CN117334617A - Substrate turnover device - Google Patents
Substrate turnover device Download PDFInfo
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- CN117334617A CN117334617A CN202311423664.4A CN202311423664A CN117334617A CN 117334617 A CN117334617 A CN 117334617A CN 202311423664 A CN202311423664 A CN 202311423664A CN 117334617 A CN117334617 A CN 117334617A
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- 239000000758 substrate Substances 0.000 title claims abstract description 71
- 230000007306 turnover Effects 0.000 title abstract description 14
- 230000007246 mechanism Effects 0.000 claims abstract description 86
- 239000003638 chemical reducing agent Substances 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 7
- 230000003139 buffering effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000005267 amalgamation Methods 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Attitude Control For Articles On Conveyors (AREA)
Abstract
The invention discloses a substrate turnover device, comprising: a bearing module; the clamping module is rotatably arranged on the bearing module and used for clamping and fixing the substrate to be overturned; the driving module is arranged on the bearing module and connected with the clamping module, and the driving module drives the clamping module to horizontally rotate for half a circle around the connection part of the clamping module and the driving module. The substrate turnover device has the following advantages: the precision and torque requirements on the motor are not high, the stability, reliability and precision of the structure are ensured through the assistance of the side face and the tail end, and the working time and the load rate of the motor are greatly reduced; the speed is high, the clamping mechanism compresses the substrate, the warping stress of the substrate is transmitted to the clamping plate, and the overturning speed is allowed to be higher structurally; the rigidity of the turnover product is not required; the occupied space is small, and the miniaturization of the mechanism is facilitated.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a substrate turnover device.
Background
The large substrate has large length and width, thin thickness and lower strength, and is easy to tilt and concentrate stress in the moving and overturning process, so that the internal circuit is broken, and therefore, in the substrate overturning process, a large-area contact support product is needed to avoid the deformation of the substrate. In the prior art, the turnover of base plate adopts the mechanism of turning over books, is equipped with two motors and installs respectively at the both ends of mechanism axle, puts the base plate on the left side board, and the rotatory product that presss from both sides tight together with left side board laminating of right side board, and left side board and right side board rotate together right in step and accomplish the upset of product, and the left side board is rotatory left, then is the product after the upset on the right side board. The following defects exist in the page turning mechanism: firstly, the occupied space is large, and for equipment for conveying large-size products through a page turning mechanism, the page turning occupies approximately 2 times of the product area, and the page turning height is 1 time of the product width, so that the arrangement of a mechanism for carrying the products above is not facilitated; secondly, the speed is low, firstly the right side plate is turned 180 degrees to be tightly attached to the left side plate, then the left side plate and the right side plate are turned 180 degrees together, and finally the left side plate is turned 180 degrees, so that the turning of the product can be completed, the steps are more, and the speed is low.
Disclosure of Invention
According to an embodiment of the present invention, there is provided a substrate flipping apparatus including:
a bearing module;
the clamping module is rotatably arranged on the bearing module and used for clamping and fixing the substrate to be overturned;
the driving module is arranged on the bearing module and connected with the clamping module, and the driving module drives the clamping module to horizontally rotate for half a circle around the connection part of the clamping module and the driving module.
Further, the clamping module comprises:
the rotating shaft is arranged on the bearing module and is connected with the driving module;
the rotating plate is arranged on the rotating shaft at the center;
the driving module drives the rotating shaft to rotate, so that the rotating plate is driven to rotate;
the clamping mechanisms are arranged on the rotating plate in a central symmetry manner, can vertically rotate around the rotating plate, and clamp and fix the substrate in a butt-clamping manner;
the pair of fixing mechanisms are respectively fixed at two ends of the rotating plate, are respectively positioned at two sides of the clamping mechanism, and clamp and fix the pair of clamping mechanisms.
Further, the clamping mechanism comprises:
the two ends of the rotating shaft are rotatably arranged on the rotating plate;
the clamping plate is fixed on the rotating shaft, a plurality of limiting blocks are distributed on the side face of the clamping plate, and the limiting blocks limit the substrate;
the clamping driving assembly is fixed on the rotating plate and connected with the rotating shaft, and the clamping driving assembly drives the rotating shaft to rotate.
Further, the clamping drive assembly comprises:
the mounting seat is fixed on the rotating plate;
the first gear is fixed on the rotating shaft;
the second gear is meshed with the first gear and is arranged in the mounting seat;
the driving piece is arranged in the mounting seat and connected with the second gear, and the driving piece drives the second gear to rotate so as to drive the first gear and the rotating shaft to rotate.
Further, the fixing mechanism includes:
the side plate is fixed at one end of the rotating plate;
the pair of rotary clamping cylinders are vertically symmetrically arranged on the side plates, the rotary clamping cylinders compress the clamping mechanism, and the positions of the clamping mechanism corresponding to the rotary clamping cylinders are provided with wear-resisting blocks;
the sensor is arranged on the side plate, the clamping mechanism is provided with a detection sheet, the sensor and the detection sheet are mutually matched, and the clamping state of the clamping mechanism is detected.
Further, the fixing mechanism further includes: the buffer piece is arranged at the top of the side plate and used for buffering the clamping mechanism.
Further, the support module comprises:
the rack supports and fixes the clamping module and the driving module;
the plurality of ground feet are arranged at the bottom of the frame;
and the tail end supporting mechanism is rotatably arranged on the rack and supports the tail end of the clamping module.
Further, the tip supporting mechanism includes:
the mounting plate is fixed on the frame;
the supporting plate is rotatably arranged on the inner side of the mounting plate;
the rotating assembly is arranged at the bottom of the mounting plate and is connected with the supporting plate, and the rotating assembly drives the supporting plate to rotate to support the tail end of the clamping module.
Further, the rotating assembly includes:
the air cylinder is fixed at the bottom of the mounting plate;
the support block is rotatably arranged at the bottom of the mounting plate, and slide holes are formed in the support block;
the push rod penetrates through the sliding hole, and one end of the push rod is connected with the output end of the air cylinder;
the sliding rail is fixed at the bottom of the mounting plate, a sliding block is arranged on the sliding rail in a sliding manner, the sliding block is connected with the other end of the push rod, and the length direction of the sliding rail is the same as the expansion direction of the air cylinder;
the cylinder drives the push rod to move, and drives the supporting block to rotate to support the supporting plate.
Further, the driving module includes:
the motor is arranged on the bearing module;
the input end of the speed reducer is connected with the output end of the motor, and the output end of the speed reducer is connected with the clamping module to drive the clamping module to rotate.
The substrate turnover device provided by the embodiment of the invention has the following advantages: the precision and torque requirements on the motor are not high, the stability, reliability and precision of the structure are ensured through the assistance of the side face and the tail end, and the working time and the load rate of the motor are greatly reduced; the speed is high, the clamping mechanism compresses the substrate, the warping stress of the substrate is transmitted to the clamping plate, and the overturning speed is allowed to be higher structurally; the rigidity of the turnover product is not required; the occupied space is small, and the miniaturization of the mechanism is facilitated.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and are intended to provide further explanation of the technology claimed.
Drawings
Fig. 1 is an overall construction diagram of a substrate turnover device according to an embodiment of the present invention;
fig. 2 is a block diagram of a clamping module of a substrate flipping apparatus according to an embodiment of the present invention;
fig. 3 is a block diagram of a clamping module of a substrate flipping apparatus according to an embodiment of the present invention;
FIG. 4 is a block diagram of a clamping drive assembly of a substrate flipping apparatus according to an embodiment of the invention;
FIG. 5 is an exploded view of a clamping drive assembly of a substrate flipping apparatus according to an embodiment of the present invention;
fig. 6 is a schematic view illustrating an opened state of a clamping module of a substrate turnover device according to an embodiment of the present invention;
FIG. 7 is an enlarged view of FIG. 6 at B;
FIG. 8 is a block diagram of a support module of a substrate flipping apparatus according to an embodiment of the invention;
fig. 9 is a structural view of an end supporting mechanism of a substrate turning device according to an embodiment of the present invention;
fig. 10 is a structural view of a rotating assembly of a substrate flipping apparatus according to an embodiment of the present invention;
fig. 11 is a block diagram of a driving module of a substrate flipping apparatus according to an embodiment of the present invention.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the attached drawings, which further illustrate the present invention.
First, a substrate turning device according to an embodiment of the present invention will be described with reference to fig. 1 to 11, and the substrate turning device is used for turning a substrate, and has a wide application scenario.
As shown in fig. 1 to 11, a substrate turnover device according to an embodiment of the present invention includes: a bearing module 1; a clamping module 2 and a drive module 3.
Specifically, as shown in fig. 1 to 11, the clamping module 2 is rotatably disposed on the supporting module 1, and the clamping module 2 clamps and fixes the substrate to be turned over; the driving module 3 is arranged on the bearing module 1 and is connected with the clamping module 2, the driving module 3 drives the clamping module 2 to horizontally rotate around the connecting part of the clamping module 2 and the driving module 3 for half a circle, in the embodiment, under the driving of the driving module 3, the substrate rotates around the center, the stable overturning of the substrate is realized, the occupied space is small, and the installation of an external transplanting mechanism is not influenced.
Specifically, as shown in fig. 2 to 7, in the present embodiment, the clamping module 2 includes: a rotating shaft 21, wherein the rotating shaft 21 is arranged on the bearing module 1 and is connected with the driving module 3; a rotating plate 22, the center of the rotating plate 22 being disposed on the rotating shaft 21; the driving module 3 drives the rotating shaft 21 to rotate, so that the rotating plate 22 is driven to rotate; the pair of clamping mechanisms 23, the pair of clamping mechanisms 23 are arranged on the rotating plate 22 in a central symmetry mode, the clamping mechanisms 23 can vertically rotate around the rotating plate 22, the pair of clamping mechanisms 23 clamp and fix the substrate, the substrate is placed between the pair of clamping mechanisms 23, the upper side clamping mechanisms 23 have the functions of opening and combining, and the lower side clamping mechanisms 23 always keep a horizontal state so as to meet the carrying requirements of external mechanisms. A pair of clamping mechanisms 23 are put into the substrate when being opened, clamp the substrate when being closed, and then drive the substrate to turn over by the driving module 3; the pair of fixing mechanisms 24 are respectively fixed at two ends of the rotating plate 22, the pair of fixing mechanisms 24 are respectively positioned at two sides of the clamping mechanism 23, the pair of clamping mechanisms 23 are clamped and fixed by the fixing mechanisms 24, the fixing mechanisms 24 ensure high rigidity of the clamping module 2 in the overturning process, and the load rate is reduced and the reliability is improved.
Further, as shown in fig. 3, in the present embodiment, the holding mechanism 23 includes: a rotation shaft 231, both ends of the rotation shaft 231 being rotatably provided on the rotation plate 22; the clamping plate 232, the clamping plate 232 is fixed on the rotating shaft 231, a plurality of limiting blocks 233 are distributed on the side face of the clamping plate 232, the limiting blocks 233 limit the substrate, the substrate is stabilized, and falling-off in the overturning process is prevented; the clamping driving assembly 234, the clamping driving assembly 234 is fixed on the rotating plate 22 and is connected with the rotating shaft 231, and the clamping driving assembly 234 drives the rotating shaft 231 to rotate so as to drive the clamping plate 232 to approach or separate from the substrate; in this embodiment, the clamping surface of the clamping plate 232 in contact with the substrate is made of antistatic polyurethane material, which is used for static electricity guiding out and avoiding the substrate from being scratched by local pressure, and the clamping plate 232 can be made of carbon fiber rods, so that the weight of the structure is reduced, and the load factor of the motor is reduced.
Further, as shown in fig. 3 to 5, the clamping driving assembly 234 includes: a mount 2341, the mount 2341 being fixed to the rotating plate 22; a first gear 2342, the first gear 2342 being fixed to the rotation shaft 231; a second gear 2343, the second gear 2343 being meshed with the first gear 2342, the second gear 2343 being disposed within the mount 2341; the driving piece 2344, driving piece 2344 can adopt hollow cup brushless motor, driving piece 2344 sets up in mount pad 2341, and link to each other with second gear 2343, driving piece 2344 drives second gear 2343 and rotates, thereby drive first gear 2342 and pivot 231 and rotate, realize opening and the amalgamation of splint 232, can set up detection sensor on mount pad 2341, detect the opening and the amalgamation state of splint 232, in this embodiment, realize the rotation of splint 232 through driving piece 2344, first gear 2342 and second gear 2343, driving piece 2344 is only used for 90 of drive base plate to open, other times are in empty load state, long service life, almost need not maintain, overall structure is simple exquisite, convenient operation.
Further, as shown in fig. 6 to 7, in the present embodiment, the fixing mechanism 24 includes: the side plate 241, the side plate 241 is fixed at one end of the rotating plate 22, and the side plate 241 can protect the side surface of the substrate and prevent the substrate from falling off when the substrate is overturned; the pair of rotary clamping cylinders 242 are vertically symmetrically arranged on the side plates 241, the rotary clamping cylinders 242 press the clamping mechanism 23, the abrasion-resistant blocks 243 are arranged on the clamping mechanism 23 corresponding to the positions of the rotary clamping cylinders 242, the rotary clamping cylinders 242 on the lower side are always kept in a clamping state, the rotary clamping cylinders 242 on the upper side realize the functions of clamping and loosening the clamping mechanism 23, the rotary clamping cylinders 242 ensure the high rigidity of the whole mechanism when the clamping plate 232 is in the clamping state, and the clamping mechanism cannot interfere in the opening state; the sensor 244, the sensor 244 adopts the cell type photoelectric sensor 244, and the sensor 244 sets up on curb plate 241, is equipped with detection piece 245 on the fixture 23, and sensor 244 and detection piece 245 cooperate each other, detect the clamp condition of fixture 23, i.e. detect the merge and the open state of fixture 23.
Further, as shown in fig. 7, in the present embodiment, the fixing mechanism 24 further includes: the buffer member 246 is disposed on top of the side plate 241, and is used for buffering the clamping mechanism 23, that is, the buffer member 246 can adjust the gap between the substrates to avoid over-pressing the substrates, and provides a buffering effect for the clamping plate 232 when the clamping plate 232 rotates downwards to clamp the substrates.
Specifically, as shown in fig. 8, in the present embodiment, the holding module 1 includes: the rack 11 supports and fixes the clamping module 2 and the driving module 3; the plurality of ground feet 12, the plurality of ground feet 12 are arranged at the bottom of the frame 11; the tail end supporting mechanism 13, the tail end supporting mechanism 13 rotatably sets up on frame 11, and tail end supporting mechanism 13 supports the end of centre gripping module 2, because the end of fixture 23 has deformation and displacement, has certain influence to the accurate base plate of getting put, increases tail end supporting mechanism 13 and can optimize the mechanism stress situation, ensures that the horizontal state of fixture 23 reaches the operation requirement when the external transplanting mechanism gets the blowing, and the rotation setting of tail end supporting mechanism 13 guarantees that fixture 23 can not influence each other when overturning.
Further, as shown in fig. 8 to 10, in the present embodiment, the end supporting mechanism 13 includes: a mounting plate 131, the mounting plate 131 being fixed to the frame 11; a support plate 132 rotatably provided inside the mounting plate 131; the rotating assembly 133 is arranged at the bottom of the mounting plate 131 and is connected with the supporting plate 132, the rotating assembly 133 drives the supporting plate 132 to rotate to support the tail end of the clamping module 2, the supporting plate 132 naturally sags under the action of gravity in a normal state, and when the clamping module 2 needs to be supported, the rotating assembly 133 drives the supporting plate 132 to rotate to a horizontal state to support the clamping module 2.
Further, as shown in fig. 9 and 10, in the present embodiment, the rotating assembly 133 includes: a cylinder 1331, the cylinder 1331 being fixed to the bottom of the mounting plate 131; the supporting block 1332 is rotatably arranged at the bottom of the mounting plate 131, and sliding holes 1333 are formed in the supporting block 1332; a push rod 1334, wherein the push rod 1334 penetrates through the sliding hole 1333, and one end of the push rod 1334 is connected with the output end of the air cylinder 1331; the sliding rail 1335, the sliding rail 1335 is fixed at the bottom of the mounting plate 131, a sliding block 1336 is arranged on the sliding rail 1335 in a sliding mode, the sliding block 1336 is connected with the other end of the push rod 1334, and the length direction of the sliding rail 1335 is the same as the telescopic direction of the air cylinder 1331; the cylinder 1331 drives the push rod 1334 to move, drives the supporting block 1332 to rotate so as to support the supporting plate 132, when the supporting is needed, the cylinder 1331 stretches out, the push rod 1334 is driven to move, and the push rod 1334 penetrates through the sliding hole 1333, so that the push rod 1334 moves so as to drive the supporting block 1332 to rotate to abut against the supporting plate 132, and the supporting plate 132 is driven to rotate to be in a horizontal state, so that the tail end of the clamping mechanism 23 is supported.
Specifically, as shown in fig. 1 and 11, in the present embodiment, the driving module 3 includes: the motor 31, the motor 31 can be a servo motor 31, and the motor 31 is arranged on the bearing module 1; the speed reducer 32, speed reducer 32 can be cavity speed reducer 32, and the input of speed reducer 32 links to each other with the output of motor 31, and the output of speed reducer 32 links to each other with centre gripping module 2, drives centre gripping module 2 and selects rotatory 180, realizes the upset of base plate.
The working process comprises the following steps: the driving piece 2344 of the upper clamping mechanism 23 drives the upper clamping plate 232 to vertically rotate upwards to 90 degrees; the transplanting mechanism places the substrate on the clamping plate 232 of the lower clamping mechanism 23; the driving piece 2344 of the upper clamping mechanism 23 drives the upper clamping plate 232 to vertically rotate downwards to 0 DEG, and at the moment, the upper clamping plate 232 and the lower clamping plate 232 are folded to clamp the substrate; a pair of rotary clamping cylinders 242 on the side plates 241 clamp and respectively press the upper and lower clamping plates 232, the cylinders 1331 of the end support mechanism 13 retract, and the support plates 132 naturally droop; the servo motor 31 drives the rotating shaft 231 to rotate 180 degrees, and at the moment, the upper and lower positions of the driving piece 2344 of the clamping mechanism 23 are interchanged, so that the substrate is turned over; the cylinder 1331 of the end support mechanism 13 extends out, and the drive support plate 132 supports the end of the clamping mechanism 23; the driving member 2344 of the upper clamping mechanism 23 drives the upper clamping plate 232 to vertically rotate upwards to 90 degrees, and the transplanting mechanism picks up the substrate to move out of the station.
The substrate turning device according to the embodiment of the invention described above with reference to fig. 1 to 11 has the following advantages: the precision and torque requirements on the motor are not high, the stability, reliability and precision of the structure are ensured through the assistance of the side face and the tail end, and the working time and the load rate of the motor are greatly reduced; the speed is high, the clamping mechanism compresses the substrate, the warping stress of the substrate is transmitted to the clamping plate, and the overturning speed is allowed to be higher structurally; the rigidity of the turnover product is not required; the occupied space is small, and the miniaturization of the mechanism is facilitated.
It should be noted that in this specification the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of additional identical elements in a process, method, article, or apparatus that comprises an element.
While the present invention has been described in detail through the foregoing description of the preferred embodiment, it should be understood that the foregoing description is not to be considered as limiting the invention. Many modifications and substitutions of the present invention will become apparent to those of ordinary skill in the art upon reading the foregoing. Accordingly, the scope of the invention should be limited only by the attached claims.
Claims (10)
1. A substrate flipping apparatus, comprising:
a bearing module;
the clamping module is rotatably arranged on the bearing module and used for clamping and fixing the substrate to be overturned;
the driving module is arranged on the bearing module and connected with the clamping module, and the driving module drives the clamping module to horizontally rotate for half a circle around the joint of the clamping module and the driving module.
2. The substrate flipping apparatus of claim 1, wherein the clamping module comprises:
the rotating shaft is arranged on the bearing module and is connected with the driving module;
the center of the rotating plate is arranged on the rotating shaft;
the driving module drives the rotating shaft to rotate, so that the rotating plate is driven to rotate;
the clamping mechanisms are arranged on the rotating plate in a central symmetry manner, can vertically rotate around the rotating plate, and clamp and fix the substrate in a butt clamp manner;
the pair of fixing mechanisms are respectively fixed at two ends of the rotating plate, the pair of fixing mechanisms are respectively positioned at two sides of the clamping mechanism, and the pair of clamping mechanisms are clamped and fixed by the fixing mechanisms.
3. The substrate flipping apparatus of claim 2, wherein the clamping mechanism comprises:
the two ends of the rotating shaft are rotatably arranged on the rotating plate;
the clamping plate is fixed on the rotating shaft, a plurality of limiting blocks are distributed on the side face of the clamping plate, and the limiting blocks limit the substrate;
the clamping driving assembly is fixed on the rotating plate and connected with the rotating shaft, and the clamping driving assembly drives the rotating shaft to rotate.
4. The substrate flipping apparatus of claim 3, wherein the clamping drive assembly comprises:
the mounting seat is fixed on the rotating plate;
the first gear is fixed on the rotating shaft;
the second gear is meshed with the first gear and is arranged in the mounting seat;
the driving piece is arranged in the mounting seat and connected with the second gear, and the driving piece drives the second gear to rotate so as to drive the first gear and the rotating shaft to rotate.
5. The substrate flipping apparatus of claim 2, wherein the securing mechanism comprises:
the side plate is fixed at one end of the rotating plate;
the pair of rotary clamping cylinders are vertically symmetrically arranged on the side plates, the rotary clamping cylinders compress the clamping mechanism, and the positions, corresponding to the rotary clamping cylinders, on the clamping mechanism are provided with wear-resisting blocks;
the sensor is arranged on the side plate, a detection sheet is arranged on the clamping mechanism, and the sensor and the detection sheet are matched with each other to detect the clamping state of the clamping mechanism.
6. The substrate flipping apparatus of claim 5, wherein the securing mechanism further comprises: the buffer piece is arranged at the top of the side plate and used for buffering the clamping mechanism.
7. The substrate flipping apparatus of claim 1, wherein the support module comprises:
the rack supports and fixes the clamping module and the driving module;
the plurality of ground feet are arranged at the bottom of the frame;
and the tail end supporting mechanism is rotatably arranged on the rack and supports the tail end of the clamping module.
8. The substrate flipping apparatus of claim 7, wherein the end support mechanism comprises:
the mounting plate is fixed on the frame;
a support plate rotatably provided inside the mounting plate;
the rotating assembly is arranged at the bottom of the mounting plate and connected with the supporting plate, and the rotating assembly drives the supporting plate to rotate so as to support the tail end of the clamping module.
9. The substrate flipping apparatus of claim 8, wherein the rotating assembly comprises:
the air cylinder is fixed at the bottom of the mounting plate;
the support block is rotatably arranged at the bottom of the mounting plate, and slide holes are formed in the support block;
the push rod penetrates through the sliding hole, and one end of the push rod is connected with the output end of the air cylinder;
the sliding rail is fixed at the bottom of the mounting plate, a sliding block is arranged on the sliding rail in a sliding manner, the sliding block is connected with the other end of the push rod, and the length direction of the sliding rail is the same as the expansion direction of the air cylinder;
the cylinder drives the push rod to move and drives the supporting block to rotatably support the supporting plate.
10. The substrate flipping apparatus of claim 1, wherein the driving module comprises:
the motor is arranged on the bearing module;
the input end of the speed reducer is connected with the output end of the motor, and the output end of the speed reducer is connected with the clamping module and drives the clamping module to rotate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311423664.4A CN117334617B (en) | 2023-10-31 | 2023-10-31 | Substrate turnover device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311423664.4A CN117334617B (en) | 2023-10-31 | 2023-10-31 | Substrate turnover device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117334617A true CN117334617A (en) | 2024-01-02 |
| CN117334617B CN117334617B (en) | 2024-03-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311423664.4A Active CN117334617B (en) | 2023-10-31 | 2023-10-31 | Substrate turnover device |
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| US20230103481A1 (en) * | 2021-10-04 | 2023-04-06 | Applied Materials, Inc. | Substrate flipping in vacuum for dual sided pvd sputtering |
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| US20040197184A1 (en) * | 2003-03-19 | 2004-10-07 | Akira Sugiyama | Workpiece transport apparatus |
| WO2013187090A1 (en) * | 2012-06-15 | 2013-12-19 | 大日本スクリーン製造株式会社 | Substrate inverting apparatus and substrate processing apparatus |
| US20140314539A1 (en) * | 2013-04-17 | 2014-10-23 | Samsung Electro-Mechanics Co., Ltd. | Non-contact substrate transfer turner |
| KR20160015544A (en) * | 2014-07-31 | 2016-02-15 | 주식회사 케이씨텍 | Wafer turning apparatus after chemical mechanical polishing process and substrate transferring method using same |
| US20160325942A1 (en) * | 2015-01-16 | 2016-11-10 | Boe Technology Group Co., Ltd. | Overturning and shifting mechanism |
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