CN117301500A - Pulse femtosecond laser induced flexible film surface patterning nanoparticle implantation device and method - Google Patents
Pulse femtosecond laser induced flexible film surface patterning nanoparticle implantation device and method Download PDFInfo
- Publication number
- CN117301500A CN117301500A CN202311475741.0A CN202311475741A CN117301500A CN 117301500 A CN117301500 A CN 117301500A CN 202311475741 A CN202311475741 A CN 202311475741A CN 117301500 A CN117301500 A CN 117301500A
- Authority
- CN
- China
- Prior art keywords
- femtosecond laser
- flexible film
- film
- patterned
- flexible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002105 nanoparticle Substances 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims abstract description 35
- 238000002513 implantation Methods 0.000 title claims abstract description 21
- 238000000059 patterning Methods 0.000 title description 6
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 238000007493 shaping process Methods 0.000 claims abstract description 16
- 239000012798 spherical particle Substances 0.000 claims abstract description 6
- 239000007943 implant Substances 0.000 claims abstract description 3
- 239000010408 film Substances 0.000 claims description 77
- 239000010409 thin film Substances 0.000 claims description 17
- -1 polydimethylsiloxane Polymers 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 8
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 6
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 6
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 6
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 6
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 6
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 5
- 239000004814 polyurethane Substances 0.000 claims description 5
- 239000004642 Polyimide Substances 0.000 claims description 4
- 238000009826 distribution Methods 0.000 claims description 4
- 238000000609 electron-beam lithography Methods 0.000 claims description 4
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 claims description 4
- 239000011112 polyethylene naphthalate Substances 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- 238000003892 spreading Methods 0.000 claims description 2
- 230000007480 spreading Effects 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000002360 preparation method Methods 0.000 abstract description 5
- 238000001259 photo etching Methods 0.000 abstract description 3
- 239000003153 chemical reaction reagent Substances 0.000 abstract description 2
- 238000004528 spin coating Methods 0.000 abstract description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 2
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 229910021392 nanocarbon Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920006264 polyurethane film Polymers 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/16—Surface shaping of articles, e.g. embossing; Apparatus therefor by wave energy or particle radiation, e.g. infrared heating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C67/00—Shaping techniques not covered by groups B29C39/00 - B29C65/00, B29C70/00 or B29C73/00
Abstract
The invention provides a device and a method for implanting patterned nano particles on the surface of a flexible film by pulse femtosecond laser, wherein pulse laser generated by a femtosecond laser is focused on a discrete film through a transparent donor substrate carrying the discrete film by a space shaping light path, the discrete film bounces off the donor substrate under the irradiation of the femtosecond laser pulse, and meanwhile, spherical particles are melted and shrunk and are embedded into the flexible film at a certain speed, so that the implantation of the nano particles in the flexible film is realized. The method gets rid of complex process flows such as photoetching, spin coating and stripping, avoids damage of chemical reagents to the flexible film, can implant nano particles into the flexible film in one step, improves the use durability, effectively improves the preparation efficiency, and simultaneously realizes green and environment-friendly manufacture.
Description
Technical Field
The invention relates to the technical field of laser micro-nano additive manufacturing, in particular to a device and a method for implanting patterning nano particles on the surface of a flexible film by pulse femtosecond laser induction.
Background
The patterned nanoparticle array on the flexible film has a local surface plasmon enhancement effect, has wide development potential in the fields of metamaterial, high-sensitivity detection, wearable equipment and the like, and is critical for promoting research and application because the particle size needs to be reduced and the array area is increased while the sensitivity of detection and sensing is improved.
The common micro-nano processing method mainly comprises photoetching, etching, nano-imprinting and other methods, and can be used for preparing large-area and high-precision micro-nano pattern arrays on the surfaces of hard substrates such as silicon wafers, glass and the like. Since the above processes typically involve heating and chemical cleaning processes that may cause damage to the polymer film, they are often not directly applicable to patterned nanoparticle preparation on flexible films, and often require the use of a combination of multiple micromachining techniques. The combined process of optical lithography + film deposition + etching + stripping is proposed by Zhou et al (W.Zhou, T.W.Odom, tunable subradiant lattice plasmons by out-of-plane dipolar interactions, nature Nanotechnology,6,423,2011), where a mask with nanopores is first prepared, then a target material is deposited using the prepared mask, and finally the mask is stripped to obtain gold nanoparticles with a surface diameter of 160nm of the polyurethane film, but the process involved in the process is complex, resulting in high processing costs and long cycles. Aksu et al (s. Aksu, m.huang, a. Et al., flexible plasmonics on unconventional and nonplanar substrates, advanced Materials,23,4422,2011) propose a method for preparing a nano-mask by electron beam lithography, successfully preparing a sub-100 nm nanoparticle array, but mask deposition does not enable particles to be embedded in a thin film, and manufacturing masks reduce process flexibility, are not conducive to small-lot rapid production, and limit development and application thereof.
Compared with the traditional method, the micro-additive manufacturing technology has the characteristics of no-mould processing, low cost, short period, flexibility, high efficiency and the like, and mainly comprises laser direct writing, electrochemical deposition, nozzle printing, laser selective sintering and the like. The resolution of the laser is higher, but only the resin material is usually printed; the electrochemical deposition has low efficiency and cannot be manufactured in large scale; nozzle printing and laser sintering are limited by nozzle size and spot size, and cannot achieve large printing at micron or even sub-micron resolution.
The patent document CN102191497A discloses a method and a device for preparing a nano carbon-based film on the surface of an alloy matrix, which are suitable for processing the film on the surface of a structural metal to be reinforced. However, the patent cannot completely solve the existing technical problems.
Therefore, the existing preparation process of the patterned nanoparticle array on the flexible film is complex, so that the manufacturing cost is high, the period is long, the research and the application of the flexible film metamaterial are seriously restricted, the particles cannot be directly implanted into the flexible film in the existing process, the application stability of the particles is reduced, and a flexible and efficient nanoparticle implantation method on the flexible film needs to be developed, so that the use durability is improved, the preparation efficiency is improved, and the process cost is reduced.
Disclosure of Invention
In view of the defects in the prior art, the invention aims to provide a device and a method for implanting patterned nano-particles on the surface of a flexible film induced by pulsed femtosecond laser.
The invention provides a pulse femtosecond laser induced flexible film surface patterning nanoparticle implantation device, which comprises: femtosecond lasers, shaping and scanning light paths, donor substrates, flexible films and motion platforms;
the output end of the femtosecond laser and the input end of the shaping and scanning light path are horizontally arranged;
the shaping and scanning optical path is located above the donor substrate;
the flexible film is tiled on the motion platform;
the motion platform is positioned below the donor substrate;
pulse laser generated by the femtosecond laser is modulated into a specific patterned beam through a shaping and scanning optical path, and then focused on a discrete film through a donor substrate carrying the discrete film, the discrete film bounces off the donor substrate under the irradiation of the femtosecond laser pulse, and meanwhile, melted and contracted into spherical particles are embedded into a flexible film at a preset speed, so that the implantation of nano particles in the flexible film is realized.
Preferably, the shaping and scanning optical path comprises: an attenuator, a reflector, a beam expander, a spatial light modulator or a digital micromirror device, a scanning galvanometer and a focusing field lens;
the pulsed laser beam generated by the femtosecond laser is incident into a spatial light modulator or a digital micro-mirror device after energy and size are adjusted by an attenuator, a reflecting mirror and a beam expander, is shaped into a specific shape and energy distribution, and is focused on a discrete film by a focusing field lens through a scanning galvanometer.
Preferably, the discrete membranes are placed at a predetermined distance from the upper surface of the flexible membrane.
Preferably, the irradiation position of the patterned beam is controlled by scanning the galvanometer and the motion stage.
Preferably, the spatial light modulator or the digital micromirror device transforms the two-dimensional shape of the patterned beam to control the shape of the pattern of the single pulse laser implanted nanoparticles.
Preferably, the attenuator controls the patterned beam energy, adjusting the depth of nanoparticle embedding in the flexible film.
The pulse femtosecond laser induced flexible film surface patterning nanoparticle implantation method provided by the invention comprises the following steps:
step S1: spreading the flexible film on a motion platform, and placing the discrete film at a preset position away from the upper surface of the flexible film;
step S2: controlling the focusing position of the patterned light beam through a scanning galvanometer, and implanting nano particles in the millimeter size range of the flexible film;
step S3: and driving the flexible film to move through the moving platform, and implanting nano particles in a cm range into the flexible film.
Preferably, the flexible film material comprises polymethyl methacrylate PMMA, polydimethylsiloxane PDMS, polyethylene terephthalate PET, polyethylene naphthalate PE, polyurethane PU and polyimide PI.
Preferably, nanoparticles are implanted on films of different hardness by modulating the patterned beam.
Preferably, the discrete thin films on the donor substrate are obtained by micro-nano processing including electron beam lithography, nanoimprinting and mask deposition.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the invention, the patterned nanoparticle array is implanted into the flexible film by one step of single femtosecond pulse irradiation, so that complex photoetching, spin coating and stripping processes are avoided, and the preparation efficiency is improved;
2. according to the invention, the implantation depth of the nano particles is adjusted by controlling the laser energy, so that the performance and the service life of the prepared material can be regulated and controlled, and flexible films with different hardness can be implanted;
3. the invention does not use any chemical reagent, avoids the damage to the surface and performance of the flexible film, and ensures the environment-friendly process.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
FIG. 1 is a schematic diagram of a method for implanting a nanoparticle array on the surface of a flexible film induced by pulsed femtosecond laser;
FIG. 2 is a schematic diagram of a pulsed femtosecond laser shaping and scanning optical path used in the present invention;
FIG. 3 is a schematic diagram of the implantation process of the patterned nanoparticle array on the surface of the flexible film induced by the pulsed femtosecond laser;
FIG. 4 is a schematic illustration of a flexible film for femtosecond laser induced nanoparticle implantation in accordance with the present invention;
in the figure: a 1-femtosecond laser; 2-pulsing a laser beam; 3-shaping and scanning the optical path; 31-an attenuator; a 32-mirror; 33-beam expander; 34-spatial light modulator or digital micromirror device; 35-scanning a galvanometer; 36-focusing field lens; 4-patterning the beam; a 5-donor substrate; 6-discrete films; 7-nanoparticles; 8-a flexible film; 9-a motion platform.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the inventive concept. These are all within the scope of the present invention.
Examples
As shown in fig. 1, the invention provides a method for implanting nano particles on the surface of a flexible film by pulse femtosecond laser induction, which comprises a femtosecond laser 1, a shaping and scanning light path 3 and a motion platform 9, wherein pulse laser 2 generated by the femtosecond laser 1 is modulated into a specific patterned light beam 4 through the shaping and scanning light path 3, then is focused on the discrete film 6 through a transparent donor substrate 5 carrying the discrete film 6, the discrete film 6 bounces off the donor substrate 5 under the irradiation of the femtosecond laser pulse, and simultaneously melts and contracts into spherical particles, and the spherical particles are embedded into the flexible film 8 at a certain speed, so as to realize the implantation of the nano particles 7 in the flexible film 8.
Further, the pulse femtosecond laser shaping and scanning optical path 3 comprises an attenuator 31, a beam expander 33, a spatial light modulator or digital micro mirror device 34, a scanning galvanometer 35 and a focusing field lens 36, wherein the pulse laser beam 2 generated by the femtosecond laser 1 is subjected to energy and size adjustment through the attenuator 31 and the beam expander 33, then enters the spatial light modulator or digital micro mirror device 34, is shaped into a specific shape and energy distribution, and is focused on the discrete film 6 through the scanning galvanometer 35 and the focusing field lens 36.
Further, the flexible film 8 is tiled on the moving platform 9, the discrete film 6 is placed at a certain position from the upper surface of the flexible film 8, and the irradiation position of the patterned beam 4 is controlled by the scanning galvanometer 35 and the moving platform 9.
Working principle:
as shown in fig. 1, the pulse laser beam 2 generated by the femtosecond laser 1 is energy and size adjusted by an attenuator 31 and a beam expander 33, then is incident to a spatial light modulator or a digital micro-mirror device 34, is shaped into a patterned beam 4 with a specific shape and energy distribution, is focused by a focusing field lens 36 by a scanning galvanometer 35, is irradiated to the back surface of a discrete film 6 by a transparent donor substrate 5, and the discrete film 6 bounces off the donor substrate 5 under the action of the force and heat of the femtosecond laser pulse, and simultaneously is melted and contracted into spherical particles, and is embedded into the flexible film 8 at a certain speed.
The spatial light modulator or digital micromirror device 34 is capable of transforming the two-dimensional shape of the patterned beam 4 to control the shape of the pattern of the single pulse laser implanted nanoparticles; the energy of the patterned beam 4 is controlled by means of an attenuator 31 to adjust the depth of embedding of the nanoparticles 7 in the flexible film 8.
As shown in fig. 3, the invention further provides a method for implanting the patterned nano-particles on the surface of the flexible film induced by the pulsed femtosecond laser, which comprises the following steps:
step S1: the flexible film 8 is tiled on the motion platform 9, and the discrete film 6 is placed at a certain position from the upper surface of the flexible film 8.
Step S2: nanoparticle 7 implantation is performed on the millimeter-sized range of the flexible membrane 8 by scanning the galvanometer 35 to control the focus position of the patterned beam 4.
Step S3: the flexible film 8 is implanted with nano particles 7 with a cm range by driving the motion platform 9 to move.
The effect of the pulsed femtosecond laser to implant the patterned nanoparticles 7 on the flexible thin film 8 is illustrated in fig. 4. Wherein, the flexible film 8 used in the invention is polymethyl methacrylate PMMA, polydimethylsiloxane PDMS, polyethylene terephthalate PET, polyethylene naphthalate PE, polyurethane PU or polyimide PI, and nano particles 7 are implanted on films with different hardness by adjusting the patterned light beam 4.
The discrete thin films 6 on the donor substrate 5 used in the present invention are obtained by electron beam lithography, nanoimprinting, mask deposition or other micro-nano processing.
In the description of the present application, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, merely to facilitate description of the present application and simplify the description, and do not indicate or imply that the devices or elements being referred to must have a specific orientation, be configured and operated in a specific orientation, and are not to be construed as limiting the present application.
Those skilled in the art will appreciate that the systems, apparatus, and their respective modules provided herein may be implemented entirely by logic programming of method steps such that the systems, apparatus, and their respective modules are implemented as logic gates, switches, application specific integrated circuits, programmable logic controllers, embedded microcontrollers, etc., in addition to the systems, apparatus, and their respective modules being implemented as pure computer readable program code. Therefore, the system, the apparatus, and the respective modules thereof provided by the present invention may be regarded as one hardware component, and the modules included therein for implementing various programs may also be regarded as structures within the hardware component; modules for implementing various functions may also be regarded as being either software programs for implementing the methods or structures within hardware components.
The foregoing describes specific embodiments of the present invention. It is to be understood that the invention is not limited to the particular embodiments described above, and that various changes or modifications may be made by those skilled in the art within the scope of the appended claims without affecting the spirit of the invention. The embodiments of the present application and features in the embodiments may be combined with each other arbitrarily without conflict.
Claims (10)
1. A pulsed femtosecond laser induced flexible thin film surface patterned nanoparticle implantation device, comprising: the laser comprises a femtosecond laser (1), a shaping and scanning light path (3), a donor substrate (5), a flexible film (8) and a motion platform (9);
the output end of the femtosecond laser (1) and the input end of the shaping and scanning optical path (3) are horizontally arranged;
the shaping and scanning light path (3) is located above the donor substrate (5);
the flexible film (8) is tiled on the motion platform (9);
the motion platform (9) is positioned below the donor substrate (5);
after the pulse laser (2) generated by the femtosecond laser (1) is modulated into a specific patterned light beam (4) through a shaping and scanning light path (3), the specific patterned light beam is focused on the discrete film (6) through the donor substrate (5) loaded with the discrete film (6), the discrete film (6) is bounced off the donor substrate (5) under the irradiation of the femtosecond laser pulse, and meanwhile, the spherical particles are melted and shrunk, and embedded into the flexible film (8) at a preset speed, so that the implantation of the nano particles (7) in the flexible film (8) is realized.
2. The pulsed femtosecond laser induced flexible thin film surface patterned nanoparticle implantation device according to claim 1, wherein the shaping and scanning optical path (3) comprises: an attenuator (31), a mirror (32), a beam expander (33), a spatial light modulator or digital micromirror device (34), a scanning galvanometer (35) and a focusing field lens (36);
the pulsed laser beam (2) generated by the femtosecond laser (1) is subjected to energy and size adjustment through an attenuator (31), a reflecting mirror (32) and a beam expander (33), then enters a spatial light modulator or a digital micro-mirror device (34), is shaped into a specific shape and energy distribution, and is focused on a discrete film (6) through a scanning galvanometer (35) and a focusing field lens (36).
3. The pulsed femtosecond laser induced flexible thin film surface patterned nanoparticle implantation device according to claim 2, wherein the discrete thin film (6) is placed at a preset position from the upper surface of the flexible thin film (8).
4. The pulsed femtosecond laser induced flexible thin film surface patterned nanoparticle implantation device according to claim 2, wherein the irradiation position of the patterned beam (4) is controlled by a scanning galvanometer (35) and a motion stage (9).
5. The pulsed femtosecond laser induced flexible thin film surface patterned nanoparticle implantation device according to claim 2, wherein the spatial light modulator or digital micromirror device (34) transforms the two-dimensional shape of the patterned beam (4) to control the pattern shape of the single pulsed laser implanted nanoparticles (7).
6. The pulsed femtosecond laser induced flexible thin film surface patterned nanoparticle implantation device according to claim 2, wherein the attenuator (31) controls the patterned beam (4) energy, adjusting the embedding depth of the nanoparticles (7) in the flexible thin film (8).
7. A method for implanting pulse femtosecond laser induced flexible film surface patterned nano-particles, which is characterized in that the method for implanting the pulse femtosecond laser induced flexible film surface patterned nano-particles according to any one of claims 1 to 6 comprises the following steps:
step S1: spreading the flexible film (8) on a motion platform (9), and placing the discrete film (6) at a preset position away from the upper surface of the flexible film (8);
step S2: controlling the focusing position of the patterned beam (4) by scanning a galvanometer (35), and implanting nano-particles (7) in the millimeter size range of the flexible film (8);
step S3: and the flexible film (8) is driven to move through the moving platform (9) to implant nano particles (7) with the centimeter range.
8. The method for implanting the patterned nanoparticles on the surface of the pulsed femtosecond laser induced flexible film according to claim 7, wherein the flexible film (8) is made of polymethyl methacrylate (PMMA), polydimethylsiloxane (PDMS), polyethylene terephthalate (PET), polyethylene naphthalate (PE), polyurethane (PU) and Polyimide (PI).
9. The pulsed femtosecond laser induced flexible thin film surface patterned nanoparticle implantation method according to claim 7, wherein nanoparticles (7) are implanted on thin films of different hardness by adjusting the patterned beam (4).
10. The pulsed femtosecond laser induced flexible thin film surface patterned nanoparticle implantation method according to claim 7, wherein the discrete thin film (6) on the donor substrate (5) is obtained by micro-nano processing means including electron beam lithography, nanoimprinting and mask deposition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311475741.0A CN117301500A (en) | 2023-11-07 | 2023-11-07 | Pulse femtosecond laser induced flexible film surface patterning nanoparticle implantation device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311475741.0A CN117301500A (en) | 2023-11-07 | 2023-11-07 | Pulse femtosecond laser induced flexible film surface patterning nanoparticle implantation device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117301500A true CN117301500A (en) | 2023-12-29 |
Family
ID=89260458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311475741.0A Pending CN117301500A (en) | 2023-11-07 | 2023-11-07 | Pulse femtosecond laser induced flexible film surface patterning nanoparticle implantation device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117301500A (en) |
-
2023
- 2023-11-07 CN CN202311475741.0A patent/CN117301500A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Yuan et al. | Ultrafast three-dimensional printing of optically smooth microlens arrays by oscillation-assisted digital light processing | |
| Lu et al. | A Self‐Assembly Approach to the Fabrication of Patterned, Two‐Dimensional Arrays of Microlenses of Organic Polymers | |
| Maruo et al. | Recent progress in multiphoton microfabrication | |
| US9272474B2 (en) | 3D mold for manufacturing of sub-micron 3D structures using 2-D photon lithography and nanoimprinting and process thereof | |
| Malinauskas et al. | Ultrafast laser nanostructuring of photopolymers: A decade of advances | |
| KR101247619B1 (en) | Apparatus and Method for nanoscale laser sintering of metal nanoparticles | |
| CN102967890B (en) | Simple preparation method and application of polydimethylsiloxane (PDMS) polymer microlens array | |
| Behera et al. | Current challenges and potential directions towards precision microscale additive manufacturing–Part II: Laser-based curing, heating, and trapping processes | |
| US10500796B1 (en) | Dynamic tissue microfabrication through digital photolithography system and methods | |
| Malinauskas et al. | Two-photon polymerization for fabrication of three-dimensional micro-and nanostructures over a large area | |
| CN101192002A (en) | Magnetism remote-controlled drive microstructure preparation method | |
| Malinauskas et al. | Nanophotonic lithography: a versatile tool for manufacturing functional three-dimensional micro-/nano-objects | |
| Gao et al. | 3D printed optics and photonics: processes, materials and applications | |
| CN113764548A (en) | Transfer method of micro device | |
| CN112872591A (en) | System and method for quickly preparing high-length-diameter-ratio polymer microcolumn by femtosecond laser | |
| CN117301500A (en) | Pulse femtosecond laser induced flexible film surface patterning nanoparticle implantation device and method | |
| Stokes et al. | Advances in lithographic techniques for precision nanostructure fabrication in biomedical applications | |
| Maruyama et al. | Massive parallel assembly of microbeads for fabrication of microtools having spherical structure and powerful laser manipulation | |
| Park et al. | Fabrication of nano-precision PDMS replica using two-photon photopolymerization and vacuum pressure difference technique | |
| Steenhusen et al. | Two-photon polymerization of hybrid polymers for applications in micro-optics | |
| Spanos et al. | 3D magnetic microstructures | |
| CN112172136B (en) | Moth compound eye bionic optical device based on super-resolution laser radiation and 3D printing method and application thereof | |
| Bonakdar et al. | Tilted exposure microsphere nanolithography for high-throughput and mask-less fabrication of plasmonic molecules | |
| EP4057067A1 (en) | Microstructure and method for manufacturing same | |
| Zhu et al. | Free-Form Micro-Lens Array Fabrication via Laser Micro-Lens Array Lithography. |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |