CN117265640A - Annular overhauling platform for monocrystalline silicon furnace - Google Patents
Annular overhauling platform for monocrystalline silicon furnace Download PDFInfo
- Publication number
- CN117265640A CN117265640A CN202311294324.6A CN202311294324A CN117265640A CN 117265640 A CN117265640 A CN 117265640A CN 202311294324 A CN202311294324 A CN 202311294324A CN 117265640 A CN117265640 A CN 117265640A
- Authority
- CN
- China
- Prior art keywords
- ladder
- guide rail
- monocrystalline silicon
- maintenance
- track
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 83
- 238000012423 maintenance Methods 0.000 claims abstract description 103
- 241000282326 Felis catus Species 0.000 claims description 65
- 230000000694 effects Effects 0.000 claims description 4
- 238000005096 rolling process Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 8
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 4
- 235000017491 Bambusa tulda Nutrition 0.000 description 4
- 241001330002 Bambuseae Species 0.000 description 4
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 4
- 239000011425 bamboo Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000009194 climbing Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to an annular maintenance platform for a monocrystalline silicon furnace, which comprises an annular track arranged around the circumference of the monocrystalline silicon furnace and a maintenance platform arranged on the annular track, wherein the maintenance platform comprises a track trolley and a maintenance ladder, the track trolley is movably clamped on the annular track, the maintenance ladder is vertically arranged on the track trolley, the lower end of the maintenance ladder and one end of the track trolley far away from the monocrystalline silicon furnace are in pin joint, an angle adjusting bracket is arranged on the inner side of the maintenance ladder, which faces the monocrystalline silicon furnace, of the maintenance ladder, the lower end of the angle adjusting bracket is in pin joint with one end of the track trolley, which is close to the monocrystalline silicon furnace, and the upper end of the angle adjusting bracket is in pin joint with the waist of the maintenance ladder so as to support the maintenance ladder.
Description
Technical Field
The invention relates to the technical field of monocrystalline silicon furnace maintenance ladders, in particular to an annular maintenance platform for a monocrystalline silicon furnace.
Background
The monocrystalline silicon furnace is a device for growing dislocation-free single crystals by using a Czochralski method in an inert gas environment by using a graphite heater to melt polycrystalline materials such as polycrystalline silicon and the like. The monocrystalline silicon furnace is difficult to avoid problems in the use process, the monocrystalline silicon furnace is required to be overhauled and maintained, in order to be convenient for overhauling and maintaining components and parts at the top end of the monocrystalline silicon furnace, the existing monocrystalline silicon furnace is generally provided with a vertical ladder at one side of the monocrystalline silicon furnace, workers ascend through the ladder, but the ladder is only fixed at one side of the monocrystalline silicon furnace and cannot change the direction, the working range of the workers is limited, the components and parts at one side of the arranged ladder are only convenient to overhaul, the components and parts at the other side of the monocrystalline silicon furnace are far away from the ladder, the workers are required to climb out of the ladder to finish the operation when overhauling or replacing the components and parts, the operation is very inconvenient, the newer monocrystalline silicon furnace at present is generally eight meters high, the latest has ten meters high, and certain potential safety hazards exist when the workers climb out of the ladder.
To this technical problem, among the prior art, the authorized bulletin number is CN215289035U, a novel single crystal furnace for semiconductor production and processing is disclosed, through set up the bearing ring at the stove section of thick bamboo base, set up the maintenance frame in one side of bearing ring, the maintenance frame is installed the fixed slot inside of bearing ring front end through the fixed transverse block of bottom, the contact ring that the top of maintenance frame set up is fixed on the surface of the auxiliary chamber on stove section of thick bamboo top, during the maintenance, remove the maintenance frame according to the maintenance position, so as to carry out diversified maintenance to the single crystal silicon stove, but this maintenance frame is in the use, the staff has overhauld one side, when carrying out the change maintenance position, need step down earlier, tear down the maintenance frame, remove the maintenance frame again and carry out the secondary after to suitable position, so, it is very inconvenient to lead to removing the maintenance frame, moreover, the staff need climb repeatedly when removing the maintenance frame, there is certain potential safety hazard, also be unfavorable for the staff to overhaul, work efficiency is low, moreover, the top of this frame needs lean on stove section of thick bamboo top lateral wall, lead to the staff to on the top of the top, and the maintenance device can be carried out with the maintenance of a section of thick bamboo, the maintenance device is convenient.
Disclosure of Invention
In view of the foregoing, it is desirable to provide an annular inspection platform for a silicon single crystal furnace that is capable of moving circumferentially around the silicon single crystal furnace and is convenient to inspect.
The utility model provides an annular maintenance platform for monocrystalline silicon stove, includes the annular orbit that sets up around monocrystalline silicon stove circumference and sets up the maintenance platform on annular orbit, maintenance platform includes track dolly and maintenance cat ladder, track dolly activity card is established on annular orbit, the vertical setting of maintenance cat ladder is on track dolly, and the one end pin joint of monocrystalline silicon stove is kept away from to the lower extreme of maintenance cat ladder and track dolly, and the upper end of maintenance cat ladder is the free end, is provided with angle adjusting bracket towards the inboard of monocrystalline silicon stove at the maintenance cat ladder, the lower extreme of angle adjusting bracket is close to the one end pin joint of monocrystalline silicon stove with track dolly, the upper end of angle adjusting bracket and the waist pin joint of maintenance cat ladder to support the maintenance cat ladder, the length of angle adjusting bracket can carry out telescopic adjustment, changes the contained angle between maintenance cat ladder and the track dolly, so that the top of maintenance cat ladder can be close to or keep away from monocrystalline silicon stove, the track dolly can drive the maintenance cat ladder and move around monocrystalline silicon stove circumference along annular orbit in order to carry out all-round maintenance to the monocrystalline silicon stove.
Preferably, the angle adjusting bracket comprises a screw rod, a shaft seat and a connecting base, wherein the connecting base is fixedly arranged at one end of the rail trolley, which is close to the monocrystalline silicon furnace, the shaft seat is in pin joint with the connecting base, a worm wheel and a worm are arranged on the shaft seat, the worm is in meshed connection with the worm wheel, an inner cavity of the worm wheel is processed into an inner thread, the lower end of the screw rod is in threaded fit connection with the worm wheel, the upper end of the screw rod is in pin joint with the waist of the maintenance cat ladder, the maintenance cat ladder is supported and pulled through the screw rod, the worm is externally connected with a hand wheel, the worm wheel is rotated through the hand wheel, the worm wheel is driven to rotate, the screw rod is pushed to move up and down through the worm wheel, and the included angle between the maintenance cat ladder and the rail trolley is adjusted, so that the top end of the maintenance cat ladder can be close to or supported to push the maintenance cat ladder to be away from the monocrystalline silicon furnace.
Preferably, the maintenance cat ladder includes supporting ladder and companion ladder, the lower extreme and the track dolly pin joint of supporting ladder, the upper end of lead screw and the waist pin joint of supporting ladder, the guide slot has been seted up on the supporting ladder, the guide slot is seted up along the length direction of supporting ladder, the companion ladder card is established on the guide slot of supporting ladder, and is parallel with the supporting ladder to can be followed the upper end direction of guide slot to supporting ladder and flexible, be provided with tractor and haulage rope on track dolly or the supporting ladder, be provided with the pulley on the top of supporting ladder, the one end winding connection of haulage rope is on the tractor, and pulley and companion ladder's lower extreme fixed connection are walked around to the other end of haulage rope, the tractor winds the rope and receive and releases, pulls the companion ladder through the haulage rope and slides along the guide slot of supporting ladder, carries out altitude mixture control.
Preferably, a safety fence is arranged at the top of the elevator.
Preferably, the annular track comprises an inner guide rail and an outer guide rail, the inner guide rail and the outer guide rail are arranged around the circumference of the monocrystalline silicon furnace, the inner guide rail and the outer guide rail are parallel to each other and the circle centers coincide, the inner guide rail and the outer guide rail are T-shaped guide rails, the lower ends of the rail trolleys are respectively provided with I-shaped idler wheels matched with the inner guide rail and the outer guide rail, the I-shaped idler wheels are clamped on two sides of the T-shaped guide rail and are mutually clamped and connected with the T-shaped guide rail, traction force is formed on the rail trolleys through the inner guide rail and the outer guide rail, and the rail trolleys are prevented from derailing.
Preferably, the bottom of the track trolley is further provided with a travelling mechanism, the travelling mechanism comprises a driving motor and a driving roller, the driving roller is arranged on an output shaft of the driving motor, a rolling surface of the driving roller is in friction contact with the inner guide rail or the outer guide rail, and the driving roller can roll along the inner guide rail or the outer guide rail through driving of the driving motor so as to drive the track trolley to move along the inner guide rail and the outer guide rail.
The invention adopts the technical proposal and has the beneficial effects that: through the annular track arranged around the circumference of the monocrystalline silicon furnace, the movable clamp of the track trolley is arranged on the annular track, the overhaul ladder is vertically arranged on the track trolley, the angle adjusting bracket is utilized to support the overhaul ladder, the overhaul ladder is erected at the upper end of the track trolley, the staff drives the overhaul ladder to move around the circumference of the monocrystalline silicon furnace along the annular track through the track trolley in the overhaul process of the monocrystalline silicon furnace, the overhaul direction of the overhaul ladder can be changed without the need of up-down overhaul ladder,
and the maintenance efficiency is improved. And moreover, the distance between the top end of the overhaul stand and the monocrystalline silicon furnace can be flexibly adjusted by adjusting the length of the angle adjusting bracket, so that the better operation distance between the overhaul stand and the monocrystalline silicon furnace is kept, and the overhaul by workers is facilitated.
Drawings
Fig. 1 is a schematic side view of the invention.
Fig. 2 is a schematic perspective view of the present invention.
Fig. 3 is a schematic structural view of the maintenance platform.
Fig. 4 is a schematic diagram of a mounting structure of a track car and a circular track.
In the figure: monocrystalline silicon furnace 10, annular track 20, track trolley 301, maintenance cat ladder 302, angle adjusting bracket 303, lead screw 3031, shaft seat 3032, connection base 3033, worm 3034, hand wheel 3035, support ladder 3021, elevator 3022, guide slot 3023, safety rail 3024, tractor 304, hauling rope 305, pulley 306, traction wheel 308, inner guide rail 201, outer guide rail 202, I-shaped roller 309, base 310, and,
A traveling mechanism 307, a driving motor 3071, and a driving roller 3072.
Detailed Description
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Referring to fig. 1 to 4, the embodiment of the invention provides an annular maintenance platform for a monocrystalline silicon furnace, which comprises an annular track 20 and a maintenance platform, wherein the annular track 20 is arranged around the circumference of the monocrystalline silicon furnace 10, the maintenance platform is arranged on the annular track 20, the maintenance platform comprises a track trolley 301 and a maintenance cat ladder 302, the track trolley 301 is movably clamped on the annular track 20, the maintenance cat ladder 302 is vertically arranged on the track trolley 301, the lower end of the maintenance cat ladder 302 and one end of the track trolley 301 far away from the monocrystalline silicon furnace 10 are in pin joint, the upper end of the maintenance cat ladder 302 is a free end, an angle adjusting bracket 303 is arranged on the inner side of the maintenance cat ladder 302, which faces the monocrystalline silicon furnace 10, and the lower end of the angle adjusting bracket 303 and one end of the track trolley 301, which is close to the monocrystalline silicon furnace 10, are in pin joint, so as to support the maintenance cat ladder 302, the length of the angle adjusting bracket 303 can be in telescopic adjustment, so that the included angle between the cat ladder 302 and the track trolley 301 can be changed, the top end of the maintenance cat ladder 302 can be close to or far away from the monocrystalline silicon furnace 10, and the monocrystalline silicon furnace 301 can be moved around the circumference of the monocrystalline silicon furnace 10, and the monocrystalline silicon furnace 10 can be conveniently carried out along the circumference of the annular track trolley 10.
Specifically, the annular rail 20 includes an inner rail 201 and an outer rail 202, the diameter of the outer rail 202 is larger than that of the inner rail 201, the inner rail 201 and the outer rail 202 are centered on the single crystal silicon furnace 10 and are arranged around the circumference of the bottom of the single crystal silicon furnace 10, the inner rail 201 and the outer rail 202 are parallel to each other and have the same circle center, the inner rail 201 and the outer rail 202 are both rails with T-shaped structures, the four corners of the lower end of the rail trolley 301 are respectively provided with an I-shaped roller 309 matched with the rails with T-shaped structures, the I-shaped roller 309 is respectively clamped on two sides of the inner rail 201 and the outer rail 202 longitudinally and can roll freely along the inner rail 201 and the outer rail 202, the maintenance ladder 302 is vertically arranged on the rail trolley 301, a base 310 is arranged at the outer side of the rail trolley 301, namely, the end far away from the single crystal silicon furnace 10, the lower end of the maintenance ladder 302 is pinned with the base 310, the upper end of the maintenance cat ladder 302 is a free end, extends to the height direction of the monocrystalline silicon furnace 10 and can rotate along the direction of the base 310 towards the monocrystalline silicon furnace 10, the angle adjusting bracket 303 is arranged at the inner side of the maintenance cat ladder 302 towards the monocrystalline silicon furnace 10, the upper end of the angle adjusting bracket 303 is in pin joint with the waist part of the maintenance cat ladder 302, the lower end of the angle adjusting bracket 303 is in pin joint with one end of the track trolley 301 close to the monocrystalline silicon furnace 10 and is opposite to the base 310 so as to support the maintenance cat ladder 302, the maintenance cat ladder 302 is erected at the upper end of the track trolley 301, the upper end of the maintenance cat ladder 302 is suspended and is not contacted with the monocrystalline silicon furnace 10, the angle adjusting bracket 303 can be used for extending or shortening adjustment, the included angle between the maintenance cat ladder 302 and the track trolley 301 is changed, when the angle adjusting bracket 303 is shortened, the maintenance cat ladder 302 can be pulled to rotate along the direction of the base 310 towards the monocrystalline silicon furnace 10, when the angle adjusting bracket 303 is extended, the overhaul cat ladder 302 can be pushed to rotate towards the outer side direction of the track trolley 301, the upper end of the overhaul cat ladder 302 is far away from the monocrystalline silicon furnace 10, so that an operator can keep an effective operation distance with components needing to be maintained at the top end of the monocrystalline silicon furnace 10 after climbing the overhaul cat ladder 302, so that the operator can overhaul and maintain the overhaul cat ladder 302, the support force is provided by the track trolley 301, the I-shaped roller 309 arranged at the lower end of the track trolley 301 is used for being clamped and connected with the guide rail of the T-shaped structure, the guide rail of the T-shaped structure can play a role in limiting and pulling the track trolley 301, the track trolley 301 is tightly attached to the inner guide rail 201 and the outer guide rail 202, the track trolley 301 is prevented from derailing, in the overhaul process of the monocrystalline silicon furnace 10, the operator does not need to push the track trolley 301 up and down in an auxiliary manner, the operator can move along the annular track 20, and the overhaul cat ladder 302 can move around the monocrystalline silicon furnace 10 circumferentially, the overhaul efficiency is improved.
Referring to fig. 2, further, the angle adjusting bracket 303 includes a screw rod 3031, a shaft seat 3032 and a connection base 3033, the connection base 3033 is fixedly disposed at one end of the trolley 301 close to the monocrystalline silicon furnace 10, the shaft seat 3032 is in pin connection with the connection base 3033, a worm wheel and a worm 3034 are disposed on the shaft seat 3032, the worm 3034 is meshed with the worm wheel, an inner cavity of the worm wheel is processed into an internal thread, the lower end of the screw rod 3031 is in threaded fit connection with the worm wheel, the upper end of the screw rod 3031 is in pin connection with a waist of the maintenance cat ladder 302, the maintenance cat ladder 302 is supported and pulled by the screw rod 3031, the worm 3034 is externally connected with a hand wheel 3035, when the length of the angle adjusting bracket 303 is adjusted, the hand wheel 3035 is manually rotated, the worm wheel is driven to rotate by the hand wheel 3035, the screw rod 3031 is pushed to move up and down by the worm wheel so as to change the supporting length of the screw rod 3031, and adjust the included angle between the maintenance cat ladder 302 and the trolley 301, so that the top end of the maintenance cat 302 can approach or push the maintenance cat 302 to the direction of the monocrystalline silicon furnace 10, and the maintenance cat 10 can conveniently contact the monocrystalline silicon furnace 10 when the maintenance staff is in the process. In this embodiment, the hand wheel 3035 may be electronically controlled by an electric motor instead. In another preferred embodiment, the angle adjusting bracket 303 can be replaced by a hydraulic cylinder, a cylinder or an adjusting screw.
Referring to fig. 2 and 3, further, the maintenance cat ladder 302 includes a supporting ladder 3021 and an elevator 3022, the lower end of the supporting ladder 3021 is in pin connection with the trolley 301, the upper end of the lead screw 3031 is in pin connection with the waist of the supporting ladder 3021, a guide slot 3023 is formed in the supporting ladder 3021, the guide slot 3023 is formed along the length direction of the supporting ladder 3021, the elevator 3022 is clamped on the guide slot 3023 of the supporting ladder 3021 and is parallel to the supporting ladder 3021, a tractor 304 and a traction rope 305 are arranged on the trolley 301, the tractor 304 is an electric tractor, a traction wheel 308 is arranged on an output shaft of the tractor 304, a pulley 306 is arranged at the top end of the supporting ladder 3021, one end of the traction rope 305 is wound on the traction wheel 308 of the tractor 304, the other end of the traction rope 305 is wound around the pulley 306 and is fixedly connected with the lower end of the elevator 3022, the traction rope 305 is wound up along the guide slot 3023 of the supporting ladder 3021, the traction rope 305 is pulled up by the traction rope 3022, the traction rope 305 slides up along the guide slot 3023 along the guide slot 3021 and is lifted up by the traction rope 3022, the traction rope 305 is pulled up by the traction rope 305, and is lowered down the elevator 304 is driven by the traction rope to the elevator 304, and is lowered by the opposite direction of the elevator 10, and the elevator is lowered by the gravity of the elevator 10, and the elevator is lowered by the user, and the elevator is lowered by the effect of the elevator is lowered by the opposite to the lift and has the effect of the lift 2.
Referring to fig. 3, further, a safety fence 3024 is disposed on the top of the elevator 3022, and the safety fence 3024 plays a role in protecting the monocrystalline silicon furnace 10 during maintenance.
With continued reference to fig. 2 and 3, further, in order to facilitate the movement of the rail car 301, a travelling mechanism 307 is further provided at the bottom of the rail car 301, the travelling mechanism 307 includes a driving motor 3071 and a driving roller 3072, the driving motor 3071 is a servo motor, the driving roller 3072 is disposed on an output shaft of the driving motor 3071, and a rolling surface of the driving roller 3072 is in frictional contact with the inner rail 201 or the outer rail 202, and can be driven by the driving motor 3071 to roll along the inner rail 201 or the outer rail 202 so as to drive the rail car 301 to move along the inner rail 201 and the outer rail 202. The control switch of the driving motor 3071 can be arranged on the elevator 3022, so that in the maintenance process, a worker can control the movement of the track trolley 301 by standing on the elevator 3022, the operation is convenient and quick, and the working efficiency is improved.
When the device is specifically used, a worker can control the tractor 304 to lift the elevator 3022 according to maintenance requirements, the elevator 3022 is enabled to reach a proper height, the worker can control the travelling mechanism 307 according to requirements in the overhaul and maintenance process of components at the top end of the monocrystalline silicon furnace 10 on the elevator 3022, the travelling mechanism 307 is driven by the travelling mechanism 307 to move along the annular track 20, the overhaul cat ladder 302 is driven by the travelling mechanism 307 to move around the monocrystalline silicon furnace 10 so as to conveniently replace the overhaul orientation of the overhaul cat ladder 302, in the overhaul process, the worker can control the worm 3034 of the angle adjusting bracket 303 to rotate through the motor, the distance between the overhaul cat ladder 302 and the monocrystalline silicon furnace 10 is adjusted, a better working space is kept between the overhaul cat ladder 302 and the monocrystalline silicon furnace 10, and the overhaul of the worker is facilitated.
The foregoing disclosure is illustrative of the preferred embodiments of the present invention, and is not to be construed as limiting the scope of the invention, as it is understood by those skilled in the art that all or part of the above-described embodiments may be practiced with equivalents thereof, which fall within the scope of the invention as defined by the appended claims.
Claims (6)
1. An annular overhauling platform for a monocrystalline silicon furnace is characterized in that: including the annular orbit that sets up around monocrystalline silicon stove circumference and the maintenance platform of setting on annular orbit, maintenance platform includes track dolly and maintenance cat ladder, track dolly activity card is established on annular orbit, maintenance cat ladder vertical setting is on track dolly, and the lower extreme of maintenance cat ladder and the one end pin joint of monocrystalline silicon stove are kept away from to track dolly, and maintenance cat ladder's upper end is the free end, is provided with the angle modulation support towards the inboard of monocrystalline silicon stove at maintenance cat ladder, the lower extreme of angle modulation support and the one end pin joint of track dolly near monocrystalline silicon stove, the upper end of angle modulation support and the waist pin joint of maintenance cat ladder are in order to support maintenance cat ladder, the length of angle modulation support can carry out telescopic adjustment, changes the contained angle between maintenance cat ladder and the track dolly to make the top of maintenance cat ladder be close to or keep away from monocrystalline silicon stove, the track dolly can drive maintenance cat ladder and move around monocrystalline silicon stove circumference along annular orbit, so that carry out all-round maintenance to monocrystalline silicon stove.
2. The annular overhaul platform for a single crystal silicon furnace according to claim 1, wherein: the angle adjusting support comprises a screw rod, a shaft seat and a connecting base, wherein the connecting base is fixedly arranged at one end of the rail trolley, which is close to the monocrystalline silicon furnace, the shaft seat is in pin joint with the connecting base, a worm wheel and a worm are arranged on the shaft seat, the worm is meshed with the worm wheel, the inner cavity of the worm wheel is processed into an internal thread, the lower end of the screw rod is connected with the worm wheel in a threaded fit manner, the upper end of the screw rod is in pin joint with the waist of the maintenance cat ladder, the maintenance cat ladder is supported and pulled through the screw rod, the worm is externally connected with a hand wheel, the worm wheel is rotated through the hand wheel, the worm wheel is driven to rotate, the screw rod is pushed to move up and down through the worm wheel, and the included angle between the maintenance cat ladder and the rail trolley is adjusted, so that the top end of the maintenance cat ladder can be close to or support the direction of the monocrystalline silicon furnace to push the maintenance cat ladder away from the monocrystalline silicon furnace.
3. The annular overhaul platform for a single crystal silicon furnace according to claim 2, wherein: the maintenance cat ladder includes supporting ladder and companion ladder, the lower extreme and the track dolly pin joint of supporting ladder, the upper end of lead screw and the waist pin joint of supporting ladder, the guide slot has been seted up on the supporting ladder, the guide slot is seted up along the length direction of supporting ladder, the companion ladder card is established on the guide slot of supporting ladder, and is parallel with the supporting ladder to can be followed the guide slot and to the upper end direction of supporting ladder flexible, be provided with tractor and haulage rope on track dolly or the supporting ladder, be provided with the pulley on the top of supporting ladder, the one end winding connection of haulage rope is on the tractor, the other end of haulage rope bypasses pulley and the lower extreme fixed connection of companion ladder, the tractor winds the receipts to the haulage rope, pulls the companion ladder to slide along the guide slot of supporting ladder through the haulage rope, carries out altitude mixture control.
4. An annular overhaul platform for a single crystal silicon furnace as claimed in claim 3, wherein: the top of companion ladder is provided with the security fence.
5. The annular overhaul platform for a single crystal silicon furnace according to claim 1 or 4, wherein: the annular track comprises an inner guide rail and an outer guide rail, the inner guide rail and the outer guide rail are arranged around the circumference of the monocrystalline silicon furnace, the inner guide rail and the outer guide rail are parallel to each other and the circle centers coincide, the inner guide rail and the outer guide rail are T-shaped guide rails, the lower ends of the track trolleys are respectively provided with I-shaped idler wheels matched with the inner guide rail and the outer guide rail, the I-shaped idler wheels are clamped on two sides of the T-shaped guide rail and are mutually clamped and connected with the T-shaped guide rail, traction force is formed on the track trolleys through the inner guide rail and the outer guide rail, and the track trolleys are prevented from derailing.
6. The annular overhaul platform for a single crystal silicon furnace according to claim 5, wherein: the bottom of the track trolley is also provided with a travelling mechanism, the travelling mechanism comprises a driving motor and a driving roller, the driving roller is arranged on an output shaft of the driving motor, a rolling surface of the driving roller is in friction contact with the inner guide rail or the outer guide rail, and the driving roller can roll along the inner guide rail or the outer guide rail through driving of the driving motor so as to drive the track trolley to move along the inner guide rail and the outer guide rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311294324.6A CN117265640A (en) | 2023-10-08 | 2023-10-08 | Annular overhauling platform for monocrystalline silicon furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311294324.6A CN117265640A (en) | 2023-10-08 | 2023-10-08 | Annular overhauling platform for monocrystalline silicon furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117265640A true CN117265640A (en) | 2023-12-22 |
Family
ID=89215770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311294324.6A Pending CN117265640A (en) | 2023-10-08 | 2023-10-08 | Annular overhauling platform for monocrystalline silicon furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117265640A (en) |
-
2023
- 2023-10-08 CN CN202311294324.6A patent/CN117265640A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203282964U (en) | Wheel assembly installing and dismounting device | |
| CN207072792U (en) | A kind of road and bridge construction lowering or hoisting gear | |
| CN117265640A (en) | Annular overhauling platform for monocrystalline silicon furnace | |
| CN217281825U (en) | Support frame for automatic maintenance of power dispatching | |
| CN214570537U (en) | Safety protection lift for aerial work platform | |
| CN112897364B (en) | Tool trolley for hoisting GIL through pipe | |
| CN212249118U (en) | Installation device for sliding contact line of crown block | |
| CN113845019A (en) | Road and bridge barrier disassembling clamp | |
| CN109406894B (en) | Strip line device | |
| CN111980392A (en) | Crown block sliding contact line installation device and construction method thereof | |
| CN217051543U (en) | Rail mounted's removal maintenance platform under converter stove | |
| CN213508087U (en) | Conveying device for bottom die support of longitudinal wet joint of steel box girder | |
| CN111302235A (en) | Tower crane with good protection performance | |
| CN217320342U (en) | High altitude is maintenance device for special equipment | |
| CN219175810U (en) | Safety construction frame convenient to construct | |
| CN220618206U (en) | Pickling crane | |
| CN114920163B (en) | Multifunctional yaw clamp dismounting tool | |
| CN216425652U (en) | Portable removal frame of transformer | |
| CN218843695U (en) | Asynchronous hanging basket for cantilever cast-in-place | |
| CN117361311B (en) | Climbing ladder preparation hoisting accessory | |
| CN220245365U (en) | Steel wire rope traction device of engineering crane | |
| CN215801009U (en) | Safety platform is used in bridge maintenance | |
| CN220467376U (en) | Chain type acid pickling crane | |
| CN217972493U (en) | Safe lifting device of maintenance vehicle | |
| CN216664907U (en) | Civil engineering is with construction support |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |