CN117260407B - Detection method of polishing equipment - Google Patents
Detection method of polishing equipment Download PDFInfo
- Publication number
- CN117260407B CN117260407B CN202311548117.9A CN202311548117A CN117260407B CN 117260407 B CN117260407 B CN 117260407B CN 202311548117 A CN202311548117 A CN 202311548117A CN 117260407 B CN117260407 B CN 117260407B
- Authority
- CN
- China
- Prior art keywords
- polishing
- moment
- motor
- change rate
- polishing head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 616
- 238000001514 detection method Methods 0.000 title claims abstract description 81
- 230000008859 change Effects 0.000 claims abstract description 163
- 238000000034 method Methods 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 29
- 230000002159 abnormal effect Effects 0.000 claims description 18
- 238000001914 filtration Methods 0.000 claims description 6
- 238000005070 sampling Methods 0.000 claims description 6
- 230000005856 abnormality Effects 0.000 description 7
- 239000007788 liquid Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
- B24B41/047—Grinding heads for working on plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Abstract
The invention discloses a detection method of polishing equipment, which comprises the following steps: collecting the moment of a polishing disc motor in real time and collecting the moment of a polishing head motor in real time; calculating the moment change rate of the polishing disc motor; calculating a sliding average value of the moment change rate of the polishing disc motor; calculating the moment change rate of the polishing head motor; calculating a sliding average value of the moment change rate of the polishing head motor; comparing the relation between the sliding average value of the moment change rate of the polishing disc motor and a first preset value and the relation between the sliding average value of the moment change rate of the polishing head motor and a second preset value; and outputting a first detection result signal when the sliding average value of the moment change rate of the polishing disc motor is larger than a first preset value and the sliding average value of the moment change rate of the polishing head motor is larger than a second preset value. Therefore, the detection method of the polishing equipment can be optimized, and the occurrence of broken discharge sheets can be timely and accurately detected.
Description
Technical Field
The invention relates to the technical field of polishing, in particular to a detection method of polishing equipment.
Background
SiC (silicon carbide) is an excellent third-generation semiconductor material, is mainly applied to high-power application, and has the characteristics of high hardness, corrosion resistance and fragility. CMP (chemical mechanical planarization) is the last processing step in SiC substrate processing to obtain a perfect defect-free surface. Because the SIC sheet is a hard and brittle material, the thickness is very thin, generally about 350um, so that the condition of breaking the sheet easily occurs in the polishing process. If not found in time, the problem often causes serious consequences such as polishing pad damage, polishing head air film damage and the like, and causes a lot of loss.
In the related art, fragments during polishing are usually detected by an optical method or a temperature detection method, but since the SiC wafer is semitransparent, the polishing solution is dark purple, and cannot be detected by an optical method, and at present, the fragments are detected by detecting the change of the surface temperature of the polishing pad. However, because the change of the surface temperature of the polishing pad is influenced by various factors such as pressure, polishing solution, polishing pad and the like, and meanwhile, the change of the temperature needs a certain stabilizing process time and has hysteresis, the problems of misjudgment, missed judgment, untimely detection and the like are also easy to occur by adopting a temperature detection method.
Disclosure of Invention
The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, an object of the present invention is to provide a method for detecting a polishing apparatus, which can detect the occurrence of breakage of a web more timely and accurately.
The detection method of the polishing equipment according to the embodiment of the invention comprises the following steps: collecting the moment of a polishing disc motor in real time and collecting the moment of a polishing head motor in real time; calculating the moment change rate of the polishing disc motor according to the moment of the polishing disc motor acquired in real time; calculating a sliding average value of the moment change rate of the polishing disc motor according to the moment change rate of the polishing disc motor; calculating the moment change rate of the polishing head motor according to the moment of the polishing head motor acquired in real time; calculating a sliding average value of the moment change rate of the polishing head motor according to the moment change rate of the polishing head motor; comparing the relation between the sliding average value of the moment change rate of the polishing disc motor and a first preset value, and comparing the relation between the sliding average value of the moment change rate of the polishing head motor and a second preset value; when the sliding average value of the moment change rate of the polishing disc motor is larger than a first preset value and the sliding average value of the moment change rate of the polishing head motor is larger than a second preset value, outputting a first detection result signal, wherein the first detection result signal is that a tablet on the polishing equipment breaks.
Therefore, by comparing the relation between the sliding average value of the moment change rate of the polishing disc motor and the first preset value and the relation between the sliding average value of the moment change rate of the polishing head motor and the second preset value, when the sliding average value of the moment change rate of the polishing disc motor is larger than the first preset value and the sliding average value of the moment change rate of the polishing head motor is larger than the second preset value, a first detection result signal indicating that the sheet on the polishing equipment breaks is output, the detection method of the polishing equipment can be optimized, the sheet breaking of the discharging sheet can be timely and accurately detected, and the damage of the polishing equipment is avoided.
In some examples of the present invention, after the step of comparing the relation between the sliding average value of the moment change rate of the polishing disc motor and the first preset value, the step of comparing the relation between the sliding average value of the moment change rate of the polishing head motor and the second preset value further includes: and outputting a second detection result signal when the sliding average value of the moment change rate of the polishing disc motor is larger than a first preset value and the sliding average value of the moment change rate of the polishing head motor is not larger than a second preset value, wherein the second detection result signal is that the polishing equipment is abnormal.
In some examples of the present invention, after the step of comparing the relation between the sliding average value of the moment change rate of the polishing disc motor and the first preset value, the step of comparing the relation between the sliding average value of the moment change rate of the polishing head motor and the second preset value further includes: and outputting a second detection result signal when the sliding average value of the moment change rate of the polishing disc motor is not larger than a first preset value and the sliding average value of the moment change rate of the polishing head motor is larger than a second preset value, wherein the second detection result signal is that the polishing equipment is abnormal.
In some examples of the present invention, after the step of comparing the relation between the sliding average value of the moment change rate of the polishing disc motor and the first preset value, the step of comparing the relation between the sliding average value of the moment change rate of the polishing head motor and the second preset value further includes: and outputting a third detection result signal when the sliding average value of the moment change rate of the polishing disc motor is not greater than a first preset value and the sliding average value of the moment change rate of the polishing head motor is not greater than a second preset value, wherein the third detection result signal is that the polishing equipment runs normally.
In some examples of the present invention, the step of acquiring the moment of the polishing disc motor in real time, and the step of acquiring the moment of the polishing head motor in real time, comprises: collecting a current signal of the polishing disc motor, filtering the current signal of the polishing disc motor by adopting a low-pass filter, and eliminating high-frequency noise; calculating the moment of the polishing disc motor according to the filtered current signal of the polishing disc motor; collecting a current signal of the polishing head motor, filtering the current signal of the polishing head motor by adopting a low-pass filter, and eliminating high-frequency noise; and calculating the moment of the polishing head motor according to the filtered current signal of the polishing head motor.
In some examples of the present invention, the step of calculating the torque of the polishing pad motor from the filtered current signal of the polishing pad motor includes: setting the moment of the polishing disc motor as T1, wherein the current value of the polishing disc motor is I1, and the T1 and the I1 satisfy the relation: t1=kt1×i1, where kt1 is a torque constant of the polishing disc motor; the step of calculating the moment of the polishing head motor according to the filtered current signal of the polishing head motor comprises the following steps: setting the moment of the polishing head motor as T2, wherein the current value of the polishing head motor is I2, and the T2 and I2 satisfy the relation: t2=kt2×i2, where kt2 is a torque constant of the polishing head motor.
In some examples of the present invention, the polishing pad motor is configured to collect the polishing pad in real timeThe step of calculating the moment change rate of the polishing disc motor by the moment comprises the following steps: setting the moment change rate of the polishing disc motor as followsThe interval time for collecting the moment of the polishing disc motor is delta (t 1),/and delta>T1 and Δ (T1) satisfy the relationship:wherein, T1 (i) is the moment of the polishing disc motor at the moment i, and T1 (i+1) is the moment of the polishing disc motor at the next sampling moment; the step of calculating the moment change rate of the polishing head motor according to the moment of the polishing head motor acquired in real time comprises the following steps: setting the moment change rate of the polishing head motor to +.>The interval time for collecting the moment of the polishing disc motor is delta (t 2), and the moment is +.>T2 and Δ (T2) satisfy the relationship:wherein, T2 (i) is the moment of the polishing head motor at the moment i, and T2 (i+1) is the moment of the polishing head motor at the next sampling moment.
In some examples of the present invention, the step of calculating a sliding average value of the moment change rate of the polishing pad motor from the moment change rate of the polishing pad motor includes: setting the sliding average value of the moment change rate of the polishing disc motor at the ith moment as ，/>The relation is satisfied: />Wherein, the method comprises the steps of, wherein,the change rate of the moment of the motor of the polishing disc at the moment i+j; the step of calculating a sliding average value of the moment change rate of the polishing head motor according to the moment change rate of the polishing head motor comprises the following steps: />The relation is satisfied:wherein->The change rate of the torque of the polishing head motor at the (i+j) th moment.
In some examples of the present invention, after the step of collecting the torque of the polishing disc motor in real time and collecting the torque of the polishing head motor in real time, the method for detecting a polishing apparatus further includes: calculating a moment variation coefficient of the polishing disc motor according to the moment of the polishing disc motor acquired in real time; calculating a moment variation coefficient of the polishing head motor according to the moment of the polishing head motor acquired in real time; comparing the relation between the torque variation coefficient of the polishing disc motor and a third preset value, and comparing the relation between the variation coefficient of the polishing head motor and a fourth preset value; when the moment variation coefficient of the polishing disc motor is larger than a third preset value and the moment variation coefficient of the polishing head motor is larger than a fourth preset value, outputting a first detection result signal, wherein the first detection result signal is that a tablet on the polishing equipment breaks.
In some examples of the present invention, after the step of comparing the relationship between the torque variation coefficient of the polishing disc motor and the third preset value and the step of comparing the relationship between the variation coefficient of the polishing head motor and the fourth preset value, the detecting method of the polishing apparatus further includes: and outputting a second detection result signal when the torque variation coefficient of the polishing disc motor is larger than a third preset value and the torque variation coefficient of the polishing head motor is not larger than a fourth preset value, wherein the second detection result signal is that the polishing equipment is abnormal.
In some examples of the present invention, after the step of comparing the relationship between the torque variation coefficient of the polishing disc motor and the third preset value and the step of comparing the relationship between the variation coefficient of the polishing head motor and the fourth preset value, the detecting method of the polishing apparatus further includes:
and outputting a second detection result signal when the torque variation coefficient of the polishing disc motor is not greater than a third preset value and the torque variation coefficient of the polishing head motor is greater than a fourth preset value, wherein the second detection result signal is that the polishing equipment is abnormal.
In some examples of the present invention, after the step of comparing the relationship between the torque variation coefficient of the polishing disc motor and the third preset value and the step of comparing the relationship between the variation coefficient of the polishing head motor and the fourth preset value, the detecting method of the polishing apparatus further includes: and outputting a third detection result signal when the torque variation coefficient of the polishing disc motor is not greater than a third preset value and the torque variation coefficient of the polishing head motor is not greater than a fourth preset value, wherein the third detection result signal is that the polishing equipment operates normally.
In some examples of the present invention, the step of calculating the torque variation coefficient of the polishing disc motor according to the torque of the polishing disc motor includes: setting the moment of the polishing disc motor as T1, setting the average value of the moment of the polishing disc motor at moment i as T1ave (i), wherein T1ave (i) meets the relation:wherein T1 (i+j) is the torque of the polishing disk motor at the i+j time, and the standard deviation of the torque of the polishing disk motor at the i time is set to be σ (T1 (i)), and σ (T1 (i)) satisfies the relation: />Setting the moment change of the polishing disc motor at the moment iThe difference coefficient is CV (T1 (i)), and CV (T1 (i)) satisfies the relation: />The method comprises the steps of carrying out a first treatment on the surface of the The step of calculating the moment variation coefficient of the polishing head motor according to the moment of the polishing head motor comprises the following steps: setting the moment of the polishing head motor as T2, setting the average value of the moment of the polishing head motor at moment i as T2ave (i), wherein T2ave (i) meets the relation:wherein T2 (i+j) is the torque of the polishing head motor at the i+j-th time, and the standard deviation of the torque of the polishing head motor at the i-th time is set to be σ (T2 (i)), and σ (T2 (i)) satisfies the relation:the coefficient of variation of the torque of the polishing head motor at the time i is set to be CV (T2 (i)), and CV (T2 (i)) satisfies the relation: / >。
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
The foregoing and/or additional aspects and advantages of the invention will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:
FIG. 1 is a schematic view of a polishing apparatus according to an embodiment of the present invention;
fig. 2 is a schematic diagram showing the change in the moment of the polishing disc motor and the moment of the polishing head motor when the polishing apparatus according to the embodiment of the present invention is operating normally;
fig. 3 is a schematic diagram showing the change of the moment of the polishing disc motor and the moment of the polishing head motor when the polishing device breaks a material sheet at the moment i according to the embodiment of the invention;
fig. 4 is a flowchart of a detection method of the polishing apparatus according to an embodiment of the present invention;
fig. 5 is a flowchart of a detecting method of a polishing apparatus according to another embodiment of the present invention;
FIG. 6 is a partial flow chart of a method of detecting a polishing apparatus according to an embodiment of the present invention;
fig. 7 is a partial flowchart of a detection method of the polishing apparatus according to an embodiment of the present invention.
Reference numerals:
100. a polishing apparatus;
10. a polishing head; 11. a polishing head motor; 12. polishing head shaft; 13. a polishing head motor driver;
20. Polishing disk; 21. polishing disc shaft; 22. a belt; 23. a polishing disk motor; 24. a polishing disk motor driver;
30. a control system;
200. and (3) a material sheet.
Detailed Description
Embodiments of the present invention will be described in detail below, by way of example with reference to the accompanying drawings.
A method of detecting the polishing apparatus 100 according to an embodiment of the present invention is described below with reference to fig. 1 to 7.
As shown in conjunction with fig. 1-4, a method of detecting a polishing apparatus 100 according to some embodiments of the present invention may generally include the steps of: collecting the moment of the polishing disc motor 23 in real time and collecting the moment of the polishing head motor 11 in real time; calculating the moment change rate of the polishing disc motor 23 according to the moment of the polishing disc motor 23 acquired in real time; calculating a sliding average value of the moment change rate of the polishing disc motor 23 according to the moment change rate of the polishing disc motor 23; calculating the moment change rate of the polishing head motor 11 according to the moment of the polishing head motor 11 acquired in real time; calculating a sliding average value of the moment change rate of the polishing head motor 11 according to the moment change rate of the polishing head motor 11; comparing the relation between the sliding average value of the moment change rate of the polishing disc motor 23 and the first preset value, and the relation between the sliding average value of the moment change rate of the polishing head motor 11 and the second preset value; when the sliding average value of the moment change rate of the polishing disc motor 23 is greater than a first preset value and the sliding average value of the moment change rate of the polishing head motor 11 is greater than a second preset value, a first detection result signal is output, wherein the first detection result signal is that the material sheet 200 on the polishing apparatus 100 is broken.
Specifically, the polishing apparatus 100 may mainly include: a polishing head 10 and a polishing disk 20. When the polishing device 100 polishes the material sheet 200, the polishing disc motor 23 is started, the polishing disc motor 23 can drive the polishing disc shaft 21 through the belt 22, so that the polishing disc 20 can be driven to rotate, the polishing head motor 11 is started, the polishing head motor 11 can drive the polishing head shaft 12, so that the polishing head 10 can be driven to rotate, and therefore, the material sheet 200 is only required to be arranged between the polishing head 10 and the polishing disc 20, the polishing disc 20 provides support for the material sheet 200, and the polishing head 10 provides pressure for the material sheet 200, so that polishing treatment on the surface of the material sheet 200 can be realized. Wherein the web 200 may be SIC.
Considering that the web 200 is a hard and brittle material, the thickness is thin, and breakage easily occurs during polishing, which may result in damage to the polishing apparatus 100. When the breakage occurs, the moment of the polishing disc motor 23 and the moment of the polishing head motor 11 are changed drastically at the same time, and by setting the control system 30, the control system 30 executes the detection method of the polishing device 100 to detect the moment of the polishing disc motor 23 and the moment of the polishing head motor 11, so that the breakage of the material sheet 200 can be detected timely and accurately, and the polishing device 100 is prevented from continuing to work under the breakage of the material sheet 200.
Specifically, during polishing, the polishing pressure, the rotation speed, the flow rate of the polishing liquid and other technological parameters are operated according to the set values in the set technological menu, and the technological parameters change along with the change of the technological steps, so that the moment of the polishing disc motor 23 and the moment of the polishing head motor 11 are always changed. Under the condition that the equipment is in normal operation, the moment of the polishing disk 20 and the moment of the polishing head motor 11 are slowly changed, the fluctuation is gentle, and the fluctuation is positively related to the change of the process parameters. And, abnormality of related parts such as polishing liquid, polishing disc 20 and polishing head 10 driving mechanism can also cause fluctuation of torque of polishing head 10 and polishing disc motor 23, and significant difference between abnormal operation of equipment and damage of web 200 is that abnormal operation of equipment only causes strong fluctuation of torque of polishing disc motor 23 or strong fluctuation of torque of polishing head motor 11, but does not cause both strong fluctuation.
When the polishing apparatus 100 operates, first, the control system 30 may collect the moment of the polishing disc motor 23 in real time by the polishing head motor driver 13 and the moment of the polishing head motor 11 in real time by the polishing disc motor driver 24, then, the control system 30 may calculate the moment change rate of the polishing disc motor 23 from the moment of the polishing disc motor 23 collected in real time, the control system 30 may calculate the moment change rate of the polishing head motor 11 from the moment of the polishing head motor 11 collected in real time, further, the control system 30 may calculate the sliding average value of the moment change rate of the polishing disc motor 23 from the moment change rate of the polishing disc motor 23, and may calculate the sliding average value of the moment change rate of the polishing head motor 11 from the moment change rate of the polishing head motor 11.
In this way, the control system 30 may obtain a sliding average value of the moment change rate of the polishing disc motor 23 and a sliding average value of the moment change rate of the polishing head motor 11, and at the same time, a first preset value and a second preset value are pre-stored in the control system 30, where the first preset value is a maximum value of the sliding average value of the moment change rate of the polishing disc motor 23 under normal operation of the polishing apparatus 100, and the second preset value is a maximum value of the sliding average value of the moment change rate of the polishing head motor 11 under normal operation of the polishing apparatus 100. Then, the control system 30 may be caused to compare the relation between the sliding average value of the moment change rate of the polishing pad motor 23 and the first preset value, and the relation between the sliding average value of the moment change rate of the polishing head motor 11 and the second preset value, and output different detection result signals according to different comparison results.
When the sliding average value of the moment change rate of the polishing disc motor 23 is greater than the first preset value and the sliding average value of the moment change rate of the polishing head motor 11 is greater than the second preset value, it is indicated that the moment of the polishing disc motor 23 and the moment of the polishing head motor 11 are both changed drastically at the same time, and because the change is not related to the change of the process parameter but related to the breaking of the material sheet 200, the control system 30 can output a first detection result signal indicating that the material sheet 200 on the polishing apparatus 100 breaks, thereby optimizing the detection method of the polishing apparatus 100, detecting that the material sheet 200 breaks timely and accurately, avoiding the damage of the polishing apparatus 100, and improving the reliability of the polishing apparatus 100.
Thus, by comparing the relation between the moving average of the moment change rate of the polishing disc motor 23 and the first preset value and the relation between the moving average of the moment change rate of the polishing head motor 11 and the second preset value, when the moving average of the moment change rate of the polishing disc motor 23 is greater than the first preset value and the moving average of the moment change rate of the polishing head motor 11 is greater than the second preset value, the first detection result signal indicating that the material sheet 200 on the polishing apparatus 100 is broken is output, the detection method of the polishing apparatus 100 can be optimized, the occurrence of the broken sheet of the discharge sheet 200 can be detected timely and accurately, and the damage of the polishing apparatus 100 is avoided.
As shown in fig. 4, after the step of comparing the relation between the moving average of the moment change rate of the polishing pad motor 23 and the first preset value and the relation between the moving average of the moment change rate of the polishing head motor 11 and the second preset value, the detecting method of the polishing apparatus 100 may further include the steps of: when the sliding average value of the moment change rate of the polishing disc motor 23 is greater than the first preset value and the sliding average value of the moment change rate of the polishing head motor 11 is not greater than the second preset value, a second detection result signal is output, wherein the second detection result signal is that the polishing apparatus 100 is abnormal.
And, after the step of comparing the relation between the moving average of the moment change rate of the polishing pad motor 23 and the first preset value and the relation between the moving average of the moment change rate of the polishing head motor 11 and the second preset value, the detecting method of the polishing apparatus 100 may further include the steps of: when the sliding average value of the moment change rate of the polishing disc motor 23 is not greater than the first preset value and the sliding average value of the moment change rate of the polishing head motor 11 is greater than the second preset value, a second detection result signal is output, wherein the second detection result signal is that the polishing apparatus 100 is abnormal.
Specifically, after the control system 30 compares the relation between the moving average of the moment change rate of the polishing pad motor 23 and the first preset value, and the relation between the moving average of the moment change rate of the polishing head motor 11 and the second preset value, if it is found that the moving average of the moment change rate of the polishing pad motor 23 is greater than the first preset value and the moving average of the moment change rate of the polishing head motor 11 is not greater than the second preset value, or it is found that the moving average of the moment change rate of the polishing pad motor 23 is not greater than the first preset value and the moving average of the moment change rate of the polishing head motor 11 is greater than the second preset value, that is: only one of the moment of the polishing pad motor 23 and the moment of the polishing head motor 11 is changed drastically, it can be judged that this is caused by abnormality of related parts such as the polishing liquid, the polishing pad 20, the driving mechanism of the polishing head 10, and the like, not the broken pieces, and at this time, the control system 30 can output a second detection result signal indicating that abnormality of the polishing apparatus 100 occurs, so that the broken pieces of the web 200 can be distinguished from the apparatus abnormality, and the reliability of the polishing apparatus 100 can be improved.
Further, as shown in fig. 4, after the step of comparing the relation between the moving average of the moment change rate of the polishing pad motor 23 and the first preset value and the relation between the moving average of the moment change rate of the polishing head motor 11 and the second preset value, the detecting method of the polishing apparatus 100 may further include the steps of: when the moving average of the moment change rate of the polishing pad motor 23 is not greater than the first preset value and the moving average of the moment change rate of the polishing head motor 11 is not greater than the second preset value, a third detection result signal is output, wherein the third detection result signal is that the polishing apparatus 100 operates normally.
Specifically, after comparing the relation between the sliding average value of the moment change rate of the polishing disc motor 23 and the first preset value and the relation between the sliding average value of the moment change rate of the polishing head motor 11 and the second preset value, if the sliding average value of the moment change rate of the polishing disc motor 23 is not greater than the first preset value and the sliding average value of the moment change rate of the polishing head motor 11 is not greater than the second preset value, it is indicated that the moment of the polishing disc motor 23 and the moment of the polishing head motor 11 are not both changed drastically, it may be determined that the polishing apparatus 100 is working properly, at this time, the control system 30 may output a third detection result signal indicating that the polishing apparatus 100 is working properly, so that the broken pieces of the material pieces 200 may be distinguished from the normal operation of the apparatus, and the reliability of the polishing apparatus 100 may be improved.
By the above, by making the control system 30 execute the detection method of the polishing apparatus 100, the broken piece state of the material piece 200, the abnormal state and the normal operation state of the polishing apparatus 100 can be timely and accurately distinguished by the change of the torque of the polishing head motor 11 and the torque of the polishing disk motor 23, so that the detection method of the polishing apparatus 100 can detect the broken piece more simply and conveniently, more timely and accurately, the reliability of the polishing apparatus 100 can be improved, and the loss can be reduced.
As shown in conjunction with fig. 6 and 7, the step of collecting the moment of the polishing disc motor 23 in real time and collecting the moment of the polishing head motor 11 in real time may mainly include: collecting a current signal of the polishing disc motor 23, filtering the current signal of the polishing disc motor 23 by adopting a low-pass filter, and eliminating high-frequency noise; calculating the moment of the polishing disc motor 23 according to the filtered current signal of the polishing disc motor 23; collecting a current signal of the polishing head motor 11, filtering the current signal of the polishing head motor 11 by adopting a low-pass filter, and eliminating high-frequency noise; the torque of the polishing head motor 11 is calculated from the filtered current signal of the polishing head motor 11.
Specifically, when the torque of the polishing disc motor 23 is collected in real time, the current signal of the polishing disc motor 23 may be collected first, and then the current signal of the polishing disc motor 23 is filtered by using a low-pass filter, so that the low-pass filter may eliminate high-frequency noise, and then the torque of the polishing disc motor 23 may be calculated according to the filtered current signal of the polishing disc motor 23, so that the high-frequency noise may be prevented from interfering with the calculated value of the torque of the polishing disc motor 23, the accuracy of the calculated value of the torque of the polishing disc motor 23 may be ensured, and further the accuracy of the detection of the sheet 200 breakage, the abnormal state and the normal running state of the polishing apparatus 100 by the subsequent control system 30 may be ensured.
And, when the moment of the polishing head motor 11 is collected in real time, the current signal of the polishing head motor 11 may be collected first, and then the current signal of the polishing head motor 11 may be filtered by using a low-pass filter, so that the low-pass filter may eliminate high-frequency noise, and then the moment of the polishing head motor 11 may be calculated according to the filtered current signal of the polishing head motor 11, so that the high-frequency noise may be prevented from interfering with the calculated value of the moment of the polishing head motor 11, the accuracy of the calculated value of the moment of the polishing head motor 11 may be ensured, and further the accuracy of the detection of the breakage of the material sheet 200, the abnormal state of the polishing apparatus 100, and the normal operation state by the subsequent control system 30 may be ensured.
The step of calculating the moment of the polishing pad motor 23 from the filtered current signal of the polishing pad motor 23 may mainly include: setting the torque of the polishing disc motor 23 to be T1, setting the current value of the polishing disc motor 23 to be I1, wherein the T1 and the I1 satisfy the relation: t1=kt1×i1, where Kt1 is a torque constant of the polishing pad motor 23, and thus, after the current signal of the polishing pad motor 23 is obtained, the torque value of the polishing pad motor 23 can be calculated by a relational expression between the torque of the polishing pad motor 23, the current value of the polishing pad motor 23, and the torque constant of the polishing pad motor 23.
And, the step of calculating the moment of the polishing head motor 11 from the filtered current signal of the polishing head motor 11 may include: setting the torque of the polishing head motor 11 to be T2, and setting the current value of the polishing head motor 11 to be I2, T2 and I2 satisfy the relation: t2=kt2×i2, where Kt2 is a torque constant of the polishing head motor 11, and thus, after the current signal of the polishing head motor 11 is obtained, the torque value of the polishing head motor 11 can be calculated by a relational expression between the torque of the polishing head motor 11, the current value of the polishing head motor 11, and the torque constant of the polishing head motor 11.
Further, the step of calculating the moment change rate of the polishing disc motor 23 according to the moment of the polishing disc motor 23 acquired in real time may include: the torque change rate of the polishing disk motor 23 is set to beThe interval time for collecting the torque of the polishing disc motor 23 is delta (t 1),/and delta>T1 and Δ (T1) satisfy the relationship: />Wherein T1 (i) is the moment of the polishing disk motor 23 at the moment i, and T1 (i+1) is the moment of the polishing disk motor 23 at the next sampling moment, so that after the moment of the polishing disk motor 23 is obtained, the moment change rate of the polishing disk motor 23 can be calculated by the relation between the moment change rate of the polishing disk motor 23, the moment of the polishing disk motor 23 and the interval time for collecting the moment of the polishing disk motor 23.
And, the step of calculating the moment change rate of the polishing head motor 11 from the moment of the polishing head motor 11 acquired in real time may include: the torque change rate of the polishing head motor 11 is set to beThe interval time for acquiring the torque of the polishing disc motor 11 is delta (t 2),/and delta>T2 and Δ (T2) satisfy the relationship: />Wherein T2 (i) is the moment of the polishing head motor 11 at time i, and T2 (i+1) is the moment of the polishing head motor 11 at the next sampling time, so that after the moment of the polishing head motor 11 is obtained, the moment change rate of the polishing head motor 11 can be calculated by the relational expression between the moment change rate of the polishing head motor 11, the moment of the polishing head motor 11 and the interval time for collecting the moment of the polishing head motor 11.
Further, the step of calculating a sliding average value of the moment change rate of the polishing pad motor 23 from the moment change rate of the polishing pad motor 23 may include: setting the sliding average value of the moment change rate of the polishing disc motor 23 at the ith moment as，/>The relation is satisfied: />Wherein->As the change rate of the moment of the polishing pad motor 23 at the i+j time, in this way, after the change rate of the moment of the polishing pad motor 23 is obtained, the sliding average value of the change rate of the moment of the polishing pad motor 23 can be further calculated.
And, the step of calculating a sliding average value of the moment change rate of the polishing head motor 11 from the moment change rate of the polishing head motor 11 may include:the relation is satisfied: />Wherein, the method comprises the steps of, wherein,the change rate of the moment of the head motor 11 at the i+j time is thus obtained, and the sliding average value of the change rate of the moment of the head motor 11 can be further calculated.
Referring to fig. 5, a method for inspecting a polishing apparatus 100 according to other embodiments of the present invention may include the steps of: the moment of the polishing disc motor 23 is collected in real time, and the moment of the polishing head motor 11 is collected in real time: calculating a moment variation coefficient of the polishing disc motor 23 according to the moment of the polishing disc motor 23 acquired in real time; calculating a moment variation coefficient of the polishing head motor 11 according to the moment of the polishing head motor 11 acquired in real time; comparing the relation between the torque variation coefficient of the polishing disc motor 23 and the third preset value, and the relation between the variation coefficient of the polishing head motor 11 and the fourth preset value; when the torque variation coefficient of the polishing disc motor 23 is greater than the third preset value and the torque variation coefficient of the polishing head motor 11 is greater than the fourth preset value, a first detection result signal is output, wherein the first detection result signal is that the material sheet 200 on the polishing apparatus 100 breaks.
Specifically, when the control system 30 performs the detection method of the polishing apparatus 100, the torque of the polishing disk motor 23 may be collected in real time by the polishing disk motor driver 13 and the torque of the polishing head motor 11 may be collected in real time by the polishing disk motor driver 24, then the control system 30 may calculate the torque variation coefficient of the polishing disk motor 23 from the torque of the polishing disk motor 23 collected in real time, and the control system 30 may calculate the torque variation coefficient of the polishing head motor 11 from the torque of the polishing head motor 11 collected in real time.
In this way, the control system 30 may obtain the torque variation coefficient of the polishing disc motor 23 and the torque variation coefficient of the polishing head motor 11, and at the same time, a third preset value and a fourth preset value are pre-stored in the control system 30, where the third preset value is the maximum value of the torque variation coefficient of the polishing disc motor 23 under normal operation of the polishing apparatus 100, and the fourth preset value is the maximum value of the torque variation coefficient of the polishing head motor 11 under normal operation of the polishing apparatus 100. The control system 30 may then be caused to compare the relationship between the torque variation coefficient of the polishing pad motor 23 and the third preset value, and the relationship between the torque variation coefficient of the polishing head motor 11 and the fourth preset value, and output different detection result signals according to different comparison results.
When the torque variation coefficient of the polishing disc motor 23 is greater than the third preset value and the torque variation coefficient of the polishing head motor 11 is greater than the fourth preset value, it is indicated that the torque of the polishing disc motor 23 and the torque of the polishing head motor 11 are both changed drastically at the same time, and because the change is not related to the change of the process parameter but related to the breaking of the material sheet 200, the control system 30 can output the first detection result signal indicating that the breaking of the material sheet 200 on the polishing apparatus 100 occurs, so that the breaking of the material sheet 200 can be detected timely and accurately, and the reliability of the polishing apparatus 100 can be improved.
As shown in fig. 5, after the step of comparing the relationship between the torque variation coefficient of the polishing pad motor 23 and the third preset value and the relationship between the variation coefficient of the polishing head motor 11 and the fourth preset value, the detecting method of the polishing apparatus 100 may further include: when the torque variation coefficient of the polishing disc motor 23 is greater than the third preset value and the torque variation coefficient of the polishing head motor 11 is not greater than the fourth preset value, a second detection result signal is output, wherein the second detection result signal is that the polishing apparatus 100 is abnormal.
And, after the step of comparing the relationship between the torque variation coefficient of the polishing pad motor 23 and the third preset value and the relationship between the variation coefficient of the polishing head motor 11 and the fourth preset value, the detecting method of the polishing apparatus 100 may further include: when the torque variation coefficient of the polishing disc motor 23 is not greater than the third preset value and the torque variation coefficient of the polishing head motor 11 is greater than the fourth preset value, a second detection result signal is output, wherein the second detection result signal is that the polishing apparatus 100 is abnormal.
Specifically, after the control system 30 compares the relationship between the torque variation coefficient of the polishing disc motor 23 and the third preset value and the relationship between the torque variation coefficient of the polishing head motor 11 and the fourth preset value, if it is obtained that the torque variation coefficient of the polishing disc motor 23 is greater than the third preset value and the torque variation coefficient of the polishing head motor 11 is not greater than the fourth preset value, or it is obtained that the torque variation coefficient of the polishing disc motor 23 is not greater than the third preset value and the torque variation coefficient of the polishing head motor 11 is greater than the fourth preset value, that is: only one of the moment of the polishing pad motor 23 and the moment of the polishing head motor 11 is changed drastically, it can be judged that this is caused by abnormality of related parts such as the polishing liquid, the polishing pad 20, the driving mechanism of the polishing head 10, and the like, not the broken pieces, and at this time, the control system 30 can output a second detection result signal indicating that abnormality of the polishing apparatus 100 occurs, so that the broken pieces of the web 200 can be distinguished from the apparatus abnormality, and the reliability of the polishing apparatus 100 can be improved.
Further, as shown in fig. 5, after the step of comparing the relation between the torque variation coefficient of the polishing pad motor 23 and the third preset value and the relation between the variation coefficient of the polishing head motor 11 and the fourth preset value, the detecting method of the polishing apparatus 100 may further include the steps of: when the torque variation coefficient of the polishing disc motor 23 is not greater than the third preset value and the torque variation coefficient of the polishing head motor 11 is not greater than the fourth preset value, a third detection result signal is output, wherein the third detection result signal is that the polishing apparatus 100 operates normally.
Specifically, after the control system 30 compares the relationship between the torque variation coefficient of the polishing disc motor 23 and the third preset value and compares the relationship between the torque variation coefficient of the polishing head motor 11 and the fourth preset value, if the torque variation coefficient of the polishing disc motor 23 is not greater than the third preset value and the torque variation coefficient of the polishing head motor 11 is not greater than the fourth preset value, it is indicated that the torque of the polishing disc motor 23 and the torque of the polishing head motor 11 are not severely changed, it may be determined that the polishing apparatus 100 is working properly, and at this time, the control system 30 may output a third detection result signal indicating that the polishing apparatus 100 is working properly, so that the broken piece of the material sheet 200 may be distinguished from the normal operation of the apparatus, and the reliability of the polishing apparatus 100 may be improved.
By the above, by making the control system 30 execute the detection method of the polishing apparatus 100, the material sheet 200 can be timely and accurately distinguished from the abnormal state and the normal running state of the polishing apparatus 100 by the change of the torque of the polishing head motor 11 and the torque of the polishing disk motor 23, so that the detection method of the polishing apparatus 100 can detect the broken sheet more simply and conveniently, more timely and accurately, the reliability of the polishing apparatus 100 can be improved, and the loss can be reduced.
The step of calculating the torque variation coefficient of the polishing pad motor 23 from the torque of the polishing pad motor 23 may include: set polishing disk motorThe moment of 23 is T1, the average value of the moment of the polishing disc motor 23 at the moment i is T1ave (i), and T1ave (i) satisfies the relation:wherein T1 (i+j) is the torque of the polishing pad motor 23 at the i+j-th time, and the standard deviation of the torque of the polishing pad motor 23 at the i-th time is set to σ (T1 (i)), and σ (T1 (i)) satisfies the relation:the coefficient of variation of the torque of the polishing pad motor 23 at the time i is set to be CV (T1 (i)), and CV (T1 (i)) satisfies the relation: />。
Thus, after the moment of the polishing disk motor 23 is obtained, the average value of the moment of the polishing disk motor 23 at the moment i can be calculated, then the standard deviation of the moment of the polishing disk motor 23 at the moment i is calculated, and finally the variation coefficient of the moment of the polishing disk motor 23 at the moment i is calculated according to the relation between the variation coefficient of the moment of the polishing disk motor 23 at the moment i, the standard deviation of the moment of the polishing disk motor 23 at the moment i and the average value of the moment of the polishing disk motor 23 at the moment i.
And, the step of calculating a torque variation coefficient of the polishing head motor 11 from the torque of the polishing head motor 11 may include: setting the torque of the polishing head motor 11 to be T2, and the average value of the torque of the polishing head motor 11 at the moment i to be T2ave (i), the T2ave (i) satisfies the relation:wherein T2 (i+j) is the torque of the polishing head motor 11 at the i+j-th time, and the standard deviation of the torque of the polishing head motor 11 at the i-th time is set to σ (T2 (i)), and σ (T2 (i)) satisfies the relation:the coefficient of variation of the torque of the polishing head motor 11 at the time i is set to be CV (T2 (i)), and CV (T2 (i)) satisfies the relation: />。
In this way, after the moment of the polishing head motor 11 is obtained, the average value of the moment of the polishing head motor 11 at the moment i can be calculated first, then the standard deviation of the moment of the polishing head motor 11 at the moment i is calculated, and finally the variation coefficient of the moment of the polishing head motor 11 at the moment i is calculated according to the relation between the variation coefficient of the moment of the polishing head motor 11 at the moment i, the standard deviation of the moment of the polishing head motor 11 at the moment i and the average value of the moment of the polishing head motor 11 at the moment i.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the invention, the scope of which is defined by the claims and their equivalents.
Claims (13)
1. A method of inspecting a polishing apparatus, comprising:
collecting the moment of a polishing disc motor (23) in real time and collecting the moment of a polishing head motor (11) in real time;
calculating the moment change rate of the polishing disc motor (23) according to the moment of the polishing disc motor (23) acquired in real time;
calculating a sliding average value of the moment change rate of the polishing disc motor (23) according to the moment change rate of the polishing disc motor (23);
Calculating the moment change rate of the polishing head motor (11) according to the moment of the polishing head motor (11) acquired in real time;
calculating a sliding average value of the moment change rate of the polishing head motor (11) according to the moment change rate of the polishing head motor (11);
comparing the relation between the sliding average value of the moment change rate of the polishing disc motor (23) and a first preset value and the relation between the sliding average value of the moment change rate of the polishing head motor (11) and a second preset value, wherein the first preset value is the maximum value of the sliding average value of the moment change rate of the polishing disc motor (23) under the normal operation of the polishing equipment (100), and the second preset value is the maximum value of the sliding average value of the moment change rate of the polishing head motor (11) under the normal operation of the polishing equipment (100);
when the sliding average value of the moment change rate of the polishing disc motor (23) is larger than a first preset value and the sliding average value of the moment change rate of the polishing head motor (11) is larger than a second preset value, a first detection result signal is output, wherein the first detection result signal is that the material sheet (200) on the polishing equipment (100) is broken.
2. The method of detecting a polishing apparatus according to claim 1, wherein after the step of comparing the relation between the sliding average value of the moment change rate of the polishing platen motor (23) and the first preset value and the relation between the sliding average value of the moment change rate of the polishing head motor (11) and the second preset value, further comprising:
and outputting a second detection result signal when the sliding average value of the moment change rate of the polishing disc motor (23) is larger than a first preset value and the sliding average value of the moment change rate of the polishing head motor (11) is not larger than a second preset value, wherein the second detection result signal is that the polishing equipment (100) is abnormal.
3. The method of detecting a polishing apparatus according to claim 1, wherein after the step of comparing the relation between the sliding average value of the moment change rate of the polishing platen motor (23) and the first preset value and the relation between the sliding average value of the moment change rate of the polishing head motor (11) and the second preset value, further comprising:
and outputting a second detection result signal when the sliding average value of the moment change rate of the polishing disc motor (23) is not larger than a first preset value and the sliding average value of the moment change rate of the polishing head motor (11) is larger than a second preset value, wherein the second detection result signal is that the polishing equipment (100) is abnormal.
4. The method of detecting a polishing apparatus according to claim 1, wherein after the step of comparing the relation between the sliding average value of the moment change rate of the polishing platen motor (23) and the first preset value and the relation between the sliding average value of the moment change rate of the polishing head motor (11) and the second preset value, further comprising:
and outputting a third detection result signal when the sliding average value of the moment change rate of the polishing disc motor (23) is not greater than a first preset value and the sliding average value of the moment change rate of the polishing head motor (11) is not greater than a second preset value, wherein the third detection result signal is that the polishing equipment (100) is in normal operation.
5. The method of detecting a polishing apparatus according to claim 1, wherein the step of collecting the moment of the polishing platen motor (23) in real time and the step of collecting the moment of the polishing head motor (11) in real time includes:
collecting a current signal of the polishing disc motor (23), filtering the current signal of the polishing disc motor (23) by adopting a low-pass filter, and eliminating high-frequency noise;
calculating the moment of the polishing disc motor (23) according to the filtered current signal of the polishing disc motor (23);
Collecting a current signal of the polishing head motor (11), filtering the current signal of the polishing head motor (11) by adopting a low-pass filter, and eliminating high-frequency noise;
and calculating the moment of the polishing head motor (11) according to the filtered current signal of the polishing head motor (11).
6. The method of detecting a polishing apparatus according to claim 5, wherein the step of calculating the moment of the polishing platen motor (23) from the filtered current signal of the polishing platen motor (23) includes:
setting the moment of the polishing disc motor (23) as T1, wherein the current value of the polishing disc motor (23) is I1, and the T1 and the I1 satisfy the relation: t1=kt1×i1, wherein kt1 is a torque constant of the polishing disk motor (23);
the step of calculating the moment of the polishing head motor (11) according to the filtered current signal of the polishing head motor (11) comprises:
setting the moment of the polishing head motor (11) as T2, wherein the current value of the polishing head motor (11) is I2, and the T2 and I2 satisfy the relation: t2=kt2×i2, wherein kt2 is a torque constant of the polishing head motor (11).
7. The method of detecting a polishing apparatus according to claim 6, wherein the step of calculating a moment change rate of the polishing platen motor (23) from the moment of the polishing platen motor (23) acquired in real time includes:
Setting the moment change rate of the polishing disc motor (23) as followsThe interval time for acquiring the moment of the polishing disc motor (23) is delta (t 1),/and delta>T1 and Δ (T1) satisfy the relationship: />Wherein, T1 (i) is the moment of the polishing disc motor (23) at the moment i, and T1 (i+1) is the moment of the polishing disc motor (23) at the next sampling moment;
the step of calculating the moment change rate of the polishing head motor (11) according to the moment of the polishing head motor (11) acquired in real time comprises the following steps:
setting the moment change rate of the polishing head motor (11) asThe interval time for acquiring the moment of the polishing disc motor (23) is delta (t 2),/and delta>T2 and Δ (T2) satisfy the relationship: />Wherein T2 (i) is the moment of the polishing head motor (11) at the moment i, and T2 (i+1) is the moment of the polishing head motor (11) at the next sampling moment.
8. The method of detecting a polishing apparatus according to claim 7, wherein the step of calculating a sliding average value of the moment change rate of the polishing disc motor (23) from the moment change rate of the polishing disc motor (23) includes:
setting the moment of the polishing disk motor (23) at the ith moment The sliding average of the change rate is，/>The relation is satisfied: />Wherein->The change rate of the moment of the polishing disc motor (23) at the (i+j) th moment;
the step of calculating a sliding average value of the moment change rate of the polishing head motor (11) from the moment change rate of the polishing head motor (11) includes:the relation is satisfied: />Wherein->The change rate of the torque of the polishing head motor (11) at the (i+j) th moment.
9. The method of detecting a polishing apparatus according to claim 1, wherein after the step of collecting the moment of the polishing platen motor (23) in real time and the moment of the polishing head motor (11) in real time, further comprising:
calculating a moment variation coefficient of the polishing disc motor (23) according to the moment of the polishing disc motor (23) acquired in real time;
calculating a moment variation coefficient of the polishing head motor (11) according to the moment of the polishing head motor (11) acquired in real time;
comparing the relation between the torque variation coefficient of the polishing disc motor (23) and a third preset value, and comparing the relation between the variation coefficient of the polishing head motor (11) and a fourth preset value;
when the moment variation coefficient of the polishing disc motor (23) is larger than a third preset value and the moment variation coefficient of the polishing head motor (11) is larger than a fourth preset value, outputting a first detection result signal, wherein the first detection result signal is that the material sheet (200) on the polishing equipment (100) is broken.
10. The method of detecting a polishing apparatus according to claim 9, wherein after the step of comparing the relation between the torque variation coefficient of the polishing platen motor (23) and the third preset value and the relation between the variation coefficient of the polishing head motor (11) and the fourth preset value, further comprising:
and outputting a second detection result signal when the moment variation coefficient of the polishing disc motor (23) is larger than a third preset value and the moment variation coefficient of the polishing head motor (11) is not larger than a fourth preset value, wherein the second detection result signal is that the polishing equipment (100) is abnormal.
11. The method of detecting a polishing apparatus according to claim 9, wherein after the step of comparing the relation between the torque variation coefficient of the polishing platen motor (23) and the third preset value and the relation between the variation coefficient of the polishing head motor (11) and the fourth preset value, further comprising:
and outputting a second detection result signal when the moment variation coefficient of the polishing disc motor (23) is not larger than a third preset value and the moment variation coefficient of the polishing head motor (11) is larger than a fourth preset value, wherein the second detection result signal is that the polishing equipment (100) is abnormal.
12. The method of detecting a polishing apparatus according to claim 9, wherein after the step of comparing the relation between the torque variation coefficient of the polishing platen motor (23) and the third preset value and the relation between the variation coefficient of the polishing head motor (11) and the fourth preset value, further comprising:
and outputting a third detection result signal when the moment variation coefficient of the polishing disc motor (23) is not greater than a third preset value and the moment variation coefficient of the polishing head motor (11) is not greater than a fourth preset value, wherein the third detection result signal is that the polishing equipment (100) is in normal operation.
13. The method of detecting a polishing apparatus according to claim 9, wherein the step of calculating a torque variation coefficient of the polishing platen motor (23) from the torque of the polishing platen motor (23) includes:
setting the moment of the polishing disc motor (23) to be T1, setting the average value of the moment of the polishing disc motor (23) at the moment i to be T1ave (i), wherein the T1ave (i) satisfies the relation:wherein T1 (i+j) is the torque of the polishing disk motor (23) at the i+j-th time, and the standard deviation of the torque of the polishing disk motor (23) at the i-th time is set to be σ (T1 (i)), and σ (T1 (i)) satisfies the relation: / >The coefficient of variation of the torque of the polishing disk motor (23) at the time i is set to be CV (T1 (i)), and CV (T1 (i)) satisfies the relation: />；
The step of calculating the moment variation coefficient of the polishing head motor (11) according to the moment of the polishing head motor (11) comprises the following steps:
setting the moment of the polishing head motor (11) as T2, setting the average value of the moment of the polishing head motor (11) at the moment i as T2ave (i), wherein the T2ave (i) meets the relation:wherein T2 (i+j) is a torque of the polishing head motor (11) at the i+j-th time, and a standard deviation of the torque of the polishing head motor (11) at the i-th time is set to be σ (T2 (i)), and σ (T2 (i)) satisfies the relation: />The coefficient of variation of the torque of the polishing head motor (11) at the time i is set to be CV (T2 (i)), and CV (T2 (i)) satisfies the relation: />。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311548117.9A CN117260407B (en) | 2023-11-20 | 2023-11-20 | Detection method of polishing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311548117.9A CN117260407B (en) | 2023-11-20 | 2023-11-20 | Detection method of polishing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117260407A CN117260407A (en) | 2023-12-22 |
| CN117260407B true CN117260407B (en) | 2024-03-12 |
Family
ID=89206650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311548117.9A Active CN117260407B (en) | 2023-11-20 | 2023-11-20 | Detection method of polishing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117260407B (en) |
Citations (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63243829A (en) * | 1987-03-31 | 1988-10-11 | Ngk Spark Plug Co Ltd | Torque detector for rotary shaft |
| JPH11138418A (en) * | 1997-09-02 | 1999-05-25 | Matsushita Electron Corp | Chemical and mechanical polishing device, and chemical and mechanical polishing method |
| JP2001009700A (en) * | 1999-07-01 | 2001-01-16 | Toshiba Mach Co Ltd | Polishing cloth lifetime detecting method for polishing device and device therefor |
| CN1461251A (en) * | 2000-11-21 | 2003-12-10 | Memc电子材料有限公司 | Semiconductor wafer, polishing apparatus and method |
| CN101090129A (en) * | 2006-06-14 | 2007-12-19 | 国际商业机器公司 | Semiconductor device and method for making the same |
| JP2008071973A (en) * | 2006-09-14 | 2008-03-27 | Tokyo Seimitsu Co Ltd | Polishing termination detecting method |
| JP2010076007A (en) * | 2008-09-24 | 2010-04-08 | Nec Corp | Polishing apparatus and polishing rate estimating method |
| JP2012228745A (en) * | 2011-04-26 | 2012-11-22 | Sumco Corp | Polishing apparatus and polishing method |
| CN102829905A (en) * | 2012-07-27 | 2012-12-19 | 北京航天控制仪器研究所 | Friction torque measuring method for service life evaluation of ball bearing for motor |
| CN103715128A (en) * | 2013-12-30 | 2014-04-09 | 上海集成电路研发中心有限公司 | Adjustable wafer fixing device and method and wafer cleaning platform |
| DE112012001943T5 (en) * | 2011-05-27 | 2014-04-24 | Shin-Etsu Handotai Co., Ltd. | A method of adjusting the height position of a polishing head and method of polishing a workpiece |
| CN104070445A (en) * | 2013-03-29 | 2014-10-01 | 株式会社荏原制作所 | Polishing apparatus and wear detection method |
| CN105945716A (en) * | 2016-05-04 | 2016-09-21 | 中国电子科技集团公司第四十五研究所 | Feeding pressurization polishing method of polishing head, controller and feeding pressurization mechanism |
| CN108555771A (en) * | 2018-04-25 | 2018-09-21 | 清华大学 | The terminal of CMP tool determines that method, terminal determine system and CMP system |
| CN208902147U (en) * | 2018-10-19 | 2019-05-24 | 吉姆西半导体科技（无锡）有限公司 | Motor load torque terminal detecting system for chemical-mechanical polisher platform |
| CN109909804A (en) * | 2018-12-21 | 2019-06-21 | 北京工业大学 | Tool breakage and abrasion on-line monitoring method based on main shaft drives electric current and work step |
| CN110948378A (en) * | 2018-09-27 | 2020-04-03 | 胜高股份有限公司 | Polishing apparatus and polishing method |
| CN111558896A (en) * | 2020-07-20 | 2020-08-21 | 西安奕斯伟硅片技术有限公司 | Wafer protection mechanism, device and method |
| CN211465923U (en) * | 2019-12-04 | 2020-09-11 | 上海机床厂有限公司 | Gear and rack type polishing machine moving device |
| CN112525502A (en) * | 2020-11-04 | 2021-03-19 | 天津大学前沿技术研究院有限公司 | Device and method for testing performance of magnetohydrodynamic inertial momentum wheel |
| CN113579989A (en) * | 2021-08-13 | 2021-11-02 | 西安奕斯伟材料科技有限公司 | Slip sheet detection device and polishing system |
| CN114751367A (en) * | 2022-04-08 | 2022-07-15 | 北京海创微芯科技有限公司 | Micro-system film planarization method |
| CN114986380A (en) * | 2022-05-30 | 2022-09-02 | 上海华力微电子有限公司 | Method for improving grinding efficiency and grinding system |
| CN115964863A (en) * | 2022-12-08 | 2023-04-14 | 华海清科股份有限公司 | Wafer rounding risk assessment method and chemical mechanical polishing device |
| CN219925638U (en) * | 2023-09-20 | 2023-10-31 | 铭扬半导体科技(合肥)有限公司 | Loading and unloading device of polishing equipment and polishing equipment |
| CN219925664U (en) * | 2023-09-20 | 2023-10-31 | 铭扬半导体科技(合肥)有限公司 | Polishing head of polishing device and polishing device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6494765B2 (en) * | 2000-09-25 | 2002-12-17 | Center For Tribology, Inc. | Method and apparatus for controlled polishing |
| JP2013526057A (en) * | 2010-04-30 | 2013-06-20 | アプライド マテリアルズ インコーポレイテッド | Pad-adjusted sweep torque modeling to achieve constant removal rate |
-
2023
- 2023-11-20 CN CN202311548117.9A patent/CN117260407B/en active Active
Patent Citations (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63243829A (en) * | 1987-03-31 | 1988-10-11 | Ngk Spark Plug Co Ltd | Torque detector for rotary shaft |
| JPH11138418A (en) * | 1997-09-02 | 1999-05-25 | Matsushita Electron Corp | Chemical and mechanical polishing device, and chemical and mechanical polishing method |
| JP2001009700A (en) * | 1999-07-01 | 2001-01-16 | Toshiba Mach Co Ltd | Polishing cloth lifetime detecting method for polishing device and device therefor |
| CN1461251A (en) * | 2000-11-21 | 2003-12-10 | Memc电子材料有限公司 | Semiconductor wafer, polishing apparatus and method |
| CN101090129A (en) * | 2006-06-14 | 2007-12-19 | 国际商业机器公司 | Semiconductor device and method for making the same |
| JP2008071973A (en) * | 2006-09-14 | 2008-03-27 | Tokyo Seimitsu Co Ltd | Polishing termination detecting method |
| JP2010076007A (en) * | 2008-09-24 | 2010-04-08 | Nec Corp | Polishing apparatus and polishing rate estimating method |
| JP2012228745A (en) * | 2011-04-26 | 2012-11-22 | Sumco Corp | Polishing apparatus and polishing method |
| DE112012001943T5 (en) * | 2011-05-27 | 2014-04-24 | Shin-Etsu Handotai Co., Ltd. | A method of adjusting the height position of a polishing head and method of polishing a workpiece |
| CN102829905A (en) * | 2012-07-27 | 2012-12-19 | 北京航天控制仪器研究所 | Friction torque measuring method for service life evaluation of ball bearing for motor |
| CN104070445A (en) * | 2013-03-29 | 2014-10-01 | 株式会社荏原制作所 | Polishing apparatus and wear detection method |
| CN103715128A (en) * | 2013-12-30 | 2014-04-09 | 上海集成电路研发中心有限公司 | Adjustable wafer fixing device and method and wafer cleaning platform |
| CN105945716A (en) * | 2016-05-04 | 2016-09-21 | 中国电子科技集团公司第四十五研究所 | Feeding pressurization polishing method of polishing head, controller and feeding pressurization mechanism |
| CN108555771A (en) * | 2018-04-25 | 2018-09-21 | 清华大学 | The terminal of CMP tool determines that method, terminal determine system and CMP system |
| CN110394728A (en) * | 2018-04-25 | 2019-11-01 | 清华大学 | A kind of end-point detection method, system and chemical mechanical polishing apparatus |
| CN110948378A (en) * | 2018-09-27 | 2020-04-03 | 胜高股份有限公司 | Polishing apparatus and polishing method |
| CN208902147U (en) * | 2018-10-19 | 2019-05-24 | 吉姆西半导体科技（无锡）有限公司 | Motor load torque terminal detecting system for chemical-mechanical polisher platform |
| CN109909804A (en) * | 2018-12-21 | 2019-06-21 | 北京工业大学 | Tool breakage and abrasion on-line monitoring method based on main shaft drives electric current and work step |
| CN211465923U (en) * | 2019-12-04 | 2020-09-11 | 上海机床厂有限公司 | Gear and rack type polishing machine moving device |
| CN111558896A (en) * | 2020-07-20 | 2020-08-21 | 西安奕斯伟硅片技术有限公司 | Wafer protection mechanism, device and method |
| CN112525502A (en) * | 2020-11-04 | 2021-03-19 | 天津大学前沿技术研究院有限公司 | Device and method for testing performance of magnetohydrodynamic inertial momentum wheel |
| CN113579989A (en) * | 2021-08-13 | 2021-11-02 | 西安奕斯伟材料科技有限公司 | Slip sheet detection device and polishing system |
| CN114751367A (en) * | 2022-04-08 | 2022-07-15 | 北京海创微芯科技有限公司 | Micro-system film planarization method |
| CN114986380A (en) * | 2022-05-30 | 2022-09-02 | 上海华力微电子有限公司 | Method for improving grinding efficiency and grinding system |
| CN115964863A (en) * | 2022-12-08 | 2023-04-14 | 华海清科股份有限公司 | Wafer rounding risk assessment method and chemical mechanical polishing device |
| CN219925638U (en) * | 2023-09-20 | 2023-10-31 | 铭扬半导体科技(合肥)有限公司 | Loading and unloading device of polishing equipment and polishing equipment |
| CN219925664U (en) * | 2023-09-20 | 2023-10-31 | 铭扬半导体科技(合肥)有限公司 | Polishing head of polishing device and polishing device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117260407A (en) | 2023-12-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI650625B (en) | Tool wear detecting device, detecting method thereof and tool wear compensation method | |
| US5827112A (en) | Method and apparatus for grinding wafers | |
| US8078306B2 (en) | Polishing apparatus and polishing method | |
| CN101354578A (en) | Numeric control device of machine tool | |
| US20060063472A1 (en) | Method for polishing substrate | |
| US20180369985A1 (en) | Wafer polishing method and apparatus | |
| JP2008277450A (en) | Device and method for controlling polishing condition of cmp apparatus | |
| JP4365109B2 (en) | Plasma processing equipment | |
| CN117260407B (en) | Detection method of polishing equipment | |
| JP7188560B2 (en) | Data processing program for pump monitor, vacuum pump and product deposition diagnostics | |
| CN113113286A (en) | Simple determination method for depth of damaged layer of semiconductor chip grinding sheet | |
| JP3321894B2 (en) | Polishing end point detector | |
| JPH01182011A (en) | Slicing machine and its control method | |
| US7059939B2 (en) | Polishing pad conditioner and monitoring method therefor | |
| US6741913B2 (en) | Technique for noise reduction in a torque-based chemical-mechanical polishing endpoint detection system | |
| JPH11221760A (en) | Cracking occurrance predicting method of workpiece, wafer working method utilizing the same, and grinder | |
| JP7092092B2 (en) | Single-sided polishing method | |
| JP5970931B2 (en) | Silicon wafer manufacturing method | |
| Kojima et al. | Application of CMP process monitor to Cu polishing | |
| JP2020176525A (en) | Pump monitoring device and vacuum pump | |
| CN115216843B (en) | Graphite tray state detection method, device and system and terminal equipment | |
| EP1098351A2 (en) | Apparatus detecting misalignment of processing semiconductor wafers in a cassette and associated methods | |
| JP2000024919A (en) | Wafer machining method and grinder | |
| JP2802702B2 (en) | Evaluation and management method of sandblast condition in silicon single crystal wafer | |
| JP2011036954A (en) | Polishing device, polishing method, polishing control program, and recording medium recording the program |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |