CN117250827A - Negative photosensitive resin with high heat resistance, yellowing resistance and chemical corrosion resistance - Google Patents

Negative photosensitive resin with high heat resistance, yellowing resistance and chemical corrosion resistance Download PDF

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Publication number
CN117250827A
CN117250827A CN202311051933.9A CN202311051933A CN117250827A CN 117250827 A CN117250827 A CN 117250827A CN 202311051933 A CN202311051933 A CN 202311051933A CN 117250827 A CN117250827 A CN 117250827A
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CN
China
Prior art keywords
acrylate
meth
parts
resistance
methyl
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Pending
Application number
CN202311051933.9A
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Chinese (zh)
Inventor
李嘉利
陈旺
康凯
康威
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Shenzhen Didao Microelectronics Technology Co ltd
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Shenzhen Didao Microelectronics Technology Co ltd
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Application filed by Shenzhen Didao Microelectronics Technology Co ltd filed Critical Shenzhen Didao Microelectronics Technology Co ltd
Priority to CN202311051933.9A priority Critical patent/CN117250827A/en
Publication of CN117250827A publication Critical patent/CN117250827A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133345Insulating layers
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0048Photosensitive materials characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Optical Filters (AREA)
  • Materials For Photolithography (AREA)

Abstract

The invention discloses a negative photosensitive resin with high heat resistance, yellowing resistance and chemical corrosion resistance, which is used for an insulating layer between electrodes or a cover layer of RGB color resistance in a liquid crystal panel and comprises an alkali-soluble acrylic copolymer, an ethylenically unsaturated double bond monomer, a photoinitiator, a solvent and an epoxy crosslinking agent. The negative photosensitive resin obtained by the invention can form an insulating layer between electrodes or a cover layer of RGB color resistance in a liquid crystal panel, and has excellent heat resistance yellowing resistance and chemical corrosion resistance.

Description

Negative photosensitive resin with high heat resistance, yellowing resistance and chemical corrosion resistance
Technical Field
The invention belongs to the technical field of photoresist masks, and particularly relates to negative photosensitive resin with good heat yellowing resistance and chemical corrosion resistance.
Background
In the array process COA (color filter on array) of the TFT-LCD (Thin film transistor liquid crystal display) panel of the present stage, a photosensitive resin composition is generally used as an organic insulating film for filling gaps between RGB color resistors and for covering metal electrodes. Therefore, the photosensitive resin composition has high requirements on the light transmittance blocking rate of the lower RGB color resistance, namely, high light transmittance for the wavelength of visible light region is required. In view of the subsequent ITO sputtering and wet etching processes, there is also a need for higher chemical resistance requirements for the organic insulating film.
However, the resin composition generally used for the organic insulating film does not have excellent heat yellowing resistance, and has a phenomenon that the yield of the array substrate is poor due to poor chemical resistance in the COA process.
Disclosure of Invention
The invention provides a negative photosensitive resin with high heat resistance, yellowing resistance and chemical corrosion resistance, which aims at the defects of the prior art.
In order to achieve the technical purpose, the invention adopts the following technical scheme: a negative photosensitive resin with high heat resistance, yellowing resistance and chemical corrosion resistance is used for an insulating layer between electrodes or a cover layer of RGB color resistance in a liquid crystal panel, and comprises the following components in parts by weight:
alkali-soluble acrylic copolymer 100 parts
10-200 parts of monomer containing ethylene unsaturated double bond
1-50 parts of photoinitiator
50-400 parts of solvent
8-35 parts of epoxy cross-linking agent
0-10 parts of additive
The epoxy crosslinking agent has the following chemical general formula (I),
(Ⅰ)
in the chemical formula, R 1 、R 2 、R 3 And each is a C1 to C12 alkylene group.
Preferably, the additive is a silane coupling agent and/or a surfactant.
Preferably, the weight average molecular weight of the alkali-soluble acrylic copolymer is 5000-20000 in terms of polystyrene and the acid value is 30-200mg/g.
Preferably, the ethylenically unsaturated double bond-containing monomer is a compound having two or more (meth) acryloyl groups.
Preferably, the ethylenically unsaturated double bond-containing monomer is ethylene glycol di (meth) acrylate, diethylene glycol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, glycerol di (meth) acrylate, tripropylene glycol di (meth) acrylate, 1, 3-butanediol di (meth) acrylate, neopentyl glycol di (meth) acrylate, 1, 4-butanediol di (meth) acrylate, 1, 6-hexanediol di (meth) acrylate, 1, 9-nonanediol di (meth) acrylate, 1, 10-decanediol di (meth) acrylate; one or more of glycerol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, ethoxylated pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, tripentaerythritol hepta (meth) acrylate, tripentaerythritol octa (meth) acrylate, tetrapentaerythritol nona (meth) acrylate, tetrapentaerythritol deca (meth) acrylate, pentapentaerythritol undec (meth) acrylate, and pentapentaerythritol dodeca (meth) acrylate.
Further, the negative photosensitive resin with high heat resistance, yellowing resistance and chemical corrosion resistance comprises the following components in parts by weight:
acrylic copolymer 100 parts
Dipentaerythritol hexaacrylate DPHA 24 parts
8 parts of photoinitiator
350 parts of methyl 3-methoxypropionate
Triglycidyl isocyanurate 16 parts
Silane coupling agent 1 part
1 part of surfactant.
The beneficial effects are that: compared with the prior art, the negative photosensitive resin obtained by screening the proportion of acrylic acid to be a copolymer, the monomer containing ethylene unsaturated double bonds, the photoinitiator (c), the solvent (d) and the specific epoxy crosslinking agent and fumbling to obtain the optimal content of each component has more excellent heat-resistant yellowing performance and chemical corrosion resistance.
The present invention is further illustrated below in conjunction with specific embodiments, it being understood that these embodiments are meant to be illustrative of the invention only and not limiting the scope of the invention, and that modifications of the invention, which are equivalent to those skilled in the art to which the invention pertains, will fall within the scope of the invention as defined in the claims appended hereto.
The negative photosensitive resin with high heat resistance and yellowing resistance and chemical corrosion resistance is an insulating layer between electrodes or a cover layer of RGB color resistance in a liquid crystal panel, has excellent heat resistance and yellowing resistance and chemical corrosion resistance, and comprises an alkali-soluble acrylic copolymer (a), an ethylenically unsaturated double bond monomer (b), a photoinitiator (c), a solvent (d) and an epoxy crosslinking agent (e) in the following chemical formula 1.
[ chemical formula 1]
In the chemical formula, R1, R2 and R3 are respectively alkylene groups of C1-C12. Preferably, the negative-type photosensitive resin composition is characterized by comprising:
a) Acrylic copolymer 100 parts by weight
b) 10-200 parts by weight of monomer containing ethylene unsaturated double bond
c) 1-50 parts by weight of a photoinitiator
d) 50-400 parts by weight of a solvent
e) 8-30 parts by weight of an epoxy crosslinking agent in the chemical formula 1.
The composition, preparation method and application property effects of the negative-type photosensitive resin of the present invention are described in detail below by way of specific examples and comparative examples.
Examples
The negative-type photosensitive resin composition of the present invention may further contain some known conventional additives, preferably, the additives may be a silane coupling agent and a surfactant, depending on physical properties required for actual production.
The preparation process is as follows: 100 parts of acrylic copolymer (weight average molecular weight Mw 8700, acid value 86 mg/g), 24 parts of dipentaerythritol hexaacrylate (DPHA), 8 parts of photoinitiator (OXE 01), 16 parts of epoxy cross-linking agent (TGIC), 1 part of silane coupling agent and 1 part of surfactant are mixed in proportion, and then 350 parts of solvent methyl 3-methoxypropionate is added and stirred for dissolution, so that the corresponding negative photosensitive resin composition is obtained. The photoinitiator is 1- [4- (phenylthio) phenyl ] -1, 2-octane diketone 2- (O-benzoyl oxime) (OXE 01) manufactured by BASF, and the epoxy crosslinking agent is triglycidyl isocyanurate TGIC.
Examples 2 to 10
This example differs from the example in the types and amounts of the components, as detailed in Table 1.
TABLE 1 content of the components in the examples of the invention
The evaluation was then carried out by the following steps and methods:
photoresist film layer and development experiments: the resin composition was spin-coated on a glass plate, and then most of the solvent was removed by low-pressure suction, followed by thermal baking on a hot plate at 100 ℃ for 90s to obtain a resist film layer having a thickness of about 3 μm. Exposing the photoresist film glass covered with the photomask with exposure of 50 mJ/cm2, then developing for 90s with 2.48% tetramethyl ammonium hydroxide aqueous solution, then washing with ultrapure water, and then baking for 30 min in a 230 ℃ oven, thus obtaining the photoresist glass sheet with corresponding patterns.
Heat resistance yellowing experiment: the above-mentioned photoresist glass sheet was baked in an oven at 250℃for 1 hour, and then tested for light transmittance at 400 and nm wavelengths. The light transmittance is larger than 96% and indicated by 'O', the light transmittance is 90-96% and indicated by 'delta', and the light transmittance is smaller than 90% and indicated by 'X'.
Chemical corrosion resistance experiment: drawing a hundred grid pattern on the non-pattern photoresist glass sheet by using a hundred grid knife, respectively placing the non-pattern photoresist glass sheet in Propylene Glycol Methyl Ether Acetate (PGMEA), N-methylpyrrolidone (NMP), 1% oxalic acid aqueous solution (acidic aqueous solution) and diethylene glycol monobutyl ether solution (alkaline organic solution) containing 10% triethanolamine for 10 min, taking out the non-pattern photoresist glass sheet, flushing the non-pattern photoresist glass sheet by using ultrapure water, airing the non-pattern photoresist glass sheet, treating a film layer by using 3M adhesive tape according to a hundred grid pattern experiment, and grading ATSM (automatic teller machine).
Table 2 shows the results of the performance test of each example
As can be seen from table 2, after TGIC was added as an epoxy crosslinking agent, the photosensitive resin was obtained with more excellent heat yellowing resistance and chemical corrosion resistance than the general epoxy crosslinking agent (GMA) photosensitive resin composition or the example containing no epoxy crosslinking agent. Meanwhile, when the TGIC addition amount is in the range of 8-30 parts by weight, the photosensitive resin film has optimal 400nm light transmittance, thermal yellowing resistance and corrosion resistance. When the addition amount is less than 8 parts, the heat yellowing resistance and the chemical corrosion resistance of the film layer are drastically reduced; when the addition amount is more than 30 parts, scum occurs in the resin developing process, resulting in the problem of unclear pattern after development, and chemical resistance and yellowing are also remarkably reduced.
The weight average molecular weight Mw 8700 of the acrylic copolymer in the examples of the present invention, the acid value of 86mg/g, and too high a polymerization molecular weight may cause a significant decrease in the light transmittance, thermal yellowing resistance and corrosion resistance of the product resin film, and the weight average molecular weight Mw of the acrylic copolymer is preferably 5000 to 20000 by experiment.
With the above-described preferred embodiments according to the present invention as an illustration, the above-described descriptions can be used by persons skilled in the relevant art to make various changes and modifications without departing from the scope of the technical idea of the present invention. The technical scope of the present invention is not limited to the description, but must be determined according to the scope of claims.

Claims (6)

1. The negative photosensitive resin with high heat resistance, yellowing resistance and chemical corrosion resistance is used for an insulating layer between electrodes or a cover layer of RGB color resistance in a liquid crystal panel, and is characterized by comprising the following components in parts by weight:
alkali-soluble acrylic copolymer 100 parts
10-200 parts of monomer containing ethylene unsaturated double bond
1-50 parts of photoinitiator
50-400 parts of solvent
8-30 parts of epoxy cross-linking agent
0-10 parts of functional additive
The epoxy crosslinking agent has the following chemical general formula (I),
(Ⅰ)
in the chemical formula, R 1 、R 2 、R 3 And each is a C1 to C12 alkylene group.
2. The highly heat-resistant yellowing chemical-resistant negative photosensitive resin according to claim 1, wherein: the functional additive is a silane coupling agent and/or a surfactant.
3. The highly heat-resistant yellowing chemical-resistant negative photosensitive resin according to claim 1, wherein: the weight average molecular weight of the alkali soluble acrylic copolymer is 5000-20000 in terms of polystyrene, and the acid value is 30-200mg/g.
4. The highly heat-resistant yellowing chemical-resistant negative photosensitive resin according to claim 1, wherein: the ethylenically unsaturated double bond-containing monomer is a compound having two or more (meth) acryloyl groups.
5. The highly heat-resistant yellowing chemical-resistant negative photosensitive resin according to claim 4, wherein: the monomer containing ethylene unsaturated double bond is ethylene glycol di (methyl) acrylate, diethylene glycol di (methyl) acrylate, trimethylolpropane tri (methyl) acrylate, glycerol di (methyl) acrylate, tripropylene glycol di (methyl) acrylate, 1, 3-butanediol di (methyl) acrylate, neopentyl glycol di (methyl) acrylate, 1, 4-butanediol di (methyl) acrylate, 1, 6-hexanediol di (methyl) acrylate, 1, 9-nonanediol di (methyl) acrylate, 1, 10-decanediol di (methyl) acrylate; one or more of glycerol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, ethoxylated pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, tripentaerythritol hepta (meth) acrylate, tripentaerythritol octa (meth) acrylate, tetrapentaerythritol nona (meth) acrylate, tetrapentaerythritol deca (meth) acrylate, pentapentaerythritol undec (meth) acrylate, and pentapentaerythritol dodeca (meth) acrylate.
6. The highly heat-resistant yellowing chemical-resistant negative photosensitive resin according to claim 1, wherein:
the components and the contents are as follows:
acrylic copolymer 100 parts
Dipentaerythritol hexaacrylate DPHA 24 parts
8 parts of photoinitiator
350 parts of methyl 3-methoxypropionate
Triglycidyl isocyanurate 16 parts
Silane coupling agent 1 part
1 part of surfactant.
CN202311051933.9A 2023-08-21 2023-08-21 Negative photosensitive resin with high heat resistance, yellowing resistance and chemical corrosion resistance Pending CN117250827A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311051933.9A CN117250827A (en) 2023-08-21 2023-08-21 Negative photosensitive resin with high heat resistance, yellowing resistance and chemical corrosion resistance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311051933.9A CN117250827A (en) 2023-08-21 2023-08-21 Negative photosensitive resin with high heat resistance, yellowing resistance and chemical corrosion resistance

Publications (1)

Publication Number Publication Date
CN117250827A true CN117250827A (en) 2023-12-19

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311051933.9A Pending CN117250827A (en) 2023-08-21 2023-08-21 Negative photosensitive resin with high heat resistance, yellowing resistance and chemical corrosion resistance

Country Status (1)

Country Link
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