CN117329332A

CN117329332A - Dual-protection backflow-preventing control valve

Info

Publication number: CN117329332A
Application number: CN202311144187.8A
Authority: CN
Inventors: 梁仁模; 李玄镇
Original assignee: Wuxi Kaibites Semiconductor Technology Co ltd
Current assignee: Wuxi Kaibites Semiconductor Technology Co ltd
Priority date: 2023-09-06
Filing date: 2023-09-06
Publication date: 2024-01-02

Abstract

The invention discloses a double-protection backflow-preventing control valve, which comprises a mechanical backstop module and a main control valve body; the main control valve body comprises a ventilation channel; one end of the ventilation channel is connected with the pump body, and the other end of the ventilation channel is communicated with the cavity through the mechanical check module; an inserting plate is movably arranged between the ventilation channel and the mechanical check module; a straight-through channel and an annular channel are arranged in the mechanical non-return module, and the straight-through channel and the annular channel are communicated with through holes at two ends; the two ports of the straight-through channel are respectively aligned with the through holes at the two ends, and the annular channel surrounds the outer side of the straight-through channel; the mechanical check module is internally provided with a baffle, and the baffle is opened and closed between the straight-through channel and one end of the through hole in a reciprocating manner, and the end is connected with the cavity. When the dry pump is stopped abnormally, the mechanical part immediately acts to realize the non-return, and then the control part closes the valve after the dry pump is stopped completely to realize the dual anti-backflow protection.

Description

Dual-protection backflow-preventing control valve

Technical Field

The invention relates to the technical field of valves, in particular to a double-protection backflow-preventing control valve.

Background

In a semiconductor factory, dry pumps are used in the production of more departments, a gate valve is arranged between the dry pumps and a cavity, and the opening and closing time of the gate valve is preset according to the expected starting and stopping time of the dry pumps, so that when the dry pumps stop working, the inside of the cavity is blocked from outside air. However, in daily production, the dry pump has abnormal shutdown conditions, and the gate valve cannot be closed in time due to the fact that the expected time is not reached, so that gas recharging is caused, and the cavity is polluted. The problem that defective products occur is solved, and the polluted cavity is cleaned and maintained, so that the production efficiency and quality are seriously affected, and the valve between the dry pump and the cavity is required to be optimized for preventing backflow.

Disclosure of Invention

The invention aims to: in order to overcome the defects in the prior art, the invention provides the dual-protection anti-backflow control valve, which can realize the backflow prevention by immediately acting a mechanical part when the dry pump is stopped abnormally, and then closing the valve by the control part after the dry pump is stopped completely, so as to realize the dual-backflow protection.

The technical scheme is as follows: in order to achieve the purpose, the dual-protection anti-backflow control valve comprises a mechanical check module and a main control valve body; the main control valve body comprises a ventilation channel for communicating the cavity with the pump body; one end of the ventilation channel is connected with the pump body, and the other end of the ventilation channel is communicated with the inside of the cavity through the mechanical check module; an inserting plate is arranged between the ventilation channel and the mechanical non-return module, and is driven by external force to reciprocate to open and close at a port of the ventilation channel; through holes are respectively formed in two ends of the mechanical non-return module, and the two through holes are respectively connected with the port of the ventilation channel and the port of the cavity; a through channel and an annular channel are arranged in the mechanical non-return module, and the through channel and the annular channel are communicated with the two through holes; the two ports of the straight-through channel are respectively aligned with the through holes at the two ends, and the annular channel surrounds the outer side of the straight-through channel; the mechanical check module is internally provided with a baffle, and the baffle is opened and closed between the straight-through channel and one end of the through hole in a reciprocating manner, and the end is connected with the cavity.

Further, the mechanical non-return module comprises a main body, wherein flanges are respectively and fixedly arranged at two ports of the main body, and the through hole is formed in the center of each flange; a framework structure is arranged in the main body; the framework structure separates the internal space of the main body into the through channel and the annular channel.

Further, the framework structure comprises a partition plate, and the partition plate is supported between the two flanges through a bracket structure; the center opening of the partition plate forms the through channel; the annular channel is formed by the clearance between the partition plate and the main body.

Further, the support structure comprises a plurality of support rods, and a plurality of support rods are arranged on the end faces of two sides of the partition plate; the support rods on the same side end face are uniformly distributed around the straight-through channel axis.

Further, a caulking groove is formed in the through channel, close to one side port of the cavity, in a sinking mode, and the caulking groove is arranged in a size matching mode with the baffle plate; the support rods are distributed along the edges of the caulking grooves, the support rods surround to form a guide structure, and the baffle moves between the through holes and the through channels along the guide structure.

Further, an electromagnet module and a trigger switch thereof are arranged at the inner port of the through hole connected with the cavity; the baffle contacts the trigger switch to enable the electromagnet module to be electrified; the electromagnet module adsorbs the baffle is attached to the inner port of the through hole.

Further, the main control valve body comprises a shell, a sliding groove for sliding the plugboard is arranged in the shell, and the plane of the sliding groove is perpendicular to the axis of the ventilation channel; the plugboard is connected to the output end of the opening and closing driving device, the opening and closing driving device is arranged in the accommodating cavity, and the accommodating cavity is positioned on one side of the ventilation channel.

Further, the pump body is provided with a dry contact point in an ON/OFF running state; the main controller is electrically connected with the opening and closing driving device.

Further, the opening position and the closing position of the plugboard are respectively provided with an in-place sensing device, and the in-place sensing devices are electrically connected with the main controller; the in-place sensing device is connected with the opening and closing driving device through a feedback signal of the main controller.

Further, the in-place sensing device located at the closing position is connected with the electromagnet module through the power-off signal of the main controller.

The beneficial effects are that: the invention relates to a double-protection anti-backflow control valve, which at least comprises the following advantages:

1. by additionally arranging the mechanical check valve structure, the original air pressure difference characteristic in the pipeline can be utilized to quickly perform the closing action, so that the gas is prevented from flowing reversely.

2. The dry joint in the ON/OFF running state is additionally arranged ON the dry pump, so that the valve is closed after the dry pump is completely stopped, double protection is realized, and meanwhile, the pressure in a pipeline is kept.

3. Through addding the electro-magnet module for the baffle is adsorbed after closing the action, guarantees that the shutoff of baffle is firm and airtight.

4. Through setting up the logical locking relation of the on-off state of the electromagnet module and the on-off state of the gate valve through the double-control on-off circuit and the in-place induction device of the gate valve, normal operation of the dry pump and reliable adsorption of the electromagnet during abnormal shutdown are guaranteed.

Drawings

FIG. 1 is a schematic diagram of the overall structure of an embodiment of the present invention;

FIG. 2 is a schematic cross-sectional view of an embodiment of the present invention;

FIG. 3 is a schematic diagram of a skeleton structure and a baffle plate according to an embodiment of the present invention;

FIG. 4 is a diagram of a logic connection of a control system according to an embodiment of the present invention.

Detailed Description

The invention will be further described with reference to the accompanying drawings.

A double-protection anti-backflow control valve as shown in figures 1-4, comprising a mechanical backstop module 1 and a main control valve body 2; the main control valve body 2 comprises a ventilation channel 21 for communicating the cavity with the pump body; one end of the ventilation channel 21 is connected with the pump body 3, and the other end of the ventilation channel is communicated with the inside of the cavity through the mechanical check module 1; an insertion plate 4 is arranged between the ventilation channel 21 and the mechanical non-return module 1, and the insertion plate 4 is driven to reciprocate to open and close at a port of the ventilation channel 21 by external force. Wherein the main control valve body can adopt an automatic gate valve, and the mechanical check module adopts a mechanical check valve.

Before the dry pump is stopped abnormally, the pressure difference exists between the upper part and the lower part of the vacuum pipeline due to the suction effect of the pump body, and the pressure of the pump end is larger than that in the cavity, so that the gas at the pump end can flow back into the cavity to form backflow after the dry pump is stopped abnormally. According to the scheme, the mechanical check valve is additionally arranged on the automatic gate valve, when the dry pump is stopped abnormally, the existing pressure difference is utilized, so that the mechanical check valve above the control valve is firstly closed quickly, gas backflow is prevented, a closing signal is sent out again after the dry pump is stopped completely, the automatic gate valve is closed, double protection is achieved, gas recharge is prevented better, and pipeline pressure is maintained.

Through holes 17 are respectively formed in two ends of the mechanical non-return module 1, and the two through holes 17 are respectively connected with the port of the ventilation channel 21 and the port of the cavity; a through channel 15 and an annular channel 16 are arranged in the mechanical non-return module 1, and the through channel 15 and the annular channel 16 are communicated with the two through holes 17; the two ports of the through channel 15 are aligned to the through holes 17 at the two ends respectively, and the annular channel 16 surrounds the outside of the through channel 15; the mechanical non-return module 1 is internally provided with a baffle 13, and the baffle 13 is opened and closed between the through channel 15 and one end of the through hole 17 in a reciprocating manner, and the end is connected with the cavity.

When the pump body works normally, the baffle is sealed at the port of the through channel 15, and the gas in the cavity flows out through the annular channel.

When the pump body is stopped abnormally, the gas at the pump end firstly directly acts on the baffle through the through channel under the action of pressure difference, so that the baffle is sealed at the port of the through hole 17, and the gas at the pump end is blocked from flowing back into the cavity.

Example 1

The mechanical non-return module 1 comprises a main body 11, wherein flanges 12 are respectively and fixedly arranged at two ends of the main body 11, and the center of each flange 12 is provided with a through hole 17; a framework structure 14 is arranged inside the main body 11; the skeleton structure 14 partitions the internal space of the main body 11 into the through channel 15 and the annular channel 16.

The framework structure 14 comprises a partition plate 141, and the partition plate 141 is supported between the two flanges 12 through a bracket structure; the center opening of the partition plate 141 forms the through passage 15; the annular passage 16 is formed by a gap between the partition plate 141 and the main body 11.

The support structure comprises a plurality of support rods 142, and a plurality of support rods 142 are arranged on the end surfaces of two sides of the partition plate 141; the plurality of support rods 142 on the same side end face are uniformly circumferentially arranged around the axis of the through passage 15. A circular limiting boss or limiting groove is arranged on the inner end surface of the flange 12 corresponding to the support structure, and a plurality of support rods are circumferentially attached to the outer side surface of the limiting boss or the inner side surface of the limiting groove, so that the straight-through channel is enabled to be aligned with the through hole of the flange; when the device is stopped abnormally, the return gas can directly act on the baffle plate from the through passage, and the baffle plate is used for sealing the through hole 17 before the rest return gas reaches the through hole 17 from the annular passage.

A caulking groove 18 is formed in the through channel 15 near one side port of the cavity in a sinking manner, and the caulking groove 18 is arranged in a size fit with the baffle 13; a plurality of support rods 142 are arranged along the edges of the caulking groove 18, and a plurality of support rods 142 are wound around to form a guide structure along which the baffle plate 13 is moved between the through passage 15 and the through hole 17. The baffle is limited and guided through the guide structure, so that the baffle can stably reciprocate between the partition plate and the flange. The caulking groove can limit the baffle plate and the groove when the pump body works normally.

Example 2

An electromagnet module 5 and a trigger switch 51 thereof are arranged at the inner end of the through hole 17 connected with the cavity; the baffle 13 contacts the trigger switch 51, so that the electromagnet module 5 is electrified; the electromagnet module 5 adsorbs the baffle 13 to be attached to the inner port of the through hole 17.

The main control valve body 2 comprises a shell 22, wherein a chute 23 for sliding the plugboard 4 is arranged in the shell 22, and the plane of the chute 23 is perpendicular to the axis of the ventilation channel 21; the plugboard 4 is connected to the output end of the opening and closing driving device 6, the opening and closing driving device 6 is arranged in the accommodating cavity 24, and the accommodating cavity 24 is located at one side of the ventilation channel 21.

The pump body 3 is provided with a dry contact point 31 in an ON/OFF operating state; the dry contact point 31 is electrically connected to the main controller 7, and the main controller 7 is electrically connected to the opening/closing driving device 6.

The opening position and the closing position of the plugboard 4 are respectively provided with an in-place sensing device 8, and the in-place sensing devices 8 are electrically connected with the main controller 7; the in-place sensing device 8 is connected with the opening and closing driving device 6 through a feedback signal of the main controller 7.

The in-place sensing device 8 in the closed position is connected to the electromagnet module 5 through the power-off signal of the main controller 7.

Based on the above embodiment 2, the working principle is that: when the dry pump is stopped abnormally, the baffle is jacked up and contacted with the through hole 17 at the cavity end under the action of air pressure difference, so that the trigger switch is contacted, the electromagnet module is electrified, the through hole 17 at the cavity end is blocked by the adsorption baffle, and the backflow of gas is prevented.

After the pump body is completely stopped, stopping signals are fed back to the main controller through a dry contact point in an OFF running state, then the main controller sends closing control signals to the opening and closing driving device 6, and the opening and closing driving device 6 executes valve closing actions, namely the plug board is driven to move to a closing position, so that the closing of the valve is realized, and the dual protection of backflow prevention is realized.

After the plugboard closing action moves in place, triggering an in-place sensing device 8 at the closing position, feeding back a closing in-place signal to a main controller, and sending a stopping action signal to an opening and closing driving device 6 by the main controller, so that the opening and closing driving device 6 stops moving, thereby avoiding the overstock of the plugboard and avoiding damage to the plugboard; simultaneously, the main controller sends a power-off control signal to the electromagnet module so that the electromagnet module is powered off; the electromagnetic module is in a power-off state under the condition that the valve is completely closed during the shutdown period of the dry pump, so that the energy consumption can be reduced to a certain extent.

When the dry pump is restarted, a starting signal is fed back to the main controller through a dry contact point in an NO running state, then the main controller sends a starting control signal to the starting and stopping driving device 6, the starting and stopping driving device 6 executes valve starting action, namely the driving plugboard moves to a starting position, so that the valve is started, meanwhile, as the electromagnet module is in a power-off state and is not adsorbed with the baffle, the baffle falls back into the caulking groove again under the suction effect of the dry pump, so that gas in the cavity can be pumped out along the annular channel and the ventilation channel and finally passes through the pump body, and the normal operation of the dry pump is realized.

After the plugboard opening action moves in place, an in-place sensing device 8 of the opening position is triggered, an opening in-place signal is fed back to the main controller, and then the main controller sends a stop action signal to the opening and closing driving device 6, so that the opening and closing driving device 6 stops moving to limit the plugboard, and damage to the plugboard caused by excessive displacement of the plugboard is avoided.

In addition, the electromagnet module comprises a power on-off circuit for connecting a power supply and the electromagnet, and the circuit comprises two on-off switches connected in series; one of which is controlled to be on-off by the trigger switch 51, or the trigger switch 51 is directly connected in series in the circuit as one of the switches, wherein the switch is in an on state when the baffle contacts the trigger switch, and the switch is in an off state when the baffle is separated from the trigger switch; the other is controlled to be in on and off states by two in-place sensing devices 8 respectively, wherein the in-place sensing device in the closing position controls the off state, and the in-place sensing device in the opening position controls the on state.

Because after the push-pull valve is closed, the internal air pressure of the mechanical check valve and the air pressure in the cavity are locked, even though the adsorption effect of the electromagnet is not available, the baffle plate can still be attached to the through hole and still contact with the trigger switch, if a single control circuit is adopted, namely a circuit of a single on-off switch, the condition that the power is immediately supplied after the trigger power failure exists, and the baffle plate is always plugged at the through hole when the dry pump is started next time, so that the dry pump cannot normally operate. A two-way disconnect Guan Chuanlian circuit is employed.

For clarity of description, the two on-off switches are respectively named as a first on-off switch and a second on-off switch; when the dry pump is stopped abnormally, the valve body is opened, the plug board is positioned at the opening position, the second on-off switch is in an on state at the moment, and meanwhile, the baffle plate acts to contact the trigger switch, so that the first on-off switch is also converted into an on state, and the electromagnet is enabled to electrically adsorb the baffle plate.

When the dry pump is completely stopped, the driving plugboard is closed in place, the second on-off switch is triggered to be turned into an off state, and even if the baffle contacts the trigger switch, the electromagnet still loses electricity, so that when the dry pump is started next time, the gas in the mechanical check valve is pumped out first, the gas pressure in the mechanical check valve is less than the gas pressure in the cavity, meanwhile, the baffle loses the constraint of the electromagnet and is reset to the caulking groove, and the dry pump can normally run.

The baffle is separated from the trigger switch, so that the first on-off switch is also turned into an off state, and the second on-off switch is triggered to be turned into an on state after the plugboard is started in place; so that the electromagnet can be directly electrified by contacting the baffle with the trigger switch when the machine is stopped abnormally next time.

The foregoing description is only of the preferred embodiments of the invention, it being noted that: it will be apparent to those skilled in the art that numerous modifications and adaptations can be made without departing from the principles of the invention described above, and such modifications and adaptations are intended to be comprehended within the scope of the invention.

Claims

1. A dual protection prevents flowing backward control valve which characterized in that: comprises a mechanical non-return module (1) and a main control valve body (2); the main control valve body (2) comprises a ventilation channel (21) for communicating the cavity with the pump body; one end of the ventilation channel (21) is connected with the pump body (3), and the other end of the ventilation channel is communicated with the inside of the cavity through the mechanical check module (1); an inserting plate (4) is arranged between the ventilation channel (21) and the mechanical non-return module (1), and the inserting plate (4) is driven by external force to reciprocate to open and close at the port of the ventilation channel (21);

through holes (17) are respectively formed in two ends of the mechanical non-return module (1), and the two through holes (17) are respectively connected with the port of the ventilation channel (21) and the port of the cavity; a through channel (15) and an annular channel (16) are arranged in the mechanical non-return module (1), and the through channel (15) and the annular channel (16) are communicated with the two through holes (17); the two ports of the through channel (15) are respectively aligned with the through holes (17) at the two ends, and the annular channel (16) surrounds the outer side of the through channel (15); the mechanical non-return module (1) is internally provided with a baffle (13), the baffle (13) is opened and closed between the through channel (15) and one end of the through hole (17) in a reciprocating manner, and the end is connected with the cavity.

2. A dual protection anti-backflow control valve in accordance with claim 1, wherein: the mechanical non-return module (1) comprises a main body (11), flanges (12) are respectively and fixedly arranged at two ports of the main body (11), and the center of each flange (12) is provided with a through hole (17); a framework structure (14) is arranged inside the main body (11); the framework structure (14) separates the internal space of the main body (11) into the through channel (15) and the annular channel (16).

3. A dual protection anti-backflow control valve in accordance with claim 2, wherein: the framework structure (14) comprises a separation plate (141), and the separation plate (141) is supported between the two flanges (12) through a bracket structure; the central opening of the partition plate (141) forms the through passage (15); the annular channel (16) is formed by a gap between the partition plate (141) and the main body (11).

4. A dual protection anti-backflow control valve as defined in claim 3, wherein: the support structure comprises a plurality of support rods (142), and a plurality of support rods (142) are arranged on the end faces of two sides of the partition plate (141); a plurality of support rods (142) on the same side end face are uniformly distributed around the axis of the through channel (15).

5. A dual protection anti-backflow control valve in accordance with claim 4 wherein: a caulking groove (18) is formed in the through channel (15) close to one side port of the cavity in a sinking mode, and the caulking groove (18) and the baffle (13) are arranged in a size fit mode; a plurality of support rods (142) are arranged along the edges of the caulking grooves (18), the support rods (142) surround to form a guide structure, and the baffle plate (13) moves between the through channel (15) and the through hole (17) along the guide structure.

6. A dual protection anti-backflow control valve in accordance with claim 5, wherein: an electromagnet module (5) and a trigger switch (51) thereof are arranged at the inner end of the through hole (17) connected with the cavity; the baffle (13) contacts the trigger switch (51) so that the electromagnet module (5) is electrified; the electromagnet module (5) adsorbs the baffle (13) to be attached to the inner port of the through hole (17).

7. The dual protection anti-backflow control valve of claim 6, wherein: the main control valve body (2) comprises a shell (22), wherein a chute (23) for sliding the plugboard (4) is arranged in the shell (22), and the plane of the chute (23) is perpendicular to the axis of the ventilation channel (21); the plug board (4) is connected to the output end of the opening and closing driving device (6), the opening and closing driving device (6) is arranged in the accommodating cavity (24), and the accommodating cavity (24) is located on one side of the ventilation channel (21).

8. A dual protection anti-backflow control valve in accordance with claim 7 wherein: the pump body (3) is provided with a dry contact point (31) in an ON/OFF running state; the dry connection point (31) is electrically connected to the main controller (7), and the main controller (7) is electrically connected to the opening and closing driving device (6).

9. A dual protection anti-backflow control valve in accordance with claim 8 wherein: the opening position and the closing position of the plugboard (4) are respectively provided with an in-place induction device (8), and the in-place induction devices (8) are electrically connected with the main controller (7); the in-place sensing device (8) is connected with the opening and closing driving device (6) through a feedback signal of the main controller (7).

10. A dual protection anti-backflow control valve in accordance with claim 9, wherein: the in-place sensing device (8) located at the closing position is connected with the electromagnet module (5) through a power-off signal of the main controller (7).