CN117200895A - Electro-optical modulator, optical module and optical communication equipment - Google Patents
Electro-optical modulator, optical module and optical communication equipment Download PDFInfo
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- CN117200895A CN117200895A CN202210600651.9A CN202210600651A CN117200895A CN 117200895 A CN117200895 A CN 117200895A CN 202210600651 A CN202210600651 A CN 202210600651A CN 117200895 A CN117200895 A CN 117200895A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 207
- 238000004891 communication Methods 0.000 title claims abstract description 23
- 239000000758 substrate Substances 0.000 claims description 43
- 230000005540 biological transmission Effects 0.000 claims description 7
- 230000003321 amplification Effects 0.000 claims 2
- 238000003199 nucleic acid amplification method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 16
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
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- 230000005684 electric field Effects 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- LFVGISIMTYGQHF-UHFFFAOYSA-N ammonium dihydrogen phosphate Chemical compound [NH4+].OP(O)([O-])=O LFVGISIMTYGQHF-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000387 ammonium dihydrogen phosphate Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 235000019800 disodium phosphate Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 235000019837 monoammonium phosphate Nutrition 0.000 description 1
- 238000004549 pulsed laser deposition Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/516—Details of coding or modulation
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- Computer Networks & Wireless Communication (AREA)
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The embodiment of the application discloses an electro-optical modulator, an optical module and optical communication equipment, which are used for reducing the driving voltage of the electro-optical modulator and can also effectively reduce the complexity of a circuit and the power consumption. An electro-optic modulator includes a power beam splitter, a first modulating optical waveguide, a second modulating optical waveguide, a power combiner, a first electrode, a second electrode, a third electrode, and a connecting electrode. The connecting electrode is connected with the first electrode and the third electrode. The connection electrode is used for sending first electric signals to the first electrode and the third electrode respectively. The second electrode is used for transmitting a second electric signal. The first electrical signal and the second electrical signal are differential electrical signals.
Description
Technical Field
The present application relates to the field of optical communications technologies, and in particular, to an electro-optical modulator, an optical module, and an optical communications device.
Background
In an optical communication system, an electro-optical modulator is one of key devices in the fields of optical interconnection, optical computation, and the like. The electro-optic modulator mainly comprises a lithium niobate modulator and a silicon light modulator. When the lithium niobate modulator and the silicon optical modulator achieve modulation of the same phase shift, the drive voltage of the lithium niobate modulator is lower and the overall device size is smaller.
Fig. 1 is a diagram showing a structure example of a conventional electro-optical modulator. The lithium niobate modulator 100 includes a first driver 101, a second driver 102, a first modulation optical waveguide 103, a second modulation optical waveguide 104, a first differential electrode 105, and a second differential electrode 106. The first driver 101 is configured to load a first differential electrical signal on the first modulated optical waveguide 103 via the first differential electrode 105. The second driver 102 is configured to load a second differential electrical signal on the second modulated optical waveguide 104 via the second differential electrode 106. By loading differential electrical signals on the first modulated optical waveguide 103 and on the second modulated optical waveguide 104, the drive voltages loaded on the first modulated optical waveguide 103 and on the second modulated optical waveguide 104 are increased.
However, the lithium niobate modulator requires the use of different drivers to apply differential electrical signals on different modulating optical waveguides, increasing the circuit complexity and power consumption of the lithium niobate modulator.
Disclosure of Invention
The embodiment of the application provides an electro-optic modulator, an optical module and optical communication equipment, which are used for reducing the driving voltage for driving the electro-optic modulator and can also effectively reduce the complexity of a circuit and the power consumption.
In a first aspect, embodiments of the present application provide an electro-optic modulator. The electro-optic modulator comprises a power beam splitter, a first modulation optical waveguide, a second modulation optical waveguide, a power beam combiner, a first electrode, a second electrode, a third electrode and a connecting electrode. The power splitter includes a first outlet port and a second outlet port. The power combiner includes a first inlet port and a second inlet port. The first modulated optical waveguide is connected with the first output port and the first input port. The second modulation optical waveguide is connected with the second outlet port and the second inlet port. The first electrode and the second electrode are respectively positioned at two sides of the first modulation optical waveguide. The second electrode and the third electrode are respectively positioned at two sides of the second modulation optical waveguide. The second electrode is located between the first modulated optical waveguide and the second modulated optical waveguide. The connecting electrode is connected with the first electrode and the third electrode, and a gap exists between the connecting electrode and the second electrode. The connection electrode is used for sending first electric signals to the first electrode and the third electrode respectively. The second electrode is configured to transmit a second electrical signal, wherein the second electrical signal and the first electrical signal are differential electrical signals. First, the power splitter is configured to perform power splitting on an input optical carrier to obtain a first optical carrier and a second optical carrier, and input the first optical carrier and the second optical carrier to the first modulation optical waveguide and the second modulation optical waveguide, respectively. And secondly, the first modulation optical waveguide is used for modulating the differential electric signal on the first optical carrier to obtain a first optical signal and inputting the first optical signal to the power combiner. The second modulation optical waveguide is used for modulating the differential electrical signal on the second optical carrier to obtain a second optical signal and inputting the second optical signal to the power combiner. Finally, the power combiner is configured to combine the first optical signal and the second optical signal into an output optical signal. The electro-optical modulator shown in the aspect is based on two identical differential electrical signals applied to the first modulation optical waveguide and the second modulation optical waveguide to realize modulation, so that the driving voltage is effectively reduced, and the modulation efficiency is improved. And the first electrical signal and the second electrical signal are from the same electrical device. The differential electric signals can be applied to different modulation optical waveguides of the electro-optical modulator by using the same electric device, so that the circuit complexity and the power consumption of the electro-optical modulator are effectively reduced.
In an optional implementation manner, the connecting electrode is connected to both the first electrode and the third electrode, and includes: the electro-optic modulator includes a plurality of the connection electrodes. The connecting electrodes are arranged periodically, and a gap exists between two adjacent connecting electrodes. The first end of each connecting electrode is connected with the first electrode, and the second end of each connecting electrode is connected with the third electrode. In the implementation manner, the parasitic capacitance of the electro-optical modulator is effectively reduced based on the plurality of connecting electrodes which are arranged periodically and included in the electro-optical modulator.
Based on the first aspect, in an alternative implementation manner, the orthographic projection of the connection electrode on the substrate surface and the orthographic projection of the second electrode on the substrate surface intersect. The first and second modulated optical waveguides are grown on the substrate surface. In the implementation mode, the modulation efficiency is effectively improved, and the device size of the electro-optic modulator is reduced.
In an optional implementation manner, the connecting the electrode to each of the first electrode and the third electrode includes: the connecting electrode is of a flat plate structure. The first side of the connecting electrode is connected with the first electrode. The second side of the connecting electrode is connected with the third electrode. In the implementation mode, the difficulty in manufacturing the connecting electrode is effectively reduced based on the connecting electrode with the flat plate-shaped structure included in the electro-optical modulator.
In an alternative implementation manner, the orthographic projection of the second electrode on the substrate surface is located within a coverage range of the orthographic projection of the connection electrode on the substrate surface. The first and second modulated optical waveguides are grown on the substrate surface. In the implementation mode, the modulation efficiency is effectively improved, and the device size of the electro-optic modulator is reduced.
In an optional implementation manner, based on the first aspect, a gap exists between the connection electrode and the second electrode, including: the second electrode is located in a space formed between the connection electrode and the substrate surface. A gap exists between the connection electrode and the second electrode in a direction perpendicular to the surface of the substrate. In the implementation manner, the electrical isolation between the connecting electrode and the second electrode is effectively ensured.
In an optional implementation manner, based on the first aspect, a gap exists between the connection electrode and the second electrode, including: and a gap exists between the connecting electrode and the second electrode along the transmission direction of the first optical carrier wave in the first modulation optical waveguide. In the implementation manner, the electrical isolation between the connecting electrode and the second electrode is effectively ensured.
In an alternative implementation form, the electro-optic modulator further comprises a first electrical connector and a second electrical connector. The first end of the first electrical connector is connected with the electrical device. The second end of the first electrical connector is connected with the connecting electrode. The first electrical connector is for transmitting the first electrical signal from the electrical device to the connection electrode. The first end of the second electrical connector is connected with the electrical device. The second end of the second electrical connector is connected to the second electrode. The second electrical connection is for transmitting the second electrical signal from the electrical device to the second electrode. The first electrical connector and the second electrical connector are positioned on two sides of the central axis of the second electrode. In the implementation manner, the moment when the first electric signal reaches the first electrode is effectively ensured, and the moment when the first electric signal reaches the third electrode is the same as the moment when the second electric signal reaches the second electrode. The electro-optic modulator can ensure that two identical differential electrical signals are applied to the electro-optic modulator.
In a second aspect, an embodiment of the present application provides an optical module. The optical module comprises a laser and an electro-optic modulator as claimed in any one of the first aspects above connected to the laser. Wherein the laser is configured to input the input optical carrier to the electro-optic modulator. For an explanation of the beneficial effects of this aspect, please refer to the first aspect, and detailed descriptions thereof are omitted.
In a third aspect, an embodiment of the present application provides an optical communication apparatus. The optical communication device comprising a processor and an optical module as claimed in any one of the first aspects above. The processor is respectively connected with the connecting electrode and the second electrode. The processor is configured to send the first electrical signal to the connection electrode. The processor is also configured to send the second electrical signal to the second electrode. For an explanation of the beneficial effects of this aspect, please refer to the first aspect, and detailed descriptions thereof are omitted.
Based on the third aspect, in an optional implementation manner, the optical communication device further includes a driver. The driver is connected with the processor, and the connecting electrode and the second electrode are both connected. The processor is configured to send the first electrical signal to the connection electrode, and the processor is further configured to send the second electrical signal to the second electrode, including: the processor is configured to send the first electrical signal and the second electrical signal to the driver. The driver is used for transmitting the first electric signal with amplified power to the connecting electrode. The driver is further configured to transmit the second electric signal with amplified power to the second electrode.
Based on the third aspect, in an optional implementation manner, the optical communication device further includes a driver. The driver is connected with the processor, and the connecting electrode and the second electrode are both connected. The processor is configured to send the first electrical signal to the connection electrode, and the processor is further configured to send the second electrical signal to the second electrode, including: the processor is configured to send a driving electrical signal to the driver. The driver is configured to convert the driving electrical signal into the first electrical signal and the second electrical signal. The driver is used for transmitting the first electric signal with amplified power to the connecting electrode. The driver is further configured to transmit the second electric signal with amplified power to the second electrode.
Drawings
FIG. 1 is a diagram showing an example of the structure of a conventional electro-optic modulator;
fig. 2 is a diagram showing a first structural example of an optical communication device according to an embodiment of the present application;
FIG. 3 is a partially cross-sectional structure example diagram of the electro-optic modulator shown in FIG. 2;
FIG. 4 is a partial structural example diagram of the electro-optic modulator shown in FIG. 2;
FIG. 5 is a schematic diagram of a partial orthographic projection configuration of the electro-optic modulator of FIG. 2;
FIG. 6 is a partial top view exemplary structure of the electro-optic modulator shown in FIG. 2;
FIG. 7 is a graph of an electro-optic bandwidth curve versus an example;
FIG. 8 is a schematic diagram showing a partial top view of an electro-optic modulator according to an embodiment of the present application;
FIG. 9 is a diagram showing a partial structure of an electro-optical modulator according to an embodiment of the present application;
FIG. 10 is a partial front projection illustration of the electro-optic modulator shown in FIG. 9;
fig. 11 is a diagram showing a second structural example of an optical communication apparatus according to an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. It will be apparent that the described embodiments are only some, but not all, embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to fall within the scope of the application.
Fig. 2 is a diagram illustrating a first structural example of an optical communication device according to an embodiment of the present application. The optical communication device 200 may be applied to an industrial optical network, a data center network, a wavelength division multiplexing network, an optical transmission network, or the like, and is not particularly limited. The optical communication device 200 comprises a processor 201, a driver 202, a laser 203 and an electro-optic modulator 210. The electro-optic modulator 210 is a modulator that modulates based on the electro-optic effect. For example, the electro-optic modulator 210 may be a lithium niobate modulator. Wherein the processor 201, the driver 202 and the electro-optic modulator 210 are connected in sequence. The electro-optic modulator 210 is also coupled to the laser 203. The electro-optic modulator 210 is configured to receive an input optical carrier from the laser 203. The driver 202 amplifies the power of the electric signal from the processor 201, and then inputs the power-amplified electric signal to the electro-optical modulator 210. The electro-optic modulator 210 modulates the electrical signal from the driver 202 onto an input optical carrier to output a modulated output optical signal.
The electro-optical modulator 210 shown in this embodiment includes a power beam splitter 211, a first modulation optical waveguide 212, a second modulation optical waveguide 213, a power combiner 214, a first electrode 215, a second electrode 216, a third electrode 217, and a connection electrode 218. The implementation type of the electro-optical modulator shown in this embodiment may be specifically a micro-ring modulator or a mach-zehnder (MZ) modulator.
The power splitter 211 includes a first outlet port and a second outlet port. The power combiner 214 includes a first input port and a second input port. The power splitter 211 also includes a third inlet port. The power combiner 214 also includes a third output port. A third input port of the power splitter 211 is connected to a laser 302. The power splitter 211 receives the input optical carrier from the laser 302 via a third input port. A first end of the first modulating optical waveguide 212 is connected to a first output port of the power splitter 211. The first end of the second modulating optical waveguide 213 is connected to the second output port of the power splitter 211. A second end of the first modulated optical waveguide 212 is connected to a first input port of a power combiner 214. A second end of the second modulated optical waveguide 213 is connected to a second input port of the power combiner 214.
Fig. 3 is a partially cross-sectional structure example diagram of the electro-optical modulator shown in fig. 2. Fig. 4 is a partial structural example diagram of the electro-optical modulator shown in fig. 2. Wherein the cross-section 300 shown in fig. 3 is obtained by cutting the electro-optic modulator shown in fig. 3 through a cut 310. The tangential plane 310 is perpendicular to the transmission direction of the first optical carrier in the first modulated optical waveguide 212 and the transmission direction of the second optical carrier in the second modulated optical waveguide 213. The electro-optic modulator 210 includes a substrate 401 and an optical waveguide layer 402 grown on a surface of the substrate 401. In the present embodiment, lithium niobate is taken as an example of a material constituting the optical waveguide layer 402, and in other examples, silicon (Si), silicon nitride (Si 3 N 4 ) Ammonium dihydrogen phosphate (NH) 4 H 2 PO 4 ) Or an button acid file crystal, etc. constitute the optical waveguide layer 402. The first electrode 215, the second electrode 216 and the third electrode 217 are grown on the surface of the optical waveguide layer 402. Each electrode shown in the present embodiment is made of any conductive metal, for example, each electrode is made of metallic copper (Au) or metallic aluminum (Al) or the like. The substrate 401 shown in this embodiment may be referred to as a substrate, a dielectric layer, or the like, and is not particularly limited. The optical waveguide layer 402 includes a ridge optical waveguide in which is doped by a semiconductor doping process to form the first modulation optical waveguide 212 and the second modulation optical waveguide 213.
The first electrode 215 and the second electrode 216 are located on both sides of the first modulated optical waveguide 212, respectively. The second electrode 216 and the third electrode 217 are located on both sides of the second modulation optical waveguide 213, respectively. The second electrode 216 is located between the first modulation optical waveguide 212 and the second modulation optical waveguide 213. In the present embodiment, the first electrode 215, the first modulating optical waveguide 212, the second electrode 216, the second modulating optical waveguide 213, and the third electrode 217 are parallel to each other, which is not limited.
A space 403 is formed between the connection electrode 218 and the surface of the substrate 401 in this embodiment. The second electrode 216 is located within the space 403, and a gap 404 exists between the surface of the second electrode 216 facing away from the substrate 401 and the second electrode 216. Electrical isolation between the second electrode 216 and the connection electrode 218 is achieved based on the gap 404. Specifically, a gap 404 is located between the connection electrode 218 and the second electrode 216 in a direction 405 perpendicular to the surface of the substrate 401. It will be appreciated that the second electrode 216 is mounted above the second electrode 216, based on the substrate 401. The electro-optic modulator shown in this embodiment includes a plurality of connection electrodes 218. Each connection electrode 218 presents a first end and a second end along direction 411. Direction 411 is perpendicular to direction 405 and parallel to the surface of substrate 401. A first end of the connection electrode 218 is connected to the first electrode 215. The second end of the connection electrode 218 is connected to the third electrode 217.
Among the plurality of connection electrodes 218, a gap exists between two connection electrodes 218 positioned adjacent to each other. Specifically, among the plurality of connection electrodes 218, a hollowed-out gap 406 exists between two adjacent connection electrodes 218. The plurality of connection electrodes 218 in the embodiment are arranged periodically. The plurality of connection electrodes 218 are arranged periodically, which means that the shapes and sizes of the different connection electrodes 218 are the same. For example, each of the connection electrodes 218 in the embodiment has a rectangular structure, and the dimensions of the connection electrodes 218 are the same. The plurality of connection electrodes 218 being arranged periodically also means that the widths of the different gaps 406 are equal along the transmission direction 407 of the first optical carrier in the first modulated optical waveguide 212. The present embodiment does not limit the number of connection electrodes 218 included in the electro-optic modulator 210.
In the direction 407, when the length of the electro-optical modulator 210 is constant, the number of connection electrodes 218 included in the electro-optical modulator 210 is in positive correlation with the modulation bandwidth of the electro-optical modulator, and in negative correlation with the modulation efficiency of the electro-optical modulator. It will be appreciated that the greater the number of connection electrodes 218 included in the electro-optic modulator 210, the greater the modulation bandwidth of the electro-optic modulator. The fewer the number of connection electrodes 218 included in the electro-optic modulator 210, the higher the modulation efficiency of the electro-optic modulator. The width of each connection electrode 218 in direction 407 is inversely related to the modulation bandwidth of the electro-optic modulator. It will be appreciated that the narrower the width of the connection electrode 218 in the direction 407, the greater the modulation bandwidth of the electro-optic modulator.
The present embodiment may achieve impedance matching of an electro-optic modulator by adjusting at least one of the following parameters:
the length of the first electrode 215 along the direction 407, the length of the second electrode 216 along the direction 407, the length of the third electrode 217 along the direction 407, the width of the gap 406 along the direction 407, the width of the connection electrode 218 along the direction 407, the spacing between the first electrode 215 and the second electrode 216, the spacing between the second electrode 216 and the third electrode 217, the thickness of the first electrode 215, the thickness of the second electrode 216, the thickness of the third electrode 217, the spacing of the connection electrode 218 from the surface of the optical waveguide layer 402, or the length of the connection electrode 218.
Fig. 5 is a schematic diagram showing a partial orthographic projection structure of the electro-optical modulator shown in fig. 2. The connection electrode 218 has a first orthographic projection 511 on the surface of the substrate 401. The second electrode 216 has a second orthographic projection 512 on the surface of the substrate 401. The first orthographic projection 511 is a projection formed on the surface of the substrate 401 by projecting the connection electrode 218 through a projection line 510 perpendicular to the surface of the substrate 401. The second orthographic projection 512 is a projection formed by projecting the second electrode 216 through a projection line 510 perpendicular to the surface of the substrate 401 to form a surface of the substrate 401. The first orthographic projection 511 and the second orthographic projection 512 intersect. The present embodiment takes the example that the first orthographic projection 511 and the second orthographic projection 512 are perpendicular to each other. The magnitude of the included angle between the first orthographic projection 511 and the second orthographic projection 512 is not limited in this embodiment.
With continued reference to fig. 2, the electro-optic modulator 210 has a first electrical connection 501 and a second electrical connection 502. The first end of the first electrical connector 501 is a pad (pad) 503.pad 503 is coupled to a first electrical port of driver 202. A second end of the first electrical connector 501 is connected to the connection electrode 218. The first end of the second electrical connector 502 is pad 504.pad 504 is coupled to a second electrical port of driver 202. A second end of the second electrical connection 502 is connected to the second electrode 216. The first electrical port of the driver 202 sends a first electrical signal to the connection electrode 218 via the first electrical connection 501. The second electrical port of the driver 202 sends a second electrical signal to the second electrode 216 via the second electrical connection 502. The first electrical signal and the second electrical signal are differential electrical signals.
The electro-optic modulator 210 shown in this embodiment includes a plurality of connection electrodes. The second end of the first electrical connector 501 is connected to a connection electrode 218, which is closest to the power splitter 211, among the plurality of connection electrodes. To increase the modulation efficiency of the electro-optical modulator, the first electrode 215, the second electrode 216, the third electrode 217 and the connection electrode 218 are aligned at the end faces facing the power beam splitter 211.
Part of the first electrical signal is transmitted to the first electrode 215 via the connection electrode 218, and the other part of the first electrical signal is transmitted to the third electrode 217 via the connection electrode 218. The first electrical signal reaches the first modulated optical waveguide 212 at a first time. The first electrical signal reaches the second modulation optical waveguide 213 at the second time. The second electrical signal reaches the second electrode 216 at a third time. For the purpose of increasing the drive voltages applied to the first modulation optical waveguide 212 and the second modulation optical waveguide 213, the first time, the second time, and the third time are equal.
The first electrical connector 501 and the second electrical connector 502 are shown in this embodiment to be located on opposite sides of the central axis 500 of the second electrode 216. In this embodiment, the shapes and sizes of the first electrical connector 501 and the second electrical connector 502 are not limited, so long as the first time, the second time and the third time are equal. For example, the first electrical connector 501 and the second electrical connector 502 in this embodiment are symmetrically located on two sides of the central axis 500 of the second electrode 216.
The following describes a process of realizing modulation by the electro-optical modulator shown in this embodiment:
the power splitter 211 receives an input optical carrier from a laser 302. The power splitter 211 power splits the input optical carrier to obtain a first optical carrier and a second optical carrier. The power splitter 211 inputs the first optical carrier to the first modulating optical waveguide 212 via the first output port. The power splitter 211 inputs the second optical carrier to the second modulated optical waveguide 213 via a second output port.
The electro-optic modulator 210 has two identical differential electrical signals applied to the first modulation optical waveguide 212 and the second modulation optical waveguide 213. Fig. 6 is a partial top view of an exemplary structure of the electro-optic modulator shown in fig. 2. The connection electrode 218 has a first connection section 601 connected to the first electrode 215 and a second connection section 602 connected to the third electrode 217. A portion of the first electrical signal from the first electrical connection 501 is transmitted along the guide 611 of the first connection segment 601 to the first electrode 321. The first electrical signal transmitted to the first electrode 321 is transmitted along the guides 612 of the first electrode 321. Likewise, another portion of the first electrical signal from the first electrical connector 501 is transmitted along the guide 613 of the second connector segment 602 to the third electrode 217. The first electrical signal transmitted to the third electrode 217 is transmitted along the guide 614 of the third electrode 217. The second electrical signal from the second electrical connection 502 is transmitted along the guide 615 of the second electrode 216. The first electrical signal transmitted along the guide 612 and the second electrical signal transmitted along the guide 615 constitute a first path of differential electrical signals. The electric field between the first path of differential electrical signals acts on the first modulated optical waveguide 212. The refractive index of the first modulated optical waveguide 212 changes with the change of the electric field between the first path of differential electrical signals, so as to modulate the first path of differential electrical signals on the first optical carrier to obtain a modulated first optical signal. The first modulated optical waveguide 212 inputs a first optical signal to a power combiner 214. The first electrical signal transmitted along guide 614 and the second electrical signal transmitted along guide 615 constitute a second differential electrical signal. The electric field between the second differential electrical signals acts on the second modulated optical waveguide 213. The refractive index of the second modulated optical waveguide 213 changes with the change of the electric field between the second differential electrical signals, so that the second differential electrical signals are modulated on the second optical carrier to obtain a modulated second optical signal. The second modulated optical waveguide 213 inputs a second optical signal to the power combiner 214. The power combiner 214 combines the first optical signal and the second optical signal into an output optical signal. The output optical signal is output via a third output port of the power combiner 214.
The electro-optical modulator can effectively improve the modulation bandwidth. Fig. 7 is a graph of electro-optic bandwidth curves versus examples. Wherein the electro-optic bandwidth graph 700 shown in fig. 7 is an exemplary graph of an electro-optic bandwidth curve of a prior electro-optic modulator. The electro-optic bandwidth graph 710 shown in fig. 7 is an exemplary graph of the electro-optic bandwidth curve of the electro-optic modulator provided by the present embodiment. The abscissa of each electro-optic bandwidth curve represents frequency in Gigahertz (GHZ). The ordinate represents normalized response in decibels (db). The electro-optic bandwidth plot 700 includes an electro-optic bandwidth plot 701 that corresponds to a response between 0 and-3 db, which is effectively modulated. While the electro-optic bandwidth graph 710 includes an electro-optic bandwidth curve 701 corresponding to a response less than-3 db, the electro-optic modulator is unable to achieve modulation. In electro-optic bandwidth plot 700, if the response of electro-optic bandwidth plot 701 is between 0 and-3 db, the corresponding modulation frequency ranges from 0 to 10 GHZ. In the case that the modulation frequency of the electro-optical modulator is in the range of 0 to 10GHZ, the electro-optical modulator can support a scenario such as a 10 gigabit passive optical network (gigabit passive optical network, GPON). In electro-optic bandwidth plot 710, the corresponding modulation frequency may exceed 35GHz with a corresponding response between 0 and-3 db. The electro-optic modulator shown in this embodiment is sufficient to support PAM4 signaling at a single wave 100Gbps rate with modulation frequencies exceeding 35GHz. It will be appreciated that the electro-optic modulator shown in this embodiment is capable of effectively increasing the modulation bandwidth.
The electro-optical modulator shown in this embodiment is based on two identical differential electrical signals applied to the first modulation optical waveguide 212 and the second modulation optical waveguide 213 to achieve modulation. In order to achieve modulation of the target phase shift, the electro-optical modulator shown in this embodiment can effectively reduce the driving voltage and improve the modulation efficiency. The electro-optic modulator comprises a plurality of connecting electrodes which are arranged periodically, so that parasitic capacitance of the electro-optic modulator is effectively reduced. The first electrical signal and the second electrical signal shown in this embodiment are from the same driver. The differential electric signals can be applied to different modulation optical waveguides of the electro-optical modulator by using the same driver, so that the circuit complexity and the power consumption of the electro-optical modulator are effectively reduced.
Fig. 8 is a schematic diagram illustrating a partial top view structure of an electro-optical modulator according to an embodiment of the present application. The electro-optic modulator shown in fig. 8 includes a first modulating optical waveguide 801 and a second modulating optical waveguide 802. The electro-optic modulator further comprises a first electrode 804 and a second electrode 803 on opposite sides of the first modulating optical waveguide 801. The electro-optic modulator further comprises a third electrode 805 and a second electrode 803 on both sides of the second modulating optical waveguide 802. The first modulation optical waveguide 801, the second modulation optical waveguide 802, the first electrode 804, the second electrode 803, and the third electrode 805 are specifically described with reference to fig. 2 to fig. 6, and detailed descriptions thereof are omitted.
The electro-optic modulator shown in this embodiment also includes a connection electrode 806. A first end of the connection electrode 806 is connected to the first electrode 804. The second end of the connection electrode 806 is connected to the third electrode 805. The difference between the connection electrode 806 and the connection electrode shown in fig. 2 to 6 is that the positional relationship between the connection electrode 806 and the second electrode 803 shown in this embodiment is different. In this embodiment, a gap 811 exists between the connection electrode 806 and the second electrode 803 along the transmission direction of the first optical carrier in the first modulated optical waveguide 801. Electrical isolation between the connection electrode 806 and the second electrode 803 is achieved based on the gap 811. The present embodiment does not limit the height between the connection electrode 806 and the substrate surface in the direction perpendicular to the substrate surface, as long as the first modulation optical waveguide 801 and the second modulation optical waveguide 802 can pass between the connection electrode 806 and the substrate surface. For a description of the substrate, please refer to the corresponding description of fig. 4, and detailed description is omitted. The electro-optic modulator shown in this embodiment may include one or more connection electrodes 806. Optionally, the electro-optical modulator shown in this embodiment may further include one or more connection electrodes, as shown in fig. 2 to 6, disposed above the second electrode 803. The process of implementing modulation by the electro-optical modulator shown in this embodiment is described with reference to the corresponding embodiments of fig. 2 to 6, which is not described in detail.
Fig. 9 is a diagram showing a partial structure of an electro-optical modulator according to an embodiment of the present application. The electro-optic modulator shown in fig. 9 includes a first modulated optical waveguide 901 and a second modulated optical waveguide 902. A first electrode 904 and a second electrode 905 on opposite sides of the first modulated optical waveguide 901. The third electrode 906 and the second electrode 905 that are located at two sides of the second modulating optical waveguide 902 are specifically described with reference to fig. 2 to fig. 6, and detailed descriptions thereof are omitted. The connection electrode 911 in the present embodiment has a flat plate-shaped structure. The connection electrode 911 has a first side and a second side. A first side of the connection electrode 911 is connected to the first electrode 904. A second side of the connection electrode 911 is connected to the third electrode 906.
A space 913 is formed between the connection electrode 911 and the surface of the substrate 912 in a flat plate-like structure as shown in this embodiment. For the description of the substrate 912, please refer to the corresponding description of fig. 4, and detailed description is omitted. The first modulated optical waveguide 901 and the second modulated optical waveguide 902 pass through the space 913. The second electrode 905 is positioned inside the space 913. Fig. 10 is a partial front projection illustration of the electro-optic modulator shown in fig. 9. The connection electrode 911 has a third orthographic projection 1001 on the surface of the substrate 912. The second electrode 905 has a fourth orthographic projection 1002 on the surface of the substrate 912. The third orthographic projection 1001 projects the connection electrode 911 through a projection line 1010 perpendicular to the substrate surface to form a projection on the substrate surface. The fourth orthographic projection 1002 is a projection formed on the surface of the substrate by projecting the second electrode 905 through a projection line 1010 perpendicular to the surface of the substrate. The fourth orthographic projection 1002 shown in this embodiment is located within the coverage of the third orthographic projection 1001. To improve the modulation efficiency of the electro-optical modulator, this embodiment takes the alignment of the end faces of the first electrode 904, the second electrode 905, the third electrode 906, and the connection electrode 911 facing the power beam splitter as an example. It will be appreciated that in this example, the third orthographic projection 1001 and the fourth orthographic projection 1002 are aligned facing the edges of the power splitter. It should be noted that the description of the third orthographic projection 1001 and the fourth orthographic projection 1002 in this embodiment is an alternative example, and is not limited thereto. For example, in other examples, the fourth orthographic projection 1002 may protrude from the coverage of the third orthographic projection 1001. The structure of the connecting electrode shown in the electro-optical modulator in the embodiment is in a flat plate shape, so that the difficulty in manufacturing the connecting electrode is effectively reduced.
The embodiment of the application provides optical communication equipment. The structure of the optical communication apparatus can be seen from the explanation shown in fig. 2. Specifically, the driver 202 shown in fig. 2 is connected to the processor 201, to a connection electrode of the electro-optical modulator 210, and to a second electrode of the electro-optical modulator 210. The processor 201 sends a first electrical signal and a second electrical signal to the driver 202. The driver 202 sends the power amplified first electrical signal to the connection electrode of the electro-optic modulator 210. The driver 202 also sends a power amplified second electrical signal to a second electrode of the electro-optic modulator 210. Alternatively, the processor 201 sends a driving electrical signal to the driver 202. The driver 202 converts the driving electrical signal into a first electrical signal and a second electrical signal. The driver 202 sends the power amplified first electrical signal to the connection electrode of the electro-optic modulator 210. The driver 202 also sends a power amplified second electrical signal to a second electrode of the electro-optic modulator 210. The electro-optical modulator 210 is shown in any one of the embodiments of fig. 2 to 6, 8, or 9 to 10 according to the modulation process of the first electrical signal and the second electrical signal from the driver 202, and will not be described in detail.
The electro-optic modulator of this embodiment includes an optical module 210. The optical module 210 includes a laser 203 and an electro-optic modulator 210. The present embodiment is exemplified by, but not limited to, integrating the laser 203 onto the optical module 210. In other examples, the laser 203 and the optical module 210 may also be in a discrete configuration. The type of optical module 210 shown in this embodiment may be a board optical module (OBO), a near-package optical module (near package optics, NPO), or a optoco Feng Guang module (co package optics, CPO). The specific type of the optical module 210 is not limited in this embodiment.
The functions of the processor 201 shown in this embodiment may be partially or entirely implemented by hardware. The processor 201 shown in this embodiment may be one or more chips, or one or more integrated circuits. For example, the processor 201 may be one or more field-programmable gate arrays (FPGAs), application specific integrated chips (application specific integrated circuit, ASICs), system on chips (socs), central processing units (central processor unit, CPUs), network processors (network processor, NPs), digital signal processing circuits (digital signal processor, DSPs), microcontrollers (micro controller unit, MCUs), programmable controllers (programmable logic device, PLDs), or other integrated chips, or any combination of the above.
Fig. 11 is a diagram showing a second structural example of an optical communication apparatus according to an embodiment of the present application. The optical communication device 1100 shown in this embodiment includes a processor 1201 and an optical module 1110. The optical module 1110 includes a laser 1202 and an electro-optic modulator 1203 coupled to the laser 1202. For the description of the optical module 1110, please refer to the corresponding description of fig. 2, and detailed description is omitted. The processor 1201 is connected to an electro-optical modulator 1203. The processor 1201 in this embodiment is connected to the connection electrode and the second electrode of the electro-optical modulator 1203, respectively. The processor 1201 sends a first electrical signal to a connection electrode of the electro-optical modulator 1203. The processor 1201 sends a second electrical signal to a second electrode of the electro-optic modulator 1203. The first electrical signal and the second electrical signal output by the processor 1201 in this embodiment may drive the electro-optical modulator 1203. The electro-optical modulator 1203 is shown in any of the embodiments of fig. 2 to 6, 8, or 9 to 10 according to the process of modulating the first electrical signal and the second electrical signal from the processor 1201, and will not be described in detail.
The above embodiments are only for illustrating the technical solution of the present application, and not for limiting the same; although the application has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present application.
Claims (12)
1. An electro-optic modulator comprising a power beam splitter, a first modulating optical waveguide, a second modulating optical waveguide, a power combiner, a first electrode, a second electrode, a third electrode, and a connecting electrode, wherein:
the power beam splitter comprises a first outlet port and a second outlet port, the power beam combiner comprises a first inlet port and a second inlet port, the first modulation optical waveguide is connected with the first outlet port and the first inlet port, the second modulation optical waveguide is connected with the second outlet port and the second inlet port, the first electrode and the second electrode are respectively positioned at two sides of the first modulation optical waveguide, the second electrode and the third electrode are respectively positioned at two sides of the second modulation optical waveguide, the second electrode is positioned between the first modulation optical waveguide and the second modulation optical waveguide, the connection electrode is connected with the first electrode and the third electrode, and a gap exists between the connection electrode and the second electrode;
the connecting electrode is used for respectively sending first electric signals to the first electrode and the third electrode;
the second electrode is used for transmitting a second electric signal, wherein the second electric signal and the first electric signal are differential electric signals;
the power beam splitter is used for performing power beam splitting on an input optical carrier to obtain a first optical carrier and a second optical carrier and inputting the first optical carrier and the second optical carrier to the first modulation optical waveguide and the second modulation optical waveguide respectively, the first modulation optical waveguide is used for modulating the differential electrical signal on the first optical carrier to obtain a first optical signal and inputting the first optical signal to the power beam combiner, the second modulation optical waveguide is used for modulating the differential electrical signal on the second optical carrier to obtain a second optical signal and inputting the second optical signal to the power beam combiner, and the power beam combiner is used for combining the first optical signal and the second optical signal into an output optical signal.
2. An electro-optic modulator as claimed in claim 1, wherein the connection electrode is connected to both the first electrode and the third electrode, comprising:
the electro-optical modulator comprises a plurality of connecting electrodes, the connecting electrodes are arranged periodically, gaps exist between two adjacent connecting electrodes, the first end part of each connecting electrode is connected with the first electrode, and the second end part of each connecting electrode is connected with the third electrode.
3. An electro-optic modulator as claimed in claim 2, wherein the orthographic projection of the connection electrode on the substrate surface and the orthographic projection of the second electrode on the substrate surface intersect, the first and second modulating optical waveguides being grown on the substrate surface.
4. An electro-optic modulator as claimed in claim 1, wherein the connection electrode is connected to both the first electrode and the third electrode, comprising:
the connecting electrode is of a flat plate structure, a first side edge of the connecting electrode is connected with the first electrode, and a second side edge of the connecting electrode is connected with the third electrode.
5. An electro-optic modulator as claimed in claim 4, wherein the orthographic projection of the second electrode onto the substrate surface is within the coverage of the orthographic projection of the connection electrode onto the substrate surface, the first and second modulating optical waveguides being grown on the substrate surface.
6. An electro-optic modulator as claimed in any one of claims 1 to 5 wherein a gap exists between the connection electrode and the second electrode, comprising:
the second electrode is located in a space formed between the connection electrode and the substrate surface, and a gap exists between the connection electrode and the second electrode in a direction perpendicular to the substrate surface.
7. An electro-optic modulator as claimed in any one of claims 1,2 or 4 wherein a gap exists between the connection electrode and the second electrode, comprising:
and a gap exists between the connecting electrode and the second electrode along the transmission direction of the first optical carrier wave in the first modulation optical waveguide.
8. An electro-optic modulator as claimed in any one of claims 1 to 7, further comprising a first electrical connector and a second electrical connector, a first end of the first electrical connector being connected to an electrical device, a second end of the first electrical connector being connected to the connection electrode, the first electrical connector being for transmitting the first electrical signal from the electrical device to the connection electrode; the first end of the second electric connecting piece is connected with the electric device, the second end of the second electric connecting piece is connected with the second electrode, and the second electric connecting piece is used for sending the second electric signal from the electric device to the second electrode;
the first electrical connector and the second electrical connector are positioned on two sides of the central axis of the second electrode.
9. An optical module comprising a laser and an electro-optic modulator as claimed in any one of claims 1 to 8 connected to the laser; wherein the laser is configured to input the input optical carrier to the electro-optic modulator.
10. An optical communication apparatus comprising a processor and the optical module of claim 9, the processor being connected to the connection electrode and the second electrode, respectively; the processor is configured to send the first electrical signal to the connection electrode, and the processor is further configured to send the second electrical signal to the second electrode.
11. The optical communication device of claim 10, further comprising a driver coupled to the processor, the connection electrode and the second electrode; the processor is configured to send the first electrical signal to the connection electrode, and the processor is further configured to send the second electrical signal to the second electrode, including:
the processor is used for sending the first electric signal and the second electric signal to the driver, the driver is used for sending the first electric signal with amplified power to the connecting electrode, and the driver is also used for sending the second electric signal with amplified power to the second electrode.
12. The optical communication device of claim 10, further comprising a driver coupled to the processor, the connection electrode and the second electrode; the processor is configured to send the first electrical signal to the connection electrode, and the processor is further configured to send the second electrical signal to the second electrode, including:
the processor is used for sending a driving electric signal to the driver, the driver is used for converting the driving electric signal into the first electric signal and the second electric signal, the driver is used for sending the first electric signal subjected to power amplification to the connecting electrode, and the driver is also used for sending the second electric signal subjected to power amplification to the second electrode.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210600651.9A CN117200895A (en) | 2022-05-30 | 2022-05-30 | Electro-optical modulator, optical module and optical communication equipment |
| PCT/CN2023/094483 WO2023231766A1 (en) | 2022-05-30 | 2023-05-16 | Electro-optical modulator, optical module, and optical communication device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210600651.9A CN117200895A (en) | 2022-05-30 | 2022-05-30 | Electro-optical modulator, optical module and optical communication equipment |
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| CN117200895A true CN117200895A (en) | 2023-12-08 |
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| CN202210600651.9A Pending CN117200895A (en) | 2022-05-30 | 2022-05-30 | Electro-optical modulator, optical module and optical communication equipment |
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| WO (1) | WO2023231766A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US10180588B1 (en) * | 2018-07-19 | 2019-01-15 | Finisar Corporation | Reduced-cross-talk coherent optical transmitter |
| JP7283180B2 (en) * | 2019-03-29 | 2023-05-30 | 住友大阪セメント株式会社 | optical modulator |
| JP2023527091A (en) * | 2020-05-30 | 2023-06-26 | 華為技術有限公司 | Electro-optical modulators, optical chips and integrated chips |
| CN112114446B (en) * | 2020-09-30 | 2023-09-05 | 武汉光迅科技股份有限公司 | Silicon optical modulator, optical transmitting device and optical signal modulation method |
| CN112764246B (en) * | 2021-01-27 | 2022-07-19 | 浙江大学 | Thin-film lithium niobate electro-optical modulator and preparation method thereof |
| CN113325612A (en) * | 2021-08-04 | 2021-08-31 | 江苏铌奥光电科技有限公司 | Thin film lithium niobate electro-optic modulator and preparation method thereof |
| CN114019703A (en) * | 2021-11-22 | 2022-02-08 | 东南大学 | Thin-film lithium niobate double-parallel electro-optical modulator integrated chip |
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