CN117213804A - Medium infrared micro-ring resonator performance testing device based on frequency up-conversion - Google Patents
Medium infrared micro-ring resonator performance testing device based on frequency up-conversion Download PDFInfo
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Abstract
The application discloses a performance testing device of a mid-infrared micro-ring resonator based on frequency up-conversion, which is characterized in that 3um narrow linewidth laser is generated through a 1064nm and 785nm narrow linewidth continuous laser difference frequency process, 3um light is coupled into an SOS micro-ring cavity in a grating coupling mode, 785nm visible laser is generated by micro-ring cavity output light and 1064nm narrow-band laser through a sum frequency up-conversion module, and an up-conversion signal is received by a visible band photoelectric probe and then is input into an oscilloscope for display, so that the intensity of the micro-ring cavity output light is monitored in real time. Since the annular cavity has inconsistent transmittance at different wavelengths to form a transmission spectrum, we scan the frequency of 785nm continuous laser used at the beginning of the difference frequency, thereby changing the frequency of 3um input light in real time and monitoring the transmittance of the micro-annular cavity in real time.
Description
Technical Field
The application belongs to the technical fields of laser technology, nonlinear photophysical technology and integrated optics, and particularly relates to a device for testing performance of a mid-infrared micro-ring resonator based on frequency up-conversion.
Background
Light is an important information carrier and plays an important role in the history of human civilization development. Today, people start to direct their eyes to a new band of the mid-infrared (MIR) due to their special nature and potential applications in many fields. The mid-infrared region (2-25 μm) covers the absorption/emission spectrum of numerous molecules and materials, and mid-infrared light can effectively interact with gas molecules. For example, the basic absorption band of MIR band CO2 is about two orders of magnitude stronger than its near infrared region response, and the strong molecular specificity allows the mid-infrared sensor to have higher sensitivity and specificity, so there have been many applications in gas environment monitoring and biomedical fields (protein detection, no marker pathology study). And the middle infrared band comprises two very important atmospheric transmission windows (3-5 mu m and 8-12 mu m), in the two transmission windows, the absorption loss of water vapor and carbon dioxide in the atmosphere to light is smaller, and the atmospheric transmission capacity is stronger than that of the visible light or near infrared band in rainy and foggy weather. Therefore, mid-infrared light has obvious low-loss transmission advantage in the atmosphere transmission, and the transmission distance of light in the atmosphere is effectively increased. At present, research on mid-infrared free space optical communication is one of important research directions for high-speed atmospheric communication. Finally, the room-temperature object emits light with MIR wavelength, thereby promoting the application of the novel thermal imager, and being applicable to a plurality of fields such as medical diagnosis, fireproof monitoring and the like. The quantum entanglement source of the mid-infrared band has all the advantages of the mid-infrared band, and is expected to be used for next-generation quantum communication, quantum imaging and quantum sensing. In quantum communication, an entangled photon source with a wavelength of 3-5 μm covers an atmospheric transmission window, and the transparency of the entangled photon source is higher than that of a near infrared band, so that free space quantum communication is facilitated. In quantum sensing, the MIR entangled photon source has strong absorption bands of various gases, which results in a large application scenario in gas quantum sensing; in quantum imaging, a room temperature object emits light at the MIR wavelength; the MIR band entangled photon source can be compatible with the application in infrared thermal imaging, so that the intermediate infrared entangled source has a very wide application prospect.
The current method for generating the mid-infrared band entangled photon source is single, the most common method is to generate entangled photon pairs by using an SPDC process of a bulk crystal, and the periodic polarized lithium niobate crystal (PPLN) has large nonlinear coefficient and wide transparent window range, and the Group Velocity Matching (GVM) wavelength of the entangled photon source is in MIR band, so the PPLN generates the MIR entangled photon source which is a mainstream method. However, the bulk crystal is unfavorable for integration, has low stability and large and heavy volume, so that the quantum entanglement source is more attractive to be generated by utilizing the existing integrated industrial chain of the integrated silicon-based chip, the photon pair generation efficiency can be effectively improved by utilizing the strong optical constraint and high-density photon integration provided by the integrated photonics, and smaller occupied area and higher equipment stability can be realized. For a Silicon (SOI) system on a silicon oxide substrate in the most mature silicon-based industrial chain, silicon oxide absorbs light with long wavelength greatly in the wave band of 3.6 mu m and the substrate needs to be replaced, so that sapphire is used as a substrate (SOS system waveguide) of a silicon waveguide, strong absorption of the silicon oxide at long wavelength is avoided, low-loss transmission in the wide range of 3-12 mu m can be realized, and the performance of an entanglement source can be greatly improved by utilizing the filtering and cavity enhancement effects of a micro-ring structure. However, due to the extreme scarcity of mid-infrared detectors, further development of mid-infrared quantum optics is greatly limited.
The precondition of using the micro-ring structure to enhance the performance of the mid-infrared entanglement source is how to obtain a micro-ring cavity sample with high quality factor, so how to test the parameter performance of the micro-ring resonant cavity in the mid-infrared band is the first problem to be solved. MIR detectors typically exhibit poor signal-to-noise ratios and low timing jitter compared to near infrared and visible light detectors due to the inherent sensitivity of conventional mid-infrared detectors to unwanted incident blackbody radiation and dark current. The detection efficiency of MIR single photon direct detection means is not ideal no matter the semiconductor-based detector or the superconducting technology, and on the other hand, the middle infrared band detector, the spectrometer and other instruments are more expensive in cost and difficult to obtain. Therefore, the nonlinear frequency up-conversion process is adopted to up-convert the mid-infrared spectrum information to the visible light region for detection, and in the visible light wave band, the high-efficiency and low-noise detector is easy to obtain.
In view of the above, we provide a simple and efficient device for testing performance parameters of a mid-infrared micro-ring cavity, which can bring great convenience to the directions of MIR micro-ring resonant cavity testing, MIR gas sensing, spectrum analysis and the like.
Disclosure of Invention
The present application aims to solve at least one of the technical problems existing in the prior art;
therefore, the application provides a device for testing the performance of a mid-infrared micro-ring resonator based on frequency up-conversion, which comprises the following components:
the device comprises a difference frequency pump laser, a difference frequency tunable idler frequency laser, a difference frequency module, a micro-ring cavity coupling module, a frequency up-conversion module and a detection module triggered synchronously by the tunable idler frequency laser;
the difference frequency module is realized by matching critical phases of two laser beams in the PPLN crystal;
the micro-ring cavity coupling module is realized by coupling a middle infrared special bare fiber with an autonomous designed shallow etching gradual change period SOS grating;
the sum frequency up-conversion module is realized by utilizing critical phase matching in the PPLN crystal;
the detection module consists of a high-sensitivity photoelectric probe and an oscilloscope, wherein the oscilloscope is synchronously triggered with the idle laser sweep signals, and the cavity transmittance at different idle wavelengths is monitored in real time.
Compared with the prior art, the application has the beneficial effects that:
according to the application, 3um narrow linewidth laser is generated through a 1064nm and 785nm narrow linewidth continuous laser difference frequency process, 3um light is coupled into an SOS micro-ring cavity in a grating coupling mode, 785nm visible laser is generated through a sum frequency up-conversion module by the micro-ring cavity output and 1064nm narrow-band laser, and the visible laser is input into an oscilloscope for display after receiving an up-conversion signal by a visible band photoelectric probe, so that the intensity of light output by the micro-ring cavity is monitored in real time. Because the annular cavity forms transmission spectrums for inconsistent transmittance of different wavelengths, the frequency of 785nm continuous laser used by the initial difference frequency is scanned, so that the frequency of 3um input light is changed in real time, a trigger signal of a 785nm laser and an up-converted visible photoelectric signal are connected into an oscilloscope for analysis, the transmission spectrum of the SOS annular cavity is obtained, and the performance parameters of the middle infrared cavity are obtained according to the transmission light;
according to the scheme, the tunable narrow linewidth input laser with the wave band of 3um is obtained through the frequency down-conversion module, the output laser is transmitted to the wave band of 785nm through the frequency up-conversion module for power monitoring, the center frequency and the conversion efficiency of the two nonlinear modules are adjustable, and high-efficiency and accurate mid-infrared transmission spectrum detection can be achieved.
Drawings
FIG. 1 is a schematic diagram of a performance testing apparatus for an infrared microring resonator according to the present application;
FIG. 2 is a schematic diagram of a difference frequency module according to the present application;
FIG. 3 is a schematic diagram of a micro-ring cavity coupling module according to the present application;
FIG. 4 is a schematic diagram of a sum frequency up-conversion module according to the present application;
FIG. 5 is a graph of quantum efficiency, wavelength tuning and temperature tuning of an upconversion crystal according to the present application;
FIGS. 6-14 are graphs showing the results of the infrared microring resonator performance test of the present application.
Detailed Description
The technical solutions of the present application will be clearly and completely described in connection with the embodiments, and it is obvious that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
The application is based on the SOS micro-ring resonant cavity of 3 micron wave band of autonomous processing, combines the nonlinear frequency up-conversion technology, realizes the test of the transmission spectrum of the mid-infrared micro-ring cavity, can realize the test of the spectrum of the extremely high fine cavity by selecting the crystal of frequency conversion, and can bring great convenience to the test of the high-Q mid-infrared micro-ring cavity, avoid the defect of the mid-infrared detection device and promote the optical development of mid-infrared integration.
The design of a device for testing the performance of a mid-infrared micro-ring resonator based on frequency up-conversion, the parameter selection of crystals, the implementation of phase matching and the testing of the performance of a micro-ring cavity will be described below with reference to the schematic diagram of the optical path structure shown in fig. 1.
Referring to fig. 1, the application provides a performance testing device for a mid-infrared micro-ring resonator based on frequency up-conversion, comprising;
the device comprises a differential frequency Pump laser (Pump), a differential frequency tunable idler laser (Idle), a differential frequency module (DFG), a micro-ring cavity coupling module (Chipcoupling), a frequency up-conversion module (SFG) and a Detection module (Detection) triggered synchronously with the tunable idler laser;
the following are separately set forth in connection with specific examples of these modules:
as shown in fig. 2-4, the difference frequency module is realized by the critical phase matching of two laser beams in the PPLN crystal;
the micro-ring cavity coupling module is realized by coupling a middle infrared special bare fiber with an autonomous designed shallow etching gradual change period SOS grating;
the sum frequency up-conversion module is realized by utilizing critical phase matching in the PPLN crystal;
the detection module consists of a high-sensitivity photoelectric probe and an oscilloscope, wherein the oscilloscope is synchronously triggered with the idle laser sweep signals, and the cavity transmittance at different idle wavelengths is monitored in real time;
the difference frequency module comprises a semiconductor laser 1, a quarter wave plate 2, a half wave plate 3, a beam shrinking lens I4, a beam shrinking lens II 5 and a reflecting mirror 6 which are sequentially arranged along the first direction;
the semiconductor laser 1 is a TApro-795nm semiconductor laser, the wavelength tuning range is 775nm-805nm, the output power is more than 1.5W, and the frequency linewidth is 100kHz; in the example, the output wavelength of the semiconductor laser is tuned to about 785.35nm, and automatic mode-hop-free repeated sweep frequency in the wavelength range of more than 0.1nm can be realized by adjusting parameters of a laser control panel;
the quarter wave plate 2 and the half wave plate 3 are positioned in the visible light wave band and are used for adjusting the polarization of the semiconductor laser light;
the beam shrinking lens I4 and the beam shrinking lens II 5 are positioned in the B wave band and used for adjusting the beam waist size of the semiconductor laser and adjusting the polarization and the beam waist so as to meet the critical phase matching process in the PPLN crystal 15; the mirror 6 is used for changing the transmission direction of light;
the difference frequency module further comprises an optical fiber continuous amplifier 7, a quarter wave plate 8, a half wave plate 9, a PBS10, a half wave plate 11, a beam shrinking lens III 12, a beam shrinking lens IV 13 and a dichroic mirror 14 which are sequentially arranged along a direction II;
the reflecting mirror 6 and the double-color mirror 14 are sequentially arranged along the direction III, the direction III is perpendicular to the direction I and the direction II, and a PPLN crystal 15 and an output difference frequency generating laser 17 are sequentially arranged behind the double-color mirror 14 along the direction III;
the PBS10 also outputs a fiber laser 16 along direction three;
the central wavelength of the optical fiber continuous amplifier 7 is 1064nm, and the maximum output power is 30W;
the second quarter wave plate 8 and the second half wave plate 9 are positioned in a 1064nm wave band and are used for adjusting the polarization of the fiber laser;
the PBS10 is positioned in a 1064nm wave band, the optical fiber laser can be divided into two parts with different powers by adjusting the wave plate group in front, one path of the optical fiber laser and the semiconductor laser generate 3-micrometer light in a difference frequency way, and the other path of the optical fiber laser is used for generating visible light through subsequent output light and frequency up-conversion of the optical fiber laser and the micro-ring cavity;
the half wave plate 11 is used for adjusting the polarization of the fiber laser; the beam shrinking lens III 12 and the beam shrinking lens IV 13 are positioned in a 1064nm wave band and used for adjusting the beam waist of the fiber laser so as to meet the critical phase matching process in the PPLN crystal 15;
the dichroic mirror 14 is used for realizing the combination of the TA semiconductor laser and the 1064 fiber laser;
the PPLN crystal 15 is a type-0 multichannel periodically polarized MgO-PPLN crystal, and the single period aperture size is 0.5mm multiplied by 40mm; the periodic distribution is:
20.90,21.20,21.50,21.80,22.10,22.40,22.70,23.00,23.30μm；
the two end surfaces are respectively plated with an antireflection film of 700-1100nm and an antireflection film of 2.4-4.8 mu m;
wherein, the channel with the period of 21.5 μm can be used for generating 3000nm laser with the sum frequency of 785.35nm and 1064nm, and the temperature of the crystal is kept constant by a precise temperature control device, thereby ensuring the stability of the radiation wavelength;
the difference frequency generating laser 17 is 3 microns difference frequency generating laser, and the module can generate 3000nm middle infrared laser output with the maximum of 50mW for subsequent micro-ring cavity spectrum test experiments;
the micro-ring cavity coupling module specifically comprises:
the two-color mirror DM18, the two-color mirror DM 19, the half-wave plate II 20, the collimating lens 21, the optical fiber coupler I22, the fluoride optical fiber I23, the SOS micro-ring chip 24, the fluoride optical fiber II 25, the optical fiber coupler II 28 and the output space light 29 are sequentially arranged behind the difference frequency generation laser output end 17 along the direction III; of course, the first optical microscope 26 and the second optical microscope 27 are also included on the SOS micro-ring chip 24;
the dichroic mirror DM18 is a 1064nm/3000nm dichroic mirror, the 1064nm light reflectivity is more than 99.8%, the 3000nm light transmittance is more than 96%, and the dichroic mirror DM18 is used for filtering 1064nm pump light;
the dichroic mirror DM 19 is a 785nm/3000nm dichroic mirror, the light reflectivity of 785nm is more than 99.8%, the light transmittance of 3000nm is more than 96%, and the dichroic mirror DM 19 is used for filtering 785nm idler laser;
the half-wave plate II 20 is a 3000nm half-wave plate and is used for adjusting the polarization of light so as to meet the grating polarization coupling requirement of the SOS waveguide;
the first fiber coupler 22 and the second fiber coupler 28 are two 3 μm fiber couplers for collecting and outputting 3 μm space laser;
the first fluoride optical fiber 23 and the second fluoride optical fiber 25 are fluoride optical fibers capable of transmitting mid-infrared light, one end of each fluoride optical fiber is connected with an optical fiber coupler, the other end of each fluoride optical fiber is subjected to cladding removal treatment, and only the fiber core is exposed, wherein the diameter of the fiber core is 9 mu m, and the positions of the fluoride optical fibers are fixed and controlled through a high-precision three-dimensional rotary table with the minimum moving step length of 10 nm;
SOS micro-ring chip 24 is an SOS micro-ring chip which is designed and processed independently, and is arranged on a high-sensitivity temperature controller, and the temperature controller and the chip are arranged on a three-dimensional displacement table together, so that the temperature and the relative position of the chip can be controlled together;
the first optical microscope 26 and the second optical microscope 27 are the optical microscopes with the same specification, the first optical microscope 26 can observe the relative positions of the fluoride bare fiber and the grating part in the chip from the right above the chip, the second optical microscope 27 can observe the vertical distance between the fluoride optical fiber and the surface of the chip from the side, and the relative positions of the input bare fiber and the output bare fiber and the waveguide grating and the vertical distance between the optical fiber and the chip are adjusted through the three-dimensional displacement table, so that 3-micrometer light is efficiently coupled into the SOS waveguide from the optical fiber;
the output space light 29 is 3-micron space light carrying SOS micro-ring cavity spectrum and output to the up-conversion module through fluoride optical fiber and optical fiber collimator;
the up-conversion module specifically includes: a quarter wave plate III 34, a half glass 35, a beam shrinking lens V36, a beam shrinking lens V37 and a bicolor mirror II 38 which are sequentially arranged along the output direction of the fiber laser 16;
the device also comprises a first wave plate 30, a second wave plate 31, a first calcium fluoride lens 32, a second calcium fluoride lens 33, a second dichroic mirror 38, a chirped PPLN crystal 39, a short-pass filter 40, a band-pass filter 41, a focusing lens 42, a photoelectric probe 43 and an optical oscilloscope 44 which are sequentially arranged along the output direction of the output space light 29;
a quarter wave plate three 34 and a half slide 35 for adjusting the polarization of the pump light;
the beam shrinking lens five 36 and the beam shrinking lens six 37 are used for adjusting the beam waist of the pump light and adjusting the polarization and the beam waist to meet the quasi-phase matching process of the chirped PPLN crystal 39;
the first wave plate 30 and the second wave plate 31 form a 3-micrometer wave plate group, the first calcium fluoride lens 32 and the second calcium fluoride lens 33 form a calcium fluoride lens group, and the calcium fluoride lens group is respectively used for adjusting the polarization and the beam waist of 3-micrometer light so as to meet the quasi-phase matching process of the chirped PPLN crystal 39;
the second dichroic mirror 38 is a 3000nm/1064nm dichroic mirror, which is highly transparent to 3 μm idler light and highly reflective to 1064nm signal light;
the chirped PPLN crystal 39 is a chirped PPLN crystal with a polarization period ranging from 21.4 to 21.6 mu m, the crystal size is 2mm multiplied by 1mm multiplied by 40mm, two end surfaces are respectively plated with an antireflection film of 700 to 1100nm and an antireflection film of 2.4 to 4.8 mu m, the chirped PPLN crystal can be used for realizing a quasi-phase matching process of 3 mu m light and 1064nm laser, and has a very wide crystal conversion bandwidth, and the crystal also uses a precise temperature control device to keep the temperature constant, so that the stability of the radiation wavelength is ensured;
the short-pass filter 40 is a 1000 short-pass filter, and reflects pump light with wavelength larger than 1000nm and 3 microns light, and transmits 785nm visible light generated by up-conversion;
the band-pass filter 41 is a 780-20 nm band-pass filter, only transmits 770-790nm visible light, and further eliminates the influence of stray light and pump light on the subsequent test result;
the photoelectric probe 43 is an FDS-100 photoelectric probe, light is converged on the photoelectric probe 43 through the focusing lens 42, the photoelectric probe 43 converts an input optical signal into an electrical signal, the electrical signal is displayed through the optical oscilloscope 44, wherein a sweep signal of TA-pro laser of a difference frequency module is connected in the optical oscilloscope 44, when laser sweep is started, the optical oscilloscope 44 can be triggered synchronously, the output power of an up-conversion module corresponding to each wavelength position is monitored, and therefore the cavity transmission spectrum of the micro-ring cavity and related performance parameters are measured.
The core of the application as described above is how to implement a mid-infrared microring resonator performance testing apparatus based on frequency up-conversion, and the following design and assembly steps are required to achieve this goal.
In the embodiment of the application, the first design to be completed is to determine two types of crystals for generating 3 mu m single-frequency laser and 785nm visible light through sum frequency up-conversion in a difference frequency process, and currently available quasi-phase matching crystals mainly comprise PPKTP, PPLN, PPLST and the like, and angle matching crystals comprise KTP, LBO, BBO and the like. In the embodiment of the application, according to the requirements and the characteristics of different crystals, a type-0 quasi-phase matching PPLN crystal and a PPLN chirp crystal are adopted for the sum frequency up-conversion measurement process of the difference frequency generation of the 3um mid-infrared laser and the mid-infrared transmission cavity spectrum respectively. For nonlinear sum and difference frequency processes in quasi-phase-matched crystals, energy conservation and momentum conservation need to be satisfied, taking sum frequency processes as an example, energy conservation requirement ω SFG ＝ω s +ω p Momentum conservation requires Δk=k SFG -k p -k s +2pi m/Λ=0, where k q ＝2πn q /λ q (q=p, SFG, s) is the wavevector of the pump light, the signal light and the sum frequency light, Λ is the polarization period, λ q (q=p, s, SFG) is wavelength, so that the nonlinear conversion process satisfying the condition can be determined by designing the polarization period Λ, m of the crystal to be the order of quasi-phase matching, by substituting the dispersion equation of the PPLN crystal into the phase matching relationship, we can determine the nonlinear process satisfying the phase matching theoretically. In this example, we achieved a nonlinear process of generating 3 μm laser light with a difference frequency of 785nm light and 1064nm laser light using a PPLN crystal with a polarization period of 21.5 μm, and a process of generating 785nm light with a sum frequency of 3 μm and 1064nm laser light over a wider conversion bandwidth using a chirped PPLN crystal with a polarization period in the range of 21.4-21.6 μm.
In the embodiment of the application, in order to smoothly couple the mid-infrared light into the micro-ring cavity and obtain the cavity transmission spectrum, a coupling grating structure and a ring structure of the SOS are required to be designed. The parameters of the grating and the optical fiber are simulated and designed through simulation software, wherein the parameters mainly comprise the period, the duty ratio, the etching depth, the gradual change of the duty ratio, the adjustment of the mode field diameter, the incidence angle and the like of the optical fiber, and the maximum coupling efficiency of the finally obtained two-dimensional simulation structure is 66%; 2-4 are SEM electron microscope diagrams of infrared coupling grating structures in a shallow etching gradual change period of autonomous design processing, and the actual coupling efficiency finally processed is 18%; the single-sided coupling loss is 7.5dB. For the annular structure, the design is a runway type single bus structure, the dispersion of the waveguide is regulated and controlled by designing the width and the height of the waveguide, and the micro-ring cavity is in a critical coupling state by changing the length of the runway, the gap width and the etching depth of the coupling part and the like, so that the micro-ring cavity with a higher Q value is obtained.
In the embodiment of the present application, in order to prove that the up-conversion process can realize the test of the mid-infrared micro-ring cavity spectrum, the quantum efficiency, wavelength and temperature tuning characteristics in the process of the sum frequency of the PPLN chirped crystal need to be characterized, and the result is shown in fig. 5Shown. The sum frequency process power efficiency is expressed as eta power ＝P 785 /P 3000 The quantum efficiency expression is eta quantum ＝η power λ 785 /λ 3000 Considering 2.03% of power loss caused by the subsequent filter, the maximum power efficiency is experimentally measured to be 4.85% and the system quantum efficiency is 1.27%. To test the wavelength bandwidth of the crystal, the temperature of the chirped crystal was fixed at 23 ℃, and the reception bandwidth of the up-conversion process obtained by the test was 8.8nm@3000nm. And further testing the relation between the optimal matching temperature and the signal wavelength to obtain the chirp crystal with the wavelength temperature regulation coefficient of 0.97 nm/DEG C@3000 nm.
In the embodiment of the application, in order to illustrate a method for testing parameters of a middle infrared micro-ring cavity, parameters such as free spectral range FSR, resonant wavelength tuning rate with temperature, full width at half maximum FWHM, extinction ratio ER and Q value of two different runway micro-ring cavities are respectively tested. First, before ring parameter testing, the transmission loss of the waveguide is 4.5db/cm by testing the loss of the straight waveguides with different lengths, and the output cavity spectrums at different temperatures are scanned to obtain the results shown in fig. 9-14. FIG. 9 is a plot of the resonant wavelength of ring 1 as a function of temperature, from which the tuning rate of the micro-ring cavity was calculated to be 5.62GHZ; FIG. 10 is an oscilloscope output plot of a repeated sweep over a 49GHz sweep at different temperatures, with other depressions due to the presence of higher order modes in the ring, but without affecting analysis of cavity spectral parameters; FIG. 11 is an output cavity spectrum of the single sweep of FIG. 10 with the abscissa corresponding to the wavelength of the mid-sweep infrared light, the reference line being the oscilloscope output power curve for a straight waveguide under the same sweep conditions, combined with the output cavity spectrum and the wavelength tuning rate with temperature, gives a free spectral range of 58.68GHZ for ring 1, an extinction ratio of 5.68, a full width at half maximum of 2.96GHZ, and a Q value of 33818. Fig. 12 to 14 are test curves corresponding to the loop 2, except that the performance parameters of the two loops were simulated by simulation software such as COMSOL and FDTD, respectively, as shown in table 1; the error between the simulation result and the experimental result of the ring 1 is about 20%, and after the micro-ring is found to have tiny damage, the loss is larger, the deviation between the test value and the theoretical value is larger, the error between the simulation result and the experimental result of the ring 2 is about 5%, and the error mainly comes from the influence of the machining precision;
in the embodiment of the application, the method for testing the mid-infrared micro-ring cavity based on frequency up-conversion avoids a plurality of disadvantages of the mid-infrared detector, is very simple and convenient, has high accuracy, can flexibly change the testing bandwidth and the detection efficiency by replacing up-conversion sum frequency crystal, can more simply and accurately obtain the performance parameters of the mid-infrared micro-ring cavity by utilizing the detection means of the mature visible wave band, and realizes the rapid iteration of the processing parameters.
The above embodiments are only for illustrating the technical method of the present application and not for limiting the same, and it should be understood by those skilled in the art that the technical method of the present application may be modified or substituted without departing from the spirit and scope of the technical method of the present application.
Claims (10)
1. The device for testing the performance of the mid-infrared micro-ring resonator based on frequency up-conversion is characterized by comprising the following components:
the device comprises a difference frequency pump laser, a difference frequency tunable idler frequency laser, a difference frequency module, a micro-ring cavity coupling module, a frequency up-conversion module and a detection module triggered synchronously by the tunable idler frequency laser;
the difference frequency module is realized by matching critical phases of two laser beams in the PPLN crystal;
the micro-ring cavity coupling module is realized by coupling a middle infrared special bare fiber with an autonomous designed shallow etching gradual change period SOS grating;
the sum frequency up-conversion module is realized by utilizing critical phase matching in the PPLN crystal;
the detection module consists of a high-sensitivity photoelectric probe and an oscilloscope, wherein the oscilloscope is synchronously triggered with the idle laser sweep signals, and the cavity transmittance at different idle wavelengths is monitored in real time.
2. The device for testing performance of a mid-infrared microring resonator based on frequency up-conversion as in claim 1, wherein the difference frequency module comprises a semiconductor laser, a quarter wave plate, a half wave plate, a first beam shrinking lens group, a second beam shrinking lens group and a reflecting mirror arranged in sequence along a first direction.
3. The device for testing the performance of the mid-infrared micro-ring resonator based on frequency up-conversion according to claim 2, wherein the semiconductor laser is a TApro-795nm semiconductor laser, the wavelength tuning range is 775nm-805nm, the output power is more than 1.5W, and the frequency linewidth is 100kHz; by adjusting parameters of a laser control panel, automatic mode-jump-free repeated sweep frequency in a wavelength range of more than 0.1nm can be realized;
the quarter wave plate and the half wave plate are positioned in a visible light wave band and are used for adjusting the polarization of the semiconductor laser;
the beam shrinking lens I and the beam shrinking lens II are positioned in a B wave band and used for adjusting the beam waist size of the semiconductor laser and adjusting the polarization and the beam waist so as to meet the critical phase matching process in the PPLN crystal; the mirror is used to change the transmission direction of the light.
4. The device for testing the performance of the mid-infrared micro-ring resonator based on frequency up-conversion according to claim 1, wherein the difference frequency module further comprises an optical fiber continuous amplifier, a quarter-wave plate two, a half-wave plate two, a PBS, a half-wave plate, a beam shrinking lens three, a beam shrinking lens four and a dichroic mirror which are sequentially arranged along a direction two;
the reflecting mirror and the bicolor mirror are sequentially arranged along the direction III, the direction III is perpendicular to the direction I and the direction II, and a PPLN crystal and an output difference frequency generating laser are sequentially arranged behind the bicolor mirror along the direction III;
the PBS also outputs a beam of fiber laser along the third direction.
5. The device for testing the performance of the mid-infrared micro-ring resonator based on frequency up-conversion according to claim 4, wherein the center wavelength of the optical fiber continuous amplifier is 1064nm, and the maximum output power is 30W;
the second quarter wave plate and the second half wave plate are positioned in a 1064nm wave band and are used for adjusting the polarization of the fiber laser;
the PBS is positioned in a 1064nm wave band, the front wave plate group is adjusted, so that the fiber laser can be divided into two parts with different powers, one path of the fiber laser and the semiconductor laser generate 3-micrometer light in a difference frequency mode, and the other path of the fiber laser is used for generating visible light through subsequent output light sum frequency up-conversion of the fiber laser and the micro-ring cavity;
the half-wave plate is used for adjusting the polarization of the fiber laser; the beam shrinking lens III and the beam shrinking lens IV are positioned in a 1064nm wave band and used for adjusting the beam waist size of the fiber laser, thereby meeting the critical phase matching process in the PPLN crystal;
the bicolor mirror is used for realizing the beam combination of the TA semiconductor laser and the 1064 fiber laser;
the PPLN crystal is a type-0 multichannel periodically polarized MgO-PPLN crystal, and the single period aperture size is 0.5mm multiplied by 40mm;
the periodic distribution is:
20.90,21.20,21.50,21.80,22.10,22.40,22.70,23.00,23.30μm；
the two end surfaces are respectively plated with an antireflection film of 700-1100nm and an antireflection film of 2.4-4.8 mu m;
wherein, the channel with the period of 21.5 μm can be used for generating 3000nm laser with the sum frequency of 785.35nm and 1064nm, and the temperature of the crystal is kept constant by a precise temperature control device, thereby ensuring the stability of the radiation wavelength;
the difference frequency generated laser is 3 microns, and the module can generate 3000nm middle infrared laser output with 50mW at maximum for subsequent micro-ring cavity spectrum test experiments.
6. The device for testing performance of a mid-infrared microring resonator based on frequency up-conversion of claim 1, wherein the microring cavity coupling module comprises:
the first half-wave plate, the second collimating lens, the first optical fiber coupler, the first fluoride optical fiber, the SOS micro-ring chip, the second fluoride optical fiber, the second optical fiber coupler and the output space light are sequentially arranged behind the difference frequency generating laser output end along the third direction;
the optical microscope I and the optical microscope II are arranged on the SOS micro-ring chip.
7. The device for testing performance of a mid-infrared microring resonator based on frequency up-conversion as in claim 6 wherein,
the dichroic mirror DM is a 1064nm/3000nm dichroic mirror, the 1064nm light reflectivity is more than 99.8%, the 3000nm light transmittance is more than 96%, and the dichroic mirror DM is used for filtering 1064nm pump light;
the second dichroic mirror DM is a 785nm/3000nm dichroic mirror, the light reflectivity of 785nm is more than 99.8%, the light transmittance of 3000nm is more than 96%, and the dichroic mirror DM is used for filtering 785nm idler frequency laser;
the half-wave plate II is a 3000nm half-wave plate and is used for adjusting the polarization of light so as to meet the grating polarization coupling requirement of the SOS waveguide;
the first optical fiber coupler and the second optical fiber coupler are two 3 mu m optical fiber couplers and are used for collecting and outputting 3 mu m space laser;
the fluoride optical fiber I and the fluoride optical fiber II are fluoride optical fibers capable of transmitting mid-infrared light, one end of each fluoride optical fiber is connected to an optical fiber coupler, the other end of each fluoride optical fiber is subjected to cladding removal treatment, and only the fiber core is exposed, wherein the diameter of the fiber core is 9 mu m, and the positions of the fluoride optical fibers are fixed and controlled through a high-precision three-dimensional rotating table with the minimum moving step length of 10 nm;
the SOS micro-ring chip is an SOS micro-ring chip which is designed and processed independently and is arranged on a high-sensitivity temperature controller, and the temperature controller and the chip are arranged on a three-dimensional displacement table together and used for controlling the temperature and the relative position of the chip together;
the first optical microscope and the second optical microscope are the optical microscopes with the same specification, the first optical microscope can observe the relative positions of the fluoride bare fiber and the grating part in the chip from the right above the chip, the second optical microscope can observe the vertical distance between the fluoride optical fiber and the surface of the chip from the side, the relative positions of the input bare fiber and the output bare fiber and the waveguide grating and the vertical distance between the optical fiber and the chip are adjusted through the three-dimensional displacement table, and 3-micrometer light is efficiently coupled into the SOS waveguide from the optical fiber;
the output space light is 3-micrometer space light carrying SOS micro-ring cavity spectrum and output to the up-conversion module.
8. The device for testing performance of a mid-infrared micro-ring resonator based on frequency up-conversion of claim 1, wherein the up-conversion module specifically comprises:
a third quarter wave plate, a half glass slide, a fifth beam shrinking lens, a sixth beam shrinking lens and a second bicolor mirror which are sequentially arranged along the output direction of the fiber laser;
the optical fiber also comprises a wave plate I, a wave plate II, a calcium fluoride lens I, a calcium fluoride lens II, a bicolor mirror II, a chirped PPLN crystal, a short-pass filter, a band-pass filter, a focusing lens, an optoelectronic probe and an optical oscilloscope which are sequentially arranged along the light output direction of the output space.
9. The device for testing the performance of the mid-infrared microring resonator based on frequency up-conversion of claim 8, wherein the quarter-wave plate three and the half-slide are used for adjusting the polarization of the pump light;
the beam shrinking lens five and the beam shrinking lens six are used for adjusting the beam waist of the pump light and adjusting the polarization and the beam waist to meet the quasi-phase matching process of the chirped PPLN crystal;
the first wave plate and the second wave plate form a 3-micrometer wave plate group, the first calcium fluoride lens and the second calcium fluoride lens form a calcium fluoride beam shrinking lens group which are respectively used for adjusting the polarization and the beam waist of 3-micrometer light, thereby meeting the quasi-phase matching process of the chirped PPLN crystal.
10. The device for testing the performance of the mid-infrared micro-ring resonator based on frequency up-conversion according to claim 8, wherein the second dichroic mirror is a 3000nm/1064nm dichroic mirror, is highly transparent to 3 μm idler light, and is highly reflective to 1064nm signal light;
the chirped PPLN crystal is a chirped PPLN crystal with a polarization period range of 21.4-21.6 mu m, the crystal size is 2mm multiplied by 1mm multiplied by 40mm, and two end surfaces are respectively plated with a 700-1100nm antireflection film and a 2.4-4.8 mu m antireflection film for realizing a quasi-phase matching process of 3 mu m light and 1064nm laser;
the short-pass filter is a 1000 short-pass filter, reflects pump light with the wavelength of more than 1000nm and 3 microns light, and transmits 785nm visible light generated by up-conversion;
the band-pass filter is a 780-20 nm band-pass filter, only transmits 770-790nm visible light, and further eliminates the influence of stray light and pump light on the subsequent test result;
the photoelectric probe is an FDS-100 photoelectric probe, light is converged on the photoelectric probe through a focusing lens, and the photoelectric probe converts an input optical signal into an electric signal and displays the electric signal through an optical oscilloscope;
and the optical oscilloscope is connected with a scanning frequency signal of TA-pro laser of the difference frequency module, and can be synchronously triggered when the laser scanning frequency is started to monitor the output power of the up-conversion module corresponding to each wavelength position.
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