CN117215160A - Workbench displacement system, displacement control method, electronic equipment and storage medium - Google Patents
Workbench displacement system, displacement control method, electronic equipment and storage medium Download PDFInfo
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Abstract
The invention discloses a workbench displacement system, a displacement control method, electronic equipment and a storage medium. The workbench displacement system comprises a workbench, a motor, an encoder assembly and a displacement control module; the motor is in transmission connection with the workbench; the encoder assembly is fixed with the motor, and is used for detecting the current rotation angle of the motor in real time and sending a current rotation angle signal to the displacement control module; the displacement control module is respectively and electrically connected with the encoder assembly and the motor, and is used for determining the current displacement of the workbench according to the current rotation angle signal and determining the compensation displacement of the workbench when the current displacement is different from the target displacement; the displacement control module is also used for determining the compensation angle of the motor according to the compensation displacement amount and sending a compensation angle signal to the motor; the motor works according to the compensation angle signal until the current displacement of the workbench is equal to the target displacement. By adopting the scheme, the moving precision of the workbench can be improved, and the service life of the system can be prolonged.
Description
Technical Field
The embodiment of the invention relates to the technical field of automatic control, in particular to a workbench displacement system, a displacement control method, electronic equipment and a storage medium.
Background
With the technological development and updating of the semiconductor industry, more and more novel technological development appears, and the requirements on the precision of the photoetching machine are also higher and higher. In the prior art, a workbench of a photoetching machine is driven by a motor, and at present, a mode of transmitting a given position signal to the motor and rotating the motor according to the given position signal to drive the workbench to reach a target position is generally adopted. Under the setting mode, the displacement control precision of the workbench of the photoetching machine is poor, and the error between the actual position and the target position in the working process of the workbench is large, so that the position precision of the workbench is influenced, and the service life of the workbench of the photoetching machine is also influenced.
Disclosure of Invention
In view of the above, embodiments of the present invention provide a table displacement system, a displacement control method, an electronic device, and a storage medium, which are applicable to a lithography machine, so as to improve the displacement accuracy of a table and prolong the service life of the table displacement system.
In a first aspect, an embodiment of the present invention provides a table displacement system, including a table, a motor, an encoder assembly, and a displacement control module;
The motor is in transmission connection with the workbench, and the motor drives the workbench to move in a rotating manner;
the encoder assembly is fixed with the motor and is used for detecting the current rotation angle of the motor in real time and generating a current rotation angle signal;
the displacement control module is respectively and electrically connected with the encoder assembly and the motor, and is used for determining the current displacement of the workbench according to the current rotation angle signal and determining the compensation displacement of the workbench when the current displacement is different from a target displacement; the displacement control module is also used for determining the compensation angle of the motor according to the compensation displacement quantity and sending a compensation angle signal to the motor;
and the motor works according to the compensation angle signal until the current displacement of the workbench is equal to the target displacement.
In a second aspect, an embodiment of the present invention further provides a displacement control method of a workbench displacement system, which is applicable to the workbench displacement system provided in any embodiment of the present invention, where the displacement control method includes:
the encoder component detects the current rotation angle of the motor in real time and sends a current rotation angle signal to the displacement control module;
The displacement control module determines the current displacement of the workbench according to the current rotation angle signal, and determines the compensation displacement of the workbench when the current displacement is different from a target displacement; the displacement control module further determines a compensation angle of the motor according to the compensation displacement amount and sends a compensation angle signal to the motor;
and the motor works according to the compensation angle signal until the current displacement of the workbench is equal to the target displacement.
In a third aspect, an embodiment of the present invention further provides an electronic device, including:
one or more processors;
a storage means for storing one or more programs;
the one or more programs are executed by the one or more processors, so that the one or more processors implement the displacement control method of the workbench displacement system provided by the embodiment of the invention.
In a fourth aspect, an embodiment of the present invention further provides a computer readable storage medium, on which a computer program is stored, where the program when executed by a processor implements the displacement control method of the table displacement system provided by the embodiment of the present invention.
The workbench displacement system provided by the embodiment of the invention comprises a workbench, a motor, an encoder assembly and a displacement control module; the motor is in transmission connection with the workbench, and the motor rotates to drive the workbench to move; the encoder assembly is fixed with the motor, and is used for detecting the current rotation angle of the motor in real time and sending a current rotation angle signal to the displacement control module; the displacement control module is respectively and electrically connected with the encoder assembly and the motor, and is used for determining the current displacement of the workbench according to the current rotation angle signal and determining the compensation displacement of the workbench when the current displacement is different from the target displacement; the displacement control module is also used for determining the compensation angle of the motor according to the compensation displacement amount and sending a compensation angle signal to the motor; the motor works according to the compensation angle signal until the current displacement of the workbench is equal to the target displacement. In the scheme, the control action of the system is regulated by the deviation value of the actual displacement and the target displacement, so that the actual displacement and the target displacement are as close as possible to compensate errors generated in the moving process of the workbench, the moving precision of the workbench is improved, and the service life of the workbench displacement system is prolonged.
Drawings
FIG. 1 is a schematic circuit diagram of a displacement system of a workbench according to an embodiment of the invention;
fig. 2 is a schematic structural diagram of a workbench according to an embodiment of the invention;
FIG. 3 is a schematic circuit diagram of another stage displacement system according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a code disc according to an embodiment of the present invention;
FIG. 5 is a schematic circuit diagram of another stage displacement system according to an embodiment of the present invention;
fig. 6 is a flowchart of a displacement control method of a table displacement system according to an embodiment of the present invention.
Detailed Description
The invention is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present invention are shown in the drawings.
Before discussing exemplary embodiments in more detail, it should be mentioned that some exemplary embodiments are described as processes or methods depicted as flowcharts. Although a flowchart depicts operations (or steps) as a sequential process, many of the operations can be performed in parallel, concurrently, or at the same time. Furthermore, the order of the operations may be rearranged. The process may be terminated when its operations are completed, but may have additional steps not included in the figures. The processes may correspond to methods, functions, procedures, subroutines, and the like. Furthermore, embodiments of the invention and features of the embodiments may be combined with each other without conflict.
The term "comprising" and variants thereof as used herein is intended to be open ended, i.e., including, but not limited to. The term "based on" is based at least in part on. The term "one embodiment" means "at least one embodiment".
It should be noted that the terms "first," "second," and the like herein are merely used for distinguishing between corresponding contents and not for defining a sequential or interdependent relationship.
It should be noted that references to "one", "a plurality" and "a plurality" in this disclosure are intended to be illustrative rather than limiting, and those skilled in the art will appreciate that "one or more" is intended to be construed as "one or more" unless the context clearly indicates otherwise.
Based on the drawbacks of the prior art mentioned in the background, embodiments of the present invention provide a stage displacement system that is applicable to a lithographic apparatus for controlling a stage of the lithographic apparatus. Fig. 1 is a schematic circuit diagram of a table displacement system according to an embodiment of the present invention, and fig. 2 is a schematic circuit diagram of a table according to an embodiment of the present invention, where fig. 1 and fig. 2 can be combined to refer to the table displacement system according to an embodiment of the present invention, where the table displacement system includes: a table 1, a motor 2, an encoder assembly 3 and a displacement control module 4. The motor 2 is connected with the workbench 1 in a transmission way, and the motor 2 rotates to drive the workbench 1 to move. The encoder assembly 3 is fixed with the motor 2, and the encoder assembly 3 is used for detecting the current rotation angle of the motor 2 in real time and sending a current rotation angle signal to the displacement control module 4. The displacement control module 4 is respectively and electrically connected with the encoder assembly 3 and the motor 2, and the displacement control module 4 is used for determining the current displacement of the workbench 1 according to the current rotation angle signal and determining the compensation displacement of the workbench 1 when the current displacement is different from the target displacement; the displacement control module 4 is further configured to determine a compensation angle of the motor 2 according to the compensation displacement amount, and send a compensation angle signal to the motor 2. The motor 2 operates according to the compensation angle signal until the current displacement amount of the table 1 is equal to the target displacement amount.
Specifically, as shown in fig. 1 and 2, taking an example in which the displacement system of the table 1 is applied to a lithographic apparatus, the table 1 may be a carrier for placing a wafer or a device to be etched. The motor 2 can be connected with the workbench 1 through a screw rod, and when the motor 2 rotates, the motor 2 drives the workbench 1 to move. It will be appreciated that after the rotation angle of the motor 2 is determined, the displacement of the motor 2 to move the table 1 may also be determined.
The encoder assembly 3 may be fixed to the motor 2, and the encoder assembly 3 includes a rotation angle signal output end 3a, and the rotation angle signal output end 3a is electrically connected to the displacement control module 4. The displacement control module 4 includes a rotation angle signal receiving end 4a and a compensation angle signal output end 4b, the rotation angle signal receiving end 4a is electrically connected with the rotation angle signal output end 3a, and the compensation angle signal output end 4b is electrically connected with the motor 2. The encoder assembly 3 can detect the real-time rotation angle (i.e. the current rotation angle) of the motor 2 during the movement of the table 1, and generate a current rotation angle signal corresponding to the current rotation angle, so as to transmit the current rotation angle signal to the rotation angle signal receiving end 4a of the displacement control module 4 through the rotation angle signal output end 3 a. The arrows on the connection lines between the modules shown in fig. 2 may indicate the signal transmission direction.
The displacement control module 4 may be a main control module, and the rotation angle signal receiving end 4a of the displacement control module 4 is configured to receive a current rotation angle signal. After receiving the current rotation angle signal, the displacement control module 4 analyzes the current rotation angle signal to determine the current rotation angle of the motor 2; and thus the current displacement amount of the table 1 is determined according to the current rotation angle. The current displacement amount can also be understood as the actual displacement amount of the table 1. After the current displacement is determined, the displacement control module 4 can compare the current displacement with the target displacement, if there is a deviation between the current displacement and the target displacement, the compensation displacement is determined according to the deviation value between the current displacement and the target displacement, and then the angle (namely the compensation angle) of the motor 2 which is required to rotate is calculated according to the compensation displacement.
After the compensation angle is determined, the displacement control module 4 may generate a compensation angle signal that reflects the compensation angle and transmit the compensation angle signal to the motor 2 via the compensation angle signal output 4b, and the motor 2 operates according to the compensation angle signal. After the motor 2 rotates according to the compensation angle signal, the encoder assembly 3 continues to detect the current rotation angle of the motor 2 after the workbench 1 moves, the displacement control module 4 continues to determine the current displacement according to the current rotation angle, and the process is circularly executed until the current displacement of the workbench 1 is equal to the target displacement. It will be appreciated that if there is no deviation between the current displacement amount and the target displacement amount, it may be determined that the table 1 is moved to the target position, and the displacement control module 4 no longer controls the table 1 to move.
Wherein the target displacement amount may be input by a user, but is not limited thereto. The current rotation angle signal and the compensation angle signal may be electrical signals or digital signals, which are not limited in the embodiment of the present invention.
The encoder assembly 3 may be an absolute type photoelectric encoder or an incremental type photoelectric encoder, but is not limited thereto, and the encoder assembly 3 may be fixed to the spindle of the motor 2 or fixed to the housing of the motor 2. The embodiment of the invention is not limited to the specific structure and the installation position of the encoder assembly 3, and a person skilled in the art can set the encoder assembly according to actual requirements, so that the encoder assembly 3 can detect the rotation angle of the motor 2.
Alternatively, in a possible embodiment, the number of motors and the number of encoder assemblies are 2, and the two motor control tables are moved in a first direction and a second direction, respectively, the first direction and the second direction being perpendicular. The two encoder assemblies are electrically connected with the two motors in a one-to-one correspondence manner, and are used for detecting the current rotation angles of the motors which are respectively and correspondingly electrically connected in real time and respectively sending the current rotation angle signals which are respectively and correspondingly to the displacement control module. The displacement control module respectively determines the current displacement of the workbench in two directions according to the received two current rotation angle signals, and respectively determines the compensation displacement of the workbench in two directions when the current displacement is different from the target displacement; the displacement control module is also used for determining the compensation angles of the two motors according to the compensation displacement amount and respectively sending the two compensation angle signals to the corresponding motors.
Specifically, as shown in fig. 2, during the photolithography process, the table 1 may move in two directions that are horizontal and perpendicular to each other, and a rectangular coordinate system may be constructed by taking the first direction X as the X axis and taking the second direction Y as the Y axis, and displacement amounts of the first direction X and the second direction Y may form a position coordinate of the table 1 in the rectangular coordinate system. The two encoder assemblies (not shown in the figure) respectively detect the current rotation angles of the motors (not shown in the figure) which are correspondingly and electrically connected, respectively generate current rotation angle signals, and further respectively send the current rotation angle signals to the displacement control module. Wherein, optionally, the number of the displacement control modules may be one or two, which is not limited in this embodiment of the present invention.
For example, in an alternative embodiment, the number of displacement control modules is 1, and the displacement control modules may respectively include two rotation angle signal receiving ends and two compensation angle signal output ends, where the rotation angle signal receiving ends are electrically connected to the encoder assemblies in a one-to-one correspondence, and the compensation angle signal output ends are electrically connected to the motors in a one-to-one correspondence.
In this embodiment, taking a displacement control module as an example, the displacement control module has two rotation angle signal receiving ends (not shown in the figure) that receive the current rotation angle signals transmitted by the rotation angle signal output ends of the two encoder assemblies in a one-to-one correspondence manner, and then the displacement control module can determine the current displacement amount of the workbench 1 in the first direction X and the second direction Y, that is, the current position coordinates of the workbench 1, according to each current rotation angle signal. Accordingly, the target displacement amount may be a target position coordinate of the table 1, which may include target displacement amounts of the table 1 in the first direction X and the second direction Y.
Further, the displacement control module may determine whether the current displacement in the first direction X is the same as the target displacement in the first direction X, and whether the current displacement in the second direction Y is the same as the target displacement in the second direction Y, respectively. If the current displacement amounts in the first direction X and the second direction Y are the same as the target displacement amounts, it is determined that the table 1 reaches the target positions in the first direction X and the second direction Y, that is, the table reaches the target positions in the X and Y axes. And if the current displacement amounts of the first direction X and the second direction Y are different from the target displacement amounts, respectively determining the compensation displacement amounts of the workbench 1 in the first direction X and the second direction Y, further determining the compensation angles of the two motors according to the compensation displacement amounts of the first direction X and the second direction Y, and respectively transmitting the two compensation angle signals to the corresponding motors 2 through corresponding compensation angle signal output ends.
In other embodiments, not shown, the number of displacement control modules may be two, and the two displacement control modules are respectively electrically connected to the two encoder assemblies and the two motors. The two displacement control modules respectively determine the current displacement quantity in the respective corresponding directions according to the current rotation signals transmitted by the electrically connected encoder assemblies, and further generate the compensation displacement quantity in the corresponding directions and the compensation angle signals of the motors when the current displacement quantity is different from the target displacement quantity, and the two motors respectively rotate according to the received compensation angle signals.
The current rotation angle of the motor indicated in the following embodiments of the present invention may be any one or two corresponding current rotation angles of the two motors, and correspondingly, the current displacement amount of the workbench may refer to the current displacement amount of the workbench corresponding to any one or two directions.
The control logic of the scheme is to carry out closed-loop control on the displacement of the workbench, wherein the closed-loop control is a feedback control mode, and the output of a controlled object is used as a feedback signal for control. In closed loop control, the controller adjusts the output signal based on the difference (error) between the feedback signal and the desired reference input so that the system output is as close as possible to the reference input. The mechanism of the feedback control can enable the system to automatically adjust to disturbance and change, thereby improving stability and precision. The high-precision control of the workbench of the photoetching machine can be realized by utilizing a closed-loop control mode. Specifically, negative feedback control of closed loop control can be selected, and the stability of the negative feedback control is higher.
The control action of the system is regulated by the deviation value of the actual displacement and the target displacement, so that the actual displacement and the target displacement are as close as possible to compensate the error generated in the moving process of the workbench, thereby improving the precision of the work movement and prolonging the service life of the workbench displacement system.
The workbench displacement system provided by the embodiment of the invention comprises a workbench, a motor, an encoder assembly and a displacement control module; the motor is in transmission connection with the workbench, and the motor rotates to drive the workbench to move; the encoder assembly is fixed with the motor, and is used for detecting the current rotation angle of the motor in real time and sending a current rotation angle signal to the displacement control module; the displacement control module is respectively and electrically connected with the encoder assembly and the motor, and is used for determining the current displacement of the workbench according to the current rotation angle signal and determining the compensation displacement of the workbench when the current displacement is different from the target displacement; the displacement control module is also used for determining the compensation angle of the motor according to the compensation displacement amount and sending a compensation angle signal to the motor; the motor works according to the compensation angle signal until the current displacement of the workbench is equal to the target displacement. In the scheme, the control action of the system is regulated by the deviation value of the actual displacement and the target displacement, so that the actual displacement and the target displacement are as close as possible to compensate errors generated in the moving process of the workbench, the moving precision of the workbench is improved, and the service life of the workbench displacement system is prolonged.
Optionally, the displacement control module may include a proportional controller (P controller), a proportional-integral controller (PI controller), or a proportional-integral-derivative controller (PID controller), which may be implemented by any person skilled in the art and are not described in detail herein.
Optionally, fig. 3 is a schematic circuit diagram of another table displacement system according to an embodiment of the present invention, and referring to fig. 3, in a possible embodiment, the encoder assembly includes a code wheel 31 and a detection unit 32 that are electrically connected, where the code wheel 31 rotates synchronously with the motor 2; the displacement control module comprises a comparing element 41 and a workbench control unit 42 which are electrically connected, wherein the comparing element 41 is electrically connected with the detection unit 32, and the workbench control unit 42 is electrically connected with the motor 2. The detecting unit 32 is configured to obtain a current rotation angle of the code wheel 31, determine a current rotation angle of the motor 2 according to the current rotation angle, and generate a current rotation angle signal; wherein the rotation angle of the code wheel 31 corresponds to the rotation angle of the motor 2 one by one. The comparing element 41 is configured to receive the current rotation angle signal and determine a current displacement amount of the workbench 1 according to the current rotation angle signal; the comparing element 41 is further configured to determine a compensation displacement amount of the table 1 when the current displacement amount is different from the target displacement amount, determine a compensation angle of the motor 2 according to the compensation displacement amount, and generate a compensation angle signal; the table control unit 42 is configured to receive the compensation angle signal and send the compensation angle signal to the motor 2.
Specifically, as an alternative embodiment, the encoder assembly may be an absolute photoelectric encoder, which is a rotation detection device. The absolute photoelectric encoder is composed of a code wheel 31 and a detection unit 32, and the code wheel 31 may be fixed to a main shaft of the motor 2 or to a housing of the motor 2 to rotate in synchronization with the motor 2. Fig. 4 is a schematic structural diagram of a code wheel according to an embodiment of the present invention, and as shown in fig. 4, the code wheel 31 may be a binary code wheel, which is made of a plurality of metals on a non-conductive substrate to make it conductive, wherein a shaded portion is a conductive region, and the other portion is an insulating region. Each radial direction, which is a pattern of concentric circles, represents an absolute count value, and the turns making up the code are generally referred to as code tracks 310, and the innermost turn of code wheel 31 is a common code track 310, which is connected to all conductive portions of each code track 310, and is connected to a negative electrode (not shown) of a power supply via brushes (not shown) and resistors (not shown). Brushes are mounted on each track 310 of the code wheel 31, the position of the brushes being fixed, the brushes being connected to the positive pole of the power supply via resistors.
When the motor 2 drives the code wheel 31 to rotate together, the relative positions of the brushes and the code wheel 31 change, and the resistance connected with the brushes in series can have two conditions that current passes or no current passes. The electric brush contacts with a conductive area, and a current passes through a resistor in a loop and is output as 1; in contrast, the electric brush contacts an insulation area, no current passes through the resistor, and the output is 0. Thus, a 4-bit binary code consisting of "1" and "0" can be obtained according to the position of the brush. If the code wheel 31 rotates clockwise, the digital signal output coded according to the specification can be obtained in turn.
Referring to fig. 3, the detecting unit 32 includes a rotation angle signal output terminal 3a; the comparing element 41 includes a rotation angle signal receiving end 4a, and the table control unit 42 includes a compensation angle signal output end 4b. The detecting unit 32 can determine the current rotation angle of the code wheel 31 according to the output digital signal, and the rotation angle of the code wheel 31 is the rotation angle of the motor 2 because the code wheel 31 and the motor 2 rotate synchronously. After determining the current rotation angle of the motor 2, the detection unit 32 generates a current rotation angle signal and transmits the current rotation angle signal to the displacement control module 4 through the rotation angle signal output terminal 3a thereof.
Further, the comparing element 41 of the displacement control module 4 may be a controller mentioned in the above embodiment, and the comparing element 41 is provided with the current rotation angle signal receiving end 4a. The specific structure of the comparison element 41 may be a relay board provided with various electronic components, but is not limited thereto. For example, the correspondence between the rotation angle of the motor 2 and the displacement of the table 1 may be pre-stored in the comparing element 41, and the comparing element 41 may determine the current displacement of the table 1 based on the correspondence after receiving the current rotation angle signal transmitted by the detecting unit 32.
If the current displacement does not reach the target displacement, the comparing element 41 may calculate a difference between the two, i.e. the compensation displacement, and may determine a compensation angle based on a correspondence between the rotation angle of the motor 2 and the displacement of the table 1, i.e. the rotation angle of the motor 2 when the table 1 moves by the compensation displacement. The comparing element 41 generates a compensation angle signal that reflects the compensation angle and sends the compensation angle signal to the table control unit 42. The table control unit 42 transmits the compensation angle signal to the motor 2 through the compensation angle signal output terminal 4b to control the motor 2 to continue rotating the compensation angle. After the motor 2 rotates by the compensation angle, the detecting unit 32 of the encoder assembly 3 continues to detect the current rotation angle of the motor 2, the comparing element 41 continues to execute the above-mentioned comparison procedure, and if the current displacement of the workbench 1 still does not reach the target displacement, the motor 2 is continuously controlled to rotate; if the current displacement amount of the table 1 reaches the target displacement amount, the control operation can be ended. Normally, the table 1 can reach the target displacement amount after the motor 2 rotates by the compensation angle again.
Alternatively, the method in which the comparing element determines the current displacement amount of the table based on the current rotation angle and determines the compensation angle based on the compensation displacement amount is not limited to the above-described embodiments. By way of example, the operation of an alternative comparison element is described below.
Specifically, the comparing element may be further configured to determine the current displacement amount of the table according to the formula (1) and the formula (2);
S 1 ＝θ 1 *P/360° (1)
S 2 ＝(θ 2 /θ 1 )*S 1 (2)
wherein θ 1 For distinguishing the angle theta of the unit rotation of the code disc 1 ＝360°/2 n N is the number of code tracks on the code disc, n is an integer, and n is more than or equal to 23 and less than or equal to 29; s is S 1 The unit displacement of the workbench corresponding to the unit resolution angle is represented by P, and the lead of the lead screw of the motor is represented by P when the motor rotates for one circle; s is S 2 For the current displacement of the table, θ 2 Is the current rotation angle of the motor.
The comparison element may also be used to determine the compensation displacement according to equation (3) and the compensation angle according to equation (4);
S＝S 3 -S 2 (3)
θ 3 ＝S/S 1 (4)
wherein S is the compensation displacement, S 3 For the target displacement quantity, θ 3 To compensate for the angle.
The comparison element may comprise, for example, a current displacement amount determination unit and a compensation angle determination unit; the first end of the current displacement amount determining unit is a rotation angle signal receiving end, and the second end of the current displacement amount determining unit is electrically connected with the first end of the compensation angle determining unit; the second end of the compensation angle determining unit is electrically connected with the workbench control unit. The current displacement amount determining unit of the comparing element may be used to determine the current displacement amount of the table according to the formula (1) and the formula (2); the compensation angle determining unit may be configured to determine the compensation displacement amount according to formula (3) and determine the compensation angle according to formula (4).
Those skilled in the art will recognize that, according to the resolution angle formula of the absolute photoelectric encoder: θ 1 ＝360°/2 n For an absolute photoelectric encoder, the more the number n of code tracks on a code disc is, the unit resolution angle theta of the encoder 1 The smaller the unit resolution angle theta 1 To detect the minimum rotation angle of the code disc, the unit resolution angle theta 1 The smaller the encoder, the higher the accuracy that can be achieved when measuring. In this embodiment, the code disc may be set to include 23-29 code tracks, so as to improve the resolution of the encoder assembly and improve the detection accuracy. From the above, the unit resolution angle θ of the code wheel is the same as the rotation angle of the motor 1 I.e. the unit resolution angle theta when the motor rotates 1 . When the number of code channels is controlled in the range, the unit displacement of the motor during rotation is in nanometer level, and meets the use requirement of the photoetching machine.
The motor is generally connected with the workbench through a screw rod, and the motor rotates to drive the screw rod to move so as to drive the workbench to move. The lead screw lead P refers to the displacement of the workbench when the motor rotates for one circle (namely 360 DEG), and the unit resolution angle theta 1 The product of the lead P of the lead screw and the lead screw is divided by 360 degrees to obtain a unit resolution angle theta 1 Unit displacement S of lower working table 1 Or it is understood that the motor is rotated by a unit resolution angle theta 1 Unit displacement S of table movement 1 . The specific value of the lead screw P is related to the connection mode of the actual motor and the workbench, and the embodiment of the invention is not limited to the value of the lead screw P, and in the workbench displacement system of the current photoetching machine, the lead screw P can be set to be 3.
When the unit displacement S of the workbench 1 When known, in an electric machineIn the process of rotating and driving the workbench to move, the current rotation angle theta of the motor is detected in real time 2 Current rotation angle θ 2 From a unit resolution angle theta 1 The ratio of (2) is the number of the resolution angles of the motor rotation, (theta) 2 /θ 1 ) And a unit displacement S 1 The product of (2) is the current displacement S of the workbench 2 。
Further, the user can move the target displacement S of the workbench according to the actual requirement 3 Input value workbench displacement system, and comparison element compares target displacement S 3 And the current displacement S 2 The compensation displacement S can be obtained by making the difference, and then the compensation angle theta corresponding to the compensation displacement S can be calculated according to the formula (4) 3 。
Optionally, fig. 5 is a schematic circuit diagram of still another table displacement system according to an embodiment of the present invention, and referring to fig. 5, in a possible embodiment, the displacement control module 4 may further include a signal amplifier 43, where the signal amplifier 43 is used to electrically connect the table control unit 42 and the motor 2; the workbench control unit 42 is further configured to receive the compensation angle signal and send the compensation angle signal to the signal amplifier 43; the signal amplifier 43 is used to send the amplified compensation angle signal to the motor 2.
As shown in fig. 5, a signal amplifier 43 may be further disposed in the displacement control module 4, and the table control unit 42 and the motor 2 are electrically connected through the signal amplifier 43. The signal amplifier 43 can perform the function of signal amplification, and the compensation angle signal is generally smaller and insufficient to drive the load, in this embodiment, the signal amplifier 43 is disposed between the workbench control unit 42 and the motor 2, and the signal amplifier 43 can amplify the compensation angle signal and then send the amplified compensation angle signal to the motor 2, so that the motor 2 is driven to rotate by a larger signal, and the driving effect of the motor 2 is ensured.
Optionally, with continued reference to fig. 5, in an embodiment of the present invention, the table displacement system may further include a target displacement amount acquisition module 5, where the target displacement amount acquisition module 5 is electrically connected to the encoder assembly 3, and the target displacement amount acquisition module 5 is configured to acquire the target displacement amount and send the target displacement amount to the encoder assembly 3.
Specifically, the target displacement amount obtaining module 5 may be disposed in a main control system of the lithography machine, and after the target displacement amount of the workbench 1 is input by a user, the target displacement amount obtaining module 5 may transmit the obtained target displacement amount to the encoder assembly 3, so as to provide a target value for the encoder assembly 3.
Optionally, with continued reference to fig. 5, in an embodiment of the present invention, the displacement system of the table 1 may further include a servo system 6, where the servo system 6 is used to connect the displacement control module 4 and the motor 2; the servo system 6 is used for analyzing the control signal sent by the displacement control module 4 to the motor 2 and transmitting the analyzed control signal to the motor 2.
The servo system 6, also called a follower system, is a feedback control system for accurately following or reproducing a certain process. The servo system 6 is an automatic control system that enables an output controlled quantity such as a position, orientation, or state of an object to follow an arbitrary change in an input target (or given value). The main task of the device is to amplify, transform, regulate and control the power according to the requirement of the control command, so that the torque, speed and position output by the driving device are controlled flexibly and conveniently.
In an alternative embodiment, as shown in fig. 5, a table control unit 42 in the displacement control module 4 may be connected to the motor 2 using a servo 6. In the initial working stage of the displacement system of the table 1, the target displacement amount acquisition module 5 may send the target displacement amount of the table 1 to the table control unit 42, where the target displacement amount corresponds to the position coordinates of the table 1. The table control unit 42 converts the corresponding position coordinates into digital signals (i.e., control signals) and transmits the digital signals to the servo system 6. The servo system 6 may parse the received digital signal and transmit the parsed result to the motor 2, the motor 2 starts to operate, and then the encoder assembly 3 and the displacement control module 4 perform the motor 2 compensation adjustment operation in the above embodiment.
The signal amplifier 43 may be disposed separately or integrally with the servo system 6, which is not limited in this embodiment of the present invention, and the specific arrangement of the signal amplifier 43 and the servo system 6 may be set by those skilled in the art according to actual requirements.
The table displacement system provided in the embodiments of the present invention may further include any structural component known to those skilled in the art, which is not limited in this embodiment.
Based on the same conception, the embodiment of the invention also provides a displacement control method of the workbench displacement system, which can be used for controlling the workbench displacement system provided by any embodiment of the invention. The structure of the table displacement system may refer to the above embodiments and the drawings corresponding to the above embodiments. Fig. 6 is a flowchart of a displacement control method of a table displacement system according to an embodiment of the present invention, and reference may be made to fig. 6, where the displacement control method includes the following steps:
s110, detecting the current rotation angle of the motor in real time by the encoder assembly, and sending a current rotation angle signal to the displacement control module.
The encoder assembly can be fixed with the motor, and can detect the real-time rotation angle (namely the current rotation angle) of the motor in the moving process of the workbench, and generate a current rotation angle signal corresponding to the current rotation angle, so that the current rotation angle signal is transmitted to the rotation angle signal receiving end of the displacement control module through the rotation angle signal output end.
S120, a displacement control module determines the current displacement of the workbench according to the current rotation angle signal, and determines the compensation displacement of the workbench when the current displacement is different from the target displacement; the displacement control module also determines a compensation angle of the motor according to the compensation displacement amount and sends a compensation angle signal to the motor.
The displacement control module can be a main control module, and the rotation angle signal receiving end of the displacement control module is used for receiving the current rotation angle signal. After receiving the current rotation angle signal, the displacement control module analyzes the current rotation angle signal to determine the current rotation angle of the motor; and then determining the current displacement of the workbench according to the current rotation angle. The current displacement amount may also be understood as the actual displacement amount of the table. After the current displacement is determined, the displacement control module can compare the current displacement with the target displacement, if deviation exists between the current displacement and the target displacement, the compensation displacement is determined according to the deviation value between the current displacement and the target displacement, and then the motor is calculated according to the angle (namely the compensation angle) required to rotate according to the compensation displacement.
And S130, the motor works according to the compensation angle signal until the current displacement of the workbench is equal to the target displacement.
After the compensation angle is determined, the displacement control module can generate a compensation angle signal reflecting the compensation angle and transmit the compensation angle signal to the motor through the compensation angle signal output end, and the motor works according to the compensation angle signal. After the motor rotates according to the compensation angle signal, the encoder component continues to detect the current rotation angle of the motor after the workbench moves, the displacement control module continues to determine the current displacement according to the current rotation angle, and the process is circularly executed until the current displacement of the workbench is equal to the target displacement. It will be appreciated that if there is no deviation between the current displacement and the target displacement, it may be determined that the table is moving to the target position, and the displacement control module no longer controls the table to move.
According to the displacement control method provided by the embodiment of the invention, the control action of the system is regulated by the deviation value of the actual displacement and the target displacement, so that the actual displacement and the target displacement are as close as possible to compensate the error generated in the moving process of the workbench, the moving precision of the workbench is improved, and the service life of the workbench displacement system is prolonged.
The displacement control method of the workbench displacement system provided by the embodiment of the invention comprises all technical characteristics and corresponding beneficial effects of the workbench displacement system provided by any embodiment of the invention.
Optionally, in a possible embodiment, the motion control module comprises a comparison element and a table control unit electrically connected; the encoder assembly comprises a code wheel and a detection unit which are electrically connected, the code wheel and the motor synchronously rotate, and the detection unit is electrically connected with the comparison element. The step S120 may be further refined as follows: step one, a detection unit obtains the current rotation angle of a code wheel, determines the current rotation angle of a motor according to the current rotation angle, and generates a current rotation angle signal; step two, the comparison element receives the current rotation angle signal and determines the current displacement of the workbench according to the current rotation angle signal; step three, when the current displacement is different from the target displacement, the comparison element determines the compensation displacement of the workbench, determines the compensation angle of the motor according to the compensation displacement, and generates a compensation angle signal; and step four, the workbench control unit receives the compensation angle signal and sends the compensation angle signal to the motor.
Optionally, in a possible embodiment, the step two may be thinned to: determining the current displacement of the workbench according to the formula (1) and the formula (2);
S 1 ＝θ 1 *P/360° (1)
S 2 ＝(θ 2 /θ 1 )*S 1 (2)
wherein θ 1 For distinguishing the angle theta of the unit rotation of the code disc 1 ＝360°/2 n N is the number of code tracks on the code disc, n is an integer, and n is more than or equal to 23 and less than or equal to 29; s is S 1 The unit displacement of the workbench corresponding to the unit resolution angle is represented by P, and the lead of the lead screw of the motor is represented by P when the motor rotates for one circle; s is S 2 For the current displacement of the table, θ 2 The current rotation angle of the motor;
step three may be refined as: determining a compensation displacement according to the formula (3), and determining a compensation angle according to the formula (4);
S＝S 3 -S 2 (3)
θ 3 ＝S/S 1 (4)
wherein S is the compensation displacement, S 3 For the target displacement quantity, θ 3 To compensate for the angle.
Optionally, the displacement control module may further include a signal amplifier for electrically connecting the table control unit and the motor. Step four in the above embodiment may be thinned as follows: the workbench control unit receives the compensation angle signal and sends the compensation angle signal to the signal amplifier, and the signal amplifier sends the amplified compensation angle signal to the motor.
Optionally, the table displacement system may further include a target displacement amount acquisition module electrically connected to the encoder assembly. Prior to S120 in the above embodiment, the displacement control method may further include: the target displacement amount acquisition module acquires a target displacement amount and transmits the target displacement amount to the encoder assembly.
Optionally, the workbench displacement system may further include a servo system, where the servo system is used to connect the displacement control module and the motor; the displacement control method may further include: the servo system analyzes the control signal sent by the displacement control module to the motor and transmits the analyzed control signal to the motor.
The embodiment of the invention also provides electronic equipment, which comprises: one or more processors; a storage means for storing one or more programs; the processor in the apparatus may be one or more, and the one or more programs are executed by the one or more processors, so that the one or more processors implement a displacement control method of the table displacement system according to any one of the embodiments of the present invention.
The processor and the storage in the electronic device may be connected by a bus or other means. The storage device in the electronic apparatus is used as a computer readable storage medium for storing one or more programs, and the programs may be software programs, computer executable programs and modules. The processor executes various functional applications and data processing of the terminal device by running the software program, instructions and modules stored in the storage device, that is, the displacement control method of the table displacement system in the above-described method embodiment is implemented.
The storage device may include a storage program area and a storage data area, wherein the storage program area may store an operating system, at least one application program required for a function; the storage data area may store data created according to the use of the device, etc. Further, the storage means may comprise high speed random access memory, and may also comprise non-volatile memory, such as at least one magnetic disk storage device, flash memory device, or other non-volatile solid state storage device. In some examples, the storage may further include memory remotely located with respect to the processor, the remote memory being connectable to the device through a network. Examples of such networks include, but are not limited to, the internet, intranets, local area networks, mobile communication networks, and combinations thereof.
The embodiment of the invention also provides a computer readable storage medium, on which a computer program is stored, which when being executed by a processor is used for executing the displacement control method of the workbench displacement system provided by any embodiment of the invention.
The computer storage media of embodiments of the invention may take the form of any combination of one or more computer-readable media. The computer readable medium may be a computer readable signal medium or a computer readable storage medium. The computer readable storage medium can be, for example, but not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or a combination of any of the foregoing. More specific examples (a non-exhaustive list) of the computer-readable storage medium would include the following: an electrical connection having one or more wires, a portable computer diskette, a hard disk, a random access Memory (Random Access Memory, RAM), a Read-Only Memory (ROM), an erasable programmable Read-Only Memory (Erasable Programmable Read Only Memory, EPROM), a flash Memory, an optical fiber, a portable CD-ROM, an optical storage device, a magnetic storage device, or any suitable combination of the foregoing. A computer readable storage medium may be any tangible medium that can contain, or store a program for use by or in connection with an instruction execution system, apparatus, or device.
The computer readable signal medium may include a propagated data signal with computer readable program code embodied therein, either in baseband or as part of a carrier wave. Such a propagated data signal may take many forms, including, but not limited to: electromagnetic signals, optical signals, or any suitable combination of the preceding. A computer readable signal medium may also be any computer readable medium that is not a computer readable storage medium and that can communicate, propagate, or transport a program for use by or in connection with an instruction execution system, apparatus, or device.
Program code embodied on a computer readable medium may be transmitted using any appropriate medium, including but not limited to: wireless, wire, fiber optic cable, radio frequency (RadioFrequency, RF), and the like, or any suitable combination of the foregoing.
Computer program code for carrying out operations of the present invention may be written in any combination of one or more programming languages, including an object oriented programming language such as Java, smalltalk, C ++ and conventional procedural programming languages, such as the "C" programming language or similar programming languages. The program code may execute entirely on the user's computer, partly on the user's computer, as a stand-alone software package, partly on the user's computer and partly on a remote computer or entirely on the remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any kind of network, including a Local Area Network (LAN) or a Wide Area Network (WAN), or may be connected to an external computer (for example, through the Internet using an Internet service provider).
Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.
Claims (10)
1. The workbench displacement system is characterized by comprising a workbench, a motor, an encoder assembly and a displacement control module;
the motor is in transmission connection with the workbench, and the motor drives the workbench to move in a rotating manner;
the encoder assembly is fixed with the motor and is used for detecting the current rotation angle of the motor in real time and generating a current rotation angle signal;
the displacement control module is respectively and electrically connected with the encoder assembly and the motor, and is used for determining the current displacement of the workbench according to the current rotation angle signal and determining the compensation displacement of the workbench when the current displacement is different from a target displacement; the displacement control module is also used for determining the compensation angle of the motor according to the compensation displacement quantity and sending a compensation angle signal to the motor;
And the motor works according to the compensation angle signal until the current displacement of the workbench is equal to the target displacement.
2. The table displacement system of claim 1, wherein the encoder assembly comprises an electrically connected code wheel and detection unit, the code wheel rotating in synchronization with the motor; the displacement control module comprises a comparison element and a workbench control unit which are electrically connected, the comparison element is electrically connected with the detection unit, and the workbench control unit is electrically connected with the motor;
the detection unit is used for acquiring the current rotation angle of the code wheel, determining the current rotation angle of the motor according to the current rotation angle and generating the current rotation angle signal; wherein the rotation angle of the code wheel corresponds to the rotation angle of the motor one by one;
the comparison element is used for receiving the current rotation angle signal and determining the current displacement of the workbench according to the current rotation angle signal; the comparison element is further used for determining a compensation displacement amount of the workbench when the current displacement amount is different from a target displacement amount, determining the compensation angle of the motor according to the compensation displacement amount, and generating the compensation angle signal;
The workbench control unit is used for receiving the compensation angle signal and sending the compensation angle signal to the motor.
3. The table displacement system according to claim 2, wherein the comparing element is further configured to determine the current displacement amount of the table according to formula (1) and formula (2);
S 1 ＝θ 1 *P/360° (1)
S 2 ＝(θ 2 /θ 1 )*S 1 (2)
wherein θ 1 For distinguishing the angle theta of the unit rotation of the code disc 1 ＝360°/2 n N is the number of code tracks on the code disc, n is an integer, and n is more than or equal to 23 and less than or equal to 29; s is S 1 The unit displacement of the workbench corresponding to the unit resolution angle is represented by P, which is the lead of the lead screw of the motor when the motor rotates for one circle; s is S 2 θ is the current displacement of the table 2 Is the current rotation angle of the motor;
the comparison element is further used for determining the compensation displacement according to a formula (3) and determining the compensation angle according to a formula (4);
S＝S 3 -S 2 (3)
θ 3 ＝S/S 1 (4)
wherein S is the compensation displacement, S 3 For the target displacement amount, θ 3 For the compensation angle.
4. The table displacement system of claim 3, wherein the displacement control module further comprises a signal amplifier for electrically connecting the table control unit and the motor;
The workbench control unit is also used for receiving the compensation angle signal and sending the compensation angle signal to the signal amplifier;
the signal amplifier is used for sending the amplified compensation angle signal to the motor.
5. The table displacement system of claim 1, further comprising a target displacement amount acquisition module electrically coupled to the encoder assembly, the target displacement amount acquisition module configured to acquire the target displacement amount and send the target displacement amount to the encoder assembly.
6. The table displacement system of claim 1, further comprising a servo system, wherein the displacement control module and the motor are electrically connected by the servo system;
the servo system is used for analyzing the control signal sent by the displacement control module to the motor and transmitting the analyzed control signal to the motor.
7. The table displacement system of claim 1, wherein the number of motors and the number of encoder assemblies are each 2, both motors controlling the table to move in a first direction and a second direction, respectively, the first direction and the second direction being perpendicular;
The two encoder assemblies are electrically connected with the two motors in a one-to-one correspondence manner, and are used for detecting the current rotation angles of the motors which are respectively and correspondingly electrically connected in real time and respectively sending the current rotation angle signals which are respectively and correspondingly to the displacement control module;
the displacement control module respectively determines the current displacement amounts of the workbench in two directions according to the received two current rotation angle signals, and respectively determines the compensation displacement amounts of the workbench in two directions when the current displacement amounts are different from the target displacement amounts; the displacement control module is also used for determining the compensation angles of the two motors according to the compensation displacement quantity and respectively sending the two compensation angle signals to the corresponding motors.
8. A displacement control method of a table displacement system, which is applied to the table displacement system according to any one of claims 1 to 7, comprising:
the encoder component detects the current rotation angle of the motor in real time and sends a current rotation angle signal to the displacement control module;
The displacement control module determines the current displacement of the workbench according to the current rotation angle signal, and determines the compensation displacement of the workbench when the current displacement is different from a target displacement; the displacement control module further determines a compensation angle of the motor according to the compensation displacement amount and sends a compensation angle signal to the motor;
and the motor works according to the compensation angle signal until the current displacement of the workbench is equal to the target displacement.
9. An electronic device, comprising:
one or more processors;
a storage means for storing one or more programs;
the one or more programs, when executed by the one or more processors, cause the one or more processors to implement the displacement control method of the stage displacement system of claim 8.
10. A computer-readable storage medium having stored thereon a computer program, which when executed by a processor implements the displacement control method of the table displacement system according to claim 8.
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| CN202311221530.4A CN117215160A (en) | 2023-09-20 | 2023-09-20 | Workbench displacement system, displacement control method, electronic equipment and storage medium |
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