CN117252873A - Grooving cutter damage detection method, grooving cutter damage detection system and cutting equipment - Google Patents
Grooving cutter damage detection method, grooving cutter damage detection system and cutting equipment Download PDFInfo
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- 238000005520 cutting process Methods 0.000 title claims abstract description 20
- 238000005070 sampling Methods 0.000 claims abstract description 116
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
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- G06T7/70—Determining position or orientation of objects or cameras
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Abstract
The invention discloses a method, a system and a cutting device for detecting the damage of a slotting cutter, wherein when a sampling signal is acquired, the slotting cutter damage detection method can be used for identifying whether a new notch exists or not by analyzing the difference value of the sampling point counts of adjacent peaks in the sampling signal in each judging period and identifying whether an enlarged notch exists or not by analyzing the variance of the peaks in the sampling signal in each judging period, and the situation of single misjudgment is avoided by a plurality of continuous judging period identification conditions.
Description
Technical Field
The invention relates to the field of semiconductor device processing, in particular to a slotting cutter breakage detection method, a slotting cutter breakage detection system and a slotting cutter cutting device.
Background
In the wafer or semiconductor device processing, a dicing process using a slotting cutter is involved, and as shown in fig. 1, a group of slots 110 are uniformly formed in the circumference of the slotting cutter.
However, during use, the additional notch 120 and/or the additional notch 130 as shown in fig. 2 may be likely to occur, and at this time, it is considered that the damaged condition of the slotter needs to be treated, and thus, the damaged condition of the slotter needs to be detected during the cutting process so as to be treated in time.
The invention of CN114755239B discloses a method for detecting breakage of a blade, which is used for detecting a blade having no notch on the circumference, and is not applicable to the slotting cutter shown in fig. 1.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provides a slotting cutter breakage detection method, a slotting cutter breakage detection system and a slotting cutter cutting device.
The aim of the invention is achieved by the following technical scheme:
the method for detecting the breakage of the slotting cutter comprises the following steps:
s1, acquiring a sampling signal, wherein the sampling signal is obtained by sampling a detection signal of a notch detection device, and the detection signal is obtained by detecting the cutting edge of a autorotation slotting cutter by the notch detection device;
s2, in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the difference value of sampling point counts corresponding to two adjacent peaks is within a preset range or not; if yes, determining that no new notch is detected in the judging period; if not, determining that a new notch is detected in the judging period;
in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the variance of all peaks is larger than a variance threshold, if so, determining that an expansion gap is detected in the judging period; if not, determining that the expansion gap is not detected in the judging period;
s3, determining whether at least one of the damage judging conditions is met, if yes, determining that the slotting cutter is damaged; if not, the method comprises the steps of; determining that the slotting cutter is not damaged; the breakage judgment conditions include:
(1) Detecting a new notch in n continuous judging periods;
(2) The enlarged notch is detected in all of the n consecutive judgment periods.
Preferably, in S2, the X is between 800 and 1500.
Preferably, in S2, the predetermined range is a range [ Δ -m, Δ+m ];
wherein Δ=fs/V Knife X60/L, fs is sampling frequency in Hz, V Knife The unit is the rotation speed of the slotting cutter; l is the number of notches on a normal slotting cutter; m is an integer between 1 and 5.
Preferably, in S3, n is between 3 and 6.
The method for detecting the breakage of the slotting cutter comprises the following steps:
s10, acquiring a sampling signal, wherein the sampling signal is obtained by sampling a detection signal of a notch detection device, and the detection signal is obtained by detecting the cutting edge of a autorotation slotting cutter by the notch detection device;
s20, in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the difference value of sampling point counts corresponding to two adjacent peaks is within a preset range, if so, determining that no newly added notch is detected in the judging period; if not, determining that a new notch is detected in the judging period;
s30, judging whether new notches are detected in n continuous judging periods; if yes, determining that the slotting cutter is damaged; if not, the method comprises the steps of; it is determined that the slotting cutter is unbroken.
Preferably, in S20, the predetermined range is a range [ Δ -m, Δ+m ];
wherein Δ=fs/V Knife X60/L, fs is sampling frequency in Hz, V Knife Is the rotation speed of the slotting cutter, and the unit is the rotation/minuteThe method comprises the steps of carrying out a first treatment on the surface of the L is the number of notches on a normal slotting cutter; m is an integer between 1 and 5.
Preferably, in S30, n is between 3 and 6.
The method for detecting the breakage of the slotting cutter comprises the following steps:
s100, acquiring a sampling signal, wherein the sampling signal is obtained by sampling a detection signal of a notch detection device, and the detection signal is obtained by detecting the cutting edge of a autorotation slotting cutter by the notch detection device;
s200, in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the variance of all peaks is larger than a variance threshold, if so, determining that an expansion gap is detected in the judging period; if not, determining that the expansion gap is not detected in the judging period;
s300, judging whether the expansion gap is detected in n continuous judging periods; if yes, determining that the slotting cutter is damaged; if not, the method comprises the steps of; it is determined that the slotting cutter is unbroken.
The utility model provides a fluting sword damage detecting system, includes:
the signal acquisition unit is used for acquiring a sampling signal, wherein the sampling signal is obtained by sampling a detection signal of the notch detection device, and the detection signal is obtained by detecting the cutting edge of the autorotation slotting cutter by the notch detection device;
the notch identification unit is used for determining all peaks in the continuous X sampling signals and judging whether the difference value of sampling point counts corresponding to two adjacent peaks is within a preset range or not in the process of acquiring the continuous X sampling signals required by each judging period; if yes, determining that no new notch is detected in the judging period; if not, determining that a new notch is detected in the judging period;
in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the variance of all peaks is larger than a variance threshold, if so, determining that an enlarged gap is detected in the judging period; if not, determining that the expansion gap is not detected in the judging period;
the damage judging unit is used for determining whether at least one of the damage judging conditions is met, and if yes, determining that the slotting cutter is damaged; if not, the method comprises the steps of; determining that the slotting cutter is not damaged; the breakage judgment conditions include:
(1) Detecting a new notch in n continuous judging periods;
(2) The enlarged notch is detected in all of the n consecutive judgment periods.
The cutting device comprises a processor and a memory, wherein the memory stores a program which can be executed by the processor, and the program realizes the slotting cutter breakage detection method according to any one of the above when being executed.
The technical scheme of the invention has the advantages that:
when the method is used for acquiring the sampling signals, whether a new gap exists or not is identified by analyzing the difference value of the sampling point counts of the adjacent peaks in the sampling signals in each judging period, whether an enlarged gap exists or not is identified by analyzing the variance of the peaks in the sampling signals in each judging period, and the situation of single misjudgment is avoided by a plurality of continuous judging period identification situations.
Drawings
FIG. 1 is a schematic view of a normal slotting cutter as described in the background of the invention;
FIG. 2 is a schematic illustration of a slotting cutter with additional notches and enlarged notches as described in the background of the invention;
FIG. 3 is a schematic diagram of a section of sampling signals obtained when detecting a normal slotting cutter according to the present invention, wherein the abscissa represents the sampling point count and the ordinate represents the voltage;
FIG. 4 is a schematic diagram of a section of sampling signals obtained when detecting a slotting cutter with a new notch, wherein the abscissa of the diagram is sampling point count and the ordinate is voltage;
FIG. 5 is a schematic diagram of a section of sample signals obtained when detecting a slotting cutter with an enlarged gap according to the present invention, wherein the abscissa represents the count of sample points and the ordinate represents the voltage;
FIG. 6 is a schematic process diagram of example 1 of the present invention;
FIG. 7 is a schematic process diagram of embodiment 2 of the present invention;
fig. 8 is a schematic process diagram of embodiment 3 of the present invention.
Detailed Description
The objects, advantages and features of the present invention are illustrated and explained by the following non-limiting description of preferred embodiments. These embodiments are only typical examples of the technical scheme of the invention, and all technical schemes formed by adopting equivalent substitution or equivalent transformation fall within the scope of the invention.
In the description of the embodiments, it should be noted that the positional or positional relationship indicated by the terms such as "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", "outer", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of description and simplification of description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in the specific orientation, and thus are not to be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Example 1
The method for detecting the damage of the slotting cutter disclosed by the invention is described below with reference to the accompanying drawings, and the method for detecting the damage of the slotting cutter is also realized by adopting the structure disclosed in the prior patent of the invention described in the background technology, and is not described herein.
The inventors found that: when the slotting cutter rotates according to a certain rotating speed, due to the existence of the notch, the light quantity received by a receiving end of the notch detection device can be suddenly increased when the notch rotates to the notch detection device, and correspondingly, the voltage output by the optical fiber amplifier can be increased to have a peak value; when the notch completely passes through the notch detection device, the light quantity received by the receiving end can be reduced, and correspondingly, the voltage output by the optical fiber amplifier can be reduced, so that the collected sampling signal can periodically appear in a peak value. When a new notch appears on the slotting cutter as shown in fig. 2, the light quantity received by the receiving end is increased when the new notch moves to the notch detection device, a new peak value appears in the sampling signal, and the new peak value breaks the peak value appearance period when the normal slotting cutter is detected.
In the following, taking a normal slotting cutter with 16 notches, the rotating speed of the slotting cutter is 18000 rpm, the sampling frequency is 400000 hz as an example, a section of sampling signals obtained by detecting the normal slotting cutter according to the above parameters are shown in fig. 3, and as can be seen from fig. 3, the difference between the sampling point counts of two adjacent peaks is 83 (2149-2066), 84 (2233-2149), 83 (2316-2233), 83 (2399-2316) and 84 (2483-2399) in sequence.
In theory, the number of sampling points between two adjacent notches of a normal slotting cutter can be calculated using the following formula:
Δ=fs/V knife ×60/L；
Wherein fs is sampling frequency, and the unit is Hz and V Knife The unit is the rotation speed of the slotting cutter; l is the number of notches on a normal slotting cutter; bringing the parameters of the above example into the above formula yields Δ=400000/18000×60/16= 83.333. Since one sampling signal corresponds to one sampling point, the number of sampling points must be an integer, and the theoretically calculated Δ is a decimal, and there is a certain difference, because in the actual process, since various factors such as rotation speed fluctuation, interference and the like affect the actual value of Δ more or less, the Δ can be properly amplified and reduced in the subsequent judgment. Preferably, the interval [ delta-m, delta+m ] can be selected]Wherein m is an integer between 1 and 5, and the specific value of m is required to be adjusted according to practical conditions. Therefore, whether there is a new notch can be determined by determining the sampling point count between two adjacent peaks among all peaks in one judgment period.
The sample signal of the slotting cutter with a new notch is shown in fig. 4, and it can be seen from fig. 4: the sampling point counts (representing the number of sampling signals) corresponding to the adjacent peaks 2.37305 and 2.35107 are 512 and 552, and the difference value is 40, so that the rule that the difference value of the sampling point counts of the adjacent peaks is about 83 when the normal slotting cutter is detected is broken, and therefore, the slotting cutter can be considered to have a high possibility of having a new notch.
With respect to the enlarged notch shown in fig. 2, due to the presence of the enlarged notch, the number of peaks collected during a certain period may be increased relative to the number of peaks collected during detection of a normal slotting cutter and/or the maximum value of the peaks may be increased, for example, when a slotting cutter with an enlarged notch is detected according to the above-mentioned exemplary parameters, a section of the sampling signal is shown in fig. 5, and it can be seen from fig. 5 that when the sampling point count is 4867, the corresponding peak value is significantly increased.
Therefore, in the present invention, the judgment is performed by calculating the variance of all the peaks of the sampling signal in one judgment period, and if the variance of all the peaks in one judgment period is greater than the variance threshold, it can be considered that the slotter is highly likely to have an increased gap.
In summary, as shown in fig. 6, the method for detecting the breakage of the slotting cutter according to the present invention comprises the following steps:
s1, acquiring a sampling signal, wherein the sampling signal is obtained by sampling a detection signal of a notch detection device, and the detection signal is obtained by detecting the cutting edge of a autorotation slotting cutter by the notch detection device;
s2, in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the difference value of sampling point counts corresponding to two adjacent peaks is within a preset range or not; if yes, determining that no new notch is detected in the judging period; if not, determining that a new notch is detected in the judging period;
in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the variance of all peaks is larger than a variance threshold, if so, determining that an expansion gap is detected in the judging period; if not, determining that the expansion gap is not detected in the judging period;
s3, determining whether at least one of the damage judging conditions is met, if yes, determining that the slotting cutter is damaged; if not, the method comprises the steps of; determining that the slotting cutter is not damaged; the breakage judgment conditions include:
(1) Detecting a new notch in n continuous judging periods;
(2) The enlarged notch is detected in all of the n consecutive judgment periods.
Namely, the detection method of the invention can detect the newly added notch and the enlarged notch in the detection process, and can determine the breakage of the slotting cutter if at least one of the continuously added notch and the continuously enlarged notch is detected in the detection process.
Preferably, in S2, the X is between 800 and 1500, more preferably between 950 and 1100, and even more preferably about 1000.
In the step S2, the predetermined range is interval [ delta-m, delta+m ];
wherein Δ=fs/V Knife X60/L, fs is sampling frequency in Hz, V Knife The unit is the rotation speed of the slotting cutter; l is the number of notches on a normal slotting cutter; m is an integer between 1 and 5.
In the step S2, for example, after detecting a slotting cutter with an enlarged notch according to the above-mentioned parameters, the variance of the peak detected in one judgment period is 0.03035 with 1000 sampling signals as one judgment period, and the variance threshold may be set to 0.03, where it may be determined that an enlarged notch is detected in one judgment period.
In the step S3, n is 3-6, more preferably 5, so that abrupt interference can be effectively avoided, the situation that misjudgment is easy to occur when judgment is performed according to the result of a single judgment period is avoided, meanwhile, the problem that newly added notches cannot be accurately identified and notches cannot be accurately enlarged due to overlarge judgment period is reduced as much as possible, and the detection accuracy is improved.
Example 2
Compared with the embodiment 1, the method for detecting the damage of the slotting cutter according to the embodiment only detects the newly added notch in the detection process, but does not detect the enlarged notch, and correspondingly, as shown in fig. 7, the method for detecting the damage of the slotting cutter comprises the following steps:
s10, acquiring a sampling signal, wherein the sampling signal is obtained by sampling a detection signal of a notch detection device, and the detection signal is obtained by detecting the cutting edge of a autorotation slotting cutter by the notch detection device;
s20, in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the difference value of sampling point counts corresponding to two adjacent peaks is within a preset range, if so, determining that no newly added notch is detected in the judging period; if not, determining that a new notch is detected in the judging period;
s30, judging whether new notches are detected in n continuous judging periods; if yes, determining that the slotting cutter is damaged; if not, the method comprises the steps of; it is determined that the slotting cutter is unbroken.
Specific parameters of the detection process are the same as those of the above embodiment 1, and are not described here.
Example 3
Compared with the embodiment 1, the method for detecting the damage of the slotting cutter according to the embodiment only detects the enlarged notch in the detection process, but does not detect the newly added notch, and correspondingly, as shown in fig. 8, the method for detecting the damage of the slotting cutter comprises the following steps:
s100, acquiring a sampling signal, wherein the sampling signal is obtained by sampling a detection signal of a notch detection device, and the detection signal is obtained by detecting the cutting edge of a autorotation slotting cutter by the notch detection device;
s200, in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the variance of all peaks is larger than a variance threshold, if so, determining that an expansion gap is detected in the judging period; if not, determining that the expansion gap is not detected in the judging period;
s300, judging whether the expansion gap is detected in n continuous judging periods; if yes, determining that the slotting cutter is damaged; if not, the method comprises the steps of; it is determined that the slotting cutter is unbroken.
Example 4
The embodiment discloses a slotting cutter breakage detection system, comprising the following steps:
the signal acquisition unit is used for acquiring a sampling signal, wherein the sampling signal is obtained by sampling a detection signal of the notch detection device, and the detection signal is obtained by detecting the cutting edge of the autorotation slotting cutter by the notch detection device;
the notch identification unit is used for determining all peaks in the continuous X sampling signals and judging whether the difference value of sampling point counts corresponding to two adjacent peaks is within a preset range or not in the process of acquiring the continuous X sampling signals required by each judging period; if yes, determining that no new notch is detected in the judging period; if not, determining that a new notch is detected in the judging period;
in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the variance of all peaks is larger than a variance threshold, if so, determining that an enlarged gap is detected in the judging period; if not, determining that the expansion gap is not detected in the judging period;
the damage judging unit is used for determining whether at least one of the damage judging conditions is met, and if yes, determining that the slotting cutter is damaged; if not, the method comprises the steps of; determining that the slotting cutter is not damaged; the breakage judgment conditions include:
(1) Detecting a new notch in n continuous judging periods;
(2) The enlarged notch is detected in all of the n consecutive judgment periods.
Example 5
The embodiment discloses a dicing apparatus, such as a dicing saw for dicing a wafer, which includes a processor and a memory storing a program executable by the processor, the program implementing the method for detecting the breakage of the slotter knife as described above when executed.
The invention has various embodiments, and all technical schemes formed by equivalent transformation or equivalent transformation fall within the protection scope of the invention.
Claims (10)
1. The method for detecting the breakage of the slotting cutter is characterized by comprising the following steps:
s1, acquiring a sampling signal, wherein the sampling signal is obtained by sampling a detection signal of a notch detection device, and the detection signal is obtained by detecting the cutting edge of a autorotation slotting cutter by the notch detection device;
s2, in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the difference value of sampling point counts corresponding to two adjacent peaks is within a preset range or not; if yes, determining that no new notch is detected in the judging period; if not, determining that a new notch is detected in the judging period;
in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the variance of all peaks is larger than a variance threshold, if so, determining that an expansion gap is detected in the judging period; if not, determining that the expansion gap is not detected in the judging period;
s3, determining whether at least one of the damage judging conditions is met, if yes, determining that the slotting cutter is damaged; if not, the method comprises the steps of; determining that the slotting cutter is not damaged; the breakage judgment conditions include:
detecting a new notch in n continuous judging periods;
the enlarged notch is detected in all of the n consecutive judgment periods.
2. The method for detecting breakage of a slotting cutter according to claim 1, wherein: in S2, X is between 800 and 1500.
3. The method for detecting breakage of a slotting cutter according to claim 1, wherein: in the step S2, the predetermined range is a section [ delta-m, delta+m ];
wherein Δ=fs/V Knife X60/L, fs is sampling frequency in Hz, V Knife The unit is the rotation speed of the slotting cutter; l is the number of notches on a normal slotting cutter;
m is an integer between 1 and 5.
4. A method for detecting breakage of a slotting cutter according to any one of claims 1-3, wherein: in S3, n is between 3 and 6.
5. The method for detecting the breakage of the slotting cutter is characterized by comprising the following steps:
s10, acquiring a sampling signal, wherein the sampling signal is obtained by sampling a detection signal of a notch detection device, and the detection signal is obtained by detecting the cutting edge of a autorotation slotting cutter by the notch detection device;
s20, in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the difference value of sampling point counts corresponding to two adjacent peaks is within a preset range, if so, determining that no newly added notch is detected in the judging period; if not, determining that a new notch is detected in the judging period;
s30, judging whether new notches are detected in n continuous judging periods; if yes, determining that the slotting cutter is damaged; if not, the method comprises the steps of; it is determined that the slotting cutter is unbroken.
6. The method for detecting breakage of a slotting cutter according to claim 5, wherein: in S20, the predetermined range is a section [ Δ -m, Δ+m ];
wherein Δ=fs/V Knife X60/L, fs is sampling frequency in Hz, V Knife The unit is the rotation speed of the slotting cutter; l is the number of notches on a normal slotting cutter; m is mIs an integer between 1 and 5.
7. The method for detecting breakage of a slotting cutter according to claim 5, wherein: in S30, n is between 3 and 6.
8. The method for detecting the breakage of the slotting cutter is characterized by comprising the following steps:
s100, acquiring a sampling signal, wherein the sampling signal is obtained by sampling a detection signal of a notch detection device, and the detection signal is obtained by detecting the cutting edge of a autorotation slotting cutter by the notch detection device;
s200, in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the variance of all peaks is larger than a variance threshold, if so, determining that an expansion gap is detected in the judging period; if not, determining that the expansion gap is not detected in the judging period;
s300, judging whether the expansion gap is detected in n continuous judging periods; if yes, determining that the slotting cutter is damaged; if not, the method comprises the steps of; it is determined that the slotting cutter is unbroken.
9. The broken detecting system of slotting cutter, its characterized in that includes:
the signal acquisition unit is used for acquiring a sampling signal, wherein the sampling signal is obtained by sampling a detection signal of the notch detection device, and the detection signal is obtained by detecting the cutting edge of the autorotation slotting cutter by the notch detection device;
the notch identification unit is used for determining all peaks in the continuous X sampling signals and judging whether the difference value of sampling point counts corresponding to two adjacent peaks is within a preset range or not in the process of acquiring the continuous X sampling signals required by each judging period; if yes, determining that no new notch is detected in the judging period; if not, determining that a new notch is detected in the judging period;
in the process of acquiring continuous X sampling signals required by each judging period, determining all peaks in the continuous X sampling signals and judging whether the variance of all peaks is larger than a variance threshold, if so, determining that an enlarged gap is detected in the judging period; if not, determining that the expansion gap is not detected in the judging period;
the damage judging unit is used for determining whether at least one of the damage judging conditions is met, and if yes, determining that the slotting cutter is damaged; if not, the method comprises the steps of; determining that the slotting cutter is not damaged; the breakage judgment conditions include:
detecting a new notch in n continuous judging periods;
the enlarged notch is detected in all of the n consecutive judgment periods.
10. Cutting apparatus comprising a processor and a memory, said memory storing a program executable by said processor, characterized in that: the program, when executed, implements the method for detecting a breakage of a slotting cutter according to any one of claims 1 to 8.
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| CN202311526617.2A CN117252873B (en) | 2023-11-16 | 2023-11-16 | Grooving cutter damage detection method, grooving cutter damage detection system and cutting equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117949023A (en) * | 2024-03-27 | 2024-04-30 | 珠海博杰电子股份有限公司 | Cutting tool breakage detection method |
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| CN117949023A (en) * | 2024-03-27 | 2024-04-30 | 珠海博杰电子股份有限公司 | Cutting tool breakage detection method |
| CN117949023B (en) * | 2024-03-27 | 2024-06-04 | 珠海博杰电子股份有限公司 | Cutting tool breakage detection method |
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