CN117309009A

CN117309009A - Encoder precision compensation circuit and encoder precision compensation device

Info

Publication number: CN117309009A
Application number: CN202311247697.8A
Authority: CN
Inventors: 朱冠伦; 任宏宇; 张辉; 于广华
Original assignee: Ji Hua Laboratory
Current assignee: Ji Hua Laboratory
Priority date: 2023-09-25
Filing date: 2023-09-25
Publication date: 2023-12-29

Abstract

The embodiment of the invention relates to the technical field of encoder precision compensation, and discloses an encoder precision compensation circuit and an encoder precision compensation device. The angle deviation measuring circuit measures the angle deviation of the angle digital signal to obtain angle deviation data, the programmable logic array performs angle compensation on the angle digital signal according to the angle deviation data, and the compensated angle digital signal is output to the servo driver so as to improve the precision of the angle digital signal received by the servo motor. So that the accuracy of the encoder in this process can approach the repetition accuracy of the encoder itself.

Description

Encoder precision compensation circuit and encoder precision compensation device

Technical Field

The embodiment of the invention relates to the technical field of encoder precision compensation, in particular to an encoder precision compensation circuit and an encoder precision compensation device.

Background

The prior art is affected by the sensor accuracy of the encoder itself, and in practice the positioning accuracy is also dependent on the accuracy of the subdivision algorithm of the servo drive when the sine-cosine encoder is applied to the servo. Therefore, the prior art can only make the sine and cosine signals output by the sine and cosine encoder in a relatively ideal state, and the real precision depends on the precision of the sensor and the subdivision precision of the servo, so that the precision of the sine and cosine encoder cannot be truly improved.

Disclosure of Invention

In view of the above problems, an embodiment of the present invention provides an encoder precision compensation circuit, which is used to solve the technical problem that in the prior art, the precision of a sine and cosine encoder is difficult to achieve the repetition precision of the encoder.

According to an aspect of an embodiment of the present invention, there is provided an encoder precision compensation circuit for compensating encoder precision, the encoder precision compensation circuit including:

the signal processing circuit is electrically connected with the encoder and is used for acquiring a plurality of paths of sine and cosine signals sent by the encoder and converting the paths of sine and cosine signals into corresponding angle digital signals;

the angle deviation measuring circuit is used for measuring the angle deviation of the angle digital signal to obtain angle deviation data, wherein the detection precision of the angle deviation measuring circuit is higher than that of the encoder;

and the programmable logic array is respectively and electrically connected with the angle deviation measuring circuit and the signal processing circuit, performs angle compensation on the angle digital signal according to the angle deviation data, and outputs the compensated angle digital signal to a servo driver so as to improve the precision of the angle digital signal received by the servo driver.

In an alternative manner, the encoder precision compensation circuit further comprises a differential circuit, and the differential circuit is respectively connected with the programmable logic array and the servo driver;

the differential circuit is used for carrying out anti-interference processing on the angle digital signal subjected to angle compensation.

In an alternative manner, the multiple sine and cosine signals include a first differential sine signal, a second differential sine signal, a first differential cosine signal, a second differential cosine signal, a first zero point signal and a second zero point signal,

the signal processing circuit is further configured to subdivide, filter, and correct the first differential sine signal, the second differential sine signal, the first differential cosine signal, the second differential cosine signal, the first zero point signal, and the second zero point signal, and convert the processed first differential sine signal, second differential sine signal, first differential cosine signal, second differential cosine signal, first zero point signal, and second zero point signal to obtain one angle digital signal.

In an alternative way, the programmable array is further configured to perform the steps of:

step S1, a host clock is sent to the signal processing circuit;

and S2, obtaining an angle digital signal converted into transmissible data from the signal processing circuit, analyzing and restoring the angle digital signal to obtain an angle digital signal, and storing the angle digital signal into a register.

In an alternative manner, the programmable logic array is further configured to perform the steps of:

s3, converting the angle deviation data into an angle deviation digital signal;

step S4, determining a compensation interval, and performing linear analysis/correlation analysis on all the angle deviation digital signals and the angle digital signals in the interval to determine the angle deviation digital signals-a compensation calculation mode of the angle digital signals;

and S5, performing angle compensation on the angle digital signal according to the compensation calculation mode corresponding to the angle interval matching.

s6, acquiring an angle request instruction of the servo driver, wherein the angle request instruction comprises a transmission protocol format;

and step S7, the compensated angle digital signal is sent to the servo driver in the transmission protocol format.

In an alternative manner, the steps S1-S2, the steps S3-S5, the step S6 may be performed in parallel in the programmable array.

In an alternative manner, the step for measuring the angular deviation of the angular digital signal to obtain angular deviation data includes:

confirming a detection interval and confirming a detection time node according to the detection interval;

measuring the angle deviation of the angle digital signal according to the detection time node;

and taking a difference value from the angle deviation and the angle digital signal to determine the angle deviation data.

In an alternative way, the signal processing circuit is a data processing chip.

According to another aspect of an embodiment of the present invention, there is provided an encoder accuracy compensation apparatus for compensating encoder accuracy, the encoder accuracy compensation apparatus including a servo motor, a servo driver, and an encoder accuracy compensation circuit as described above;

the encoder is used for detecting the rotation angle of the servo motor and outputting sine and cosine signals according to the detection result;

the encoder precision compensation circuit is used for performing format conversion and precision compensation on the plurality of sine and cosine signals and outputting the compensated angle digital signals;

and the servo driver is used for controlling the servo motor to work according to the compensated angle digital signal feedback.

According to the embodiment of the invention, the signal processing circuit, the angle deviation circuit and the programmable logic array are added between the encoder and the servo driver, firstly, the signal processing circuit is used for converting the sine and cosine signals output after the encoder is sampled into corresponding angle digital signals, then the angle deviation measuring circuit is used for measuring the angle deviation of the angle digital signals to obtain angle deviation data, finally the programmable logic array is used for carrying out angle compensation on the angle digital signals according to the angle deviation data and outputting the angle digital signals after compensation to the servo driver, so that the precision of the angle digital signals received by the servo driver can be improved, and the technical problem that the precision of the existing sine and cosine encoder is difficult to achieve the repetition precision of the encoder is solved.

The foregoing description is only an overview of the technical solutions of the embodiments of the present invention, and may be implemented according to the content of the specification, so that the technical means of the embodiments of the present invention can be more clearly understood, and the following specific embodiments of the present invention are given for clarity and understanding.

Drawings

The drawings are only for purposes of illustrating embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to designate like parts throughout the figures. In the drawings:

FIG. 1 is a block diagram of a first embodiment of an encoder accuracy compensation circuit provided by the present invention;

FIG. 2 is a block diagram of a second embodiment of an encoder accuracy compensation circuit provided by the present invention;

FIG. 3 shows a block diagram of a third embodiment of an encoder precision compensation circuit provided in an exemplary technique;

FIG. 4 is a flow chart showing a first process flow of a method performed by a programmable logic array in an encoder accuracy compensation circuit according to the present invention;

FIG. 5 is a flow chart showing a second process flow of the method performed by the programmable logic array in the encoder accuracy compensation circuit provided by the present invention;

FIG. 6 is a flow chart illustrating a third process flow of a method performed by a programmable logic array in an encoder accuracy compensation circuit according to the present invention;

FIG. 7 is a schematic diagram showing the structure of data transmission of a method performed by a programmable logic array in an encoder accuracy compensation circuit according to the present invention;

fig. 8 shows a block diagram of an encoder precision compensation arrangement provided in an exemplary technique.

Detailed Description

Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein.

The scheme of the sine and cosine encoder in the exemplary technique is analyzed in conjunction with the related art as follows.

The compensation method for the sine and cosine encoder in the general exemplary technology is to adjust parameters such as amplitude, phase and offset of the sine and cosine signals output by the encoder so that the parameters reach a preset range, thereby keeping the sine and cosine signals output by the sine and cosine encoder in a standard state (for example, the amplitude of sine and cosine waves required by a common servo driver is 0.5V, the phase difference of sine and cosine waves is 90 degrees, and the offset is 0). In order to achieve the above objective, in the general technology, referring to fig. 2, an amplifying circuit and an oscilloscope are generally used to perform operations such as gain amplification, deviation compensation, and phase deviation compensation on a signal output by an encoder, so that an adjusted sine and cosine signal is kept in a standard state, and thus a subsequent servo driver can conveniently control a servo motor according to the adjusted sine and cosine signal in a feedback manner.

The application provides an encoder precision compensation circuit, referring to fig. 1, the encoder precision compensation circuit comprises a signal processing circuit, an angle deviation measuring circuit and a programmable logic array, wherein the signal processing circuit is electrically connected with an encoder, and the programmable logic array is respectively electrically connected with the angle deviation measuring circuit and the signal processing circuit.

The signal processing circuit acquires a plurality of paths of sine and cosine signals sent by the encoder, converts the plurality of paths of sine and cosine signals into corresponding angle digital signals, and the angle deviation measuring circuit measures the angle deviation of the angle digital signals to obtain angle deviation data, wherein the detection precision of the angle deviation measuring circuit is higher than that of the encoder; and the programmable logic array performs angle compensation on the angle digital signal according to the angle deviation data and outputs the compensated angle digital signal to a servo driver so as to improve the precision of the angle digital signal received by the servo driver.

In the above embodiment, by adding a signal processing circuit, an angle deviation circuit and a programmable logic array between the encoder and the servo driver, the sine and cosine signals output after the encoder is sampled can be converted into corresponding angle digital signals, then angle deviation data are obtained through the angle deviation measuring circuit, finally the programmable logic array performs angle compensation on the angle digital signals according to the angle deviation data and outputs the compensated angle digital signals to the servo driver, so that the precision of the angle digital signals received by the servo driver can be improved, and the technical problem that the precision of the existing sine and cosine encoder is difficult to achieve the repetition precision of the encoder is solved.

In addition, the above scheme converts the sine and cosine signals output by the encoder into digital signals and then processes the digital signals to a certain extent, so that the angle digital signals output to the servo driver replace the sine and cosine signals in the initial scheme, and therefore the subdivision accuracy of the servo sensor is not required to be relied on, and the influence of the subdivision accuracy of the servo controller is removed. The angle precision fed back to the servo is completely determined by the compensated angle digital signal, so that the compensated angle digital signal can approach the repetition precision of the encoder, and the technical problem that the precision of the sine and cosine encoder is difficult to reach the repetition precision of the encoder is solved.

It should be noted that the sine and cosine encoder includes two parts, namely a sensor and a code wheel. When the sine and cosine encoder is assembled or installed, the requirements on the distance between the sensor and the code disc are very strict, the signal distortion can be caused by the fact that the distance is close or far, and the final angle error can be increased due to the fact that the signal distortion. Under the working condition that the encoder is actually installed, the distance between the sensor and the code wheel cannot be accurately controlled to be a fixed value, and deviation often occurs, so that the absolute positioning accuracy of the encoder cannot reach the magnitude of repeated positioning accuracy. In the compensation scheme of the method, the absolute positioning accuracy of the encoder reaches the magnitude of the repeated positioning accuracy by improving the absolute positioning accuracy of the encoder, so that the absolute positioning accuracy of the encoder can be close to the repeated positioning accuracy.

In one possible implementation scenario, the encoder accuracy compensation circuit of the present solution may be implemented on various motor position detection devices for motor position detection.

In one embodiment, fig. 3 is a schematic block diagram of another embodiment of the encoder accuracy compensation circuit of the present invention, and as shown in fig. 3, the encoder accuracy compensation circuit further includes a differential circuit, where the differential circuit is connected to the programmable logic array and the servo driver, respectively.

And the differential circuit performs anti-interference processing on the angle digital signal subjected to angle compensation.

According to the embodiment of the invention, the differential circuit is arranged on one side of the digital signal of the output angle, so that the common mode ratio can be restrained, the anti-interference of the digital signal is realized, the signal output to the servo driver is ensured to be pure, the difficulty of reading the signal by the servo driver is further reduced, and the servo driver has a good protection effect.

It should be noted that the differential circuit in this case may adopt specific structures of various differential circuits mentioned in the prior art, and also may be applied to the present application after a person skilled in the art slightly changes the specific structures, so that the functions of the differential circuit are completely applied, and will not be described herein.

In addition, the technical scheme of the application also converts the sine and cosine signals into digital signals and then performs optimization compensation, so that the influence of the servo driver receiving signals on the signal precision can be eliminated.

In an embodiment, the multiple sine and cosine signals include a first differential sine signal sin+, a second differential sine signal SIN-, a first differential cosine signal cos+, a second differential cosine signal COS-, a first ZERO signal zero+ and a second ZERO signal ZERO-.

The signal processing circuit is further configured to divide, filter and correct the first differential sine signal sin+, the second differential sine signal SIN-, the first differential cosine signal cos+, the second differential cosine signal COS-, the first ZERO signal zero+ and the second ZERO signal ZERO-, and convert the processed first differential sine signal sin+, the second differential sine signal SIN-, the first differential cosine signal cos+, the second differential cosine signal COS-, the first ZERO signal zero+ and the second ZERO signal ZERO to obtain the angle digital signal.

The plurality of differential signals are processed to obtain a ground angle digital signal, and a plurality of digits (determined by parameters of a signal processing circuit) can be present, so that the stability of the digital signal is higher than that of an analog signal. Therefore, the angle precision fed back to the servo controller is ensured to be completely determined by the compensated angle, other data processing modes which possibly influence the data precision are avoided, and the positioning precision of the encoder fed back to the servo controller is further improved to be close to the repetition precision of the encoder.

Alternatively, the angle deviation measuring circuit may be implemented by using an angle measuring instrument (such as a laser interferometer, which uses a laser wavelength as a known length and uses a michelson interferometry system to measure displacement, where the data measured by the angle deviation measuring circuit is angle deviation data). The measurement process is exemplified by measurement by a laser interferometer: the encoder is installed on the servo motor through measuring the frock, uses servo driver to control. The high-precision turntable of the laser interferometer is also installed on the servo motor through a tool and rotates along with the shaft of the servo motor.

The angle deviation measuring circuit measures the angle deviation of the angle digital signal to obtain angle deviation data, and the angle deviation measuring circuit comprises the following steps:

and (3) making a measurement plan according to the compensation purpose, for example, carrying out equidistant measurement (such as measurement once every 10 degrees) on an angle digital signal (such as 26-bit angle data) output by the signal processing circuit, determining the rotation angle of the motor fed back by the current sine and cosine encoder through the angle digital signal of the signal processing circuit, and controlling the angle deviation measurement circuit to carry out measurement when the current rotation angle accords with any angle value of equidistant measurement. When the sine and cosine encoder detects that the servo motor rotates to a certain angle, for example 15 deg., the laser interferometer measures an angle of 15.15 deg.. Because the laser interferometer accuracy is higher, the angle deviation data is 15.15 ° -15 ° =0.15°. In the above embodiment, the angle digital signal is the encoder measured angle, the angle deviation data is the difference between the angle represented by the original data of the motor rotation angle measured by the laser interferometer and the angle represented by the angle digital signal, where the original data of the motor rotation angle measured by the laser interferometer and the difference can be directly obtained on the measurement software matched with some laser interferometer manufacturers.

Alternatively, the signal processing circuit may be implemented using an IC-TW29 chip, as well as other sub-divided chips such as IC-TW28, and iC-TW29 is a system-on-chip for an encoder application. The independent I/O modules of the IC-TW29 chip with individually programmed resolutions may provide a BiSS-c protocol communication, an ABZ protocol communication, or a UVW protocol communication output, alone or in combination. Automatic calibration of sensor offset, sine-cosine amplitude and phase, and zero input offset, gain and phase provides and maintains minimal angular error and jitter. The gearbox function tracks the input period (up to 4,096 per revolution) and provides an output resolution of up to 26 bits per revolution. Taking the IC-TW29 chip as an example, the IC-TW29 is an encoder application specific chip, which can be understood as converting an analog signal such as a sine and cosine signal into a digital signal of 26 bits, because the above chip performs an automatic calibration function for sensor offset, sine and cosine amplitude and phase, and zero input offset, gain and phase, and can keep minimum angle error and jitter. The differential sine and cosine signals SIN+, SIN-, COS+, COS-, ZERO+ and ZERO-output by the encoder can be subdivided, filtered and corrected by the IC-TW29 chip, and then the angle error data of the 26-bit digital signal angle data output by the SPI protocol or the BISS-C protocol can not be increased. Further, the subdivision chip such as the IC-TW29 is also provided with dedicated software, and the number of subdivided bits (up to 26 bits), the strength of filtering, automatic correction compensation, and the like can be set on the software. The IC-TW29 can improve angular accuracy by correcting the eccentricity of the code wheel by dedicated software.

In one embodiment, referring to fig. 4, the programmable array is further configured to perform the following steps:

step S1, a host clock is sent to the signal processing circuit;

the host clock is sent to the signal processing circuit, so that the clock of the signal processing circuit can be updated, the clock of the signal processing circuit is unified with the clock process of the programmable array, and the delay of the data processing process caused by the non-unified clock is avoided. The host clock is also used for starting a data transmission process of the signal processing circuit, so that the signal processing circuit outputs the angle digital signal converted into transmissible data to the programmable array.

The angle digital signal is an angle digital signal of the transmissible data after the format is converted according to the transmission protocol, and after the angle digital signal is received by the programmable array, the angle digital signal can be obtained by analyzing and restoring according to the transmission protocol.

By the process, real-time, bidirectional and high-speed signal transmission between the signal processing circuit and the programmable array can be realized.

It should be noted that the signal processing circuit and the programmable array may use a multi-michigan protocol, a spi protocol, a BISS-C protocol, an SSI protocol, or other synchronous serial high-speed transmission protocol for transmission.

In an alternative embodiment, as shown in fig. 5, the programmable logic array is further configured to perform the following steps:

s3, determining an angle interval according to the angle digital signal in a preset time period;

and setting a period of time, and if the measured angle of the angle digital signal is 10-30 degrees in the period of time, confirming that the interval is an angle interval.

Step S4, performing linear analysis/correlation analysis on all the angle deviation digital signals and the angle digital signals in the interval to determine the angle deviation digital signals-the compensation calculation mode of the angle digital signals;

linear interpolation is performed by programming in a programmable logic array. After measuring the error value of the encoder using a higher precision measuring instrument. When the encoder measures an angle value, the program will find the corresponding error interval according to the angle value, calculate the compensation parameter, and compensate the encoder by the parameter. For example: at 15 °, the laser interferometer measures 15.15 °, and at 30 °, the laser interferometer measures 30.30 °. By the linear interpolation method, when the encoder angle is between 15 ° and 30 °, the encoder measurement angle is set to x, the compensated angle is set to y, and a linear relationship exists between the compensated angle and the encoder measurement angle, that is, y=kx+b. From the above data, k=1.01 and b=0 can be calculated. The compensation calculation is such that the linear relation of the compensated angle to the encoder measured angle can be expressed by the equation y=1.01x. In this case, there are various other interpolation methods, such as the second interpolation and the third interpolation. The higher the number of interpolations, the more complex the computation, the smoother the interpolation curve, but the higher the interpolation accuracy is not necessarily. In the industry, linear interpolation is the most widely used.

By the method, different compensation calculation modes can be called according to the angle interval so as to perform angle compensation on the angle digital signal. Therefore, after one circle is completed, the correlation can be obtained according to the accumulated numerical values, and in the subsequent process, the angle compensation can be quickly performed directly through the correlation without calculation.

In an alternative embodiment, as shown in fig. 6, the programmable array is further configured to perform the following steps:

In the above process, the angular digital signal is output in a communication protocol conforming to the requirements of various servo drivers. Such as the polymun protocol, the BISS-C protocol, the SSI protocol, the spi protocol, etc. If the angle to be transmitted is 240 °, according to the angle request instruction of the servo driver, for example: the servo driver sends a request according to the BISS-C protocol, the signal received by the encoder is a series of clock signals MA, and the encoder returns a signal SLO in a corresponding format according to the clock signals. The communication format is as shown in fig. 7: a low level ACK wait response signal is sent, followed by a high level Start signal Start, and then a CDS signal, followed by angle signals 1.n-1..1.2, 1.1, 1.0, expressed as (240/360) (2 a 26-1) ≡ 44739242 in terms of 26 bits for angle 240 °, expressed as b10101010101010101010101010 in terms of binary, where 1.n-1 to 1.0 are used to indicate the binary, and angle sending until Stop1 signal Stop transmission, when indicating that a biSS-Timeout phase is entered, and MA sends CDM signals in the Timeout phase until SLO signal is pulled high.

In an alternative embodiment, the steps S1-S2, the steps S3-S5, and the step S6 may be performed in parallel in the programmable array.

The functions of communication with the IC-TW29 chip, compensation processing of the step S3-step S5, and protocol output of the step S6, which are related in the step S1-step S2, are operated in a parallel mode in a programmable array (FPGA), are not affected, and are beneficial to keeping stability of the servo driver during control. This scheme responds faster than schemes using other types of MCU chips.

In an alternative embodiment, the step for measuring the angular deviation of the angular digital signal to obtain angular deviation data includes:

the detection interval can be determined according to the detection result of the encoder, for example, 1 second is spent in detecting 10 degrees, if the motor to be detected is in uniform motion at this time, the detection interval can be positioned for 1s, synchronous detection is realized, and detection errors caused by the sequence of detection time are avoided.

the angular deviation at this time is a difference between the digital angle signal and the measured signal detected with high accuracy, and the measured angular deviation at this time is a specific and complete value.

Through the process, the accurate acquisition of the angle deviation data can be completely realized, and errors caused by time dyssynchrony are avoided.

Fig. 8 shows a block diagram of an embodiment of the encoder accuracy compensation apparatus of the present invention. The encoder precision compensation device is used for compensating the encoder precision and comprises a servo motor, a servo driver and the encoder precision compensation circuit;

Since the encoder accuracy compensation device includes all embodiments of the encoder accuracy compensation circuit, the encoder accuracy compensation device also has all advantages of the encoder accuracy compensation circuit, and will not be described herein.

The algorithms or displays presented herein are not inherently related to any particular computer, virtual system, or other apparatus. In addition, embodiments of the present invention are not directed to any particular programming language.

In the description provided herein, numerous specific details are set forth. It will be appreciated, however, that embodiments of the invention may be practiced without such specific details. Similarly, in the above description of exemplary embodiments of the invention, various features of embodiments of the invention are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various inventive aspects. Wherein the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this invention.

Those skilled in the art will appreciate that the modules in the apparatus of the embodiments may be adaptively changed and disposed in one or more apparatuses different from the embodiments. The modules or units or components of the embodiments may be combined into one module or unit or component and, furthermore, they may be divided into a plurality of sub-modules or sub-units or sub-components. Except that at least some of such features and/or processes or elements are mutually exclusive.

It should be noted that the above-mentioned embodiments illustrate rather than limit the invention, and that those skilled in the art will be able to design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The invention may be implemented by means of hardware comprising several distinct elements, and by means of a suitably programmed computer. In the unit claims enumerating several means, several of these means may be embodied by one and the same item of hardware. The use of the words first, second, third, etc. do not denote any order. These words may be interpreted as names. The steps in the above embodiments should not be construed as limiting the order of execution unless specifically stated.

Claims

1. An encoder accuracy compensation circuit for compensating for encoder accuracy, the encoder accuracy compensation circuit comprising:

the signal processing circuit is electrically connected with the encoder and is used for acquiring multiple paths of sine and cosine signals sent by the encoder and converting the multiple paths of sine and cosine signals into corresponding angle digital signals;

2. The encoder accuracy compensation circuit of claim 1, further comprising a differential circuit coupled to the programmable logic array and the servo driver, respectively;

3. The encoder precision compensation circuit of claim 1, wherein the plurality of sine and cosine signals comprises a first differential sine signal, a second differential sine signal, a first differential cosine signal, a second differential cosine signal, a first zero signal, and a second zero signal,

4. The encoder precision compensation circuit of claim 1 wherein the programmable array is further configured to perform the steps of:

step S1, a host clock is sent to the signal processing circuit;

5. The encoder precision compensation circuit of claim 4, wherein the programmable logic array is further configured to perform the steps of:

s3, converting the angle deviation data into an angle deviation digital signal;

6. The encoder precision compensation circuit of claim 5, wherein the programmable array is further configured to perform the steps of:

7. The encoder precision compensation circuit of claim 6 wherein the steps S1-S2, the steps S3-S5, the step S6 are performed in parallel in the programmable array.

8. The encoder accuracy compensation circuit of claim 1, wherein the step of measuring the angular deviation of the angular digital signal to obtain angular deviation data comprises:

9. The encoder precision compensation circuit of claim 1 wherein the signal processing circuit is a data processing chip.

10. An encoder accuracy compensation device for compensating encoder accuracy, characterized in that the encoder accuracy compensation device comprises a servo motor, a servo driver and an encoder accuracy compensation circuit according to any of claims 1-9;