2019-11-26 | Semiconductor Components Industries, Llc | Imaging pixels with plasmonic color filter elements |
| CN113497065B (en) * | 2020-03-18 | 2024-03-26 | 吉林求是光谱数据科技有限公司 | Imaging spectrum chip with spectrum and imaging functions and preparation method thereof |
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