CN117249316A - Anti-loose joint, processing equipment of semiconductor device and connection method of liquid pipeline - Google Patents

Anti-loose joint, processing equipment of semiconductor device and connection method of liquid pipeline Download PDF

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Publication number
CN117249316A
CN117249316A CN202311459915.4A CN202311459915A CN117249316A CN 117249316 A CN117249316 A CN 117249316A CN 202311459915 A CN202311459915 A CN 202311459915A CN 117249316 A CN117249316 A CN 117249316A
Authority
CN
China
Prior art keywords
nut
opening
hollow screw
joint
slip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311459915.4A
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Chinese (zh)
Inventor
唐仁鹏
吴凤丽
董文惠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tuojing Technology Shanghai Co ltd
Original Assignee
Tuojing Technology Shanghai Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tuojing Technology Shanghai Co ltd filed Critical Tuojing Technology Shanghai Co ltd
Priority to CN202311459915.4A priority Critical patent/CN117249316A/en
Publication of CN117249316A publication Critical patent/CN117249316A/en
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L19/00—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on or into one of the joint parts
    • F16L19/02—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member
    • F16L19/0206—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member the collar not being integral with the pipe
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L19/00—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on or into one of the joint parts
    • F16L19/02—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member
    • F16L19/0212—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member using specially adapted sealing means
    • F16L19/0218—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member using specially adapted sealing means comprising only sealing rings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L19/00—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on or into one of the joint parts
    • F16L19/02—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member
    • F16L19/0231—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member with specially adapted means for positioning the threaded member behind the collar

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Joints With Pressure Members (AREA)

Abstract

The invention provides an anti-loose joint, processing equipment of a semiconductor device and a connecting method of a liquid pipeline. The anti-loose joint includes: the joint end of the hollow screw is provided with a first external thread; a nut for connecting to an external interface, wherein the nut is circumferentially distributed with at least one opening extending axially thereof, the opening leading to the inside of a first internal thread of the nut and having an inwardly contracting first wedge-type structure at its end; and at least one slip, a first end of which protrudes into the inner side of the nut via the at least one opening, wherein the slip is provided towards a first side of the first internal thread of the nut and/or towards a second side of the hollow screw, with teeth extending in an axial direction of the nut for pressing out deformations on the inner side of the nut and/or on the outer side of the hollow screw when protruding into the first wedge-shaped structure of the corresponding open end, so as to limit the relative rotation between the hollow screw and the nut.

Description

Anti-loose joint, processing equipment of semiconductor device and connection method of liquid pipeline
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to an anti-loose joint, processing equipment of a semiconductor device and a connecting method of a liquid pipeline.
Background
Semiconductor processing equipment has a large number of complex fluid lines and fittings. Due to factors such as vibration, impact, alternating pressure load, alternating temperature load and the like, the threaded joint loosens, and the phenomenon of liquid leakage sometimes occurs. Specifically, there are various modes such as oil heating and water heating in semiconductor devices, and the operations of increasing and decreasing temperature are frequently performed.
In the existing threaded connection structure, nuts and screws are usually adopted to be connected through threads, friction force of a knob is used for locking, and because pulsating load change liquid exists in a pipeline, the liquid pressure acts on a joint of the pipeline in a high-vibration and high-pulse pressure environment, the joint is easy to loosen in threads over time, leakage is caused, and therefore normal operation of an internal circuit of a machine is affected, and even emergency shutdown is carried out.
In order to overcome the above-mentioned drawbacks of the prior art, there is a need in the art for a locking joint technology for locking a joint, thereby reinforcing an original sealing form to improve reliability of the device and extend service life.
Disclosure of Invention
The following presents a simplified summary of one or more aspects in order to provide a basic understanding of such aspects. This summary is not an extensive overview of all contemplated aspects, and is intended to neither identify key or critical elements of all aspects nor delineate the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed description that is presented later.
In order to overcome the defects in the prior art, the invention provides an anti-loosening joint, a processing device of a semiconductor device and a connecting method of a liquid pipeline, which are used for locking the joint, so that the original sealing form is reinforced, the reliability of the device is improved, and the service life is prolonged.
Specifically, the anti-loose joint provided according to the first aspect of the present invention includes: the joint end of the hollow screw is provided with a first external thread; a nut for connecting to an external interface, wherein the nut is circumferentially distributed with at least one opening extending axially thereof, the opening leading to the inside of a first internal thread of the nut and having an inwardly contracting first wedge-type structure at its end; and at least one slip, a first end of which protrudes into the inner side of the nut via the at least one opening, wherein the slip is provided towards a first side of the first internal thread of the nut and/or towards a second side of the hollow screw, with teeth extending in an axial direction of the nut for pressing out deformations on the inner side of the nut and/or on the outer side of the hollow screw when protruding into the first wedge-shaped structure of the corresponding open end, so as to limit the relative rotation between the hollow screw and the nut.
Further, in some embodiments of the present invention, a resilient opening structure of a predetermined depth is provided between the first side and the second side of the slip for deforming during a first stage of the teeth extending into the first wedge structure to allow the slip to continue to extend into the opening and during a second stage of the resilient opening structure extending into the opening to the predetermined depth, deforming on the first internal thread of the nut and/or the first external thread of the hollow screw to limit relative rotation between the hollow screw and the nut.
Further, in some embodiments of the present invention, the second end of the slip is provided with a first limiting portion, wherein the first limiting portion is larger than the opening to limit the depth of action of the tooth portion and the elastic opening structure inside the nut.
Further, in some embodiments of the present invention, the locking joint further comprises: the locking cap is provided with a second internal thread and a second limiting part on the inner side, wherein the second internal thread is used for connecting the second external thread of the nut towards one end of the external interface, and the second limiting part is used for matching with the first limiting part to extend the first end of the at least one slip into the inner side of the nut through the at least one opening in the process of screwing the locking cap into the nut.
Further, in some embodiments of the present invention, the second stop portion is a stop collar for allowing the first stop portion to slide therein during screwing of the locking cap into the nut and engaging the first stop portion to extend the first end of the at least one slip into the interior of the nut via the at least one opening.
Further, in some embodiments of the invention, the slips are made of carburized and quenched low carbon alloy structural steel.
Further, in some embodiments of the present invention, the inner side of the joint end of the hollow screw has a second wedge structure that contracts inwards, the locking joint further includes a sealing ring and a thrust ring, wherein the sealing ring and the thrust ring are both disposed in the wedge structure, and the thrust ring is pressed by the nut to provide thrust to the sealing ring during screwing of the nut into the hollow screw, so that the sealing ring is deformed to seal the joint end of the hollow screw.
Further, in some embodiments of the invention, the external interface comprises an oil heat pipe, a water heat pipe, a thermal oil source, and/or a thermal water source in a processing apparatus of the semiconductor device.
Further, a processing apparatus for a semiconductor device according to a second aspect of the present invention includes: at least one heat source, wherein the heat source is selected from a hot oil source or a hot water source; and at least one liquid pipe, wherein the liquid pipe is connected with the heat source and/or another liquid pipe via the anti-loose joint according to the first aspect of the invention so as to heat or cool the processing equipment of the semiconductor device.
Furthermore, the connection method of the liquid pipeline provided according to the third aspect of the present invention includes the steps of: screwing an internal thread of a nut for connecting an external interface into a first external thread of a joint end of a hollow screw, wherein at least one opening extending along the axial direction of the nut is circumferentially distributed on the nut, the opening is led to the inner side of the first internal thread of the nut, and the tail end of the opening is provided with a first wedge-shaped structure shrinking inwards; and extruding a deformation on the inner side of the nut and/or the outer side of the hollow screw through a tooth part arranged on the first side of the slip facing the first internal thread of the nut and/or the second side of the hollow screw when the slip stretches into the first wedge-shaped structure at the tail end of the corresponding opening so as to limit the relative rotation between the hollow screw and the nut.
Drawings
The above features and advantages of the present invention will be better understood after reading the detailed description of embodiments of the present disclosure in conjunction with the following drawings. In the drawings, the components are not necessarily to scale and components having similar related features or characteristics may have the same or similar reference numerals.
Fig. 1 illustrates an exploded structural schematic view of a check joint provided according to some embodiments of the present invention.
Fig. 2A illustrates a schematic cross-sectional structure of a check joint provided in accordance with some embodiments of the present invention.
Fig. 2B illustrates a schematic cross-sectional structure of a nut provided in accordance with some embodiments of the invention.
Fig. 2C illustrates a schematic structural diagram of a slip provided in accordance with some embodiments of the present invention.
Fig. 2D illustrates a schematic diagram of an external interface provided in accordance with some embodiments of the invention.
Fig. 3 illustrates a schematic diagram of a method of connecting liquid conduits provided in accordance with some embodiments of the present invention.
Reference numerals:
10. hollow screw
101. First external thread
102. Second wedge structure
103. Sealing ring
104. Thrust ring
20. Nut
201. First internal thread
202. An opening
203. First wedge structure
204. Second external thread
30. Slip
301. Tooth part
302. First limit part
303. Elastic opening structure
40. Locking cap
401. Second internal thread
402. Second limit part
50. External interface
Detailed Description
Further advantages and effects of the present invention will become apparent to those skilled in the art from the disclosure of the present specification, by describing the embodiments of the present invention with specific examples. While the description of the invention will be presented in connection with a preferred embodiment, it is not intended to limit the inventive features to that embodiment. Rather, the purpose of the invention described in connection with the embodiments is to cover other alternatives or modifications, which may be extended by the claims based on the invention. The following description contains many specific details for the purpose of providing a thorough understanding of the present invention. The invention may be practiced without these specific details. Furthermore, some specific details are omitted from the description in order to avoid obscuring the invention.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the terms "upper", "lower", "left", "right", "top", "bottom", "horizontal", "vertical" as used in the following description should be understood as referring to the orientation depicted in this paragraph and the associated drawings. This relative terminology is for convenience only and is not intended to be limiting of the invention as it is described in terms of the apparatus being manufactured or operated in a particular orientation.
It will be understood that, although the terms "first," "second," "third," etc. may be used herein to describe various elements, regions, layers and/or sections, these elements, regions, layers and/or sections should not be limited by these terms and these terms are merely used to distinguish between different elements, regions, layers and/or sections. Accordingly, a first component, region, layer, and/or section discussed below could be termed a second component, region, layer, and/or section without departing from some embodiments of the present invention.
As mentioned above, in the existing threaded connection structure, nuts and screws are usually adopted to be in threaded connection, friction force of a knob is used for locking, and because the interior of a pipeline is provided with liquid with pulsation load change, the liquid pressure acts on a joint of the pipeline especially in a high-vibration and high-pulse pressure environment, and the screw thread of the joint is easy to loosen over time, so that leakage is caused, and the normal operation of an internal circuit of a machine is influenced, even the machine is stopped in an emergency.
In order to overcome the above-mentioned drawbacks of the prior art, there is a need in the art for a locking joint technology for locking a joint, thereby reinforcing an original sealing form to improve reliability of the device and extend service life.
In some non-limiting embodiments, the anti-loosening joint provided in the first aspect of the present invention may be configured in the processing apparatus of the semiconductor device provided in the second aspect of the present invention, and the connection method of the liquid pipe provided in the third aspect of the present invention may be implemented based on the processing apparatus of the semiconductor device provided in the second aspect of the present invention. Specifically, the processing apparatus for semiconductor devices provided in the second aspect of the present invention includes at least one heat source and at least one liquid conduit. The heat source is selected from a hot oil source or a hot water source, and the liquid pipe is connected to the heat source and/or another liquid pipe via the above-mentioned anti-loose joint provided in the first aspect, thereby implementing the connection method of the liquid pipe provided in the third aspect of the present invention to heat or cool the processing equipment of the semiconductor device.
Specifically, please refer to fig. 1, fig. 2A to fig. 2D in combination. Fig. 1 illustrates an exploded structural schematic view of a check joint provided according to some embodiments of the present invention. Fig. 2A illustrates a schematic cross-sectional structure of a check joint provided in accordance with some embodiments of the present invention. Fig. 2B illustrates a schematic cross-sectional structure of a nut provided in accordance with some embodiments of the invention. Fig. 2C illustrates a schematic structural diagram of a slip provided in accordance with some embodiments of the present invention. Fig. 2D illustrates a schematic diagram of an external interface provided in accordance with some embodiments of the invention.
As shown in fig. 1 and 2A to 2D, the anti-loose joint comprises at least a hollow screw 10, a nut 20 for connecting to an external interface 50, and at least one slip 30. The hollow screw 10 is provided at its joint end with a first external thread 101, the inside of which has a second wedge-type structure 102 which is inwardly contracted. The wedge structure is also provided with a sealing ring 103 and a thrust ring 104, wherein the thrust ring 104 is extruded by the nut 20 to provide thrust for the sealing ring 103 in the process of screwing the nut 20 into the hollow screw 10, so that the sealing ring 103 is deformed to seal the joint end of the hollow screw 10.
Further, the nut 20 is circumferentially distributed with at least one opening 202 extending in its axial direction, the opening 202 leading to the inside of the first internal thread 201 of the nut 20 and having at its end an inwardly shrinking first wedge-shaped structure 203. The nut 20 is used in a process tool for connecting semiconductor devices, including an external interface 50 for an oil heat pipe, a water heat pipe, a thermal oil source, and/or a hot water source.
Further, the first end of the slips 30 extend into the inside of the nut 20 via the opening 202. Here, the slips 30 are provided with teeth 301 extending in the axial direction of the nut 20 towards the first side of the first internal thread 201 of the nut 20 and/or towards the second side of the hollow screw 10 for pressing out deformations on the inside of the nut 20 and/or on the outside of the hollow screw 10 when extending into the first wedge-shaped structure 203 at the end of the corresponding opening 202, to limit the relative rotation between the hollow screw 10 and the nut 20.
Further, a resilient opening structure 303 of a predetermined depth is provided between the first side and the second side of the slip 30 for deforming during the first stage of the teeth 301 extending into the first wedge structure 203 to allow the slip 30 to continue to extend into the opening 202 for anchoring. In this way, in the second stage in which the elastic opening structure 303 of the slip 30 extends into the opening 202 to a predetermined depth, deformation is pressed on the first internal thread 201 of the nut 20 and/or the first external thread 101 of the hollow screw 10 to limit the relative rotation between the hollow screw 10 and the nut 20, thereby locking the joint.
Further, a first stop 302 is provided at a second end of the slip 30. Here, the first limiting portion 302 is larger than the opening 202 to limit the depth of action of the tooth portion 301 and the elastic opening structure 303 inside the nut 20. So, through inside threaded connection that is equipped with, there is vertical slips 30 to anchor between the screw thread to through the joint structure of bite locking, can make this joint even when bearing violent vibration, still can firmly connect, avoid the dropout. In addition, the structure can be repeatedly used under the condition of not affecting normal sealing.
Further, the slips 30 may be made of carburized and quenched low carbon alloy structural steel to provide increased external strength and internal toughness to press out the nut 20, screw rod, etc., to anchor and prevent loosening of threads due to relative rotation.
The locking joint further comprises a locking cap 40, and a second internal thread 401 and a second limiting portion 402 are disposed on the inner side of the locking cap. Here, the second internal thread 401 is used to connect the second external thread 204 of the end of the nut 20 facing the external interface 50, and the second stop portion 402 is used to cooperate with the first stop portion 302 to extend the first end of the at least one slip 30 into the inner side of the nut 20 via the at least one opening 202 during screwing of the locking cap 40 into the nut 20.
Further, the second stop 402 is a stop ring for allowing the first stop 302 to slide therein during the threading of the locking cap 40 into the nut 20 and cooperate with the first stop 302 to extend the first end of the at least one slip 30 into the interior of the nut 20 via the at least one opening 202.
The working principle of the above-described anti-loose fitting will be described below in connection with some embodiments of the connection method of liquid pipes. It will be appreciated by those skilled in the art that these examples of methods of connecting liquid conduits are merely some non-limiting embodiments provided by the present invention, and are intended to clearly illustrate the general concepts of the present invention and to provide some embodiments that are convenient for public implementation, and are not intended to limit the overall functionality or overall manner of operation of the anti-loose fitting. Similarly, the method of connecting the liquid pipes is just some non-limiting embodiments provided in the present invention, and does not limit the execution bodies or execution sequences of the steps in the method of connecting the liquid pipes.
Referring to fig. 3, fig. 3 is a schematic diagram illustrating a method for connecting liquid pipes according to some embodiments of the present invention.
As shown in fig. 3, in the connection method of the liquid pipe, first, the female screw of the nut 20 for connecting the external port 50 is screwed into the first male screw 101 of the joint end of the hollow screw 10. Thereafter, the first end of the at least one slip 30 is extended into the interior of the nut 20 via the at least one opening 202 by threading the second internal threads 401 of the locking cap 40 into the second external threads 204 of the end of the nut 20 facing the external interface 50. When the slips 30 are extended into the first wedge-shaped structures 203 at the ends of the corresponding openings 202, deformations are pressed out of the inner side of the nut 20 and/or the outer side of the hollow screw 10 via the teeth 301 provided on the first side of the slips 30 facing the first internal thread 201 of the nut 20 and/or the second side of the hollow screw 10 to limit the relative rotation between the hollow screw 10 and the nut 20, thus completing the locking action of the abutment.
In summary, the anti-loosening joint, the processing equipment of the semiconductor device and the connecting method of the liquid pipeline provided by the invention can be used for locking the joint, so that the original sealing form is reinforced, the reliability of the equipment is improved, and the service life is prolonged.
While, for purposes of simplicity of explanation, the methodologies are shown and described as a series of acts, it is to be understood and appreciated that the methodologies are not limited by the order of acts, as some acts may, in accordance with one or more embodiments, occur in different orders and/or concurrently with other acts from that shown and described herein or not shown and described herein, as would be understood and appreciated by those skilled in the art.
The previous description of the disclosure is provided to enable any person skilled in the art to make or use the disclosure. Various modifications to the disclosure will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other variations without departing from the spirit or scope of the disclosure. Thus, the disclosure is not intended to be limited to the examples and designs described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. A check joint, comprising:
the joint end of the hollow screw is provided with a first external thread;
a nut for connecting to an external interface, wherein the nut is circumferentially distributed with at least one opening extending axially thereof, the opening leading to the inside of a first internal thread of the nut and having an inwardly contracting first wedge-type structure at its end; and
at least one slip, the first end of which protrudes into the inner side of the nut via the at least one opening, wherein the slip is provided with teeth extending in the axial direction of the nut towards the first side of the first internal thread of the nut and/or towards the second side of the hollow screw, for pressing out deformations on the inner side of the nut and/or on the outer side of the hollow screw when protruding into the first wedge-shaped structure of the corresponding open end, in order to limit the relative rotation between the hollow screw and the nut.
2. The anti-loose fitting according to claim 1, wherein an elastic opening structure of a predetermined depth is provided between the first side and the second side of the slip for deforming during a first stage in which the teeth extend into the first wedge structure to allow the slip to continue to extend into the opening and for deforming during a second stage in which the elastic opening structure extends into the opening to the predetermined depth to press deformation on the first internal thread of the nut and/or the first external thread of the hollow screw to limit relative rotation between the hollow screw and the nut.
3. The anti-loose fitting of claim 2, wherein the second end of the slip is provided with a first stop portion, wherein the first stop portion is larger than the opening to limit the depth of action of the tooth and the resilient opening structure inside the nut.
4. A check joint according to claim 3, further comprising:
the locking cap is provided with a second internal thread and a second limiting part on the inner side, wherein the second internal thread is used for connecting the second external thread of the nut towards one end of the external interface, and the second limiting part is used for matching with the first limiting part to extend the first end of the at least one slip into the inner side of the nut through the at least one opening in the process of screwing the locking cap into the nut.
5. The locking joint of claim 4, wherein said second stop portion is a stop collar for allowing said first stop portion to slide therein during threading of said locking cap into said nut and engaging said first stop portion to extend a first end of said at least one slip into an interior side of said nut via said at least one opening.
6. The anti-loose joint of claim 2, wherein the slips are made of carburized and quenched low carbon alloy structural steel.
7. The locking joint as set forth in claim 1, wherein said hollow screw has a second wedge-type structure that contracts inward inside said joint end, said locking joint further comprising a sealing ring and a thrust ring, wherein said sealing ring and said thrust ring are both disposed in said wedge-type structure, said thrust ring being pressed by said nut to provide thrust to said sealing ring during screwing of said nut into said hollow screw, deforming said sealing ring to seal said joint end of said hollow screw.
8. The anti-loosening joint of claim 1, wherein the external interface comprises an oil heat pipe, a water heat pipe, a thermal oil source, and/or a hot water source in a processing apparatus of a semiconductor device.
9. A processing apparatus for a semiconductor device, comprising:
at least one heat source, wherein the heat source is selected from a hot oil source or a hot water source; and
at least one liquid conduit, wherein the liquid conduit connects the heat source and/or another liquid conduit via a loose fitting as claimed in any one of claims 1 to 8 to heat or cool processing equipment of the semiconductor device.
10. A method of connecting a liquid conduit, comprising the steps of:
screwing an internal thread of a nut for connecting an external interface into a first external thread of a joint end of a hollow screw, wherein at least one opening extending along the axial direction of the nut is circumferentially distributed on the nut, the opening is led to the inner side of the first internal thread of the nut, and the tail end of the opening is provided with a first wedge-shaped structure shrinking inwards; and
and when the slips are inserted into the first wedge-shaped structure at the tail end of the corresponding opening, the first end of the at least one slip is pressed out of the inner side of the nut and/or the outer side of the hollow screw through teeth arranged on the first side of the slips facing the first internal thread of the nut and/or the second side of the hollow screw, so that the relative rotation between the hollow screw and the nut is limited.
CN202311459915.4A 2023-11-03 2023-11-03 Anti-loose joint, processing equipment of semiconductor device and connection method of liquid pipeline Pending CN117249316A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311459915.4A CN117249316A (en) 2023-11-03 2023-11-03 Anti-loose joint, processing equipment of semiconductor device and connection method of liquid pipeline

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311459915.4A CN117249316A (en) 2023-11-03 2023-11-03 Anti-loose joint, processing equipment of semiconductor device and connection method of liquid pipeline

Publications (1)

Publication Number Publication Date
CN117249316A true CN117249316A (en) 2023-12-19

Family

ID=89137072

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311459915.4A Pending CN117249316A (en) 2023-11-03 2023-11-03 Anti-loose joint, processing equipment of semiconductor device and connection method of liquid pipeline

Country Status (1)

Country Link
CN (1) CN117249316A (en)

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