CN117346825A - High-precision incremental photoelectric encoder for multi-head analog quantity addition - Google Patents
High-precision incremental photoelectric encoder for multi-head analog quantity addition Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
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- G—PHYSICS
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/3473—Circular or rotary encoders
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Abstract
A high-precision incremental photoelectric encoder with multi-head analog quantity addition belongs to the technical field of photoelectric encoders, and aims to solve the problem that the output of incremental ABZ orthogonal square wave signals required by most users of incremental encoders according to industrial technical standards is difficult to ensure real-time requirements; according to the invention, through eliminating angle measurement errors caused by eccentricity of a grating disk and shafting shake, the harsh requirement of each reading head on phase alignment of output in-phase signals is greatly relaxed, so that error codes are avoided and ABZ orthogonal square wave signals conforming to industrial standards are output under a use environment; the invention eliminates the influence of the eccentricity of the grating disk and shafting shake on the angle measurement precision, and enlarges the tolerance of alignment to the in-phase signals by one order of magnitude when the multiple heads are added by adopting a coarse grating system.
Description
Technical Field
The invention relates to the technical field of photoelectric encoders, in particular to a high-precision incremental photoelectric encoder for adding multiple heads of analog quantities.
Background
The photoelectric encoder is a photoelectric sensor for measuring angular displacement, and is divided into an incremental type and an absolute type according to different forming modes of angle codes. The output industry standard for incremental signals is a TTL (or HTL) square wave signal. Generally A, B, Z, A, B represents the incremental displacement signal of the angular displacement, the mutual difference T/4, called the quadrature signal (T is the grating pitch of the grating disk); z is zero reference signal, and the grating disk rotates one circle to generate a square wave. If the inversion signal is needed, the 'A', the 'B' and the 'Z' should be increased, and the three-phase signal is changed into a six-phase signal to be output. The incremental encoder obtains the position value by counting (accumulating) the number of incremental square wave signals from the reference point. When the angle measurement precision requirement is higher, two (or more) reading heads are required to be installed, and each reading head outputs four paths of sine signals with 90-degree phase difference. When two reading heads are adopted, the two heads are arranged opposite to the grating disk, and the influence of the eccentricity of the grating disk and shafting shake on the angle measurement precision is eliminated through the addition processing of the output signals of the two reading heads. The addition processing is divided into two types of analog quantity addition and digital quantity addition. In a high-precision and high-resolution encoder for analog addition, in order to obtain a high-quality photoelectric signal (good in sine property), a fine grating (such as 50 lines/mm) is usually engraved on a grating disk, so that an approximately triangular wave of the photoelectric signal obtained by the coarse grating is avoided, the waveform contains more higher harmonic components, and high interpolation coefficient subdivision cannot be realized. Analog quantity addition requires that the phase difference of the in-phase signals of the two reading heads is smaller than the period of T/4 grating, otherwise, the encoder cannot work normally due to error codes, and the fine grating system is installed severely.
As known from publication number CN1641316a, an incremental photoelectric axial angle encoder full digital quantity adding processing circuit is disclosed, which is the closest prior art of the present invention, and the patent proposes a full digital quantity adding method, which relaxes the limitation of the installation alignment of two reading heads, ensures the accuracy and reliability of the encoder, and is also convenient for debugging. However, the two reading heads are used for sampling four paths of orthogonal analog signals respectively, A/D conversion and addition processing are carried out in a code form of digital quantity, the final angle value is output in a code form, and the output of the increment ABZ orthogonal square wave signal required by most users of the increment encoder according to industrial technical standards cannot be met.
Aiming at the problems, the prior device is improved, and a high-precision incremental photoelectric encoder for adding multiple heads of analog quantities is provided.
Disclosure of Invention
The invention aims to provide a high-precision incremental photoelectric encoder with multi-head analog quantity addition, which solves the problems that in the background technology, most users of the incremental encoder cannot output an incremental ABZ orthogonal square wave signal according to the industrial technical standard, and the real-time requirement is difficult to ensure.
In order to achieve the above purpose, the present invention provides the following technical solutions: the high-precision incremental photoelectric encoder for adding the multi-head analog quantity comprises a main shaft, a bearing arranged on the periphery of the main shaft, an analog quantity adding circuit used for circuit adding operation and a subdivision processing module used for processing circuit signals, wherein a main body is arranged on the outer side of the bearing, two reading heads are arranged at the upper end of the main body, the two reading heads are consistent in structure and opposite in position, each reading head comprises a head pad block arranged at the upper end of the main body and a head indication grating arranged at the upper end of a head cushion block, one side of each head indication grating is provided with a head photosensitive element array PDA, each head indication grating and each head photosensitive element array PDA are combined in one component, the other reading head comprises a head pad block arranged at the upper end of the main body and a head indication grating arranged at the upper end of the head cushion block, one side of each head indication grating is provided with a head photosensitive element array PDA, the periphery of the main shaft is provided with a grating disc, the upper end of each grating disc is provided with a head 1LED and a head 2LED, the positions of each head 1LED and each head 2LED are opposite to each other, and the high-precision waveform can be realized by adopting the space filtering and the corresponding to the two photosensitive element arrays.
Further, the grating disk is rotationally connected with the main shaft through the colloid.
Further, the head 1LED emits parallel light through the built-in collimating mirror to vertically irradiate the grating disk and the head 1LED, the formed moire fringe optical signals finally enter the head 1 photosensitive element array PDA, four paths of photoelectric signals are output through conversion, and the four paths of photoelectric signals are sin theta 1 (S1), sin theta 1 (-S1), cos theta 1 (C1) and cos theta 1 (-C1) respectively.
Further, the head 2 photosensor array PDA outputs four signals of sin θ2 (S2), -sin θ2 (-S2), cos θ2 (C2), and cos θ2 (-C2).
Further, the four paths of signals output by the head 1 photosensor array PDA and the head 2 photosensor array PDA respectively enter an analog quantity adding circuit to be added, and the four paths of sine signals output after the addition are sin θ (S), -sin θ (-S), cos θ (C) and cos θ (-C) respectively and are sent to the subdivision processing module 14.
Further, the subdivision processing module comprises a conditioning element for conditioning waveforms, a subdivision element for subdividing signals, E for storing parameters 2 PROM element and driving element for driving circuit output.
Further, conditioning elements normalize the four-phase signals, asin, -Asin, acos, and-Acos.
Further, four sinusoidal signals sin θ (S), sin θ (-S), cos θ (C) and cos θ (-C) pass through the conditioning element, the subdivision element and the driving element, and output four orthogonal square wave increment signals A, -A, B and-B.
Further, the zero reference signals Z2 (square wave) and-Z2 (square wave) output by the head 2 indication grating and the head 2 photosensitive element array PDA are directly added to the subdivision processing module beyond the analog quantity adding circuit, and new zero reference signals Z and-Z are formed by the subdivision processing module.
Further, the subdivision parameters of the subdivision processing module are up to 16 bits (2 16 ) Is a subdivision of (a).
Compared with the prior art, the invention has the beneficial effects that:
1. the high-precision incremental photoelectric encoder for adding the multi-head analog quantity provided by the invention eliminates angle measurement errors caused by the eccentricity of a grating disk and shafting shake; meanwhile, the harsh requirements of the reading heads on the phase alignment of the output in-phase signals are greatly relaxed, the error-free code and the output of the ABZ orthogonal square wave signals (three or six) meeting the industrial standard under the use environment are ensured, the requirements of most users are met, and meanwhile, the angle measurement precision, the working reliability and the instantaneity are greatly improved.
2. The high-precision incremental photoelectric encoder for adding the multi-head analog quantity eliminates the influence of the eccentricity of the grating disk and shafting shake on the angle measurement precision; because a coarse grating system is adopted, the tolerance of alignment of in-phase signals in multi-head addition is expanded by one order of magnitude, and the grating is changed from 50 alignment/mm and T/4=0.005 mm to 5 alignment/mm and T/4=0.05 mm, so that the work is completely within a safe range and cannot exceed the coarse grating + -T/4; through spatial filtering and waveform conditioning, coarse gratings can be adopted to realize high-precision and high-multiplying power subdivision; the aim of outputting the increment ABZ orthogonal square wave signal meeting the industrial standard in real time is fulfilled, and the encoder has high precision, high stability, high reliability and easiness in adjustment and is verified in products.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic diagram of a structural module of the present invention;
FIG. 3 is a schematic diagram of an analog add circuit of the present invention;
fig. 4 is a schematic diagram of waveform generation according to the present invention.
In the figure: 1. a main shaft; 2. a bearing; 3. a main body; 4. a head 1 cushion block; 5. the head 1 indicates a grating; 6. a head 1 photosensor array PDA; 7. a grating disk; 8. a head 1LED; 9. a head 2 cushion block; 10. the head 2 indicates a grating; 11. a head 2 photosensor array PDA; 12. a head 2LED; 13. an analog quantity adding circuit; 14. a subdivision processing module; 141. a conditioning element; 142. a subdivision element; 143. an E2PROM element; 144. a driving element.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-4, in order to solve the technical problem that most users of the incremental encoder cannot meet the output of the incremental ABZ orthogonal square wave signal required by the industrial technical standard, and the real-time requirement is difficult to be ensured, the following preferred technical scheme is provided:
the high-precision incremental photoelectric encoder for adding multi-head analog quantity comprises a main shaft 1, a bearing 2 arranged at the periphery of the main shaft 1, an analog quantity adding circuit 13 for circuit adding operation and a subdivision processing module 14 for processing circuit signals, wherein a main body 3 is arranged at the outer side of the bearing 2, two reading heads are arranged at the upper end of the main body 3, the structures of the two reading heads are consistent, the positions of the two reading heads are opposite, a digital head comprises a head 1 cushion block 4 arranged at the upper end of the main body 3 and a head 1 indication grating 5 arranged at the upper end of the head 1 cushion block 4, one side of the head 1 indication grating 5 is provided with a head 1 photosensitive element array PDA6, the head 1 indication grating 5 and the head 1 photosensitive element array PDA6 are combined in one component, the other reading head comprises a head 2 cushion block 9 arranged at the upper end of the main body 3 and a head 2 indication grating 10 arranged at the upper end of the head 2 cushion block 9, one side of the head 2 indication grating 10 is provided with a head 2 photosensitive element array PDA11, the head 2 indication grating 10 and the head 2 photosensitive element array PDA11 are combined in one component, the periphery of the main shaft 1 is provided with a head 1 photosensitive element array PDA 7, the head 1 is arranged at the upper end of the main body 7 and the LED disc 7 is connected with an LED disc 8 in a high-precision mode, and the LED disc is connected with the LED disc 8 in a high-precision mode through the optical disc 12, and the LED disc is connected with the head 1 has a high precision disc 8.
The head 1LED8 emits parallel light through the built-in collimating mirror to vertically irradiate the grating disk 7 and the head 1LED8, the formed moire fringe optical signals finally enter the head 1 photosensitive element array PDA6, four paths of photoelectric signals are respectively sin theta 1 (S1), sin theta 1 (-S1), cos theta 1 (C1) and cos theta 1 (-C1) through conversion, and the head 2 photosensitive element array PDA11 outputs four paths of signals of sin theta 2 (S2), sin theta 2 (-S2), cos theta 2 (C2) and cos theta 2 (-C2).
Four paths of signals output by the head 1 photosensor array PDA6 and the head 2 photosensor array PDA11 respectively enter an analog quantity adding circuit 13 for addition operation, and four paths of sine signals output after addition are sin theta (S), sin theta (-S), cos theta (C) and cos theta (-C) respectively and are sent to a subdivision processing module 14, so that angle measurement errors caused by grating disc eccentricity and shafting shake are eliminated; meanwhile, the harsh requirements of the reading heads on the phase alignment of the output in-phase signals are greatly relaxed, the error-free code and the output of the ABZ orthogonal square wave signals (three or six) meeting the industrial standard under the use environment are ensured, the requirements of most users are met, and meanwhile, the angle measurement precision, the working reliability and the instantaneity are greatly improved.
In this embodiment, the grating disk 7 is fixed with the spindle 1 by glue and rotates with the spindle, and two reading heads of the opposite-diameter mounted head 1 and the opposite-diameter mounted head 2 are identical, taking one reading head as an example:
specifically, the head 1LED8 emits parallel light through the built-in collimator lens to vertically irradiate the grating disk 7 and the indication grating 5, the formed moire fringe optical signal finally enters the head 1 photosensor array PDA6, and four paths of photoelectric signals sin θ1 (S1), sin θ1 (-S1), cos θ1 (C1) and cos θ1 (-C1) are output through conversion.
Similarly, the photosensor array of the head 2 synchronously outputs four paths of signals sin theta 2 (S2), -sin theta 2 (-S2), cos theta 2 (C2) and cos theta 2 (-C2), and the four paths of signals output by the head 1 and the head 2 respectively enter an analog quantity adding circuit 13 to perform addition operation, so that the influence of the eccentricity of a grating disk and shafting shake on precision is eliminated, and the adding circuit is shown in fig. 3.
The subdivision processing module 14 includes a conditioning element 141 for conditioning waveforms, a subdivision element 142 for subdividing signals, E for storing parameters 2 The PROM element 143 and the driving element 144 for driving circuit output, the conditioning element 141 normalizes four-phase signals Asin, -Asin, acos and-Acos, conditioning waveforms (software and hardware) before subdivision, that is, eliminating dc offset, amplitude inequality and orthogonality errors, normalizing four-phase signals Asin, -Asin, acos and-Acos, making them in ideal state, and then performing high-precision and high-magnification subdivision. The compensation parameters in the conditioning process are stored in the E2PROM and read therefrom for compensation operations during the correction. Drive circuit pair increaseThe magnitude signal A, B, Z (' A, ' B, ' Z) is amplified in power and outputted.
Four-way sine signals sin theta (S), -sin theta (-S), cos theta (C) and cos theta (-C) pass through the conditioning element 141, the subdivision element 142 and the driving element 144, and output four-way orthogonal square wave increment signals A, -A, B and-B.
The zero reference signals Z2 (square wave) and-Z2 (square wave) output by the head 2 indicating grating 10 and the head 2 photosensor array PDA11 are directly applied to the subdivision processing module 14 beyond the analog adding circuit 13, new zero reference signals Z and-Z are formed by the subdivision processing module 14, and the subdivision parameters of the subdivision processing module 14 are up to 16 bits (2 16 ) The influence of the eccentricity of the grating disk and shafting shake on the angle measurement precision is eliminated; because a coarse grating system is adopted, the tolerance of alignment of in-phase signals in multi-head addition is expanded by one order of magnitude, and the grating is changed from 50 alignment/mm and T/4=0.005 mm to 5 alignment/mm and T/4=0.05 mm, so that the work is completely within a safe range and cannot exceed the coarse grating + -T/4; through spatial filtering and waveform conditioning, coarse gratings can be adopted to realize high-precision and high-multiplying power subdivision; the aim of outputting the increment ABZ orthogonal square wave signal meeting the industrial standard in real time is fulfilled, and the encoder has high precision, high stability, high reliability and easiness in adjustment and is verified in products.
Specifically, in the invention, a coarse grating system (5 pairs of lines/mm) is adopted by the grating disk 7 and the head 1 indication grating 5 and the head 2 indication grating 10, in order to overcome the defect that the photoelectric signals of the coarse grating system are non-sinusoidal (approximate triangular wave), the head 1 indication grating 5 and the head 2 indication grating 10 are designed according to a space filtering pattern, the optical signals output in the gratings are tuned on a specific space frequency, the higher harmonic component in the photoelectric displacement signals is eliminated, the pureness of sine waves is increased, in the high-power electronic subdivision, the subdivision precision is influenced, besides the sine of the waveforms, the direct current offset, the amplitude inequality, the orthogonality error and the like are also included, in the invention, after the in-phase analog quantity signals are added, the waveforms are sent to the subdivision processing module 14, the waveforms are conditioned before subdivision, namely the direct current offset, the amplitude inequality and the orthogonality error are eliminated, the four-phase signals Asin, -Asin, acos and Acos are normalized to be in an ideal state, and then subdivided with high precision and high multiplying power.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should be covered by the protection scope of the present invention by making equivalents and modifications to the technical solution and the inventive concept thereof.
Claims (10)
1. The utility model provides a high accuracy increment formula photoelectric encoder that bull analog quantity added, includes main shaft (1) and installs at main shaft (1) peripheral bearing (2), its characterized in that: the device also comprises an analog quantity adding circuit (13) for circuit addition operation and a subdivision processing module (14) for processing circuit signals, wherein the outer side of the bearing (2) is provided with a main body (3), the upper end of the main body (3) is provided with two reading heads, the structures of the two reading heads are consistent and opposite, one reading head comprises a head 1 cushion block (4) arranged at the upper end of the main body (3) and a head 1 indicating grating (5) arranged at the upper end of the head 1 cushion block (4), one side of the head 1 indicating grating (5) is provided with a head 1 photosensitive element array PDA (6), the head 1 indicating grating (5) and the head 1 photosensitive element array PDA (6) are combined in one component, the other reading head comprises a head 2 indicating grating (10) arranged at the upper end of the main body (3) and a head 2 indicating grating (9), one side of the head 2 indicating grating (10) is provided with a head 2 element array (11), one side of the head 2 indicating grating (10) and the head 2 photosensitive element array (11) are combined in one component, the head 1 indicating grating (5) and the head 2 photosensitive element array PDA (7) are arranged at the opposite positions of the head 2 cushion block (9) and the LED disk (8) are arranged at the periphery of the head 2, the head 2 is opposite to the LED disk (8) and the LED disk (7) is provided with a waveform conditioning device (12), the coarse grating can be adopted to realize high-precision and high-multiplying power subdivision.
2. The multi-headed analog-to-digital added high precision incremental photoelectric encoder of claim 1, wherein: the grating disk (7) is rotationally connected with the main shaft (1) through colloid.
3. The multi-headed analog-to-digital added high precision incremental photoelectric encoder of claim 1, wherein: the head 1LED (8) emits parallel light through the built-in collimating mirror to vertically irradiate the grating disk (7) and the head 1LED (8), the formed moire fringe optical signals finally enter the head 1 photosensitive element array PDA (6), four paths of photoelectric signals are respectively sin theta 1 (S1), sin theta 1 (-S1), cos theta 1 (C1) and cos theta 1 (-C1) through conversion and output.
4. The multi-headed analog-to-digital added high precision incremental photoelectric encoder of claim 1, wherein: the head 2 photosensor array PDA (11) outputs four signals of sin theta 2 (S2), sin theta 2 (-S2), cos theta 2 (C2) and cos theta 2 (-C2).
5. The multi-headed analog-to-digital added high precision incremental photoelectric encoder of claim 1, wherein: four paths of signals output by the head 1 photosensor array PDA (6) and the head 2 photosensor array PDA (11) respectively enter an analog quantity adding circuit (13) for adding operation, and four paths of sine signals output after adding are sin theta (S), sin theta (-S), cos theta (C) and cos theta (-C) respectively and are sent to a subdivision processing module (14).
6. The multi-headed analog-to-digital added high precision incremental photoelectric encoder of claim 1, wherein: the subdivision processing module (14) comprises a conditioning element (141) for conditioning the waveform, a subdivision element (142) for subdividing the signal, E for storing parameters 2 A PROM element (143) and a drive element (144) for driving the circuit output.
7. The multi-headed analog-to-digital added high precision incremental photoelectric encoder of claim 6, wherein: the conditioning element (141) normalizes the four-phase signals Asin, -Asin, acos and-Acos.
8. The multi-headed analog-to-digital added high precision incremental photoelectric encoder of claim 7, wherein: four-way sine signals sin theta (S), -sin theta (-S), cos theta (C) and cos theta (-C) pass through a conditioning element (141), a subdivision element (142) and a driving element (144) to output four-way orthogonal square wave increment signals A, -A, B and-B.
9. The multi-headed analog-to-digital added high precision incremental photoelectric encoder of claim 1, wherein: the zero reference signals Z2 (square wave) and-Z2 (square wave) output by the indicating grating (10) and the head 2 photosensitive element array PDA (11) are directly applied to the subdivision processing module (14) beyond the analog quantity adding circuit (13), and new zero reference signals Z and-Z are formed by the subdivision processing module (14).
10. The multi-headed analog-to-digital added high precision incremental photoelectric encoder of claim 9, wherein: the subdivision parameters of the subdivision processing module (14) are up to 16 bits (2 16 ) Is a subdivision of (a).
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